JP3716504B2 - Method and apparatus for manufacturing microstructure - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method and apparatus for manufacturing a microstructure applied to, for example, ultra-precise machine parts such as nozzles and microlenses of inkjet printers, micromachines, and the like. a manufacturing method and apparatus for precise microstructure.
[0002]
[Prior art]
In precision mechanical mechanisms, precision optical instruments, precision electronic devices, etc., for example, a structure (hereinafter referred to as a “microstructure”) that is microstructured to a size of several microns to several tens of microns, for example, is a sensor element. , Actuator elements, fluid devices or electronic components, microlens arrays for optical devices, etc. This microstructure is being manufactured in small size and high precision with the development of precision molding technology and mold processing technology, and is also used for manufacturing by transfer molding technology using precision molds with good mass productivity. Yes.
[0003]
As a method for manufacturing such a microstructure, the following methods are conventionally known.
(1) Method of cutting a total diamond bit
(2) Method by precision machining
(3) Method by additional structuring such as physical or chemical precipitation from the vapor phase
(4) Method by removing structure by laser processing or etching processing etc.
As a method for manufacturing a microstructure by cutting a general diamond tool (1), there is one disclosed in, for example, JP-A-2-205401. This manufacturing method is to manufacture a microstructure having a fine rectangular groove with a fine total diamond bit.
[0005]
As a method for manufacturing a microstructure by precision machining or the like of the above (2), (3), and (4), for example, there is one disclosed in JP-A-6-320550. In this manufacturing method, a molding insert is manufactured by precision machining or the like, and a microstructure is manufactured by cast molding, reaction injection molding, injection molding, or the like using this as a mold.
[0006]
The methods (1) and (4) are suitable for precise structures, the method (2) is suitable for structures having curved surfaces, and the method (3) is suitable for fine structures. The above method (1) is difficult to make a diamond bit with a complicated shape, so it is difficult to process a complicated and fine shape.The methods (3) and (4) Direction control is difficult. On the other hand, since the method (2) can process a three-dimensional shape by controlling the position of the processing tool in three dimensions, it has a three-dimensional curved surface shape and is a fine and precise microstructure. The method using precision machining (2) above is considered the most appropriate for the production of the above.
[0007]
On the other hand, in order to manufacture a fine and precise microstructure having a three-dimensional curved surface shape by precision machining, it is necessary to reduce the size and accuracy of the processing tool.
[0008]
Manufacturing a machining tool that is a high-hardness material using a known lathe or milling machine is difficult to align the axis when chucking the machining tool. It is difficult to manufacture and causes tool breakage.
[0009]
However, in recent years, a technique for producing a micro-machining tool by the wire electric discharge grinding method has been published in the literature “Research Cooperation Report on Micromachining Technology, February 1995, P37-P49: Japan Society for Precision Engineering” It is disclosed in the “Industry-University Joint Research Council”. According to this method, since the minute tool is formed in a state of being incorporated into the machining axis of the machining apparatus, a machining tool having a minute dimension of about several tens of μm can be obtained by avoiding the occurrence of axial misalignment when the machining tool is mounted. It has become possible.
[0010]
[Problems to be solved by the invention]
However, according to the conventional microstructure manufacturing method by precision machining (2) above, it is difficult to improve the strength of the tool as the processing tool is miniaturized. There's a problem.
[0011]
Therefore, the object of the present invention is that it can be manufactured without causing damage to the processing tool, has a three-dimensional curved surface shape, is finer and more precise, and is easy to handle by preventing deformation, scratches, etc. in use. It is an object of the present invention to provide a method and apparatus for manufacturing a microstructure having an excellent structure.
[0013]
[ Means for Solving the Problems ]
In order to achieve the above-mentioned object, the present invention provides a microstructure manufacturing method in which a microstructure is formed by performing a process such as cutting and polishing on a reactive curable material that is cured in accordance with a predetermined physical treatment. The semi-cured hardness of the reaction curable material is controlled by irradiating an integrated light amount corresponding to the strength of the processing tool, and the reaction curable material is processed in a semi-cured state by the processing tool to form a semi-cured microstructure. There is provided a method for manufacturing a microstructure, comprising forming a body and subjecting the semi-cured microstructure to a predetermined physical treatment to form a cured microstructure.
According to the above configuration, the processing tool can be prevented from being damaged by forming the semi-cured microstructure by processing in a semi-cured state of the reaction curable material. After processing, the semi-cured microstructure is subjected to a predetermined physical treatment to form a cured microstructure, thereby preventing deformation, scratches, and the like during use.
[0014]
In order to achieve the above object, the present invention provides a means for controlling the hardness of semi-curing in a reactive curable material by irradiating an integrated amount of light according to the strength of the processing tool, and the reactive curable material as the processing tool. A microstructure having processing means for forming a semi-cured microstructure by processing in a semi-cured state by means of, and curing means for curing the semi-cured microstructure to form a cured microstructure A manufacturing apparatus is provided.
According to the above configuration, the processing means processes the semi-cured state of the reactive curable material to form the semi-cured microstructure, and thus it is possible to prevent the processing tool from being damaged. After processing, the semi-cured microstructure is cured by a curing means to form a cured microstructure, thereby preventing deformation, scratches, etc. during use.
[0015]
In order to achieve the above object, the present invention controls the semi-cured hardness of the reactive curable material by irradiating an integrated light amount corresponding to the strength of the processing tool, and the reactive curable material is controlled by the processing tool. processed in a semi-cured state to form a semi-cured microstructure, wherein the semi-cured microstructure by performing predetermined physical treatment to form the hardened microstructure, complementary inner surface and said curing microstructure A mold having a shape is formed by an electroforming method, and a microstructure having the same structure as the cured microstructure is formed by injection molding, cast molding, press molding, or the like using the mold. A method for manufacturing a microstructure is provided.
According to the above configuration, after forming the cured microstructure, a mold having an inner shape complementary to the cured microstructure is formed by electroforming, and the cured microstructure is formed by molding using the mold. To form a microstructure having the same structure. Thereby, it is possible to mass-produce a finer and more precise microstructure having a three-dimensional curved surface shape.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a configuration diagram showing a three-dimensional processing machine to which a manufacturing apparatus according to an embodiment of the present invention is applied.
This three-dimensional processing machine 1 is provided with a surface plate 2, a column 3 standing behind the surface plate 2, and a surface plate 2, and the workpiece 4 is moved in the horizontal X-axis and Y-axis directions. An XY-axis table 5 comprising an X-axis table 5a and a Y-axis table 5b to be moved; a Z-axis table 7 that supports the machining tool 6 in a rotatable manner and moves in the vertical direction (Z-axis direction) with respect to the column 3; Ultraviolet over the entire upper surface of the workpiece 4 placed on the Y-axis table 5b and the fine tool production device 8 for producing a fine tool (see FIG. 5 (b)) 6A at the tip of the machining tool 6. A first ultraviolet irradiation light source (see FIG. 5 (d)) 13 that irradiates 13A, and a second ultraviolet ray that irradiates the workpiece 9 placed on the Y-axis table 5b with spot ultraviolet rays 9A. Irradiation light source 9, operation unit 10 equipped with various mode selection keys, etc. And a control unit 11 for controlling based on each unit of the machine 1 of the operation of the operation unit 10.
[0017]
The workpiece 4 is made of a reactive curable material that cures according to a predetermined physical treatment. Examples of such a reaction curable material include a reaction curable resin that cures according to the amount of light irradiation, a reaction that cures according to heating, humidification, mixing of the main agent and curing agent (primer curing), etc. other than light irradiation. There is a curable resin. Examples of the reaction curable resin that cures according to the amount of light irradiation include acrylic ultraviolet curable resins, and examples of the heat curable material include acrylic resin, urethane rubber, and epoxy resin.
[0018]
The processing tool 6 is made of, for example, a tungsten carbide cemented carbide having a conductivity of 1 mm in diameter.
[0019]
The second ultraviolet irradiation light source 9 includes a flexible guide 9B that guides the ultraviolet rays from the light source 9 and irradiates the ultraviolet rays 9A in a spot manner from the tip, and connects the tip portion of the guide 9B and the Z-axis table 7 by a flexible joint 9C. The leading end of the guide 9B moves up and down following the up and down movement of the Z-axis table 7.
[0020]
The operation unit 10 is for producing a microstructure by processing the workpiece 4 and a fine tool production mode selection key for selecting a fine tool production mode for producing the fine tool 6A at the tip of the machining tool 6. And a microstructure manufacturing mode selection key for selecting the microstructure manufacturing mode.
[0021]
The control unit 11 includes a CPU, a ROM, a RAM, and the like, and executes a mode selected by an operator's operation on the operation unit 10. When the fine tool production mode is selected, the fine tool production mode is selected. When the microstructure manufacturing mode is selected, the microstructure manufacturing mode is executed. The ROM of the control unit 11 stores a program for the CPU to execute each of the above modes, and the RAM stores processing data necessary for manufacturing the micro tool 6A and a micro structure. Necessary 3D machining data is stored.
[0022]
FIG. 2 is a side view of the Z-axis table 7.
A support member 71 that supports a motor 70 whose output shaft 70a rotates at, for example, 7000 rpm is attached to the Z-axis table 7, and a tool holder 72 that holds the processing tool 6 at its lower end can be rotated on the support member 71. A ceramic holder 73 is attached. Further, a steel ball 74 that makes point contact is provided between the upper end surface of the tool holder 72 and the support member 71 that faces the upper end surface of the tool holder 72. A pulley 75A is attached to an intermediate portion of the tool holder 72, and the rotational torque of the motor 70 is set between the pulley 75A of the tool holder 72 and the pulley 75B attached to the output shaft 70a of the motor 70. A round belt 76 for transmitting to is stretched. In addition, by providing a height difference between the pulleys 75A and 75B as shown in FIG. 2, a force that rises when the tool holder 72 is rotated by driving the motor 70 is generated to suppress vertical vibrations. The processing accuracy in the vertical direction of the workpiece 4 is improved.
[0023]
FIG. 3 is a perspective view showing a main part of the fine tool manufacturing apparatus 8.
The fine tool manufacturing apparatus 8 is configured to discharge-process the processing tool 6 by a WEDG (Wire Electrodischarge Grinding, wire electric discharge grinding) method, and to manufacture a fine tool 6A at the tip. That is, the fine tool manufacturing apparatus 8 includes a wire guide 80, a wire guide moving unit (not shown) that moves the wire guide 80 in the X direction, and a wire electrode supply unit (not shown) that supplies the wire electrode 81 along the wire guide 80. And a micro electric discharge machining power source 82 for applying a voltage to the machining tool 6 and the wire electrode 81, and an electric discharge machining liquid supply unit (not shown) for supplying the electric discharge machining liquid 83 from the nozzle 84. While the electric discharge machining fluid 83 is always supplied for removal and the wire electrode 81 is also supplied, an electric discharge is generated between the machining tool 6 and the wire electrode 81 to cause the machining tool 6 to be subjected to electric discharge machining, thereby providing a fine tool 6A. Is supposed to be made.
[0024]
The wire electrode 81 is made of a material having a diameter of about 100 μm and having heat resistance such as tungsten and cemented carbide, which is advantageous in terms of electrode consumption.
[0025]
Next, a method for manufacturing a microstructure according to the first embodiment of the present invention will be described with reference to FIGS. Here, a case where an acrylic ultraviolet curable resin that is cured by irradiation of ultraviolet rays is used as the reaction curable material constituting the workpiece 4 will be described.
[0026]
FIG. 4 is a diagram showing the characteristics of the ultraviolet curable resin, and FIG. 4 (a) is a diagram showing the relationship between the integrated light amount irradiated to the ultraviolet curable resin and the hardness of the surface of the ultraviolet curable resin. FIG. (B) is a diagram showing the relationship between the integrated light amount irradiated to the resin and the curing shrinkage rate of the resin. In FIG. 4, reference numeral 40 denotes a first region (for example, 1.5 to 3 J / cm ² ) as a semi-cured region in which the processing resistance is reduced, and reference numeral 41 is required when an ultraviolet curable resin is used. A second region that can be provided with mechanical strength, such as a fully cured region (eg, 4 J / cm ² or more) is shown. A certain margin is provided between the first area 40 and the second area 41.
[0027]
(1) Production of the fine tool 6A First, for example, a single-edged micro end mill is produced as the fine tool 6A at the tip of the processing tool 6.
[0028]
FIGS. 5A and 5B are schematic views for explaining a process of producing a single-edged micro end mill (6A) at the tip of the processing tool 6. FIG.
The operator presses the fine tool production mode selection key of the operation unit 10. Based on the pressing of the micro tool manufacturing mode selection key, the control unit 11 stores the motor 70, the Z-axis table 7 and the micro tool manufacturing apparatus 8 based on the processing data necessary for manufacturing the micro tool 6A stored in the RAM. And the fine tool manufacturing mode is executed as described below.
[0029]
That is, the control unit 11 gradually lowers the Z-axis table 7 while driving the motor 70. When the output shaft 70a rotates by driving the motor 70, the rotational torque from the motor 70 is transmitted to the tool holder 72 via the pulley 75B, the round belt 76, and the pulley 75A, and the tool holder 72 rotates at high speed. Further, the tool holder 72 moves downward as the Z-axis table 7 descends. Accordingly, the machining tool 6 held by the tool holder 72 gradually descends while rotating as shown in FIG.
[0030]
Further, as shown in FIG. 5 (a), the control unit 11 performs electric discharge machining of the machining tool 6 by the fine tool manufacturing apparatus 8 at the same time, and cuts the tip of the machining tool 6 to a desired diameter. That is, the wire guide moving unit moves the wire guide 80 to the machining tool 6 side and applies the electric discharge machining liquid 83 from the electric discharge machining liquid supply unit to the machining tool 6 through the nozzle 84 while moving the wire electrode 81 from the wire electrode supply unit. While being continuously supplied to the electric discharge machining area along the wire guide 80, an electric discharge is generated between the machining tool 6 and the wire electrode 81 by the micro electric discharge machining power source 82, and the electric discharge machining of the machining tool 6 is performed. By this electric discharge machining, the tip of the machining tool 6 is thinned to a desired diameter, for example, 25 μm.
[0031]
When the tip of the machining tool 6 is machined to a desired diameter, the control unit 10 stops driving the motor 70 to stop the rotation of the machining tool 6 as shown in FIG. 7 is once returned to the upper start position, and then gradually lowered again, and the machining tool 6 is subjected to electric discharge machining by the fine tool manufacturing apparatus 8, and the side surface of the tip portion of the machining tool 6 is cut. In other words, the wire guide 80 is further moved toward the machining tool 6, and the machining tool 6 is continuously supplied along the wire guide 80 to the electric discharge machining region while the electric discharge machining liquid 83 is applied to the machining tool 6. An electric discharge is generated between the wire tool 81 and the wire electrode 81, and the electric discharge machining of the machining tool 6 is performed. By this electric discharge machining, the side surface of the wire electrode 81 is cut to a width of 12.5 μm, and a single-edged micro end mill is produced as a fine tool 6A at the tip of the machining tool 6.
[0032]
(2) Fabrication of microstructure with micro tool 6A FIGS. 5C and 5D are diagrams showing a process for fabricating a microstructure from the workpiece 4. FIG.
As shown in FIG. 5 (c), the operator places the frame member 12 on the Y-axis table 5b, and injects the liquid ultraviolet curable resin 4A before irradiation with ultraviolet light into the frame member 12. Subsequently, as shown in FIG. 5 (d), the entire upper surface of the ultraviolet curable resin 4A is irradiated (primary irradiation) from the first ultraviolet irradiation light source 13. Here, for example, the ultraviolet light 9A having an integrated light quantity of ² J / cm ² belonging to the first region 40 in FIG. 4A is irradiated, the ultraviolet curable resin 4A is made into a semi-cured state, and the frame member 11 is removed.
[0033]
Next, in order to fabricate the microstructure by processing the semi-cured ultraviolet curable resin 4A with the micro end mill (6A) that has already been fabricated at the tip portion of the processing tool 6, the operator creates the microstructure of the operation unit 10. Press the production mode selection key. The control unit 11 executes the microstructure manufacturing mode based on pressing of the microstructure manufacturing mode selection key.
[0034]
That is, the control unit 11 drives the motor 70 to rotate the processing tool 6 and stores the XY table 5 and the Z axis based on the three-dimensional processing data necessary for manufacturing the microstructure stored in the RAM. The movement control of the table 7 is performed, and the processing tool 6 is moved three-dimensionally with respect to the semi-cured ultraviolet curable resin 4A. At this time, the control unit 11 controls the movement of the machining tool 6 in consideration of the shrinkage rate shown in FIG. For example, in the case of groove processing, the groove width is processed to be larger in consideration of later shrinkage. Note that the three-dimensional machining data stored in the RAM may be data that already considers the shrinkage rate. The control unit 11 cuts the ultraviolet curable resin 4A with a micro end mill (6A) at the tip of the processing tool 6 to form a microstructure, and for example, integrates the region from the ultraviolet irradiation unit 9 into the region where the formation of the microstructure has been completed. The ultraviolet rays 9A having a light amount of ² J / cm ² are sequentially irradiated in a spot manner (secondary irradiation), and the total light amount of ² J / cm ² in the primary irradiation in the region where the formation of the microstructure has been completed The UV curable resin 4A is completely cured so that the integrated light quantity (4 J / cm ² ) reaches the second region 41 shown in FIG. 4A, has a three-dimensional curved surface shape, and is fine and precise. A perfect microstructure.
[0035]
6 and 7 are views showing an example of the microstructure manufactured in this way.
FIG. 6 is a perspective view of a main part showing a microstructure constituting an ink jet nozzle used in an ink jet printer. In this microstructure 42, grooves 42a having a width of 30 μm are formed at a pitch of 42 μm.
[0036]
FIG. 7 is a cross-sectional view of a main part of a microlens used for an optical waveguide. In this microstructure 43, lenses 43a having a diameter of about 30 μm are arranged in an array on the surface on which the optical fiber array 43b is arranged.
[0037]
Further, as an example of the microstructure manufactured by the three-dimensional processing machine 1, there can be mentioned an array of micromirrors having a concave shape with a diameter of about 30 μm.
[0038]
According to the manufacturing method of the microstructure according to the first embodiment described above, the microstructure is obtained by performing the three-dimensional movement control with respect to the processing tool 6 with the UV curable resin 4A in a semi-cured state with a low processing resistance. Therefore, a finer and more precise microstructure having a three-dimensional curved surface shape can be obtained without causing damage to the fine tool 6A. Further, by curing the ultraviolet curable resin 4A after processing, a predetermined mechanical strength can be imparted, and in this way, deformation, scratches, etc. can be prevented and excellent handling can be achieved.
In addition, since the part 4 is immediately cured while being cut with the workpiece 4 in a semi-cured state, the manufacturing time of the microstructure can be shortened and unnecessary deformation can be prevented.
Further, since the hardness of the workpiece 4 can be arbitrarily controlled by controlling the integrated light amount of the ultraviolet light 9A, the processing tool 4 irradiates the integrated light amount according to the strength of the processing tool. The hardness can be such that it does not break.
[0039]
Next, a method for manufacturing a microstructure according to the second embodiment of the present invention will be described with reference to FIGS. 8 (a) to 8 (h).
First, as in the first embodiment, as shown in FIG. 8 (a), a semi-cured reaction curable material, for example, an ultraviolet curable resin 4A is processed with a fine tool 6A to obtain a microstructure. Thereafter, as shown in FIG. 8B, the ultraviolet ray curable resin 4A, which is a semi-cured microstructure, is irradiated with ultraviolet rays 9A and cured. Next, as shown in FIG. 8C, the cured ultraviolet curable resin 4A is fixed on the jig 100 made of metal by the conductive adhesive 101. Subsequently, as shown in FIG. 8D, a conductive thin film 102 is formed on the surface of the ultraviolet curable resin 4A by a vapor deposition process or the like. Next, the ultraviolet curable resin 4A having the conductive thin film 102 formed on the surface thereof is immersed in a Ni solution, and a direct current voltage is applied between the jig 100 and the Ni solution, as shown in FIG. 8 (e). An Ni layer 103 having a thickness of about 5 mm to 1 cm is formed on the surface of the curable resin 4A. Next, as shown in FIG. 8 (f), the jig 100 is attached to a processing machine, the outer shape of the Ni layer 103 is precisely processed, and the upper die 104 having an inner surface shape 104a complementary to the ultraviolet curable resin 4A. Get. Subsequently, as shown in FIG. 8 (g), the upper mold 104 is removed from the ultraviolet curable resin 4A. Finally, as shown in FIG. 8 (h), an upper mold mold 105 incorporating the upper mold 104 and a lower mold mold mold 106 in which the concave portions 106a, the flow paths 106b and the like are processed are combined, and injection molding is performed. Thus, the flowable resin is poured into the space 108 between the upper mold die 105 and the lower mold die 106 from the nozzle 107, and the microstructures are manufactured one after another.
[0040]
According to the manufacturing method according to the second embodiment, it is possible to easily mass-produce a finer and more precise microstructure having a three-dimensional curved surface shape.
Even if the reactive curable material is a resin, a microstructure made of metal can be obtained.
[0041]
In addition to the above Ni, copper, iron, etc. can be used as the electroformed metal. In addition to the injection molding, the molding method may be cast molding, press molding, or the like. The injection molding is excellent in mass productivity, and the cast molding is excellent in high speed. Moreover, according to press molding, it becomes possible to form a microstructure in a necessary portion.
[0042]
In addition, this invention is not limited to the said embodiment, Various embodiment is possible.
For example, in the above embodiment, the case where the workpiece 4 is cut has been described. However, the microstructure may be manufactured by polishing after cutting, or the microstructure may be manufactured only by polishing. The microstructure may be manufactured by processes other than cutting and polishing.
Further, in the above embodiment, the ultraviolet curable resin 4A is cured after processing, but a region that is not processed may be previously cured using a mask or the like before processing. Thereby, an unnecessary deformation | transformation can be prevented more.
Alternatively, the entire structure may be cured after the microstructure is completely formed in a semi-cured state.
[0043]
【The invention's effect】
As described above, according to the present invention, breakage of a processing tool can be prevented by processing a reaction curable material in a semi-cured state, that is, in a state having a low processing resistance to form a microstructure.
Therefore, a fine tool can be used, and by performing three-dimensional movement control on the fine tool, it is possible to manufacture a finer and more precise microstructure having a three-dimensional curved surface shape.
In addition, after processing, the reaction curable material is subjected to physical treatment so as to have necessary mechanical strength, so that deformation, scratches and the like are prevented during use, and the handling property is excellent.
[Brief description of the drawings]
FIG. 1 is a structural view showing a manufacturing apparatus according to the present invention. FIG. 2 is a side view of a Z-axis table according to the present invention. FIG. 3 is a perspective view showing a main part of a fine tool manufacturing apparatus according to the present invention. FIG. 6 is a diagram showing the characteristics of an acrylic UV curable resin constituting the workpiece according to the present invention, in which (a) shows the relationship between the integrated light quantity and the hardness, and (b) shows the integrated light quantity. FIG. 5 is a diagram showing a manufacturing method according to the first embodiment of the present invention, and FIGS. 5 (a) and 5 (b) show a single blade at the tip of a processing tool. FIG. 6C is a schematic diagram for explaining a process for producing a micro end mill, and FIGS. 6C and 6D are diagrams showing a process for producing a microstructure from a workpiece. FIG. 6 is a first embodiment of the present invention. FIG. 7 is a perspective view of a main part showing a microstructure obtained by the manufacturing method according to the embodiment. FIG. 7 shows a microstructure obtained by the manufacturing method according to the first embodiment of the invention. Cross-sectional view showing the forming member 8 FIG (a) to (h) Figure [EXPLANATION OF SYMBOLS] showing a manufacturing method according to a second embodiment of the present invention
DESCRIPTION OF SYMBOLS 1 3D processing machine 2 Surface plate 3 Column 4 Work material 4A Ultraviolet curable resin 5 XY axis table 5a X axis table 5b Y axis table 6 Processing tool 6A Fine tool 7 Z axis table 8 Fine tool preparation device 9 2nd Ultraviolet irradiation light source 9A Ultraviolet light 9B Flexible guide 9C Flexible joint 10 Operation unit 11 Control unit 12 Frame member 13 First ultraviolet irradiation light source 40 Semi-cured region 41 Completely cured region 42, 43 Microstructure 42a Groove 43a Lens 43b Optical fiber array 70a Output Shaft 71 Support member 72 Tool holder 73 Ceramic holder 74 Steel balls 75A, 75B Pulley 76 Round belt 80 Wire guide 81 Wire electrode 82 Micro-discharge machining power supply 83 Electric discharge machining fluid 84, 107 Nozzle 100 Jig 101 Conductive adhesive 102 Conductivity Thin film 103 on Ni layer 104 Mold 104a Internal shape 105 Mold upper mold 106a Recess 106b Flow path 106 Mold lower mold 108 Space

Claims (15)

In a manufacturing method of a microstructure that forms a microstructure by performing processing such as cutting and polishing on a reaction curable material that is cured according to a predetermined physical treatment,
The semi-cured hardness in the reaction curable material is controlled by irradiating an integrated light amount corresponding to the strength of the processing tool, and the reaction curable material is processed in a semi-cured state by the processing tool. And forming a cured microstructure by applying a predetermined physical treatment to the semi-cured microstructure. In a manufacturing method of a microstructure that forms a microstructure by performing processing such as cutting and polishing on a reaction curable material that is cured according to a predetermined physical treatment,
A fine tool corresponding to the size of the microstructure is prepared, and the semi-cured hardness of the reaction curable material is controlled by irradiating an integrated light amount according to the strength of the fine tool, and the reaction is performed by the fine tool. A micro structure characterized in that a semi-cured microstructure is formed by processing a curable material in a semi-cured state, and a predetermined physical treatment is applied to the semi-cured microstructure to form a cured microstructure. Manufacturing method. The semi-cured microstructure is formed by subjecting the uncured reactive curable material to a predetermined physical treatment to form the semi-cured reactive curable material, and processing the semi-cured reactive curable material. The method for producing a microstructure according to claim 1 or 2, wherein The method of manufacturing a microstructure according to claim 1 or 2 , wherein the formation of the cured microstructure is sequentially performed from a region where the formation of the semi-cured microstructure is completed. The method of manufacturing a microstructure according to claim 1 or 2 , wherein the formation of the cured microstructure is performed over the entire region after the formation of the semi-cured microstructure is completed. Wherein the predetermined physical treatment, light irradiation, heating, humidifying and a manufacturing method according to claim 1 or 2 microstructure according at least one of the processing of the primer curing. The method of manufacturing a microstructure according to claim 2 , wherein the preparation of the fine tool is performed by a wire electric discharge grinding method. The semi-cured hardness in the reaction curable material is controlled by irradiating an integrated light amount according to the strength of the processing tool, and the reaction curable material is processed in a semi-cured state by the processing tool to form a semi-cured microstructure. formed, the semi-cured microstructure by performing predetermined physical treatment to form the hardened microstructure, a mold having a complementary inner surface shape and the cured microstructure formed by electroforming, A microstructure manufacturing method, wherein a microstructure having the same structure as the cured microstructure is formed by injection molding, cast molding, press molding or the like using the mold. Means for controlling the hardness of semi-curing in the reaction curable material by irradiating an integrated light amount according to the strength of the processing tool;
Processing means for processing a reaction curable material in a semi-cured state by the processing tool to form a semi-cured microstructure;
A manufacturing apparatus for a microstructure, comprising: a curing unit that cures the semi-cured microstructure to form a cured microstructure. Tool production means for producing a fine tool;
Means for controlling the hardness of semi-curing in the reaction curable material by irradiating an integrated light amount according to the strength of the fine tool;
Processing means for processing the reaction curable material in a semi-cured state by the fine tool to form a semi-cured microstructure,
A manufacturing apparatus for a microstructure, comprising: a curing unit that cures the semi-cured microstructure to form a cured microstructure. The microstructure manufacturing apparatus according to claim 9 or 10 , wherein the reaction-curable material in the semi-cured state is formed by subjecting the uncured reaction-curable material to a predetermined physical treatment. The curing means, the manufacturing system for a microstructure according to claim 9 or 10 wherein the formation of the semi-cured microstructure is cured in sequence from finished area. The curing means, the manufacturing apparatus according to claim 9 or 10 microstructure according forming a semi-cured microstructure is cured over the entire region from the end of all. 11. The microstructure manufacturing apparatus according to claim 9 or 10 , wherein the curing means is cured by applying at least one of light irradiation, heating, humidification, and primer curing to the semi-cured microstructure. 11. The microstructure manufacturing apparatus according to claim 10 , wherein the tool manufacturing means manufactures the micro tool by a wire electric discharge grinding method.

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