JPH06313488A - Solenoid valve manifold - Google Patents

Abstract

PURPOSE:To simply and easily perform changeover between an inner pilot method and an outer pilot method even in the case that a plurality of pilot type solenoid valve manifoldsare connected to each other. CONSTITUTION:A pilot type solenoid valve mainfold is composed of a valve block A serving as a solenoid valve manifold main body, an intake/exhaust block B, and an end block C. The valve block A supplies and discharges air in respect to cylinder ports based on pilot pressure. The intake/exhaust block B takes intake air from outside through a port 22 and supplies it to the valve block A, while collets and discharges exhaust from the valve block A to outside through the port 21. The intake/exhaust block B is changed over between an inner pilot specification where a part of intake from the port is supplied to the valve block A as pilot pressure, and an outer pilot specification where the pilot pressure from outside is supplied to the valve block A.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solenoid valve manifold, and more particularly to a solenoid valve manifold in which a plurality of pilot type solenoid valve manifolds are connected.

[0002]

2. Description of the Related Art A large number of pilot type solenoid valve manifolds for driving actuators are used in FA (factory automation) devices such as semiconductor manufacturing devices. The pilot solenoid valve manifold is required to prevent malfunctions, be easily replaced with another type of specifications, and be easy to install and adjust.

Generally, a pilot type solenoid valve manifold is provided with a pair of cylinder ports, an air supply passage and an exhaust passage. By switching the internal spool to two positions, the connection between the air supply passage and the exhaust passage and each cylinder port is switched. For example, switching the spool to the first position
One cylinder port communicates with the air supply passage, and the other cylinder port communicates with the exhaust passage. Further, when the spool is switched to the second position, contrary to the case of the first position, the other cylinder port and the air supply passage and the one cylinder port and the exhaust passage communicate with each other. .

Here, the spool switching is performed by pilot pressure. That is, two pilot pressure passages are communicated with the spool, and pilot pressure is applied from each passage. The position of the spool is switched by switching the direction of the pilot pressure applied to the spool. Further, switching of the direction of pilot pressure applied to the spool is performed by opening and closing a pilot valve driven by a solenoid.

There are an external pilot method and an internal pilot method as the method of generating the pilot pressure. The external pilot method is a method in which a pilot passage is provided inside the pilot solenoid valve manifold separately from the air supply passage and the exhaust passage, and the air is supplied to and exhausted from the outside of the pilot solenoid valve manifold to the pilot passage. .

In the internal pilot system, a pilot passage communicating with the air supply passage and the exhaust passage is provided inside the pilot type solenoid valve manifold, and the air supply from the air supply passage and the exhaust from the exhaust passage are diverted to the pilot pressure. It is a method.

In the conventional pilot type solenoid valve manifold, the external pilot type and the internal pilot type have been separately manufactured as separate specifications.

[0008]

By the way, when driving a large number of actuators, a plurality of pilot type solenoid valve manifolds described above are connected and used. In that case, the air supply passage and the exhaust passage of the pilot type solenoid valve manifold are made to communicate with each other, and the air supply of each air supply passage and the exhaust of each exhaust passage are collectively performed.

When a plurality of pilot type solenoid valve manifolds are connected and used as described above, an internal pilot type solenoid valve manifold is usually used. This is because the internal pilot method does not require air supply / exhaust from the outside to the pilot passage, so that the entire solenoid valve manifold device can have a simple configuration.

However, in the internal pilot system,
When the supply / exhaust flow rate from the cylinder port is large, the pilot pressure may decrease, resulting in malfunction such as unstable response time. That is, when the supply / exhaust amount from the cylinder port is large, most of the supply air in the supply passage and the exhaust gas in the exhaust passage are supplied / exhausted from the cylinder port. Then, of the air supply in the air supply passage and the exhaust air in the exhaust passage, the amount that can be used for the pilot pressure is reduced. Therefore, in the internal pilot system in which the air supply from the air supply passage and the exhaust air from the exhaust passage are diverted to the pilot pressure, the pilot pressure is reduced.

In such a case, it is necessary to change the specifications from the internal pilot system to the external pilot system. However, in the conventional pilot type solenoid valve manifold, all the connected pilot type solenoid valve manifolds must be adjusted by exchanging the internal pilot type from the external pilot type.

Therefore, when a plurality of pilot type solenoid valve manifolds are connected and used, it takes much time and effort to change the specification from the internal pilot system to the external pilot system.

In order to change the specification from the internal pilot system to the external pilot system, it is necessary to prepare the required number of both solenoid valve manifolds. Therefore, when using a large number of pilot type solenoid valve manifolds, in addition to the great purchase cost,
There was a great risk in the installation, such as having to secure a storage location for the solenoid valve manifold that is not used for the time being.

The present invention has been made to solve the above problems, and its object is to change from the internal pilot system to the external pilot system even when a plurality of pilot type solenoid valve manifolds are connected and used. An object of the present invention is to provide a pilot-type solenoid valve manifold whose specifications can be changed easily and easily.

[0015]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a main valve switching system in which a spool for switching a flow path based on pilot pressure is movably accommodated. Section, an air supply passage and a plurality of cylinder ports are arranged, and a piping base portion that connects the air supply passage and the plurality of cylinder ports to the spool of the main valve switching unit, a pilot pressure passage and an exhaust passage. A valve block having a connecting base portion that connects the pilot pressure passage and the exhaust passage to the spool of the main valve switching portion, and the valve block that is connected to the valve block and that supplies air from the outside. Of the valve block, and an exhaust pipe line for discharging exhaust gas from the exhaust passage of the valve block to the outside. And Internal pilot supplied to the subblock, as its gist in that a supply and exhaust block the pilot pressure is provided a switching line for switching the external pilot type supplied to each valve block from the outside.

According to a second aspect of the present invention, in the solenoid valve manifold according to the first aspect, a plurality of the valve blocks are connected to each other so that each air supply passage and each exhaust passage between the connected valve blocks are communicated with each other. That is the summary.

[0017]

Therefore, according to the first aspect of the present invention, the internal pilot specification and the external pilot specification can be switched by the switching conduit. According to the second aspect of the present invention, it is possible to switch between the internal pilot specifications and the external pilot specifications by using one or two air supply / exhaust blocks for a plurality of connected valve blocks.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a usage state of the pilot type solenoid valve manifold of the present embodiment.

The pilot type solenoid valve manifold of this embodiment is a valve block A which is a solenoid valve manifold body.
And an air supply / exhaust block B and two end blocks C.

In the case of driving a large number of actuators according to this embodiment, as shown in FIG.
8), the valve block A is connected to the supply / exhaust block B, and the end blocks C are connected to both sides thereof.
Then, the valve block A, the supply / exhaust block B, and the end block C that are connected are mounted on the rail D.

FIG. 2 is a perspective view showing a state in which the valve block A, the air supply / exhaust block B and the end block C are separated. However, FIGS. 1 and 2 show a state in which a part of the valve block A and the supply / exhaust block B is disassembled and removed, as described later.

FIG. 3 is a sectional view of the valve block A. Further, FIG. 4 is a partial perspective view of the valve block A. The valve block A includes a main valve switching unit 1, a connection base unit 2, a piping base unit 3, and two pilot valve units 4a and 4b.
It consists of and. A connecting base portion 2 and a piping base portion 3 are arranged on both sides of the main valve switching portion 1 so as to face each other. In addition, each pilot valve portion 4a, 4
b is arranged in the connection base portion 2.

The main valve switching unit 1 is composed of a switching body 1a and two pilot pressure drive piston chambers 1b. Two pilot pressure drive piston chambers 1b are arranged facing each other above and below the switching body 1a. The switching main body 1a and the pilot pressure drive piston chambers 1b are respectively screwed by screws 5. A spool hole 6 is formed inside the switching body 1b, and a spool 7 is housed in the spool hole 6. The spool 7 can be switched between two positions within the spool hole 6. Piston chambers R1 and R2 are formed at positions corresponding to both ends of the spool 7 of each pilot pressure drive piston chamber 1b. A pair of pistons 8 are provided in the piston chambers R1 and R2.
a and 8b are slidably accommodated. Each piston 8a, 8b presses both ends of the spool 7.

Inside the pilot valve portion 4a, a pilot valve 10a driven by a solenoid 9a is provided. On the other hand, inside the pilot valve portion 4b, a pilot valve 10b driven by a solenoid 9b is provided. The pilot valves 10a and 10b are controlled to open / close by energizing / de-energizing the solenoids 9a and 9b, and pilot pressure is generated. The pilot valve portions 4a and 4b are covered with a pilot valve portion case 11 which is formed so as to be fitted to the connection base portion 2.

Inside the connection base portion 2, pilot pressure passages 12a and 12b, a pilot pressure supply passage 13, a pilot pressure exhaust passage 14 and an exhaust passage 15 are formed, respectively. Each pilot pressure passage 12a, 12b
Is each pilot valve 10a, 10b and each piston chamber R
1 and R2 are communicated with each other to supply a pilot pressure to each piston chamber R1, R2. The pilot pressure supply passage 13 is adapted to supply the pilot pressure to each pilot valve 10a, 10b. on the other hand,
The pilot pressure exhaust passage 14 includes the pilot valves 10a,
The pilot pressure from 10b is exhausted. The exhaust passage 15 communicates with the spool 7. The pilot pressure passages 12a and 12b, the pilot pressure supply passage 13, the pilot pressure exhaust passage 14 and the exhaust passage 15 do not intersect with each other.

A pair of cylinder ports 16 are opened at the end surface of the piping base portion 3 opposite to the side in contact with the main valve switching portion 1, and each joint 17 is provided at the opening portion of the piping base portion 3.
Is buried. And each cylinder port 16
Is adapted to communicate with the spool 7. An air supply passage 18 is formed inside the piping base portion 3. The air supply passage 18 is arranged in the center of each cylinder port 16 and communicates with the spool 7 without intersecting with each cylinder port 16.

FIG. 5 is a sectional view of the air supply / exhaust block B. An air supply port 21 and an exhaust port 22 are opened at the end surface of the air supply / exhaust block B, and the ports 21 and 22 are provided.
Each joint 23, 24 is embedded in the opening of the. A pipe 25 from the outside is inserted into each joint 23, 24.

An external pilot air supply port 26, an external pilot exhaust port 27, and a hole 28 are opened on the upper surface of the air supply / exhaust block B. And each port 26, 27
The joints 29 and 30 are embedded in the opening of the plug, and the sealing plug 31 is inserted into the opening of the hole 28. Further, as will be described later, when the internal pilot specification is used, the sealing plug 32 is inserted into each joint 29, 30.

Inside the air supply / exhaust block B, the air supply passage 3 is provided.
3, an exhaust passage 34, a pilot pressure supply passage 35, and a pilot pressure exhaust passage 36 are formed respectively. The air supply port 21 communicates with the air supply passage 33, and the exhaust port 22 communicates with the exhaust passage 34.
The external pilot air supply port 26 communicates with the pilot pressure air supply passage 35, and the external pilot exhaust port 27 communicates with the pilot pressure air exhaust passage 36. Further, the air supply passage 33 has a pilot pressure air supply passage 35.
The exhaust passage 34 communicates with the pilot pressure exhaust passage 36. Further, a check valve 38 is arranged between the exhaust passage 34 and the pilot pressure exhaust passage 36 to prevent backflow from the exhaust passage 34 to the pilot pressure exhaust passage 36.

However, as will be described later, in the case of using the external pilot specification, a sealing ball 37 is press-fitted between the air supply passage 33 and the pilot pressure air supply passage 35 to fit the air supply passage 33. And the pilot pressure supply passage 35 are disconnected from each other.

Incidentally, in FIG. 1 and FIG.
And the joints 29 and 30 and the sealing plug 32 are omitted. Next, a method of using the thus constructed solenoid valve manifold of the present embodiment will be described.

When the air supply / exhaust block B, each end block C and a plurality of valve blocks A are connected as shown in FIG. 1, as is apparent from FIG. 2, the air supply passage 33 of each air supply / exhaust block B and each valve. Air supply passage 18 of block A, air exhaust passage 34 of air supply / exhaust block B and exhaust passage 15 of each valve block A, pilot pressure air supply passage 35 of air supply / exhaust block B and pilot pressure air supply passage 1 of each valve block A
3. The pilot pressure exhaust passage 36 of the supply / exhaust block B and the pilot pressure exhaust passage 14 of each valve block A are connected and communicate with each other.

Here, each end block C is provided with each passage 13, 1 of each valve block A and supply / exhaust block B.
It also functions as a sealing plug for both ends of 4, 15, 18, 33 to 36.

The solenoid valve manifold of this embodiment can be used in two specifications, an internal pilot specification and an external pilot specification. When using with the internal pilot specification, the sealing plug 32 should be attached to each joint 29, 30 of the air supply / exhaust block B.
Is inserted, the sealing ball 37 between the air supply passage 33 of the air supply / exhaust block B and the pilot pressure air supply passage 35 is removed, and the passages 33, 35 are made to communicate with each other. Incidentally, the sealing ball 37
When removing, the sealing plug 31 may be removed and the sealing ball 37 may be taken out from the hole 28.

Then, the air supplied from the outside to the air supply port 21 of the air supply / exhaust block B through the pipe 25 is supplied from the air supply passage 33 of the air supply / exhaust block B to each valve block A.
Is supplied to the air supply passage 18. In addition, piping 25 from the outside
A part of the supply air sent to the supply port 21 of the supply / exhaust block B via the is supplied from the pilot pressure supply passage 35 of the supply / exhaust block B to the pilot pressure supply passage 13 of each valve block A. .

Therefore, the pilot valve portions 4a and 4b of each valve block A operate according to the pressure of the air supplied from the pilot pressure air supply passage 13 to generate the pilot pressure. At this time, from the pilot valve portions 4a and 4b of each valve block A to each pilot pressure supply passage 1
The pilot pressure exhausted via 3 is sent to the pilot pressure exhaust passage 36 of the air supply / exhaust block B, and is exhausted from the exhaust port 22 via the check valve 38 and the exhaust passage 34.

As a result, the spool 7 of each valve block A is switched, one cylinder port 16 and the air supply passage 18, and the other cylinder port 16 and the exhaust passage 1
5 and 5 communicate with each other.

When the external pilot specification is used, the sealing plug 32 is removed from each joint 29, 30 of the air supply / exhaust block B, and the air supply passage 33 of the air supply / exhaust block B and the pilot pressure air supply passage 35 are connected. The sealing sphere 37 is press-fitted into and fitted into, and the communication between the passages 33 and 35 is cut off. When press-fitting the sealing ball 37, the sealing plug 31 is removed and the hole 28
Then, the sealing sphere 37 may be inserted.

Then, the air supplied from the outside to the air supply port 21 of the air supply / exhaust block B through the pipe 25 is supplied from the air supply passage 33 of the air supply / exhaust block B to each valve block A.
Is supplied to the air supply passage 18. In addition, the pilot pressure sent from the outside to the external pilot air supply port 26 is
It is supplied from the pilot pressure supply passage 35 of the supply / exhaust block B to the pilot pressure supply passage 13 of each valve block A.

Therefore, each pilot valve portion 4a, 4b of each valve block A operates according to the pressure by the air supply supplied from the pilot pressure air supply passage 13 to generate the pilot pressure. At this time, from the pilot valve portions 4a and 4b of each valve block A to each pilot pressure supply passage 1
The pilot pressure discharged via 3 is sent to the pilot pressure exhaust passage 36 of the supply / exhaust block B. Then, it is discharged from the exhaust port 22 via the check valve 38 and the exhaust passage 34, and is discharged from the external pilot exhaust port 27.

As a result, the spool 7 of each valve block A is switched to one cylinder port 16 and the air supply passage 18, and the other cylinder port 16 and the exhaust passage 1.
5 and 5 communicate with each other.

Here, the check valve 38 is provided to prevent backflow from the exhaust passage 34 to the pilot pressure exhaust passage 36. This is because when the exhaust from the cylinder port 16 of each valve block A is large, a high pressure may be applied to the exhaust passage 34 and may flow backward from the exhaust passage 34 to the pilot pressure exhaust passage 36. In this case, the pilot pressure cannot be exhausted from the pilot pressure exhaust passage 36, resulting in malfunction.
8 prevents it.

As described above, in the pilot type solenoid valve manifold of this embodiment, the sealing plug 3 is provided in the air supply / exhaust block B.
The two specifications of the internal pilot specification and the external pilot specification can be appropriately changed only by attaching or removing the 2 and the sealing ball 37. Since there is no need to change or adjust each valve block A when changing the specifications, it is possible to change the specifications very easily and easily.

Therefore, in this embodiment, all the problems associated with the specification change mentioned in the conventional example can be solved. That is, in this embodiment, the specification can be changed in a short time, and it takes almost no trouble. Further, since only the sealing plug 32 and the sealing ball 37 are replaced when changing the specifications,
Since there is no cost and there is no need to secure a storage place for replacement parts, the risk of installation can be eliminated.

The present invention is not limited to the above embodiment, but may be implemented as follows, for example. 1) A check valve similar to the check valve 38 is arranged between the air supply passage 33 and the pilot pressure exhaust passage 34 to prevent backflow from the pilot pressure air supply passage 34 to the air supply passage 33.

2) The air supply / exhaust block B is connected to both ends of each connected valve block A. In this case, particularly when a large number of valve blocks A are connected, it is possible to more reliably control the air supply and exhaust.

3) The sealing ball 37 is replaced with another sealing means such as a shutter which can be operated from outside the air supply / exhaust block B. In this case, the specification can be changed more easily.

4) Separate the supply / exhaust block B for each specification, that is, the internal pilot specification and the external pilot specification.

[0049]

As described in detail above, according to the present invention, even when a plurality of pilot type solenoid valve manifolds are connected and used, the specification change from the internal pilot type to the external pilot type can be easily and easily performed. It has the excellent effect of being able to.

[Brief description of drawings]

FIG. 1 is a perspective view showing a usage state of a pilot type solenoid valve manifold of an embodiment embodying the present invention.

FIG. 2 is a perspective view showing a state in which a valve block A, an air supply / exhaust block B, and an end block C of one embodiment are separated.

FIG. 3 is a sectional view of a valve block A.

FIG. 4 is a partial perspective view of a valve block A.

5 is a cross-sectional view of a supply / exhaust block B. FIG.

[Explanation of symbols]

1 main valve switching part, 2 connection base part, 3 piping base part, 7 spool, 12a, 12b pilot pressure passage, 15 exhaust passage, 16 cylinder port, 18
Air supply passage, 33 Air supply passage as an air supply passage, 34 Exhaust passage as an exhaust air passage, 32 Sealing plug forming a switching pipe passage, 35 Pilot pressure air supply passage forming a switching pipe passage, 36 Switching pipe Pilot pressure exhaust passages 36, 37 forming a passage Sealing balls forming a switching pipe passage

Claims (2)

[Claims] 1. A main valve switching unit in which a spool for switching a flow path based on pilot pressure is movably accommodated,
An air supply passage and a plurality of cylinder ports are provided, and a piping base portion that connects the air supply passage and the plurality of cylinder ports to the spool of the main valve switching portion, a pilot pressure passage, and an exhaust passage are provided. And a valve block having a connection base portion that connects the pilot pressure passage and the exhaust passage to the spool of the main valve switching portion, and the valve block is connected to the valve block and externally supplied air is supplied to the valve block. An internal pilot specification that has an air supply line communicating with the passage and an exhaust line that discharges exhaust gas from the exhaust passage of the valve block to the outside, and supplies a part of the air supply from the outside as pilot pressure to each valve block. And a supply / exhaust block provided with a switching pipeline for switching between external pilot specifications for supplying pilot pressure from the outside to each valve block. A solenoid valve manifold characterized in that 2. The solenoid valve manifold according to claim 1, wherein a plurality of the valve blocks are connected to each other, and each air supply passage and each exhaust passage between the connected valve blocks are communicated with each other. Manifold.