JP3656302B2 - Linear slider - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a linear slider, and more particularly to a linear slider that is particularly suitable for performing single-wafer coating on a color filter substrate, an optical disk substrate, or the like, or conveying a workpiece with high precision for various precision processing.
[0002]
[Prior art]
Conventionally, as a single-wafer coating stage for coating color filter substrates, optical disk substrates, etc., the table is supported on a base using a linear motion guide so as to be able to reciprocate, and the table is provided via a ball screw mechanism. A configuration is proposed in which a driving force is applied to the. Here, the linear motion guide is provided so that a large number of balls can rotate and can move (hereinafter referred to as revolution) in a predetermined route set in advance. It is said that the table can be moved smoothly by the rotation and revolution of the ball. Further, since the table is guided by the rotation and revolution of the ball, the table can be moved at a high speed, and the sheet coating efficiency can be increased.
[0003]
[Problems to be solved by the invention]
However, when a single-wafer coating stage using a linear motion guide is used, the straightness (running accuracy) cannot be increased significantly due to the large pitching and yawing, resulting in the coating composition. Since the distance between the nozzle for ejecting the object and the table fluctuates considerably or meanders, the thickness of the coating film is controlled with high accuracy, that is, the entire surface of the object to be coated is applied uniformly. It becomes impossible.
[0004]
Specifically, each ball constituting the linear motion guide has variations, and there is some margin between the movement path and the ball diameter in order to revolve these balls. As a result, the upper limit of straightness becomes about ± 5 μm. As a result, it becomes impossible to control the thickness of the coating film with an accuracy of 5 μm or less.
[0005]
Note that this inconvenience occurs similarly in the case of a linear slider used for applications that require high straightness other than the single-wafer coating.
[0006]
In order to improve the traveling accuracy of the table, that is, the straightness, it is conceivable to use a roller bearing instead of the linear motion guide. However, when the moving speed of the table is increased to some extent, the table support portion and the roller There is a problem that slippage occurs between the bearing and the roller bearing is eventually detached from the table support portion, so that it cannot be used for a long period of time under high speed conditions.
[0007]
The present invention has been made in view of the above problems, and can reciprocate stably and smoothly over a long period of time without significantly reducing the moving speed. The straightness is significantly higher than when a linear motion guide is used. It is an object of the present invention to provide a linear slider using a roller bearing capable of maintaining the above.
[0008]
[Means for Solving the Problems]
In the linear slider of claim 1, a table is supported on a base so as to be reciprocally movable in a predetermined direction via a roller bearing, and a driving force is transmitted via a ball screw mechanism. A movement blocking member for forcibly blocking the movement of the roller bearing is provided at a predetermined position close to the movement limit position of the roller bearing. Further, at the contact portion between the retainer and the movement blocking member, a member provided with a reinforcing member on at least one of the retainer or the movement blocking member is employed.
[0009]
The linear slider according to claim 2 employs, as the movement preventing member, a member including an impact absorbing member for buffering the movement of the roller bearing .
[0010]
Linear slider 請 Motomeko 3, together with the table is supported reciprocably in a predetermined direction through a roller bearing on a base, the driving force is transmitted through a ball screw mechanism, a table is a predetermined number of times reciprocating A table lifting member for lifting the table in response to the movement is provided, and a roller bearing returning member for returning the roller bearing in response to the lifting of the table by the table lifting member is provided .
[0011]
Linear slider 請 Motomeko 4 employs what are arranged in a V-shape as roller bearings.
[0012]
If the linear slider 請 Motomeko 1, together with the table are supported reciprocably in a predetermined direction through a roller bearing on a base, a driving force via a ball screw mechanism has been transmitted, the linear motion High straightness can be achieved compared to the case of using a guide. In addition, even if the table movement speed increases and a slip phenomenon occurs in the relationship between the table and the roller bearing, the roller bearing moves to a predetermined position close to the movement limit position of the roller bearing as the table reciprocates. Since there is a movement blocking member that forcibly blocks the movement, the possibility of the roller bearing moving in one direction to the limit position when the forward and backward movement speeds of the table are different is blocked. This can be prevented by the member, and a high moving speed can be secured, and the table can be reciprocated stably and smoothly over a long period of time. In addition, because the retainer moves and the reinforcing member is provided at the contact part where the movement blocking member and the retainer collide, damage to the retainer and the roller can be reduced, and high accuracy of straightness can be maintained for a long time. Can do.
[0013]
In the linear slider according to claim 2, since the movement preventing member includes a shock absorbing member for buffering the movement of the roller bearing, the damage to the roller bearing is alleviated and the life is shortened. Can be long .
[0014]
If the linear slider 請 Motomeko 3, together with the table is supported reciprocably in a predetermined direction through a roller bearing on a base, a driving force via a ball screw mechanism has been transmitted, the linear motion High straightness can be achieved compared to the case of using a guide. In addition, a table lifting member is provided that lifts the table in response to the table reciprocating a predetermined number of times even if a sliding phenomenon occurs in the relationship between the table and the roller bearing because the moving speed of the table increases. Since the roller bearing return member for returning the roller bearing in response to the lifting of the table by the table lifting member is provided, a high moving speed can be secured, and the forward and backward movement speeds of the table can be secured. When the roller bearing has moved in one direction to the limit position or its vicinity in a state where the moving speed is different, the table is lifted by the table lifting member, and in this state, the roller bearing is moved backward by the roller bearing returning member. The table can be reciprocated stably and smoothly over a long period of time. Kill.
[0015]
If the linear slider 請 Motomeko 4, because it uses what are arranged in a V-shape as roller bearings, the yawing of the table can be significantly reduced, straightness can be further enhanced.
[0016]
The contents of the present invention will be described in more detail. When the table is reciprocated by the ball screw mechanism while the table is supported by the roller bearing, the roller bearing moves only by rotation unless the table moving speed is too high. The relationship is exactly 1/2. However, when the moving speed of the table increases, slippage occurs between the table support portion and the roller bearing, and the moving distance of the roller bearing becomes relatively short with respect to the moving distance of the table. It becomes 1/2 or less of the distance. For example, when performing single-wafer coating, the forward speed for forming the coating film is not so high, but the speed at the backward movement should be set as high as possible to reduce the tact time. In such a case, the roller bearing slightly moves to one side for each reciprocation of the table, and the function as a roller bearing can be achieved by reaching the movement limit position every time. It will disappear.
[0017]
The present invention has been made to solve the above-mentioned disadvantages of the roller bearing. In the case of claim 1, since the movement of the roller bearing to one side is forcibly blocked by the movement preventing member, the roller bearing is forever used. Can continue to achieve the functions of According to the third aspect of the present invention, when the roller bearing moves to the movement limit position or the vicinity thereof, the function as the roller bearing can be restored by moving the roller bearing backward.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a perspective view showing the configuration of a slit die coater to which the linear slider of the present invention is applied.
[0019]
In this slit die coater, a slit die 2 is provided at a predetermined position on the upper surface of a base 1 made of a casting or the like, and a linear slider 3 is provided.
[0020]
The slit die 2 is controlled in the vertical position by the Z-axis stage 2a, and the distance from the upper surface of the base 1, that is, the distance from the table 3c described later is controlled.
[0021]
The linear slider 3 includes a pair of V-shaped grooves 3a formed on the upper surface of the base 1, and a V-shaped roller housed in the V-shaped groove 3a as shown in FIG. A bearing 3b, a table 3c having a leg portion 3d supported by the roller bearing 3b, a ball screw nut 3e provided at a predetermined position on the lower surface of the table 3c, and screwed with the ball screw nut 3e, and a driving motor And a ball screw 3g rotated by 3f. The ball screw nut 3e is connected to the ball screw nut support portion 3e1 connected to the table 3c via a connection portion 3e2 that exists only partially. By giving the connection portion 3e2 elasticity, Elastic support of the ball screw nut 3e is achieved. The table 3c has a suction plate 3h on its upper surface, and holds and holds a glass substrate 4 as an example of a single wafer coating substrate by the suction plate 3h.
[0022]
Further, the roller bearing 3b includes a retainer 3b1 formed in a V-shape and a plurality of rollers 3b2 supported on the respective surfaces of the retainer 3b1 so as to be freely rotatable.
[0023]
Further, as shown in detail in FIG. 3, the roller bearing 3b is forcibly moved by engaging with the retainer 3b1 at a predetermined position close to the moving position of the roller bearing 3b as the table 3c moves at a low speed. And a shock absorbing member 5a for cushioningly supporting the movement preventing member 5 is provided.
[0024]
Further, a reinforcing member 3b3 is provided at a tip portion where the retainer 3b1 comes into contact with the movement preventing member 5 by means such as welding or screwing. The reinforcing member 3b3 may be provided on at least one of the retainer 3b1 or the movement blocking member 5. Of course, the reinforcing member 3b3 may also be provided at the tip of the retainer on the side opposite to the side where the movement preventing member 5 is provided. Moreover, you may attach impact-absorbing materials, such as rubber | gum, to the retainer front-end | tip part instead of the reinforcement member 3b3. In this case, the same effect can be expected even if the retainer 3b1 shifts in the opposite direction depending on the coating conditions.
[0025]
Therefore, if the vertical position of the slit die 2 is set by the Z-axis stage 2a and the driving motor 3f is operated in a state where the glass substrate 4 is sucked and held by the suction disk 3h, the ball screw 3g and the ball screw nut 3e are screwed together. Therefore, the table 3c can be moved at a predetermined speed. In this case, since the roller bearing 3b is interposed between the leg 3d and the V-shaped groove 3a, the table 3c can be moved smoothly and at a considerably high speed. In addition, pitching and yawing are generated in the table 3c due to the variation in the diameter of each roller 3b2 constituting the roller bearing 3b, and the straightness is lowered, but each roller 3b2 only rotates. Since linear motion guides do not involve revolutions as well as revolutions, straightness can be increased to ± 1 μm or submicron.
[0026]
As a result, the variation in the distance between the upper surface of the suction disk 3h and the slit die 2 can be suppressed to ± 1 μm or less than submicron.
[0027]
Therefore, when the end portion of the glass substrate 4 is located directly below the slit die 2, the coating composition is started to be discharged through the slit die 2, thereby forming a coating film with less variation in film thickness on the surface of the glass substrate 4. Can be formed.
[0028]
In particular, when a low-viscosity coating composition is employed {for example, a coating composition for a color filter having a viscosity of 100 cp (centipoise) or higher was conventionally employed, whereas a viscosity of 30 to 50 cp was employed. When the Neutrian fluid is employed as the color filter coating composition}, the gap between the slit die 2 and the glass substrate 4 is inevitably small (1/2 or less of the conventional, for example, 100 μm or less, preferably Must be 50 μm or less), and as a result, the accuracy of variation in this interval must also be improved (for example, it must be ± 3 μm or less). Such a strict requirement cannot be dealt with by a conventional linear slider using a linear motion guide, but can be easily dealt with by the linear slider of this embodiment.
[0029]
In addition, when sheet coating is performed on the glass substrate 4 using the slit die coater of this embodiment, the moving speed of the table 3c must be increased in order to increase productivity. Also in this respect, in this embodiment, a considerably high moving speed (10 m / min or more) can be achieved, and the moving speed is higher than that of 1 to 2 m / min when a sliding bearing with extremely high running accuracy is adopted. Can be significantly increased. Further, in terms of accuracy, it is possible to achieve high coating accuracy obtained as a result along with high running accuracy that could not be achieved at all when the linear motion guide was adopted.
[0030]
Furthermore, when performing single wafer coating on the glass substrate 4, it is common to increase the moving speed at the time of backward movement, compared to the moving speed when the glass substrate 4 is moved while receiving the supply of the coating composition. In such a case, the roller bearing 3b slips, and the roller bearing 3b moves to one side due to a large speed difference between the forward movement and the backward movement of the table. However, since the movement of the roller bearing 3b is forcibly blocked by the movement blocking member 5, the function of the roller bearing 3b can be maintained indefinitely, and the retainer with which the movement blocking member 5 of the roller bearing 3b collides. By providing the reinforcing member 3b3 at the tip of 3b1, damage to the roller bearing 3b can be reduced, and the table 3c can be reciprocated stably and smoothly over a long period of time. Further, since slippage occurs between the roller bearing 3b and the V-groove and the roller bearing 3b is displaced, it is important to supply oil so that the V-groove and the roller bearing do not wear due to this slippage. Specifically, oil supply nozzles (not shown) are installed before and after the front end of the table, and 1 to 3 cc of oil is supplied to the roller bearing 3b each time it moves 2000 to 3000 times, thereby preventing wear of the V groove together with armor. Long-term high accuracy can be maintained.
[0031]
Further, instead of the configuration of FIG. 3, as shown in FIGS. 4 and 5, even when the roller bearing 3 b moves to one side due to the occurrence of slippage of the roller bearing 3 b, the table 3 c is moved a predetermined number of times (roller). In response to the reciprocating movement of the bearing 3b to the movement limit position or a position near the movement limit position), a table lifting cylinder 6a for lifting the table 3c is provided, and the table 3c is lifted by the cylinder 6a. In response, a roller bearing restoring cylinder 6 may be provided which restores the roller bearing 3b to a predetermined position. Here, the restoring distance is preferably a distance for restoring the roller bearing 3b to the initial position. Further, since the number of reciprocations of the table 3c is the same as the number of times of sheet coating, it can be easily obtained in a sheet coating control unit (not shown). Furthermore, 6b is an engaging member that engages with the retainer 3b1, and is driven by the cylinder 6.
[0032]
In this case, the roller bearing 3b may be restored by the cylinder 6 while the table 3c is slightly lifted by the cylinder 6a (for example, about 0.1 to 1.0 mm). Further, when the table 3c is lifted, it is possible to prevent an unnecessary force from being applied to the ball screw 3g, the ball screw nut 3e, and the ball screw bearing portion due to the elastic deformation of the connecting portion 3e2. As a result, it is possible to prevent the accuracy of the ball screw mechanism from being lowered.
[0033]
In addition, when a rectangular groove is employed instead of the V-shaped groove 3a, the leg 3d is also rectangular, and the retainer 3b1 employs a flat roller bearing 3b, the straightness, particularly the yawing accuracy is slightly reduced. However, a similar effect can be achieved. Further, instead of adopting the connecting portion 3e2, the same operation can be achieved by interposing an elastic plate such as a rubber plate in the connecting portion with the table 3c.
[0034]
【The invention's effect】
The invention of claim 1 can secure a considerably high moving speed, and can achieve a high straightness as compared with the case where a linear motion guide is used. The possibility of the roller bearings to move to the limit position in one direction due to slipping in a state where the speed is different can be prevented in advance by the movement blocking member, and the table is reciprocated stably and smoothly over a long period of time. There is a unique effect that can be. In addition, damage to the roller bearing portion can be reduced, straightness can be maintained with high accuracy over a long period of time, and further smooth running movement can be ensured.
[0035]
The invention according to claim 2 has a specific effect that the life of the roller bearing can be reduced by extending the life .
[0036]
Invention 請 Motomeko 3, it is possible to secure a considerably higher movement speed, as compared with the case of using the linear motion guide can achieve high straightness, moreover, the condensate and the forward movement speed of the table When the roller bearing has moved in one direction due to slipping to the limit position or the vicinity thereof in a state where the moving speed is different, the table is lifted by the table lifting member, and in this state, the roller bearing is fixed by the roller bearing restoring member. The table can be restored to the position, and the table can be reciprocated stably and smoothly over a long period of time .
[0037]
Invention 請 Motomeko 4, the yawing of the table can be significantly reduced, exhibits a unique effect that it is possible to further enhance the straightness.
[ Brief description of the drawings]
FIG. 1 is a perspective view showing a configuration of a slit die coater to which a linear slider according to an embodiment of the present invention is applied.
FIG. 2 is an enlarged vertical sectional view of a bearing portion of the coater of FIG.
FIG. 3 is a schematic view showing a configuration of a portion for forcibly preventing the movement of the roller bearing.
FIG. 4 is a schematic view showing a configuration of a portion for lifting a table.
FIG. 5 is a schematic view showing a configuration of a portion for moving the roller bearing backward.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Base 3b Roller bearing 3c Table 3e Ball screw nut 3e2 Connection part 3g Ball screw 5 Movement prevention member 5a Shock absorption member 6, 6a Cylinder

Claims (4)

A table (3c) is supported on the base (1) through a roller bearing (3b) composed of a retainer (3b1) and a plurality of rollers (3b2) so as to be reciprocable in a predetermined direction. At the same time, the driving force is transmitted through the ball screw mechanism (3e) (3g), and the roller bearing (3b) is placed at a predetermined position close to the movement limit position of the roller bearing (3b) as the table (3c) reciprocates. ) Is forcibly blocked, and a retainer is provided at the contact portion between the retainer (3b1) for rotatably holding the roller bearing (3b) and the movement blocking member (5). A linear slider characterized in that a reinforcing member (3b3) is provided on at least one of (3b1) or the movement blocking member (5) .  The linear slider according to claim 1, wherein the movement preventing member (5) includes an impact absorbing member (5a) for buffering the movement of the roller bearing (3b).  A table (3c) is supported on the base (1) via a roller bearing (3b) so as to freely reciprocate in a predetermined direction, and a driving force is transmitted via a ball screw mechanism (3e) (3g). A table lifting member (6a) that lifts the table (3c) in response to the reciprocation of the table (3c) a predetermined number of times is provided and responds to lifting of the table (3c) by the table lifting member (6a) And a roller bearing return member (6) for returning the roller bearing (3b). The linear slider according to any one of claims 1 to 3, wherein the roller bearing (3b) is arranged in a V shape.

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