JPH0993901A - Resonant bibrating motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain excellent vibration-proof characteristic by connecting, to a support base, a permanent magnet to form a magnetic gap, a balancer arrang ing the yokes and an operating object fixing a coil for generating a magnetic field in such a manner as assuring resonance. SOLUTION: When a drive current for resonance is supplied to a coil 8, drive forces F which are equal in amplitude are generated in different directions between an operating object 1 and a balancer 2 due to the mutual effect in the magnetic field of the coil 8 and the magnetic fields of the permanent magnets 10, 10. Owing to the drive force F, the operating object 1 and balancer 2 start respective vibration defining 4a, 4b and 5a, 5b as the fulcrum points and reach the resonance condition having the respective amplitude at a certain timing within a very short period of time. Vibration transmitted to a support base 3 from the operating object 1 and balancer 2 is very small, and change of optical beam may be performed at a higher accuracy by preventing transfer of vibration to a part which is related to writing or reading of optical beam connected directly to the support base 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a scanning optical device used for writing on a recording medium such as a facsimile, a copying machine, a printer or the like, a pen scanner, a bar code or the like, and a mechanical shutter for interrupting light at regular intervals. ,
The present invention relates to a resonance type rocking motor having a high-precision positioning function which is useful for electric shaving and the like and has excellent vibration damping properties.

[0002]

2. Description of the Related Art FIG. 9 shows an example of a conventional scanning optical device (see Japanese Patent Laid-Open No. 61-97621). In FIG. 9, the leaf spring 130 is used to prevent the generated vibration from being transmitted to the optical surface plate 131, and the auxiliary plate 133 is attached to the substrate 132 fixed to the optical surface plate 131 via the leaf spring 130a. At the same time, the auxiliary plate 133 and the pedestal 134 are attached via the leaf spring 130b, and the holding member 135 is erected on the pedestal 134. Also, the holding member 13
5 is provided with a support shaft 136 for rotatably supporting the rotary polygon mirror 70. With this configuration, it is possible to prevent the vibration of the rotary polygon mirror 70 from being transmitted to the optical system (not shown) via the optical surface plate 131.

FIG. 10 shows another example of a conventional scanning optical device (see Japanese Utility Model Laid-Open No. 3-114854). In FIG. 10, the polygon mirror 113 is rotated by driving the polygon scanner motor 140, and the laser light emitted from a laser unit (not shown) passes through the polygon mirror 113, the focus lenses 150 and 160, and the folding mirrors 170 and 180 to form a photoconductor. Data is written by scanning over 90.

[0004]

However, in FIG. 9, there are problems that the selection of the leaf spring in consideration of the natural frequency (also referred to as resonance frequency) becomes complicated and the size of the apparatus becomes large. Further, in FIG. 10, when the polygon scanner motor 140 rotates, vibration occurs due to imbalance of the rotor of the polygon scanner motor 140, and this vibration is transmitted to the optical housing 110 through the flange portion 114a, which adversely affects the folding mirrors 170 and 180. However, there is a problem that the recorded image is disturbed. Therefore, anti-vibration measures such as providing a vibration isolating member such as rubber between the optical housing and the flange portion of the polygon scanner motor, or providing a step on an attaching member for attaching the scanner motor to the housing are taken. It becomes necessary, and there is a problem that the device configuration becomes complicated and the device becomes large.

The present invention solves the above-mentioned conventional problems and is suitable for high-accuracy positioning due to its excellent anti-vibration property, is of low power consumption type, and can be miniaturized and inexpensive resonance. An object is to provide a rocking motor of a mold.

[0006]

In order to achieve the above object, in the first aspect of the present invention, a balancer in which a permanent magnet and a yoke forming a magnetic gap are arranged, and a balancer arranged in the magnetic gap. The present invention employs a technical means that includes an operating object to which a coil for generating a magnetic field is fixed, and a support base, and that the operating object and the balancer are resonably connected to the support base.
Next, in a second aspect of the present invention, an operating object in which a permanent magnet and a yoke forming a magnetic gap are arranged, and a balancer in which a coil for generating a magnetic field arranged in the magnetic gap is fixed. A technical means is adopted in which a support base is provided, and the operation object and the balancer are resonably connected to the support base.

In the present invention, it is preferable that the operating object and the support base and the balancer and the support base are connected by springs. Further, it is preferable that the spring is a leaf spring. Further, the yoke is composed of a ferromagnetic E-shaped yoke, permanent magnets are fixed to the inner side surfaces of the protrusions at both ends of the E-shaped yoke, and the permanent magnet and the central protrusion of the E-shaped yoke are opposed to each other. It is preferable to form a magnetic gap. Further, the spring is a leaf spring, the yoke is composed of a ferromagnetic E-shaped yoke, the permanent magnets are fixed to the inner side surfaces of the protrusions at both ends of the E-shaped yoke, and the permanent magnet and the E-shaped yoke are It is preferable to form a magnetic gap by facing the protrusion in the central portion. Further, the resonance type rocking motor of the present invention is characterized in that the transition time from the start of vibration to the arrival of resonance is 1.0 (sec.) Or less.

The present invention employs resonance vibration in a swing motor composed of a unique vibration system in which a drive system of a so-called swing type actuator is combined with a spring (preferably a leaf spring), so that the amplitude and frequency of the vibration are increased. It is possible to control the vibration and suppress the transmission of vibration to the support base, and to provide a highly accurate positioning function. Since the characteristic feature of the resonance type oscillating motor of the present invention is the resonance vibration system, the amplitude of the vibration of the operation object and / or the balancer to which a highly accurate positioning function is imparted is set to the mass of each of the operation object and the balancer and both. It can be adjusted by the spring constant of the connected spring, and vibration transmission to the support base is suppressed to a very small level. Therefore, the support base and the members (excluding the moving object and the balancer) connected to the support base exhibit excellent vibration damping properties, and high-precision positioning is possible. The transition time from the start of vibration to resonance can be set to 1.0 (sec.) Or less, and the rising property is dramatically improved. Therefore, a kicker current is input. As the energy supply method for the attenuation of the resonance vibration, a low power consumption type energy supply method that periodically supplies a damping supplement current is adopted. The kicker current and the attenuation replenishment current are input as a one-wave current with a reduced duty time in order to reduce power consumption.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The resonance type rocking motor of the present invention will be described below with reference to the drawings. FIG. 1A is a sectional view of an essential part showing an embodiment in which the resonance type oscillating motor of the present invention is used in a scanning optical device. In the figure, an object 1 is a mirror 7 that deflects and scans a light beam emitted from a light source (not shown).
(For example, Al is vapor-deposited on the surface of a known glass body, and the reflectance is set to 92% and the absorption wavelength is set to 650 nm. The dimensions are formed in a plate shape of 30 mm × 20 mm × 1.0 mm). And a substantially annular coil 8 fixed to the mirror 7. 2 is a balancer, E
Character-shaped ferromagnetic yoke 12 (for example, made of SS400) and permanent magnets 10 and 10 (for example, Nd- made by Hitachi Metals, Ltd.)
Fe-B type anisotropic sintered magnet: HS37BH, which has an oxidation resistant film such as Ni plating on the surface. ) And weight 1
4 (for example, made of A5052P). Here, the permanent magnets 10 and 10 having the magnetic poles N and S shown in the drawing are provided with epoxy adhesives (for example, an epoxy adhesive) on the inner surface of each of the protrusions 12a and 12c formed at both ends of the E-shaped ferromagnetic yoke 12. , Araldite AV138, etc.), and the fixed permanent magnets 10 and 10 and the central protrusion 12b of the E-shaped ferromagnetic yoke 12 face each other to form magnetic air gaps 6 and 6. Has been done. Further, the balancer 2 is provided on the side of the ferromagnetic yoke 12 where there is no protrusion.
Weight 14 for adjusting the overall mass or weight
Are arranged. 3 is a support base (made of polycarbonate, for example). The support base 3 and the action object 1 are connected via a leaf spring 4. The support base 3 and the balancer 2 are connected via a leaf spring 5. Here, the support base 3 is a fixed portion that supports the moving object 1 and the balancer 2 via the leaf springs 4 and 5, and is a portion that constitutes a part of an optical housing of an optical scanning device (not shown), for example. Therefore, it has very strict anti-vibration properties. The leaf springs 4 and 5 have a rectangular cross section and are formed in a substantially linear shape in the length direction. The action and effect of the leaf springs 4 and 5 are almost the same as those of the spiral spring, and it is possible to smoothly maintain the resonance of the resonance type rocking motor of the present invention. With the above-described configuration, the resonance type swing motor 50 of the present invention including the operation object 1, the balancer 2, the support base 3, and the leaf springs 4 and 5 is configured. Then, when the resonance type swing motor 50 is stationary, the operation object 1 and the support base 3 are supported by the fulcrums 4a and 4b of the leaf spring 4, and the balancer 2 and the support base 3 form the leaf spring 5. As a result of being supported by the fulcrums 5a and 5b,
The motion object 1 and the balancer 2 are configured to be stationary with a gap 13 therebetween. It should be noted that FIG. 1A shows an example in which the object 1 side is used as a light beam deflecting member. Also, FIG.
In (a), it is also possible to fasten the support base 3 to a portion such as an optical housing (not shown) that requires extremely strict anti-vibration properties by using known fixing means such as screwing.

Next, FIG. 1 (b) conceptually shows an example of the relative positions of the operating object 1 and the balancer 2 in the stationary and resonant states. In FIG. 1B, the same reference numerals as those in FIG. 1A represent the same components as those in FIG. In FIG. 1B, when a drive current for resonance, which will be described later, is supplied to the coil 8, the interaction between the magnetic field of the coil 8 and the magnetic fields of the permanent magnets 10 and 10 causes the object 1 and the balancer 2 to interact with each other. A driving force (F) of equal magnitude and in the opposite direction is generated. By this driving force F, the moving object 1
And the balancer 2 start to vibrate with 4a, 4b and 5a, 5b as fulcrums respectively, and during a very short time (1 sec or less), the motion object 1 and the balancer 2 are at a certain point in time the motion object 1 '', And at other times, the moving object 1''and the balancer 2'', respectively, reach a resonance state having respective amplitudes, and thereafter, energy for resonance attenuation described later is supplied. However, this resonance state is maintained. Here, the vibration transmitted from the operation object 1 and the balancer 2 to the support base 3 is extremely small, and therefore, via the member connected to the support base 3 other than the operation object 1 and the balancer 2,
Alternatively, it is possible to prevent the vibration from being transmitted to a portion which is directly connected to the support base 3 and which is related to writing and reading of the light beam, so that the light beam can be deflected with high accuracy.

The resonance type swing motor 50 of the present invention is shown in FIG.
As shown in (1), since the resonance vibration system is connected by the two springs 4 and 5, the resonance frequency (f _O ) on the object 1 side and the balancer 2 side is f _O = (1 / 2π) × ( √K _d / √
m _d ) = (1 / 2π) × (√K _b / √m _b ). Here, (K _d ) is the spring constant of the leaf spring 4, ( _md ) is the mass of the moving object 1, (K _d ) is the spring constant of the leaf spring 5,
(M _b) is the mass of the balancer 2. Therefore, when the operating object 1 and the balancer 2 resonate at the vibration frequency f _O , K _d / _md = K _b / m _b holds. Furthermore, in the resonance state, the amplitude (w _d ) of the operation object 1 is w _d = (F / m _d ).
X (1 / 2πf _O ) ² and the amplitude (w _b ) of the balancer ² is given by w _b = (F / m _b ) × (1 / 2πf _O ) ² . Here, as described above, since the magnitude of the driving force F is the same between the moving object 1 and the balancer 2 (note that the directions of F act oppositely between the two), (w _d / w _b ) = (1
/ M _d ) / (1 / m _b ) = (m _b / m _d ). As described above, in the resonance type swing motor 50 of the present invention, the resonance frequency f _O and the resonance amplitude ratio (w _d / w _b ) are set to the spring constants of the leaf springs 4 and 5, the operation object 1 and the balancer 2. It has an excellent feature that it can be adjusted with the mass (that is, the weight) of the. Then, <when configured to be _{1, (w d / w b} ) = (m b / m d)> K d / K b = m d / m b relative to 1, and the operation was 1 balancer 2 It becomes a soft vibration system, and the amplitude of the operation object 1 can be set large with respect to the balancer 2. From the point of practicality, K _d / K _b = m _d / m _b
= 0.01 to 0.80 is particularly preferable. Also, K
_When configured so that _d / K _b = _md / m _b > 1, (w _d
/ W _b ) = (m _b / m _d ) <1, and the balancer 2 becomes a soft vibration system with respect to the operation object 1, and the amplitude of the balancer 2 can be set large with respect to the operation object 1. From the viewpoint of practicality, particularly preferably a _{K d / K b = m d} / m b = 1.25~100. Further, it is also possible to freely configure K _d / K _b = m _d / m _b = 1.

Next, in FIG. 1B, the incident light beam 9 is deflected by the mirror 7a portion of the operating object 1 in the resonance state (incident angle θ1 '(θ1'') = reflection angle in the same figure). θ2 ′ (θ2 ″)), the deflected beam 11 ′ (1
1 ″).

Next, in the resonance type rocking motor 50 of the present invention, an example of the size and weight of the leaf spring 4 when the resonance frequency is 50.0 ± 0.1 (Hz) is shown in Table 1. 5
Table 2 shows an example of the dimensions and weight of the.

[0014]

[Table 1]

[0015]

[Table 2]

In order to adjust the resonance frequency of the resonance type swing motor 50 of the present invention to 50.0 ± 0.1 (Hz), the Young's modulus at room temperature is 10,000 to 25,000 kg.
Material in the range of f / mm ² (eg SUS304C
P etc. ) Using the leaf springs 4 and 5 of the specifications in Tables 1 and 2.
Was manufactured and used in the resonance type swing motor 50 of the present invention.

A known spring can be used as the spring used in the resonance type swing motor of the present invention. As a specific example,
For example, a coil spring such as a cylindrical compression coil spring, a non-cylindrical compression coil spring, a cylindrical tension coil spring, a torsion coil spring, a flat wave coil spring, a garter spring, and a twist wire spring; a spiral spring such as a contact spiral spring and a non-contact spiral spring; Takenoko springs of equal pitch and non-uniform pitch; leaf springs such as single leaf springs and laminated leaf springs, conical flat springs, flat springs such as disc flat springs; ring springs; metal springs such as torsion bars . Further, rubber springs such as a compression type, a shearing type, a compression shearing type and a torsion type may be used. Further, an air spring or the like that uses compressed air or the like can be given. These metal springs are preferable, and the metal springs whose spring constants are easily set are preferable, and the leaf springs whose spring constants are very easily set are particularly preferable. The cross-sectional shape of this leaf spring may be any of square, rectangle, circle, trapezoid, parallelogram, H-shape, and irregular shape. Then, the metal spring teeth, carbon steel, Mn steel, Si-
Mn steel, Mn-Cr steel, Mn-Cr-B steel, Si-Cr
Steel, Cr-V steel, spring steel such as stainless steel, Cu-Sn-P alloy such as phosphor bronze, and Cu-N such as nickel silver
Cu-Be, C such as i-Zn alloy and beryllium copper
It can be formed by appropriately selecting from known materials such as u-Be-Co alloy. The cross-sectional shape of the spring may be square, rectangular, circular, trapezoidal, parallelogrammatic, H-shaped, or indefinite.

The yoke used in the resonance type oscillating motor of the present invention can be formed of a known ferromagnetic and / or non-magnetic material, but serves as a magnetic path for the magnetic flux generated from the permanent magnet and effectively contributes to the formation of a magnetic gap. It is preferable to use a known ferromagnetic material. Specific examples thereof include pure iron, soft iron, carbon steel, ferritic and martensitic magnetic stainless steels, iron-based castings such as cast iron and cast steel, and Mn-
Well-known soft ferrites such as Zn ferrite, Fe-Ni alloys such as permalloy, Fe-N such as Kovar
It is possible to use an i-Co alloy, a so-called resin-bonded soft magnetic material mainly composed of fine powder of these ferromagnetic materials and a polymer compound. Of these, inexpensive and high-permeability carbon steel is particularly preferable. Furthermore, a yoke having a laminated structure may be used.

As the permanent magnet used in the resonance type oscillating motor of the present invention, one produced by a known manufacturing method (eg, sintering method, casting method, hot rolling method, ultraquenching method, bond magnet method, etc.) can be used. . Then, the general formula R-Fe-B-based and Sm-Co ₅ system representing the basic composition as a permanent magnet,
Sm ₂ -Co ₁₇ system, Sm-Fe-N system (R is Y containing Y)
One or more of rare earth elements such as d and Dy, and if necessary, Co, Al, Nb, Ga, Fe, C
u, Zr, Ti, Hf, Ni, one or more known additive elements effective for magnetic properties such as Si, and O, C,
Inevitable impurity elements such as H and N can be contained. ) Etc. rare earth magnets and ferrite magnets, alnico magnets,
It can be manufactured using a known permanent magnet material such as an Mn-Al-C based magnet or an Fe-Cr-Co based magnet.

FIG. 2 is a diagram conceptually illustrating an embodiment of a means for measuring the amplitude, vibration frequency, etc. of the operating object 1 in the resonance type swing motor 50 of the present invention. In FIG. 2, FIG.
Reference numerals that are the same as those in (b) indicate the same components as in FIG. 1 (b). The moving object 1 has a predetermined resonance angle θ (for example, θ = 20 °), that is, an amplitude of 1 with 4a and 4b as fulcrums.
It reciprocates between 9 at a resonance frequency of 50.0 ± 0.1 (Hz). This reciprocating motion is substantially symmetrical (θ / 2) with respect to the neutral point 17 of the amplitude 19. And the moving object 1
The laser beam 16 is irradiated to the position A 20 mm from the fulcrum 4a side on the mirror 7a side, and the reflected laser beam 16 is detected by a known laser beam length measuring device (not shown) to measure the amplitude, vibration frequency, etc. To do. Here, the resonance angle θ = 0.1 to 179 ° can be formed,
From the point of practicality, it is preferable to set θ = 7 to 20 °. Although the amplitude 19 can be appropriately determined in consideration of design conditions and the like, in FIGS. 1 and 2 described above, the leaf springs 4 and 4 are set so that the amplitude of the operation object 1 is 4 to 5 times the amplitude of the balancer 2.
The spring constant of 5 and each mass (that is, each weight) of the moving object 1 and the balancer 2 are set. That is, the action object 1 side becomes a soft vibration system with respect to the balancer 2 side, and the (amplitude / input power) ratio of the action object 1 is 4 to 5 times as large as the (amplitude / input power) ratio of the balancer 2. It is set. In the embodiment shown in FIG. 1, the resonance frequency is set to 50.0 ±
Although set to 0.1 (Hz), the resonance frequency is set to 1 in consideration of the natural frequency of the resonance type rocking motor of the present invention.
It is preferably set to (Hz) to 50 (KHz), and particularly preferably 10 to 1000 (Hz) from the viewpoint of practicality.

FIG. 3 shows a coil for generating a magnetic field (for example, the coil 8 in FIG. 1) in the resonance type rocking motor of the present invention.
Is equivalent to FIG. 3 is a diagram conceptually illustrating an example of a waveform pattern of a drive current supplied to (1). In FIG. 3, the kicker current 20 is 120 (mA) and 10 (msec.).
Is a substantially rectangular wave current of 1 pulse and is applied at the start of vibration of the resonance type rocking motor. Attenuating replenishment current 21 is 60
(MA), 1 to 2 (msec.), A multi-pulse substantially rectangular wave current, which is repeatedly applied at an application cycle 22. The application period 22 is set to be equal to the resonance frequency, for example, 20 (msec.) In FIG. 1, that is, 50 of the resonance frequency.
Is set to (Hz). Also, the pause time between the kicker current 20 and the first decay replenishment current 21 is 15
(Msec.) Is set. Kicker current 20
Is 1 to 10,000 (mA), 0.1 to 250 (ms
ec. ) Is preferable from the viewpoint of practicality, but 10 to 500
(MA), 5 to 50 (msec.) Is particularly preferable from the standpoint of the rise of resonance and low power consumption. Also,
The attenuation replenishment current 21 is 1 to 10,000 (mA), 0.0
2 to 1000 (msec) is preferable from the viewpoint of practicality, but 10 to 500 (mA) from the viewpoint of matching with the natural frequency of the resonance type rocking motor and reducing the supply energy of the resonance attenuation power. , 1 to 200 (msec.) Are particularly preferable.

FIG. 4 is a diagram showing an embodiment of a control circuit for the drive current supplied to the coil 8 in the resonance type swing motor 50 of the present invention. In FIG. 4, a DC power source 5 (V) is used as the standard power source. Then, for example, a voltage signal corresponding to a kicker current 20 of 120 (mA) and 10 (msec.) Is input to the port 1, and the transistor Q1 is turned on. After the lapse of 15 msec, a voltage signal corresponding to the attenuated replenishment current 21 of, for example, 60 (mA), 2 (msec.) Is input to the port 2, and the transistor Q2 is turned on. At the same time, the counter electromotive voltage V _M (counter electromotive current I _M ) generated from the coil 8 is applied to the diode 30.
Is suppressed by. In this way, the drive current flowing through the coil 8 is controlled. Note that R ₁ represents a resistance, and _one ends of the transistors Q ₁ and Q ₂ are grounded.

FIG. 5 is a diagram for explaining a vibration transition region from the start of vibration of the operating object 1 to the resonance in the resonance type swinging motor 50 of the present invention. The vertical axis represents the drive current (m) of the coil 8.
A) and the amplitude (mm) of the moving object 1 are taken, and the horizontal axis shows time (msec.). In the amplitude curve 19 of FIG. 5, point O is the vibration start point of the object 1, point P is the first peak of the first cycle of amplitude, point Q is the second peak of the first cycle of amplitude, and point R is R. , S, T indicate the starting points of the second to fourth periods of the amplitude. In this way, the kicker current 20 and the damping supplement current 21 described with reference to FIG. 3 are applied, and the operation article 1 exhibits the amplitude behavior of the amplitude curve 19 and reaches resonance having a predetermined amplitude and vibration frequency. Here, it is extremely important to complete the application of the kicker current 20 by the first peak point P of the first cycle of the amplitude curve 19. If the kicker current 20 is applied beyond the first peak point P, the energy supplied to the resonance type rocking motor 50 by the kicker current 20 becomes inconsistent with the phase of the amplitude curve 19. , Worsens the rise of resonance. That is, it takes a long time from the start of vibration to the resonance, which is not preferable. Further, as described above, the first attenuation replenishment current 21 is applied at the time after the second peak point Q in the first cycle of the amplitude, and the first attenuation replenishment current 21 is applied to the first attenuation replenishment current 21 after the second cycle of the amplitude. On the other hand, resonance cycle 2
By supplying the second and subsequent attenuation replenishment currents 21 at intervals of 2 (for example, 50 (Hz)), an extremely short time (1
Resonance can be reached within (sec or less). Then, by supplying the kicker current 20 and the damping supplemental current 21 described above, the average power consumption of the resonant oscillation motor 50 of the present invention can be reduced to 3 (mW) or less, and the power consumption is reduced.

FIG. 6 is a diagram showing an embodiment of a good resonance rising characteristic of the operating object 1 in the resonance type swinging motor 50 of the present invention, in which the vertical axis represents the amplitude (mm) of the operating object 1 and the horizontal axis. Each time is taken in msec. In FIG.
23 is a transition region from the start of vibration to resonance, and 24 is a resonance region. From FIG. 6, the time required for the transition region 23 is about 0.
It can be seen that it is set to 5 (sec.). In addition,
It was confirmed that when the above-mentioned kicker current 20 is not applied, the transition region 23 in FIG. 6 deteriorates to about 5 (sec.), And the rising property of resonance is significantly hindered.

FIG. 7 shows an object 1 including a mirror 7, a ferromagnetic yoke 12 and permanent magnets 10 and a weight 1.
A swing motor 6 including a balancer 2 having a coil 4 and a coil 8, a support base 3, and leaf springs 4 and 5.
An example of 0 is shown. In FIG. 7, the same reference numerals as those in FIG. 1A represent the same components as those in FIG. Figure 7
The resonance frequency of the rocking motor 60 of 50.0 ± 0.1
(Hz), and the amplitude of the operating object 1 is 4 to 5 of the amplitude of the balancer 2 as in the case of the swing motor 50 of FIG.
By setting so as to double, the operating object 1 side becomes a soft vibration system with respect to the balancer 2 side, so that the (amplitude / input power) ratio of the operating object 1 can be configured to be large with respect to the balancer 2. The swing motor 5 shown in FIG.
It was confirmed that the same operational effect as 0 was achieved.

FIG. 8 shows an embodiment in which the resonance type rocking motor of the present invention is used for an electric shaver. In FIG. 8, the same reference numerals as those in FIG. 1A represent the same components as those in FIG. In FIG. 8, the moving object 1 and the balancer 2
Are set to a resonance frequency of 200 (Hz), and the amplitudes of the operation article 1 and the balancer 2 are equal, that is, the resonance angles θ are equal, and, for example, θ = 15 °. In addition, the support base 3 is a vibration-proof fixed portion that supports the motion object 1 and the balancer 2 via the leaf springs 4 and 5, respectively. For example, a part of a gripping portion (not shown) in the electric shaver of FIG. Configure. Then, the frames 26, 26 provided upright at both ends of the support base 3
A safety cover 27 (for example, made of SUS304) is provided at the tip of (for example, glass-filled polycarbonate), and a large number of minute holes for hairs such as whiskers to enter are formed in this safety cover 27. At the same time, when the 27a side of the safety cover 27 is pressed against the face or the like, the whiskers that have entered through the minute holes are cut by the blades 25, 25 provided at the tip ends of the motion object 1 and the balancer 2, respectively. As described above, the configuration of the resonance type rocking motor of the present invention can be used for an electric shaver or the like. In FIG. 8, different magnetic poles of the permanent magnets 10, 10 are arranged to face each other in order to form stronger magnetic gaps 6, 6.

In the above embodiment, two leaf springs and 1
Although a resonance vibration system including one coil, two or four permanent magnets, and one weight has been described, the number of them is not limited, and a larger number of these may be used in the present invention. It is possible to configure the resonance type oscillating motor.
Further, the shapes and the numbers of the motion objects, balancers, support bases, etc. are not limited within the scope of the present invention. Further, by appropriately selecting the size, shape and the like of the spring (preferably a leaf spring), it is possible to flexibly manufacture a resonance type swinging motor from small size to large size. Further, although the above embodiment does not describe that the balancer side is used alone for positioning, it is clear from the description of the present invention that the balancer side can be used alone.

[0028]

Since the resonance type oscillating motor of the present invention utilizes resonance, it is possible to balance the vibration by the resonance between the operating object and the balancer, and thus to suppress the vibration transmission to the support base. It has a shaking function.
Therefore, it is extremely useful for a device that requires a highly accurate positioning function such as a light beam deflector or an electric shaver. Further, since the operating object can be set to the soft vibration system with respect to the balancer, there is an effect that a large ratio of (amplitude amount / input power) of the operating object can be obtained. Further, the balancer can be set to a soft vibration system with respect to the operation object, and an effect that the ratio of (amplitude amount / input power) of the balancer can be increased can be exerted. Further, it is also possible to set the amplitudes of the operating object and the balancer to be equal and to resonate them for use. Further, according to the energy supply method of the present invention, the rising property of resonance can be significantly improved, and a low power consumption method for supplementing the energy of the attenuation of resonance can be achieved. In addition, it has excellent dimensional compatibility,
Moreover, since the configuration is simple, the price can be reduced.

[Brief description of drawings]

FIG. 1 is a cross-sectional view (a) of a main part and a view (b) illustrating a resonance state in an embodiment of a resonance type rocking motor of the present invention.
It is.

FIG. 2 is a diagram for explaining an embodiment of a means for measuring the amplitude, vibration frequency, etc. of an operating object in the resonance type swing motor of the present invention.

FIG. 3 is a diagram showing an example of waveform patterns of a kicker current and an attenuation supplementary current to be applied in the resonance type oscillating motor of the present invention.

FIG. 4 is a diagram showing an embodiment of a control circuit in the resonance type swing motor of the present invention.

FIG. 5 is a diagram showing an example of a transition region from the start of vibration to resonance in the resonance type swing motor of the present invention.

FIG. 6 is a diagram showing an example of a rising property of resonance in the resonance type rocking motor of the present invention.

FIG. 7 is a cross-sectional view of essential parts showing another embodiment of the resonance type rocking motor of the present invention.

FIG. 8 is a sectional view of an essential part showing a further embodiment of the resonance type swing motor of the present invention.

FIG. 9 is a diagram illustrating a conventional positioning device.

FIG. 10 is a diagram illustrating a conventional positioning device.

[Explanation of symbols]

1 moving object, 2 balancer, 3 support base, 4, 5 springs 4a, 4b, 5a, 5b fulcrum, 6 magnetic gap, 7
Mirror, 7a deflection part, 8 coil, 9 incident beam, 10 permanent magnet, 11 ', 11''reflected beam, 12 yoke, 12a, 12b, 12c protrusion,
13 intervals, 14 weights, 17 neutral points, 1
9 amplitude, 20 kicker current, 21 decay replenishment current 22 cycles, 23 transition region, 24 resonance region,
25 blades, 26 frames, 27 safety covers, 3
0 diode

Claims (7)

[Claims] 1. A balancer having a permanent magnet and a yoke for forming a magnetic gap, an operating object having a coil for generating a magnetic field arranged in the magnetic gap fixed thereto, and a support base. A resonance type oscillating motor, wherein the operating object and the balancer are resonably connected to a support base. 2. An operating object in which a permanent magnet and a yoke that form a magnetic gap are arranged, a balancer to which a coil for generating a magnetic field arranged in the magnetic gap is fixed, and a support base. A resonance type rocking motor characterized by being connected to a support base so as to resonate with the operation object and the balancer. 3. The resonance type oscillating motor according to claim 1 or 2, wherein a spring is connected between the moving object and the support base, and a spring is connected between the balancer and the support base. 4. The resonance type rocking motor according to claim 3, wherein the spring is a leaf spring. 5. The yoke comprises a ferromagnetic E-shaped yoke, and permanent magnets are fixed to the inner surfaces of the protrusions at both ends of the E-shaped yoke, and the permanent magnet and the protrusion at the central portion of the E-shaped yoke. 3. The resonance type rocking motor according to claim 1, wherein the magnetic air gaps are formed by facing each other. 6. The spring is a leaf spring, the yoke comprises a ferromagnetic E-shaped yoke, and the permanent magnets are fixed to the inner side surfaces of the protrusions at both ends of the E-shaped yoke, and the permanent magnet and E The resonance type rocking motor according to claim 3, wherein a magnetic gap is formed by facing a protrusion at a central portion of the character-shaped yoke. 7. The resonance type rocking motor according to claim 1, wherein the transition time from the start of vibration to the arrival of resonance is 1.0 (sec.) Or less.