CN102275021B - Device and method for machining high pressure electric spark beam capable of rotating workpiece - Google Patents

Device and method for machining high pressure electric spark beam capable of rotating workpiece Download PDF

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Publication number
CN102275021B
CN102275021B CN201110205337.2A CN201110205337A CN102275021B CN 102275021 B CN102275021 B CN 102275021B CN 201110205337 A CN201110205337 A CN 201110205337A CN 102275021 B CN102275021 B CN 102275021B
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electrode
electric spark
voltage electric
machining
angle
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CN102275021A (en
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曹凤国
黄建宇
胡绛梅
张建东
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Beijing Dimeng Jiyi Superhard Material Technology Co ltd
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Beijing Dimeng Jiyi Superhard Material Technology Co ltd
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Abstract

The invention discloses a device and a method for machining a high pressure electric spark beam capable of rotating a workpiece. The machining device comprises a high pressure electric spark beam generator, a first electrode, a second electrode, a rotary working table mechanism, a high pressure electric spark beam position adjustment mechanism and a high pressure electric spark beam angle adjustment mechanism, wherein the rotary working table mechanism provides a rotary working table for the workpiece to be machined; the rotary working table is positioned between the first electrode and the second electrode; the high pressure electric spark beam position adjustment mechanism comprises a beam position adjustment handle, a framework support plate and an electrode support framework; the second electrode is arranged at one end of the beam position adjustment handle; the high pressure electric spark beam angle adjustment mechanism comprises a locking handle, an adjustable electrode angle plate and a positioning shaft; and the first electrode is fixed on the adjustable electrode angle plate. By using the device and the method, the surface quality of an inner hole of the workpiece can be improved, the machining efficiency can be improved and the operation difficulty can be reduced.

Description

High-voltage electric spark beam machining device and method for workpiece rotation
Technical Field
The invention relates to a high-voltage electric spark beam machining device and a high-voltage electric spark beam machining method, in particular to a high-voltage electric spark beam machining device for realizing workpiece rotation through a rotary workbench, and also relates to a method for realizing finishing machining by using the device, belonging to the technical field of electric machining.
Background
In recent years, with the rapid development of the integrated circuit industry, the demand for various diamond micro-porous molds has been on the rise. However, the difficulty of processing the diamond microporous mold is very high, for example, the inner hole pattern of the diamond microporous mold consists of 6 regions with different angles of an outlet, an inverted cone, compression, lubrication, an inlet and a sizing with an angle of 0 degree, and the minimum pore diameter of the microporous mold is only 0.005 mm. For the micropore mould with the pre-hole aperture smaller than 0.003mm, the conventional processing methods such as ultrasonic processing, linear polishing processing and the like are used for processing, tools which are finer than the inner hole of the diamond micropore mould are required to be applied, and the implementation difficulty is very large and can hardly be finished.
In the chinese invention patent application with patent application number 200810030300.9, a polishing method of diamond rectangular micropore mold die hole is disclosed, the basic concept is: the die is clamped in a clamp matched with the die, the position direction of the die in the clamp is adjustable, the polishing narrow belt reciprocates up and down to polish one group of opposite sides of a die hole of the die one by one, then the die rotates 90 degrees, the polishing narrow belt polishes the other group of opposite sides of the die hole, and the like, so that the whole periphery in the die hole can be polished. The polishing method can polish the rectangular micropores, can grind the long sides and the wide sides of the rectangular die holes, and is beneficial to maintaining the shapes of the holes; the polishing narrow band can not be twisted and broken in the polishing process, and the polishing efficiency is high.
Due to diligence and frugal research, etc. in the research on artificial single crystal diamond laser micropore processing technology (loaded in diamond and abrasive tool engineering 2009, 2 nd) pointed out that the traditional laser drilling method of the artificial single crystal diamond adopts a profile method. A disadvantage of this method is that the more material is stripped closer to the center of the hole, the more precise hole patterns are difficult to obtain. On the basis of theory and practice, the paper provides a novel laser numerical control punching self-adaptive model. In the compression area of the die, the uniform removal of material is realized by controlling the rotating speed of the workpiece, and the laser pulse energy is reduced along with the reduction of the aperture, so that the hole pattern precision is improved.
On the other hand, after the 50 s of the 20 th century, electric processing methods such as electron beam processing, ion beam processing, and laser processing have been developed in succession. These electromachining methods do not use a forming tool, but use a high-density energy beam to process, and are particularly suitable for processing high-hardness materials and special precise and fine parts with complex shapes.
Fig. 1 shows the basic principle of a high-voltage spark beam. The high-voltage electric spark beam is generated by adding high-frequency oscillating voltage (generally more than 3000V) to two electrodes which are at a certain distance from each other and breaking down air. As shown in fig. 2, the whole spark beam is sequentially called as front end, middle section and tail end. The high-voltage electric spark beam passes through the inner hole of the die to carry out finishing machining, and the manufacturing and adjustment of a tiny and high-precision tool are not required to be considered, so the high-voltage electric spark beam machining is the most convenient and feasible and effective machining method for finishing the hole shape and the hole diameter of the microporous diamond die and improving the finish degree of the inner hole.
A typical prior art high voltage spark beam machining apparatus is shown in fig. 3, in which a workpiece is bonded to a small pallet that can float on a large pallet. When a high-voltage spark beam passes through an inner hole of a workpiece to be machined, the workpiece is still, the position of an electrode is relatively fixed, the machining is controlled by adjusting the output energy of a high-voltage spark beam generator completely according to the experience of an operator, the machining is controlled by a microscope after being shut down every few seconds to ten seconds, the machining is continued after being judged and adjusted, and the machining can be finished after the machining is repeatedly shut down. As the workpiece is still in the machining process, the roundness of the aperture of the die and the smoothness of the aperture are difficult to ensure through the action of the high-voltage electric spark beam. In addition, the electrode position is relatively fixed, and the function of high-voltage electric spark beam machining cannot be completely embodied. Therefore, the existing high-voltage electric spark beam machining device and the process thereof cannot adapt to the machining of the micropore mould with high precision requirement, and have low production efficiency and great mastering operation difficulty.
Disclosure of Invention
The invention aims to solve the primary technical problem of providing a high-voltage electric spark beam machining device for workpiece rotation. The device effectively solves the problems of low hole shape and finish quality, low production efficiency, difficult mastering operation and the like of the micro-hole die processing in the prior art.
Another technical problem to be solved by the present invention is to provide a method for implementing a finishing process by using the above-mentioned apparatus.
In order to achieve the purpose, the invention adopts the following technical scheme:
a high-voltage electric spark beam machining device with a rotating workpiece comprises a high-voltage electric spark beam generator, a first electrode and a second electrode, wherein the high-voltage electric spark beam generator is respectively connected with the first electrode and the second electrode; wherein,
the high-voltage electric spark beam machining device also comprises a rotary worktable mechanism, a high-voltage electric spark beam position adjusting mechanism and a high-voltage electric spark beam angle adjusting mechanism;
the rotary worktable mechanism provides a rotary worktable for a workpiece to be machined, and the rotary worktable is positioned between the first electrode and the second electrode;
the high-voltage electric spark beam position adjusting mechanism comprises a beam position adjusting handle, a frame supporting plate and an electrode supporting frame, the beam position adjusting handle and the electrode supporting frame are fixed on the frame supporting plate, and the second electrode is installed at one end of the beam position adjusting handle;
the high-voltage electric spark beam current angle adjusting mechanism comprises a locking handle, an adjustable electrode angle plate and a positioning shaft, wherein the first electrode is fixed on the adjustable electrode angle plate and is locked by the locking handle after being adjusted to a required machining angle by taking the positioning shaft as a circle center.
Preferably, the rotary worktable mechanism comprises a rotary worktable, a rotary motor and a worktable support plate, wherein the rotary worktable is arranged on the worktable support plate and is driven by the rotary motor to rotate.
Preferably, the rotary worktable is made of an insulating material and bears an insulating outer sleeve for installing a workpiece to be machined.
Preferably, the bearing is embedded in the worktable support plate, and an inner ring of the bearing is connected with the rotary worktable.
Preferably, the first electrode is a conical tip electrode, and the second electrode is a columnar electrode.
Preferably, the upper end of the worktable support plate is provided with a positioning chute, the left side surface and the right side surface of the positioning chute are parallel to the axis of the rotation center of the worktable, and the electrode support frame moves in the positioning chute.
Preferably, the adjustable electrode angle plate is provided with an arc angle adjusting chute, and the arc angle adjusting chute is formed by taking the positioning shaft as a circle center and taking the distance between the locking handle and the positioning shaft as a radius.
A high-voltage electric spark beam machining method for workpiece rotation is realized based on the high-voltage electric spark beam machining device, and is characterized by comprising the following steps:
before machining, adjusting the angle position of an adjustable electrode angle plate to the maximum, installing an insulating outer sleeve on a rotary worktable, and adjusting the adjustable electrode angle plate to a normal position to start machining;
in the machining process, the rotary workbench always keeps rotating, the relative position of the high-voltage electric spark beam and a workpiece to be machined is adjusted through the high-voltage electric spark beam position adjusting mechanism, and the middle section or the tail end of the high-voltage electric spark beam is utilized for machining;
and thirdly, after the roundness of the hole shape of the workpiece sizing area meets the requirement, further adjusting the angle of the adjustable electrode angle plate to enable the high-voltage electric spark beam to form an included angle with the axis of the rotation center of the workbench, and machining the hole shape smoothly.
Wherein in the step three, the included angle is between 0 ° and 5 °.
Compared with the prior art, the invention adopts the rotary worktable mechanism, the high-voltage electric spark beam position adjusting mechanism and the high-voltage electric spark beam angle adjusting mechanism to carry out finishing processing on the diamond micropore mould, the hole shape and the smooth finish can be ensured, and the processing quality is obviously improved. On the other hand, the auxiliary working hours caused by observation and adjustment of the switch machine are greatly reduced in the processing process, the production efficiency is improved, and the operation difficulty is reduced.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a schematic view of the working principle of a high-voltage electric spark beam;
FIG. 2 is an exploded view of a high voltage spark beam;
FIG. 3 is a schematic view of a typical conventional high-voltage electric discharge beam machining apparatus;
FIG. 4 is a schematic view of the overall structure of the high-voltage electric spark beam machining device provided by the invention;
FIG. 5 is a schematic structural diagram of a rotary table in the high-voltage electric spark beam machining device provided by the invention;
fig. 6 is a schematic diagram of a high-voltage electric spark beam position adjusting mechanism in the high-voltage electric spark beam processing device provided by the invention;
fig. 7 is a schematic view of a high-voltage electric spark beam angle adjusting mechanism in the high-voltage electric spark beam processing device provided by the invention;
FIG. 8 is a schematic view of an insulating sheath for clamping a workpiece;
the reference numbers in the figures illustrate: 1: rotating the working table; 2: a high voltage spark stream generator; 3: a rotating electric machine; 4: a beam position adjusting handle; 5: a frame support plate; 6: an electrode support frame; 7: a worktable support plate; 8: locking the handle; 9: an electrode angle adjustable plate; 10: a conical tip electrode; 11: a columnar electrode; 12: a bearing; 13: positioning the shaft; 14: and (4) insulating the outer sleeve.
Detailed Description
As described above, in the conventional high-voltage spark stream processing apparatus, when the high-voltage spark stream passes through the inner hole of the workpiece to be processed, the workpiece is stationary, and the position of the electrode is fixed. The invention carries out corresponding structural improvement, and effectively solves the problems of low hole shape and finish quality, low production efficiency, difficult mastering operation and the like of the micro-hole die processing in the prior art.
As shown in fig. 4, the high-voltage electric spark beam machining apparatus provided by the present invention includes a high-voltage electric spark beam generator 2 for generating a high-voltage electric spark beam, a conical tip electrode (first electrode) 10, a columnar electrode (second electrode) 11, a rotary table mechanism, a high-voltage electric spark beam position adjustment mechanism, and a high-voltage electric spark beam angle adjustment mechanism. Wherein, rotatory workstation mechanism is used for providing rotatable workstation for diamond micropore mould's finishing processing, can make the hole shape circularity obtain guaranteeing through the rotation of waiting to process the work piece. The high-voltage electric spark beam position adjusting mechanism is used for adjusting the specific machining position of the high-voltage electric spark beam. The machining is carried out at different positions such as the tail end and the middle section of the high-voltage electric spark beam, so that the surface smoothness of the workpiece can be improved, and the hole shape precision can be ensured. The high-voltage electric spark beam angle adjusting mechanism is used for adjusting the angle of the high-voltage electric spark beam entering the workpiece to be machined, and the high-voltage electric spark beam can flow through the inner wall of the workpiece to form machining, so that the hole pattern of the workpiece to be machined is smooth, and the machining quality is further improved. The arrangement of the above mechanisms is one of the significant technical features of the present invention, which is different from the prior art, and the detailed description is provided below.
As shown in fig. 5, the rotary table mechanism includes a rotary table 1, a rotary motor 3, and a table support plate 7. The rotary table 1 is preferably made of an insulating material such as nylon, ceramic, etc., is mounted on the table support plate 7, and is rotated by the rotary motor 3. In the rotary table mechanism, a bearing 12 is embedded in a table support plate 7, and its inner ring is connected to a rotary table 1. In order to avoid the influence on the high-voltage spark beam, the diameter of the bearing inner ring connected with the rotary table 1 is preferably more than 30mm, for example, 50 mm.
The high-voltage spark beam generator 2 is respectively connected with the conical tip electrode 10 and the columnar electrode 11 through insulated wires, and stable high-voltage spark beam current is generated between the conical tip electrode 10 and the columnar electrode 11 through high-frequency oscillating high voltage. The rotary table 1 is located between a conical tip electrode 10 and a cylindrical electrode 11, on which an insulating jacket 14 for accommodating a workpiece to be machined is carried.
As shown in fig. 6, the high-voltage electric spark beam position adjusting mechanism is composed of a beam position adjusting handle 4, a frame support plate 5 and an electrode support frame 6. Wherein, the beam position adjusting handle 4 and the electrode supporting frame 6 are installed and fixed on the frame supporting plate 5, and the columnar electrode 11 is installed at one end of the beam position adjusting handle 4. The cone-tip electrode 10 and the columnar electrode 11 can be driven by the electrode supporting frame 6 to move to the position required by machining along the axial direction of the workbench by adjusting the beam position adjusting handle 4.
Referring to fig. 5 and 6, a positioning slide groove is formed at the upper end of the table support plate 7, and the left and right side surfaces of the positioning slide groove are parallel to the axis of the table rotation center. The electrode support frame 6 moves in a positioning chute at the upper end of the table support plate 7 to ensure that at least one electrode runs on the central axis of rotation of the rotary table 1. Thus, when the beam position adjusting handle 4 is used for adjusting, the electrode supporting frame 6 moves along the positioning chute at the upper end of the workbench supporting plate 7 shown in fig. 5, so as to ensure that the high-voltage electric spark beam runs along the rotation central axis of the workbench in a working area.
As shown in fig. 7, the high-voltage electric spark beam current angle adjusting mechanism comprises a locking handle 8, an adjustable electrode angle plate 9 and a positioning shaft 13. Through the fixing action of the locking handle 8 and the adjustable electrode angle plate 9, the conical tip electrode 10 and the columnar electrode 11 form a fixed relative position relation so as to realize stable high-voltage electric spark beam current. The conical tip electrode 10 is installed and fixed on the electrode angle adjustable plate 9, and is locked by the locking handle 8 after being adjusted to the angle required by processing by taking the positioning shaft 13 as the center of a circle. An arc angle-adjusting chute is arranged on the electrode angle-adjustable plate 9. The arc angle-adjusting sliding groove is formed by taking the positioning shaft 13 as the center of a circle and taking the distance between the locking handle 8 and the positioning shaft 13 as the radius. The adjustable electrode angle plate 9 ensures the positioning precision of angle adjustment by utilizing the matching between the locking handle 8 and the arc angle-adjusting sliding chute. The adjustable electrode angle plate 9 takes the positioning shaft 13 as the center of a circle, drives the conical electrode 10 fixed on the adjustable electrode angle plate to rotate, and is locked and fixed by the locking handle 8 after rotating to a required position.
Fig. 8 is a schematic structural diagram of an insulating outer sleeve for clamping a workpiece to be processed. The workpiece to be processed is mounted in the center of the insulating outer sleeve 14. In the machining, a workpiece to be machined, which is made of natural diamond, artificial single crystal diamond, or the like, is first inserted into an insulating sheath 14 made of an insulating material such as plastic or ceramic, and is clamped on the rotary table 1. When a workpiece to be machined is clamped, the center of an inner hole of the workpiece to be machined is coincided with the center of the insulating outer sleeve 14, and meanwhile, the center of the insulating outer sleeve 14 is coincided with the rotating center of the rotating workbench 1, so that the hole shape quality is guaranteed. Under the drive of the rotating motor 3, the center of an inner hole of a workpiece to be machined rotates on the rotating center of the rotating workbench 1, a high-voltage electric spark beam passes through the workpiece to be machined, and the inner hole of the rotating workpiece is subjected to finishing machining, so that the hole roundness of the workpiece to be machined can be obviously improved.
Next, a specific method of achieving the burnishing by the high-voltage electric discharge beam machining apparatus shown in fig. 4 will be described in detail. Firstly, according to different requirements of different processing positions of an inner hole of a diamond micropore mould to be processed, a high-voltage electric spark beam position adjusting mechanism is utilized to adjust the position, so that a workpiece to be processed is just positioned in the range of the tail end and the middle section of the high-voltage electric spark beam. Then, according to the requirements of different areas of the diamond micropore mould to be processed, a high-voltage electric spark beam angle adjusting mechanism is further used for adjusting, and the adjustment requirement is that an included angle of 0-5 degrees is formed between the high-voltage electric spark beam and the central axis of the rotary workbench 1.
Specifically, before machining, the angle position of the electrode angle adjustable plate 9 is adjusted to the maximum, the insulating outer sleeve 14 shown in fig. 8 is mounted on the rotary table 1, and then the electrode angle adjustable plate 9 is adjusted to the normal position to start machining. In the machining process, the rotary worktable 1 always keeps rotating, the energy of the high-voltage electric spark beam is basically fixed, and the tail end of the high-voltage electric spark beam is utilized for shaping machining. In the process, the relative position of the high-voltage electric spark beam and the workpiece to be machined can be adjusted according to the requirement. After the roundness of the hole shape of the sizing area of the workpiece reaches the requirement, the position of the high-voltage electric spark beam is kept still, the angle of the adjustable electrode angle plate 9 is further adjusted, so that the high-voltage electric spark beam and the axis of the rotating center of the workbench form a certain angle, and smooth and fluent angles of all areas of the inner hole of the workpiece are facilitated. In actual machining, under the condition that the high-voltage electric spark beam current is ensured to be normal, the larger the angle is, the better the angle is, but the angle is generally not more than 5 degrees, otherwise, the normal machining is influenced. The method for carrying out high-voltage electric spark beam machining by the micro-angle modulation is an effective measure for ensuring the smoothness of the hole shape of an inner hole of a workpiece to be machined.
In addition, when the shaping processing of the diamond micropore mould is emphasized, the processing efficiency by utilizing the tail end of the high-voltage electric spark beam is higher. In the machining process of improving the smoothness of the diamond micropore mold, the whole operation is similar to the shaping machining process, except that the position of the high-voltage electric spark beam is moved, the high-voltage electric spark beam is moved to 1/3 of the distance between the tail end of the workpiece and the total length of the beam, and the middle section of the high-voltage electric spark beam is used for machining the workpiece with the smoothness improved. Practice has shown that such processing works best.
By using the processing device and the processing method provided by the invention to carry out finishing processing on the diamond micropore mould, the hole shape and the finish degree can be ensured, and the processing quality is obviously improved. On the other hand, only the aperture of the mold needs to be measured in the processing process, and the output energy of the high-voltage spark beam generator does not need to be adjusted frequently according to the quality of the aperture to control the processing, so that the auxiliary working hours caused by observation and adjustment of the switch machine are greatly reduced, and the production efficiency is improved.
The high-voltage electric spark beam machining device and the high-voltage electric spark beam machining method for workpiece rotation provided by the invention are explained in detail above. Any obvious modifications thereof, which would occur to one skilled in the art without departing from the true spirit of the invention, would constitute a violation of the patent rights of the present invention and would bear corresponding legal responsibility.

Claims (10)

1. The utility model provides a rotatory high pressure electric spark beam current processingequipment of work piece, includes high-voltage electric spark beam current generator, first electrode and second electrode, high-voltage electric spark beam current generator connects respectively first electrode with the second electrode, its characterized in that:
the high-voltage electric spark beam machining device also comprises a rotary worktable mechanism, a high-voltage electric spark beam position adjusting mechanism and a high-voltage electric spark beam angle adjusting mechanism;
the rotary worktable mechanism provides a rotary worktable for a workpiece to be machined, and the rotary worktable is positioned between the first electrode and the second electrode;
the high-voltage electric spark beam position adjusting mechanism comprises a beam position adjusting handle, a frame supporting plate and an electrode supporting frame, the beam position adjusting handle and the electrode supporting frame are fixed on the frame supporting plate, and the second electrode is installed at one end of the beam position adjusting handle;
the high-voltage electric spark beam current angle adjusting mechanism comprises a locking handle, an adjustable electrode angle plate and a positioning shaft, wherein the first electrode is fixed on the adjustable electrode angle plate and is locked by the locking handle after being adjusted to a required machining angle by taking the positioning shaft as a circle center.
2. The high-pressure electric discharge beam machining apparatus for workpiece rotation according to claim 1, wherein:
the rotary worktable mechanism comprises a rotary worktable, a rotary motor and a worktable supporting plate, wherein the rotary worktable is arranged on the worktable supporting plate and is driven by the rotary motor to rotate.
3. The high-voltage electric discharge beam machining apparatus for workpiece rotation according to claim 1 or 2, characterized in that:
the rotary worktable is made of an insulating material and bears an insulating outer sleeve for installing a workpiece to be processed.
4. The high-pressure electric discharge beam machining apparatus for workpiece rotation according to claim 2, wherein:
the bearing is embedded in the workbench supporting plate, and the inner ring of the bearing is connected with the rotary workbench.
5. The high-pressure electric discharge beam machining apparatus for workpiece rotation according to claim 4, wherein:
the diameter of the inner ring is larger than 30 mm.
6. The high-pressure electric discharge beam machining apparatus for workpiece rotation according to claim 1, wherein:
the first electrode is a conical tip electrode, and the second electrode is a columnar electrode.
7. The high-pressure electric discharge beam machining apparatus for workpiece rotation according to claim 2, wherein:
the electrode support frame is characterized in that a positioning sliding groove is formed in the upper end of the workbench support plate, the left side surface and the right side surface of the positioning sliding groove are parallel to the axis of the rotating center of the workbench, and the electrode support frame moves in the positioning sliding groove.
8. The high-pressure electric discharge beam machining apparatus for workpiece rotation according to claim 1, wherein:
the adjustable electrode angle plate is provided with an arc angle adjusting chute, and the arc angle adjusting chute is formed by taking the positioning shaft as the center of a circle and taking the distance between the locking handle and the positioning shaft as the radius.
9. A high-voltage electric spark beam machining method for workpiece rotation is realized based on the high-voltage electric spark beam machining device of claim 1, and is characterized by comprising the following steps:
before machining, adjusting the angle position of an adjustable electrode angle plate to the maximum, installing an insulating outer sleeve on a rotary worktable, and adjusting the adjustable electrode angle plate to a normal position to start machining;
in the machining process, the rotary workbench always keeps rotating, the relative position of the high-voltage electric spark beam and a workpiece to be machined is adjusted through the high-voltage electric spark beam position adjusting mechanism, and the middle section or the tail end of the high-voltage electric spark beam is utilized for machining;
and thirdly, after the roundness of the hole shape of the workpiece sizing area meets the requirement, further adjusting the angle of the adjustable electrode angle plate to enable the high-voltage electric spark beam to form an included angle with the axis of the rotation center of the workbench, and machining the hole shape smoothly.
10. The high-voltage electric spark beam machining method according to claim 9, wherein:
in the step three, the included angle is between 0 and 5 degrees.
CN201110205337.2A 2011-07-21 2011-07-21 Device and method for machining high pressure electric spark beam capable of rotating workpiece Expired - Fee Related CN102275021B (en)

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