JP3610274B2 - Waveguide and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a waveguide for transmitting high-frequency power and a method for manufacturing the same.
[0002]
[Prior art]
Conventionally, it is considered that a square pipe made of aluminum alloy having a light weight and high conductivity is optimal for a large-diameter waveguide, and a waveguide obtained by piping this kind of square pipe is, for example, Spring-8. It is adopted in the facility. Conventionally, rectangular pipe waveguides have been manufactured by welding or extrusion, but in recent years, there has been an increasing demand for large-diameter waveguides that cannot be manufactured by ordinary extruders.
[0003]
[Problems to be solved by the invention]
As a method of manufacturing such a large-diameter waveguide, a method of concatenating flat metal plates as they are or by bending and joining them to form a rectangular tube and then joining them together by welding is conceivable. . However, when a waveguide is manufactured by welding, large distortion occurs due to thermal expansion and solidification shrinkage. In addition, when welding is performed in this way, it is difficult to adjust the depth of metal penetration during welding. And if a back bead is taken out completely, extra cutting will be needed, and a lot of man-hours will be required. In particular, in a waveguide that transmits high-frequency power, if there are protrusions or cracks on the inner surface, there is a possibility of discharging from that portion, and the smoothness of the inner surface is an extremely important factor.
[0004]
In addition, as the waveguide becomes larger, the thickness of the tube increases, and when a thickness of 5 mm or more is required in terms of strength, ordinary TIG welding or MIG welding must be multilayer welding. In this case, by welding many times, heat input becomes large and distortion increases, and depending on the alloy, a microcrack may be generated in the front layer.
[0005]
SUMMARY OF THE INVENTION The present invention has been made with the object of providing a waveguide that can cope with an increase in size and that has a low distortion and a smooth inner surface.
[0006]
[Means for Solving the Problems and Effects of the Invention]
In order to achieve the above object, the invention according to claim 1 is a waveguide obtained by combining metal plates or extruded profiles into a tube having a square cross section and joining the metal plates or extruded profiles together. Each metal plate or extruded profile is friction stir welded by rotating the rotary tool along the abutting portion, and the inner surface is smooth to the extent that reworking such as cutting off the surplus is not necessary. Features.
[0007]
Friction stir welding has recently been proposed as a joining method that has low heat input and a low degree of softening and distortion (for example, Japanese Patent No. 2712838). In this method, a soft material such as an aluminum alloy is abutted and restrained on a hard backing such as steel, and a hard pin-type rotary tool is moved along the abutting portion while rotating at high speed. This method is characterized in that the joint does not melt, and the temperature of the joint does not rise so much. Further, in the friction stir welding, an unjoined crack does not occur in the root portion (back side of the joint portion), and the joint surface of the root portion becomes extremely smooth. Although applying friction stir welding to tubular members has been considered impossible to date, the applicant has made this possible by placing a hard backing on the inner surface of the tube.
[0008]
Therefore, in the present invention, the metal plate or the extruded shape member is combined into a tube having a square cross section, and these are joined by friction stir welding. For this reason, it is possible to satisfactorily cope with an increase in size by joining a plurality of members, and furthermore, since each member is joined by friction stir welding, there is very little distortion. Furthermore, since each part is joined by friction stir welding, an unjoined crack does not occur on the inner surface (that is, the root portion) of the tube, and the inner surface becomes extremely smooth. Therefore, in the present invention, the smoothness of the inner surface can be ensured very well, and the occurrence of discharge or the like can be prevented satisfactorily. Furthermore, since the waveguide of the present invention joins the metal plate and the like by friction stir welding, the smoothness and the like can be obtained without requiring extra work such as excision. Therefore, the waveguide of the present invention is easy to manufacture and can cope with an increase in size, and has little distortion and a smooth inner surface.
[0009]
The invention according to claim 2 is characterized in that, in addition to the structure according to claim 1, the metal plates are combined into a tubular shape by bending and butting.
In the present invention, the waveguide is obtained by bending the metal plates and combining them into a tubular shape, and applying the above-mentioned friction stir welding to the butted portions of the metal plates. For this reason, in the waveguide of the present invention, in addition to the effect of the first aspect of the invention, an effect that the manufacture becomes easier is produced.
[0010]
In addition to the structure of claim 2, the invention according to claim 3 is configured such that the metal plate is bent into a U-shaped cross-section, an L-shaped cross-section, or a U-shaped cross-section and abuts the edges. It is combined in a tubular shape.
In the present invention, the metal plates are combined into a tubular shape by bending the metal plate into a U-shaped cross-section, an L-shaped cross-section, or a U-shaped cross-section and abutting the edges, so that the combination work is further facilitated. For this reason, in the waveguide of the present invention, in addition to the effect of the invention described in claim 2, the effect that the manufacture is further facilitated occurs.
[0011]
The invention described in claim 4 is characterized in that, in addition to the structure described in claim 1, the extruded shape member is formed in a U-shaped section or an L-shaped section.
In the present invention, an extruded shape formed in a U-shaped cross section or an L-shaped cross section is combined into a tubular shape by abutting, and a waveguide is obtained by applying the aforementioned friction stir welding to the abutting portion. . For this reason, the operation | work which combines an extrusion shape material in a tube becomes still easier. Therefore, in the waveguide of the present invention, in addition to the effect of the first aspect of the invention, an effect that the manufacture becomes easier is produced.
[0012]
According to a fifth aspect of the present invention, in addition to the configuration according to any one of the first to fourth aspects, a metal flange member is externally fitted to one end of the tubular metal plate or extruded profile, The friction stir welding is performed so that the bead surface is not located on the inner surface along the abutting portion between the flange member and the metal plate or the extruded profile.
[0013]
In the present invention, since the flange member is joined to one end of the metal plate or extruded profile combined in the above-described tubular shape, it becomes easy to bend the waveguide like a duct and perform piping. Conventionally, since this type of flange member was joined by inert gas arc welding, the distortion was large and it was necessary to rework it. However, in the present invention, since the above-mentioned friction stir welding is used, the distortion is extremely high. small. Moreover, in the present invention, since the friction stir welding is performed so that the bead surface is not located on the inner surface, the smoothness of the inner surface can be ensured well.
[0014]
Therefore, in the waveguide according to the present invention, while maintaining the effect of the invention according to any one of claims 1 to 4 such that the distortion is small and the inner surface is smooth, in addition to the effect, a duct is further provided. The effect that it becomes easy to bend and piping is produced.
The invention according to claim 6 is characterized in that, in addition to the structure according to any one of claims 1 to 5, the metal plate or the extruded profile is made of aluminum or an alloy thereof.
[0015]
In the present invention, the metal plate or extruded profile is made of aluminum or an alloy thereof. As described above, aluminum or an alloy thereof has high electrical conductivity, so that the performance as a waveguide is further improved. Therefore, in the waveguide according to the present invention, in addition to the effect of the invention according to any one of claims 1 to 5, there is an effect that the performance is further improved because the electrical transmission loss is small.
[0016]
In addition to the structure in any one of Claims 1-5, invention of Claim 7 is characterized by the said metal plate or extrusion shape material being comprised by copper or its alloy. In the present invention, the metal plate or extruded profile is made of copper or an alloy thereof. Copper or an alloy thereof has high electrical conductivity, excellent workability, and is strong against acids. Therefore, in the waveguide according to the present invention, in addition to the effects of the invention according to any one of claims 1 to 5, the electrical transmission loss is small, and the manufacture becomes easy with the improvement of workability, and the waveguide is good. The effect of having an environment resistance occurs.
[0017]
The invention according to claim 8 is characterized in that, in addition to the structure according to any one of claims 1 to 5, the metal plate or the extruded profile is made of iron or an alloy thereof. For this reason, in addition to the effect of the invention according to any one of claims 1 to 5, the present invention has an effect that the electrical transmission loss can be reduced and the manufacturing cost can be reduced by applying copper plating to the inner surface. .
[0018]
A ninth aspect of the present invention is a manufacturing method for manufacturing the waveguide according to any one of the first to eighth aspects, wherein a hard backing is provided on the inner surface of the metal plate or extruded profile combined in the tubular shape. And the friction stir welding is performed.
As described above, it has been considered to be impossible to apply friction stir welding to a tubular member until now. However, in the present invention, a rigid back is applied to the inner surface of a metal plate or an extruded profile combined in a tubular shape. Friction stir welding is performed with a pad. For this reason, the waveguide can be easily manufactured by friction stir welding, and the obtained waveguide is less distorted and the inner surface becomes smooth. Therefore, the present invention produces an effect that a waveguide with less distortion and a smooth inner surface can be easily manufactured.
[0019]
The invention described in claim 10 is characterized in that, in addition to the structure described in claim 9, the backing expands / contracts inside the metal plate or extruded profile combined in the tubular shape. In the present invention, the backing expands and contracts inside the metal plate or extruded profile combined in the above tubular shape. Therefore, by inserting the backing into the inside in a contracted state and subsequently expanding the backing, the butt portion of the metal plate or extruded profile can be supported extremely firmly from the inside. Therefore, in the present invention, the above friction stir welding can be performed very reliably. Therefore, in the present invention, in addition to the effect of the invention according to the ninth aspect, the reliability of the obtained waveguide is enhanced, and the yield can be improved by preventing the occurrence of defective bonding. .
[0020]
The invention described in claim 11 is characterized in that, in addition to the configuration described in claim 9, the backing is a beam penetrating the inside of the metal plate or extruded profile combined in the tubular shape.
In the present invention, since the backing is a beam penetrating the inside of the tubular metal plate or extruded profile, the friction stir welding is continuously performed in the length direction of the tube along the beam. be able to. For this reason, the operation | work which joins the said metal plate or extruded shape material by friction stir welding becomes very easy. Therefore, in the present invention, in addition to the effect of the ninth aspect of the invention, there is an effect that the manufacture of the waveguide can be further facilitated.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings. In the present embodiment, a metal plate or an extruded profile is combined into a tube having a square cross section, and the hard rotary tool 1 (see FIGS. 1 to 5) is rotated at a high speed along the butted portion of the metal plate or the extruded profile. I moved it. As a result, the combined metal plates or extruded profiles were joined together to obtain a waveguide. 1 to 5, the rotary tool 1 is composed of a large-diameter shoulder 1a and a small-diameter column 1b protruding from the lower end of the shoulder 1a, and a driving force from a driving system (not shown). Is transmitted around the center axis of the pillar 1b and moved horizontally along the metal abutting portion. Then, at the butt portion, the butt metal is agitated and joined by the pillar 1b. Such friction stir welding is known as a joining method with little heat input and a low degree of softening and distortion. Furthermore, in friction stir welding, the temperature of the joint does not rise so much, so no blowholes or hot cracks occur, no unjoined cracks occur in the root, and the joint surface of the root becomes extremely smooth. .
[0022]
In this embodiment, since the waveguide is manufactured using such friction stir welding, a waveguide having a small distortion and a smooth inner surface can be easily manufactured. Hereinafter, embodiments of the present invention will be described with reference to specific examples. 4 and 5 to be described later correspond to the cut end views, but the hatching representing the cross section is omitted for convenience of explanation.
[0023]
【Example】
Example 1
A 6 mm thick plate made of 3003 alloy H34 material was cut to obtain a pair of wide flat plates 11 and a pair of narrow flat plates 13. As shown in FIG. 1, these were combined into a square pipe shape having a long side of 600 mm, a short side of 300 mm, and a length of 1000 mm, and a hard backing jig 15 was disposed on the inner surface and restrained. Friction stir welding was performed by horizontally moving the rotating tool 1 along the abutting portions of the flat plates 11 and 13 at a joining speed of 500 mm / min. The joint portion is represented by 99 (the same applies to other drawings). The waveguide 19 obtained by performing friction stir welding in the longitudinal direction with respect to all of the four butted portions has a dimensional accuracy of -2 mm to 0 mm in the length direction, and warpage and bending are within 5 mm. Thus, the desired dimensional accuracy was obtained without requiring any reworking. Also, the inner surface was extremely smooth, and no protrusions or unbonded cracks could be observed. For this reason, the occurrence of discharge or the like can be sufficiently prevented without any rework such as extra excision.
[0024]
Example 2
A plate 21 made of 1050 alloy H14 and having a thickness of 5 mm is cut out and bent into a square pipe shape having a long side of 600 mm, a short side of 300 mm, and a length of 2000 mm as shown in FIG. The edges were matched and restrained on the surface plate. A hard backing jig 25 was disposed and restrained on the inner surface of the abutting portion, and while rotating the rotary tool 1, it was moved horizontally at a welding speed of 500 mm / min to perform friction stir welding. The obtained waveguide 29 had a dimensional accuracy of -2 mm to 0 mm in the length direction, warpage and bending were within 5 mm, and a desired dimensional accuracy was obtained without requiring any reworking. Also, the inner surface was extremely smooth, and no protrusions or unbonded cracks could be observed. For this reason, the occurrence of discharge or the like can be sufficiently prevented without any rework such as extra excision.
[0025]
Example 3
Plates 31 and 32 made of H34 material of 1100 alloy and having a plate thickness of 10 mm, a width of 1200 mm, and a length of 3000 mm were bent into a U-shape by a vendor. As shown in FIG. 3, the ends were abutted so as to form a square pipe having a long side of 800 mm and a short side of 400 mm, and restrained from both sides. Further, hard backing jigs 35 and 35 were respectively disposed on the inner surfaces of the abutting portions, and the gaps were supported within 0.05 mm by applying pressure outward with a hydraulic jack. Subsequently, while rotating the rotary tool 1, it was moved horizontally at a joining speed of 500 mm / min, and the butt portion was friction stir welded. In joining, after joining one side, board 31 and 32 were turned upside down with backing jig 35, and after constraining similarly in the width direction, the other side was joined. The obtained waveguide 39 had a dimensional accuracy of -2 mm to 0 mm in the length direction, warpage and bending were within 7 mm, and a desired dimensional accuracy was obtained without requiring any reworking. Also, the inner surface was extremely smooth, and no protrusions or unbonded cracks could be observed. For this reason, the occurrence of discharge or the like can be sufficiently prevented without any rework such as extra excision.
[0026]
Example 4
In the same manner as in FIG. 3, two 5 mm thick U-shaped extruded members made of T5 material of 6N01 alloy are combined to form a square pipe with a long side of 600 mm, a short side of 300 mm, and a length of 4000 mm. Butted and restrained from both sides. A hard backing jig was disposed on the inner surface of the butted portion, and supported by pressing outward with a hydraulic jack. Subsequently, while rotating the rotary tool 1, it was moved horizontally at a joining speed of 500 mm / min, and the butt portion was friction stir welded. In joining, after joining one side, each extrusion shape member was turned upside down together with the backing jig, and similarly restrained in the width direction and joined the opposite side. The obtained waveguide had a dimensional accuracy of −5 mm to 0 mm in the length direction, warpage and bending were within 9 mm, and desired dimensional accuracy was obtained without requiring any reworking. Also, the inner surface was extremely smooth, and no protrusions or unbonded cracks could be observed. For this reason, the occurrence of discharge or the like can be sufficiently prevented without any rework such as extra excision.
[0027]
Example 5
A plate of 5 mm thick made of oxygen-free copper was bent into a U-shape in a stepwise combination, butted together into a square pipe shape having a long side of 600 mm, a short side of 300 mm, and a length of 4000 mm, and restrained from both sides. A hard backing jig was disposed on the inner surface of the butted portion, and supported by pressing outward with a hydraulic jack. Subsequently, while rotating the rotary tool 1, it was moved horizontally at a joining speed of 150 mm / min, and the butt portion was friction stir welded. In joining, after joining one side, each extrusion shape member was turned upside down together with the backing jig, and similarly restrained in the width direction and joined the opposite side. The obtained waveguide had a dimensional accuracy of −4 mm to 0 mm in the length direction, warpage and bending were within 6 mm, and desired dimensional accuracy was obtained without requiring any reworking. Also, the inner surface was extremely smooth, and no protrusions or unbonded cracks could be observed. For this reason, the occurrence of discharge or the like can be sufficiently prevented without any rework such as extra excision.
[0028]
Example 6
The end face of the waveguide 39 of the third embodiment is cut and faced, and a pre-formed flange (flange member) 41 having a thickness of 10 mm is externally fitted together with steel backing jigs 43 and 45 as shown in FIG. Restrained. The rotary tool 1 was inserted into the abutting portion between the waveguide 39 and the flange 41 from the end face side, and moved horizontally at a joining speed of 250 mm / min while rotating, whereby the abutting portion was friction stir welded. The inner surface of the waveguide 39 was not affected by the bonding, and the dimensional accuracy after the bonding was good only by being deformed by 0.3 mm at the bonding portion 99.
[0029]
Example 7
The waveguide 29 of Example 2 was cut in the longitudinal direction, and a 6 mm-thick flange (flange member) 51 formed in advance was externally fitted and restrained in the arrangement shown in FIG. Subsequently, friction stir welding was performed as follows from the front side and the back side of the flange 51 in a state where the steel backing was disposed at each location. On the fillet side (back side) of the flange 51, an inclined portion 51a inclined at 45 ° over a width of 6 mm was provided, and the rotary tool 1 was inserted from a direction perpendicular to the surface of the inclined portion 51a. Further, from the end face side (front side) of the waveguide 29, the rotary tool 1 was inserted from the end face side into the abutting portion between the waveguide 29 and the flange 51. As a result of performing friction stir welding by horizontally moving the rotary tool 1 at a joining speed of 200 mm / min while rotating the rotary tool 1, there is no influence on the inner surface of the waveguide 29, and the dimensional accuracy after joining is the joint 99. It was good only by being deformed by 0.5 mm.
[0030]
In each of Examples 6 and 7, the bead surface is not positioned on the inner surfaces of the waveguides 39 and 29, and the smoothness of the inner surfaces obtained in the waveguides 39 and 29 can be ensured as it is. did it.
Comparative Example 1
A 6 mm thick plate made of 3003 alloy H34 material was cut to obtain a pair of wide flat plates and a pair of narrow flat plates. These are combined into a square pipe shape with a long side of 600 mm, a short side of 300 mm, and a length of 1000 mm, as in FIG. 1, and a steel backing jig with a groove on the back side of the joint (to maintain the shape of the back beat). And restrained. By alternating current TIG welding, welding was performed at a current of 180 A at 160 mm / min. Similar to Example 1, this welding was also performed in the longitudinal direction on all four butted portions. On the back side of the joint, there were a portion where the back beat appeared and a portion where it did not. The part where the back beat did not come out was repair welded by TIG welding, and the back beat was finished by polishing. The dimensional accuracy of the obtained waveguide was −10 mm to 2 mm in the length direction, the warpage and the bending were 15 mm, and the distortion was larger than that of the above example.
[0031]
Comparative Example 2
A plate made of H4 material of 1100 alloy and having a plate thickness of 10 mm, a width of 1200 mm, and a length of 3000 mm was bent into a U shape by a bender. This end face was grooved and faced to face each other in a square pipe shape having a long side of 800 mm and a short side of 400 mm, and restrained from both sides. A hard grooved backing jig was applied to the inner surface of the butted portion, and welding was carried out in two layers by MIG welding at a current of 240 A, a voltage of 25 V, and a welding speed of 500 mm / min. Although the back bead had come out, the angular deformation was large, the height of the central part in the cross section of the tube was reduced by 10 mm, and the warpage and the bending were also large, 30 mm.
[0032]
Comparative Example 3
The end face of the waveguide 39 of Example 3 was cut and grooved, and a preformed flange having a thickness of 10 mm was restrained together with a steel backing jig with a groove. From the end surface side (front side) and the back side, welding was performed at 160 mm / min at a current of 180 A by AC TIG welding. Since the end face had an extra 3 mm high, it was chamfered. The back side had a leg length, but the coagulation shrinkage was large, and the flange was greatly warped.
[0033]
As described above, the waveguide of each of the above embodiments uses friction stir welding in manufacturing, so that it is easy to manufacture and can cope with an increase in size, and has less distortion and a smooth inner surface. In particular, in each of the above embodiments, since the backing jig is disposed on the inner surface side of the waveguide and the friction stir welding is performed, the smoothness of the inner surface can be secured extremely well. In addition, in the waveguides of Examples 2, 3, and 5, the metal plate is bent into a U-shaped cross section or a B-shaped cross section, and the ends are abutted to form a square pipe. It becomes easy. Similarly, in Example 4, since the rectangular pipe shape is formed by abutting the U-shaped extruded section, the manufacturing can be facilitated as compared with the case of using the flat extruded section. .
[0034]
In addition, when a waveguide is manufactured by bending four metal plates into an L-shaped cross section and butting edges, or butting an extruded profile having an L-shaped cross section, the manufacturing should be similarly facilitated. Can do. In particular, when an extruded profile is used, a larger waveguide can be easily manufactured by using an extruded profile having an L-shaped cross section.
[0035]
Further, in Examples 6 and 7, the flanges 41 and 51 could be provided without losing the characteristics that the waveguides 39 and 29 had little distortion and the inner surface was smooth. Moreover, the flanges 41 and 51 are hardly distorted. For this reason, in the waveguides 39 and 29 provided with the flanges 41 and 51 in this way, there is a new effect that it is easy to bend and pipe like a duct without losing any of the aforementioned effects.
[0036]
The present invention has been described with reference to specific examples. However, the present invention is not limited to the above examples and embodiments, and can be implemented in various forms without departing from the gist of the present invention. can do. For example, the present invention can be applied to a waveguide made of any metal as long as it is a metal capable of friction stir welding, and the waveguide of Examples 1, 2, 3, 4, 6, or 7 can be used. The tube may be made of copper or an alloy thereof. However, aluminum or its alloy has high conductivity. For this reason, when a waveguide is comprised with an aluminum alloy as described in Examples 1, 2, 3, 4, 6, and 7, the performance as the waveguide is further improved. On the other hand, copper or an alloy thereof has high conductivity, excellent workability, and is strong against acids. For this reason, when the waveguide is made of copper as described in the fifth embodiment, it becomes easier to manufacture as the workability is improved, and good environmental resistance is obtained. Furthermore, you may manufacture the waveguide of Examples 1-7 with iron or its alloy. In this case, it is possible to reduce the electrical transmission loss by applying copper plating to the inner surface, and to manufacture at a low cost.
[0037]
In Examples 3, 4 and 5, the backing jig is pressurized outwardly with a hydraulic jack, but mechanical means, atmospheric pressure, or hydraulic pressure may be used as means for pressing the backing jig outward. Various means such as a means of using the above are conceivable. In this way, when the backing jig is expanded from the inside to support the butted portion, the butted portion can be supported extremely firmly from the inside. For this reason, the friction stir welding can be more reliably performed, and as a result, the reliability of the obtained waveguide can be improved, and the yield can be improved by preventing the occurrence of poor bonding. On the other hand, when the backing jig is a beam penetrating the waveguide as in the backing jig 25 used in Example 2, friction stir welding is continuously performed in the length direction of the tube along the beam. It can be implemented and the manufacture of the waveguide can be made easier.
[Brief description of the drawings]
FIG. 1 is an explanatory view showing a waveguide and a manufacturing method thereof according to Embodiment 1. FIG.
FIG. 2 is an explanatory diagram illustrating a waveguide and a manufacturing method thereof according to the second embodiment.
FIG. 3 is an explanatory diagram illustrating a waveguide and a manufacturing method thereof according to the third embodiment.
4 is an explanatory diagram illustrating a waveguide and a manufacturing method thereof according to Embodiment 6. FIG.
5 is an explanatory view showing a waveguide and a manufacturing method thereof according to Embodiment 7. FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Rotary tool 1a ... Shoulder part 1b ... Pillar 11, 13 ... Planar plate 15, 25, 35, 43, 45 ... Backing jig 19, 29, 39 ... Waveguide 21, 31, 32 ... Plate 41, 51 ... Flange 51a ... Inclined part 99 ... Joint part

Claims (11)

A waveguide formed by combining metal plates or extruded profiles into a tube having a square cross section, and joining the metal plates or extruded profiles together.
Each metal plate or extruded profile is friction stir welded by rotating the rotating tool along its abutting portion, and the inner surface is smooth to the extent that no reworking such as excision of surplus is required. A waveguide. 2. The waveguide according to claim 1, wherein the metal plates are combined into a tubular shape by bending and butting. 3. The waveguide according to claim 2, wherein the metal plates are combined into a tubular shape by bending the metal plate into a U-shaped cross-section, an L-shaped cross-section, or a U-shaped cross-section and abutting the edges. tube. 2. The waveguide according to claim 1, wherein the extruded shape member is formed in a U-shaped section or an L-shaped section. A metal flange member is externally fitted to one end of the metal plate or extruded profile combined in the tubular shape, and a bead surface is formed on the inner surface along the abutting portion between the flange member and the metal plate or extruded profile. The waveguide according to any one of claims 1 to 4, wherein the friction stir welding is performed so as not to be positioned. 6. The waveguide according to claim 1, wherein the metal plate or the extruded shape member is made of aluminum or an alloy thereof. 6. The waveguide according to claim 1, wherein the metal plate or the extruded profile is made of copper or an alloy thereof. 6. The waveguide according to claim 1, wherein the metal plate or the extruded shape member is made of iron or an alloy thereof. A manufacturing method for manufacturing the waveguide according to claim 1,
A method of manufacturing a waveguide, characterized in that a rigid backing is disposed on the inner surface of a metal plate or an extruded profile combined in the above-described tubular shape, and the friction stir welding is performed. 10. The method of manufacturing a waveguide according to claim 9, wherein the backing expands and contracts inside a metal plate or an extruded profile combined in the tubular shape. 10. The method for manufacturing a waveguide according to claim 9, wherein the backing is a metal plate or a beam penetrating the extruded shape member combined in the tubular shape.

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