JP3659519B2 - Resonant oscillation motor for optical deflection - Google Patents

Description

【００１５】
【表２】

【００１６】
本発明の共振型揺動モーター５０の共振周波数を５０．０±０．１（Ｈｚ）に調整するために、室温におけるヤング率が１０，０００〜２５，０００ｋｇｆ／ｍｍ²の範囲にある素材（例えば、ＳＵＳ３０４ＣＰ等。）を用いて表１および表２の仕様の板バネ４，５を製作し、本発明の共振型揺動モーター５０に用いた。
【００１７】
本発明の共振型揺動モーターに用いるバネとしては公知のバネを使用できる。具体例としては、例えば、円筒型圧縮コイルバネ、非円筒型圧縮コイルバネ、円筒型引張コイルバネ、ネジリコイルバネ、偏平波形コイルバネ、ガータスプリング、ヨリ線バネ等のコイルバネ；接触形渦巻きバネ、非接触形渦巻きバネ等の渦巻きバネ；等ピッチ角形、不等ピッチ角形等の竹ノ子バネ；単一板バネ、重ね板バネ等の板バネ、円すいサラバネ、円板サラバネ等のサラバネ；輪バネ；トーションバー等の金属バネが挙げられる。また、圧縮形、せん断形、圧縮せん断形、ねじり形等のゴムバネ等が挙げられる。また、圧縮空気等を利用する空気バネ等が挙げられる。これらのうち、バネ定数の設定の容易な金属バネが好ましく、バネ定数の設定の非常に容易な板バネが特に好ましい。この板バネの断面形状は正方形、矩形、円形、台形、平行四辺形、Ｈ型、不定形状の何れでもよい。
そして、上記金属バネは、炭素鋼、Ｍｎ鋼、Ｓｉ−Ｍｎ鋼、Ｍｎ−Ｃｒ鋼、Ｍｎ−Ｃｒ−Ｂ鋼、ＳｉーＣｒ鋼、Ｃｒ−Ｖ鋼、ステンレス鋼等のバネ鋼、およびりん青銅等のＣｕ−Ｓｎ−Ｐ合金、および洋白等のＣｕ−Ｎｉ−Ｚｎ合金、およびベリリウム銅等のＣｕ−Ｂｅ、Ｃｕ−Ｂｅ−Ｃｏ合金等の公知素材から適宜選択して形成できる。
また、上記バネの断面形状は正方形、矩形、円形、台形、平行四辺形、Ｈ型、不定形状の何れでもよい。
【００１８】
本発明の共振型揺動モーターに用いるヨークは、公知の強磁性および／または非磁性素材から形成できるが、永久磁石から発生した磁束の磁路となりかつ磁気空隙形成に有効に寄与する公知の強磁性材料を用いることが好ましい。具体例を挙げれば、純鉄、軟鉄、炭素鋼、フェライト系やマルテンサイト系の磁性ステンレス鋼等、および鋳鉄や鋳鋼等の鉄系鋳物、およびＭｎ−Ｚｎフェライト等の公知のソフトフェライト、およびパーマロイ等のＦｅ−Ｎｉ合金、コバールなどのＦｅ−Ｎｉ−Ｃｏ合金、およびこれら強磁性材料の微粉末と高分子化合物とを主体として構成されるいわゆる樹脂接着型の軟質磁性材料等を使用できる。
これらのうち、安価で高透磁率の炭素鋼が特に好ましい。さらに、ラミネート構造のヨークを用いてもよい。
【００１９】
本発明の共振型揺動モーターに用いる永久磁石としては、公知の製造方法（例えば焼結法、鋳造法、熱間圧延法、超急冷法、ボンド磁石法等）によるものを使用できる。そして、永久磁石としてその基本組成を表す一般式がＲ−Ｆｅ−Ｂ系およびＳｍ−Ｃｏ₅系、Ｓｍ₂ーＣｏ₁₇系、Ｓｍ−Ｆｅ−Ｎ系（ＲはＹを含むＮｄ，Ｄｙ等の希土類元素のうちの１種または２種以上であり、必要に応じてＣｏ、Ａｌ、Ｎｂ、Ｇａ、Ｆｅ、Ｃｕ、Ｚｒ、Ｔｉ、Ｈｆ、Ｎｉ、Ｓｉ等の磁気特性に有効な公知の添加元素の１種または２種以上およびＯ、Ｃ、Ｈ、Ｎ等の不可避不純物元素を含有できる。）等で表される希土類磁石およびフェライト磁石、アルニコ磁石、Ｍｎ−Ａｌ−Ｃ系磁石、Ｆｅ−Ｃｒ−Ｃｏ系磁石等の公知の永久磁石材料を用いて製作できる。
【００２０】
図２は本発明の共振型揺動モーター５０における動作物１の振幅、振動周波数等の測定手段の一実施例を概念的に説明する図である。図２において、図１（ｂ）と同一参照符号のものは図１（ｂ）と同一の構成部分である。動作物１は４ａ、４ｂを支点として、所定の共振角度θ（例えば、θ＝２０°）間すなわち振幅１９間を５０．０±０．１（Ｈｚ）の共振周波数で往復運動する。この往復運動は、振幅１９の中立点１７に対して略対称形（θ／２）になっている。そして、動作物１のミラー７ａ側における支点４ａ側から２０ｍｍの位置Ａにレーザービーム１６を照射して、反射されたレーザービーム１６を図示されない公知のレーザービーム測長器により検出して振幅、振動周波数等の測定を行う。
ここで、共振角度θ＝０．１〜１７９゜を形成できるが、実用性の点からθ＝７〜２０゜とするのが好ましい。また、振幅１９は設計条件等を考慮して適宜決定できるが、上記図１および図２においては、動作物１の振幅をバランサー２の振幅の４〜５倍になるように板バネ４，５のバネ定数および動作物１とバランサー２の各質量（すなわち各重量）を設定している。すなわち、動作物１側がバランサー２側に対して軟振動系となり、動作物１の（振幅／入力電力）比がバランサー２の（振幅／入力電力）比に対して４〜５倍という大きさに設定されている。なお、図１の実施例では共振周波数を５０．０±０．１（Ｈｚ）に設定したが、本発明の共振型揺動モーターにおける固有振動数を考慮すると、共振周波数を１（Ｈｚ）〜５０（ＫＨｚ）に設定するのが好ましく、実用性の点から１０〜１０００（Ｈｚ）にするのが特に好ましい。
【００２１】
図３は、本発明の共振型揺動モーターにおいて、磁界発生用のコイル（例えば、図１ではコイル８に相当する。）に供給する駆動電流の波形パターンの一実施例を概念的に説明する図である。
図３において、キッカー電流２０は１２０（ｍＡ），１０（ｍｓｅｃ．）の１パルスの略矩形波電流であり、共振型揺動モーターの振動開始時に印加される。減衰補充電流２１は６０（ｍＡ），１〜２（ｍｓｅｃ．）の多パルスの略矩形波電流であって印加周期２２で繰り返し印加される。この印加周期２２は共振周波数に等しく設定され、例えば図１では２０（ｍｓｅｃ．）すなわち共振周波数の５０（Ｈｚ）に設定されている。また、キッカー電流２０と第１番目の減衰補充電流２１との間の休止時間は１５（ｍｓｅｃ．）に設定されている。
キッカー電流２０は、１〜１０，０００（ｍＡ），０．１〜２５０（ｍｓｅｃ．）が実用性の点から好ましいが、１０〜５００（ｍＡ），５〜５０（ｍｓｅｃ．）とすると共振の立上がり性および低消費電力の点から特に好ましい。
また、減衰補充電流２１は１〜１０，０００（ｍＡ），０．０２〜１０００（ｍｓｅｃ）が実用性の点から好ましいが、共振型揺動モーターの固有振動数との整合性および共振の減衰分の供給エネルギーを低消費電力とする点から１０〜５００（ｍＡ），１〜２００（ｍｓｅｃ．）が特に好ましい。
【００２２】
図４は本発明の共振型揺動モーター５０において、コイル８に通電する駆動電流の制御回路の一実施例を示す図である。
図４では、標準電源として直流電源５（Ｖ）を用いている。そして、ポート１に、例えば、１２０（ｍＡ）,１０（ｍｓｅｃ．）のキッカー電流２０に相当する電圧信号が入力されて、トランジスタＱ１がオンされる。１５ｍｓｅｃ経過後、次に、ポート２に、例えば、６０（ｍＡ）,２（ｍｓｅｃ．）の減衰補充電流２１に相当する電圧信号が入力されて、トランジスタＱ２がオンされる。そして、同時にコイル８から発生する逆起電圧Ｖ_M（逆起電流Ｉ_M）はダイオード３０により抑制される。このようにして、コイル８に流れる駆動電流が制御されるのである。なお、Ｒ₁は抵抗を示し、トランジスタＱ₁およびＱ₂の一端は接地されている。
【００２３】
図５は本発明の共振型揺動モーター５０における動作物１の振動開始から共振に至る振動遷移領域を説明する図であり、縦軸にコイル８の駆動電流（ｍＡ）および動作物１の振幅（ｍｍ）をとり、横軸に時間（ｍｓｅｃ．）をとっている。図５の振幅曲線１９において、点Ｏは動作物１の振動開始点を、点Ｐは振幅の第１周期の第１ピークを、点Ｑは振幅の第１周期の第２ピークを、点Ｒ、Ｓ、Ｔは各々振幅の第２周期〜第４周期の開始点を示す。このように、図３で説明したキッカー電流２０および減衰補充電流２１が印加されて、動作物１が振幅曲線１９の振幅挙動を示し、所定の振幅と振動周波数とを有する共振に至るのである。ここで、キッカー電流２０の印加は振幅曲線１９の第１周期の第１ピーク点Ｐまでに完了させることが極めて重要である。仮に、キッカー電流２０の印加が第１ピーク点Ｐを越えて行なわれた場合、キッカー電流２０により共振型揺動モーター５０に供給されるエネルギーが振幅曲線１９の位相に対して不整合となるため、共振の立上がり性を悪化させる。すなわち、振動開始から共振に至る所用時間が長くなり好ましくない。
また、上述した通り、振幅の第１周期における第２ピーク点Ｑ以降の時期に第１番目の減衰補充電流２１を印加するとともに、振幅の第２周期以降は第１番目の減衰補充電流２１に対して共振周期２２（例えば５０（Ｈｚ））の間隔で第２番目以降の減衰補充電流２１を供給することによって極めて短時間（１ｓｅｃ以下）のうちに共振に至ることができる。
そして、上述のキッカー電流２０および減衰補充電流２１の供給によって、本発明の共振型揺動モーター５０の平均消費電力を３（ｍＷ）以下にでき、少消費電力化が達成された。
【００２４】
図６は本発明の共振型揺動モーター５０における動作物１の良好な共振の立上がり性の一実施例を示す図であり、縦軸に動作物１の振幅（ｍｍ）、横軸に時間（ｍｓｅｃ．）を各々とっている。
図６において、２３が振動開始から共振に至る遷移領域、２４が共振領域である。図６より、遷移領域２３の所要時間が約０．５（ｓｅｃ．）に設定されていることがわかる。なお、上述のキッカー電流２０を印加しない場合は、図６における遷移領域２３が約５（ｓｅｃ．）に悪化し、共振の立上がり性が著しく阻害されることが確認された。
【００２５】
図７に、ミラー７と強磁性ヨーク１２と永久磁石１０，１０とを具備する動作物１と、ウェイト１４とコイル８とを具備するバランサー２と、サポートベース３と、板バネ４，５とで構成される揺動モーター６０の一例を示す。図７において、図１（ａ）と同一参照符号のものは図１（ａ）と同一の構成部分を表す。
図７の揺動モーター６０の共振周波数を５０．０±０．１（Ｈｚ）とし、さらに、図１の揺動モーター５０の場合と同様に動作物１の振幅をバランサー２の振幅の４〜５倍になるように設定することによって、動作物１側がバランサー２側に対して軟振動系となり、したがって動作物１の（振幅／入力電力）比をバランサー２に対して大に構成することができ、図１（ａ）の揺動モーター５０と同様の作用効果を奏することが確認された。
【００２６】
図８に、本発明の共振型揺動モーターを電動ひげそりに用いた参考例を示す。図８において、図１（ａ）と同一参照符号のものは図１（ａ）と同一の構成部分を表す。
図８において、動作物１とバランサー２とは共振周波数２００（Ｈｚ）に設定され、かつ動作物１およびバランサー２の振幅が等しくすなわち共振角度θが等しく、例えばθ＝１５゜に設定されている。また、サポートベース３は板バネ４，５を介して各々動作物１およびバランサー２を支持する防振性の固定部分であるとともに、例えば、図８の電動ひげそりにおける図示されない把持部分の一部を構成する。そして、サポートベース３の両端部に立設されたフレーム２６，２６（例えば、ガラス入りポリカボネート製。）の先端部に安全カバー２７（例えば、ＳＵＳ３０４製。）が設けられ、この安全カバー２７には例えばひげ等の毛が侵入するための微小孔が多数形成されるとともに、顔面等に安全カバー２７の２７ａ側を押圧すると前記微小孔から侵入したひげが動作物１およびバランサー２の先端部に各々設けられた刃２５，２５によって切断されるのである。このように本発明の共振型揺動モーターの構成を電動ひげそり等に使用することができる。なお、図８では、より強力な磁気空隙６，６を形成するために、永久磁石１０，１０の異なる磁極同志を対向配置させている。
【００２７】
上記実施例においては、板バネ２個と、１個のコイルと、２個または４個の永久磁石と、１個のウェイトとからなる共振振動系を記載したが、これらの数は限定されるものではなく、これらのより多数を用いて本発明の共振型揺動モーターを構成することができる。
さらに、動作物、バランサー、サポートベース等の形状および個数も本発明の範囲内において、限定されるものではない。
また、バネ（好ましくは板バネ）の寸法、形状等を適宜選択することによって、小型から大型までの共振型揺動モーターをフレキシブルに製作できる。
また、上記実施例では、バランサー側を単独で位置決めに利用することを記載していないが、バランサー側を単独で利用でき得ることは本発明の記載から明らかである。
【００２８】
【発明の効果】
本発明の共振型揺動モーターは共振を利用しているため、動作物とバランサーとの共振によって振動をバランスでき、したがって、サポートベースへの振動伝達を抑制できるという優れた防振機能を有する。このため、光ビーム偏向装置等の高精度の位置決め機能を要する装置に極めて有用のものである。また、動作物をバランサーに対して軟振動系に設定できるので、動作物の（振幅量／入力電力）の比率を大きくとれるという効果を奏する。また、バランサーを動作物に対して軟振動系に設定することも可能で、バランサーの（振幅量／入力電力）の比率を大きくとれるという効果を奏することもできる。また、動作物とバランサーの振幅を等しく設定して、両者を共振させて利用することも自在である。
また、本発明のエネルギー供給方式とすれば、共振の立上がり性が大幅に改善されるとともに、共振の減衰分のエネルギーを補うだけの少消費電力方式とすることができる。
さらに、寸法対応性に富み、かつ簡略な構成であるため、低価格化が図れるものである。
【図面の簡単な説明】
【図１】 本発明の共振型揺動モーターの一実施例における要部断面図（ａ）および共振状態を説明する図（ｂ）である。
【図２】 本発明の共振型揺動モーターにおける動作物の振幅、振動周波数等の測定手段の一実施例を説明する図である。
【図３】 本発明の共振型揺動モーターにおいて、印加するキッカー電流および減衰補充電流の波形パターンの一実施例を示す図である。
【図４】 本発明の共振型揺動モーターにおける制御回路の一実施例を示す図で
ある。
【図５】 本発明の共振型揺動モーターにおける振動開始から共振に至る遷移領域の一実施例を示す図である。
【図６】 本発明の共振型揺動モーターにおける共振の立上がり性の一実施例を示す図である。
【図７】 本発明の共振型揺動モーターの他の実施例を示す要部断面図である。
【図８】 参考例を示す要部断面図である。
【図９】 従来の位置決め装置を説明する図である。
【図１０】 従来の位置決め装置を説明する図である。[0001]
BACKGROUND OF THE INVENTION
  The present invention is used for, for example, writing on a recording medium such as a facsimile, a copying machine, and a printer, and reading a pen scanner, a barcode, and the like.Scanning optical deviceIt has a high-precision positioning function with excellent vibration isolation useful forFor light deflectionThe present invention relates to a resonance type oscillating motor.
[0002]
[Prior art]
FIG. 9 shows an example of a conventional scanning optical apparatus (see Japanese Patent Laid-Open No. 61-97621). In FIG. 9, a plate spring 130 is used to prevent the generated vibration from being transmitted to the optical surface plate 131, and the auxiliary plate 133 is attached to the substrate 132 fixed to the optical surface plate 131 via the plate spring 130a. In addition, the auxiliary plate 133 and the gantry 134 are attached via a leaf spring 130b, and a holding member 135 is erected on the gantry 134. In addition, a support shaft 136 for rotatably supporting the rotary polygon mirror 70 is provided on the holding member 135. With this configuration, the vibration of the rotary polygon mirror 70 is prevented from being transmitted to the optical system (not shown) via the optical surface plate 131.
[0003]
FIG. 10 shows another example of a conventional scanning optical device (see Japanese Utility Model Laid-Open No. 3-114854). In FIG. 10, the polygon mirror 113 is rotated by driving the polygon scanner motor 140, and laser light emitted from a laser unit (not shown) passes through the polygon mirror 113, the focus lenses 150 and 160, and the folding mirrors 170 and 180. Data is written by scanning over 90.
[0004]
[Problems to be solved by the invention]
However, in FIG. 9, there are problems such as complicated selection of a leaf spring in consideration of the natural frequency (also referred to as resonance frequency) and an increase in the size of the apparatus.
Further, in FIG. 10, when the polygon scanner motor 140 is rotated, vibration is generated due to unbalance of the rotor of the motor, and this vibration is transmitted to the optical housing 110 through the flange portion 114a, which adversely affects the folding mirrors 170 and 180. There is a problem that the recorded image is disturbed. For this reason, anti-vibration measures such as providing an anti-vibration member such as rubber between the optical housing and the flange portion of the polygon scanner motor, or providing a step on an attachment member for attaching the scanner motor to the housing are provided. It is necessary and has both the problem of the complexity of the device configuration and the increase in size.
[0005]
  The present invention solves the above-mentioned conventional problems and is suitable for high-accuracy positioning by having an excellent vibration-proof property, and is a low power consumption type, which can be further downsized and inexpensive.For light deflectionAn object of the present invention is to provide a resonance type swing motor.
[0006]
[Means for Solving the Problems]
  To achieve the above object, the present inventionResonant oscillation motor for optical deflectionA balancer in which a permanent magnet and a yoke that form a magnetic air gap are disposed, and a magnetic field generating coil disposed in the magnetic air gap are fixed.A light deflection memberAnd the operation base and the balancer are connected to the support base so as to be able to resonate.HaveThe technical means was adopted.
  AlsoOf the present inventionResonant oscillation motor for optical deflectionThe permanent magnet and yoke that form the magnetic air gap are disposed.A light deflection memberThe operation object, a balancer to which a coil for generating a magnetic field disposed in the magnetic gap is fixed, and a support base, and the operation object and the balancer are connected to the support base so as to be able to resonate.HaveThe technical means was adopted.
[0007]
  In the present invention, the operation object and the support base and the balancer and the support base are respectively connected by springs.HaveIt is preferable.
  The spring is preferably a leaf spring.
  The yoke is made of a ferromagnetic E-shaped yoke, and the permanent magnets are fixed to the inner surfaces of the protrusions at both ends of the E-shaped yoke, and the permanent magnet and the protrusion at the center of the E-shaped yoke are opposed to each other. It is preferable to form a magnetic gap.
  The spring is a leaf spring, the yoke is made of a ferromagnetic E-shaped yoke, the permanent magnets are fixed to the inner surfaces of the protrusions at both ends of the E-shaped yoke, and the permanent magnet and the E-shaped yoke It is preferable to form a magnetic gap by facing the central projection.
  In addition, the present inventionFor light deflectionResonant swing motor(Hereafter referred to as a resonance type oscillating motor)Is characterized in that the transition time from the start of vibration to the arrival of resonance is 1.0 (sec.) Or less.
[0008]
  The present invention controls the amplitude and frequency of vibration by adopting resonance vibration in a swing motor composed of a unique vibration system in which a spring (preferably a leaf spring) is combined with a drive system of a so-called swing type actuator. At the same time, vibration transmission to the support base can be suppressed, and a highly accurate positioning function can be provided.
  The feature of the resonance type swing motor of the present invention is(1)Because of the resonant vibration system, the amplitude of the vibration of the moving object and / or balancer to which a highly accurate positioning function is provided can be adjusted by the mass of each of the moving object and the balancer and the spring constant of the spring connected to both. At the same time, vibration transmission to the support base is suppressed to a very small level. Therefore, the support base and the members connected to the support base (excluding the operation object and the balancer) exhibit excellent vibration isolation, and high-accuracy positioning is possible.(2)The transition time from the start of vibration to resonance can be made 1.0 (sec.) Or less, and the rise performance is dramatically improved. For this purpose, a kicker current is input.(3)A low power consumption type energy supply method of periodically supplying a damping supplemental current is adopted as an energy supply method for the attenuation of resonance vibration.
  The kicker current and the attenuation replenishment current are input as a one-wave current with a reduced duty time in order to reduce power consumption.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
  Hereinafter, the resonance type oscillating motor of the present invention will be described with reference to the drawings.
  Figure1 (a) is a cross-sectional view of an essential part showing an embodiment in which a resonance type swing motor of the present invention is used in a scanning optical device.
  In the figure, an operation object 1 is a mirror 7 that deflects and scans a light beam emitted from a light source (not shown) (for example, Al is vapor-deposited on the surface of a known glass body, and the reflectance is set to 92% and the absorption wavelength is set to 650 nm. The dimensions are formed in a plate shape of 30 mm × 20 mm × 1.0 mm), and a substantially annular coil 8 fixed to the mirror 7. 2 is a balancer, which is an E-shaped ferromagnetic yoke 12 (for example, manufactured by SS400) and permanent magnets 10 and 10 (for example, Nd-Fe-B anisotropic sintered magnet manufactured by Hitachi Metals, Ltd .: HS37BH). And having an oxidation resistant film such as Ni plating on the surface) and a weight 14 (for example, manufactured by A5052P). Here, the permanent magnets 10 and 10 provided with the magnetic poles N and S shown on the inner side surfaces of the protrusions 12a and 12c formed at both ends of the E-shaped ferromagnetic yoke 12 are epoxy adhesive (for example, , Araldite AV138, etc.), and the fixed permanent magnets 10, 10 and the central protrusion 12b of the E-shaped ferromagnetic yoke 12 face each other to form the magnetic gaps 6, 6. Has been. Further, a weight 14 for adjusting the mass of the balancer 2, that is, the weight, is disposed on the side of the ferromagnetic yoke 12 where no protrusion is provided. Reference numeral 3 denotes a support base (for example, made of polycarbonate). The support base 3 and the operating object 1 are connected via a leaf spring 4. The support base 3 and the balancer 2 are connected via a leaf spring 5. Here, the support base 3 is a fixed part that supports the operation object 1 and the balancer 2 via the leaf springs 4 and 5, and is a part that constitutes a part of an optical housing of an optical scanning device (not shown), for example. Therefore, very severe vibration proofing is given. The leaf springs 4 and 5 have a rectangular cross-sectional shape, and the shape in the length direction is substantially linear. The effect of the leaf springs 4 and 5 is almost the same as that of the spiral spring (helical spring), and the resonance of the resonance type oscillating motor of the present invention can be maintained smoothly. With the above configuration, the resonance type swing motor 50 of the present invention including the operation object 1, the balancer 2, the support base 3, and the leaf springs 4 and 5 is configured.
  When the resonant swing motor 50 is stationary, the operating object 1 and the support base 3 are supported by fulcrums 4 a and 4 b of the plate spring 4, and the balancer 2 and the support base 3 are connected to the plate spring 5. As a result of being supported by the fulcrums 5a and 5b, the moving object 1 and the balancer 2 are configured to be stationary with an interval 13 therebetween. FIG. 1A shows an example in which the operating object 1 side is used as a light beam deflecting member.
  Further, in FIG. 1A, the support base 3 can be fastened to a portion that requires extremely severe vibration isolation such as an optical housing (not shown) by using a known fixing means such as screwing.
[0010]
  Next, FIG. 1B conceptually shows an example of the relative positions of the operating object 1 and the balancer 2 in the stationary and resonant states. 1B, the same reference numerals as those in FIG. 1A represent the same components as those in FIG.
  In FIG. 1B,Not shownWhen a drive current for resonance described later is supplied to the coil 8, the magnetic field of the coil 8Not shownDue to the interaction with the magnetic field of the permanent magnets 10 and 10, the driving force (F) between the operating object 1 and the balancer 2 is equal in size and in the opposite direction.ButOccurrenceYouThe With this driving force F, the moving object 1 and the balancer 2 start to vibrate around 4a, 4b and 5a, 5b as fulcrums, and the moving object 1 and the balancer 2 exist in a very short time (1 sec or less). Resonance states having respective amplitudes are reached, such as being located at the operation object 1 ′ and the balancer 2 ′ at the time point and being located at the operation object 1 ″ and the balancer 2 ″ at another time point, and will be described later. This resonance state is maintained while energy corresponding to the resonance attenuation is supplied. Here, the vibration transmitted from the operation object 1 and the balancer 2 to the support base 3 is very small. Therefore, the member connected to the support base 3 other than the operation object 1 and the balancer 2 or to the support base 3 is used. Vibration transmission to a portion related to writing or reading of the directly connected light beam is prevented, and the light beam can be deflected with high accuracy.
[0011]
  Since the resonance type oscillating motor 50 of the present invention is a resonance vibration system connected by two springs 4 and 5 as shown in FIG. 1, the resonance frequency (fo) of the operation object 1 side and the balancer 2 side. Is fo = (1 / 2π) × (√K_d/ √m_d) = (1 / 2π) × (√K_b/ √m_b). Where (K_d) Is the spring constant of the leaf spring 4, (m_d) Is the mass of the moving object 1, (K _b ) Is the spring constant of the leaf spring 5, (m_b) Is the mass of the balancer 2. Therefore, when the moving object 1 and the balancer 2 resonate at the vibration frequency fo, K_d/ M_d= K_b/ M_bIs established. Further, in the resonance state, the amplitude (w_d) Is w_d= (F / m_d) X (1 / 2πfo)²And the amplitude of the balancer 2 (w_b) Is w_b= (F / m_b) X (1 / 2πfo)²Given in. Here, as described above, the magnitude of the driving force F is equal between the operation object 1 and the balancer 2 (note that the direction of F acts oppositely between the two).
(W_d/ W_b) = (1 / m_d) / (1 / m_b) = (M_b/ M_d)
  Thus, in the resonance type oscillating motor 50 of the present invention, the resonance frequency fo and the resonance amplitude ratio (w_d/ W_b) Can be adjusted by the spring constant of the leaf springs 4 and 5 and the mass (that is, the weight) of the moving object 1 and the balancer 2.
  And K_d/ K_b= M_d/ M_bIf configured to be <1,
(W_d/ W_b) = (M_b/ M_d)> 1, and the moving object 1 becomes a soft vibration system with respect to the balancer 2, and the amplitude of the moving object 1 can be made larger than that of the balancer 2. From the point of practicality, K_d/ K_b= M_d/ M_b= 0.01 to 0.80 is particularly preferable.
  K_d/ K_b= M_d/ M_bIf configured to be> 1,
(W_d/ W_b) = (M_b/ M_d) <1, the balancer 2 becomes a soft vibration system with respect to the operation object 1, and the amplitude of the balancer 2 can be made larger than that of the operation object 1. From the point of practicality, K_d/ K_b= M_d/ M_b= 1.25 to 100 is particularly preferable. K_d/ K_b= M_d/ M_bIt is also possible to configure so that = 1.
[0012]
Next, in FIG. 1B, the incident light beam 9 is deflected by the mirror 7a portion of the resonating operation object 1 (in FIG. 1B, the incident angle θ1 ′ (θ1 ″) = reflection angle θ2 ′ ( θ2 ″))), and the deflected beam 11 ′ (11 ″).
[0013]
Next, in the resonance type swing motor 50 of the present invention, Table 1 shows an example of the size and weight of the leaf spring 4 when the resonance frequency is 50.0 ± 0.1 (Hz). An example of the weight is shown in Table 2.
[0014]
[Table 1]

[0015]
[Table 2]

[0016]
In order to adjust the resonance frequency of the resonant oscillation motor 50 of the present invention to 50.0 ± 0.1 (Hz), the Young's modulus at room temperature is 10,000 to 25,000 kgf / mm.²The leaf springs 4 and 5 having the specifications shown in Tables 1 and 2 were manufactured using a material in the range (for example, SUS304CP) and used for the resonance type swing motor 50 of the present invention.
[0017]
  A known spring can be used as the spring used in the resonance type oscillating motor of the present invention..Specific examples include, for example, cylindrical compression coil springs, non-cylindrical compression coil springs, cylindrical tension coil springs, torsion coil springs, flat wave coil springs, garter springs, twisted wire springs, and other coil springs; contact spiral springs, non-contact spiral springs Spiral springs such as: Equal-pitch square, non-equal-pitch rectangular bamboo springs, etc .: Single leaf springs, leaf springs such as stacked leaf springs, flat springs such as conical springs, disc flat springs, ring springs, torsion bars, etc. An example is a metal spring. Moreover, the rubber spring etc. of a compression type, a shear type, a compression shear type, a torsion type etc. are mentioned. Moreover, the air spring etc. which utilize compressed air etc. are mentioned. theseUThat is, a metal spring that can easily set a spring constant is preferable, and a leaf spring that can set a spring constant very easily is particularly preferable. The cross-sectional shape of the leaf spring may be any of square, rectangle, circle, trapezoid, parallelogram, H shape, and indefinite shape.
  And the metal springIs, Carbon steel, Mn steel, Si—Mn steel, Mn—Cr steel, Mn—Cr—B steel, Si—Cr steel, Cr—V steel, spring steel such as stainless steel, and Cu—Sn— such as phosphor bronze It can be formed by appropriately selecting from known materials such as P alloys, Cu—Ni—Zn alloys such as Western white, Cu—Be, Cu—Be—Co alloys such as beryllium copper, and the like.
  The cross-sectional shape of the spring may be any of square, rectangle, circle, trapezoid, parallelogram, H shape, and indefinite shape.
[0018]
The yoke used for the resonance type oscillating motor of the present invention can be formed of a known ferromagnetic and / or nonmagnetic material, but it is a known strong magnetic field that forms a magnetic path of a magnetic flux generated from a permanent magnet and contributes effectively to the formation of a magnetic gap. It is preferable to use a magnetic material. Specific examples include pure iron, soft iron, carbon steel, ferritic and martensitic magnetic stainless steel, and iron-based castings such as cast iron and cast steel, and known soft ferrites such as Mn-Zn ferrite, and permalloy. Fe-Ni-Co alloys such as Kovar, Fe-Ni-Co alloys such as Kovar, and so-called resin-bonded soft magnetic materials composed mainly of fine powders of these ferromagnetic materials and polymer compounds can be used.
Of these, inexpensive and high permeability carbon steel is particularly preferred. Further, a laminated yoke may be used.
[0019]
As the permanent magnet used for the resonance type oscillating motor of the present invention, a permanent magnet using a known manufacturing method (for example, a sintering method, a casting method, a hot rolling method, a super rapid cooling method, a bonded magnet method, etc.) can be used. And the general formula showing the basic composition as a permanent magnet is R-Fe-B system and Sm-Co._FiveSeries, Sm₂-Co₁₇Sm—Fe—N system (R is one or more of rare earth elements such as Nd and Dy including Y, and Co, Al, Nb, Ga, Fe, Cu, Zr as required) , Ti, Hf, Ni, Si, and the like, which can contain one or more known additive elements effective for magnetic properties, and inevitable impurity elements such as O, C, H, N, etc.) It can be manufactured using known permanent magnet materials such as magnets, ferrite magnets, alnico magnets, Mn—Al—C magnets, and Fe—Cr—Co magnets.
[0020]
FIG. 2 is a diagram conceptually illustrating an embodiment of a measuring means for measuring the amplitude, vibration frequency, etc. of the operating object 1 in the resonance type oscillating motor 50 of the present invention. 2, the same reference numerals as those in FIG. 1B are the same components as those in FIG. The moving object 1 reciprocates at a resonance frequency of 50.0 ± 0.1 (Hz) between predetermined resonance angles θ (for example, θ = 20 °), that is, between amplitudes 19 with 4a and 4b as fulcrums. This reciprocating motion is substantially symmetrical (θ / 2) with respect to the neutral point 17 of the amplitude 19. Then, the laser beam 16 is irradiated to a position A of 20 mm from the fulcrum 4a side on the mirror 7a side of the operation object 1, and the reflected laser beam 16 is detected by a known laser beam length measuring device (not shown) to detect amplitude and vibration. Measure frequency, etc.
Here, although the resonance angle θ = 0.1 to 179 ° can be formed, it is preferable to set θ = 7 to 20 ° from the viewpoint of practicality. The amplitude 19 can be appropriately determined in consideration of the design conditions and the like. In FIGS. 1 and 2, the leaf springs 4 and 5 are set so that the amplitude of the operation object 1 is 4 to 5 times the amplitude of the balancer 2. And the masses (that is, the respective weights) of the operation object 1 and the balancer 2 are set. That is, the operating object 1 side is a soft vibration system with respect to the balancer 2 side, and the (amplitude / input power) ratio of the operating object 1 is 4-5 times larger than the (amplitude / input power) ratio of the balancer 2. Is set. In the embodiment of FIG. 1, the resonance frequency is set to 50.0 ± 0.1 (Hz). However, considering the natural frequency in the resonance type oscillating motor of the present invention, the resonance frequency is 1 (Hz) to It is preferable to set to 50 (KHz), and from 10 to 1000 (Hz) is particularly preferable from the viewpoint of practicality.
[0021]
FIG. 3 conceptually illustrates an example of a waveform pattern of a drive current supplied to a magnetic field generating coil (for example, corresponding to the coil 8 in FIG. 1) in the resonance type oscillating motor of the present invention. FIG.
In FIG. 3, a kicker current 20 is a one-pulse substantially rectangular wave current of 120 (mA) and 10 (msec.), And is applied at the start of vibration of the resonance type oscillation motor. The attenuation replenishment current 21 is a multi-pulse substantially rectangular wave current of 60 (mA), 1 to 2 (msec.), And is repeatedly applied at the application period 22. The application period 22 is set equal to the resonance frequency, and is set to 20 (msec.), That is, the resonance frequency 50 (Hz) in FIG. Further, the pause time between the kicker current 20 and the first attenuation replenishment current 21 is set to 15 (msec.).
The kicker current 20 is preferably 1 to 10,000 (mA) and 0.1 to 250 (msec.) From the viewpoint of practicality, but if it is 10 to 500 (mA) and 5 to 50 (msec.), Resonance of This is particularly preferable from the standpoint of start-up and low power consumption.
The damping supplementary current 21 is preferably 1 to 10,000 (mA) and 0.02 to 1000 (msec) from the viewpoint of practicality. However, consistency with the natural frequency of the resonant oscillation motor and attenuation of resonance are preferred. 10 to 500 (mA) and 1 to 200 (msec.) Are particularly preferable from the viewpoint of reducing the energy consumption of the minute.
[0022]
FIG. 4 is a diagram showing an embodiment of a control circuit for a drive current supplied to the coil 8 in the resonance type oscillating motor 50 of the present invention.
In FIG. 4, a DC power supply 5 (V) is used as a standard power supply. Then, for example, a voltage signal corresponding to a kicker current 20 of 120 (mA), 10 (msec.) Is input to the port 1, and the transistor Q1 is turned on. After the elapse of 15 msec, a voltage signal corresponding to, for example, 60 (mA), 2 (msec.) Of the attenuation supplement current 21 is input to the port 2, and the transistor Q2 is turned on. At the same time, the counter electromotive voltage V generated from the coil 8_M(Back electromotive force I_M) Is suppressed by the diode 30. In this way, the drive current flowing through the coil 8 is controlled. R₁Indicates resistance and transistor Q₁And Q₂One end is grounded.
[0023]
FIG. 5 is a diagram for explaining a vibration transition region from the start of vibration of the operating object 1 to resonance in the resonance type oscillating motor 50 of the present invention. The vertical axis represents the drive current (mA) of the coil 8 and the amplitude of the operating object 1. (Mm) is taken, and the horizontal axis is time (msec.). In the amplitude curve 19 of FIG. 5, the point O is the vibration start point of the moving object 1, the point P is the first peak of the first period of amplitude, the point Q is the second peak of the first period of amplitude, and the point R , S, and T respectively indicate the start points of the second to fourth periods of amplitude. As described above, the kicker current 20 and the attenuation supplement current 21 described with reference to FIG. 3 are applied, and the operation object 1 exhibits the amplitude behavior of the amplitude curve 19 and reaches resonance having a predetermined amplitude and vibration frequency. Here, it is extremely important that the application of the kicker current 20 is completed by the first peak point P of the first period of the amplitude curve 19. If the kicker current 20 is applied beyond the first peak point P, the energy supplied to the resonant oscillation motor 50 by the kicker current 20 becomes inconsistent with the phase of the amplitude curve 19. , Worsening the rise of resonance. That is, the required time from the start of vibration to resonance is prolonged, which is not preferable.
In addition, as described above, the first attenuation supplement current 21 is applied at the time after the second peak point Q in the first period of amplitude, and the first attenuation supplement current 21 is applied after the second period of amplitude. On the other hand, by supplying the second and subsequent attenuation supplementary currents 21 at intervals of the resonance period 22 (for example, 50 (Hz)), resonance can be reached in an extremely short time (1 sec or less).
By supplying the kicker current 20 and the attenuation replenishment current 21 described above, the average power consumption of the resonance type oscillating motor 50 of the present invention can be reduced to 3 (mW) or less, and a reduction in power consumption is achieved.
[0024]
FIG. 6 is a diagram showing an example of good resonance rise of the operation object 1 in the resonance type oscillating motor 50 of the present invention. The vertical axis represents the amplitude (mm) of the operation object 1 and the horizontal axis represents time ( msec.).
In FIG. 6, 23 is a transition region from the start of vibration to resonance, and 24 is a resonance region. From FIG. 6, it can be seen that the time required for the transition region 23 is set to about 0.5 (sec.). In addition, when the above-mentioned kicker current 20 was not applied, it was confirmed that the transition region 23 in FIG. 6 deteriorated to about 5 (sec.), And the rise of resonance was significantly inhibited.
[0025]
  FIG. 7 shows an operation object 1 having a mirror 7, a ferromagnetic yoke 12, and permanent magnets 10, 10, a balancer 2 having a weight 14 and a coil 8, a support base 3, leaf springs 4, 5 An example of the oscillating motor 60 constituted by: In FIG. 7, the same reference numerals as those in FIG. 1A denote the same components as those in FIG.
  The resonance frequency of the swing motor 60 in FIG. 7 is set to 50.0 ± 0.1 (Hz), and the amplitude of the operation object 1 is set to 4 to the amplitude of the balancer 2 as in the case of the swing motor 50 in FIG. By setting it to 5 times,The operating object 1 side becomes a soft vibration system with respect to the balancer 2 side, and therefore the (amplitude / input power) ratio of the operating object 1 can be made larger than that of the balancer 2, and the swing motor of FIG. It was confirmed that the same effect as that of No. 50 was achieved.
[0026]
  In FIG. 8, the resonance type oscillating motor of the present invention is used for an electric shaver.referenceAn example is shown. In FIG. 8, the same reference numerals as those in FIG. 1A represent the same components as those in FIG.
  In FIG. 8, the operating object 1 and the balancer 2 are set to a resonance frequency of 200 (Hz), and the amplitudes of the operating object 1 and the balancer 2 are equal, that is, the resonance angle θ is equal, for example, θ = 15 °. . Further, the support base 3 is a vibration-proof fixed part that supports the operation object 1 and the balancer 2 via the leaf springs 4 and 5, respectively. For example, a part of the gripping part (not shown) in the electric shaver in FIG. Constitute. A safety cover 27 (for example, made of SUS304) is provided at the tip of the frames 26 and 26 (for example, made of polycarbonate containing glass) that are erected on both ends of the support base 3. For example, a large number of minute holes for intruding hair such as a beard are formed, and when the 27a side of the safety cover 27 is pressed against the face or the like, the beard that has entered from the minute hole is formed at the distal ends of the operation object 1 and the balancer 2, respectively. It is cut by the provided blades 25, 25. In this way, the configuration of the resonance type oscillating motor of the present invention can be used for an electric shaver or the like. In FIG. 8, different magnetic poles of the permanent magnets 10 and 10 are arranged to face each other in order to form stronger magnetic gaps 6 and 6.
[0027]
In the above-described embodiment, the resonance vibration system including two leaf springs, one coil, two or four permanent magnets, and one weight is described, but these numbers are limited. The resonance type oscillating motor of the present invention can be constituted by using a larger number of them instead of the above.
Further, the shape and number of the operation object, the balancer, the support base, and the like are not limited within the scope of the present invention.
In addition, by appropriately selecting the size, shape, etc. of the spring (preferably a leaf spring), it is possible to flexibly manufacture a small-sized to large-sized resonant oscillation motor.
Moreover, in the said Example, although using the balancer side independently for positioning is not described, it is clear from description of this invention that a balancer side can be used independently.
[0028]
【The invention's effect】
  Since the resonance type oscillating motor of the present invention utilizes resonance, it has an excellent anti-vibration function in which vibration can be balanced by resonance between the moving object and the balancer, and therefore, vibration transmission to the support base can be suppressed. For this reason,Light beam deflecting deviceIt is extremely useful for a device that requires a highly accurate positioning function such as the above. In addition, since the operating object can be set to a soft vibration system with respect to the balancer, there is an effect that the (amplitude amount / input power) ratio of the operating object can be increased. In addition, the balancer can be set to be a soft vibration system with respect to the moving object, and the effect of increasing the balancer's (amplitude amount / input power) ratio can also be achieved. It is also possible to set the amplitudes of the operating object and the balancer to be equal to each other and use them by resonating.
  In addition, if the energy supply system of the present invention is used, it is possible to achieve a low power consumption system that greatly improves the rise of resonance and supplements the energy for attenuation of resonance.
  Furthermore, since it is rich in dimensional compatibility and has a simple configuration, the price can be reduced.
[Brief description of the drawings]
FIG. 1 is a sectional view (a) of a main part and a diagram (b) illustrating a resonance state in an embodiment of a resonance type oscillating motor of the present invention.
FIG. 2 is a view for explaining an embodiment of a measuring means for measuring the amplitude, vibration frequency, etc. of the operating object in the resonance type oscillating motor of the present invention.
FIG. 3 is a diagram illustrating an example of waveform patterns of an applied kicker current and an attenuation supplement current in the resonance type oscillating motor of the present invention.
FIG. 4 is a diagram showing an embodiment of a control circuit in the resonance type oscillating motor of the present invention.
is there.
FIG. 5 is a diagram showing an embodiment of a transition region from the start of vibration to resonance in the resonant oscillation motor of the present invention.
FIG. 6 is a diagram showing an example of the rise of resonance in the resonance type oscillating motor of the present invention.
FIG. 7 is a cross-sectional view of an essential part showing another embodiment of the resonance type oscillating motor of the present invention.
[Fig. 8]Reference exampleIt is principal part sectional drawing which shows these.
FIG. 9 is a diagram illustrating a conventional positioning device.
FIG. 10 is a diagram illustrating a conventional positioning device.

Claims (7)

A balancer in which a permanent magnet and a yoke for forming a magnetic gap are disposed, an operation object in which a coil for generating a magnetic field disposed in the magnetic gap is fixed and constituting a light deflection member, and a support base preparative with comprising the said operation object and balancer and the resonance capable optical deflection resonant oscillating motor, characterized in Tei Rukoto connected to the support base. An operation object in which a permanent magnet and a yoke forming a magnetic gap are arranged and constituting a light deflection member, a balancer to which a magnetic field generating coil arranged in the magnetic gap is fixed, and a support base preparative with comprising the said operation object and balancer and the resonance capable optical deflection resonant oscillating motor, characterized in Tei Rukoto connected to the support base. Wherein the moving object and the support base and claim 1 or claim 2 the optical deflection resonant oscillating motor according between are each characterized by Tei Rukoto are connected by a spring and between the balancer and support base. 4. The resonance type swing motor for deflecting light according to claim 3, wherein the spring is a leaf spring. The yoke is made of a ferromagnetic E-shaped yoke, the permanent magnets are fixed to the inner surfaces of the protrusions at both ends of the E-shaped yoke, and the permanent magnet and the protrusions at the center of the E-shaped yoke are opposed to each other. 3. A resonant oscillation motor for deflecting light according to claim 1, wherein a gap is formed. The spring is a leaf spring, the yoke is made of a ferromagnetic E-shaped yoke, the permanent magnets are fixed to the inner side surfaces of the protrusions at both ends of the E-shaped yoke, and the central portion of the permanent magnet and the E-shaped yoke 4. A resonant oscillation motor for deflecting light according to claim 3, wherein a magnetic air gap is formed so as to oppose the projection of the optical deflection . The resonance type oscillation motor for optical deflection according to any one of claims 1 to 6, wherein the transition time from the start of vibration to the arrival of resonance is 1.0 (sec.) Or less.

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