JP3586774B2 - Bolt retaining device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bolt retaining device that prevents a bolt from dropping out of a bolt shaft portion insertion hole even when the external thread of a bolt is removed from an internal thread.
[0002]
[Prior art]
For example, in a fluid control device used for semiconductor manufacturing or the like, a joint member is fixed to a substrate by a bolt, and an on-off valve is fixed to the joint member by a bolt. Bolts are not always screwed from above, but are often screwed from the side or from below.
[0003]
[Problems to be solved by the invention]
In the above-mentioned conventional fluid control device, when the substrate is vertical, there is a problem that the bolt may fall out of the bolt shaft portion insertion hole when the external thread portion of the bolt comes off from the internal thread portion.
[0004]
An object of the present invention is to provide a bolt retaining device that prevents a bolt from dropping out of a bolt shaft portion insertion hole when the bolt is unscrewed when the bolt is screwed in from the side or from below.
[0005]
Means for Solving the Problems and Effects of the Invention
The present invention bolt retaining apparatus according to a device for the bolt for fixing the bolt shaft portion insertion hole with the fixed member in the screw hole with the fixing member is prevented from falling out from the bolt shank insertion hole during unscrewing, the bolt shaft A step portion is provided in the middle of the portion insertion hole so that a portion on the distal end side has a larger diameter, and a bolt shaft portion is provided so that a cylindrical O-ring escape prevention member places a gap between the step portion and the step portion. An annular recess is formed in the intermediate portion of the peripheral surface of the bolt shaft portion insertion hole by being fitted into the insertion hole from the tip side, and an O-ring having an inner diameter smaller than the outer diameter of the bolt shaft portion is formed in the annular recess. Is inserted, and the bolt is held by the elastic force of the O-ring.
[0006]
According to the bolt retaining device of the present invention, when a bolt screwed in from the side or from below is unscrewed, even when the bolt comes off from the screw hole, the bolt is held by the elastic force of the O-ring, Bolts are prevented from coming off.
[0007]
In addition, a step is provided in the middle of the bolt shaft insertion hole so that a portion on the tip side thereof has a large diameter, and a cylindrical O-ring escape preventing member is provided with a gap between the step and the step. Since the annular recess is formed by being fitted into the bolt shaft portion insertion hole from the front end side, the O-ring can be easily fitted into the recess, and the O-ring can be reliably prevented from coming off.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. In the following description, the upper and lower sides refer to the upper and lower sides of the figure.
[0011]
FIGS. 1 and 2 show an example of a fluid control device in which the bolt retaining device of the present invention is used. The fluid control device (4) is used in semiconductor manufacturing equipment and the like, and includes a mass flow controller (3), and breaker / openers (1) (2) provided on the left and right sides of the mass flow controller (3). Consisting of
[0012]
The left shut-off / opening device (1) includes a first on-off valve (6) disposed on the left and a second on-off valve (7) disposed on the right, a first on-off valve (6) and a second on-off valve (6). A first valve mounting base (28) to which the on-off valve (7) is mounted. The first valve mounting base (28) is formed by a plurality of joints (80) (30) (31) (32) (33) to be described later. A first check valve (5) is provided on the left side of the left shutoff / opening device (1).
[0013]
The right shut-off / opening device (2) includes a third on-off valve (8) disposed on the left, a fourth on-off valve (9) disposed in the middle, and a fifth on-off valve disposed on the right. (10) and a second valve mounting base (29) to which the third on-off valve (8), the fourth on-off valve (9), and the fifth on-off valve (10) are mounted. The second valve mounting base (29) is formed by a plurality of joints (34) (35) (36) (37) (38) (39) (79) described later. A second check valve (11) is provided on the right side of the right shutoff / opening device (2).
[0014]
Each of the on-off valves (6) (7) (8) (9) (10) is a valve body (12) (14) (16) (18) (20) and a valve body ( Actuators (13), (15), (17), (19) and (21) for appropriately opening and closing the passages in (12), (14), (16), (18) and (20). At the lower end of the valve body (12) (14) (16) (18) (20) of each on-off valve (6) (7) (8) (9) (10), a rectangular flange (12a), (14a), (16a), (18a), and (20a) are provided.
[0015]
Each check valve (5) (11) is a left valve body (22) (25) having an inlet on the lower surface, and a central valve body connected by bolts to the left valve body (22) (25). (23) and (26), and right valve bodies (24) and (27) connected to the central valve bodies (23) and (26) by bolts and provided with outlets on the lower surface.
[0016]
On the left side of the lower end of the mass flow controller (3), there is provided a rectangular parallelepiped left overhanging part (49) having an inlet on the lower surface, and on the same right side, a rectangular parallelepiped right overhanging part having an outlet on the lower surface. An outlet (50) is provided.
[0017]
The lower surface of each valve body (22) (23) (24) (12) (14) on the left side of the mass flow controller (3) and the lower surface of the left overhang (49) of the mass flow controller (3) are all Each valve body (16) (18) (20) (25) (26) on the right side of the mass flow controller (3) and the right overhang portion (50) of the mass flow controller (3) The lower surface of (27) is also all flush.
[0018]
The inlet of the left valve body (22) of the first check valve (5) is composed of a holding member (40) and an L-shaped passage forming member (41) held by the holding member (40), and is connected to a purge gas introduction line. A purge gas introduction joint (80) is provided.
[0019]
The outlet of the right valve body (24) of the first check valve (5) and the inlet of the valve body (12) of the first on-off valve (6) are connected to two holding members (42) and (44) and held by these. And a U-shaped communication passage forming member (46), which is connected to a left inflow opening / closing device (1) by a first inflow passage forming joint (30) for introducing a fluid. The communication passage forming member (46) is formed by joining two L-shaped passage forming members (43) and (45).
[0020]
An outlet of the first on-off valve (6) extends across the lower surface of the first on-off valve (6) on the right side of the valve body (12) and the lower surface of the second on-off valve (7) on the left side of the valve body (14). A rectangular parallelepiped first communication passage forming block joint (31) having a V-shaped passage (31a) communicating with an inlet of the second on-off valve (7) is provided.
[0021]
A first sub-passage joint (32) comprising a holding member (47) and an I-shaped passage forming member (48) held by the holding member (47) is provided at the sub entrance of the valve body (14) of the second on-off valve (7). Is provided. A known L-shaped joint (78) connected to the process gas introduction line is joined to the lower end of the first sub-passage joint (32).
[0022]
Fluid flows from the outlet of the second on-off valve (7) across the lower surface on the right side of the valve body (14) of the second on-off valve (7) and the lower surface of the left overhang portion (49) of the mass flow controller (3). A rectangular parallelepiped first outflow passage forming block joint (33) having a V-shaped passage (33a) to be discharged and sent to the mass flow controller (3) is provided.
[0023]
The fluid discharged from the mass flow controller (3) is spread right over the lower surface of the right overhang portion (50) of the mass flow controller (3) and the lower surface of the third opening / closing valve (8) on the left side of the valve body (16). A block joint (34) for forming a second rectangular inflow passage having a V-shaped passage (34a) to be introduced into one of the shutoff / openers (2) is provided.
[0024]
The third opening / closing valve (8) includes a holding member (51) and an L-shaped passage forming member (52) held at the sub port of the valve body (16) of the third opening / closing valve (8). A joint (35) for forming two sub-passages is provided.
[0025]
An outlet of the third on-off valve (8) extends across the lower surface of the third on-off valve (8) on the right side of the valve body (16) and the lower surface of the fourth on-off valve (9) on the left side of the valve body (18). A rectangular parallelepiped second communication passage forming block joint (36) having a V-shaped passage (36a) communicating with the inlet of the fourth on-off valve (9) is provided.
[0026]
A holding member (53) and an L-shaped passage forming member (54) held by the holding member (53) are connected to the secondary inlet / outlet of the valve body (18) of the fourth on-off valve (9), and are connected to the process gas feed line. A third sub-passage joint (37) is provided.
[0027]
The outlet of the valve body (18) of the fourth on-off valve (9) and the inlet of the valve body (20) of the fifth on-off valve (10) were held by two holding members (55) and (57) and these. They are communicated by a third communication passage forming joint (38) composed of a communication passage forming member (59). The communication passage forming member (59) is formed by joining two L-shaped passage forming members (56) and (58) together.
[0028]
The outlet of the fifth on-off valve (10) extends across the lower surface of the fifth valve valve (10) on the right side of the valve body (20) and the lower surface of the left valve body (25) of the second check valve (11). A block joint (39) for forming a rectangular parallelepiped second outflow passage having a V-shaped passage (39a) communicating with the inlet of the second check valve (11) is provided.
[0029]
The outlet of the right valve body (27) of the second check valve (11) is composed of a holding member (60) and an L-shaped passage forming member (61) held by the holding member (60), and is connected to a purge gas discharge line. A purge gas discharge joint (79) is provided.
[0030]
A first inflow passage forming joint (30), a first communication passage forming joint (31), a first auxiliary passage forming joint (32), and a first outflow passage forming joint on the left side of the mass flow controller (3). (33) forms the first valve mounting base (28) of the left shutoff / opening device (1). Also, a second inflow passage forming joint (34), a second sub passage forming joint (35), a second communication passage forming joint (36), and a third sub passage forming right side of the mass flow controller (3). The joint (37), the joint (38) for forming the third communication passage, and the joint (39) for forming the second outflow passage form a valve mounting base (29) of the right shutoff / opening device (2). .
[0031]
In this way, the purge gas introduced via the check valve (5) is supplied to the left shutoff / opening device (1) with the first inflow passage forming joint (30) and the valve body (1) of the first on-off valve (6). 12) a purge gas passage discharged through the first communication passage forming joint (31), the valve body (14) of the second on-off valve (7) and the first outflow passage forming joint (33), The process gas introduced from the lower surface of the first sub-passage joint (32) is supplied to the first sub-passage joint (32), the valve body (14) of the second on-off valve (7), and the first outflow passage formation. A passage for a process gas discharged through the joint (33) is formed. Further, the purge gas introduced through the mass flow controller (3) is supplied to the right cut-off / opening device (2) with the second inflow passage forming joint (34), the second communication passage forming joint (36), and the second communication passage forming joint (36). The purge gas passage discharged through the joint for forming the three communication passages and the joint for forming the second outflow passage and the process gas introduced through the mass flow controller form the second inflow passage. Process gas passage which is fed into the process chamber through the joint (34), the joint (36) for forming the second communication passage, and the joint (37) for forming the third sub-passage, and the gas in these passages is supplied to the second sub-passage. An evacuation passage drawn out from the passage forming joint (35) is formed.
[0032]
2, the first check valve (5) has an inflow passage (77a) and an outflow passage (77b) that are open downward. The first on-off valve (6) is a two-port valve. These valve bodies (12) have an inlet (62) located substantially at the center of the lower surface of the valve body (12) and a right-hand side. The valve body (12) has an inflow passage (64) leading from the inlet (62) to the valve chamber (66), and an outlet (63) through the outlet (63). ) Is formed. The valve actuator (13) of the first on-off valve (6) operates the valve body (67) of the diaphragm, and the inflow passage (64) is shut off by the valve body (67) by operating the valve actuator (13). It is designed to be open. The second on-off valve (7) is a three-port valve. The valve body (14) has an inlet (68) located on the lower left side of the lower surface of the valve body (14) and an outlet (68) located on the right side. 69), and a sub-inlet / outlet (70) which is located substantially at the center and serves as an inlet or outlet of another fluid, and is provided in the valve body (14) from the inlet (68) through the valve chamber ( 74), an auxiliary passage (73) from the sub-entrance (70) to the valve chamber (74), and an outflow from the outlet (69) to the valve chamber (74). A passage (72) is formed. The valve actuator (15) of the second on-off valve (7) operates the valve body (75) of the diaphragm. By operating the valve actuator (15), the auxiliary passage (73) is shut off by the valve body (75). It is designed to be open. The inflow passage (71) leading to the inlet (68) of the second on-off valve (7) and the outflow passage (72) leading to the outlet (69) are always in communication via a valve chamber (74). .
[0033]
Each valve body (22) (23) (24) (12) (14) (16) (18) (20) (25) (26) (27) and each member (41) (30 ) (31) (32) (33) (34) (35) (36) (37) (38) (39) (61), seal portions (76) as shown in FIG. Is provided. Also, check valves (5) (11) and on-off valves (6) (7) (8) (9) (10) and corresponding fittings (80) (30) (31) (32) (33) (34) (35) (36) (37) (38) (39) (79) are all valve bodies (22) (23) (24) (12) (14) (16) (18) (20) ), (25), (26), and (27) are connected by bolts (113) (see FIG. 2) screwed from above, and by removing these bolts (113), the check valves (5) (11) ) And the on-off valves (6) (7) (8) (9) (10) can be removed upward. The second check valve (11) has the same configuration as the first check valve (5), the fifth on-off valve (10) has the same configuration as the first on-off valve (6), and the third on-off valve (8) and the fourth on-off valve (9) have the same configuration as the second on-off valve (7).
[0034]
According to the fluid control device (4), the first on-off valve (6) is closed, the second on-off valve (7) is opened, the third on-off valve (8) is closed, the fourth on-off valve (9) is opened, When the fifth on-off valve (10) is closed and a process gas is introduced into the first auxiliary passage forming joint (32) of the left shut-off / opening device (1), the process gas is supplied to the second on-off valve (7). After passing through the valve body (14) and the first outflow passage forming joint (33), it reaches the mass flow controller (3), where its flow rate is adjusted and introduced into the right shut-off / opening device (2). Then, the second inflow passage forming joint (34), the valve body (16) of the third on-off valve (8), the second communication passage forming joint (36), and the valve body of the fourth on-off valve (9) (18) ) And the third sub-passage joint (37) to be fed into the process chamber. Thereafter, the first on-off valve (6) is opened, the second on-off valve (7) is closed, the third on-off valve (8) is closed, the fourth on-off valve (9) is closed, and the fifth on-off valve (10) When the purge gas is introduced from the first check valve (5) with the valve opened, the purge gas flows through the first inflow passage forming joint (30), the valve body (12) of the first on-off valve (6), and the first communication passage. Through the forming joint (31), the valve body (14) of the second on-off valve (7) and the first outflow passage forming joint (33), the flow reaches the mass flow controller (3). Fitting (34), valve body (16) of third on-off valve (8), joint (36) for forming second communication passage, valve body (18) of fourth on-off valve (9), forming third communication passage The fluid flows through the joint (38), the valve body (20) of the fifth on-off valve (10), the joint (39) for forming the second outflow passage, and the second check valve (11) and is discharged. At this time, the purge gas is supplied by its own pressure to the valve body (14) of the second on-off valve (7), the first outflow passage forming joint (33), the second inflow passage forming joint (34), and the second communication passage. The process gas remaining in the forming joint (36) is expelled, so that only the purge gas flows in a short time.
[0035]
In the left and right cut-off / opening devices (1) and (2), the first inflow passage forming joint (30) and the third communication passage forming joint (38) are common members. Block joint for forming a single communication passage (31), block joint for forming a first outflow passage (33), block joint for forming a second inflow passage (34), block joint for forming a second communication passage (36), and second outflow The passage forming block joint (39) is a common member, and the sub-passage forming joints (32), (35), (37) are also common members. That is, a three-port on-off valve is added to the left shut-off / opening device (1), and a first communication passage forming joint (31) and a first sub-passage forming By simply adding the same thing as the joint (32), the right cut-off opener (2) is obtained. Here, when the added on-off valve is of two ports, the fourth on-off valve (9) of the right shut-off / opening device (2) is replaced with a two-port valve, and its mounting base (29) is removed. What is necessary is just to remove the joint (37) for forming the third auxiliary passage. As described above, the left and right cutoff openers (1) and (2) are easily adapted to various specification changes.
[0036]
In the example shown in FIG. 1, the left shut-off / opening device (1) has two on-off valves (6) and (7), and the right shut-off / opening device (2) has three on-off valves. Although (8), (9), and (10) are provided, the number of these on-off valves can be appropriately changed. A shutoff / opening device having an appropriate number of on-off valves is provided on the left and right sides of the mass flow controller, and further arranged in parallel to form a fluid control device for a semiconductor manufacturing apparatus. And this fluid control device attaches the joints (80) (30) (31) (32) (33) (34) (35) (36) (37) (38) (39) to the board with bolts, Check valves (5) (11), on-off valves (80) (30) (31) (32) (33) (34) (35) (36) (37) (38) (39) 6) A fluid controller such as (7), (8), (9), (10) and a mass flow controller (3) are attached by bolts, and the substrate is fixed to a predetermined position.
[0037]
Next, an apparatus for fixing a joint member disposed between the substrate and the fluid controller to the substrate with bolts will be described with reference to FIG.
[0038]
In FIG. 3, two block joints (31) and (33) are attached to a substrate (108), and an on-off valve (7) is attached to both joints (31) and (33). Screw holes (106) for mounting the second on-off valve (7) to the valve body (14) are provided at four corners and four places on the upper surface of each block joint (31) (33). Bolt insertion holes (107) through which the joint fixing bolts (110) are inserted when the 31) is attached to the substrate (108) are provided at two places near the center. The board (108) is provided with a screw hole (109) used for attaching the joints (31) and (33) to the board (108).
[0039]
The bolt insertion hole (107) of each of the joints (31) and (33) is connected to a large-diameter portion (107a) having a diameter larger than the diameter of the bolt head (110a) and a step portion (107c) to this. It has a small diameter portion (107b) having an intermediate diameter between the diameter of the bolt head (110a) and the diameter of the bolt shaft (110b).
[0040]
A cylindrical spacer (111) whose lower end is received by the substrate (108) and whose upper end is inside the large-diameter portion (107a) is fitted into the small-diameter portion (107b) of the bolt insertion hole (107). The spacer (111) has an inner diameter larger than the diameter of the bolt shaft (110b) and an outer diameter smaller than the diameter of the bolt head (110a). The shaft (110b) of the joint fixing bolt (110) is fitted into the spacer (111), and the head (110a) is received by the upper end surface of the spacer (111). The spacer (111) regulates the amount of tightening of the joint fixing bolt (110), and the joint fixing bolt (110) is inserted into the bolt insertion hole (107) to be inserted into the screw hole (109) of the board (108). As the screw is screwed in, the spacer (111) is stretched between the head (110a) of the joint fixing bolt (110) and the substrate (108), so that further tightening cannot be performed.
[0041]
An annular rubber washer (112) having an outer diameter substantially equal to the diameter of the head (110a) of the joint fixing bolt (110) is fitted over the upper end of the spacer (111). The rubber washer (112) is sandwiched between the head (110a) of the joint fixing bolt (110) and the step (107c) of the bolt insertion hole (107). The vertical length of the rubber washer (112) is set such that a compressive force is applied to the rubber washer (112) in the tightening completed state shown in FIG. Therefore, the joints (31) and (33) are urged toward the substrate (108) by the rubber washers (112). Since the rubber washer (112) has elasticity, it can be further compressed and deformed, and the joints (31) and (33) can be moved away from the substrate (108). Therefore, even when the upper surfaces of the two joints (31) and (33) are not flush with each other, the on-off valve (7) is attached to these joints (31) and (33) with the joint fixing bolt (110). Then, the joints (31) and (33) approach the on-off valve (7), so that the joint fixing bolt (110) can be easily tightened. Thereby, an appropriate pressing force can be applied to all the seal portions (76), and the sealing property is ensured.
[0042]
Next, with reference to FIG. 4, a description will be given of a bolt retaining device according to the present invention, which is a preferable configuration when attaching the on-off valve (7) to the two joints (31) and (33) with the main body fixing bolt (113). .
[0043]
In the figure, a bolt shaft insertion hole (114) is formed in the flange portion (14a) of the valve body (14) of the on-off valve (7), and the bolt shaft insertion hole (114) is formed in the bolt shaft insertion hole (114). The steps (114a) and (114b) are provided near the middle and the lower end so that the lower end has the largest diameter. An O-ring (115) is fitted from the lower end of the bolt shaft insertion hole (114) and received by the middle step (114a), and a bush for preventing the O-ring from coming out from the large diameter side. (116) is inserted. In this way, the middle step portion (114a), the upper end surface of the bush (116), and the peripheral surface of the bolt shaft portion insertion hole (114) form the annular recess (118) for O-ring insertion. At the lower end of the bush (116), a flange (116a) is provided to abut the step (114b) near the lower end. Further, an annular projection (117) having an outer diameter slightly larger than the diameter of the bolt shaft insertion hole (114) in which the bush (116) is fitted is provided at an intermediate portion of the bush (116). When the bush (116) is forcibly inserted from the large diameter side of the bolt shaft portion insertion hole (114), the flange portion (116a) is received by the step (114b) near the lower end, and the annular protrusion (117) is crushed. The bush (116) is retained. Therefore, the O-ring (115) does not fall off. The inner diameter of the O-ring (115) is slightly smaller than the outer diameter of the shaft of the main body fixing bolt (113). Since the O-ring (115) has elasticity, it is extremely easy to forcibly insert the shaft of the main body fixing bolt (113) into the O-ring (115). When the main body fixing bolt (113) is unscrewed from the screw hole (106), the main body fixing bolt (113) does not come off the O-ring (115) due to the elastic force of the O-ring (115). . Therefore, even when the board (108) is installed vertically (upside down and left and right in the figure are reversed), the bolt (113) may fall and be lost when the main body fixing bolt (113) is attached and removed. Absent.
[Brief description of the drawings]
FIG. 1 is a front view showing an example of a fluid control device in which a bolt retaining device according to the present invention is used.
FIG. 2 is an exploded perspective view, partly cut away, showing a main part of the fluid control device of FIG. 1;
FIG. 3 is a sectional view showing a joint fixing device.
FIG. 4 is a sectional view showing a bolt retaining device according to the present invention.
[Explanation of symbols]
(7) On-off valve (fixed member)
(31) Joint (fixing member)
(106) Screw hole
(113) Bolt
(114) Bolt shaft insertion hole
(114a) Step (for receiving O-ring)
(115) O-ring (elastic member)
(116) Bush (O-ring escape prevention member)
(118) Annular recess

Claims (1)

The bolt (113) that fixes the fixed member (7) with the bolt shaft insertion hole (114) to the fixing member (31) with the screw hole (106) does not fall out of the bolt shaft insertion hole (114) when unscrewed. A step portion (114a) is provided in the middle of the bolt shaft portion insertion hole (114) so that a portion on the tip side thereof has a large diameter, and a cylindrical O-ring escape prevention member is provided. (116) is inserted into the bolt shaft portion insertion hole (114) from the front end side so as to leave a gap between the step portion (114a), so that the bolt shaft portion insertion hole (114) is located at an intermediate portion of the peripheral surface. An annular recess (118) is formed, and an O-ring (115) having an inner diameter smaller than the outer diameter of the shaft of the bolt (113) is fitted into the annular recess (118), and the bolt (113) The bolt is held by the elastic force of the O-ring (115).

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