JP3538671B2 - Hand drive mechanism and robot using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hand driving mechanism and a robot using the same capable of effectively preventing contamination of a working object by the dust produced from a driving system, and increasing a speed of the operation. SOLUTION: This hand driving mechanism is provided with a basic part 50 having a box-shaped structure, a multistage sliding mechanism having the desired number of sliding parts mounted on a side face of the basic part 50, and an end effecter such as a hand H mounted on the outermost sliding part of the multistage sliding mechanism, the innermost sliding part of the multistage sliding mechanism is slidably mounted on the side face of the basic part 50 in a state of preventing the jetting of the dust, and the sliding parts are mounted on a vertical driving shaft 11 of the robot in a state that each sliding part is mounted slidably on a side face of the sliding part at its inner side to prevent the jetting of the dust.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a hand drive mechanism and a robot using the same. More specifically, the present invention relates to a hand drive mechanism used in a clean room such as a semiconductor manufacturing facility and a liquid crystal manufacturing facility, in which dust generation during operation is suppressed, and a robot using the same.

[0002]

2. Description of the Related Art Conventionally, a robot used in a clean room (hereinafter referred to as a clean robot) has been subjected to various measures for suppressing dust generation during operation.

FIG. 6 shows an example of a conventional clean robot. This clean robot 100 has a hand H 'as an end effector for gripping a work W as a work object, and drives the hand H' vertically and vertically. And a work shaft unit 120 provided on the top of the vertical drive shaft 110 and driving the hand H ′ in the horizontal direction.

The vertical drive shaft 110 includes a frame 111, that is, a first frame 111a and a second frame 111.
The second frame 111b is moved up and down with respect to the first frame 111a by a ball screw mechanism (not shown) provided inside the side surface of the first frame 111a.

The work shaft unit 120 is mounted on the second frame 1
An articulated arm composed of a first arm unit 121 pivotally mounted on the top of 11b and a second arm unit 122 pivotally mounted on the tip of the first arm unit 121.

As described above, the working axis unit 120 of the robot 100 is an articulated arm composed of the first arm unit 121 and the second arm unit 122. When carrying out heavy-load conveyance for conveying objects having a large target weight, there is a problem that vibration is likely to occur. Therefore, it is difficult to increase the speed and size of the robot, which is disadvantageous in terms of improving work efficiency.

FIG. 7 shows another example of a conventional clean robot. The robot 200 has a configuration in which a working shaft unit 220 including a linear motion mechanism is provided on the top of a vertical drive shaft 110 similar to the robot 100. That is, the working shaft unit 220 of the robot 200 is configured to pivotally move on the top of the vertical drive shaft 110, and to drive the linear motion frame base 221 above and above the linear motion frame base 221. Mechanism 2
And a moving base 222 provided so as to be driven linearly by 30.

The driving mechanism 230 is composed of a motor 231 and a ball screw 232, and transfers the rotational driving force generated by the motor 231 to the moving base 222 via the ball screw 232.
To the moving base 222 and the linear motion frame base 2
21 is driven linearly.

Such a direct-acting working shaft unit 220
It is easy to make the rigidity higher than that of the working shaft unit 120 which is an articulated arm, and therefore, it is possible to suppress the generation of vibration and to increase the speed, increase the size of the robot, and carry a heavy load. Becomes easier. However, in such a direct-acting type working shaft unit 220, it is difficult to suppress the generation of dust from sliding parts and the like. Therefore, when used as a clean robot, the generated dust is scattered. Special measures are required to prevent this. Further, as shown in the illustrated example, when the working axis unit 220 is a one-stage linear motion mechanism in which the sliding portion is only the moving base 222, when the hand H 'is retracted, the hand H' and the linear motion frame base are moved. 221 overlaps with each other, and depending on the shape of the work W, there is a problem that interference occurs between the work W and the linear motion frame base 221.

Therefore, it is conceivable that the work shaft unit 220 is constituted by a multi-stage linear motion mechanism. Therefore, if the number of stages is increased, the thickness of the first arm 131 and the second arm 132 must be reduced, whereby the stiffness of the first arm 131 and the second arm 132 is reduced, and the current mainstream is obtained. The problem arises that the large workpiece W cannot be transported.

[0011]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and can effectively suppress contamination of a work object due to dust generated from a drive system.
It is another object of the present invention to provide a hand drive mechanism that can be easily increased in size and can easily carry a heavy load, and a robot using the same.

[0012]

The hand drive mechanism of the present invention is used in a clean room such as a semiconductor manufacturing facility.
A hand drive mechanism, comprising a multi-stage slide mechanism having a base having an elongated box structure, a required number of slide portions disposed on a side surface of the base, and a multi-stage slide mechanism disposed at an outermost slide portion of the multi-stage slide mechanism. An end effector such as an installed hand, wherein the base has a hollow elongated base frame,
A pair of rails arranged along the side of the unit frame,
An elongate base cover having an opening on a side surface;
Partition plate closing in a rinsing shape, and both ends of the side surface of the base frame
A driving belt stretched over rollers provided in the
A motor for driving one of the rollers.
Each slide of the ride mechanism is a hollow elongated slide
Along the opposite side of the frame
And a pair of rails that are
And the opening is a labyrinth
A partition plate to be closed on the side opposite to the base side of the slide portion frame
Driving bells hung over rollers provided at both ends of the surface
A motor for driving one of the rollers;
And an engaging member protruding from the cover to the base side from the cover.
The slide portion of the innermost of said multi-stage slide mechanism, the
When the engaging member is engaged with the rail of the base frame,
Also, the driving belt is fixed so as to be drivable,
The base partition plate is arranged in a through portion penetrating the engaging member.
Is set, each slide portion of the multi-stage slide mechanism, its
Engagement member engages with the rail of the inner slide section
And is fixed so that it can be driven by the drive belt.
The partition plate of the inner slide portion is provided with the same engagement portion.
It is characterized in that it is provided in a through portion penetrating through the material .

[0013]

In the hand drive mechanism of the present invention, for example, the slide mechanism has an air flow path extending from the outermost slide portion to the inside of the base via each slide portion, and the base has a base portion inside the base. Exhaust means for exhausting air toward the lower surface is provided, so that dust generated in the slide mechanism is exhausted into the vertical drive shaft of the robot.

[0015]

[0016]

Furthermore, in the hand drive mechanism of the present invention, for example, slide mechanisms are provided on both sides of the base.

On the other hand, the robot of the present invention is mounted on the drive end side of a vertical drive shaft which is vertically expandable and contractible, and the horizontal drive shaft for driving an end effector such as a hand in the horizontal direction is provided by the hand. It is characterized by being any one of the drive mechanisms.

[0019]

According to the present invention, as described above, it is easy to increase the rigidity of the hand drive mechanism, and it is possible to suppress the generation of vibration when the horizontal movement of the end effector such as the hand is accelerated. Can be. This makes it easy to increase the size of the robot and carry a heavy load, and effectively suppresses contamination of a work object such as a work by dust generated from a sliding portion of the slide mechanism. .

Also, by providing an actuator for independently driving each slide portion, each slide portion is driven by the actuator so that the hand and each slide portion do not substantially overlap when the object is gripped by the hand. Control can be performed.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described based on embodiments with reference to the accompanying drawings, but the present invention is not limited to only such embodiments.

First Embodiment FIG. 1 is a perspective view showing the appearance of a robot according to a first embodiment of the present invention. The robot 10 is used, for example, for transporting a work W such as glass in a clean room of a liquid crystal display device manufacturing facility, and includes a vertical drive shaft (vertical drive mechanism) 11 and a vertical drive shaft 11. A horizontal drive shaft unit (horizontal drive mechanism) 20 supported by the drive end.

The vertical drive shaft 11 has a hollow frame 12,
That is, the first frame 12a and the second frame 12b
And the second frame 12b is the first frame 12
It expands and contracts with respect to a.

The horizontal drive shaft unit 20 includes a disk-shaped unit base 21 mounted on the top of the second frame 12b, a turntable 22 rotatably mounted on the unit base 21, This turntable 22
, And a hand H that is moved directly in the horizontal direction by the arm 23.

The turning mechanism of the turntable 22 is
A conventionally known rotating mechanism can be appropriately used.

The arm 23 has a base 50 mounted on the turntable 22 and a first sliding portion 6 disposed on both sides of the base 50 and slidably supported by the base 50.
0, 60 and the first slide portion 60, which is disposed on the side opposite to the base 50, is slidably supported by each first slide portion 60, and is driven independently of the first slide portion 60. It is composed of two slide parts 70, 70. That is, the arm 23 is a two-stage type in which each of the first slide portions 60 linearly moves in the horizontal direction with respect to the base portion 50 and each of the second slide portions 70 linearly moves in the same direction with respect to each of the first slide portions 60. It is a linear motion mechanism.

The structure of the arm 23 will be described in detail below.
Has the same structure, so in the following description, only the configuration of one of the first slide portions 60 and one of the second slide portions 70 will be described in detail.

FIGS. 2 to 5 show the detailed structure of each member constituting the arm 23 and how the members are engaged.

As shown in FIG. 2, the base 50 is provided with a hollow base frame 51 extending in the horizontal direction and elongated on both sides of the base frame 51 so as to extend over substantially the entire length of the base frame 51 in the longitudinal direction. Each rail 52a, 52
b, base frame 51 and rails 52a, 52b
And a metal base cover 53 disposed so as to entirely cover the base cover 53, and the openings 53a provided on both sides of the base cover 53 are disposed inside the base cover so as to close in a labyrinth manner. And a partition plate 54.

The partition plate 54 has a size and a shape that can completely close the opening 53a, and the side walls 53c and 53d where the openings 53a are provided so as to completely overlap the opening 53a. And at a predetermined interval L. Thus, the opening 53a is closed in a labyrinth shape by the partition plate 54. That is, the side surface of the base 50 has a labyrinth structure to prevent the ejection of dust.

As shown in FIG. 3, the first slide portion 60 is provided with a first slide portion frame 6 which is elongated in the horizontal direction.
1, each rail 62a, 62b provided on the side opposite to the base 50 of the frame 61 so as to extend over substantially the entire length in the longitudinal direction of the frame 61, and the first slide portion frame 61 and each of the rails 62a, 62b A first sliding portion cover 63 made of metal disposed so as to entirely cover the first sliding portion frame 63, and protruding from the first sliding portion cover 63 to the side of the base 50 substantially at the center of the first sliding portion frame 61. An engaging member 64 provided and a partition plate 65 disposed inside the first slide portion cover 63 so as to close an opening 63a provided on the side opposite to the base 50 of the first slide portion cover 63 in a labyrinth shape. It is composed of

The partition plate 65 has a size and a shape that can completely close the opening 63a, and a predetermined distance from the side wall 63c where the opening 63a is provided so as to completely overlap the opening 63a. It is arranged at L distance. Thus, the opening 63a is closed in a labyrinth shape by the partition plate 65. That is, the side surface of the first slide portion 60 has a labyrinth structure to prevent the ejection of dust.

The first slide portion 60 is driven by a motor (not shown) via a drive belt (endless belt) 81, and linearly moves in the horizontal direction. That is, a driving belt 81 is stretched by two rollers (not shown) provided at both ends in the longitudinal direction of the base frame 51 in a direction perpendicular to the paper surface of FIG. 5, and a motor that rotationally drives one of the two rollers is provided. (Not shown) is provided on the base frame 51. The engaging member 64 of the first slide portion 60 is fixed to the belt 81 by an appropriate method, and moves directly from the base portion 50 as the driving belt 81 is driven by the motor. As described above, by driving the first slide portion 60 through the driving belt 81 without using a ball screw or the like, the mutual contact between the members is made between the roller and the driving belt 81, that is, the driving belt 81 is used. It can be limited to the inside of the belt 81. Therefore, the first slide portion 6
It is possible to minimize dust generation in the drive system that drives the zero.

As shown in FIG. 4, the second slide portion 70 has a substantially rectangular parallelepiped outer shape, and a second slide portion frame 71 mounted on the upper surface of the second slide portion frame 71 and extending toward the base 50 side. A hand fixing member 72 for fixing the hand H, a storage cover 73 in which the second slide portion frame 71 is stored, and a protrusion provided on the side of the base 50 of the second slide portion frame 71 so as to protrude from the storage box 73. And an engaging member 74 to be formed.

The second slide portion 70 is driven by a motor (not shown) via a drive belt (endless belt) 82, and linearly moves in the horizontal direction.
That is, the driving belt 82 is moved in a direction perpendicular to the plane of FIG.
Are stretched by two rollers (not shown) provided at both ends in the longitudinal direction of the first slide portion frame 61, and a motor (not shown) for rotating one of the two rollers is provided on the first slide portion frame 61. Is provided. The engagement member 74 of the second slide portion 70 is fixed to the belt 82 by an appropriate method, and moves directly from the first slide portion 60 as the driving belt 82 is driven by the motor. You. As described above, the driving belt 8 can be attached to the second sliding portion 70 without using a ball screw or the like.
With the configuration in which the driving is performed via the second member 2, the contact between the members can be limited between the roller and the driving belt 82, that is, inside the driving belt 82. Therefore, it is possible to minimize dust generation in the drive system that drives the second slide unit 70.

As shown in FIG. 5, the engaging members 64 of the first slide portion 60 are inserted into the inside of the base cover 53 through the openings 53a, and each of the engaging portions 64 has a C-shaped cross section.
a, 64b are engaged with each rail 52a, 52b. As a result, the first slide portion 60 is slidably supported in the horizontal direction on the side of the base 50. At this time, the partition plate 54
Is in a state of being passed through a through portion 64 c penetrating through the engaging member 64, whereby the first slide portion 60 is moved in a state where the opening 53 a is closed in a labyrinth shape by the partition plate 54. It is possible to slide.

The engagement member 74 of the second slide 70
Is moved from the opening 63a of the first sliding portion cover 63 to the first
Each of the engaging portions 74 is inserted into the slide portion cover 63.
a, 74b are engaged with each rail 62a, 62b. As a result, the second slide 70 is moved to the first slide 60
Is slidably supported in the horizontal direction on the side of the. At this time, the partition plate 65 is
c through the opening 6
The second slide portion 70 can be slid in a state where 3a is closed in a labyrinth by the partition plate 65. That is, the side surface of the second slide portion 70 has a labyrinth structure to prevent the ejection of dust.

As described above, in the first embodiment, the hand H
A horizontal drive shaft unit 20 for driving an end effector in a horizontal direction is provided with a base 50 supported on the drive end (top of the third frame) of the vertical drive shaft 11 and a first base slidably supported by the base 50. A slide portion 60 and a second slide portion 7 slidably supported by the first slide portion 60
0 and a two-stage linear motion mechanism, and the respective slide portions 60 and 70 are driven by independent drive mechanisms. Therefore, the speed of the horizontal drive shaft unit 20 can be easily increased. .

Further, since each of the slide portions 60 and 70 is driven by a drive mechanism (actuator) that operates independently, the hand H and the first slide portion 60 are substantially separated when the hand W is gripped by the hand H. The slides 60 and 70 are slid so that the work gripping portion of the hand H and the second slide 70 do not overlap when the work W is gripped, so that the work W is gripped. Becomes possible.

More specifically, in the standby state, the hand H
The second slide part 70 directly supporting the first slide part 60 is slid to the rearmost side of the first slide part 60 (the side in the direction of the arrow B in FIG. 1).
Is also slid with respect to the base 50 to the rearmost side. From this state, when gripping the work W, the first slide part 60 is moved while the second slide part 70 is slid to the foremost side of the first slide part 60 (the direction of the arrow B in FIG. 1). The operation of each motor as an actuator of each of the slide units 60 and 70 is controlled such that the work W is slid to the front side of the second slide unit 70 by a distance necessary to grip the work W. Thus, regardless of the shape of the work W, the work W and the slide portions 60 and 70 can be gripped without causing interference.

Further, the first slide portion 60 is connected to the base 5
0, the second slide portion 70 is disposed beside the first slide portion 60, and each slide portion 60,
The openings 53a, 63a for inserting the engaging members 64, 74 as support members for slidably supporting the 70 into the covers 53, 63 are provided on the sliding portions (each rail) of the covers 53, 63. 52a, 52b, 62a, 62b and the contact portions between the engaging portions 64a, 64b, 74a, 74b), so that when the horizontal drive shaft unit 20 is moved up and down by the vertical drive shaft 11, It is possible to prevent the dust in the insides 53 and 63 from scattering outside through the openings 53a and 63a and contaminating the work W. In this regard, by providing the partition plates 54 and 65 for closing the openings 53a and 63a in a labyrinth manner, scattering of dust from the inside of each of the covers 53 and 63 can be more effectively suppressed.

Further, since the arm 23 is a multi-stage slide mechanism, the arm 23 can be downsized while securing a predetermined stroke of the hand H. In addition, since the multi-stage slide mechanism is a multi-stage slide mechanism on the side of the base 50, there is no reduction in rigidity due to the multi-stage slide mechanism. Therefore, the multi-stage slide mechanism can be maintained at high rigidity.

In the first embodiment, an appropriate position inside each of the covers 53 and 63 (for example, a rectangle G in FIG. 5)
1, G2, G3, and G4) may be passed through a signal cable or a vacuum pipe.

Embodiment 2 Next, a robot according to Embodiment 2 of the present invention will be described.
The robot 10A according to the second embodiment not only suppresses the scattering of dust from inside each of the covers 53 and 63, but also actively removes the dust inside each of the covers 53 and 63, so that the work W The contamination can be more effectively prevented. The basic configuration of the robot 10A is the same as that of the robot 10 of the first embodiment. Therefore, the drawings and reference numerals referred to in the description of the first embodiment will be described.

As shown in FIG. 5, the robot 10A according to the second embodiment discharges dust inside the first slide portion cover 63 and inside the base cover 53 to, for example, the outside through the hollow vertical drive shaft 11. The dust discharge mechanism 90 is provided.

That is, the dust discharge mechanism 90 is provided on the engaging member 74 of the second slide portion 70 and is provided with a first ventilation passage 91 for introducing outside air into the first slide portion cover 63.
And the second sliding portion 70 of the first sliding portion frame 61
A first ventilation hole 92 provided on the side wall 61a and communicating between the inside of the first slide portion cover 63 and the inside of the first slide portion frame 61, and a first slide portion frame provided on the engaging member 64 of the first slide portion 60. 61 inside and base cover 53
A second ventilation passage 93 communicating with the inside, and a base frame 51;
A second ventilation hole 94 provided in the side wall 51a on the first slide portion 60 side to communicate the inside of the base cover 53 and the inside of the base frame 51, and the inside of the base frame 51 provided in the floor wall 51c of the base frame 51 and the vertical drive shaft 11 and a fan 96 that blows air from the inside of the base frame 51 toward the inside of the vertical drive shaft 11 through the third ventilation hole 95. That is, the second
An air flow path from the slide portion 70 to the inside of the base 50 via the first slide portion 60 is formed.

The first ventilation holes 92 connect the rails 62 a and 62 b of the first slide portion frame 61 to the second slide portion 70.
Although not shown in the drawing, each rail 62 is attached to the side wall 61a so that dust generated by sliding of the engaging portions 74a and 74b of the engaging member 74 can be immediately sucked.
Many are provided along the longitudinal direction of a and 62b.

Similarly to the first ventilation holes 92, the second ventilation holes 94 connect the rails 52 a and 52 b of the base frame 51 to the engagement portions 64 a and 6 of the first sliding portion 60 engagement member 64.
Although not shown in the drawing, the side wall 5b is not clearly shown so that dust generated by sliding of the side wall 4b can be immediately sucked.
A number 1a is provided along the longitudinal direction of each rail 52a, 52b.

As described above, the robot 10A according to the second embodiment
Since the dust discharge mechanism 90 for discharging the dust inside the first slide portion cover 63 and the inside of the base cover 53 to, for example, the outside through the inside of the vertical drive shaft 11 is provided, the work can be more effectively performed. W contamination can be prevented.

As described above, the present invention has been described based on the embodiments. However, the present invention is not limited to these embodiments, and various modifications can be made. For example, the horizontal translation mechanism 20 does not need to be limited to the two-stage slide units 60 and 70, and may be a multi-stage slide unit. Further, the horizontal translation mechanism may be provided only on one side.

[0051]

As described in detail above, according to the present invention,
A horizontal drive mechanism for driving the end effector in a horizontal direction includes a base supported by a drive end of a vertical drive mechanism, and a slide portion slidably supported by the base, wherein the base and the slide portion are provided. A sliding portion with the cover is covered with a cover, and an opening for inserting a support member for slidably supporting the sliding portion on the base portion inside the cover is provided on the side of the sliding portion of the cover. Therefore, there is an excellent effect that dust generated from the sliding portion can be suppressed from scattering from inside the cover to the outside through the opening and contaminating the work target.

Further, by using a multi-stage linear drive mechanism that is independently driven as the horizontal drive mechanism, it is possible to easily achieve high speed and high rigidity.

Further, by adopting a configuration in which each slide unit is driven by a drive mechanism that operates independently, it is possible to control each slide unit so that the hand and the slide unit do not substantially overlap. It becomes.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a robot according to an embodiment of the present invention.

FIGS. 2A and 2B are three views illustrating details of a base portion of a horizontal drive shaft unit, wherein FIG. 2A is a front view, and FIG. 2B is a cross-sectional view taken along line II of FIG. (C) is a sectional view taken along the line II-II of (b).

FIGS. 3A and 3B are three views illustrating details of a first slide portion of a horizontal drive shaft unit, wherein FIG. 3A is a front view and FIG. 3B is a cross-sectional view taken along line II of FIG. (C) is a sectional view taken along the line II-II of (b).

FIG. 4 is a three-sided view illustrating details of a second slide portion of the horizontal drive shaft unit.

FIG. 5 is a cross-sectional view showing how the horizontal drive shaft unit is engaged.

FIG. 6 is a schematic perspective view of an example of a conventional clean robot.

FIG. 7 is a schematic perspective view of another example of a conventional clean robot.

[Explanation of symbols]

10 Robot 11 Vertical drive shaft 20 Horizontal drive shaft unit 23 arm 50 base 60 1st slide part 70 2nd slide part

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-11-70487 (JP, A) JP-A-10-199959 (JP, A) JP-A-2-232194 (JP, A) 169292 (JP, U) Jpn. Sho 62-5586 (JP, U) JP 7-44466 (JP, Y2) (58) Fields investigated (Int. Cl. ⁷ , DB name) B25J 18/00 B25J 19 / 00 B25J 9/00 H01L 21/68

Claims (4)

(57) [Claims] 1. In a clean room such as a semiconductor manufacturing facility.
A hand drive mechanism to be used , wherein a multi-stage slide mechanism having a base having an elongated box structure, a required number of slide portions disposed on a side surface of the base, and an outermost slide of the multi-stage slide mechanism An end effector such as a hand disposed on the base , wherein the base has a hollow elongated base frame and the base frame.
A pair of rails arranged along the side of the
An elongated base cover with a mouth, and the opening is labyrinth-shaped
Partition plates to be closed at both ends of the base frame side surface.
The driving belt stretched over the roller,
A motor for driving one of the slide mechanisms , wherein each slide portion of the multi-stage slide mechanism has a hollow elongated shape.
Slide part frame and opposite base of the slide part frame
A pair of rails arranged along the side surface and the opposite base side
An elongated slide portion cover having an opening on its surface;
A partition plate for closing in a labyrinth shape, and the slide portion frame
Is hung over the rollers provided at both ends of the opposite side of the base.
Drive belt and a motor for driving one of the rollers
And an engagement projecting from the slide cover to the base side.
And a member, the innermost slide portion of the multi-stage slide mechanism, the
When the engaging member is engaged with the rail of the base frame,
Also, the driving belt is fixed so as to be drivable,
The base partition plate is provided in a through hole penetrating the engaging member.
And each slide portion of the multi-stage slide mechanism has an engagement portion
When the material is engaged with the inner slide rail
Both are fixed so that they can be driven by the drive belt, and
The partition plate of the inner slide part penetrates the same engagement member.
A hand drive mechanism, wherein the hand drive mechanism is disposed in a formed through hole . 2. The slide mechanism has an air flow path extending from the outermost slide portion to the inside of the base via each slide portion, and an exhaust means for exhausting air toward the lower surface of the base is provided inside the base. 2. The hand drive mechanism according to claim 1, wherein dust generated in the slide mechanism is discharged into a vertical drive shaft of the robot. 3. The hand drive mechanism according to claim 1, wherein slide mechanisms are provided on both sides of the base. 4. A robot provided with a horizontal drive shaft mounted on a drive end side of a vertical drive shaft which is vertically expandable and contractible and configured to drive an end effector such as a hand in a horizontal direction. A robot, wherein the drive shaft is the hand drive mechanism according to claim 1 , 2 or 3 .