JP3513342B2 - Optical measuring device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical measuring device suitable for application to a laser measuring device for performing optical measurement from a pipe of, for example, an incinerator or a coal furnace.

[0002]

2. Description of the Related Art In an incinerator, a coal furnace, etc., when optical measurement is performed from a pipe of a laser measuring device, a medium is measured from a measured part to a measuring device provided with a measuring device main body (measuring device). Dust, dust, combustion gas, etc. flow in and pollute the measuring device body, which causes deterioration of measurement accuracy.
If it is forced, there arises a problem of causing a failure of the measuring device body.

In order to solve such a problem, conventionally, as shown in FIG. 13, a gas is jetted into the furnace from a measurement hole 01b provided in a wall surface 01a of the furnace accommodating the measuring device body 02. The method, or the method of installing the window 03 in the measurement hole 01b as shown in FIG. 14, or the method of combining the gas injection into the furnace and the installation of the window 03 as shown in FIG. There is.

Here, in the conventional example shown in FIGS. 13 to 15, the cross-sections of the flow paths forming the measurement holes have the same cross-sectional area shape on the measured portion side and the measuring device body side. . In the method of the conventional example shown in FIG. 13, the measured part and the measuring device are
Since they are connected by a large opening (a flow path having a large opening area), it is difficult to reliably prevent the particles and the combustion gas from entering the measuring device side. Further, in order to enhance the prevention effect, it is necessary to increase the flow velocity of the ventilation gas in the flow path. Such an increase in the flow rate of the ventilation gas not only changes the state of the portion to be measured, but also causes an increase in the amount of the ventilation gas, which causes a malfunction in operation.

In the conventional method shown in FIG. 14, particles and combustion gas do not invade from the part to be measured into the main body of the measuring device, but particles adhere to the window or the components of combustion gas Aggregation and the like occurs, which interferes with optical measurement.

The conventional method shown in FIG. 15 can prevent particles, combustion gas, and the like from entering the main body of the measuring device, which is a problem of the conventional example shown in FIG. It is necessary to increase the flow rate of the gas in the air. Moreover, even under such a condition, it is difficult to reliably prevent the window portion from being soiled within a flow rate range that can be industrially implemented.

[0007]

As described above, in the conventional optical measuring device, dust particles, dust, and so on are introduced from the part to be measured to the measuring device side where the measuring device body (measuring device) is provided.
There has been no effective means for solving the problem that the measuring device body is contaminated by the inflow of combustion gas and the like.

That is, in the method of the conventional example shown in FIG. 13, the portion to be measured and the measuring device are connected by a large opening (a channel having a large opening area), so that the particles to the measuring device side are connected. -It is difficult to reliably prevent the invasion of combustion gas, and in order to enhance the prevention effect, it is necessary to increase the flow velocity of ventilation gas in the flow path. There is a problem that not only the state of the measuring unit is changed but also the amount of ventilation gas is increased, which causes a malfunction in operation.

Further, in the method of the conventional example shown in FIG. 14, particles, combustion gas, etc. do not enter from the part to be measured to the measuring device main body, but particles adhere to the window part, or There is a problem in that the components of the combustion gas are aggregated and the optical measurement is hindered.

Further, in the method of the conventional example shown in FIG. 15, it is possible to prevent particles, combustion gas, and the like from entering the measuring device body side, which is a problem of the conventional example shown in FIG. However, it is necessary to increase the flow rate of the ventilation gas in the flow path, and there is a problem that it is difficult to reliably prevent the window portion from being soiled within the industrially applicable flow rate range.

The present invention has been made in view of the above circumstances,
In an optical measuring device in which the measuring device main body performs measurement through a flow path forming a measuring hole, the shape and structure of the flow path connecting the measuring hole and the measuring device main body are characterized by The problem that the measuring device body is contaminated by dust, dust, combustion gas, etc. flowing into the measuring device side where the measuring device body (measuring instrument) is installed from the measuring unit is also highly practical and economical. An object of the present invention is to provide an optical measuring device having an advantageous configuration.

Further, the present invention provides an optical measuring device capable of preventing particles, combustion gas and the like from flowing into the measuring hole with a small amount of ventilation gas by giving the above-mentioned flow passage a feature. To aim.

Further, the present invention is characterized by the combination of the shape and structure of the above-mentioned flow path, so that the inflow of particles and fuel gas to the measuring device main body side is reliably prevented, and the performance of the measuring device main body is deteriorated. An object of the present invention is to provide an optical measuring device capable of reducing the noise.

Another object of the present invention is to provide an optical measuring device capable of ensuring a stable visual field for a long period of time by giving the combination of the shape and structure of the above-mentioned flow path a characteristic.

Further, the present invention is characterized by the combination of the shape and structure of the above-mentioned flow path, so that the dust entering the measuring device main body side can be returned to the measured part side, and a stable visual field can always be secured. An object is to provide an optical measuring device.

Further, the present invention is characterized by the combination of the shape and structure of the above-mentioned flow paths, so that the dust that has entered the measuring device main body side is accumulated on the measuring device main body side and reappears, or the measuring device main body An object of the present invention is to provide an optical measuring device capable of surely collecting invaded dust without obstructing the visual field. Further, the present invention provides an optical measuring device capable of efficiently pushing back the dust having a force to enter the flow path with a small gas flow rate, by giving a feature to the combination of the shape and the structure of the flow path. The purpose is to

[0017]

[Means for Solving the Problems] In the optical measurement method,
In the method that requires focusing on the optical axis, the measurement is not hindered even by the method of condensing at the measured portion. In view of this, in the present invention, the shape of the flow path of the measuring portion is set so as to narrow the cross-sectional area of the flow path along the optical path in the gas flow direction. The window installed in the flow path has a structure in which a device for removing dirt is installed. Further, in order to easily remove the removed dirt, the flow path is oriented downward in the gas flow direction.

That is, according to the present invention, in an optical measuring device in which a measuring device main body performs measurement through a flow path forming a measuring hole, the shape of the flow path connecting the measuring hole and the measuring device main body to the optical path. According to the shape, the flow path cross-sectional area on the measured part side is smaller than the flow path cross-sectional area on the measuring device main body side.

Further, in the above optical measuring device,
It is characterized in that a window is provided. Further, in the above-mentioned optical measuring device, the flow path is provided with a means for flowing gas from the measuring device main body side to the measured portion side.

Further, in the above optical measuring device, a window portion provided in the flow path and a gas, powder or liquid for removing a substance adhering to the window portion which obstructs the measurement is added to the window portion. And a means for ejecting to.

Further, in the above-mentioned optical measuring device, a vibrating machine for vibrating the window portion provided in the flow path and the window portion in order to remove the substance that interferes with the measurement adhered to the window portion. It is characterized by comprising:

Further, in the above optical measuring device, the flow path is attached downward so that the measured portion side is lower than the measuring device main body side. Further, in the above optical measuring device, the flow path for passing the gas on the measured part side is narrower than that on the measuring device main body side, and the lower side of the flow path expands downward in the part close to the measured part side. It is characterized by having a shape measurement hole.

Further, in the above-mentioned optical measuring device, a plurality of gas jet ports having a small diameter toward the measurement hole are provided in the vicinity of the measured portion side of the flow path. Further, in the above optical measuring device, a window is provided between the measured part side of the flow path and the measuring device main body side, and the measured part side flow path inner wall part partitioned by the window is measured from the measured part side. A gas containing positive or negative ions is made to flow toward.
Further, in the above optical measuring device, a container for receiving dust is provided between the measured portion of the flow path and the measuring device side.

[0024]

As described above, in the optical measurement method that requires focusing on the optical axis, the measurement is not impeded even by the method of collecting light at the measured portion. Taking a circular channel as an example,
Let D be the diameter of the condenser lens, D1 be the outlet diameter of the flow path, L be the distance between the condenser lens and the outlet of the flow path, and θ be the angle of light collection.

Here, in the conventional example, since the diameter of the flow path is constant with the diameter of the condenser lens, when the required external flow velocity is v, the amount of ventilation gas: Q0 is shown below. Q0 = π / 4 · D ² · ρ · v (1) Here, since the same preventive effect can be obtained by making the gas flow velocities at the flow path outlets the same, the vent gas in the flow path of the present invention can be obtained. Quantity: Q1 is represented by the following formula.

[0026] Q1 = π / 4 · (D -2 · L · tan θ) 2 · ρ · v ... (2) That is, it is possible to reduce the ventilation gas amount in the following proportions. Q1 / Q0 = ((D-2.L.tan .theta.) / D) ² (3) That is, letting A0 be the cross-sectional area of the condensing lens portion and A1 the cross-sectional area of the measurement hole of the present invention, the ventilation gas. The amount can be reduced at the following rates.

Q1 / Q0 = A1 / A0 (4) Further, in order to remove the dirt adhering to the window portion by jetting the fluid, the fluid is applied at a flow velocity V such that the removing force by the fluid is larger than the adhering force. Dirt can be removed by attaching it.

Further, in the case of removal by vibration, dirt can be removed by applying acceleration due to vibration in a direction opposite to the adhesive force so that the removing force by vibration becomes larger than the adhesive force. In addition, it is possible to increase the gas flow velocity on the outlet side by installing the flow path downward and reducing the shape of the opening flow path in the gas flow direction.

By installing the flow path horizontally or downward (in the direction of gravity), the substance that has entered the flow path and accumulated at the bottom of the flow path, or the substance that has adhered to the window and has been removed is measured. It is possible to remove to the side.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 are characterized by the shape and structure of the flow path connecting the measuring hole and the measuring device body.

FIG. 1 is a diagram showing a first embodiment of the present invention, and here shows a configuration of a cross section (longitudinal section) in the optical axis direction. In FIG. 1, 10 is a container, 11a is a wall surface on the measured portion side, 11b is a measurement hole, 11c is a seal gas introduction port, 1
Reference numeral 1d is a flow path, and 12 is a measuring device main body (measuring instrument) housed in the container 10.

The measuring hole 11b provided in the wall surface 11a on the measured portion side is communicated with the inside of the container 10 accommodating the measuring device body 12 through the flow path 11d. The measuring device main body 12 in the container 10 performs optical measurement of the measured portion via the flow path 11d and the measurement hole 11b provided in the wall surface 11a.

Here, the measuring hole 11b and the measuring device main body 12
The flow path 11d that connects the parts has a shape in which the cross-sectional area of the flow path on the measured portion side is smaller than the cross-sectional area of the measurement device main body side along the optical path shape.

By using the optical measuring device having the above-described structure, the gas flow velocity at the outlet of the flow passage 11d can be increased with a smaller amount of gas flow, and the dust or the like having a force to enter the flow passage 11d can be pushed back at the flow velocity. As a result, it is possible to efficiently prevent the particles, the combustion gas, and the like from flowing into the measurement hole 11b.

As a result, a stable field of view can be secured for a long period of time, and stable and highly accurate optical measurement can be maintained. FIG. 2 is a vertical sectional view showing the second embodiment of the present invention.

In FIG. 2, 20 is a container, 21a is a wall surface on the side of the measured portion, 21b is a measurement hole, 21c is a seal gas inlet, 21d is a flow path, and 22 is a measuring device housed in the container 20. The main body (measuring instrument) has a structure in which the measurement hole 21b provided in the wall surface 21a on the measured portion side projects from the wall surface 21a on the measured portion side.

The measurement hole 21b provided in the wall surface 21a on the measured portion side is communicated with the inside of the container 20 accommodating the measuring device body 22 via the flow path 21d, and the measuring device body 22 in the container 20 is connected to the flow path. 21d and the measurement hole 21b provided on the wall surface 21a are used to perform optical measurement of the measured portion.

In this embodiment as well, as in the first embodiment, the flow path 21d connecting the measuring hole 21b and the measuring device main body 22 along the optical path shape has a cross-sectional area of the measured part side flow path. It has a shape smaller than the cross-sectional area of the flow path on the measuring device main body side, so that the flow path 21 can be formed with a smaller amount of vent gas.
Since the flow velocity of the gas at the d outlet can be increased to push back the dust and the like having a force to enter the flow passage 21d at the flow velocity, it is possible to prevent the inflow of particles, combustion gas, and the like into the measurement hole 21b.

FIG. 3 is a vertical sectional view showing a third embodiment of the present invention. In FIG. 3, reference numeral 30 is a container, 31a is a wall surface on the measured portion side, 31b is a measurement hole, 31c is a seal gas inlet, 31d is a flow path, and 32 is a measuring device body (measurement body) housed in the container 30. In this example, the measurement hole 31b provided in the wall surface 31a on the measured portion side is the wall surface 3 on the measured portion side.
The structure is recessed from 1a.

The measurement hole 31b provided in the wall surface 31a on the measured portion side is communicated with the inside of the container 30 accommodating the measuring device main body 32 through the flow path 31d, and the measuring device main body 32 in the container 30 is connected to the flow path. Optical measurement of the measured portion is performed through 31d and the measurement hole 31b provided on the wall surface 31a.

In this embodiment as well, as in each of the above-described embodiments, the flow path 31d connecting the measuring hole 31b and the measuring device main body 32 is measured along the optical path shape to measure the cross-sectional area of the flow path on the measured part side. It has a shape smaller than the cross-sectional area of the flow path on the device body side, and therefore, the flow path 31d can be formed with a smaller amount of vent gas.
Since the flow velocity of the gas at the outlet can be increased and the dust and the like having a force to enter the flow passage 31d can be pushed back at the flow velocity, the inflow of particles, combustion gas, etc. into the measurement hole 31b can be prevented.

In each of the above-mentioned embodiments, the flow paths (11d, 2
1d, 31d) is the measuring device body (12, 22, 32)
Is a shape in which the cross-sectional area is reduced along the optical path shape from the direction toward the measured portion.

FIG. 4 is a longitudinal sectional view showing a fourth embodiment of the present invention, which is characterized by the combination of the shape and structure of the flow path connecting the measuring hole and the measuring device main body. In FIG. 4, 4
Reference numeral 0 is a container, 41a is a wall surface on the measured portion side, 41b is a measurement hole, 41c is a seal gas introduction port, 41d is a flow path, and 42 is a measuring device main body (measuring instrument) housed in a container 40,
Here, the cross-sectional area of the flow path 41d is not a shape that shrinks along the optical path shape as in the first to third embodiments, but a shape that decreases stepwise toward the measured portion. At this time, the flow path 41d needs to have a shape that does not obstruct the optical path.

The measurement hole 41b provided in the wall surface 41a on the measured portion side is communicated with the inside of the container 40 accommodating the measuring device main body 42 via the flow path 41d, and the measuring device main body 42 in the container 40 is connected to the flow path. Optical measurement of the measured portion is performed via 41d and a measurement hole 41b provided in the wall surface 41a.

In this embodiment as well, as in each of the above-described embodiments, the flow path 41d connecting the measuring hole 41b and the measuring device main body 42 is measured along the optical path shape to measure the cross-sectional area of the flow path on the measured portion side. The flow path 41d has a shape smaller than the flow path cross-sectional area of the main body of the apparatus, and therefore the flow path 41d can be formed with a smaller amount of gas.
Since the flow velocity of the gas at the outlet can be increased to push back the dust and the like having a force to enter the flow passage 41d at the flow velocity, it is possible to prevent the inflow of particles, combustion gas, and the like into the measurement hole 41b.

In each of the embodiments shown in FIGS. 1 to 4 described above, the flow path (11d, 21d, 31d, 41d) may have any of a circular cross section, an elliptical cross section and a polygonal cross section. Good. Further, in each of the embodiments shown in FIGS. 1 to 4, the introduction port of the seal gas is shown to be provided at only one place of the container, but it may be provided at a plurality of places. Also, a plurality of them may be installed in the flow path.

FIG. 5 is a longitudinal sectional view showing a fifth embodiment of the present invention, which is characterized by the combination of the shape and structure of the flow path connecting the measuring hole and the measuring device main body. In FIG. 5, 5
0 is a container, 51a is a wall surface on the measured portion side, 51b is a measurement hole, 51c is a seal gas inlet, 51d is a flow path, 52 is a measuring device main body (measuring instrument) housed in a container 50, and 53 is a flow. A window provided in the passage 51d for partitioning the passage 51d into the measured portion side and the measuring device body side.

The measuring hole 51b provided on the wall surface 51a on the measured portion side has a channel 50d and a container 50 accommodating the measuring device main body 52 through a window 53 provided in the channel 51d.
And the measurement device main body 52 is connected to the window 53 provided in the flow path 51d, and the measurement hole 51b provided in the wall surface 51a.
The optical measurement of the measured portion is performed via.

In this embodiment as well, as in each of the above embodiments, the flow path 51d connecting the measurement hole 51b and the measuring device main body 52 is measured along the optical path shape to measure the cross-sectional area of the flow path on the measured part side. The flow path 51d has a shape smaller than the flow path cross-sectional area of the main body of the apparatus, so that the flow path 51d can be formed with a smaller amount of gas.
Since the flow velocity of the gas at the outlet can be increased and the dust and the like having the force to enter the flow passage 51d can be pushed back at the flow velocity, the inflow of particles and combustion gas into the measurement hole 51b can be prevented.

Further, in the embodiment shown in FIG. 5, the gas supplied to the inlet 51c for the seal gas is led to the measured portion side of the window 53 in the flow path 51d via the inside of the container 50 and the piping. Then, the ejected gas removes substances such as dust that adhere to the window 53 and obstruct the measurement.

This makes it possible to reliably prevent the particles, fuel gas, and the like from flowing into the measuring device main body 52 side by the window 53, prevent the performance of the measuring device main body 52 from deteriorating, and keep the window 53 clean. By removing it, a stable visual field can be secured for a long period of time, and stable and high measurement accuracy can be maintained.

In the fifth embodiment, the gas introduced into the container 50 through the seal gas inlet 51c may be supplied from a plurality of systems, for example, or the seal gas inlet 51c. The number of gas ejection ports and the like is not limited to one and may be plural.

Further, in the fifth embodiment, the substance such as dust that adheres to the window 53 and obstructs the measurement is removed by the gas, but powder or liquid is ejected to the window 53 in addition to the gas. It is also possible to clean the window 53 by.
Further, the cross-sectional shape of the flow channel 51d may be circular, elliptical, or polygonal as in the above embodiments.

In the fifth embodiment, the measuring hole 51b is also provided.
Is provided on the wall surface 51a on the measured portion side. For example, the structure protruding from the wall surface 51a as shown in the second embodiment or the wall surface 5 as shown in the third embodiment.
The structure may be recessed from 1a.

In the fifth embodiment, the measuring hole 51b is also provided.
The flow path 51d connecting the measuring device main body 52 and the measuring device main body 52 has a shape in which the measured-part-side flow path cross-sectional area is smaller than the measuring-device main body-side flow path cross-sectional area along the optical path shape. Is not limited to the flow passage shape, and the flow passage shape may be such that the cross-sectional area is reduced stepwise as shown in the fourth embodiment, but it is necessary that the flow passage shape does not obstruct the optical path. is there. Also in this case, the cross-sectional shape of the channel may be circular, elliptical or polygonal.

FIG. 6 is a vertical cross-sectional view showing a sixth embodiment of the present invention, which is characterized by the combination of the shape and structure of the flow path connecting the measuring hole and the measuring device body, and is shown in FIG. The configuration is a further development of the fifth embodiment.

In FIG. 6, reference numeral 60 is a container, 61a is a wall surface on the side to be measured, 61b is a measurement hole, 61c is a seal gas inlet, 61d is a flow path, and 62 is a measuring device housed in the container 60. A main body (measuring device) 63 is a window provided in the flow path 61d for partitioning the flow path 61d into the measured portion side and the measuring device main body side. Reference numeral 61e denotes a dirt removing gas introduction port for spraying a dirt removing gas to the measured part side of the window 63 that partitions the inside of the flow path 61d into the measured part side and the measuring device body side, and a peripheral part of the window 63. A dirt-removing gas is sprayed onto the surface of the window 63 on the measured portion side to remove dust adhering to the window 63.

The measuring hole 61b provided on the wall surface 61a on the measured portion side has a channel 60d and a container 60 accommodating the measuring device main body 62 through a window 63 provided in the channel 61d.
And the measuring device main body 62 communicates with the window 63 provided in the flow path 61d, and the measuring hole 61b provided in the wall surface 61a.
The optical measurement of the measured portion is performed via.

In this embodiment as well, as in each of the above embodiments, the flow path 61d connecting the measuring hole 61b and the measuring device main body 62 is measured along the optical path shape to measure the cross-sectional area of the flow path on the measured portion side. The flow path 61d has a shape smaller than the flow path cross-sectional area of the main body of the apparatus.
Since the flow velocity of the gas at the outlet can be increased and the dust and the like having the force to enter the flow passage 61d can be pushed back at the flow velocity, the inflow of particles, combustion gas, and the like into the measurement hole 61b can be prevented.

Further, in the embodiment shown in FIG. 6, the gas supplied to the inlet 61c for the seal gas is led out to the measured portion side of the window 63 in the channel 61d via the inside of the container 60 and the pipe. The ejected gas removes substances such as dust adhering to the window 63, which obstruct the measurement, and ejects the ejected gas from the dirt removing gas introduction port 61e from the peripheral portion of the window 63 to the measured portion of the window 63. The surface of the window 63 is sprayed to remove dust and the like adhering to the surface of the window 63 on the side of the measured portion to keep the window 63 in a clean state.

This makes it possible to reliably prevent the particles, fuel gas, and the like from flowing into the measuring device main body 62 side by the window 63, prevent the performance of the measuring device main body 62 from deteriorating, and keep the window 63 clean. By removing it, a stable visual field can be secured for a long period of time, and stable and high measurement accuracy can be maintained.

Also in the sixth embodiment, the same modification / expansion structure as that of the fifth embodiment shown in FIG. 5 is possible.
FIG. 7 is a vertical cross-sectional view showing a seventh embodiment of the present invention, which is characterized by the combination of the shape and structure of the flow path connecting the measuring hole and the measuring device main body, and the fifth embodiment shown in FIG. The structure is more developed.

In FIG. 7, 70 is a container, 71a is a wall surface on the measured portion side, 71b is a measuring hole, 71c is a seal gas inlet, 71d is a flow path, and 72 is a measuring device housed in the container 70. A main body (measuring instrument) 73 is a window provided in the flow path 71d for partitioning the flow path 71d into the measured portion side and the measuring apparatus main body side. Reference numeral 74 is a vibrator for applying vibration to the window 73 to remove dirt on the window 73, and is connected to the window 73 via a connecting mechanism such as a connecting rod.

The measurement hole 71b provided on the wall surface 71a on the measured portion side has a flow path 71d and a container 70 containing the measuring device main body 72 through a window 73 provided in the flow path 71d.
And a measurement hole 71b provided in the wall surface 71a and a window 73 provided in the flow path 71d.
The optical measurement of the measured portion is performed via.

Also in such an embodiment, as in each of the above-described embodiments, the flow path 71d connecting the measuring hole 71b and the measuring device main body 72 measures the cross-sectional area of the flow path on the measured portion side along the optical path shape. The shape is smaller than the cross-sectional area of the flow path on the apparatus main body side, and therefore, the flow path 71d can be formed with a smaller amount of ventilation gas.
Since the gas flow velocity at the outlet can be increased and the dust or the like having the force to enter the flow passage 71d can be pushed back at the flow velocity, the inflow of particles, combustion gas, etc. into the measurement hole 71b can be prevented.

Further, in the embodiment shown in FIG. 7, the gas supplied to the inlet 71c for the seal gas is led to the measured portion side of the window 73 in the flow passage 71d via the inside of the container 70 and the piping. The ejected gas removes dust and other substances adhering to the window 73 that interfere with measurement, and the vibrator 74 and the window 73 are connected by a connecting mechanism such as a connecting rod.
Vibration is applied to the window 73 by the vibration exciter 74, and adhesion of substances such as dust that hinders measurement to the window 73 is prevented.

This makes it possible to reliably prevent particles, fuel gas, and the like from flowing into the measuring device main body 72 side by the window 73, prevent the performance of the measuring device main body 72 from deteriorating, and prevent dusts and other substances from collecting. It is possible to eliminate a defect attached to the window 73, to secure a stable visual field for a long period of time, and to maintain stable and high measurement accuracy.

Also in the seventh embodiment, the same modified / expanded structure as that of the fifth embodiment shown in FIG. 5 is possible.
FIG. 8 is a vertical cross-sectional view showing an eighth embodiment of the present invention, which is characterized by the combination of the shape and structure of the flow path connecting the measuring hole and the measuring device body. Here, the measuring hole is arranged downward. It has been configured.

In FIG. 8, 80 is a container, 81a is a wall surface on the measured portion side, 81b is a measurement hole arranged downward, and 81 is a measuring hole.
Reference numeral c is a seal gas inlet, 81d is a flow path provided downward in the gas flow direction, and 82 is a measuring device main body (measuring instrument) housed in a container 80.

The downward measuring hole 81b provided on the wall surface 81a on the measured portion side communicates with the container 80 accommodating the measuring device main body 82 through the flow path 81d and the window 83 provided in the flow path 81d. The measurement device main body 82 is connected to the flow path 81d,
Also, optical measurement of the measurement target portion is performed through the downward measurement hole 81b provided in the wall surface 81a.

In such an embodiment as well, as in each of the above-described embodiments, the downward measuring hole 81b and the measuring device main body 82 are provided.
The flow path 81d connecting the flow path 81d has a shape in which the flow path cross-sectional area on the measured portion side is smaller than the flow path cross-sectional area on the measurement device main body side along the optical path shape. Since the flow velocity of the gas at the outlet can be increased and the dust and the like having a force to enter the flow path 81d can be pushed back at the flow velocity, the inflow of dust, dust, particles and the like into the measurement hole 81b can be prevented.

Furthermore, in the eighth embodiment shown in FIG.
Since the measurement hole 81b and the flow path 81d face downward, it is possible to prevent dust, dust, particles, and the like from flowing into the measurement hole 81b with a smaller gas flow rate than the above-described embodiments. Further, even if a substance such as particles is deposited in the lower portion of the flow path 81d, the substance such as particles can be easily removed inside the furnace.

As a result, a stable visual field can be secured for a long period of time, and stable and highly accurate optical measurement can be maintained. Also in this eighth embodiment, as shown in FIG.
The same modification / expansion structure as that of the embodiment shown in FIG. 7 is possible.

FIG. 9 is a vertical cross-sectional view showing a ninth embodiment of the present invention, which is characterized by the shape of the flow path and the shape of the measuring hole that connect the measuring hole and the measuring device body. Is arranged downward.

In FIG. 9, reference numeral 90 is a container, 91a is a wall surface on the measured portion side, 91b is a measurement hole, 91c is a seal gas inlet, 91d is a flow path, and 92 is a measuring device housed in the container 90. It is the main body (measuring instrument).

Reference numeral 91f is an opening in which the outlet of the flow passage 91d forming the measurement hole 91b on the measured portion side is inclined so as to open to the measured portion side and only the lower part is partially opened.
An inclined path is formed for returning the dust, dust, and the like on the side of the measured part that is about to enter the d to the side of the measured part.

The measuring hole 91b provided in the wall surface 91a on the measured portion side is communicated with the container 90 accommodating the measuring device main body 92 through the flow path 91d, and the measuring device main body 92 is connected to the flow path 9d.
Optical measurement of the measured portion is performed through 1d and the measurement hole 91b provided in the wall surface 91a.

In this embodiment as well, as in each of the above-described embodiments, the flow path 91d connecting the measuring hole 91b and the measuring device main body 92 is measured along the optical path shape to measure the cross-sectional area of the flow path on the measured portion side. It has a shape smaller than the flow path cross-sectional area of the apparatus main body side.
Since the gas flow velocity at the outlet can be increased and the dust or the like that is trying to enter the flow passage 91d can be pushed back at the flow velocity, the inflow of dust, dust, particles or the like into the measurement hole 91b can be prevented.

Further, in the ninth embodiment shown in FIG. 9,
At the outlet of the flow passage 91d forming the measurement hole 91b on the measured portion side, an opening (inclined road) 91f that is obliquely widened so as to open to the measured portion side is provided to overcome the gas flow and flow passage 91
Since the dust, dust, etc. on the side of the measured portion that tries to enter the d are configured to travel along the opening (tilt) 91f and fall to the side of the measured portion, the measurement hole 91b for measuring dust, dust, particles, etc. It is possible to enhance the effect of preventing the inflow to.

Also in the ninth embodiment, as shown in FIG.
The same modification / expansion structure as that of the embodiment shown in FIG. 7 is possible. FIG. 10 is a vertical cross-sectional view showing a tenth embodiment of the present invention, which is characterized by the shape of the flow path connecting the measurement hole and the measuring device body and the shape of the measurement hole. A plurality of gas outlets having a small diameter toward the measurement hole are provided near the portion side.

In FIG. 10, X0 is a container, X1a is a wall surface on the measured portion side, X1b is a measurement hole, X1c is a seal gas inlet, X1d is a flow path, and X2 is a measuring device housed in a container X0. It is the main body (measuring instrument).

X3 is in the vicinity of the portion to be measured in the channel X1d,
It is a plurality of small-diameter gas outlets provided toward the measurement hole X1b, and at the outlet of the flow path X1d forming the measurement hole X1b, dust, dust, etc. on the measured portion side that tries to enter the flow path X1d. A gas for returning the gas to the measured portion side is ejected.

The measurement hole X1b provided in the wall surface X1a on the measured portion side is communicated with the container X0 accommodating the measuring device main body X2 via the flow path X1d, and the measuring device main body X2 is connected to the flow path X1.
Optical measurement of the measured portion is performed through 1d and the measurement hole X1b provided on the wall surface X1a.

Also in such an embodiment, the channel X1d connecting the measuring hole X1b and the measuring device body X2 is measured along the optical path shape in the same manner as in the above-mentioned respective embodiments to measure the cross-sectional area of the channel on the measured portion side. The shape is smaller than the cross-sectional area of the flow path on the device body side. Therefore, the flow path X1d can be formed with a smaller amount of ventilation gas.
Since the flow velocity of the gas at the outlet can be increased and the dust or the like having a force to enter the flow path X1d can be pushed back at the flow velocity, the inflow of dust, dust, particles or the like into the measurement hole X1b can be prevented.

Further, in the tenth embodiment shown in FIG. 10, dust, dust, etc. on the measured portion side which is going to enter the flow passage X1d is output to the outlet of the flow passage X1d forming the measurement hole X1b on the measured portion side. Gas for returning to the measured part side is measured hole X1
Since a plurality of gas outlets X3 having a small diameter for ejecting toward b are provided, the measurement hole X1b for dust, dust, particles, etc.
It is possible to further enhance the effect of preventing the inflow to.

Also in the tenth embodiment, the same modification / expansion structure as that of the embodiment shown in FIGS. 4 to 7 and 9 is possible. FIG. 11 is a vertical cross-sectional view showing an eleventh embodiment of the present invention, which is characterized by the shape of the flow path connecting the measuring hole and the measuring device body and the shape of the measuring hole. The gas containing positive or negative ions is made to flow from the inner wall portion of the flow path on the measured portion side toward the measured portion side.

In FIG. 11, Y0 is a container, Y1a is a wall surface on the measured portion side, Y1b is a measurement hole, Y1c is an ion gas inlet, Y1d is a flow path, and Y2 is a measuring device housed in the container Y0. A main body (measuring instrument) Y3 is a window provided in the flow path Y1d for partitioning the flow path Y1d into the measured portion side and the measuring device main body side.

The measurement hole Y1b provided in the wall surface Y1a on the measured portion side is communicated with the container Y0 accommodating the measurement device body Y2 through the flow passage Y1d and the window Y3 in the flow passage Y1d, and the measurement device body Y2 optically measures the portion to be measured through the flow path Y1d, the window Y3, and the measurement hole Y1b provided in the wall surface Y1a.

Also in such an embodiment, the flow path Y1d connecting the measuring hole Y1b and the measuring device main body Y2 is measured along the optical path shape in the same manner as in the above-described embodiments, and the flow path cross-sectional area on the measured portion side is measured. The shape of the flow path Y1d is smaller than that of the flow path Y1d on the apparatus main body side.
Since the gas flow velocity at the outlet can be increased and the dust or the like that is trying to enter the flow path Y1d can be pushed back at the flow velocity, the inflow of dust, dust, particles or the like into the measurement hole Y1b can be prevented.

Further, in the eleventh embodiment shown in FIG. 11, the ion gas introduced from the ion gas inlet Y1c is directed from the inner wall portion of the flow path on the measured portion side partitioned by the window Y3 toward the measured portion side. Since it is configured to eject, it is possible to solve the problem that charged dust, dust, and the like are attracted to the window Y3 by electrostatic force.

That is, in the flow path Y1d between the measured part and the measuring device body Y2, the ion gas inlet Y1 is introduced from the measured part side flow path inner wall section partitioned by the window Y3 toward the measured part side.
Gas containing positive or negative ions introduced from c is blown out.

At this time, a gas having positively or negatively charged ions flows from the periphery of the measurement target side of the window Y3, the gas is accelerated as the diameter of the flow path Y1dk becomes narrower, and the gas is moved toward the measurement target side. Blown out.

As a means for realizing this, the ion gas inlet Y1c or the window Y3 communicating with the ion gas inlet Y1c is used.
It is possible to generate ions by attaching an ion generator to a gas outlet provided around the ion generator and applying a high voltage between the electrodes by the ion generator. As a result, a gas having positively and negatively charged ions flows from around the measured portion side of the window Y3 and is blown toward the measured portion side. Therefore, for example, dust or dust charged due to various phenomena such as friction. And the like are neutralized by the gas containing the ions blown from the periphery of the window Y3, lose the electrostatic force, settle in the flow path Y1d, or are pushed by the flow of gas and flow toward the measurement target side, Problems such as being attracted to and attached to the window Y3 by electrostatic force can be eliminated.

Also in the eleventh embodiment, the same modified / expanded structure as that of the embodiment shown in FIGS. 4 to 10 is possible. FIG. 12 is a vertical cross-sectional view showing a twelfth embodiment of the present invention, which is characterized by the shape of the flow path and the shape of the measurement hole connecting the measurement hole and the measurement device main body.
A container for receiving dust such as dust and dust is provided between the measured portion of the flow path and the measuring device side.

In FIG. 12, Z0 is a container, Z1a is a wall surface on the measured portion side, Z1b is a measurement hole, Z1c is a seal gas inlet, Z1d is a flow path, and Z2 is a measuring device housed in the container Z0. Main body (measuring instrument), Z4 is a waste collection container, Z5 is a partition plate provided between the flow path Z1d and the waste collection container Z4, and Z6 is dust collected in the waste collection container Z4. is there.

The measurement hole Z1b provided on the wall surface Z1a on the measured portion side is communicated with the container Z0 accommodating the measuring device main body Z2 via the flow path Z1d, and the measuring device main body Z2 is connected to the flow path Z1.
1d and the measurement hole Z1b provided in the wall surface Z1a are used to perform optical measurement of the measured portion.

In this embodiment as well, as in each of the above-described embodiments, the flow path Z1d connecting the measurement hole Z1b and the measuring device main body Z2 is measured along the optical path shape to measure the cross-sectional area of the flow path on the measured portion side. It has a shape smaller than the flow passage cross-sectional area of the device main body side, and therefore, the flow passage Z1d can be formed with a smaller amount of gas.
Since the gas flow velocity at the outlet can be increased and the dust or the like having a force to enter the flow path Z1d can be pushed back at the flow velocity, the inflow of dust, dust, particles or the like into the measurement hole Z1b can be prevented.

Further, in the twelfth embodiment shown in FIG. 12, a dust collecting container Z4 for collecting dust such as dust and dust that has entered the flow passage Z1d on the lower side of the flow passage Z1d.
The dust such as dust and dust that has entered the flow path Z1d falls to the bottom of the flow path Z1d, falls into the dust collection container Z4, and does not reach the measuring device body Z2. Further, since the garbage collecting container Z4 is provided with a partition plate Z5 in the middle thereof and further provided with a dust take-out hole at the bottom of the container, dust and dust accumulated in the container without disturbing the gas flow inside the container. It is possible to take out such garbage.

As a result, even if dust such as dust or dust enters the flow path Z1d, it is collected in the dust collecting container Z4 in the flow path Z1d, and further dust that enters the flow path Z1d,
It is also possible to solve the problem that dust such as dust is accumulated in the flow path Z1d, and dust such as accumulated dust and dust flows again due to the flow of gas.

As described above, according to each of the above-described embodiments, it is possible to prevent dust, dust, particles and the like from flowing into the measurement hole with a small amount of ventilation gas. Further, in addition to the above functions, by installing a window for preventing the inflow of particles, fuel gas, etc. to the measuring device body side, it is possible to reduce the performance deterioration of the measuring device body.

Further, by adding a device for removing dirt on the window, a stable visual field can be secured for a long period of time. Further, dust, dust, and the like that have entered the flow path can be returned to the measured portion side.

Further, by collecting the dust, dust, and the like that have entered the flow passage in the flow passage, the dust, the dust, and the like do not accumulate in the flow passage and fly again or obstruct the measurement field of view. It is possible to reliably collect dust, dust, and the like that have entered the flow path.

Further, it is possible to always measure in a clean state without polluting the window. Also, with a relatively low flow rate,
It is possible to push back the vigorous dust, dust, etc. that try to enter the flow path at the flow velocity.

[0104]

As described above in detail, according to the present invention, in the optical measuring device which performs measurement through the flow path in which the measuring device body forms the measuring hole, the measuring hole and the measuring device body are By giving the shape and structure of the flow path to be connected to the measuring device, dust, dust, combustion gas, etc. will flow from the part to be measured to the measuring device side where the measuring device body (measuring device) is installed. It is possible to provide an optical measuring device having a highly practical and economically advantageous configuration that solves the problem that the main body side is contaminated.

Further, according to the present invention, it is possible to provide an optical measuring device capable of preventing the inflow of particles, combustion gas and the like into the measuring hole with a small amount of ventilation gas by giving the above-mentioned flow passage a feature. .

Further, according to the present invention, the combination of the shape and structure of the above-mentioned flow paths is characterized, so that the inflow of particles and fuel gas to the measuring device main body side is reliably prevented, and the measuring device main body An optical measuring device that can reduce performance deterioration can be provided.

Further, according to the present invention, it is possible to provide an optical measuring device capable of ensuring a stable visual field for a long period of time by giving a feature to the combination of the shape and structure of the flow path. Further, according to the present invention, by giving the combination of the shape and structure of the above-mentioned flow path a feature, it is possible to return the dust entering the measuring device body side to the measured part side, and to always secure a stable visual field. A measuring device can be provided.

According to the present invention, the combination of the shape and the structure of the flow path is characterized, so that the dust that has entered the measuring device body side is deposited on the measuring device body side and reappears, or the measuring device body reappears. It is possible to provide an optical measuring device that can reliably collect invading dust without obstructing the field of view of the main body. Further, according to the present invention, by providing a feature in the combination of the shape and structure of the above-mentioned flow path, an optical measuring device capable of efficiently pushing back the dust with the force to enter the flow path with a small gas flow rate. Can be provided.

[Brief description of drawings]

FIG. 1 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to a first embodiment of the invention.

FIG. 2 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to a second embodiment of the invention.

FIG. 3 is a sectional view taken along the optical axis direction showing the configuration of an optical measuring device according to a third embodiment of the invention.

FIG. 4 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to a fourth embodiment of the invention.

FIG. 5 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to a fifth embodiment of the invention.

FIG. 6 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to a fifth embodiment of the invention.

FIG. 7 is a sectional view taken along the optical axis direction showing the configuration of an optical measuring device according to a seventh embodiment of the invention.

FIG. 8 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to an eighth embodiment of the invention.

FIG. 9 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to a ninth embodiment of the invention.

FIG. 10 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to a tenth embodiment of the invention.

FIG. 11 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to an eleventh embodiment of the invention.

FIG. 12 is a sectional view taken along the optical axis showing the configuration of an optical measuring device according to a twelfth embodiment of the invention.

FIG. 13 is a sectional view taken along the optical axis direction showing the configuration of the optical measurement device according to the related art 1.

FIG. 14 is a sectional view taken along the optical axis direction showing the configuration of an optical measuring device according to Related Art 2.

FIG. 15 is a cross-sectional view taken along the optical axis showing the configuration of an optical measuring device according to prior art 3.

[Explanation of symbols]

10, 20, 30, 40, 50, 60, 70, 80, 9
0, X0, Y0, Z0 ... Containers 11a, 21a, 31a, 41a, 51a, 61a, 7
1a, 81a, 91a, X1a, Y1a, Z1a ... Wall surfaces 11b, 21b, 31b, 41b, 51b, 61b, 7
1b, 81b, 91b, X1b, Y1b, Z1b ... Measuring holes 11c, 21c, 31c, 41c, 51c, 61c, 7
1c, 81c, 91c, X1c, Y1c, Z1c ... Seal gas introduction ports 11d, 21d, 31d, 41d, 51d, 61d, 7
1d, 81d, 91d, X1d, Y1d, Z1d ... Channels 12, 22, 32, 42, 52, 62, 72, 82, 9
2, X2, Y2, Z2 ... Measuring device main body (measuring instrument) 53, 63, 73, 83, Y3 ... Window 61e ... Dirt removing gas inlet 74 ... Vibrator 91f ... Opening (slope) X3 ... Gas Jet port Y1c ... Ion gas introduction port Z4 ... Dust collection container Z5 ... Partition plate Z6 ... Dust such as dust and dust.

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP 10-115210 (JP, A) JP 4-314020 (JP, A) JP 7-216422 (JP, A) JP 7- 299412 (JP, A) JP-A-6-60630 (JP, A) Actual opening 3-125244 (JP, U) Actual opening 7-8759 (JP, U) Actual opening Sho-50-984 (JP, U) Actual development Sho 61-131636 (JP, U) Actual public 3-34679 (JP, Y2) Actual public 59-22520 (JP, Y1) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01N 21/00-21/74 JISST file (JOIS)

Claims (10)

(57) [Claims] 1. An optical measuring device in which a measuring device main body performs measurement through a flow path forming a measuring hole, wherein a shape of a flow path connecting the measuring hole and the measuring device main body is along an optical path shape, An optical measuring device characterized in that a flow path cross-sectional area of a measured portion side is made smaller than a flow path cross-sectional area of a measuring device main body side. 2. The optical measuring device according to claim 1 , wherein the flow path is provided with a window portion . 3. The optical measuring device according to claim 1, wherein the flow path is provided with means for flowing gas from the measuring device body side to the measured portion side. 4. A window portion provided in the flow path, and means for ejecting gas, powder or liquid to the window portion in order to remove a substance adhering to the window portion which interferes with measurement. The optical measuring device according to claim 1, wherein 5. A window part provided in the flow path, and a vibration exciter for vibrating the window part to remove a substance that interferes with the measurement and adheres to the window part. The optical measuring device according to claim 1. 6. The optical measuring device according to claim 1, wherein the flow path is attached downward so that the measured portion side is lower than the measuring device main body side. 7. The flow path for passing the gas on the measured part side is narrower than the measuring device main body side, and the lower side of the flow path has a measurement hole that expands downward at a portion near the measured part side. The optical measuring device according to claim 1, wherein 8. The optical measuring device according to claim 1, wherein a plurality of gas outlets having a small diameter toward the measurement hole are provided in the vicinity of the measured portion side of the flow path. 9. a window between the measurement portion side and the measuring unit side of the flow path, toward the measurement portion side from the measurement portion side channel inner wall portion partitioned by the window, the ions The optical measuring device according to claim 1, wherein the contained gas is caused to flow. 10. The optical measuring device according to claim 1, wherein a container for receiving dust is provided between the measured portion of the flow path and the measuring device side.