JP3580786B2 - Pressure calibration device - Google Patents

Pressure calibration device Download PDF

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JP3580786B2
JP3580786B2 JP2001241782A JP2001241782A JP3580786B2 JP 3580786 B2 JP3580786 B2 JP 3580786B2 JP 2001241782 A JP2001241782 A JP 2001241782A JP 2001241782 A JP2001241782 A JP 2001241782A JP 3580786 B2 JP3580786 B2 JP 3580786B2
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pressure
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JP2003057141A (en
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顕次 田中
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西川計測株式会社
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Description

【０００１】
【発明の属する技術分野】
本発明は、圧力スイッチなどの被測定物が設定圧力で正常に動作するかどうかを試験するときに、圧力源の圧力を速やかに所定の圧力に調整して供給するための圧力校正装置に関するものである。
【０００２】
【従来の技術】
圧力スイッチや圧力トランスミッターなど、圧力によって動作する装置を開発する場合、実際の試験を行って、設計通りに動作するかどうかをチェックする必要がある。
また、製品の経時変化による劣化部位の発見や、状態チェック等でも圧力による試験は実施される。
【０００３】
このような場合に圧力源を精度よく、かつ、速やかに調整して供給するため、圧力校正装置が用いられる。
図３は、従来の圧力校正装置である。高圧の圧力源として、例えばＮ２ボンベ１は、減圧弁２０から配管２５によりコネクタ２１、２２を介して、被測定物２６に接続される。また、前記コネクタ２１の他方側にガスを逃がしてガス圧を微調整するためのミニチュアバルブ２３が接続され、さらに、前記コネクタ２２の他方側に圧力を表示するデジタルマノメータ２４が接続されている。
このような構成において、圧力を低圧から目標値まで上昇させる場合、先ず、目標とする圧力値付近になるようにデジタルマノメータ２４の表示を見ながらＮ２ボンベ１の減圧弁２０を徐々に開いて、目標値に達したら減圧弁２０をそのまま固定する。減圧弁２０は、圧力調整幅が非常に大きいため、１回で目標値に調整されることがなく、通常は、目標値をオーバーする。目標値を少しでも超えたらミニチュアバルブ２３を開いてガスを逃がし、減圧する。ミニチュアバルブ２３も圧力調整幅が大きいため、このミニチュアバルブ２３を開くと、若干圧力が下がりすぎる。圧力が目標値より下がりすぎると、減圧弁２０をわずかに開いて加圧する。以下同様にして、図４に示すように１０〜２０回これを繰り返して、目標とする圧力値を得る。また、圧力を高圧から目標値まで降下させる場合も同様である。
【０００４】
このように、従来の圧力校正装置では、減圧弁２０とミニチュアバルブ２３のどちらも、調整の変化幅が非常に大きいため、目標の圧力を得るのに圧力の上昇と下降を繰り返す必要があった。一旦調整が終われば安定するので、調整に手間取ったとしても一定の圧力値を得るだけで良い試験ではあまり問題ないが、圧力値を段階的に変化させるような試験のための圧力調整では、その都度調整が面倒であるという問題が生じてしまう。
図４は、従来の圧力校正装置において圧力を段階的に変化させようとしたときの圧力の変化を表したグラフで、３．０ＭＰａを１００％として、１００％、７５％、５０％、２５％、０％の順に、圧力を下げる方向に段階的に調整するときと、０％になったら、逆に、０％、２５％、５０％、７５％、１００％の順に、圧力を上げる方向に段階的に調整するときの過程を示している。
このように、従来の圧力校正装置による方法では、圧力を所定値に調整するまでに、その都度どうしても１０〜２０回の圧力値の上下動をしてしまい、一定値を保つまでに時間と熟練が必要であった。また、グラフに示すように、大きく上下してしまうと、この範囲内に動作点を持つような測定物を試験しても、測定物の品質の評価をすることが出来ないという問題点があった。さらに、圧力の急激な上下は、圧力を計測する計測器自体を破壊するおそれがあった。
【０００５】
【発明が解決しようとする課題】
本発明は、上記問題点に鑑みなされたもので、圧力の調整を上下動なく、速やかに、正確に調整でき、かつ、圧力源の消費量の少ない圧力校正装置を得ることを目的とするものである。
【０００６】
【課題を解決するための手段】
本発明は、圧力源の圧力を所定の圧力に調整して被測定物２６に供給するための圧力校正装置において、前記圧力源に、この圧力源の圧力を減圧するための圧力コントロール弁４を接続し、この圧力コントロール弁４と被測定物２６のコネクタ１６との間に、切換手段を介して、急速圧力調整部２７と微速圧力調整部２８を分岐して接続するようにしたものである。
【０００７】
これによって、急速圧力調整部２７で大まかな調整をして、微速圧力調整部２８で微量な調整をすることで、目的とする圧力値を簡単に得ることが出来、さらに調整する際に加圧と減圧を繰り返す必要がなく、圧力源の消費量を節約することが出来る。
【０００８】
【発明の実施の形態】
本発明の実施の形態について、図１、図２を用いて説明する。
図１において、１は、圧力源としての高圧のＮ２ガスを封入したＮ２ボンベで、このＮ２ボンベ１は、減圧弁２０を介してコネクタ２に接続され、このコネクタ２から三方弁３の入力側に接続される。この三方弁３の出力側の一方には、配管２５が接続され、他方は排気に開放されている。前記配管２５の他端には、圧力コントロール弁４が接続され、さらに配管２５を介して三方弁５の入力側に接続されている。前記圧力コントロール弁４は、Ｎ２ボンベ１から供給された一次圧を、試験に用いる圧力に近い大まかな二次圧に減圧するためのもので、入力側に一次圧指示計１７が、出力側に二次圧指示計１８が接続されている。さらに安全弁としても作用する。前記三方弁５の２つの出力側には、それぞれ急速圧力調整部２７と微速圧力調整部２８とが分岐して切替え自在に接続されている。
【０００９】
前記急速圧力調整部２７は、二次圧調整リザーブタンク６、三方弁７、三方コネクタ８が順番に接続された後、四方コネクタ１３の一方の入力側に接続されるとともに、前記三方コネクタ８の分岐路に急速減圧調整弁９と急速逃がし弁１０が接続されて構成されている。前記二次圧調整リザーブタンク６は、ガスを一定量貯蔵し、圧力を急激に高めるためのものである。前記三方弁７の他方の出力側は、排気になっている。前記急速減圧調整弁９は、ニードルの角度が３度程度で、ある程度大きな圧力の減圧調整用である。
【００１０】
前記微速圧力調整部２８は、微速加圧調整弁１１、三方コネクタ１２を介して、前記四方コネクタ１３の他方の入力側に接続されるとともに、前記四方コネクタ１３の一方の出力側には、微速減圧調整弁１４と微速逃がし弁１５が接続され、さらに前記三方コネクタ１２には、測定圧を表示する測定圧指示計１９が接続されて構成されている。前記微速加圧調整弁１１と微速減圧調整弁１４は、ニードルの角度が１度程度の微調整用であり、０．００１ＭＰａ単位で変化させることができ、また、変化スピードは０．００１ＭＰａ／５ｓｅｃと勾配速度も緩やかに制御することが出来る。前記四方コネクタ１３の他方の出力側には、コネクタ１６を介して被測定物２６が接続される。
【００１１】
次に、本発明における圧力校正装置の作用を説明する。ここで、図２のように圧力を変化させるときの調整手順に即して、作用を説明する。
【００１２】
１．図２の１００％（３．０ＭＰａ）に安定させる手順
（１）三方弁３を止めた状態で、コネクタ２にＮ２ボンベ１を接続し、ボンベ圧を印加する。
（２）三方弁５を止め、三方弁３を圧力コントロール弁４側に切替えて一次圧ＯＮにし、圧力コントロール弁４に加圧する。一次圧は一次圧指示計１７に表示され、このとき、圧力コントロール弁４が全開ならば、二次圧指示計１８も同じ値となっている。
（３）二次圧指示計１８を見ながら、圧力コントロールバルブ４によって、二次圧を測定に用いる圧力値の１０５％〜１１０％に調整する。ここで５％〜１０％大きく設定する理由は、被測定物の容量によって圧力が若干減少する恐れがあるためで、３．０ＭＰａを測定で使用するならば、ここでは３．１５ＭＰａ〜３．３ＭＰａに設定しておくことで、３．０ＭＰａを常に保つことが出来る。
（４）三方弁５を急速圧力調整部２７側に切替えて、二次圧調整用リザーブタンク６に、測定圧の約９０％（２．７ＭＰａ）まで圧力を急速に印加する。このとき、三方弁７は、三方コネクタ８側に切替えられ、急速減圧調整弁９は閉じている。これで大まかな調整を終了する。
（５）次に、三方弁５を微速圧力調整部２８側に切替えて、微速加圧調整弁１１により微速加圧し、測定圧指示計１９を見ながら、急速圧力調整部２７側を含めた三方弁５以降の回路内を１００％（３．０ＭＰａ）に安定させる。もし、圧力が上がりすぎたら、微速減圧調整弁１４で微速逃がし弁１５から排気し、減圧調整する。１００％に安定したら、三方弁５を止める。
（６）安定した状態で、コネクタ１６を介して被測定物２６に１００％（３．０ＭＰａ）を加圧する。
【００１３】
２．図２の１００％から７５％、５０％、２５％、０％に段階的に減圧する手順
（１）三方弁５は、閉じた状態にある。
（２）急速減圧調整弁９を開いて、急速逃がし弁１０からガスを逃がして、１００％の圧力（図２のａ点）を、７５％よりやや高い圧力（図２のｂ点）まで急速に減圧する。減圧後、急速逃がし弁１０を閉じる。
（３）微速減圧調整弁１４を開いて、測定圧指示計１９を見ながら、微速逃がし弁１５で微速排気して、図２のｂ点から徐々に７５％に安定させ、微速逃がし弁１５を閉じる（図２のｃ点）。
（４）ｃ点で安定した状態で、コネクタ１６を介して被測定物２６に７５％（２．２５ＭＰａ）を加圧する。
（５）７５％から５０％に減圧する場合には、図２のｄ点からｅ点までを急速減圧調整弁９で急速減圧し、ｅ点からｆ点までを微速減圧調整弁１４で微速減圧して、５０％に安定させる。
（６）５０％から２５％に減圧する場合には、図２のｇ点からｈ点までを急速減圧調整弁９で急速減圧し、ｈ点からｉ点までを微速減圧調整弁１４で微速減圧して、２５％に安定させる。
（７）２５％から０％に減圧するには、三方弁７を開いて排気にしてやれば、０％になる。
【００１４】
３．図２の０％から２５％、５０％、７５％、１００％に段階的に加圧する手順
（１）三方弁５を閉じた状態で、二次圧指示計１８を見ながら圧力コントロール弁４を調整して、二次圧を２５％よりやや大きい値に調整する。
（２）三方弁５を急速圧力調整部２７側に切替えて、測定圧指示計１９を見ながら、２４％程度（図２のｍ点）まで加圧する。このとき、三方弁７は三方コネクタ８側に接続され、急速減圧調整部９は閉じ、微速減圧調整部１４は閉じている状態にある。
（３）三方弁５を微速圧力調整部２８側に切替えて、測定圧指示計１９を見ながら、微速加圧調整弁１１によって２５％（図２のｎ点）に安定させ、三方弁５を閉じる。
（４）ｎ点で安定した状態で、コネクタ１６を介して被測定物２６に２５％（０．７５ＭＰａ）を加圧する。
（５）２５％から５０％に加圧する場合は、三方弁５を閉じた状態で、二次圧を５０％よりやや大きい値に調整し、三方弁５を急速圧力調整部２７側に切替えて、図２のｏ点からｐ点まで加圧し、次に、三方弁５を微速圧力調整部２８側に切替えて、微速加圧調整弁１１によって、図２のｐ点からｑ点まで加圧し、５０％に安定させる。
（６）５０％から７５％に加圧する場合は、三方弁５を閉じた状態で、二次圧を７５％よりやや大きい値に調整し、三方弁５を急速圧力調整部２７側に切替えて、図２のｒ点からｓ点まで加圧し、次に、三方弁５を微速圧力調整部２８側に切替えて、微速加圧調整弁１１によって、図２のｓ点からｔ点まで加圧し、７５％に安定させる。
（７）７５％から１００％に加圧する場合は、三方弁５を閉じた状態で、二次圧を１００％よりやや大きい値に調整し、三方弁５を急速圧力調整部２７側に切替えて、図２のｕ点からｖ点まで加圧し、次に、三方弁５を微速圧力調整部２８側に切替えて、微速加圧調整弁１１によって、図２のｖ点からｗ点まで加圧し、１００％に安定させる。
【００１５】
４．特性試験終了後の手順
（１）三方弁３を閉じ、かつ、三方弁５を閉じる。この状態で三方弁７を排気にして、急速圧力調整部２７と微速圧力調整部２８の内部を全て放散する。
（２）Ｎ２ボンベ１をコネクタ２から切り離す。三方弁３を排気にして、三方弁３から三方弁５までの内部を全て放散する。
【００１６】
前記実施例では、圧力源としてＮ２ガスボンベを用いたが、これに限られるものではなく、無害なガスであればＮ２ガスでなくともよい。また、被測定物２６の試験の種類、目的によっては、ガスではなく、液体の圧力源であってもよい。
【００１７】
【発明の効果】
請求項１記載の発明によれば、圧力源に、この圧力源の圧力を減圧するための圧力コントロール弁４を接続し、この圧力コントロール弁４と被測定物２６のコネクタ１６との間に、切換手段を介して、急速圧力調整部２７と微速圧力調整部２８を分岐して接続したので、急速圧力調整部２７で大まかな調整をして、微速圧力調整部２８で微量な調整をすることで、目的とする圧力値を簡単に得ることが出来、さらに調整する際に加圧と減圧を繰り返す必要がなく、圧力源の消費量を節約することが出来る。
ちなみに、図２からも分かるように、圧力値が急激に上下している場所はなく、寧ろ、殆ど上下していないと言える。このように、簡単に目的とする圧力値の調整が出来、また、仮に調整の段階で目的とする圧力値を超えてしまっても、微速減圧調整弁１４と微速加圧調整弁１１を用いて再度調整することが出来るので、わずかな調整ミスがあっても簡単に目的の圧力値に戻すことが出来る。
【００１８】
請求項２記載の発明によれば、急速圧力調整部２７は、二次圧調整リザーブタンク６と、急速減圧調整弁９を具備し、微速圧力調整部２８は、微速加圧調整弁１１と、微速減圧調整弁１４とを具備したので、加圧と減圧のどちらの圧力調整においても、急速加圧と微速加圧を切替えて使用出来、調整が簡単に行える。
【００１９】
請求項３記載の発明によれば、圧力コントロール弁４の入力側に一次圧指示計１７を接続し、出力側に二次圧指示計１８を接続したので、圧力コントロール弁４で容易に二次圧を調整することが出来、また、常に一次圧と二次圧を把握しながら測定が行え、安全性が高まる。
【００２０】
請求項４記載の発明によれば、微速加圧調整弁１１の後段に測定圧指示計１９を接続したので、測定圧の調節を容易に行え、また、測定圧のわずかな変化も把握することが出来る。
【００２１】
請求項５記載の発明によれば、急速減圧調整弁９、微速加圧調整弁１１、微速減圧調整弁１４は、ニードル弁からなり、急速減圧調整弁９は、単位時間当たりの圧力調整量が、微速加圧調整弁１１、微速減圧調整弁１４よりも大きいものからなるようにしたので、圧力を変化させる場合に、その変化の勾配も任意に調節することが出来る。
【図面の簡単な説明】
【図１】本発明の圧力校正装置を示したガス圧回路図である。
【図２】本発明における圧力校正装置を用いて圧力値を段階的に変化させた場合のグラフを示した特性図である。
【図３】従来の圧力校正装置を示したガス圧回路図である。
【図４】従来の圧力校正装置を用いて、圧力値を段階的に変化させた場合のグラフを示した特性図である。
【符号の説明】
１…Ｎ２ボンベ、２…コネクタ、３…三方弁、４…圧力コントロール弁、５…三方弁、６…二次圧調整リザーブタンク、７…三方弁、８…三方コネクタ、９…急速減圧調整弁、１０…急速逃がし弁、１１…微速加圧調整弁、１２…三方コネクタ、１３…四方コネクタ、１４…微速減圧調整弁、１５…微速逃がし弁、１６…コネクタ、１７…一次圧指示計、１８…二次圧指示計、１９…測定圧指示計、２０…減圧弁、２１…コネクタ、２２…コネクタ、２３…ミニチュアバルブ、２４…デジタルマノメータ、２５…配管、２６…被測定物、２７…急速圧力調整部、２８…微速圧力調整部。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a pressure calibration device for quickly adjusting and supplying a pressure of a pressure source to a predetermined pressure when testing whether a device under test such as a pressure switch operates normally at a set pressure. It is.
[0002]
[Prior art]
When developing pressure-operated devices, such as pressure switches and pressure transmitters, it is necessary to perform actual tests to check whether they operate as designed.
In addition, a pressure test is also performed for finding a deteriorated portion due to a change with time of a product and for checking a state.
[0003]
In such a case, a pressure calibration device is used in order to accurately and promptly adjust and supply the pressure source.
FIG. 3 shows a conventional pressure calibration device. As a high-pressure source, for example, the N 2 cylinder 1 is connected to the DUT 26 from the pressure reducing valve 20 via the pipes 25 and the connectors 21 and 22. Further, a miniature valve 23 for allowing gas to escape and finely adjust the gas pressure is connected to the other side of the connector 21, and a digital manometer 24 for displaying the pressure is connected to the other side of the connector 22.
When the pressure is increased from a low pressure to a target value in such a configuration, first, the pressure reducing valve 20 of the N 2 cylinder 1 is gradually opened while watching the display of the digital manometer 24 so as to be near the target pressure value. When the target value is reached, the pressure reducing valve 20 is fixed as it is. Since the pressure adjustment range of the pressure reducing valve 20 is very large, it is not adjusted to the target value at one time, and usually exceeds the target value. If the target value is exceeded even a little, the miniature valve 23 is opened to release gas and reduce the pressure. Since the pressure adjustment width of the miniature valve 23 is also large, when the miniature valve 23 is opened, the pressure drops slightly too much. When the pressure is lower than the target value, the pressure reducing valve 20 is slightly opened to pressurize. In the same manner as described above, this is repeated 10 to 20 times as shown in FIG. 4 to obtain a target pressure value. The same applies to the case where the pressure is reduced from a high pressure to a target value.
[0004]
As described above, in the conventional pressure calibrating device, since both the pressure reducing valve 20 and the miniature valve 23 have a very large change in adjustment, it is necessary to repeatedly increase and decrease the pressure to obtain the target pressure. . Once the adjustment is completed, it is stable, so even if it takes time to adjust, there is not much problem in a test that only needs to obtain a constant pressure value, but in a pressure adjustment for a test that changes the pressure value stepwise, The problem that adjustment is troublesome each time occurs.
FIG. 4 is a graph showing a change in pressure when the pressure is gradually changed in a conventional pressure calibrating device, where 100% is 75%, 50%, and 25%, where 3.0 MPa is 100%. , 0% in order of decreasing the pressure in the direction of decreasing the pressure, and when it becomes 0%, on the contrary, increasing the pressure in the order of 0%, 25%, 50%, 75%, 100% The process when adjusting stepwise is shown.
As described above, in the method using the conventional pressure calibrating device, the pressure value is inevitably moved up and down 10 to 20 times each time until the pressure is adjusted to the predetermined value, and it takes time and skill to maintain the constant value. Was needed. Further, as shown in the graph, if the measured value is greatly increased and decreased, it is not possible to evaluate the quality of the measured object even when testing a measured object having an operating point within this range. Was. Further, a sudden rise and fall of the pressure may destroy the measuring instrument itself for measuring the pressure.
[0005]
[Problems to be solved by the invention]
The present invention has been made in view of the above problems, and an object of the present invention is to provide a pressure calibration device that can quickly and accurately adjust pressure without moving up and down, and that consumes less pressure source. It is.
[0006]
[Means for Solving the Problems]
The present invention provides a pressure calibration device for adjusting the pressure of a pressure source to a predetermined pressure and supplying the pressure to a device under test 26, wherein the pressure source includes a pressure control valve 4 for reducing the pressure of the pressure source. The pressure control valve 4 and the connector 16 of the device under test 26 are connected to each other, and a rapid pressure adjusting unit 27 and a very low speed pressure adjusting unit 28 are branched and connected via switching means. .
[0007]
Thus, the rough pressure is adjusted by the rapid pressure adjusting unit 27 and the minute adjustment is performed by the slow speed adjusting unit 28, so that the target pressure value can be easily obtained. And pressure reduction need not be repeated, and the consumption of the pressure source can be saved.
[0008]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be described with reference to FIGS.
In FIG. 1, reference numeral 1 denotes an N 2 cylinder filled with a high-pressure N 2 gas as a pressure source. The N 2 cylinder 1 is connected to a connector 2 via a pressure reducing valve 20, and a three-way valve 3 is connected to the connector 2. Is connected to the input side. A pipe 25 is connected to one of the output sides of the three-way valve 3, and the other is open to exhaust. The other end of the pipe 25 is connected to the pressure control valve 4, and further connected to the input side of the three-way valve 5 via the pipe 25. The pressure control valve 4 is for reducing the primary pressure supplied from the N 2 cylinder 1 to a rough secondary pressure close to the pressure used for the test. A primary pressure indicator 17 is provided on the input side and an output side is provided on the output side. Is connected to a secondary pressure indicator 18. It also acts as a safety valve. The two output sides of the three-way valve 5 are connected to a rapid pressure adjusting unit 27 and a very slow pressure adjusting unit 28 in a branched and switchable manner.
[0009]
The rapid pressure adjusting section 27 is connected to one input side of the four-way connector 13 after the secondary pressure adjusting reserve tank 6, the three-way valve 7, and the three-way connector 8 are connected in this order, and is connected to the three-way connector 8. A rapid pressure reduction control valve 9 and a quick relief valve 10 are connected to the branch path. The secondary pressure adjusting reserve tank 6 is for storing a fixed amount of gas and for rapidly increasing the pressure. The other output side of the three-way valve 7 is exhausted. The rapid pressure reducing valve 9 has a needle angle of about 3 degrees and is used for pressure reduction of a relatively large pressure.
[0010]
The low-speed pressure adjusting unit 28 is connected to the other input side of the four-way connector 13 via the low-speed pressure adjusting valve 11 and the three-way connector 12, and has a low-speed The pressure reducing valve 14 and the slow release valve 15 are connected, and the three-way connector 12 is connected to a measuring pressure indicator 19 for displaying a measured pressure. The fine-speed pressurizing control valve 11 and the fine-speed depressurizing control valve 14 are for fine adjustment of the needle angle of about 1 degree, can be changed in 0.001 MPa units, and change speed is 0.001 MPa / 5 sec. And the gradient speed can be controlled gently. The device under test 26 is connected to the other output side of the four-way connector 13 via the connector 16.
[0011]
Next, the operation of the pressure calibration device according to the present invention will be described. Here, the operation will be described in accordance with the adjustment procedure when changing the pressure as shown in FIG.
[0012]
1. Procedure for stabilizing to 100% (3.0 MPa) in FIG. 2 (1) With the three-way valve 3 stopped, connect the N 2 cylinder 1 to the connector 2 and apply cylinder pressure.
(2) The three-way valve 5 is stopped, the three-way valve 3 is switched to the pressure control valve 4 side to turn on the primary pressure, and the pressure control valve 4 is pressurized. The primary pressure is displayed on the primary pressure indicator 17, and at this time, if the pressure control valve 4 is fully opened, the secondary pressure indicator 18 has the same value.
(3) While watching the secondary pressure indicator 18, the secondary pressure is adjusted to 105% to 110% of the pressure value used for measurement by the pressure control valve 4. The reason for setting 5% to 10% larger is that the pressure may slightly decrease depending on the capacity of the object to be measured. If 3.0 MPa is used in the measurement, here, 3.15 MPa to 3.3 MPa. , It is possible to always maintain 3.0 MPa.
(4) The three-way valve 5 is switched to the rapid pressure adjusting unit 27 side, and the pressure is rapidly applied to the secondary pressure adjusting reserve tank 6 up to about 90% (2.7 MPa) of the measured pressure. At this time, the three-way valve 7 is switched to the three-way connector 8 side, and the rapid pressure reduction adjusting valve 9 is closed. This ends the rough adjustment.
(5) Next, the three-way valve 5 is switched to the low-speed pressure adjusting section 28 side, and the three-way valve including the rapid pressure adjusting section 27 side is watched while the measurement pressure indicator 19 is being watched. The inside of the circuit after the valve 5 is stabilized to 100% (3.0 MPa). If the pressure rises too high, the gas is exhausted from the slow-speed relief valve 15 by the slow-speed pressure reducing valve 14 and the pressure is adjusted. When stabilized at 100%, the three-way valve 5 is stopped.
(6) In a stable state, 100% (3.0 MPa) is applied to the DUT 26 via the connector 16.
[0013]
2. Procedure for gradually reducing the pressure from 100% to 75%, 50%, 25%, and 0% in FIG. 2 (1) The three-way valve 5 is in a closed state.
(2) Open the rapid pressure reducing valve 9 to release the gas from the quick release valve 10 and rapidly increase the pressure of 100% (point a in FIG. 2) to a pressure slightly higher than 75% (point b in FIG. 2). Reduce the pressure. After the pressure is reduced, the quick release valve 10 is closed.
(3) Open the slow speed pressure reducing valve 14 and, while observing the measurement pressure indicator 19, slowly exhaust the gas with the slow speed relief valve 15 and gradually stabilize it to 75% from the point b in FIG. Close (point c in FIG. 2).
(4) In a stable state at the point c, 75% (2.25 MPa) is applied to the DUT 26 via the connector 16.
(5) When the pressure is reduced from 75% to 50%, the pressure is rapidly reduced from the point d to the point e in FIG. And stabilize to 50%.
(6) When the pressure is reduced from 50% to 25%, the pressure is rapidly reduced by the rapid pressure reducing valve 9 from the point g to the point h in FIG. And stabilize to 25%.
(7) In order to reduce the pressure from 25% to 0%, if the three-way valve 7 is opened and exhausted, the pressure becomes 0%.
[0014]
3. Procedure for pressurizing stepwise from 0% to 25%, 50%, 75%, and 100% in FIG. 2 (1) With the three-way valve 5 closed, the pressure control valve 4 is turned on while watching the secondary pressure indicator 18. Adjust to adjust the secondary pressure to a value slightly greater than 25%.
(2) The three-way valve 5 is switched to the rapid pressure adjusting unit 27 side, and the pressure is increased to about 24% (point m in FIG. 2) while watching the measurement pressure indicator 19. At this time, the three-way valve 7 is connected to the three-way connector 8 side, the rapid pressure reduction adjusting unit 9 is closed, and the slow speed pressure reduction adjusting unit 14 is closed.
(3) The three-way valve 5 is switched to the low-speed pressure adjusting unit 28 side, and while watching the measurement pressure indicator 19, the three-way valve 5 is stabilized at 25% (point n in FIG. close.
(4) In a state stable at the point n, 25% (0.75 MPa) is applied to the DUT 26 via the connector 16.
(5) When pressurizing from 25% to 50%, with the three-way valve 5 closed, the secondary pressure is adjusted to a value slightly larger than 50%, and the three-way valve 5 is switched to the rapid pressure adjusting unit 27 side. 2, the pressure is increased from the point o to the point p in FIG. 2, then the three-way valve 5 is switched to the side of the low-speed pressure adjusting unit 28, and the pressure is adjusted from the point p to the point q in FIG. Stabilize to 50%.
(6) When pressurizing from 50% to 75%, the secondary pressure is adjusted to a value slightly larger than 75% with the three-way valve 5 closed, and the three-way valve 5 is switched to the rapid pressure adjusting unit 27 side. 2, the pressure is increased from the point r to the point s in FIG. 2, then the three-way valve 5 is switched to the side of the slow speed pressure adjusting unit 28, and the slow speed pressure adjusting valve 11 is pressed from the point s to the point t in FIG. Stabilize to 75%.
(7) When pressurizing from 75% to 100%, the secondary pressure is adjusted to a value slightly larger than 100% with the three-way valve 5 closed, and the three-way valve 5 is switched to the rapid pressure adjusting unit 27 side. 2, the pressure is increased from the point u to the point v in FIG. 2, and then the three-way valve 5 is switched to the side of the low-speed pressure adjusting unit 28, and is pressurized from the point v to the point w in FIG. Stabilize to 100%.
[0015]
4. Procedure after the end of the characteristic test (1) The three-way valve 3 is closed and the three-way valve 5 is closed. In this state, the three-way valve 7 is evacuated, and the inside of the rapid pressure adjusting unit 27 and the inside of the slow pressure adjusting unit 28 are all radiated.
(2) Disconnect the N 2 cylinder 1 from the connector 2. The three-way valve 3 is evacuated, and the entire interior from the three-way valve 3 to the three-way valve 5 is diffused.
[0016]
In the above-described embodiment, the N 2 gas cylinder is used as the pressure source. However, the pressure source is not limited to this, and any non-harmful gas may be used instead of the N 2 gas. Further, depending on the type and purpose of the test of the DUT 26, a pressure source of a liquid instead of a gas may be used.
[0017]
【The invention's effect】
According to the first aspect of the present invention, the pressure source is connected to the pressure control valve 4 for reducing the pressure of the pressure source, and between the pressure control valve 4 and the connector 16 of the device under test 26, Since the rapid pressure adjusting unit 27 and the very low speed pressure adjusting unit 28 are branched and connected via the switching means, the rough adjustment is performed by the rapid pressure adjusting unit 27 and the minute amount is adjusted by the very low speed pressure adjusting unit 28. Thus, the target pressure value can be easily obtained, and it is not necessary to repeat pressurization and depressurization for further adjustment, so that the consumption of the pressure source can be reduced.
Incidentally, as can be seen from FIG. 2, it can be said that there is no place where the pressure value fluctuates rapidly, and rather, it does not substantially fluctuate. In this manner, the target pressure value can be easily adjusted, and even if the target pressure value is exceeded in the adjustment stage, the target pressure value can be adjusted by using the fine speed depressurizing control valve 14 and the fine speed pressurizing control valve 11. Since the adjustment can be performed again, even if there is a slight adjustment error, it is possible to easily return to the target pressure value.
[0018]
According to the second aspect of the present invention, the rapid pressure adjusting unit 27 includes the secondary pressure adjusting reserve tank 6 and the rapid pressure reducing adjusting valve 9, and the slow speed pressure adjusting unit 28 includes the slow speed increasing pressure adjusting valve 11. The provision of the slow speed depressurization adjusting valve 14 makes it possible to switch between rapid pressurization and slow speed pressurization in both pressurizing and depressurizing pressure adjustments, and to perform the adjustment easily.
[0019]
According to the third aspect of the present invention, the primary pressure indicator 17 is connected to the input side of the pressure control valve 4 and the secondary pressure indicator 18 is connected to the output side. The pressure can be adjusted, and the measurement can be performed while always grasping the primary pressure and the secondary pressure, thereby improving safety.
[0020]
According to the fourth aspect of the invention, since the measuring pressure indicator 19 is connected to the subsequent stage of the slow speed pressurizing adjusting valve 11, the measuring pressure can be easily adjusted, and a slight change in the measuring pressure can be grasped. Can be done.
[0021]
According to the fifth aspect of the present invention, the rapid pressure reduction regulating valve 9, the slow speed pressure regulating valve 11, and the slow speed pressure regulating valve 14 comprise a needle valve, and the rapid pressure regulating valve 9 has a pressure regulation amount per unit time. Since the pressure control valve 11 and the pressure control valve 14 are larger than the pressure control valve 11 and the pressure control valve 14, the gradient of the change can be arbitrarily adjusted when the pressure is changed.
[Brief description of the drawings]
FIG. 1 is a gas pressure circuit diagram showing a pressure calibration device of the present invention.
FIG. 2 is a characteristic diagram showing a graph in a case where a pressure value is changed stepwise using a pressure calibration device according to the present invention.
FIG. 3 is a gas pressure circuit diagram showing a conventional pressure calibration device.
FIG. 4 is a characteristic diagram showing a graph when a pressure value is changed stepwise using a conventional pressure calibration device.
[Explanation of symbols]
1 ... N 2 cylinder, 2 ... connector, 3 ... 3-way valve, 4 ... pressure control valve, 5 ... 3-way valve, 6 ... secondary pressure adjustment reserve tank, 7 ... 3-way valve, 8 ... 3-way connector, 9 ... rapid pressure reduction adjustment Valve: 10 quick release valve, 11: fine speed pressurization control valve, 12: three-way connector, 13: four-way connector, 14: fine speed decompression control valve, 15: fine speed relief valve, 16: connector, 17: primary pressure indicator, 18 Secondary pressure indicator, 19 Measurement pressure indicator, 20 Pressure reducing valve, 21 Connector, 22 Connector, 23 Miniature valve, 24 Digital manometer, 25 Pipe, 26 DUT, 27 Rapid pressure adjustment unit, 28 ... Slow speed pressure adjustment unit.

Claims (5)

圧力源の圧力を所定の圧力に調整して被測定物２６に供給するための圧力校正装置において、前記圧力源に、この圧力源の圧力を減圧するための圧力コントロール弁４を接続し、この圧力コントロール弁４と被測定物２６のコネクタ１６との間に、切換手段を介して、急速圧力調整部２７と微速圧力調整部２８を分岐して接続したことを特徴とする圧力校正装置。In a pressure calibration device for adjusting the pressure of the pressure source to a predetermined pressure and supplying the pressure to the device under test 26, a pressure control valve 4 for reducing the pressure of the pressure source is connected to the pressure source. A pressure calibration device characterized in that a rapid pressure adjusting section 27 and a very slow pressure adjusting section 28 are branched and connected between a pressure control valve 4 and a connector 16 of a device under test 26 via switching means. 急速圧力調整部２７は、二次圧調整リザーブタンク６と、急速減圧調整弁９を具備し、微速圧力調整部２８は、微速加圧調整弁１１と、微速減圧調整弁１４とを具備してなることを特徴とする請求項１記載の圧力校正装置。The rapid pressure adjustment unit 27 includes the secondary pressure adjustment reserve tank 6 and the rapid pressure reduction adjustment valve 9, and the slow speed pressure adjustment unit 28 includes the slow speed pressure adjustment valve 11 and the slow speed pressure reduction valve 14. The pressure calibration device according to claim 1, wherein 圧力コントロール弁４の入力側に一次圧指示計１７を接続し、出力側に二次圧指示計１８を接続してなることを特徴とする請求項１記載の高圧伝送器校正装置。2. The high-pressure transmitter calibrating device according to claim 1, wherein a primary pressure indicator is connected to an input side of the pressure control valve, and a secondary pressure indicator is connected to an output side of the pressure control valve. 微速加圧調整弁１１の後段に測定圧指示計１９を接続してなることを特徴とする請求項２記載の高圧伝送器校正装置。The high-pressure transmitter calibrating device according to claim 2, wherein a measuring pressure indicator (19) is connected to a stage subsequent to the slow speed pressurizing adjusting valve (11). 急速減圧調整弁９、微速加圧調整弁１１、微速減圧調整弁１４は、ニードル弁からなり、急速減圧調整弁９は、単位時間当たりの圧力調整量が、微速加圧調整弁１１、微速減圧調整弁１４よりも大きいものからなることを特徴とする請求項２記載の圧力校正装置。The rapid depressurization adjusting valve 9, the slow speed depressurizing adjusting valve 11, and the slow speed depressurizing adjusting valve 14 are composed of needle valves. 3. The pressure calibration device according to claim 2, wherein the pressure calibration device is larger than the regulating valve.
JP2001241782A 2001-08-09 2001-08-09 Pressure calibration device Expired - Lifetime JP3580786B2 (en)

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KR100706857B1 (en) 2006-11-28 2007-04-13 주식회사 피디케이 Apparatus for controlling pressure
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