JP3511711B2 - Member position measurement mark and position measurement method of the mark - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a member position measuring mark and a method for measuring the position of the mark, and more particularly to a member position measuring mark provided on a member having a periodically intersecting lattice pattern and a method for measuring the position of the mark. Regarding

[0002]

2. Description of the Related Art As one of the methods for positioning a member having a periodically intersecting lattice pattern, a portion provided on the member
A method is known in which the position of the material position measurement mark is used as a positioning reference. In this case, as the member position measurement mark,
For example, as shown in FIG. 13, a rectangular shape having an arbitrary size was used. This member position measurement mark 60 is provided on a member 61 having a lattice pattern 62 on its surface.

Next, a method of measuring the member position using the member position measuring mark 60 will be described with reference to the flow chart shown in FIG. In step 1, the member having the member position measuring mark 60 on its surface is captured as an image by an imaging camera. Next, in step 2, an image captured by the imaging camera is binarized by using the image processing apparatus, surrounded by portions (member position measurement mark 60 of the member position measuring Ma <br/> over click 60 Ryo
Area) and the part of the member 61 (enclosed by the member position measurement mark 60 )
(A region other than the opened region) , only the member position measurement mark 60 is cut out (see FIG. 15). Next, in step 3, the portion of the member position measurement mark 60 is identified as the lattice pattern 62 and other portions, and only the lattice pattern 62 is deleted (see FIG. 16). Next, in step 4, the member position
The position of the measurement mark 60 is measured. Thus obtained
The position of the member 61 depends on the position of the member position measurement mark 60.
Can be decided .

[0004]

Measurement method of the invention Problems to be Solved by utilizing conventional member position measuring Ma <br/> over click 60 member position, in the processing of step 3 has the following problems. (1) It takes a very long time to recognize the shape of the lattice pattern 62. (2) At the portion where the lattice pattern 62 and the member position measurement mark 60 are in contact, the boundary between the two is unstable, and the member position
Part of the measurement mark 60 may be deleted, or the grid pattern 6
Problems such as leaving part of 2 will occur.

(3) When the lattice pattern 62 and the member position measuring mark 60 are similar in feature amount, the lattice pattern 6
2 and the member position measurement mark 60 may not be distinguishable. Therefore, an object of the present invention is to provide a member position measurement mark and a position measuring method of the mark, which can measure the position of the member quickly and accurately with little influence of the shape of the lattice pattern.

[0006]

In order to achieve the above object, the member position measuring mark according to claim 1 of the present invention has a first side which intersects with a periodically intersecting lattice pattern at an equal angle. And a second side parallel to and equidistant to the first side, the length of the first and second sides being L, and the first of the intersecting lattice patterns being the first. If the pitch in the direction parallel to the first and second sides is S, then L =
It is characterized in that S × m (m: natural number) is satisfied.

A member position according to claim 2 of the present invention
The position measurement mark includes a first side that intersects the lattice pattern that periodically intersects at an equal angle, a second side that is parallel and equal in length to the first side, and the first and second sides. A shape having a third and a fourth side perpendicular to the side, and the length of the first and the second side is L, the length of the third and the fourth side is W, and the length of the third and fourth sides is W. The first and second crossed grid patterns
Is S ₁ and the pitch in the direction parallel to the third and fourth sides of the intersecting lattice pattern is S ₂ , L = S ₁ × m ₁ , W = S ₂ × m ₂ (m ₁ , m
₂ : Natural number) is satisfied.

Further, a member position measuring mark according to the present invention
The position measurement method of (a) is as follows:
A step of providing a member position measurement mark according to claim 1 or 2 wherein, (b) a step of capturing member provided with said member position measurement mark as an image, (c) to the captured image, the member position measuring mer < and (c) cutting out the lattice pattern and the portion of the member, and (d) measuring the center of gravity of the portion other than the lattice pattern in the member position measuring mark to measure the position of the member position measuring mark. And a step of performing.

Here, as the member having the lattice pattern, for example, a substrate having grooves or protrusions arranged on the surface in a lattice pattern, a substrate having conductors formed on the surface in a lattice pattern, a lattice pattern cloth, There are screen plates whose mesh has a lattice-like stitch structure, and those which have a lattice pattern on the surface depending on the nature of the material. Also, the member position measurement mark is
For example, it may be formed on the substrate in the form of grooves, protrusions, conductors, etc., or may be printed or woven on a cloth or the like.

[0010]

The member position measurement according to claim 1 or 2 having the above construction
The fixed mark periodically intersects with the lattice pattern. Therefore,
When scanning the member position measurement mark, due to the influence of the number of grid pattern equal except that the grating pattern crosses, the center of gravity and the true member position measurement marks obtained by measuring the member position measurement mark centroids The positions will almost match.

[0011] The position measuring method according to claim 1 or member position measurement mark utilizing member position measurement <br/> mark 2, wherein, since the process of deleting the grid pattern of the member position within the measurement mark is unnecessary The position of the member position measurement mark can be measured quickly and accurately.

[0012]

EXAMPLES Hereinafter, a member position measurement mark according to the present invention and
An example of a method for measuring the position of the mark will be described with reference to the accompanying drawings. [First Embodiment, FIGS. 1 to 6] As shown in FIG. 1, a mesh 2 is formed on the surface of a screen printing plate 1 in a lattice-like stitch structure. Mesh 2
Intersect periodically. Furthermore, this screen version 1
A member position measurement mark 3 is provided at the center of the surface of the. In the first embodiment, the mesh 2 is made of metal, parts
The surface of the screen plate 1 is covered with an emulsion made of a semitransparent resin except for the inside of the material position measurement mark 3.
The mesh 2 is exposed in the member position measurement mark 3, and a gap is formed in the portion other than the mesh 2.

The member position measuring mark 3 has a rectangular shape, and its sides in the longitudinal direction (hereinafter, referred to as the X direction) have the same angle θ with respect to the two intersecting meshes 2.
They intersect at ₁ . As a result, the member position measurement mark 3
When measuring the barycentric position in the Y direction (direction orthogonal to the X direction), the influence of the mesh 2 can be reduced. The sides of the member position measurement mark 3 in the Y direction intersect the two intersecting meshes 2 at the same angle θ ₂ . This makes it possible to reduce the influence of the mesh 2 when measuring the position of the center of gravity of the member position measurement mark 3 in the X direction.

Further, the length of the side of the member position measuring mark 3 in the X direction is L, the length of the side in the Y direction is W, and the X of the mesh 2 is X.
When the pitch direction pitch of S _1, Y-direction and S _2, parts
The material position measurement mark 3 satisfies the following expression (1).
In the case of the first embodiment, m ₁ = m ₂ = 2 is set. L = S ₁ × m ₁ W = S ₂ × m ₂ (1) (m ₁ , m ₂ : natural number) As shown in FIG. 2, the member position measurement marks 3 are periodic with the mesh 2 as shown in FIG. Intersect with. Therefore, the member position
No matter where in the X and Y directions the position measurement mark 3 is scanned, the four meshes 2 always affect the measurement except for the points where the meshes 2 intersect. As a result, parts
The barycentric position obtained by measuring the X and Y directions of the material position measuring mark 3 and the barycentric position of the true member position measuring mark 3 substantially match.

Further, as shown in FIGS. 3 and 4, the member positions
If the side of the position measurement mark 3 in the X direction is shortened or lengthened so that L ≠ S ₁ × m ₁ , it may be a mark for measuring the member position only in the X direction. it can. in this case,
When the member position measurement mark 3 is scanned in the X direction, the number of meshes 2 that affect the measurement varies depending on the scanning position, and the measured barycentric position in the Y direction of the member position measurement mark 3 is the true member position measurement mark 3 It will deviate from the center of gravity. Meanwhile, to affect always measured four mesh 2 except that the mesh 2 may be anywhere scans in the Y direction of the member position measuring mark 3 crosses, X-direction of the measured member position measuring mark 3 The center of gravity of is true
The barycentric position of the member position measurement mark 3 substantially coincides.

Similarly, if the side in the Y direction of the member position measuring mark 3 is shortened or lengthened so that W ≠ S ₂ × m ₂ , the mark for measuring the member position only in the Y direction. You can also Next, a method of measuring the position of the member position measurement mark using the member position measurement mark 3 will be described. As shown in FIG. 5, the position of the member position measurement mark 3 is measured by capturing an image, the member position measurement mark portion (member
Cutting out the area surrounded by the position measurement mark) and measuring the member position
The positions of the fixed marks are measured in this order. As shown in FIG. 6, the image is taken in by reading the screen plate 1 provided with the member position measurement marks 3 on its surface with an image reading means, for example, an imaging camera 10. That is, the screen plate 1 is illuminated by a light source (not shown) placed behind the screen plate 1, and the transmitted light is read by the imaging camera 10 placed in front of the screen plate 1. The image captured by the imaging camera 10 is converted into an electric signal and sent to the image processing device 11.

Next, in the image processing apparatus 11, parts
The material position measurement mark 3, the mesh 2, and the screen plate 1 are identified. In the first embodiment, specifically, parts
Part of the material position measurement mark 3 (enclosed by the member position measurement mark 3
The area of the filled gap) is white, the part of the mesh 2 is black,
The screen plate 1, that is, the emulsion portion is image-processed as gray. Next, the image is automatically binarized for each pixel. Normally, a threshold value is set between the white member position measurement mark 3 and the gray emulsion, and the pixel corresponding to the emulsion and the mesh 2 is assigned a value of “1”, and the mesh 2 within the member position measurement mark 3 is assigned.
A value of "0" is assigned to the pixels corresponding to the other parts. However, the image is not necessarily binarized, and may be multi-valued in some cases.

Next, the center of gravity of the member position measuring mark 3 is automatically measured based on the information on the position and the size of each pixel having the value of "0", and the position of the member position measuring mark 3 is obtained. . By the above method , the conventional image processing step of deleting the mesh in the member position measuring mark can be omitted, and the position of the member position measuring mark 3 can be measured quickly and accurately. As a result, screen version 1
Can be positioned accurately and quickly.

[Second, Third, Fourth, Fifth, Sixth and Seventh
Embodiment, FIGS. 7 to 12] As shown in FIG. 7, the member position measurement mark 20 of the second embodiment has a rectangular shape. Department
The material position measurement mark 20 satisfies the equation (1) described in the first embodiment. However, in the case of the second embodiment,
The setting is m ₁ = m ₂ = 1. Member position measurement mark 20
Is, like the member position measurement mark 3 of the first embodiment,
The four corners are not arranged at the intersections of the mesh 2 but are arranged at arbitrary positions. This member position
The measurement mark 20 has the same effect as the member position measurement mark 3 of the first embodiment.

As shown in FIG. 8, member positions of the third embodiment
The measurement mark 25 has a parallelogram shape. Member position
The X-direction side of the measurement mark 25 intersects the two intersecting meshes 2 at the same angle, and the length L of the X-direction side of the member position measurement mark 25 is expressed by the following equation (2). Is pleased. In the case of the third embodiment, m = 2 is set. L = S ₁ × m (2) (m: natural number) On the other hand, the sides in the Y direction intersect the two intersecting meshes 2 at different angles. The member position measuring mark 25 is a mark for measuring the member position only in the Y direction. This is because no matter where in the X direction the member position measurement mark 25 is scanned, four meshes always affect the measurement except for the point where the mesh 2 intersects.
The center of gravity position of the member position measurement mark 25 in the Y direction is a true member.
This is because it substantially coincides with the position of the center of gravity of the position measurement mark 25. On the contrary, when the member position measurement mark 25 is scanned in the Y direction, the number of meshes 2 that affect the measurement differs depending on the scanning position, and the measured barycentric position in the X direction of the member position measurement mark 25 is the true member position measurement. Mark 25
This is because it will deviate from the position of the center of gravity of.

As shown in FIG. 9, member positions of the fourth embodiment
Each of the measurement marks 30 and 31 has a rectangular shape. The member position measurement marks 30 and 31 are respectively the first
The formula (1) described in the examples is satisfied. However, in the case of the fourth embodiment, m ₁ = 2 and m ₂ = 1 are set. The screen plate 1 can be positioned more accurately by using these two member position measurement marks 30 and 31.

As shown in FIG. 10, member positions of the fifth embodiment
The position measurement mark 35 is a combination of three rectangular member position measurement marks. This member position measurement mark 35
Has the same effect as the member position measuring mark 3 of the first embodiment. As shown in FIG. 11, the member of the sixth embodiment
The position measurement marks 40a and 40b are one rectangular member
The position measurement mark is divided into two parts. Member position measuring <br/> marks 40a and 40b are arranged at a distance of an integral multiple of the pitch S _1, S ₂ in the X and Y directions of the mesh 2. In the case of the sixth embodiment, the member position measurement marks 40a and 40b are separated by S _{2 in the} Y direction. These two parts
By using the position measurement marks 40a and 40b together,
The same function and effect as those of the member position measuring mark 3 of the first embodiment are obtained.

As shown in FIG. 12, member positions of the seventh embodiment
The position measurement mark 45 is a rectangular mark that measures the member position only in the X direction, and the member position measurement mark 46 is a rectangular mark that measures the member position only in the Y direction.
The member position measurement mark 45 satisfies the following expression (3), where L _{1 is} the length of the side in the X direction and W ₁ is the length of the side in the Y direction. In the case of the seventh embodiment, m ₂ = 1 is set.

L ₁ ≠ S ₁ × m ₁ W ₁ = S ₂ × m ₂ (3) (m ₁ , m ₂ : natural number) Member position measurement mark 46 has a side length in the X direction of L ₂ , And the length of the side in the Y direction is W ₂ , the following expression (4) is satisfied. In the case of the seventh embodiment, m ₁ = 1 is set.

L ₂ = S ₁ × m ₁ W ₂ ≠ S ₂ × m ₂ (4) (m ₁ , m ₂ : natural number) By using these two member position measurement marks 45, 46 together, The same effect as the member position measurement mark 3 of the first embodiment is obtained.

[Other Embodiments] The member position measuring mark and the mark according to the present invention
The position measuring method is not limited to the above-mentioned embodiment,
Various modifications can be made within the scope of the gist. In particular, as a member having a lattice pattern, in addition to a screen plate having a mesh having a lattice-like knit structure, a substrate having grooves or protrusions arranged on the surface in a lattice pattern, a lattice-patterned cloth, or a conductor is used. It may be a ceramics substrate formed in a lattice shape on the surface, or one having a lattice pattern on the surface depending on the nature of the material. Further, the member position measuring mark may be formed on the substrate in the form of a groove or a protrusion, or may be printed or woven on a cloth or the like.

[0027]

As it is apparent from the foregoing description, according to the present invention, since the member position measurement marks intersect in a grid pattern and periodic, center-of-gravity position and the true member obtained by measuring the member position measurement mark The barycentric positions of the position measurement marks are substantially the same. Then, member position using this member position measurement mark
In the method of measuring the position of the position measurement mark, the step of deleting the lattice pattern in the member position measurement mark, which has been conventionally required, can be omitted, and the position of the member position measurement mark can be quickly and accurately determined . Can be measured. As a result, the influence of the shape of the lattice pattern is small, and the members can be positioned quickly and accurately. Further, even for members having different grid pattern sizes, the member position measurement marks may be set according to the size of the grid pattern, and there is no need to change the program of the image processing apparatus.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of a member position measurement mark according to the present invention.

FIG. 2 is an enlarged plan view of a member position measurement mark portion shown in FIG.

FIG. 3 is an enlarged plan view showing a modified example of the member position measurement mark shown in FIG.

FIG. 4 is an enlarged plan view showing another modification of the member position measurement mark shown in FIG.

FIG. 5 is a flowchart showing a method for measuring the position of a member position measurement mark .

FIG. 6 is a portion using the member position measurement mark shown in FIG.
FIG. 4 is a schematic configuration diagram for explaining a method of measuring the position of the material position measurement mark .

FIG. 7 is a perspective view showing a second embodiment of the member position measurement mark according to the present invention.

FIG. 8 is a perspective view showing a third embodiment of the member position measurement mark according to the present invention.

FIG. 9 is a perspective view showing a fourth embodiment of the member position measurement mark according to the present invention.

FIG. 10 is a perspective view showing a fifth embodiment of the member position measurement mark according to the present invention.

FIG. 11 is a perspective view showing a sixth embodiment of the member position measurement mark according to the present invention.

FIG. 12 is a perspective view showing a seventh embodiment of the member position measurement mark according to the present invention.

FIG. 13 is a perspective view showing a conventional member position measurement mark.

[Figure 14] using conventional member position measuring mark member position
The flowchart which shows the position measuring method of the position measurement mark .

FIG. 15 is an explanatory diagram for explaining the procedure of a conventional method for measuring the position of a member position measurement mark .

16 is an explanatory diagram for explaining the procedure of the position measuring method of the member position measuring mark following FIG.

[Explanation of symbols]

1 ... Screen plate 2 ... Lattice mesh 3, 20, 25, 30, 31, 35, 40a, 40b,
45, 46 ... Member position measurement mark S ₁ ... Pitch of lattice mesh in X direction S ₂ ... Pitch of lattice mesh in Y direction

Claims (3)

(57) [Claims] 1. A member position measurement mark provided on a member having a lattice pattern that periodically intersects, wherein the member position measurement mark has a first side that intersects the intersecting lattice pattern at an equal angle, A shape having a second side that is parallel and equal in length to the first side,
When the lengths of the first and second sides are L and the pitch of the intersecting lattice pattern in the direction parallel to the first and second sides is S, L = S × m (m: natural number) The member position measurement mark characterized in that 2. A member position measuring mark provided on a member having a periodically intersecting lattice pattern, wherein the member position measuring mark has a first side intersecting the intersecting lattice pattern at an equal angle, A shape having a second side that is parallel and equal in length to the first side and third and fourth sides that are perpendicular to the first and second sides; The lengths of the first and second sides are L, the third and fourth sides are W, the pitch in the direction parallel to the first and second sides of the crossed grid pattern is S ₁ , and the crossing is When the pitch in the direction parallel to the third and fourth sides of the above-mentioned lattice pattern is S ₂ , L = S ₁ × m ₁ W = S ₂ × m ₂ (m ₁ , m ₂ : natural number) is satisfied. A member position measurement mark characterized by: 3. A step of providing the member position measurement mark according to claim 1 on a member having a lattice pattern that periodically intersects, and a step of capturing the member provided with the member position measurement mark as an image. from the captured image, a step of cutting a portion of said member and said member position measuring mark and the grid pattern, to measure the center of gravity of the portions other than the grid pattern of the member position within the measurement marks, the member position measurement mark And a step of measuring the position of the member position measuring method.