JPS642104Y2 - - Google Patents

Description

[Detailed description of the invention] "Industrial application field" This invention is a cooler for cooling a constant temperature and humidity room, clean room, etc., which is used to humidify a constant temperature and humidity room or clean room to a constant humidity while cooling it. The present invention relates to a humidifying device for a cooling room that aims to reduce the consumption of humidifying water by reusing drain water that condenses on the surface as humidifying water.

``Prior Art'' Conventionally, when humidifying a so-called clean room 10 to a predetermined temperature and maintaining a constant humidity in a so-called clean room 10, which has a sealed structure and does not contain any dust, and is used for manufacturing or testing microelectronic devices, it is generally known that A device with the structure shown in Figure 2 was used. To explain this device below, in the figure, 12 is a water tank 16 with a sealed structure for storing water for steam supply and equipped with a water supply port 14, and a water tank 16 that heats the water stored in this water tank 16. A heating device 18 such as a pipe heater whose heat generating part is submerged in the water in the water tank 16 for evaporation, and a cooler described later that communicates with the inside of the clean room 10 without leaking the steam generated in the water tank 16 to the outside. A cylindrical steam supply path 20 that supplies steam to the inside of the air conditioner with a built-in air conditioner, and a drain path 24 that can be opened and closed and is equipped with a valve 22 and the like that discharges water inside the water tank 16 to the outside of the tank.
26 is a humidifier equipped with a cooler 2 which is an evaporator part of a refrigeration cycle.
8 and a cooler 28 provided below this cooler 28
This air conditioner has a sealed structure surrounded by a peripheral wall, and includes a dish-shaped drain pan 30 that receives drain water that condenses on the surface of the air conditioner and drips downward. An air conditioner 26 is installed between the surrounding wall of the clean room 10, which has a sealed structure.
A feed duct 32 that constitutes an air supply path that feeds the air inside the clean room 10 into the clean room 10, and a return duct 34 that constitutes a return circuit that returns the air inside the clean room 10 to the air conditioner 26. are connected to each other, and the drain pan 30 in the air conditioner is further provided with a drain water discharge pipe 38 that can be opened and closed and is equipped with a valve 36 and the like for discharging the drain water accumulated in the drain pan to the outside of the air conditioner. , and the feed duct 3 in the clean room 10 described above.
A filter 40 is provided at the outlet of the feed duct 32 to remove dust that may enter the clean room 10 along with the air through the feed duct 32. Furthermore, the water supply port 1 of the humidifying device 12 described above
4 is equipped with a water supply pipe 46 that has a water deionizer 42 and a water stop valve 44 interposed in the middle of the pipe. Pure water from which impurities such as silica and magnesium have been removed is supplied to water supply pipe 4.
Water tank 1 of the humidifier through the water supply port 14 from inside 6
A certain amount of water flows into the water tank 16 and is stored.
The pure water stored inside the pipe heater or other heating device 1
Water tank 16 heated using 8 and having a sealed structure
When steam is generated in the water tank 16, the steam generated in the water tank 16 passes through the steam supply path 20 and enters the air conditioner 26, which also has a sealed structure, and further passes through a blower fan (not shown). The air is mixed with the air that is forcedly circulated between the clean room 10 and the air conditioner 26 through the supply duct 32 and the return duct 34 while being appropriately cooled by the cooler 28 provided inside the air conditioner. The steam that has entered the inside of the air conditioner 26 flows into the clean room 10, and the inside of the clean room is humidified to a predetermined humidity by the steam flowing from inside the air conditioner, and the inside of the clean room 10 and the inside of the air conditioner 26 are The inside of the clean room 10 is cooled and maintained at a constant temperature with the air cooled by the cooler 28 in the air conditioner.

``Problem that the invention attempts to solve'' However, in the conventional device described above, the inside of the clean room 10 is humidified once and then returned to the duct 3.
4 and returns to the air conditioner 26, when the steam passes around the cooler 28 provided in the air conditioner, a considerable portion of it is rapidly cooled and returns to the cooler 28.
It condenses on the surface of the air conditioner, is removed from the air circulating between the clean room 10 and the air conditioner 26, becomes drain water, and drains into the drain pan 3 below the cooler.
Drain water that drips into the air conditioner and accumulates in the drain pan is wastefully discarded to the outside of the air conditioner through the drain water discharge pipe 38. It is necessary to continuously replenish water into the water tank 16 of the humidifier through the water replenishment port 14 from the water replenishment pipe 46.

Therefore, when using the above-mentioned device to continuously humidify the inside of the clean room 10 to high humidity by supplying a large amount of steam, it is necessary to supply a large amount of pure water into the water tank 16 from outside the water tank during use. As a result, it becomes necessary to use a large-capacity deionizer 42 interposed in the water supply pipe 46, and the device for humidifying the inside of the clean room 10 becomes large. There were drawbacks such as increased initial cost and running cost.

In addition, in the above-described device, when used for a long period of time, the water supply pipe 4 is connected to the deionizer 42.
Some impurities such as silica, magnesium, etc. that remain unpurified and remain dissolved in the pure water supplied from inside the water tank 16 of the humidifier are gradually removed by pipe heaters etc. installed in the water in the water tank 16. heating appliance 1
When heated, it solidifies and becomes white and deposits on the surface of the heating device 18, thickly covering the surface of the heating device 18. There was a drawback that the transmission efficiency was significantly reduced.

Therefore, as a result of intensive research, the inventor of the present invention has determined that the drain pan 3 in the air conditioner in the above-mentioned humidifier
The drain water accumulated in the humidifier is drained from the water tank 1 of the humidifier without wasting it to the outside through the drain water drain pipe 38.
6 and reused as water for humidifying a cooling room such as the clean room 10, the humidifying device's water tank 16 is supplied from the water supply pipe 46 through the water deionizer 42 during operation. The amount of pure water that is continuously supplied into the humidifying device can be saved, and the deionizer 42 interposed in the middle of the water supply path can be made smaller, thereby reducing the initial cost and running cost of the humidifying device. As a result of the fact that the absolute amount of pure water, etc. supplied from the outside of the water tank through the water supply pipe 46 into the water tank 16 of the humidifier during operation is significantly reduced, even if the humidifier is used for a long period of time, the water tank The absolute amount of impurities such as silica and magnesium contained in the water in the water tank 16 does not increase, and the heating equipment 18 that adheres and accumulates on the surface of the heating equipment 18 such as a pipe heater installed in the water in the water tank 16 during use. We came up with the idea of minimizing the amount of scales such as silica and magnesium that degrade heat transfer efficiency, and developed a humidifier that humidifies air-conditioned rooms such as clean room 10 for this purpose.

In other words, the purpose of the present invention is to
When humidifying a cooling room such as 0, etc., the drain water that condenses on the surface of the cooler 28 that cools the air in the cooling room is reused as humidification water, thereby reducing the saving of water for humidification. Also, the water tank 1 during operation of the humidifier 12 that humidifies the inside of the cooling room.
The absolute amount of replenishing water such as pure water from outside the water tank 6 is kept small, and the water that adheres to and accumulates on the surface of the heating device 18 installed in the water in the water tank 16 of the humidifier during use. To provide a humidifier for a cooling room in which the amount of adhesion of scales such as silica and magnesium contained in water in a cooling room is reduced.

"Means for Solving the Problems" In order to achieve the above object, the present invention provides water for steam supply equipped with a water replenishment port 14 for replenishing water from the outside, as shown in FIG. A water tank 16 with a sealed structure for storage, and a heating device 1 such as a pipe heater whose heat generating part is submerged into the water in the tank to heat and evaporate the water stored in the water tank 16.
8, and a cylindrical steam supply path 20 that supplies humidifying steam evaporated from the water in the water tank 16 into a cooling room 48 such as a clean room without leaking to the outside.
A steam supply path 50 consisting of a supply duct 32, etc.
Then, the drain water that condenses on the surface of the cooler 28 provided in the middle of the air circulation path in the cooling room, which is a closed circuit isolated from the outside air and cools the inside of the cooling room 48, is passed through the drain pan 30 or the like. The above aquarium 1
It is characterized by comprising a drain water recovery path 52 for returning the water into the drain water.

"Function" Then, the inside of the cooling room 48 such as the clean room 10 has a sealed structure, and the surrounding wall of the air conditioner 26, the surrounding wall of the feeding duct 32 and the return Since the air circulation passage in the form of a closed circuit that circulates the air in the cooling chamber 48 surrounded by the surrounding wall of the duct 34 has a sealed structure that is isolated from the outside air, water in the water tank 16 of the humidifier is Once the generated steam is sent into the cooling room 36 through the steam supply path 50, the steam sent into the cooling room 48 is
When the inside of the cooling room 48 is opened or closed, a part of it is lost with the air into the outside air, and the cooling room 4
When the air passes near the cooling chamber 28 provided in the middle of the circulation path in the cooling chamber 8, it is rapidly cooled, condenses on the surface of the cooler 28, and is removed from the air in the cooling chamber as drain water. Except for that cooling room 4
8 and the air conditioner 26 through which the air in the cooling room is circulated, the supply duct 32, and the return duct 3.
When using the humidifier, the air inside the cooling room 48 to be humidified should be avoided as much as possible by opening and closing the air conditioning room 48. All the drain water that condenses on the surface of the cooler 28 provided in the middle of the circulation path is returned to the water tank 16 of the humidifier through the drain water recovery path 52 and returned to the cooling room 48.
When used as water for humidification inside the air conditioner, a portion of the moisture sent from the water tank 16 into steam and into the cooling room 48 becomes drain water and returns to the water tank 16, where it becomes steam again. The water is circulated between the inside of the cooling room 48 and the water tank 16 so as to be sent into the cooling room 48, and other moisture is sent to the inside of the cooling room 48.
The cooling room 48 stored in the water tank 16 hardly dissipates to the outside from the inside of the air conditioner 26, etc., which constitutes the circulation path of the air inside the cooling room.
The amount of water used for humidification inside the water tank 16 decreases significantly during operation of the humidifier, and the amount of water supplied from the outside into the aquarium 16 through the water supply port 14 can be kept to an extremely small amount. .

In addition, the water supply port 14 during operation of the humidifier
As a result, the amount of water supplied from the outside into the water tank 16 can be suppressed to a very small amount, resulting in a significant reduction in the amount of impurities such as silica and magnesium contained in the water replenished from the outside of the tank that enter the water tank 16. As a result, the amount of scales such as silica and magnesium that adhere to the surface of the heating device 18 installed in the water in the water tank 16 of the humidifier during use can be kept to a minimum.

Furthermore, the drain water that condenses on the surface of the cooler 28 provided in the middle of the air circulation path in the cooling room 48,
The water is purified by evaporation once or several times in the water tank 16, and this purified drain water is returned to the water tank 16 to replenish the water in the tank. water will be gradually purified by the drain water, and if the humidifier is used, a large amount of ideal re-purified steam can be delivered into the cooling room 48 such as the clean room 10.

``Example'' Next, to explain an example of the present invention, FIG. 1 shows a clean room 1 equipped with a humidifying device of the present invention.
A preferred embodiment of a device for humidifying the inside of 0 to a constant humidity while cooling it to a constant temperature is shown, and in the figure,
Components that are the same as those of the conventional device shown in FIG. 2 are given the same reference numerals, and their explanations will be omitted. Therefore, in the device shown in the figure, a drain pan 30 is provided to drip condensed drain water onto the surface of a cooler 28 provided inside the air conditioner 26, and the drain water accumulated in the drain pan is discharged to the outside of the air conditioner 26. The tip of the drain water discharge pipe 38 is introduced into the water tank 16 of the humidifier, and the inside of the drain pan 30 and the water tank 16 are communicated via the drain water discharge pipe 38, that is, the drain water recovery pipe 52. A certain amount of pure water is stored in the water tank 16 of the humidifier 12 through the water supply port 14 from the water supply path 46 via the water deionizer 42, and the pure water in the water tank 16 is heated. Equipment 18
When the water in the water tank is heated and evaporated, the steam generated from the water in the water tank is fed into the air conditioner 26 through the steam supply path 20 that constitutes a part of the steam supply path 50. The steam is forcibly circulated between the air conditioner 26 and the clean room 10 by a blower fan (not shown) through the supply duct 32 and the return duct 34 along with the other parts of the steam supply circuit 50. The air flows into the clean room 10 through the feed duct 32 constituting the air supply duct 32 and the filter 40 provided at the opening of the duct, and acts to humidify the inside of the clean room 10 to a constant humidity. Additionally, the steam that has once flowed into the clean room 10 passes through the return duct 34 and returns to the air conditioner 26 along with the air that is forcibly circulated between the air conditioner room 26 and the clean room 10 by the above-mentioned blower fan. After being cooled by the cooler 28 inside the air conditioner 28, it passes through the feed duct 32 again and enters the clean room 10, but some of the steam that circulates in the air conditioner 26 with the air is It is rapidly cooled by the internal cooler 28, condenses on the surface of the cooler 28, is removed from the air, becomes drain water, drips into the drain pan 30, and accumulates, and this drain water flows through the drain water recovery path 52. The drain water is returned to the water tank 16 of the humidifier through the constituting drain water discharge pipe 38 and is reused as water for generating humidifying steam.

In the above-mentioned embodiment, the cooler 28 that cools the inside of the clean room 10 is connected to the air conditioner 26 in the middle of the air circulation path in the clean room, which has a closed circuit structure and is isolated from the outside air outside the clean room 10. Although it is provided internally, in some cases, a cooling room 48 such as the above-mentioned clean room 10 is provided.
An air conditioner 26 with a built-in direct cooler 28 is provided inside the air conditioner 26, and a closed circuit air circulation path separated from the outside air is formed between the inside of the air conditioner 26 and the inside of the cooling room 48. A blower fan (not shown) is used to forcefully circulate the air in the cooling room 48, and the cooler 28 inside the air conditioner 26 cools the cooling room 48.
In addition to cooling the air inside, the tip of the steam supply path 20 constituting the steam supply path 50 of the humidifier of the present invention is directly introduced into the cooling chamber 48 to directly supply the steam from inside the water tank 16. humidifying the inside of the cooling room 48 by causing the steam to flow into the cooling room 48 through the passage 20;
And the cooler 2 in the air conditioner 26 in the cooling room
Of course, the humidifier of the present invention may also be used in such a way that the drain water condensed on the surface of the humidifier 8 is returned to the water tank 16 of the humidifier through the drain water recovery path 52 consisting of the drain pan 30, the drain water discharge pipe 38, etc. good.

In the above-described embodiment, in order to humidify the inside of the clean room 10 where dust is extremely disliked, the humidifying water introduced into the water tank 16 of the humidifier 12 from outside the water tank through the water supply port 14 includes tap water, etc. However, the humidifying device 12 of the present invention is used not in a clean room but in a cooling room 48 such as a regular constant temperature and humidity room. In the case of humidification, normal tap water or the like may be used as the water that flows into the aquarium 16 from outside the aquarium through the water supply port 14.
Even in such a case, if the humidifying device 12 of the present invention is used, as described above, the amount of water supplied from the outside into the water tank 16 of the humidifying device during operation can be suppressed, and the amount of water used for humidifying the tap water etc. can be reduced. The water consumption of the humidifier 12 can be saved and reduced.
The amount of scales such as silica and magnesium adhering to the surface of the heating device 18 provided for the water in the water tank 16 can be suppressed.

Furthermore, a water tank 1 equipped with a water replenishment port 14 for storing water for generating steam in the apparatus of the above-mentioned embodiment.
6, a heating device 18 that heats the water stored in the water tank 16 to generate steam, a steam supply path 50 that supplies the steam generated in the water tank 16 to the cooling room, and a heating device 18 that heats the water stored in the water tank 16 to generate steam, a steam supply path 50 that supplies the steam generated in the water tank 16 to the cooling room, and a heating device 18 that heats the water stored in the water tank 16 to generate steam. If the drain water recovery channel 52 that returns the drain water condensed on the surface of the cooler to the water tank 16 is integrated into a unit as a humidifier, the device can be equipped with various packaged air conditioners. It is convenient because it can be used immediately as a humidifying device for a cooling room without making any improvements to the cooling room or the like.

``Effect of the invention'' As described above, if the humidifying device of the invention is used to humidify a cooling room such as a constant temperature and humidity room or a clean room, it will be possible to humidify a cooling room such as a constant temperature and humidity room or a clean room. During operation, the drain water that condenses on the surface of the cooler that cools the air conditioner is returned to the water tank of the humidifier, and is recovered and used effectively as water for creating steam to humidify the air conditioner. It is possible to reduce the amount of fresh water such as pure water that is added into the aquarium of the humidifier from outside the aquarium, and it is possible to reduce the amount of water that needs to be replenished into the aquarium of the humidifier. The water supply mechanism can be made smaller and lighter, and its initial cost and running cost can be kept low.

In addition, as a result of reducing the amount of water refilled into the aquarium of the humidifier from outside the aquarium during operation, silica, magnesium, etc. that enter the aquarium along with the water replenished from outside the aquarium during use. Since the amount of impurities entering the tank is reduced and the total amount of impurities such as silica and magnesium contained in the water in the tank does not increase significantly, it is necessary to prepare the water in the tank to heat the water in the tank during use. It is possible to maintain the heat transfer efficiency from the heat generating part of the humidifier to the water in the water tank over a long period of time by minimizing the amount of scales such as silica and magnesium attached to the surface of the heating device. becomes.

Furthermore, the drain water that condenses on the surface of the cooler that cools the air in the cooling room consists of water that has been purified by evaporation once or several times in the water tank of the humidifier, and this purified drain water is returned to the water tank. Since the water is replenished into the aquarium as water for replenishing the water inside the aquarium, the water in the aquarium will be gradually purified by the drain water mentioned above during use, and ideally the water in the aquarium will be purified from the water in the aquarium. It is possible to supply steam into cooling rooms such as clean rooms.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram of a cooling room such as a clean room equipped with the humidifying device for a cooling room of the present invention, and Fig. 2 is a schematic diagram of a cooling room such as a clean room equipped with a conventional humidifying device for a cooling room. . 10...Clean room, 12...Humidifier, 14
...Water supply port, 16...Water tank, 18...Heating device, 20
...Steam feed line, 26...Air conditioner, 28...Cooler, 4
2... water purifier, 48... cooling room, 50... steam supply path,
52...Drain water recovery path.

Claims (1)

[Scope of utility model registration request] A water tank with a sealed structure that stores water for steam supply with a water supply port, a heating device that heats and evaporates the water stored in this tank, and a humidifier that evaporates from the water in this tank. A steam supply path that delivers steam into the cooling room without leaking to the outside, and a closed-circuit air circulation path in the cooling room that cools the inside of the cooling room, which is isolated from the outside air, are provided in the middle. A humidifier for a cooling room, comprising a drain water recovery path for returning drain water condensed on the surface of the cooler into the water tank.