JP3485799B2 - Heat exchange equipment - Google Patents

Heat exchange equipment

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Publication number
JP3485799B2
JP3485799B2 JP13933998A JP13933998A JP3485799B2 JP 3485799 B2 JP3485799 B2 JP 3485799B2 JP 13933998 A JP13933998 A JP 13933998A JP 13933998 A JP13933998 A JP 13933998A JP 3485799 B2 JP3485799 B2 JP 3485799B2
Authority
JP
Japan
Prior art keywords
water
tank
gas
heat exchange
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP13933998A
Other languages
Japanese (ja)
Other versions
JPH11325771A (en
Inventor
宏次 森岡
正信 斎藤
匡 椋本
柏森 王
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taikisha Ltd
Original Assignee
Taikisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taikisha Ltd filed Critical Taikisha Ltd
Priority to JP13933998A priority Critical patent/JP3485799B2/en
Publication of JPH11325771A publication Critical patent/JPH11325771A/en
Application granted granted Critical
Publication of JP3485799B2 publication Critical patent/JP3485799B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、第1気体と第2気
体との熱交換において、低エンタルピ側の気体に散水す
ることにより、散水した水の蒸発で熱交換を促進して熱
交換量を増大させる熱交換装置に関する。
TECHNICAL FIELD The present invention relates to heat exchange between a first gas and a second gas by sprinkling water on the low enthalpy side to promote heat exchange by evaporation of sprinkled water. The present invention relates to a heat exchange device for increasing heat transfer.

【0002】詳しくは、第1気体と第2気体とを非接触
の状態で熱交換させる熱交換手段を設け、その熱交換手
段で熱交換させる第1気体にタンクからの供給水を散水
するとともに、その散水において未蒸発の状態で回収さ
れる余剰水をタンクに戻す第1運転と、熱交換手段で熱
交換させる第2気体にタンクからの供給水を散水すると
ともに、その散水において未蒸発の状態で回収される余
剰水をタンクに戻す第2運転との選択的実施が可能な構
成にし、これら第1運転と第2運転との切り替えを自動
的に行う運転制御手段を設ける熱交換装置に関する。
More specifically, heat exchange means for exchanging heat between the first gas and the second gas in a non-contact state is provided, and the water supplied from the tank is sprinkled on the first gas for heat exchange by the heat exchange means. The first operation of returning excess water recovered in an unevaporated state in the water spray to the tank, and the water supplied from the tank to the second gas to be heat-exchanged by the heat exchanging means, and the non-evaporated water in the water spray. The present invention relates to a heat exchange device having a configuration capable of performing selectively a second operation for returning surplus water recovered in a state to a tank and providing operation control means for automatically switching between the first operation and the second operation. .

【0003】[0003]

【従来の技術】従来、この種の熱交換装置では、散水し
た水の蒸発でタンクの貯留水量が減少するのに対し、タ
ンクへの新鮮水の補給を自動的に行うようにしている
が、第1運転と第2運転との切り替えについては、タン
クからの供給水をいずれの気体に散水するかを単に切り
替えているにすぎず、第1運転と第2運転との切り替え
にかかわらずタンク内の水をそのまま散水に使用してい
た(例えば、特開昭61−252488号公報参照)。
2. Description of the Related Art Conventionally, in this type of heat exchange device, although the amount of water stored in the tank is reduced by evaporation of sprinkled water, fresh water is automatically supplied to the tank. Regarding the switching between the first operation and the second operation, which gas is used to spray the water supplied from the tank is simply switched, and regardless of the switching between the first operation and the second operation, the inside of the tank is changed. The above water was used for watering as it was (see, for example, JP-A-61-252488).

【0004】[0004]

【発明が解決しようとする課題】ところで、この種の熱
交換装置は、第1気体と第2気体との熱交換が非接触の
状態で行われ気体どうしの接触による気体間の汚染が無
いことから、例えば、クリーンルームにおける熱回収を
目的とした排気と給気の熱交換など、汚染質を含む気体
と清浄度が要求される気体との熱交換に多く用いられる
が、従来装置では厳密には、一方の気体が他方の気体に
含まれる汚染質によって汚染されてしまうことがあっ
た。
By the way, in this type of heat exchange device, heat exchange between the first gas and the second gas is performed in a non-contact state, and there is no contamination between the gases due to the contact between the gases. Therefore, for example, it is often used for heat exchange between a gas containing pollutants and a gas requiring cleanliness, such as heat exchange between exhaust gas and supply air for the purpose of heat recovery in a clean room. However, one gas may be contaminated by the contaminant contained in the other gas.

【0005】つまり、従来装置では気体どうしの直接接
触はないものの、例えば、第1運転における第1気体へ
の散水で回収される余剰水が散水の際の気水接触で第1
気体中の汚染質により汚染されたものとなり、この余剰
水がタンクに戻されることでタンクの貯留水が汚染され
てしまい、そして、この状態で第1運転から第2運転へ
の切り替えが行われて、このタンク貯留水が第2気体へ
の散水に用いられることで第2気体が汚染されるといっ
たことが生じていた。
In other words, although there is no direct contact between gases in the conventional device, for example, surplus water recovered by sprinkling the first gas in the first operation comes into contact with the first water by spraying water.
It becomes polluted by the pollutants in the gas, and the surplus water is returned to the tank to contaminate the stored water in the tank, and in this state, the first operation is switched to the second operation. Then, the tank storage water is used for watering the second gas, so that the second gas is contaminated.

【0006】この実情に対し、本発明の主たる課題は、
散水で生じる余剰水をタンクに戻して散水に再使用する
方式を採りながら、熱交換させる気体間での汚染を確実
に防止できるようにする点にある。
In contrast to this situation, the main problem of the present invention is
While adopting a method of returning excess water generated by water sprinkling to the tank and reusing it for water sprinkling, it is possible to reliably prevent contamination between heat exchanged gases.

【0007】[0007]

【課題を解決するための手段】〔1〕請求項1に係る発
明では、前記の第1運転と第2運転の切り替えを自動的
に行う運転制御手段を、これら第1運転と第2運転との
切り替え時に、タンクの全貯留水を新鮮水と入れ替える
水更新を自動的に行い、その後に切り替え先の運転を開
始する構成にする。
[1] In the invention according to claim 1, operation control means for automatically switching between the first operation and the second operation is provided in the first operation and the second operation. At the time of switching, the water is automatically replaced by replacing all the stored water in the tank with fresh water, and then the operation at the switching destination is started.

【0008】この構成によれば、例えば、第1運転での
第1気体への散水でタンクに戻す余剰水が第1気体中の
汚染質により汚染され、そのことでタンクの貯留水が汚
染されたとしても、次の第2運転では、全量が新鮮水に
入れ替えられたタンク貯留水が第2気体に散水されるか
ら、先の第1運転での貯留水汚染が原因となって第2気
体が汚染されることはない。また同様に、第2運転での
第2気体への散水でタンクに戻す余剰水が第2気体中の
汚染質により汚染され、そのことでタンクの貯留水が汚
染されたとしても、次の第1運転では、全量が新鮮水に
入れ替えられたタンク貯留水が第1気体に散水されるか
ら、先の第2運転での貯留水汚染が原因となって第1気
体が汚染されることもない。
According to this structure, for example, the surplus water returned to the tank by the water spray to the first gas in the first operation is contaminated by the pollutants in the first gas, which contaminates the stored water in the tank. Even so, in the next second operation, the tank storage water, which has been completely replaced with fresh water, is sprinkled into the second gas, so that the second gas is caused by the stored water contamination in the previous first operation. Will not be contaminated. Similarly, even if the surplus water returned to the tank by the water spray to the second gas in the second operation is contaminated by the pollutants in the second gas, which causes the stored water in the tank to be contaminated, In the first operation, the tank stored water, which is completely replaced with fresh water, is sprinkled on the first gas, so that the first gas is not contaminated due to the stored water contamination in the second operation. .

【0009】したがって、第1気体と第2気体を単に非
接触の状態で熱交換させるだけで気体間汚染を防止する
従来装置に比べ、一方の気体に含まれる汚染質によって
他方の気体が汚染される気体間汚染をより確実に防止で
き、クリーンルームでの熱回収を目的とした給気と排気
の熱交換など、汚染質を含む気体と清浄度が要求される
気体との熱交換に一層好適な熱交換装置となる。
Therefore, as compared with the conventional device which prevents the inter-gas contamination by simply exchanging heat between the first gas and the second gas in a non-contact state, the other gas is contaminated by the contaminant contained in one gas. It is more suitable for heat exchange between gas containing pollutants and gas requiring cleanliness, such as heat exchange between supply air and exhaust air for the purpose of heat recovery in a clean room. It becomes a heat exchange device.

【0010】ところで、散水に用いる水が媒体となる前
記の如き気体間汚染を回避するには、特開昭63−10
8148号公報に見られるように、散水用の水として市
水を一過的に供給するなどの非循環の水供給形式を採っ
たり、第1運転用のタンクと第2運転用のタンクを各別
に設けることも考えられるが、非循環の水供給形式の場
合、水の消費量が大きくなって経費が嵩む、また、水消
費量の低減のため散水量を絞ると気水接触の効率が低下
して散水による熱交換効率の向上が低く制限される、さ
らにまた、一過的に供給する水の温度が変動することで
熱交換に及ぼす散水の効果が変化して熱交換が不安定に
なる等の問題が生じる。また一方、各別のタンクを設け
る場合では、それらタンクの装備のため装置が大型化す
る、装置コストが高く付く、また、メンテナンスが煩雑
になる等の問題が生じる。
By the way, in order to avoid the above-mentioned inter-gas contamination in which water used for water sprinkling serves as a medium, JP-A-63-10 is used.
As can be seen in Japanese Patent No. 8148, a non-circulating water supply form is adopted such as city water is temporarily supplied as water for sprinkling, or a tank for first operation and a tank for second operation are provided. It may be possible to install it separately, but in the case of a non-circulating water supply type, the water consumption becomes large and the cost increases, and if the sprinkling amount is reduced to reduce the water consumption, the efficiency of steam contact decreases. As a result, the improvement of heat exchange efficiency due to water sprinkling is limited to a low level. Moreover, the effect of water sprinkling on heat exchange changes due to transient fluctuations in the temperature of the supplied water, and heat exchange becomes unstable. Problems such as occur. On the other hand, in the case of providing separate tanks, there are problems that the equipment becomes large due to the equipment of these tanks, the equipment cost increases, and the maintenance becomes complicated.

【0011】これに対し、請求項1に係る発明では、基
本的には散水での余剰水をタンクに戻して散水に再使用
する形式を採るから、運転切り替え時の水更新でタンク
貯留水を廃棄するにしても、上記の如き非循環の水供給
形式に比べれば、散水量を充分にして散水による熱交換
効率の向上を効果的なものにしながら水の消費量を少な
くすることができ、また、散水する水の温度も繰り返し
の気水接触により一定の平衡温度に安定することで、安
定的な熱交換を維持することができる。そしてまた、第
1運転と第2運転とでタンクを兼用するから、各別のタ
ンクを設けるに比べ、装置を小型化するとともに装置コ
ストを安価にすることができ、また、メンテナンスも容
易になる。
On the other hand, according to the first aspect of the present invention, basically, a form is adopted in which surplus water for watering is returned to the tank and reused for watering. Even if it is discarded, compared to the non-circulating water supply system as described above, it is possible to reduce the water consumption while making the amount of water sprinkled sufficiently to effectively improve the heat exchange efficiency by water sprinkling. Further, the temperature of water to be sprayed is stabilized at a constant equilibrium temperature by repeated contact with steam, so that stable heat exchange can be maintained. Further, since the tank is shared between the first operation and the second operation, the device can be downsized and the cost of the device can be reduced as compared with the case where separate tanks are provided, and maintenance is also easy. .

【0012】なお、第1気体に含まれる汚染質によって
第2気体が汚染されることのみを防止する場合には、第
1運転から第2運転への切り替え時にのみ前記の水更新
を実施するようにすればよく、請求項1に係る発明の実
施にあたり、必ずしも、第1運転から第2運転への切り
替え時、及び、第2運転から第1運転への切り替え時の
夫々で水更新を実施する必要はない。
In order to prevent only the second gas from being contaminated by the pollutants contained in the first gas, the water renewal is performed only when the first operation is switched to the second operation. In carrying out the invention according to claim 1, water is always updated at the time of switching from the first operation to the second operation and at the time of switching from the second operation to the first operation. No need.

【0013】〔2〕請求項2に係る発明では、前記運転
制御手段を、第1運転の実施中又は第2運転の実施中に
おいて、設定時間毎に又はタンク貯留水の検出水質が設
定下限水質まで低下する毎に、タンクの全貯留水又はそ
の一部を新鮮水と入れ替える水更新を自動的に行う構成
にする。
[2] In the invention according to claim 2, in the operation control means, the detected water quality of the tank stored water is set lower limit water quality at every set time during the execution of the first operation or the execution of the second operation. Every time it drops to 0%, all or part of the stored water in the tank will be replaced with fresh water.

【0014】この構成によれば、第1運転中又は第2運
転中において、タンクに戻す余剰水が散水対象の気体に
含まれる汚染質により汚染されることで、水の再使用に
伴い汚染質が次第に蓄積されてタンク貯留水の汚染が進
むとしても、設定時間毎に又はタンク貯留水の検出水質
が設定下限水質まで低下する毎に上記の水更新が行われ
ることでタンク貯留水の汚染は一定限度までに止められ
る。
According to this structure, during the first operation or the second operation, the surplus water returned to the tank is contaminated by the pollutants contained in the gas to be sprinkled, so that the pollutants are reused when the water is reused. Even if water is gradually accumulated and pollution of the tank storage water progresses, the tank storage water will not be polluted by the above-mentioned water renewal every set time or whenever the detected water quality of the tank storage water decreases to the set lower limit water quality. It can be stopped by a certain limit.

【0015】したがって、タンク貯留水の汚染が酷くな
ってタンクの構成材そのものが汚染されてしまうため
に、第1運転と第2運転の切り替え時に水更新を行った
としても、その水更新で新たに供給する新鮮水がタンク
内に残る汚染質によって汚染されてしまうといったこと
を防止でき、この点から気体間汚染を一層確実に防止で
きる。
Therefore, since the tank storage water becomes severely contaminated and the tank components themselves are contaminated, even if the water is renewed at the time of switching between the first operation and the second operation, the water is newly renewed by the water renewal. It is possible to prevent the fresh water supplied to the tank from being contaminated by the contaminants remaining in the tank, and from this point, it is possible to more reliably prevent the inter-gas contamination.

【0016】また、汚染質によるタンク貯留水の水質悪
化を一定限度までに止められることで、水質悪化に原因
する散水不良や熱交換不良といった不都合も防止でき、
対象気体が汚染質を大量に含む気体の場合に特に有効と
なる。
Further, since the deterioration of the water quality of the tank storage water due to the pollutants can be stopped to a certain limit, it is possible to prevent inconveniences such as poor water sprinkling and poor heat exchange due to the deterioration of the water quality.
This is particularly effective when the target gas is a gas containing a large amount of pollutants.

【0017】〔3〕請求項3に係る発明では、前記運転
制御手段を、前記水更新の際、タンクの全貯留水を排水
した後、新鮮水をタンクに供給する構成にする。
[3] In the invention according to claim 3, the operation control means is configured to supply fresh water to the tank after draining all the stored water in the tank when updating the water.

【0018】この構成によれば、水更新にあたり、汚染
したタンク貯留水を全量排水した上で新鮮水がタンクに
供給されるから、その水更新において新たに供給する新
鮮水が汚染貯留水との混合で汚染されてしまうことを防
止できる。
According to this structure, when renewing water, the contaminated reservoir water is completely drained and fresh water is supplied to the tank. It is possible to prevent contamination by mixing.

【0019】したがって、この水更新形態を第1運転と
第2運転との切り替えの際の水更新について適用すれ
ば、切り替え先の運転において一層汚染の危険の少ない
水を散水でき、これにより気体間汚染を一層確実に防止
できる。また、この水更新形態を第1運転や第2運転の
運転中の水更新に適用すれば、タンク貯留水の一定限度
以上の汚染を一層確実に防止できてタンク構成材そのも
のの汚染をより確実に防止でき、この点で気体間汚染を
一層確実に防止できるとともに、水質悪化に原因する散
水不良や熱交換不良などの不都合もより確実に防止でき
る。
Therefore, if this water renewal mode is applied to the water renewal at the time of switching between the first operation and the second operation, it is possible to sprinkle water with a less risk of pollution in the operation after the switching, and thereby, Contamination can be prevented more reliably. Further, if this water renewal mode is applied to water renewal during the first operation and the second operation, it is possible to more reliably prevent the contamination of the tank storage water beyond a certain limit, and to more reliably contaminate the tank components themselves. In this respect, inter-gas contamination can be prevented more reliably, and inconveniences such as poor water sprinkling and poor heat exchange due to deterioration of water quality can be more reliably prevented.

【0020】〔4〕請求項4に係る発明では、前記運転
制御手段を、前記水更新の際にタンク洗浄を自動的に行
う構成にする。
[4] In the invention according to claim 4, the operation control means is configured to automatically perform tank cleaning when the water is renewed.

【0021】この構成によれば、水更新の際、タンク貯
留水の排出だけでは汚染質を排除し切れず、タンクへの
付着などで汚染質がタンクに残ったとしても、その水更
新の際のタンク洗浄により残存汚染質を排除できて、新
たに供給する新鮮水の残存汚染質による汚染を防止で
き、これにより気体間汚染を一層確実に防止できる。
According to this structure, at the time of water renewal, the pollutants cannot be completely removed only by discharging the water stored in the tank, and even if the pollutants remain in the tank due to adhesion to the tank, etc. The remaining contaminants can be eliminated by cleaning the tank of (1), and the contamination due to the residual contaminants of fresh water to be newly supplied can be prevented, and thereby the inter-gas contamination can be prevented more reliably.

【0022】〔5〕請求項5に係る発明では、前記運転
制御手段を、前記のタンク洗浄として、タンクの全貯留
水を新鮮水と入れ替える水更新操作を複数回繰り返す構
成にする。
[5] In the invention according to claim 5, the operation control means is configured to repeat the water renewal operation for replacing all the stored water in the tank with fresh water a plurality of times as the tank cleaning.

【0023】この構成によれば、タンク貯留水の排水と
新鮮水の供給との繰り返しだけでタンク洗浄を行うか
ら、タンク洗浄を行うのに、排水手段や新鮮水の給水手
段とは別に専用の洗浄手段を設けるに比べ、装置構成を
簡単にすることができ、装置の製作を容易にするととも
に装置コストを安価にすることができる。
According to this structure, the tank cleaning is performed only by repeating the drainage of the tank storage water and the supply of the fresh water. Therefore, the tank cleaning can be performed only by the dedicated draining means and the fresh water supplying means. Compared to the case where the cleaning means is provided, the device configuration can be simplified, the device can be easily manufactured, and the device cost can be reduced.

【0024】[0024]

【発明の実施の形態】図1は、排気ダクト1により導か
れるクリーンルームからの排気EAと、外気ダクト2に
より導かれるクリーンルームへの導入外気OAとを熱交
換させて、排気EAの保有熱を回収(すなわち冷房時に
は冷熱の回収、暖房時には温熱の回収)する熱交換装置
を示す。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows that exhaust heat EA from a clean room guided by an exhaust duct 1 and external air OA introduced into a clean room guided by an outside air duct 2 are heat-exchanged with each other to recover heat retained in the exhaust EA. A heat exchange device for recovering cold heat during cooling and recovering warm heat during heating is shown.

【0025】3は排気EAと熱媒Rを熱交換させるフィ
ンチューブ型の排気側熱交換器、4は外気OAと熱媒R
を熱交換させるフィンチューブ型の外気側熱交換器、5
は両熱交換器3,4にわたらせて循環ポンプ6により熱
媒Rを循環させる熱媒循環路であり、この熱媒循環路5
での循環熱媒Rを介して排気EAと外気OAを非接触の
状態で熱交換させる形式(いわゆるランアラウンド形
式)を採っている。
Reference numeral 3 denotes a fin-tube type exhaust side heat exchanger for exchanging heat between the exhaust air EA and the heat medium R, and 4 denotes outside air OA and the heat medium R.
Fin tube type outside air side heat exchanger for heat exchange
Is a heat medium circulation path for circulating the heat medium R by the circulation pump 6 across both heat exchangers 3, 4, and this heat medium circulation path 5
The heat exchange between the exhaust air EA and the outside air OA via the circulating heat medium R is performed in a non-contact state (so-called run-around type).

【0026】7は排気側熱交換器3に降水する形態で排
気EAに散水する排気側散水器、8は外気側熱交換器4
に降水する形態で外気OAに散水する外気側散水器、9
は散水ポンプ10により給水路11,12を通じて各散
水器7,8に散水用の水Wを供給するタンク、13は排
気EAに対する散水において未蒸発の状態で回収される
余剰水W’をタンク9に戻す排気側還水路、14は外気
OAに対する散水において未蒸発の状態で回収される余
剰水W’をタンク9に戻す外気側還水路である。
Reference numeral 7 denotes an exhaust side water sprinkler which sprinkles water on the exhaust EA in a form of precipitation on the exhaust side heat exchanger 3, and 8 denotes an outside air side heat exchanger 4.
Outside-side water sprinkler that sprinkles outside air OA in the form of precipitation on the outside, 9
Is a tank for supplying water W for watering to the water sprinklers 7, 8 through water supply channels 11, 12 by a watering pump 10, and 13 is a tank 9 for storing excess water W'which is recovered in a non-evaporated state during watering for exhaust EA. The exhaust-side return water passage 14 returns to the tank 9. The exhaust-side return water passage 14 returns to the tank 9 the excess water W ′ that has been recovered in an unevaporated state in the sprinkling of the outside air OA.

【0027】V1は排気側給水路11の開閉により排気
EAに対する散水の発停を行う排気側散水弁、V2は外
気側給水路12の開閉により外気OAに対する散水の発
停を行う外気側散水弁、V3はタンク9の貯留水Wを排
水する排水弁、V4はタンク貯留水の水位低下に対し補
給水路15から自動的に新鮮水Wiをタンク9に補給す
るボールタップ弁、V5は補給水路15を開閉する補給
水路主弁である。
V1 is an exhaust side sprinkling valve that starts and stops sprinkling of water for the exhaust air EA by opening and closing the exhaust side water supply channel 11, and V2 is an outside air sprinkling valve that starts and stops sprinkling of water for the outside air OA by opening and closing the outside air supply channel 12. , V3 is a drain valve for draining the stored water W in the tank 9, V4 is a ball tap valve for automatically replenishing the tank 9 with fresh water Wi from the replenishing water channel 15 in response to the decrease in the water level of the tank reservoir water, and V5 is the replenishing water channel 15. This is the main valve for the makeup water channel that opens and closes.

【0028】16は運転制御器(運転制御手段)であ
り、この運転制御器16は、第1気体としての排気EA
に散水してその散水での余剰水W’をタンク9に戻すの
に対し、第2気体としての外気OAへの散水は停止する
第1運転と、逆に第2気体としての外気OAに散水して
その散水での余剰水W’をタンク9に戻すのに対し、第
1気体としての排気EAへの散水は停止する第2運転と
を、外気センサ17により検出される外気OAのエンタ
ルピhoに基づき自動的に切り替え実施する。
Reference numeral 16 is an operation controller (operation control means), and this operation controller 16 is the exhaust gas EA as the first gas.
And the surplus water W'in the sprinkling is returned to the tank 9, whereas the first operation in which the sprinkling to the outside air OA as the second gas is stopped, and conversely to the outside air OA as the second gas. Then, the surplus water W ′ in the sprinkling is returned to the tank 9, while the second operation in which the sprinkling of the exhaust gas EA as the first gas is stopped is referred to as the enthalpy ho of the outside air OA detected by the outside air sensor 17. It switches automatically based on

【0029】具体的には、外気OAのエンタルピhoが
排気EAのエンタルピhe(本例ではクリーンルームの
温湿度が空調により一定に保たれるとして排気EAのエ
ンタルピheは既知の一定値として扱う)よりも高い
(ho>he)ときは、図2の(イ)に示す如く、 循環ポンプ6 ……ON、 散水ポンプ10 ……ON、 排気側散水弁V1 ……開、 外気側散水弁V2 ……閉、 排水弁V3 ……閉、 補給水路主弁V5 ……開 の状態にして、排気EAへの散水のみを行う第1運転を
実施し、これにより、散水した水Wの蒸発に伴う排気側
での気化熱奪取で排気EAと外気OAの熱交換(換言す
れば排気EAから外気OAへの冷熱回収)を促進する。
More specifically, the enthalpy ho of the outside air OA is calculated from the enthalpy he of the exhaust EA (in this example, the enthalpy he of the exhaust EA is treated as a known constant value because the temperature and humidity of the clean room are kept constant by air conditioning). 2 is high (ho> he), as shown in (a) of FIG. 2, the circulation pump 6 ... ON, the sprinkling pump 10 ... ON, the exhaust side sprinkling valve V1 ... open, the outside air side sprinkling valve V2 ... Closed, drain valve V3 ... Closed, make-up waterway main valve V5 ... Opened, and the first operation is performed in which only water is sprinkled on the exhaust air EA. The heat exchange between the exhaust air EA and the outside air OA (in other words, the recovery of cold heat from the exhaust air EA to the outside air OA) is promoted by taking the vaporization heat in.

【0030】また、外気OAのエンタルピhoが排気E
Aのエンタルピheよりも低くて、その差が設定値Δh
よりも大きい(hz<ho<he−Δh)ときは、図2
の(ロ)に示す如く、 循環ポンプ6 ……ON、 散水ポンプ10 ……ON、 排気側散水弁V1 ……閉、 外気側散水弁V2 ……開、 排水弁V3 ……閉、 補給水路主弁V5 ……開 の状態にして、外気OAへの散水のみを行う第2運転を
実施し、これにより、散水した水Wの蒸発に伴う外気側
での気化熱奪取で排気EAと外気OAの熱交換(換言す
れば排気EAから外気OAへの温熱回収)を促進する。
The enthalpy ho of the outside air OA is exhausted E
It is lower than enthalpy he of A, and the difference is set value Δh.
2 (hz <ho <he-Δh),
As shown in (b), the circulation pump 6 ...... ON, the water sprinkling pump 10 ...... ON, the exhaust side water sprinkling valve V1 ...... closed, the outside air side water sprinkling valve V2 ...... open, the drainage valve V3 ...... closed, the makeup water channel main The valve V5 is opened and the second operation is performed in which only water is sprinkled on the outside air OA. As a result, the heat of vaporization on the outside air side due to the evaporation of the sprinkled water W causes the exhaust air EA and the outside air OA to be absorbed. Heat exchange (in other words, heat recovery from the exhaust air EA to the outside air OA) is promoted.

【0031】なお、運転制御器16は、外気OAのエン
タルピhoが排気EAのエンタルピheよりも低い状況
の中でも、それらの差が設定値Δh以下である(he−
Δh≦ho<he)ときは、図3の(イ)に示す如く、 循環ポンプ6 ……OFF、 散水ポンプ10 ……OFF、 排気側散水弁V1 ……閉、 外気側散水弁V2 ……閉、 排水弁V3 ……閉、 補給水路主弁V5 ……開 の状態にして熱交換運転を停止する。
The operation controller 16 determines that the difference between the enthalpy ho of the outside air OA and the enthalpy ho of the exhaust air EA is lower than the set value Δh (he-
When Δh ≦ ho <he), as shown in (a) of FIG. 3, the circulation pump 6 ... OFF, the water spray pump 10 ... OFF, the exhaust side water spray valve V1 ... Closed, the outside air side water spray valve V2 ... Closed. , Drainage valve V3 ... closed, makeup waterway main valve V5 ... open, and heat exchange operation is stopped.

【0032】また、外気OAのエンタルピhoが設定下
限値hzよりも低い(ho<hz<he−Δh)とき
は、図3の(ロ)に示す如く、 循環ポンプ6 ……ON、 散水ポンプ10 ……OFF、 排気側散水弁V1 ……閉、 外気側散水弁V2 ……閉、 排水弁V3 ……閉、 補給水路主弁V5 ……開 の状態にして、散水を伴わない熱媒Rの循環のみによる
熱交換運転を行う。
When the enthalpy ho of the outside air OA is lower than the set lower limit value hz (ho <hz <he-Δh), the circulation pump 6 ... ON, the sprinkling pump 10 as shown in (b) of FIG. ...... OFF, exhaust side sprinkling valve V1 ...... closed, outside air side sprinkling valve V2 ...... closed, drain valve V3 ...... closed, make-up waterway main valve V5 ...... opened, and heat medium R without sprinkling Perform heat exchange operation only by circulation.

【0033】つまり、外気OAのエンタルピhoが排気
EAのエンタルピheよりも低い状況の中でも、それら
の差が小さい(he−Δh≦ho<he)ときには、装
置運転で消費するエネルギから見て熱回収によるエネル
ギ節減効果があまり得られないことから、熱媒循環及び
散水をともに停止して熱交換運転を停止し、また、外気
OAのエンタルピhoがかなり低い(ho<hz)とき
には、散水した水Wが凍結する危険性があることから、
散水を伴わない熱媒循環のみによる熱交換運転を行うよ
うにしてある。
That is, even when the enthalpy ho of the outside air OA is lower than the enthalpy he of the exhaust gas EA, when the difference between them is small (he-Δh≤ho <he), the heat recovery is seen from the energy consumed in the operation of the apparatus. Since the energy saving effect due to is not obtained so much, both the heat medium circulation and the water sprinkling are stopped to stop the heat exchange operation, and when the enthalpy ho of the outside air OA is considerably low (ho <hz), the sprinkled water W There is a risk of freezing
The heat exchange operation is performed only by circulating the heat medium without sprinkling water.

【0034】運転制御器16は、上記の如く外気OAの
エンタルピhoに応じて運転を自動的に切り替えること
において、第1運転から第2運転へ運転を切り替える場
合(熱交換運転の停止や散水を伴わない熱媒循環のみに
よる熱交換運転を経る場合を含む)には、切り替え先の
第2運転の実施にあたり、タンク9の全貯留水Wを新鮮
水Wiに入れ替える水更新を自動的に行う構成にしてあ
る。
When the operation controller 16 automatically switches the operation according to the enthalpy ho of the outside air OA as described above, when the operation is switched from the first operation to the second operation (stopping the heat exchange operation or sprinkling water). (Including the case where the heat exchange operation is performed only with the heat medium circulation that does not accompany), when performing the second operation of the switching destination, a configuration in which the water is automatically replaced by replacing all the stored water W in the tank 9 with fresh water Wi I am doing it.

【0035】具体的には、切り替え先の第2運転の実施
にあたり、先ず、図4の(イ)に示す如く、 散水ポンプ10 ……OFF、 排気側散水弁V1 ……開、 外気側散水弁V2 ……開、 排水弁V3 ……開、 補給水路主弁V5 ……閉 の状態にして、配管中の水Wとともにタンク9の全貯留
水Wを排水し、その排水の後、図4の(ロ)に示す如
く、 散水ポンプ10 ……OFF、 排気側散水弁V1 ……開、 外気側散水弁V2 ……開、 排水弁V3 ……閉、 補給水路主弁V5 ……開 の状態にして、ボールタップ弁V4による自動補給によ
りタンク9に新鮮水Wiを供給することでタンク9の全
貯留水Wを新鮮水Wiに入れ替える水更新操作を行い、
そして、この水更新操作を二回自動的に繰り返した上
で、切り替え先の第2運転に移行するようにしてある。
To be more specific, in carrying out the second operation of the switching destination, first, as shown in FIG. 4 (a), the sprinkling pump 10 ... OFF, the exhaust side sprinkling valve V1 ... Open, the outside air side sprinkling valve. V2 ...... Open, drain valve V3 ...... Open, make-up waterway main valve V5 ...... Closed, draining all the stored water W in the tank 9 together with the water W in the pipe. As shown in (b), the sprinkler pump 10 is turned off, the exhaust side sprinkler valve V1 is opened, the outside air side sprinkler valve V2 is opened, the drain valve V3 is closed, and the makeup waterway main valve V5 is opened. Then, a fresh water Wi is supplied to the tank 9 by automatic replenishment by the ball tap valve V4 to perform a water renewal operation for replacing all the stored water W in the tank 9 with the fresh water Wi,
Then, the water renewal operation is automatically repeated twice, and then the second operation after the switching is performed.

【0036】また、運転制御器16は、第1運転の実施
中において設定時間毎に、前記の水更新操作を一回だけ
自動的に実施する構成にしてある。
Further, the operation controller 16 is configured to automatically execute the above-mentioned water renewal operation only once every set time during the execution of the first operation.

【0037】つまり、第1運転での排気EAへの散水で
タンク9に戻す余剰水W’が排気EA中の汚染質により
汚染され、そのことでタンク9の貯留水Wが汚染された
としても、上記の如き水更新を運転の切り替え時に自動
的に実施することで、次の第2運転では、全量が新鮮水
Wiに入れ替えられたタンク貯留水Wが外気OAに散水
されるようにし、これにより、先の第1運転での貯留水
汚染が原因となってクリーンルームへの導入外気OAが
汚染されることを防止する。
In other words, even if the surplus water W'returned to the tank 9 by the water spray to the exhaust EA in the first operation is contaminated by the pollutants in the exhaust EA, and the stored water W in the tank 9 is contaminated as a result. By automatically performing the above-described water renewal at the time of switching the operation, in the next second operation, the tank stored water W, which is entirely replaced with the fresh water Wi, is sprinkled to the outside air OA. This prevents the outside air OA introduced into the clean room from being contaminated due to the contamination of the stored water in the first operation.

【0038】また、第1運転中において、タンク9に戻
す余剰水W’が排気EAに含まれる汚染質により汚染さ
れることで、水の再使用に伴い汚染質が次第に蓄積され
てタンク貯留水Wの汚染が進むとしても、上記の如く設
定時間毎に水更新を行うことでタンク貯留水Wの汚染を
一定限度までに止め、これにより、タンク貯留水Wの汚
染が酷くなってタンクの構成材そのものが汚染されてし
まうために、第1運転と第2運転の切り替え時に水更新
を行ったとしても、その水更新で新たに供給する新鮮水
Wiがタンク内に残る汚染質によって汚染されてしまう
といったことを防止するとともに、水質悪化に原因する
散水不良や熱交換不良といった不都合も併せ防止する。
Further, during the first operation, the surplus water W'returned to the tank 9 is contaminated by the pollutants contained in the exhaust gas EA, so that the pollutants are gradually accumulated as the water is reused and the tank storage water is stored. Even if the W is contaminated, the tank reserving water W is contaminated to a certain limit by renewing the water every set time as described above, whereby the tank reserving water W becomes more contaminated and the tank configuration is increased. Since the material itself is contaminated, even if water is renewed at the time of switching between the first operation and the second operation, fresh water Wi newly supplied by the water renewal is contaminated by contaminants remaining in the tank. In addition to preventing such problems, it also prevents inconveniences such as poor water sprinkling and poor heat exchange due to poor water quality.

【0039】〔別の実施形態〕第1気体と第2気体とを
非接触の状態で熱交換させる熱交換手段は、前記実施形
態で示した如き排気側熱交換器3・外気側熱交換器4・
熱媒循環路5から成るランアラウンド形式に限られるも
のではなく、ヒートパイプを介して両気体を非接触の状
態で熱交換させる形式や、伝熱面を形成する仕切板を介
して両気体を非接触の状態で熱交換させる形式であって
もよい。
[Other Embodiments] The heat exchange means for exchanging heat between the first gas and the second gas in a non-contact state is the exhaust side heat exchanger 3 / outside air side heat exchanger as shown in the above embodiment. 4.
The heat medium circulation path 5 is not limited to the run-around type, but both types of gas can be exchanged in a non-contact state via a heat pipe, or both types of gas can be exchanged via a partition plate forming a heat transfer surface. It may be in a form of heat exchange in a non-contact state.

【0040】前記実施形態では、第1運転から第2運転
への切り替え時のみ水更新を行うようにしたが、第1気
体中に含まれる汚染質によって第2気体が汚染されるこ
と、及び、第2気体中に含まれる汚染質によって第1気
体が汚染されることの両方を防止する必要がある場合な
ど、第1運転から第2運転への切り替え時、及び、第2
運転から第1運転への切り替え時の夫々において水更新
を実施するようにしてもよい。
In the above embodiment, the water is renewed only when switching from the first operation to the second operation, but the second gas is contaminated by the contaminants contained in the first gas, and When it is necessary to prevent both the first gas from being contaminated by the contaminants contained in the second gas, such as when switching from the first operation to the second operation, and
Water renewal may be performed at each of the switching from the operation to the first operation.

【0041】前記実施形態では、第1運転の実施中にお
いてのみ設定時間毎に水更新を行うようにしたが、場合
によっては、第1運転及び第2運転の夫々において設定
時間毎に水更新を行うようにしてもよい。
In the above embodiment, the water is renewed every set time only during the first operation, but in some cases, the water is renewed every set time in each of the first operation and the second operation. It may be performed.

【0042】また、これら運転中の水更新を設定時間毎
に行うに代え、タンク貯留水の水質検出に基づき、タン
ク貯留水の水質が設定下限水質まで低下する毎に実施す
るようにしてもよく、さらにまた、運転切り替え時の水
更新ではタンクの全貯留水を入れ替えるのに対し、設定
時間毎ないしタンク貯留水の水質が設定下限水質まで低
下する毎の運転中の水更新については、タンク貯留水の
一部のみを入れ替えるようにしてもよい。
Further, instead of performing the water renewal during the operation every set time, the water renewal may be carried out every time the water quality of the tank stored water decreases to the set lower limit water quality based on the water quality detection of the tank stored water. In addition, in the water renewal at the time of operation switching, all the stored water in the tank is replaced, whereas in the water renewal during operation every set time or whenever the water quality of the tank stored water drops to the set lower limit water quality, You may replace only a part of water.

【0043】熱交換対象である第1気体及び第2気体
は、排気と外気の組み合わせに限定されるものではな
く、どうような目的で熱交換させるどのような気体であ
ってもよい。
The first gas and the second gas, which are the objects of heat exchange, are not limited to the combination of exhaust air and the outside air, and may be any gas for heat exchange for any purpose.

【図面の簡単な説明】[Brief description of drawings]

【図1】装置構成を示す図FIG. 1 is a diagram showing a device configuration.

【図2】第1運転と第2運転の運転形態を示す図FIG. 2 is a diagram showing operation modes of a first operation and a second operation.

【図3】その他の運転形態を示す図FIG. 3 is a diagram showing another operation mode.

【図4】水更新操作の操作形態を示す図FIG. 4 is a diagram showing an operation form of a water update operation.

【符号の説明】[Explanation of symbols]

3,4,5 熱交換手段 9 タンク 16 運転制御手段 EA 第1気体 OA 第2気体 W 水 W’ 余剰水 Wi 新鮮水 3,4,5 Heat exchange means 9 tanks 16 Operation control means EA first gas OA second gas W water W'excess water Wi fresh water

───────────────────────────────────────────────────── フロントページの続き (72)発明者 王 柏森 東京都新宿区西新宿2丁目6番1号 株 式会社大氣社内 (58)調査した分野(Int.Cl.7,DB名) F24F 3/147 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Wang Kashiwamori 2-6-1, Nishishinjuku, Shinjuku-ku, Tokyo Incorporated company Oki (58) Fields investigated (Int.Cl. 7 , DB name) F24F 3 / 147

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 第1気体と第2気体とを非接触の状態で
熱交換させる熱交換手段を設け、 その熱交換手段で熱交換させる前記第1気体にタンクか
らの供給水を散水するとともに、その散水において未蒸
発の状態で回収される余剰水を前記タンクに戻す第1運
転と、 前記熱交換手段で熱交換させる前記第2気体に前記タン
クからの供給水を散水するとともに、その散水において
未蒸発の状態で回収される余剰水を前記タンクに戻す第
2運転との選択的実施が可能な構成にし、 これら第1運転と第2運転との切り替えを自動的に行う
運転制御手段を設ける熱交換装置であって、 前記運転制御手段を、 前記第1運転と前記第2運転との切り替え時に、前記タ
ンクの全貯留水を新鮮水と入れ替える水更新を自動的に
行い、その後に切り替え先の運転を開始する構成にして
ある熱交換装置。
1. A heat exchanging means for exchanging heat between a first gas and a second gas in a non-contact state is provided, and water supplied from a tank is sprinkled on the first gas for exchanging heat with the heat exchanging means. A first operation of returning excess water recovered in an un-evaporated state in the water spray to the tank, and water supplied from the tank to the second gas to be heat-exchanged by the heat exchange means, and the water spray In the second embodiment, the operation control means for automatically switching between the first operation and the second operation is configured so that the excess water recovered in the non-evaporated state is returned to the tank and the second operation is selectively performed. A heat exchange device to be provided, wherein the operation control means automatically performs water renewal for replacing all the stored water in the tank with fresh water at the time of switching between the first operation and the second operation, and then switches. Driving ahead Heat exchanger that is in the configuration to start.
【請求項2】 前記運転制御手段を、 前記第1運転の実施中又は前記第2運転の実施中におい
て、設定時間毎に又はタンク貯留水の検出水質が設定下
限水質まで低下する毎に、前記タンクの全貯留水又はそ
の一部を新鮮水と入れ替える水更新を自動的に行う構成
にしてある請求項1記載の熱交換装置。
2. The operation control means, during the execution of the first operation or the execution of the second operation, each time a set time, or each time the detected water quality of the tank stored water falls to a set lower limit water quality, 2. The heat exchange device according to claim 1, wherein all the stored water in the tank or a part of the stored water is automatically replaced with fresh water.
【請求項3】 前記運転制御手段を、 前記水更新の際、前記タンクの全貯留水を排水した後、
新鮮水を前記タンクに供給する構成にしてある請求項1
又は2記載の熱交換装置。
3. The operation control means, when the water is renewed, after draining all the stored water in the tank,
The fresh water is supplied to the tank.
Alternatively, the heat exchange device according to item 2.
【請求項4】 前記運転制御手段を、 前記水更新の際にタンク洗浄を自動的に行う構成にして
ある請求項1〜3のいずれか1項に記載の熱交換装置。
4. The heat exchange device according to claim 1, wherein the operation control means is configured to automatically perform tank cleaning when the water is renewed.
【請求項5】 前記運転制御手段を、 前記タンク洗浄として、前記タンクの全貯留水を新鮮水
と入れ替える水更新操作を複数回繰り返す構成にしてあ
る請求項4記載の熱交換装置。
5. The heat exchange device according to claim 4, wherein the operation control means is configured to repeat a water renewal operation for replacing all the stored water in the tank with fresh water as the tank cleaning, a plurality of times.
JP13933998A 1998-05-21 1998-05-21 Heat exchange equipment Expired - Fee Related JP3485799B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13933998A JP3485799B2 (en) 1998-05-21 1998-05-21 Heat exchange equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13933998A JP3485799B2 (en) 1998-05-21 1998-05-21 Heat exchange equipment

Publications (2)

Publication Number Publication Date
JPH11325771A JPH11325771A (en) 1999-11-26
JP3485799B2 true JP3485799B2 (en) 2004-01-13

Family

ID=15243035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13933998A Expired - Fee Related JP3485799B2 (en) 1998-05-21 1998-05-21 Heat exchange equipment

Country Status (1)

Country Link
JP (1) JP3485799B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4783637B2 (en) * 2006-01-24 2011-09-28 本田技研工業株式会社 Air conditioning method, air conditioning equipment, and control method of the air conditioning equipment
DE102017116079A1 (en) * 2017-07-18 2019-01-24 Eisenmann Se Supply circuit for a heat transfer medium for a consumer, industrial plant and method for operating such
WO2019106927A1 (en) * 2017-11-30 2019-06-06 株式会社テイエルブイ Liquid circulation system, treatment line, and liquid circulation method

Also Published As

Publication number Publication date
JPH11325771A (en) 1999-11-26

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