JP3522559B2 - Dielectric porcelain material - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic material, and in particular, it can be sintered at a relatively low temperature of 1000 ° C. or lower,
The present invention relates to a dielectric ceramic material having a small dielectric loss.

[0002]

2. Description of the Related Art A ceramic capacitor is one of electronic components to which a dielectric ceramic material is applied. Among them, a multilayer ceramic capacitor is one in which dielectric ceramic materials and internal electrodes are alternately laminated in layers, and is small in size, has a high capacitance, and is excellent in reliability.
It is used in most electronic devices, including industrial and communication devices. This multilayer ceramic capacitor is manufactured by alternately stacking internal electrodes and a sheet-shaped unsintered dielectric ceramic material, followed by firing to integrate them.

[0003]

By the way, the above-mentioned dielectric
As a body porcelain material, barium titanate-based (BaTiO 3
₃), Titania-based (TiO₂) Etc. dielectric ceramic material
Was used. These dielectric porcelain materials are
Since it is sintered at 0 to 1400 ° C,
High temperature firing is required in the manufacturing process of mixed capacitors
Which is a disadvantage to mass production of capacitors
was there. In addition, the internal electrodes were also fired at high temperature at the same time.
Therefore, the internal electrodes must be made of a material with excellent heat resistance.
For example, Pt (platinum) or Pd (palladium)
Since expensive metal has to be used, the laminated ceramic
There is a problem that the cost of Densa cannot be lowered.
there were. Also, in general, capacitors used in the high frequency band
The dielectric ceramic material with extremely low dielectric loss is used for the sensor.
Is mandatory.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a dielectric ceramic material having a low sintering temperature and a low dielectric loss.

[0005]

[Means for Solving the Problems]
Therefore, the present invention adopts the following configurations. Dielectric of the present invention
One of the porcelain materials is SiO₂And Al₂O₃Be sure to include
To B₂O ₃And K₂O and ZrO₂Or CuO or
Glass α or SiO comprising all₂And CaO and P
one of the glasses β containing at least bO and A
l₂O₃And TiO₂And Zn₂SiO_Four, SrSiO₃, C
aSiO₃, ZrSiO₃At least 1 selected from
The above compound γ is mixed with the composition ratio shown below and sintered.
It is characterized by being made.   Glass α or glass β: 20% by weight or more and 65% by weight or less   Al₂O₃              : 5% by weight or more and 35% by weight or less   TiO₂               : 5 wt% or more and 45 wt% or less   Compound γ: more than 0% by weight and 30% by weight or less

This dielectric ceramic material is made of Al₂O₃, TiO
₂And compound γ is dispersed in glass α or glass β
Al, which originally has a high sintering temperature₂O₃, T
iO ₂And the powder of the compound γ is a glass α having a relatively low melting point.
Or it is mixed with powder of glass β and about 700-900 ℃
It is possible to sinter at a relatively low temperature of
is there.

The glass α or glass β is Al ₂ O ₃
And TiO ₂ and the compound γ are mutually sintered, and the composition ratio thereof is preferably 20% by weight or more and 65% by weight or less, more preferably 30% by weight or more and 55% by weight or less, Most preferably, it is 40% by weight or more and 55% by weight or less. Further, the glass β contains Al ₂
At least one compound of O ₃ , B ₂ O ₃ , K ₂ O and MgO may be contained.

Further, when Al ₂ O ₃ is added in a predetermined composition range, the dielectric loss of the dielectric ceramic material can be lowered, and the composition ratio thereof is preferably 5% by weight or more and 35% by weight or less. It is more preferably from 30% by weight to 30% by weight, and most preferably from 15% by weight to 25% by weight.

Further, when TiO ₂ is added in a predetermined composition range, the relative permittivity can be increased, and the composition ratio is preferably 5% by weight or more and 45% by weight or less, and 10% by weight or more and 35% by weight or less. It is more preferably 10 or less
Most preferably, it is at least 20% by weight.

When the compound γ is added in a predetermined composition range, the dielectric loss can be made lower, and the composition ratio is 0% by weight.
More than 30% by weight or less, more preferably more than 0% by weight and less than 20% by weight,
Most preferably, it is more than 0% by weight and 10% by weight or less.

Further, one of the dielectric ceramic materials of the present invention is
Be sure to include SiO ₂ and Al ₂ O ₃ as well as B ₂ O ₃ , K ₂ O and Z
Either glass α containing rO ₂ or CuO or glass β containing at least SiO ₂ , CaO and PbO, Al ₂ O ₃ , and TiO ₂
The main component is a mixture of and in the composition ratios shown below,
It is characterized in that 5 parts by weight or less of MnO ₂ is mixed and sintered with 100 parts by weight of the main component. Glass α or glass β: 20 wt% or more and 90 wt% or less Al ₂ O ₃ : 5 wt% or more and 35 wt% or less TiO ₂ : 5 wt% or more and 45 wt% or less

This dielectric ceramic material is made of Al ₂ O ₃ or TiO _2.
2 and MnO ₂ are dispersed in glass α or glass β, and Al ₂ O ₃ and Ti, which originally have high sintering temperatures,
The powder of O ₂ and MnO ₂ can be mixed with the powder of glass α or glass β having a relatively low melting point and sintered at a relatively low temperature of about 700 to 900 ° C.

At this time, the composition ratio of the glass α or the glass β is 20% by weight or more and 90% by weight in the main component.
It is preferable that the amount is 30% by weight or more and 85% by weight or less.
It is more preferable that the amount is 40% by weight or more and 80% by weight or less, and most preferably 60% by weight or more and 70% by weight or less.

Further, when Al ₂ O ₃ is added in a predetermined composition range, the dielectric loss of the dielectric ceramic material can be lowered, and the composition ratio thereof is 5% by weight or more and 35% by weight or less in the main component. It is preferable that it is 10% by weight or more and 30% by weight or less, more preferably 15% by weight or more and 25% by weight or more.
Most preferably, it is not more than wt%.

Further, when TiO ₂ is added in a predetermined composition range, the relative permittivity can be increased, and the composition ratio is preferably 5% by weight or more and 45% by weight or less in the main component, preferably 10% by weight. % Or more and 35% by weight or less is more preferable, and 10% by weight or more and 20% by weight or less is most preferable.

When MnO ₂ is added to the main component in a predetermined amount, the dielectric loss of the dielectric ceramic material can be further reduced, and the addition amount is 5 parts by weight or less based on 100 parts by weight of the main component. Is more preferable, 1 part by weight or less is more preferable, 0.05 part by weight or more and 1 part by weight or less is still more preferable, 0.1 part by weight or more and 0.1 part by weight or less.
Most preferably, it is 5 parts by weight or less.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION One of the dielectric porcelain materials according to the present invention is to contain SiO ₂ and Al ₂ O ₃ as well as B ₂ O ₃ and K ₂ O.
And one of glass α containing at least one of ZrO ₂ and CuO or glass β containing at least SiO ₂ , CaO and PbO, Al ₂ O ₃ and Ti.
O ₂ and Zn ₂ SiO ₄ , SrSiO ₃ , CaSiO ₃ , Z
At least one compound γ selected from rSiO ₃ is mixed in the following composition ratio and sintered. That is, glass α or glass β is 20% by weight
65 wt% or more, Al ₂ O ₃ is 5 wt% or more and 35 wt% or less, TiO ₂ is 5 wt% or more and 45 wt% or less, and compound γ is more than 0 wt% and 30 wt% or less. Is.

This dielectric ceramic material is Al₂O₃, TiO
₂And compound γ is dispersed in glass α or glass β
Al, which originally has a high sintering temperature₂O₃, T
iO ₂And the powder of the compound γ is a glass α having a relatively low melting point.
Or it is mixed with powder of glass β and about 700-900 ℃
It is possible to sinter at a relatively low temperature of
is there.

In order to lower the sintering temperature of the dielectric ceramic material of the present invention, it is preferable to use glass which softens and melts in the range of 600 to 900 ° C. In the present invention, SiO ₂ and Al ₂ are particularly preferable. O ₃ and always includes B ₂ O ₃ and K ₂ O and Z
Glass α containing either or all of rO ₂ and CuO
Alternatively, it is preferable to use glass β containing at least SiO ₂ , CaO and PbO.

The glass α or glass β is Al ₂ O ₃
And TiO ₂ and the compound γ are mutually sintered, and the composition ratio thereof is preferably 20% by weight or more and 65% by weight or less, more preferably 30% by weight or more and 55% by weight or less, Most preferably, it is 40% by weight or more and 55% by weight or less. Glass α or glass β is 2
If it is less than 0% by weight, Al ₂ O ₃ , TiO ₂ and the compound γ cannot be sintered, which is not preferable.
If it exceeds the weight%, glass α or β, Al ₂ O ₃ , Ti
It is not preferable because O ₂ and the compound γ are melted. In particular, the composition of glass α or glass β is 40% by weight
The range of 55% by weight or more is preferable because the dielectric loss of the dielectric ceramic material can be reduced. Also,
The glass β may contain at least one compound of Al ₂ O ₃ , B ₂ O ₃ , K ₂ O and MgO.

When Al ₂ O ₃ is added in a predetermined composition range, the dielectric loss of the dielectric ceramic material can be reduced, and the composition ratio is preferably 5% by weight or more and 35% by weight or less. It is more preferably from 30% by weight to 30% by weight, and most preferably from 15% by weight to 25% by weight. When Al ₂ O ₃ is less than 5% by weight, the dielectric loss cannot be lowered, which is not preferable, and when it exceeds 35% by weight, the dielectric loss becomes high, which is not preferable. In particular, when the composition of Al ₂ O ₃ is in the range of 15% by weight or more and 25% by weight or less, the dielectric loss of the dielectric ceramic material can be further reduced, which is preferable.

Further, when TiO ₂ is added in a predetermined composition range, the relative permittivity can be increased, and the composition ratio is preferably 5% by weight or more and 45% by weight or less, and 10% by weight or more and 35% by weight or less. It is more preferably 10 or less
Most preferably, it is at least 20% by weight.
When TiO ₂ is less than 5% by weight, the relative dielectric constant cannot be increased, which is not preferable, and when it exceeds 45% by weight, dielectric loss becomes high and sintering becomes difficult, which is not preferable. In particular, the composition of TiO ₂ is 10% by weight or more and 20% by weight or more.
The following range is preferable because the relative dielectric constant of the dielectric ceramic material can be increased and the dielectric loss can be further reduced.

The compound γ is Zn ₂ SiO ₄ , SrSi
It is at least one selected from O ₃ , CaSiO ₃ , and ZrSiO ₃ , and when this compound γ is added in a predetermined composition range, the dielectric loss can be further lowered, and the composition ratio is 0% by weight. It is preferably more than 30% by weight and more preferably more than 0% by weight and less than 20% by weight, and most preferably more than 0% by weight and less than 10% by weight. When the amount of the compound γ added exceeds 30 parts by weight, the dielectric loss increases and the insulation resistance decreases, which is not preferable. If the compound γ is not added at all, the dielectric loss cannot be lowered, which is not preferable. In particular, the compound γ is more preferably Zn ₂ SiO ₄ .

Another one of the dielectric porcelain materials of the present invention is that one of the above glass α or the above glass β, Al ₂ O ₃ and TiO ₂ has a composition ratio shown below. It is characterized in that the mixed material is the main component, and 5 parts by weight or less of MnO ₂ is mixed with 100 parts by weight of the main component and sintered. Main component is glass α
Alternatively, the glass β is 20 wt% or more and 90 wt% or less, Al ₂ O ₃ is 5 wt% or more and 35 wt% or less, and T
iO ₂ has a composition of 5% by weight or more and 45% by weight or less.

This dielectric ceramic material is made of Al ₂ O ₃ and TiO _2.
2 and MnO ₂ are dispersed in glass α or glass β, and Al ₂ O ₃ and Ti, which originally have high sintering temperatures,
The powder of O ₂ and MnO ₂ can be mixed with the powder of glass α or glass β having a relatively low melting point and sintered at a relatively low temperature of about 700 to 900 ° C.

At this time, the composition ratio of the glass α or the glass β is 20% by weight or more and 90% by weight in the main component.
It is preferable that the amount is 30% by weight or more and 85% by weight or less.
It is more preferable that the amount is 40% by weight or more and 80% by weight or less, and most preferably 60% by weight or more and 70% by weight or less. When glass α or glass β is less than 20% by weight, Al ₂ O ₃ and TiO _2
This is not preferable because it becomes impossible to sinter ₂ and MnO _2, and when it exceeds 90% by weight, glass α or glass β and Al ₂ O ₃ , TiO ₂ and MnO ₂ are melted, which is not preferable. In particular, if the composition of glass α or glass β is in the range of 60% by weight or more and 70% by weight or less,
It is preferable because the dielectric loss of the dielectric ceramic material can be reduced.

The composition ratio of Al ₂ O _{3 in} the main component is preferably 5% by weight or more and 35% by weight or less, more preferably 10% by weight or more and 30% by weight or less, and 15% by weight or less. Most preferably, it is at least 25% by weight. When Al ₂ O ₃ is less than 5% by weight, the dielectric loss cannot be lowered, which is not preferable, and when it exceeds 35% by weight, the dielectric loss becomes high, which is not preferable. In particular,
When the composition of Al ₂ O ₃ is in the range of 15% by weight or more and 25% by weight or less, the dielectric loss of the dielectric ceramic material can be further reduced, which is preferable.

Further, the composition ratio of TiO _{2 in} the main component is preferably 5% by weight or more and 45% by weight or less, more preferably 10% by weight or more and 35% by weight or less, and 10% by weight or more and 20% by weight or more. Most preferably, it is not more than wt%. When TiO ₂ is less than 5% by weight, the relative dielectric constant cannot be increased, which is not preferable, and when it exceeds 45% by weight, dielectric loss becomes high and sintering becomes difficult, which is not preferable. In particular, when the composition of TiO ₂ is in the range of 10% by weight or more and 20% by weight or less, the relative dielectric constant of the dielectric ceramic material can be increased and the dielectric loss can be further reduced, which is preferable.

When a predetermined amount of MnO ₂ is added to the main component, the dielectric loss of the dielectric ceramic material can be further reduced, and the addition amount is 5 parts by weight or less based on 100 parts by weight of the main component. Is more preferable, 1 part by weight or less is more preferable, 0.05 part by weight or more and 1 part by weight or less is still more preferable, 0.1 part by weight or more and 0.1 part by weight or less.
Most preferably, it is 5 parts by weight or less. If the amount of MnO ₂ α added exceeds 5 parts by weight, the dielectric loss of the dielectric ceramic material increases and the insulation resistance decreases, which is not preferable. Further, if MnO ₂ is not added at all, the dielectric loss cannot be lowered, which is not preferable.

The dielectric ceramic material of the present invention can be manufactured, for example, as follows. First, a powder of glass α or glass β, a powder of Al ₂ O ₃ and TiO _{2 and} a powder of compound γ or MnO ₂ are mixed at a predetermined mixing ratio and pulverized to obtain a raw material powder. Next, this raw material powder is heated at a predetermined temperature for a predetermined time to be pre-baked to obtain a pre-sintered body. Further, after crushing this temporary sintered body, a dispersion medium,
The dielectric ceramic material of the present invention can be obtained by adding a dispersant or the like to form a slurry or paste, molding the mixture into a predetermined shape, and then heating and pressing at a predetermined temperature for a predetermined time and firing. Further, since volume contraction occurs during firing, it is possible to increase the density of the dielectric ceramic material and exert predetermined characteristics by applying pressure while firing.

The calcining temperature is preferably in the range of 600 to 850 ° C, more preferably in the range of 650 to 800 ° C. If the calcination temperature is lower than 600 ° C., the calcination cannot be sufficiently performed, and if it exceeds 850 ° C., the sintering proceeds and the pulverization cannot be performed again, which is not preferable.
Further, the calcination time is preferably 0.5 to 24 hours, more preferably 1 to 5 hours. If the calcination time is less than 0.5 hours, the calcination cannot be sufficiently performed, which is not preferable. If the calcination time exceeds 24 hours, the sintering proceeds and the pulverization cannot be performed again, which is not preferable.

The firing temperature is preferably 800 to 950 ° C, more preferably 850 to 900 ° C. If the firing temperature is lower than 800 ° C, the sintering cannot be sufficiently advanced, the density of the dielectric ceramic material does not increase, and the dielectric ceramic material becomes brittle, which is not preferable. α or glass β and other additives are melted, and powder of Al ₂ O ₃ and TiO ₂ and powder of compound γ or MnO ₂ can be dispersed in glass α or glass β. It is no longer desirable. Also, the firing time is
The range of 0.5 to 24 hours is preferable, and the range of 1 to 5 hours is more preferable. If the firing time is less than 0.5 hours, the sintering cannot be sufficiently advanced, the density of the dielectric ceramic material does not increase, and the dielectric ceramic material becomes brittle, which is not preferable and exceeds 24 hours. And the glass α or the glass β and other additives are melted, and the powder of Al ₂ O ₃ and TiO _{2 and} the powder of the compound γ or MnO ₂ are dispersed in the glass α or the glass β. Is no longer possible, which is not preferable.

The above-mentioned dielectric ceramic materials are Al ₂ O ₃ and T
iO ₂ and compound γ or MnO ₂ are dispersed in glass α or glass β, and each powder of Al ₂ O ₃ , TiO ₂ , compound γ or MnO ₂ originally having a high sintering temperature is By mixing with glass α or glass β powder having a relatively low melting point, sintering can be performed at a relatively low temperature of about 700 to 900 ° C. Further, the characteristics such as the dielectric loss of the dielectric ceramic material are governed by the composition of Al ₂ O ₃ , TiO ₂ , the compound γ or MnO _2. Therefore, by making these compositions proper, the dielectric loss can be improved. It is possible to obtain a small dielectric ceramic material.

The above dielectric ceramic material has a relative dielectric constant of 8 to
It shows a value of about 10, a dielectric loss of 0.005% or less, and an insulation resistance of 1.0 × 10 ¹⁰ Ω or more. As a result, a capacitor having extremely small dielectric loss can be obtained. Further, the above dielectric ceramic material can be applied not only to capacitors but also to dielectrics such as LC filters.

FIG. 1 shows an example of a multilayer capacitor to which the dielectric ceramic material of the present invention is applied. The multilayer capacitor 1 comprises a substantially rectangular parallelepiped laminated body 2 on which side walls are attached external electrodes 3a and 3b having a substantially U-shaped cross section. The laminated body 2 is formed by alternately laminating six internal electrodes 4a ... 4b ... And seven dielectric layers 5 ..., The three internal electrodes 4a are provided on the side wall surface of the laminated body 2. And the other three inner electrodes 4b are joined to the outer electrodes 3b, respectively. Internal electrode 4a
4b are made of Ag (silver), and the dielectric layer 5 ...
Is made of the dielectric ceramic material according to the present invention.

In the multilayer capacitor 1, for example, a dielectric ceramic material that has been calcined is formed into a thin piece shape, and then, for example, a silver paste is sandwiched between a plurality of thin pieces and laminated, and the thin piece is baked. Is sintered and integrated through a silver paste to form a laminated body 2. The laminated body 2
By attaching the external electrodes 3a and 3b to, the multilayer capacitor 1 shown in FIG. 1 is obtained.

[0037]

EXAMPLES Glass α, Al ₂ O ₃ and TiO ₂ , Zn ₂
Prepare each powder of SiO ₄ or MnO ₂ , weigh each powder and put it in a ball mill together with ethanol.
After mixing and pulverizing for 4 hours, it was dried to prepare a raw material powder.
Next, the raw material powder was heated in air at 750 ° C. for 2 hours to perform calcination, and pulverized for 1 hour with a raikai machine to obtain a calcination powder. An aqueous PVA solution is added to and mixed with the pre-baked powder, and then formed into a disk-shaped pellet having a diameter of 20 mm and a thickness of 2 mm, and the pellet is baked in the atmosphere at a temperature of 750 to 950 ° C. for 3 hours. A sintered body made of the dielectric ceramic material of the present invention was obtained.

The relative permittivity, the dielectric loss, the insulation resistance and the shrinkage factor during firing of the obtained sintered body were measured.
The shrinkage ratio was calculated from the amount of dimensional change when pellets were fired. The results are shown in Tables 1 and 2.

[0039]

[Table 1]

[0040]

[Table 2]

As is clear from Table 1, as compound γ
Zn₂SiO_FourSamples 3-5, 7-8 and 10
14 has a dielectric loss of 0.005% or less.
Low dielectric loss is obtained, especially Zn₂SiO_FourIs 1
Samples 10 to 13 with 0 to 20% by weight have dielectric loss
Very low dielectric loss of 0.003% or less
I understand. Regarding the relative permittivity, Samples 10 to 10
13 shows a relatively stable value of 8.6 to 9.7.
It Regarding the insulation resistance, samples 3 to 5 and 7 to 8
And 10 to 14 are 1 × 10 ^TenIt shows a value of Ω or more.

Further, as is clear from Table 2, MnO ₂
Samples 26 to 31 to which is added all have a dielectric loss of 0.
Samples 26 to 29 in which MnO ₂ is 1 part by weight or less, although a low dielectric loss of 0062% or less is obtained.
It can be seen that the sample has a very low dielectric loss of 0.003% or less. Further, regarding the relative dielectric constant, Samples 26 to 29 have a relative dielectric constant of 8.6 regardless of the amount of MnO _2.
It shows a relatively stable value of ˜9.6. Regarding the insulation resistance, Samples 26 to 31 show a value of 6 × 10 ¹⁰ Ω or more.

On the other hand, samples 1, 2, 6, 9 in Table 1
15, 16 and samples 17 to 25 in Table 2 are glass α, A
Since the composition ratio of 1 ₂ O ₃ , TiO ₂ , Zn ₂ SiO ₄ or MnO ₂ is out of the composition range of the present invention, the dielectric loss exceeds 0.005% and the dielectric loss is high. I understand. Among the above samples, Samples 1 and 17
Could not be completely sintered because the glass content was too low. Further, in sample 33, since the glass content was too large, Al ₂ O ₃ , TiO ₂ , and MnO ₂ were melted with the glass.

[0044]

As described above in detail, the dielectric ceramic material of the present invention comprises Al ₂ O ₃ and TiO ₂ and a compound γ.
Alternatively, MnO ₂ is dispersed in glass α or glass β, and Al ₂ O ₃ and T, which originally have a high sintering temperature, are used.
By mixing each powder of iO ₂ , compound γ or MnO ₂ with powder of glass α or glass β having a relatively low melting point, it is possible to sinter at a relatively low temperature of about 700 to 900 ° C. Further, the characteristics such as dielectric loss of the dielectric ceramic material are Al ₂ O ₃ , TiO ₂ , compound γ or M
Since it is governed by the composition of nO ₂ , by optimizing these compositions, it is possible to obtain a dielectric ceramic material with a small dielectric loss.

The above dielectric ceramic material has a relative dielectric constant of 8 to
It shows a value of about 10, a dielectric loss of 0.005% or less, and an insulation resistance of 1.0 × 10 ¹⁰ Ω or more. As a result, a capacitor having extremely small dielectric loss can be obtained. Further, the above dielectric ceramic material can be applied not only to capacitors but also to dielectrics such as LC filters.

[Brief description of drawings]

FIG. 1 is a perspective sectional view showing an example of a multilayer capacitor to which a dielectric ceramic material of the present invention can be applied.

[Explanation of symbols]

1 Multilayer capacitor 2 laminate 3a, 3b External electrode 4a, 4b internal electrodes 5 Dielectric layer (dielectric ceramic material)

─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01G 4/12 358 C04B 35/16

Claims (2)

(57) [Claims] 1. SiO₂And Al₂O₃Must include B₂
O₃And K₂O and ZrO ₂And / or CuO
Glass α containing SiO or SiO₂And CaO and PbO
One of the glass β containing at least and, Al₂O₃And TiO₂When, Zn₂SiO_Four, SrSiO₃, CaSiO₃, ZrSiO
₃At least one compound γ selected from among
It is obtained by mixing and sintering the composition ratios shown below.
A dielectric ceramic material characterized by the following.   Glass α or glass β: 20% by weight or more and 65% by weight or less   Al₂O₃              : 5% by weight or more and 35% by weight or less   TiO₂               : 5 wt% or more and 45 wt% or less   Compound γ: more than 0% by weight and 30% by weight or less 2. SiO₂And Al₂O₃Must include B₂
O₃And K₂O and ZrO ₂And / or CuO
Glass α containing SiO or SiO₂And CaO and PbO
At least one of the glasses β containing at least₂
O₃And TiO₂And are mixed in the composition ratio shown below
As the main component, For 100 parts by weight of this main component, MnO₂Is 5 parts by weight
The following is characterized by being mixed and sintered.
Dielectric ceramic material.   Glass α or glass β: 20% by weight or more and 90% by weight or less   Al₂O₃              : 5% by weight or more and 35% by weight or less   TiO₂              : 5 wt% or more and 45 wt% or less