JP3586404B2 - Work carrier device for double-sided surface grinder - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides a double-sided surface grinder having a pair of grinding wheels opposed to each other with an interval in the direction of the rotation axis, a carrier disk rotating around an axis parallel to the rotation axis of the grinding wheel, The present invention relates to a work carrier device of a double-sided surface grinding machine for sequentially supplying a work held on a disk between grinding wheels by rotating a carrier disk.
[0002]
[Prior art]
As shown in FIG. 4, this type of work carrier device has work accommodation holes 2 penetrating in the axial direction at a plurality of positions on the same circumference of a carrier disk 1. W is housed in a protruding shape in both the axial directions, and is passed between a pair of grinding wheels 3 and 4 facing each other as the carrier disk 1 rotates. Surface grinding is performed simultaneously with grinding wheels 3 and 4.
[0003]
By the way, in the above-mentioned work carrier device, since the carrier disk 1 thinner than the thickness of the work W is required, when the work W becomes an ultra-thin object such as a basic material of an electronic component, the rigidity of the carrier disk 1 is reduced. Insufficiency causes a waving phenomenon in the carrier disk 1. When the carrier disk 1 undulates in this way, as shown in FIG. 5, the workpiece W being transported falls under the carrier disk 1, and smooth workpiece transport becomes impossible.
[0004]
Conventionally, as a measure for solving such a problem, as shown in FIG. 6, the carrier disk 1 is pressed against the guide plate 6 by a plurality of pressing rollers 5 from above with a spring or the like, or as shown in FIG. A large number of small-diameter suction holes 7 connected to a suction device (not shown) are provided in 6, and the carrier disk 1 is sucked by the suction action of the small-diameter suction holes 7.
[0005]
[Problems to be solved by the invention]
However, in the roller pressing method shown in FIG. 6, since the carrier disk 1 is partially pressed by the pressing roller 5, the carrier disk 1 is lifted up at a position where the carrier disk 1 is not pressed by the pressing roller 5, and the workpiece W being conveyed is not moved. The phenomenon of getting under the carrier disk 1 occurs, and the above problem has not been sufficiently solved.
[0006]
Next, in the suction method shown in FIG. 7, since the small-diameter suction holes 7 for sucking the carrier disk 1 are formed at a certain interval in the guide plate 6, the small-diameter suction holes 7 are formed in the carrier disk 1. The suction and non-suction are repeatedly performed on the circumference of the carrier disk 1 in the rotation direction. Therefore, as shown in FIG. 8, the carrier disk 1 is lifted between the small-diameter suction holes 7 and the work W being conveyed falls under the carrier disk 1. The problem has not been fully solved.
[0007]
In addition, in the suction method shown in FIG. 7, since the work W accommodated in the work accommodation hole 2 of the carrier disk 1 is also sucked, dust and burrs attached to the work W are sucked, and the small-diameter suction hole 7 becomes It may be clogged by dust or burrs attached to W.
[0008]
In the suction method shown in FIG. 7, when the small-diameter suction hole 7 overlaps the work accommodation hole 2 of the carrier disk 1 and the inner diameter hole of the work W accommodated therein as shown in FIG. Is exposed and the grinding fluid (for grinding the work W with the grinding wheels 3 and 4 to remove the grinding heat and grinding debris and perform the grinding efficiently. The grinding is performed by a pump from a separately provided grinding fluid tank. Since it is supplied to the grinding portions of the grindstones 3 and 4 and then exposed to the grinding fluid tank, the sludge in the grinding fluid (the grinding fluid returned to the grinding fluid tank removes grinding chips and dropped grinding wheels 3 and 4). After filtering so-called sludge such as powder of No. 4 with a filter or the like, the sludge is supplied again to the grinding portions of the grinding wheels 3 and 4, but fine sludge that has not been filtered still remains.) Suction into the suction device through hole 7 Or damage the location, also sometimes small suction hole 7 is clogged. Incidentally, if the small-diameter suction hole 7 is clogged, the suction force is reduced and the carrier disk 1 is lifted up, which causes a problem that the work W gets under the carrier disk 1. Therefore, when the small-diameter suction holes 7 are clogged, the small-diameter suction holes 7 must be cleaned. However, since a large number of small-diameter suction holes 7 are formed, cleaning is extremely difficult and requires a lot of time.
[0009]
Further, in the suction method shown in FIG. 7, since the guide plate 6 is always in contact with the work W, the orbital surface of the work W may be worn and may sink below the carrier disk 1. Therefore, when there is a danger that the raceway surface of the work W will wear and dive below the carrier disk 1, the guide plate 6 needs to be replaced. The guide plate 6 is for guiding the work W between the two grinding wheels 3 and 4 in a stable manner as the name implies, and is an important part that greatly affects the machining accuracy. is necessary. Incidentally, since the double-sided surface grinder is operated for 20 to 25 years, the maintenance cost is a big problem for the user. Therefore, the guide plate 6 must be provided to the user at the lowest possible cost. However, since a large number of small-diameter suction holes 7 are formed in the guide plate 6, the structure is complicated to connect the large number of small-diameter suction holes 7 to the suction device at the same time. Therefore, the cost becomes extremely high, which is a big problem for the user.
[0010]
The present invention has been made in view of the above-described circumstances, and continuously sucks the inner and outer peripheral portions of a carrier disk in the rotation circumferential direction of the carrier disk, so that the carrier disk of the workpiece being conveyed. It is an object of the present invention to provide a work carrier device of a double-sided surface grinding machine capable of more reliably preventing the undercut of the work piece from slipping underneath.
[0011]
[Means for Solving the Problems]
The present invention provides a carrier disk (11) that rotates about an axis parallel to a rotation axis of a pair of grinding wheels (13) and (14) of a double-sided surface grinder, in order to achieve the above object. An inlet-side guide plate (16) arranged below a portion of the plate (11) located on the inlet side of the grinding wheels (13) and (14), and a grinding wheel (13) of the carrier disk (11) The workpiece (W) held on the carrier disk (11) is provided with an exit-side guide plate (17) arranged below the portion located on the exit side to (14), and the carrier disk (11) is rotated. The workpiece (W) ground by the grinding wheels (13) and (14) is supplied while being sequentially fed between the grinding wheels (13) and (14) by being conveyed on the inlet side guide plate (16). In the work carrier device of the double-sided surface grinding machine, which is conveyed on the exit side guide plate (17) with the rotation of the carrier disk (11) and discharged from the discharge chute when passing the end of the exit side guide plate (17). , Thereby disposed along the inner circumference of the mouth-side guide plate (16) and the outlet-side guide plate (17), provided between each other at the end of the inlet-side guide plate beginning and an outlet-side guide plate (16) (17) small arcuate carrier disc suction member (19), in (19), a small arc-shaped carrier disc suction member (19), suction grooves in an arc over the circumferential direction of the length of (19) ( 21) and (21), and the inner peripheral portion of the carrier disk (11) is formed by suction grooves (21) and (21) provided in the small circular arc-shaped carrier disk suction members (19) and (19). Of the pair of grinding wheels (13) of the double-sided surface grinding machine, (13), substantially the entire portion located outside the (14) is continuously sucked in the rotating circumferential direction of the carrier disk (11) , and inlet-side guide plate (16) and the outlet-side guide plate large arc-shaped carrier disc suction member which is disposed along the outer periphery (17) (20), (20), the large arc-shaped carrier disc suction member (20), (20) , the suction grooves (22), (2) in an arc shape over the entire length in the circumferential direction 2) , the outer peripheral portion of the carrier disk (11) is moved by the suction grooves (22), (22) provided in the large circular carrier disk suction members (20), (20). The suction is continuously performed in the circumferential direction of (11).
[0012]
Further, the guide plate is divided into a plurality of parts in the circumferential direction of rotation of the carrier disk as required.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a preferred embodiment of the present invention will be described with reference to FIGS.
[0014]
FIG. 1 is a plan view of a work carrier apparatus for a double-sided surface grinding machine according to the present invention (a carrier disk is shown by imaginary lines), and FIGS. 2 and 3 are lines AA and BB in FIG. FIG.
[0015]
1 to 3, reference numeral 11 denotes a thin plate-shaped horizontal carrier disk, which is concentrically supported on a carrier disk support table 12 rotatable in a horizontal plane, in the work transfer direction (the direction of the imaginary arrow). Rotate. The carrier disk 11 is arranged so that the outer peripheral portion passes between a pair of upper and lower grinding wheels 13 and 14 shown by imaginary lines, and a workpiece accommodation hole penetrating in an axial direction at a plurality of locations on the same circumference of the outer peripheral portion. 15 Reference numeral 16 denotes an inlet-side guide plate disposed below a portion of the carrier disk 11 located on the entrance side of the grinding wheels 13 and 14, and 17 denotes a portion of the carrier disk 11 located on the outlet side of the grinding wheels 13 and 14. The work W accommodated in the work accommodation hole 15 of the carrier disk 11 is supported by the exit-side guide plate arranged below so as not to fall off. The inlet-side guide plate 16 and the outlet-side guide plate 17 are divided into a plurality (for example, 2 to 4) in the circumferential direction of rotation of the carrier disk 11 and fixed to a guide plate support 18 which is a stationary member with bolts or the like. . Reference numerals 19 and 19 denote small arc-shaped carrier disk suction members disposed along the inner circumferences of the entrance side guide plate 16 and the exit side guide plate 17, and 20 and 20 denote the entrance side guide plate 16 and the exit side guide plate 17 respectively. Is fixed to the guide plate support 18 with bolts or the like by a large circular arc-shaped carrier disk suction member disposed along the outer circumference of the carrier. Suction grooves 21 and 22 are formed in the carrier disk suction members 19 and 20 in an arc shape over the entire length in the circumferential direction and open on the upper surface, and the suction grooves 21 and 22 are formed in the suction pockets 23 and 24 and the guide plate. It is connected to a suction device 29 via suction holes 25 and 26 formed in the support base 18 and suction port members 27 and 28 attached to the guide plate support base 18.
[0016]
Next, the operation of the present embodiment will be described. First, the grinding wheels 13 and 14 are driven to rotate, and the carrier disk 11 is driven to rotate in the direction of the arrow. Further, the suction device 29 is driven to apply a suction force to the arc-shaped suction grooves 21 and 20 of the carrier disk suction members 19 and 20, and the inner and outer peripheral portions of the carrier disk 11 are moved to the carrier disk suction members 19 and 20. Suction. Therefore, the carrier disk 11 rotates while being sucked by the carrier disk suction members 19 and 20. Next, the workpiece W is sequentially supplied to the workpiece accommodating hole 15 of the rotating carrier disk 11 by a loading device (not shown), and the workpiece W is moved along the rotation of the carrier disk 11 by an arrow on the entrance side guide plate 16. And supplied between the grinding wheels 13 and 14. Thereby, both surfaces of the work W are ground simultaneously by the grinding wheels 13 and 14 while passing between the grinding wheels 13 and 14. Thereafter, the ground work W is conveyed on the outlet side guide plate 17 with the rotation of the carrier disk 11 and drops from the work accommodating hole 15 of the carrier disk 11 when passing through the end of the outlet side guide plate 18. And discharged by a discharge chute (not shown).
[0017]
According to this embodiment, the suction grooves are formed in an arc shape over the entire length in the circumferential direction of the carrier disk suction members 19 and 20 arranged along the inner and outer circumferences of the inlet side guide plate 16 and the outlet side guide plate 17. Since the carrier 21 and 22 are formed, the inner peripheral portion and the outer peripheral portion of the carrier disk 11 can be continuously sucked in the rotation circumferential direction of the carrier disk 11. Accordingly, the carrier disk 11 is always kept in a flat state without waving, and the work W being conveyed does not fall below the carrier disk 11.
[0018]
Further, according to the present embodiment, the arc-shaped suction grooves 21 and 22 formed in the carrier disk suction members 19 and 20 disposed along the inner and outer circumferences of the entrance side guide plate 16 and the exit side guide plate 17, respectively. Since the carrier disk 11 is sucked, the work W accommodated in the work accommodation hole 15 of the carrier disk 11 is not sucked. Accordingly, the dust and burrs attached to the work W are not sucked, so that the arc-shaped suction grooves 21 and 22 are not clogged with the dust and burrs attached to the work W. Moreover, since the arc-shaped suction grooves 21 and 22 are always covered with the carrier disk 11 and are not exposed, the arc-shaped suction grooves 21 and 22 are not exposed to the grinding fluid. Accordingly, sludge in the grinding fluid does not enter the suction device 29 from the arc-shaped suction grooves 21 and 22 to damage the suction device 29, and the arc-shaped suction grooves 21 and 22 are not clogged. Even if the arc-shaped suction grooves 21 and 22 are clogged, cleaning is easier than cleaning a large number of small-diameter suction holes.
[0019]
According to this embodiment, the suction grooves 21 and 22 for sucking the carrier disk 11 are provided along the inner and outer peripheries of the entrance-side guide plate 16 and the exit-side guide plate 17, respectively. Therefore, it is not necessary to form a suction groove or a suction hole in the inlet-side guide plate 16 and the outlet-side guide plate 17, and the inlet-side guide plate 16 and the outlet-side guide plate 17 have a simple structure and a reduced number of processes. It can be reduced and manufactured at low cost.
[0020]
Further, according to the present embodiment, since the entrance side guide plate 16 and the exit side guide plate 17 are divided into a plurality in the circumferential direction of rotation of the carrier disk 11, the entrance side guide plate 16 and the exit side guide plate 17 are required. It is possible to replace only the parts. That is, the entrance side guide plate 16 and the exit side guide plate 17 tend to wear particularly near the entrance where the work W is carried in between the grinding wheels 13 and 14 and near the exit where the work W is carried out between the grinding wheels 13 and 14. When the work W is carried in between the grinding wheels 13 and 14, and when the work W is carried out between the grinding wheels 13 and 14, the work W is subjected to the rotational force of the grinding wheels 13 and 14 so that the work W is guided by the entrance side guide. This is because it is vigorously rotated near the entrance of the plate 16 and near the exit of the exit-side guide plate 17. Therefore, since the inlet-side guide plate 16 and the outlet-side guide plate 17 are divided into a plurality in the circumferential direction of rotation of the carrier disk 11, it is not necessary to replace the entirety of the inlet-side guide plate 16 and the outlet-side guide plate 17. Only the places where the wear is severe (the vicinity of the entrance of the entrance side guide plate 16 and the vicinity of the exit of the exit side guide plate 17) need only be replaced, and the cost can be further reduced. Therefore, since the inlet side guide plate 16 and the outlet side guide plate 17 which need to be periodically replaced as consumable parts can be provided to the user at the lowest possible cost, maintenance cost, which is a major problem for the user, can be reduced. I can do it.
[0021]
According to the above embodiment, the entrance side guide plate 16 and the exit side guide plate 17 are divided into a plurality in the circumferential direction of rotation of the carrier disk 11, but the entrance side guide plate 16 and the exit side guide plate 17 are required. It is not necessary to divide the carrier disk 11 into a plurality in the circumferential direction of rotation.
[0022]
【The invention's effect】
As described above, according to the present invention, the suction groove is formed in an arc over the circumferential length of the guide plate carrier disc suction member disposed on the inner periphery of the arc-shaped suction Since the inner and outer peripheral portions of the carrier disk are continuously sucked in the circumferential direction of rotation of the carrier disk by the grooves, the workpiece being transported while the carrier disk is always kept in a flat state can be used as the carrier disk. There is no dive below. In addition, since the arc-shaped suction groove for sucking the carrier disk is formed in the carrier disk suction member disposed along the inner and outer circumferences of the guide plate, it is not necessary to form a suction passage in the guide plate, and the guide plate is not required. The structure can be simplified and the number of processes can be reduced, so that the guide plate can be manufactured at low cost. In addition, since the guide plate is divided into a plurality in the circumferential direction of rotation of the carrier disk, it is possible to replace the guide plate only at a necessary portion, and it is possible to further reduce the cost. Therefore, a guide plate that needs to be periodically replaced as a consumable part can be provided to the user at the lowest possible cost, and maintenance cost, which is a major problem for the user, can be reduced.
[Brief description of the drawings]
FIG. 1 is a plan view of a work carrier device of a double-sided surface grinding machine according to the present invention (a carrier disk is shown by imaginary lines).
FIG. 2 is an enlarged longitudinal sectional view taken along line AA of FIG.
FIG. 3 is an enlarged vertical sectional view taken along line BB of FIG. 1;
FIGS. 4A and 4B are drawings showing a conventional work carrier device, wherein FIG. 4A is a plan view and FIG.
FIG. 5 is an explanatory view showing a waving phenomenon of a carrier disk.
FIGS. 6A and 6B are drawings showing a roller holding type work carrier device, wherein FIG. 6A is a plan view and FIG.
FIG. 7 is a plan view showing a suction type work carrier device.
FIG. 8 is an explanatory view showing a waving phenomenon of a carrier disk in a suction type work carrier device.
FIG. 9 is an explanatory view showing a state in which a small-diameter suction hole, a work accommodation hole of a carrier disk, and an inner diameter hole of a work accommodated therein overlap in a suction type work carrier device.
[Explanation of symbols]
W Work 11 Carrier disc 13 Grinding grindstone 14 Grinding grindstone 15 Work accommodation hole 16 Inlet side guide plate 17 Outlet side guide plate 18 Guide plate support base 19 Carrier disk suction member 20 Carrier disk suction member 21 Suction groove 22 Suction groove 29 Suction device

Claims (1)

A carrier disk (11) that rotates around an axis parallel to the rotation axis of a pair of grinding wheels (13), (14) of a double-sided surface grinding machine, and a grinding wheel (13) of the carrier disk (11), (14) an inlet side guide plate (16) disposed below the portion located on the inlet side, and a portion of the carrier disk (11) located on the outlet side to the grinding wheels (13) and (14). A work (W) held on the carrier disk (11) with the outlet-side guide plate (17) arranged below, and the work (W) held on the carrier disk (11) is placed on the inlet-side guide plate (16) with the rotation of the carrier disk (11). The workpiece (W) ground by the grinding wheels (13) and (14) is supplied along with the rotation of the carrier disc (11), while being sequentially supplied between the grinding wheels (13) and (14) by transporting the workpiece. In a work carrier device of a double-sided surface grinding machine that conveys on the exit side guide plate (17) and discharges from the discharge chute when passing through the end of the exit side guide plate (17), the entrance side guide plate (16) and the exit side guide Thereby disposed along the inner periphery (17), the inlet-side guide plate beginning and an outlet-side guide plate (17) a small arc-shaped carrier disc suction member provided therebetween the end of the (16) (19 ), (19), suction grooves (21), (21) are formed in an arc shape over the entire circumferential length of the small circular carrier disk suction member (19), (19) , and a small circle is formed. By the suction grooves (21), (21) provided in the arc-shaped carrier disk suction members (19), (19) , a pair of grinding wheels of a double-sided surface grinding machine in the inner peripheral portion of the carrier disk (11). (13), substantially the entire portion located outside of (14) is continuously sucked in the rotating circumferential direction of the carrier disk (11) , and the inlet-side guide plate (16) and the outlet-side guide plate The large circular carrier disk suction members (20) and (20) arranged along the outer circumference of (17) are attached to the large circular carrier disk suction members (20) and (20) in the circumferential direction. arcuate suction groove over the entire length (22), to form a (22), the large arc-shaped carrier disc引部member (20), (20) the suction groove provided in (22), by (22), continuously withdrawing the rotational circumferential direction of the carrier disc to the outer periphery of the carrier disc (11) (11) A work carrier device for a double-sided surface grinder.

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