JP3694953B2 - Manufacturing method and manufacturing apparatus for liquid crystal electro-optical device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a manufacturing method and a manufacturing apparatus for a liquid crystal electro-optical device, and more particularly to a manufacturing process for fixing two liquid crystal panel substrates at a predetermined interval.
[0002]
[Prior art]
In the manufacturing process of the liquid crystal electro-optical device, for example, two liquid crystal panels are provided via a sealing material for adhering and fixing a liquid crystal panel substrate to define a liquid crystal sealing region, and a spacer for maintaining a gap between the substrates. After joining the substrates at a predetermined interval and injecting liquid crystal between the substrates under reduced pressure, in order to set the thickness of the liquid crystal layer accurately and increase the uniformity of the thickness of the liquid crystal layer, two liquid crystal panel substrates The sealing port is sealed while pressure is applied to the liquid crystal so that excess liquid crystal is taken out from the sealing port.
[0003]
Here, when pressure is applied to the two liquid crystal panel substrates, the two liquid crystal panels are applied by applying a predetermined pressure using a press machine having a pressure surface facing the substrate surface. The distance between the substrates can be set to a value almost the same as the particle size of the spacers accommodated between the substrates.
[0004]
[Problems to be solved by the invention]
However, in the manufacturing process of the conventional liquid crystal electro-optical device, since the two liquid crystal panel substrates are pressed by an empirically obtained pressure value, it is difficult to accurately obtain the thickness of the liquid crystal panel. In addition, since the whole surface is pressurized with a common pressure surface, the uniformity of the substrate spacing in the liquid crystal panel substrate cannot be obtained sufficiently, and the thickness of the liquid crystal layer varies depending on the location. There is a problem that display unevenness occurs in the case of an apparatus or the like.
[0005]
The variation in the thickness of the liquid crystal layer that may cause display unevenness is, for example, about 0.5 to 1.0 μm for a TN (Twisted Nematic) type display, and 0.05 to 0. 0 for a STN (Super Twisted Nematic) type display. It was about 1 μm, and it was very difficult to remove such minute variations.
[0006]
Further, in a liquid crystal display device provided with a color filter, Japanese Patent Application Laid-Open No. 5-11244 discloses a method for suppressing variations in the thickness of a liquid crystal layer by making the pressure applied to the color filter pixel portion stronger than the surrounding portion. Has been. However, even in this method, the two pressure values applied to the liquid crystal panel substrate must be set empirically, and in practice, it is extremely difficult to easily reduce the variation in the thickness of the liquid crystal layer.
[0007]
Therefore, the present invention solves the above-mentioned problems, and the problem is that a novel manufacturing method and manufacturing that can adjust the acting force applied to the substrate according to the variation even if the variation in the substrate interval is minute. To implement the device.
[0008]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention provides a method for manufacturing a liquid crystal electro-optical device in which a liquid crystal layer is sealed between two liquid crystal panel substrates, and the two liquid crystal panel substrates are overlapped. In the state, the interference fringes generated according to the interval between the two liquid crystal panel substrates are observed by the light applied to the liquid crystal panel surface, and at least one surface of the liquid crystal panel substrate is observed according to the observed interference fringes On the other hand, the distance between the liquid crystal panel substrates is made uniform by performing local pressing or suction individually at each of a plurality of locations.
[0009]
According to this method, while the state of variation in the substrate interval on the surface of the liquid crystal panel substrate is observed by the interference fringes, the action mechanism locally presses and / or sucks so as to reduce the substrate interval. In addition, it is possible to obtain uniformity of the distance between the substrates in the liquid crystal panel surface. Further, it is not necessary to set the pressing force empirically, and a suitable action can be applied to each liquid crystal panel, so that the yield of products can be improved.
[0010]
Here, it is preferable to locally press or suck one surface of the liquid crystal panel substrate and observe interference fringes from the other surface of the liquid crystal panel substrate. According to this method, since the observation of interference fringes is not hindered by the action mechanism acting on one surface of the liquid crystal panel substrate, it is possible to know the state of the substrate interval in real time while acting by the action mechanism. Become.
[0011]
In order to solve the above-mentioned problems, the invention provides an apparatus for manufacturing a liquid crystal electro-optical device in which a liquid crystal layer is sealed between two liquid crystal panel substrates, and the two liquid crystal panel substrates are stacked. A holding structure for holding them together, interference fringe observing means for observing interference fringes generated by light irradiated on the liquid crystal panel surface, and local pressing at a plurality of locations on at least one surface of the liquid crystal panel substrate Or a plurality of action mechanisms that perform suction individually, and by causing each of the plurality of action mechanisms to suck or press according to the observed interference fringes, the intervals between the liquid crystal panel substrates are made uniform It is characterized by.
[0012]
Here, the action mechanism is present in the action member configured to be able to contact the surface of the liquid crystal panel substrate, the fluid pressurizing unit for the fluid supplied to the action member, and / or the action member. It is preferable to provide fluid suction means for the fluid to be used. According to this apparatus, it is possible to locally press and / or suck the surface of the liquid crystal panel substrate in contact with the action member with good controllability and a simple structure by the fluid pressurizing means and / or the fluid suction means. Therefore, it is possible to easily realize the uniform spacing between the substrates, and to set a large number of action sites on the surface of the liquid crystal panel substrate to perform fine work.
[0013]
In addition, it is desirable to provide in-member interference fringe observation means for observing interference fringes from the surface of the liquid crystal panel substrate with which the action member abuts. According to this apparatus, by providing the interference fringe observation means in the member, at least a part of the interference fringes on the surface portion that cannot be observed due to the action member can be observed, and the action of the action member can be observed. Since it becomes possible to observe the state of the interference fringes of the part that changes due to the above, it is possible to easily perform the work of uniforming the distance between the substrates.
[0014]
Furthermore, it is preferable that the action member is provided with an opening that is in contact with the surface of the liquid crystal panel substrate and sprays and / or sucks fluid generated by the fluid pressurizing means and / or the fluid suction means. According to this method, the fluid is sprayed and / or sucked onto the surface of the liquid crystal panel substrate through the opening, and the surface of the liquid crystal panel substrate is pressed and / or sucked with the fluid pressure, so that a delicate substrate spacing is obtained. Can be adjusted.
[0015]
In addition, it is preferable to provide a second action mechanism for causing the action mechanism to act on one of the liquid crystal panel substrates and for pressing and / or suctioning the other of the liquid crystal panel boards as a whole. According to this method, the entire pressing force and / or suction force generated by applying an action mechanism to one of the liquid crystal panel substrates is generally pressed against and / or pressed against the other liquid crystal panel substrate. Alternatively, since the second action mechanism for sucking is provided, the substrate spacing can be made uniform without causing the entire deformation of the liquid crystal panel substrate, and the second action mechanism itself can be applied to the entire liquid crystal panel substrate. Since it is sufficient to be able to act against it, the mechanism is not complicated.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Next, a method and apparatus for manufacturing a liquid crystal electro-optical device according to the present invention will be described with reference to the accompanying drawings.
[0017]
(First embodiment)
FIG. 1 shows a schematic structure of a manufacturing method and a manufacturing apparatus according to the first embodiment of the present invention. In this embodiment, two transparent liquid crystal panel substrates 1 and 2 made of glass or the like are disposed so as to surround the sealing material 3 so as to surround the liquid crystal sealing scheduled area except for the portion serving as the sealing port. A large number of glass or plastic spacers 4 are dispersed and arranged in advance in the region.
[0018]
The empty cell thus formed is filled with the liquid crystal 5 under reduced pressure and placed on the support base 6 shown in FIG. The support base 6 is formed with an exhaust hole 6 a connected to an exhaust device (not shown) and an adsorption hole 6 b that is communicated with the exhaust hole 6 a and has an opening on the surface of the support base 6. The back surface of the liquid crystal panel substrate 1 is adsorbed and fixed on the surface of the support table 6 by exhausting air from the adsorption holes 6 b of the support table 6.
[0019]
A plurality of working arm portions (working members) 7 are mounted on the support base 6 so as to be movable up and down. The lower end portion of the working arm portion 7 is made of a flexible material such as a rubber plate or a soft resin plate. The formed working surface 7a is formed. A small gas flow hole 7b is formed at a substantially central portion of the working surface 7a.
[0020]
An air supply device and / or an exhaust device (not shown) are connected to the working arm portion 7. When a gas such as air or an inert gas is supplied from the air supply device, the working surface 7a is directed downward. While expanding, gas such as air or inert gas is blown out from the gas flow hole 7b. Further, when the gas is exhausted toward the exhaust device, the working surface 7a is recessed in the division, and air is sucked from the gas flow hole 7b. Here, an opening / closing valve (not shown) is provided in a path connected to the air supply device and the exhaust device, and preferably the gas supply amount and the exhaust amount can be adjusted by adjusting the opening degree of the opening / closing valve. It has become.
[0021]
Preferably, both the air supply device and the exhaust device are connected to the working arm portion 7 so that both the air supply and the exhaust gas can be switched by the on-off valve or other switching valve.
[0022]
Above the upper liquid crystal panel substrate 2, ideally, a light source 8 that generates light of a single wavelength and reflected light that is reflected from the liquid crystal panel substrates 1 and 2 are detected. A CCD camera and other imaging device 9 are arranged. The imaging device 9 is for observing interference fringes formed by the reflected lights from the liquid crystal panel substrates 1 and 2, and the light source 8 is a sodium lamp, for example, and the wavelength of the generated light is as follows: Depending on the interval between the liquid crystal panel substrates 1 and 2 and the allowable width of the variation in the interval, a wavelength suitable for observing a preferable interference fringe is selected in order to see the uniformity of the required substrate interval.
[0023]
While observing the interference fringes observed by the imaging device 9, a driving device for the working arm unit 7 similar to a driving device (not shown) such as a scalar type robot arm or an XYZ type orthogonal robot arm is used. Then, the action arm portion 7 is lowered onto the surface of the desired liquid crystal panel substrate 2, and the action surface 7 a is brought into contact with the surface of the liquid crystal panel substrate 2.
[0024]
Then, in a place where the liquid crystal panel substrate 2 is to be pushed down according to the pattern of interference fringes, the working arm portion 7 is lowered by a minute distance or a gas is introduced from the air supply device, and the working surface 7a is inflated by the gas. In addition, the liquid crystal panel substrate 2 is locally pressed by blowing gas from the gas flow holes 7b. Further, in a place where the liquid crystal panel substrate 2 is desired to be pulled up, the working surface 7a is recessed by the exhaust device, and air is sucked from the gas flow holes 7b so that the working surface is adsorbed on the surface of the liquid crystal panel substrate 2, thereby The surface of 2 is pulled up locally. In this way, one or a plurality of locations on the surface of the liquid crystal panel substrate 2 are corrected so that the interference fringes are reduced or eliminated as much as possible.
[0025]
In the above description, the case where both the pressing and the sucking action are applied to the surface of the liquid crystal panel substrate 2 by the working surface 7a of the working arm portion 7 is shown. By applying an action according to the above, it is possible to sufficiently correct the substrate interval. Further, in the case where the correction of the substrate is sufficient only by the pressing action by the action arm portion 7, it is not necessary to provide the gas flow hole 7b in the action surface 7a, and further, the depression of the action arm portion 7 is sufficient for the liquid crystal panel substrate. When the distance between the substrates can be adjusted, it is not necessary to project the working surface 7a by gas, and the working surface 7a may be formed as a simple rigid body.
[0026]
As described above, one or a plurality of working arm portions 7 are used to correct the substrate spacing as uniform as possible, and the state is maintained, and the sealing material between the liquid crystal panel substrates 1 and 2 is provided. By sealing the sealed opening, a liquid crystal panel having excellent substrate spacing, that is, uniformity in the thickness of the liquid crystal layer can be formed.
[0027]
FIG. 2 shows a configuration example of a mechanism for driving and operating the action arm portion 7 according to the above embodiment. The locking members 11 and 21 fixed to the plurality of working arm portions 7 and 17 are attached to a common driving rod 10 through which the working arm portions 7 and 17 are movably inserted. , 17 are configured to move up and down. In this case, the working arm portions 7 and 17 are connected to the flexible tubes 12 and 22. The flexible tubes 12 and 22 are connected to an air supply device (not shown) via open / close valves 13 and 23, respectively, and are connected to an exhaust device (not shown) via open / close valves 14 and 24.
[0028]
According to such a configuration of the working arm portion, the surface of the liquid crystal panel substrate can be pressed and sucked simply by opening and closing the on-off valve, so that the substrate spacing of the liquid crystal panel substrate can be controlled in detail. Become. The number of working arm portions that are driven simultaneously is arbitrary, and may be one or more.
[0029]
FIG. 3 shows another example of the working arm portion. A flexible edge frame member 27b such as rubber is attached to the distal end of the action portion 27a of the action arm portion 27, and an opening portion 27c is formed on the inside thereof. An optical fiber 28A for introducing light of a predetermined wavelength from a light source 28 provided at a remote position is drawn into the action unit 27a, and light is emitted from the light emitting end 28a. An optical fiber 29A having a condensing end 29a for condensing the reflected light from the liquid crystal panel substrate with which the action portion 27a contacts is also introduced. The optical fiber 29A is connected to an image pickup device 29 provided at a remote position, and the image pickup device 29 converts the interference fringe pattern collected from the light collection end 29a by the action unit 27a into image information and displays it on the monitor 30. It is like that.
[0030]
According to this working arm portion 27, even when the liquid crystal panel substrate is being pressed or sucked, the interference fringes of the corrected portion can be separately observed, and the interference fringes become shadows of the working arm portion 27. The range that cannot be observed can be reduced. Moreover, the result of the action by the action arm part 27 can be observed one by one. In this case, it is preferable to project the interference fringes observed by the light source 8 and the imaging device 9 and the interference fringes observed by the working arm 27 simultaneously on the monitor. It is desirable to project as one image.
[0031]
(Second Embodiment)
Next, a second embodiment according to the present invention will be described with reference to FIG. In this embodiment, the peripheral portions of the liquid crystal panel substrates 1 and 2 are fixed to the fixtures 31, 32, and 33 with the sealant 3 and the spacer 4 interposed between the liquid crystal panel substrates 1 and 2 similar to those described above. , 34 is clamped at a predetermined pressure from the front and back. In the state where the liquid crystal panel substrates 1 and 2 are held in this way, one or a plurality of places are locally applied to the surface of the liquid crystal panel substrate 2 by one or a plurality of working arm portions 7 as in the first embodiment. Pressing or sucking. In addition, since one or a plurality of locations are locally pressed or sucked on the surface of the liquid crystal panel substrate 1 by other working arm portions 37 in the same manner, This means that the board interval has been corrected.
[0032]
In this embodiment as well, as described above, while the interference fringes are observed by the light source 8 and the imaging device 9, the working arm portion is operated so as to make the substrate interval uniform, but the substrate interval is corrected from the front and back of the liquid crystal panel. Therefore, although the operation becomes difficult, a finer correction can be added to further uniform the substrate interval.
[0033]
(Third embodiment)
Finally, a third embodiment according to the present invention will be described with reference to FIG. In this embodiment, a fixing frame 41 configured to be slidable from above is attached to the fixing jig 40, and a transparent substrate 42 and an annular support frame 43 are fitted in the fixing jig 40. On the support frame 43, a liquid crystal panel composed of the liquid crystal panel substrates 1 and 2, the sealing material 3, the spacer 4, and the liquid crystal 5 is accommodated. The peripheral edge of the liquid crystal panel is pressed from above with a fixed pressure by the fixed frame 41 and is sandwiched between the fixed frame 41 and the support frame 43.
[0034]
A gas flow hole 43a is formed in the support frame 43, and is connected to an air supply device and / or an exhaust device (not shown) through the gas flow hole 43a so that the pressure of air or other fluid can be adjusted by these devices. Has been.
[0035]
One or a plurality of working arm portions 37 similar to those described above can be contacted and separated from the liquid crystal panel substrate 2 side, and interference fringes are observed through the transparent substrate 42 from the liquid crystal panel substrate 1 side. A light source 48 and an imaging device 49 are provided.
[0036]
In this embodiment, when one or a plurality of action arm portions 47 are applied to the liquid crystal panel substrate 2 to press the liquid crystal panel substrate 2 downward as a whole, a gas is introduced into the support frame 43. Air, water, or other fluid is supplied at a predetermined pressure through the flow holes 43a, and the substrate spacing is made uniform by balancing the pressing force. On the other hand, when the liquid crystal panel substrate 2 is pulled upward as a whole by the action arm portion 47, the inside of the support frame 43 is exhausted through the gas flow holes 43a to balance the suction force. With such a structure, the substrate spacing can be made uniform without deforming the entire liquid crystal panel.
[0037]
In addition, according to this embodiment, the action arm portion 47 is operated from the liquid crystal panel substrate 2 side, while the interference fringes are observed from the liquid crystal panel substrate 1 side. The arm portion 47 does not become an obstacle, and it is possible to always know the state of the substrate interval.
[0038]
In each of the embodiments described above, gas is ejected or sucked to the working arm portion, but a liquid other than gas may be used as the working fluid. The means for obtaining interference fringes is not limited to a monochromatic light source as described above, but a white light source is used, but an analyzer having sensitivity only to light of a predetermined wavelength is used, or an optical filter that transmits only a predetermined wavelength is used. It is also possible. Furthermore, the structure of the tip of the working arm is not limited to the structure of each of the above embodiments as long as it can contact the surface of the liquid crystal panel substrate and exhibit a sufficient pressing force or suction force. .
[0039]
【The invention's effect】
As described above, the present invention has the following effects.
[0040]
According to the first and third aspects of the present invention, the action mechanism is used to locally press and / or suck the substrate so as to reduce the substrate interval while observing the variation in the substrate interval of the liquid crystal panel substrate due to the interference fringes. As a result, the uniformity of the substrate spacing within the liquid crystal panel surface can be obtained. Further, it is not necessary to set the pressing force empirically, and a suitable action can be applied to each liquid crystal panel, so that the yield of products can be improved.
[0041]
According to claim 2, since the observation of interference fringes is not hindered by the action mechanism acting on one surface of the liquid crystal panel substrate, it is possible to know the state of the substrate interval in real time while acting by the action mechanism. become.
[0042]
According to the fourth aspect, the surface of the liquid crystal panel substrate in contact with the action member can be locally pressed and / or sucked with a simple structure with the fluid pressurizing means and / or the fluid suction means. Therefore, it is possible to easily realize the uniform spacing between the substrates, and to set a large number of action sites on the surface of the liquid crystal panel substrate to perform fine work.
[0043]
According to the fifth aspect, by providing the in-member interference fringe observation means, at least a part of the interference fringes of the surface portion that cannot be observed due to the action member being obstructed can be observed. Since it becomes possible to observe the state of the interference fringes of the part that changes due to the action, it is possible to easily perform the work of uniforming the distance between the substrates.
[0044]
According to the sixth aspect, the fluid is sprayed and / or sucked onto the surface of the liquid crystal panel substrate through the opening, and the surface of the liquid crystal panel substrate is pressed and / or sucked with the fluid pressure, so that a delicate substrate is obtained. The interval can be adjusted.
[0045]
According to the seventh aspect of the present invention, the entire pressing force or suction force generated as a whole by applying the action mechanism to one of the liquid crystal panel substrates is generally pressed against the other of the liquid crystal panel substrates and the other. Since the second action mechanism for sucking is provided, the substrate spacing can be made uniform without causing the overall deformation of the liquid crystal panel substrate, and the second action mechanism itself is the entire liquid crystal panel substrate. Therefore, the mechanism is not complicated.
[Brief description of the drawings]
FIG. 1 is a schematic longitudinal sectional view for explaining a first embodiment of a manufacturing method and a manufacturing apparatus of a liquid crystal electro-optical device according to the present invention.
FIG. 2 is a schematic configuration diagram showing a structural example of a drive mechanism and an operation mechanism of an action arm portion in the same embodiment.
FIG. 3 is a schematic longitudinal sectional view showing an example of different working arm portions that can be used in the embodiment.
FIG. 4 is a schematic longitudinal sectional view for explaining a second embodiment of the method and apparatus for manufacturing a liquid crystal electro-optical device according to the present invention.
FIG. 5 is a schematic longitudinal sectional view for explaining a third embodiment of the method and apparatus for producing a liquid crystal electro-optical device according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1, 2 Liquid crystal panel board | substrate 3 Sealing material 4 Spacer 5 Liquid crystal 6 Support stand 7 Working arm part 7a Working surface 7b Gas flow hole 8 Light source 9 Imaging device

Claims (7)

In a method of manufacturing a liquid crystal electro-optical device formed by sealing a liquid crystal layer between two liquid crystal panel substrates,
In the state where the two liquid crystal panel substrates are overlapped, the interference fringes generated according to the interval between the two liquid crystal panel substrates are observed by the light irradiated on the liquid crystal panel surface, and the observed interference fringes are observed. Accordingly, the liquid crystal panel substrate is made uniform by uniformly pressing or suctioning at least one surface of the liquid crystal panel substrate individually at each of a plurality of locations. Manufacturing method of electro-optical device. 2. The liquid crystal electro-optical device according to claim 1, wherein the surface of the liquid crystal panel substrate is locally pressed or sucked to observe interference fringes from the other surface of the liquid crystal panel substrate. Method. In a manufacturing apparatus of a liquid crystal electro-optical device formed by sealing a liquid crystal layer between two liquid crystal panel substrates,
A holding structure for holding the two liquid crystal panel substrates in an overlapped state;
Interference fringe observation means for observing interference fringes generated by light irradiated on the liquid crystal panel surface;
A plurality of action mechanisms that individually perform local pressing or suction at a plurality of locations on at least one surface of the liquid crystal panel substrate;
An apparatus for manufacturing a liquid crystal electro-optical device, wherein the intervals between the liquid crystal panel substrates are made uniform by causing each of the plurality of action mechanisms to be sucked or pressed according to the observed interference fringes.   4. The action mechanism according to claim 3, wherein the action mechanism includes an action member configured to be able to abut on a surface of the liquid crystal panel substrate, a fluid pressurizing unit and / or the action member for a fluid supplied to the action member. And a liquid suction unit for the fluid existing in the liquid crystal electro-optical device.   5. The liquid crystal electro-optical device according to claim 4, wherein an in-member interference fringe observation means for observing interference fringes from the surface of the liquid crystal panel substrate with which the action member abuts is provided inside the action member. manufacturing device.   5. The operation member according to claim 4, wherein the action member includes an opening that contacts the surface of the liquid crystal panel substrate and sprays and / or sucks fluid generated by the fluid pressurizing unit and / or the fluid suction unit. An apparatus for manufacturing a liquid crystal electro-optical device.   4. The liquid crystal panel substrate according to claim 3, wherein a second operation mechanism is provided for causing the operation mechanism to act on one of the liquid crystal panel substrates and for pressing and / or suctioning the other of the liquid crystal panel substrates as a whole. Liquid crystal electro-optical device manufacturing apparatus.

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