JP3544649B2 - Slit nozzle - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a slit nozzle capable of uniformly ejecting a fluid in a state where the fluid is obliquely inclined with respect to the axial direction of the nozzle.
[0002]
[Prior art]
For example, in a manufacturing process of a liquid crystal substrate, a printed board, or the like, a cleaning process of a work, a chemical application process, a drying process, and the like are performed. After these processing processes, a cleaning process using ultrapure water is performed. Then, a method of using a slit nozzle to dry the ultrapure water after the cleaning process and drying the workpiece with a jet fluid is used. Here, the slit nozzle refers to a nozzle in which two plate-like bodies are bonded to each other and a longitudinal slit formed in the bonded portion is used as a fluid outlet.
[0003]
In this case, as shown in FIG. 7, in order to increase the drying efficiency, the gas is injected at a constant angle of attack with respect to the traveling direction of the work 10, but recently, the size of the work 10 is increased, and the thickness is reduced. In order to prevent the work 10 from being lifted up or deformed, it is necessary to reduce the interval between the pressing rollers 11 for holding the work 10. However, since the slit nozzles are arranged obliquely, there is a limit in reducing the interval between the pressing rollers 11, 11, and there is a problem that it is difficult to reliably press the work 10.
[0004]
Therefore, the development of a nozzle capable of ejecting the jet fluid obliquely even when the slit nozzle is arranged straight without making it oblique has been promoted. For example, as shown in FIG. 8, the fluid ejection flow path is inclined. The present invention has proposed a configuration in which an inclined plate portion is provided at the end of a fluid outlet as shown in FIG.
However, a work such as a liquid crystal substrate or a printed circuit board has a maximum width of about 2000 mm, and it is necessary to guarantee a uniform ejection of a fluid over the entire width. There is a problem in that machining of a complicated shape is required, and it is difficult to guarantee accuracy in machining a machine tool, and mass production cannot be performed at low cost.
[0005]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems, and enables uniform ejection of a fluid in a state of being obliquely inclined with respect to the axial direction of a nozzle, and production of a simple structure with high accuracy and low cost. It has been completed for the purpose of providing a slit nozzle capable of performing the following.
[0006]
[Means for Solving the Problems]
Slit nozzle of the present invention has been made to solve the aforementioned problem, bonding two plate-like body, the longitudinal direction of the slit portion formed in the bonded portion in a slit nozzle for the fluid ejection opening, the The slit nozzle is installed vertically between the pressing rollers of the work, and forms an extended portion extending forward from the fluid ejection port on one of the plate-like bodies, and the slit nozzle has Is characterized in that the front end is cut obliquely so as to reach the back surface of the plate-like body to form an inclined surface inclined forward and outward from the fluid ejection port .
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
The drawings show a case where the present invention is applied to a nozzle for a drying process that ejects a gas as a fluid, which is used in a manufacturing process of a liquid crystal substrate, a printed board, and the like. 1 is basically the same as the conventional one in that it is a slit nozzle in which a longitudinal slit formed in the bonded part is used as a fluid ejection port 2.
In the drawings, reference numeral 3 denotes a gas reservoir, and reference numeral 4 denotes a gas supply pipe. The material of the plate-like body 1 can be arbitrarily selected from metals such as stainless steel, titanium, and aluminum, ceramics, hard resins, and the like, depending on the use environment and use conditions.
[0008]
In the present invention, an extended portion 1a extending forward from the fluid ejection port 2 is formed on one of the plate-like bodies 1, and the extended portion 1a is gradually formed forward from the fluid ejection port 2 toward the front. An inclined surface 5 that is inclined outward is formed.
In the nozzle having such a structure, the gas discharged from the fluid ejection port 2 is guided by the inclined surface 5 and spontaneously bent to the left to be ejected on the basis of the fluid dynamics characteristics due to the viscosity of the gas (FIG. 2). In the illustrated example, the gas is uniformly injected in a state where the gas is obliquely inclined to the left with respect to the axial direction of the vertical nozzle.
[0009]
Note that the inclined surface 5 may be formed only on at least one plate-like body 1 on the side where the gas ejection direction is desired to be inclined, and the shape of the other plate-like body 1 is not limited. Therefore, the other plate-like body 1 may be any one such as an inclined plane substantially in a straight line following the inclined plane 5 as shown in FIG. 2 or a rectangular one as shown in FIG. Can be selected.
As the shape of the inclined surface 5, a flat shape is illustrated in FIG. 2, but in addition, a stepped shape having a step portion 1b bulging to the gas outlet side as shown in FIG. Alternatively, the same effect can be obtained with a curved surface as shown in FIG.
[0010]
As described above, the present invention relates to a slit nozzle in which the two plate-like bodies 1 and 1 are bonded to each other and the slit in the longitudinal direction formed in the bonded portion is used as the fluid ejection port 2. A structure in which an extension portion 5 extending forward from the fluid ejection port 2 is formed in the body 1 and an inclined surface 5 that is gradually inclined outward from the fluid ejection port 2 toward the front is formed in the extension portion 1a. Therefore, the gas guided from the inclined surface 5 and discharged from the fluid ejection port 2 is spontaneously bent to the left by the viscosity of the gas and ejected. As a result, the gas can be uniformly injected in a state of being inclined obliquely with respect to the axial direction of the vertical nozzle. Therefore, as shown in FIG. 6, the arrangement of the pressing rollers 11, 11 for pressing the work 10 in the drying process is performed. The interval can be reduced to a minimum, and the lifting or deformation of the work 10 can be reliably prevented.
[0011]
In the above description, the case where gas is used as the fluid has been described. However, it is needless to say that a liquid can be used as the fluid, and in this case, the rebound on the work is caused by ejecting the liquid obliquely. This is effective because it is possible to obtain the effect that it can be prevented, and because the drainage can be performed only on one side, the device can be designed simply.
[0012]
【The invention's effect】
As is apparent from the above description, the present invention can uniformly eject a fluid in a state where the fluid is obliquely inclined with respect to the axial direction of the nozzle, and can be manufactured accurately and inexpensively with a simple structure. It is.
Therefore, the present invention greatly contributes to industrial development as a slit nozzle that has eliminated the conventional problems.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an embodiment of the present invention.
FIG. 2 is a sectional view of a main part showing the embodiment of the present invention.
FIG. 3 is a cross-sectional view of a main part showing another embodiment.
FIG. 4 is a cross-sectional view of a main part showing another embodiment.
FIG. 5 is a cross-sectional view of a main part showing another embodiment.
FIG. 6 is a front view showing a drying process of the printed circuit board.
FIG. 7 is a front view showing a conventional printed circuit board drying process.
FIG. 8 is a sectional view of a main part showing a conventional example.
FIG. 9 is a sectional view of a main part showing a conventional example.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Plate-like body 1a Extension part 2 Fluid ejection port 5 Slope

Claims (3)

In a slit nozzle in which two plate-like bodies are bonded to each other and a longitudinal slit formed in the bonded portion is used as a fluid ejection port, the slit nozzle is installed vertically between the pressing rollers of the work. In addition, an extension portion extending forward from the fluid ejection port is formed on one of the plate-like members, and the extension portion is cut obliquely so that the tip reaches the back surface of the plate-like member. A slit nozzle which is formed so as to be inclined forward and outward from the fluid ejection port . The slit nozzle according to claim 1, wherein the inclined surface has a flat shape. The slit nozzle according to claim 1, wherein the inclined surface has a stepped shape or a curved shape bulging toward the fluid ejection port side.

Images