JP3455800B2 - Circuit breaker - Google Patents

Description

Description: BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a circuit breaker used for a fluid control device or the like in a semiconductor manufacturing apparatus, and more particularly to a circuit breaker provided at an entrance of a mass flow controller. The present invention relates to a shut-off / opening device that appropriately switches a type of fluid. [0002] In this specification, the front, rear, up and down, and left and right of each figure are referred to as front, left as rear, up and down as up and down, and left and right as forward. The front and rear, up and down, and left and right are for convenience, and may be used with the front and rear reversed or the up and down turned left and right. FIG. 3 shows a conventional shut-off / opening device (81) provided on the fluid inlet side of a mass flow controller (see Japanese Patent Application Laid-Open No. 5-172265). The conventional shutoff / opening device (81) includes a first opening / closing valve (82) on the rear side and a second opening / closing valve (83) on the front side. Both on-off valves (82) and (83) are two-port valves, and the first on-off valve (82) is a first valve body (84).
And a first valve actuator (86), and a second on-off valve
(83) is a second valve body formed integrally with the first valve body (84).
(85) and a second valve actuator (87). The first valve body (84) communicates with the process gas inflow passage (88) through the valve chamber (89) and communicates with the inflow passage (88) through the first chamber.
Pro is blocked opened by operation of the valve actuator (86)
And a gas passage (90). 2nd valve body (8
5) is a main outflow passageway (91) which constantly communicates with the process gas outflow passageway (90) of the first valve body (84) and discharges the process gas to the inlet side of the mass flow controller. 8
Purge gas that opens to the lower surface of 5) and the other end communicates with the valve chamber (92)
A scan inflow passage (93), is communicating and the communication via purge-gas inlet passage and (93) a valve chamber (92) at one side second
The valve is opened and closed by operating the valve actuator (87), and the main outflow passage (9
1) and a purge gas sub-outflow passage (94) which is always in communication with (1). In FIG. 3, reference numerals (95) and (96) denote diaphragms, and valve stems (97) operated by valve actuators (86) and (87).
As the (98) moves up and down, the diaphragms (95) and (96)
9) By moving up and down in (92), each inflow passage (8
8) (93) is shut off and opened. [0004] In the shutoff-opening device of this kind, usually, after flowing the process <br/> gas, once cut off the flow by flowing <br/> the path Jiga scan, shutoff-opening process gas An operation of discharging the gas to the outside of the chamber and replacing the gas with the purge gas , and then flowing the process gas again is performed. When the process gas and the purge gas are switched and flowed in the conventional shutoff / opening device (81), the following is performed. [0005] First, by operating the first valve actuator (86) and a second valve actuator (87), by first closing valve (82) open, the second on-off valve (83) is closed, Purosesuga
Scan is a process gas inlet passage of the first valve body (84) (88),
Main outflow passage (91) of the outflow passage (90) and the second valve body (85)
Through the mass flow controller. At this time, the purge gas for the sub outflow passage (94) a process
Ri Do to be filled by a gas, a purge gas Karapu
Replacement with process gas is performed . Next, by operating the first valve actuator (86) and the second valve actuator (87) to close the first on-off valve (82) and open the second on-off valve (83), the purge gas is purged. For inflow passage (93),
The gas is introduced to the inlet side of the mass flow controller via the purge gas sub-outflow passage (94) and the main outflow passage (91). At this time, the purge gas flows out by purging the process gas remaining in the purge gas sub-outflow passage (94) and the subsequent main outflow passage (91) by its own pressure, and is purged from the process gas.
Replacement with digas is performed . [0006] In the circuit breaker,
When the process gas and the purge gas are switched and flown, it is very important performance that the fluid is quickly replaced and the purity of the fluid is ensured. The second on-off valve (8) of the above-mentioned conventional shut-off / opening device (81)
In 3), after flowing the process gas, again introducing the purge gas from the purge gas inlet passage (93), Tsu process gas outflow passage of the first valve body (84) (90) the name in the collecting section of the process gas Te it is, the process gas in the reservoir is
Slightly mix with the purge gas and remove
There was a problem that replacement with digas was not performed quickly . Further, in a fluid control apparatus using this kind of shut-off device, a plurality of block-shaped joints are attached to a panel, and the shut-off / opening device is attached across these block-shaped joints, thereby shutting off at the time of maintenance and inspection. Although the integration of assembling such that the opener can be taken out upward alone is being promoted, the above-mentioned conventional shut-off opener has openings on the front and rear surfaces of the valve body, and such an integrated fluid control device is used. There is also a problem that it is unsuitable for use for SUMMARY OF THE INVENTION It is an object of the present invention to provide a shut-off / opening device in which the replacement of a fluid is performed quickly to ensure the purity of the fluid and facilitate the integration of a fluid control device. The shut-off / opening device according to the present invention comprises a first fluid inflow passage and a first fluid inflow passage.
A two-port valve having a fluid outflow passage, wherein communication between the two passages is blocked and opened by an actuator; a first fluid inflow passage, a second fluid inflow passage, and a common outflow for the first and second fluids A three-port valve having a passage, wherein the first fluid inflow passage and the outflow passage are always communicated via the valve chamber, and the communication between the second fluid inflow passage and the outflow passage is blocked and opened by the actuator; The first and second fluid inflow passages of the three-port valve are opened on the abutting surface, and the outflow passage is opened on the lower surface of the three-port valve, and the first fluid outflow passage of the two-port valve is three-port. The valve is connected to the first fluid inflow passage of the valve,
A second fluid inflow passage communicating with the second fluid inflow passage of the port valve and opening to the lower surface is further formed. According to the shut-off / opening device of the present invention, when flowing the second fluid (for example, process gas), the actuator of the two-port valve is closed and the actuator of the three-port valve is opened to open the second fluid. The second fluid is introduced from the second fluid inflow passage of the two-port valve by making the fluid inflow passage and the outflow passage communicate with each other. Thereby, the second fluid is 2
The fluid is sent to a mass flow controller or the like through the second fluid inflow passage of the port valve and the second fluid inflow passage and the outflow passage of the three-port valve. Thereafter, the actuator of the two-port valve is opened, the actuator of the three-port valve is closed, and the second fluid inflow passage is shut off, so that the first fluid (eg, purge gas) flows into the two-port valve for the first fluid. Introduce from the passage. As a result, the first fluid is sent to the mass flow controller or the like via the first fluid inflow passage and the outflow passage of the two-port valve, and the first fluid inflow passage and the outflow passage of the three-port valve. The first fluid expels the second fluid remaining in the outflow passage of the three-port valve by its own pressure and flows to the mass flow controller, where the first fluid and the second fluid are mixed. Is quickly eliminated, and only the first fluid flows in a short time. According to the circuit breaker of the present invention,
Below the port valve, a block-shaped joint having a passage leading to the second fluid inflow passage is arranged, and below the three-port valve, a block-shaped joint having a passage leading to the outflow passage is arranged. This open-circuit breaker can be mounted so as to straddle the block-shaped joint, so that the fluid control device using the break-open opener can be easily integrated, and maintenance and inspection of the break-open opener can be easily performed. Can be done. Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, a shutoff / opening device (1) according to the present invention is provided on the inlet side (rear side) of a mass flow controller (2) and constitutes a fluid control device used in a semiconductor manufacturing apparatus or the like. I do. The shut-off / opening device (1) is provided with a rear two-port valve (3).
And the front three-port valve (4) are arranged side by side. The two-port valve (3) includes a rectangular parallelepiped valve main body (5) and an actuator mounted on the front part thereof from above.
The valve body (5) includes a substantially V-shaped first fluid inflow passage (8) having one end opened to the rear upper surface and the other end communicating with the valve chamber (7). Is open to the front and the other end communicates with the valve chamber (7), and communication with the first fluid inflow passage (8) is performed by the actuator.
A substantially L-shaped first fluid outflow passageway (9), which is cut off and opened by (6), and which is located below both passageways (8) and (9), one end of which is open at the lower surface of the rear end and the other end is at the front surface And a substantially inverted L-shaped second fluid inflow passage (10) that is open to the inside. The two-port valve (3) is a diaphragm valve, and the diaphragm (12) moves up and down in the valve chamber (7) as the valve rod (11) moves up and down by the operation of the actuator (6). Thereby, the opening of the outflow passage (9) is blocked and opened. The three-port valve (4) also has a rectangular parallelepiped valve body (13) and an actuator (14) attached thereto from above.
In the valve body (13), one end is opened to the rear surface, communicates with the first fluid outflow passage (9) of the two-port valve (3), and the other end is in the valve chamber (15).
A first fluid inflow passage (16), which is generally L-shaped, and one end opening to the rear surface below the first fluid inflow passage (16) and the other end communicating with the valve chamber (15). A substantially L-shaped second fluid inflow passageway (17), an outflow passageway (18) common to the first fluid and the second fluid, one end of which is open at the lower surface and the other end communicates with the valve chamber (15); Is provided. The three-port valve (4) is a diaphragm valve, and as shown in an enlarged view in FIG.
The upper end opening of the first fluid inflow passage (16) communicates with the rear part of the annular groove (15a), and the outflow passage is formed at the front part.
The upper end opening of (18) is open. As a result, the first fluid inflow passage (16) and the outflow passage (18) are connected to the annular groove (1) of the valve chamber (15).
It is always in communication via 5a). An annular valve seat (19) is provided at the edge of the upper end opening of the second fluid inflow passage (17), and the valve stem is operated by operating the actuator (14).
As the diaphragm (valve element) (21) moves up and down in the valve chamber (15) with the up and down movement of (20), the second fluid inflow passage (17) is cut off and opened. ing.
FIG. 2A shows an open state in which the valve stem (20) is raised, and the second fluid inflow passage (17) and the outflow passage (18) are connected to the valve chamber (1).
5) is communicated through. FIG. 2 (b) shows the valve stem (2
0) indicates a closed state in which it has been lowered.
The fluid inflow passage (16) and the outflow passage (18) communicate with each other. The valve body (5) of the two-port valve (3) and the three-port valve
Although not shown, it is connected to the valve body (13) of (4) by a bolt screwed in from the right. Abutting portion between the first fluid outflow passage (9) of the two-port valve (3) and the first fluid inflow passage (16) of the three-port valve (4) and the second fluid inflow of the two-port valve (3). The abutting portion between the passage (10) and the second fluid inflow passage (17) of the three-port valve (4) has a seal portion (2
2) is provided. An L-shaped passage (23a) connecting the opening of the second fluid inflow passage (10) and the process gas introduction line is provided on the lower surface of the rear end of the valve body (5) of the two-port valve (3). A block joint (23) having a three-port valve (4) is provided.
A block joint (24) having a V-shaped passage (24a) connecting the opening of the outflow passage (18) and the entrance passage of the mass flow controller (2) is provided on the lower surface of (3). Then, the L-shaped passage block joint (23) and the V-shaped passage block joint (24)
A break opener (1) is attached by a screw from above. A block joint (24) having a V-shaped passage (24a) is also provided on the outlet side of the mass flow controller (2), and these V-shaped passage block joints are provided.
A mass flow controller (2) is mounted over (24) with screws from above. Each block fitting (2
3) (24) is attached to the substrate (25) by screws from above. According to this fluid control device, the two-port valve
When (3) is closed and the three-port valve (4) is opened and the process gas is introduced into the three-port valve (4), the flow rate of the process gas is adjusted by the mass flow controller (2) and sent to the process chamber. After this, open the 2-port valve (3),
When the port valve (4) is closed and purge gas is introduced into the two-port valve (3), the purge gas flows through the two-port valve (3), the three-port valve (4), and the mass flow controller (2). Purge the process gas from inside the fluid control device. When the second fluid (the process gas in this embodiment) flows, the actuator (6) of the two-port valve (3) is used.
And the actuator of the 3-port valve (4)
Open (14) the second fluid inflow passage (17) and the outflow passage
(18) and the second fluid through the second port (3) of the second port valve (3).
The fluid is introduced from the fluid inflow passage (10). Thereby, the second fluid is supplied to the second fluid inflow passages (10), (3) of the two-port valve (3).
The fluid is sent to the mass flow controller (2) through the second fluid inflow passage (17) and the outflow passage (18) of the port valve (4).
Thereafter, the actuator (6) of the two-port valve (3) is opened, the actuator (14) of the three-port valve (4) is closed, and the second fluid inflow passage (17) is shut off. Fluid (purge gas in this embodiment) is introduced from the first fluid inflow passage (8) of the two-port valve (3). As a result, the first fluid flows into the first fluid inflow passage (8), the outflow passage (9) of the two-port valve (3), the first fluid inflow passage (16) of the three-port valve (4), and It is sent to the mass flow controller (2) through the outflow passage (18). The first fluid remains in the valve chamber (15) and the outlet passage (18) of the three-port valve (4) due to its own pressure.
Out of the fluid and flow to the mass flow controller (2) so that the state in which the first fluid and the second fluid are mixed is quickly eliminated, and only the first fluid (purge gas) flows in a short time. become.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing a circuit breaker according to the present invention. FIG. 2 is an enlarged sectional view of a three-port valve. FIG. 3 is a sectional view showing a conventional circuit breaker. [Description of Signs] (1) Cut-off opener (3) Two-port valve (4) Three-port valve (6) Actuator (8) First fluid inflow passage (9) First fluid outflow passage (10) Second Fluid inflow passage (14) Actuator (15) Valve chamber (16) First fluid inflow passage (17) Second fluid inflow passage (18) Outflow passage

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yasuyuki Okabe 1-2-41 Machiya, Shiroyama-cho, Tsukui-gun, Kanagawa Prefecture Inside the Tokyo Electron Tohoku Sagami Office (72) Inventor Yuji Kawano 2-3-2 Tachibori, Nishi-ku, Osaka-shi No. Fujikin Co., Ltd. (72) Inventor Michio Yamaji 2-3-2, Noribori, Nishi-ku, Osaka-shi Fujikin Co., Ltd. (56) References JP-A-10-220698 (JP, A) JP-A-8-5000 (JP, A) JP-A-10-300000 (JP, A) JP-A-10-205636 (JP, A) JP-A-2000-29535 (JP, A) -71979 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) F16K 27/00-27/12 F16K 7/00 F17D 1/00-5/08

Claims (1)

(57) [Claim 1] A first fluid inflow passage (8) and a first fluid outflow passage (9) are provided, and communication between both passages (8) and (9) is performed by an actuator. A two-port valve (3) shut off and opened by (6),
It has a first fluid inflow passage (16), a second fluid inflow passage (17), and an outflow passage (18) common to the first fluid and the second fluid. A three-port valve that is always in communication with the passage (18) through the valve chamber (15), and the communication between the second fluid inflow passage (17) and the outflow passage (18) is cut off and opened by the actuator (14). (4) are disposed adjacent to each other, and the first and second fluid inflow passages (16) (1) of the three-port valve (4)
The outflow passage (18) is opened at the bottom surface and the outflow passage (18) is opened at the bottom surface, and the first fluid outflow passage (9) of the two-port valve (3) is opened.
Are connected to the first fluid inflow passage (16) of the three-port valve (4), the two-port valve (3) is communicated to the second fluid inflow passage (17) of the three-port valve (4), and A shut-off / opening device further comprising a second fluid inflow passage (10) opened on the lower surface.