JP4783637B2 - Air conditioning method, air conditioning equipment, and control method of the air conditioning equipment - Google Patents

Description

  The present invention relates to an air-conditioning method, air-conditioning equipment, and a control method for the air-conditioning equipment that perform air conditioning such as in a clean room or a constant temperature room.

  For example, in a clean room used in a semiconductor manufacturing factory or the like, a large number of various production apparatuses such as cleaning apparatuses and drying apparatuses are installed for each manufacturing process. For this reason, the air conditioning equipment for maintaining such a clean room at a constant temperature, a constant humidity, and a constant pressure consumes enormous energy.

  Patent Document 1 describes an air conditioning facility including a heat exchanger that sensible heat-cools return air after passing through a clean room, and an outside air regulator that air-conditions the taken-out outside air.

  In this air conditioning equipment, the cooling water cooled by the cooling tower radiates heat from the condenser of the refrigerator mounted on the outside air regulator, and sends cooling water at a predetermined temperature to the heat exchanger of the air conditioning unit in the clean room. Therefore, it is described that air conditioning can be performed with energy saving by the effect of shortening the time for operating the refrigerator.

Japanese Patent Laid-Open No. 5-196258

  However, in the air-conditioning equipment described in Patent Document 1, for example, when the temperature of the outside air is very high in summer or the like, the cooling load in the outside air regulator is greatly increased, and the energy consumption of the refrigerator is reduced. May increase significantly. Furthermore, since the cooling tower and the cooling device are required, the equipment becomes larger and complicated. In order to install this air conditioning equipment in an existing clean room or the like, the existing air conditioning equipment is discarded and newly installed. There is a problem that a large amount of capital investment is required.

  The present invention has been made in consideration of the above-described conventional problems, and an object thereof is to provide an air conditioning method that enables highly efficient air conditioning in a clean room or the like. The present invention also provides an air conditioning facility that enables high-efficiency air conditioning by implementing the air conditioning method, and further enables cost reduction by easily diverting existing air conditioning facilities and the like. It aims at providing the control method of an air conditioning installation.

  In the air conditioning method of the present invention, outside air is introduced and air-conditioned by an outside air conditioner, the air-conditioned outside air and air from the air-conditioned space are sucked, air-conditioned by the air-conditioner, and then supplied to the air-conditioned space And air conditioning the exhaust air by exhausting the air in the air-conditioned space and introducing it into a wet dust collector, injecting the liquid with the wet dust collector, and bringing the injected liquid into contact with the exhaust gas. The method is characterized in that heat exchange is performed between the liquid and outside air before being introduced into the outside air conditioner.

  According to such a method, since the outside air before being introduced into the outside air conditioner can be heated or cooled by the liquid used in the wet dust collector, the load related to the heating or cooling in the outside air conditioner is reduced, and high Efficient air conditioning is possible.

  In addition, when the temperature of the liquid after heat exchange with the outside air before being introduced into the outside air conditioner is lower than the temperature in the air-conditioned space, the liquid after the heat exchange is When heat is exchanged with the air that is sucked from the air-conditioned space and before being introduced into the air conditioner, the cooling load on the air conditioner is reduced, and the efficiency of air conditioning in the air conditioner is improved.

  Furthermore, when the temperature of the liquid after heat exchange with the outside air before being introduced into the outside air conditioner is higher than the temperature in the air-conditioned space, the liquid after the heat exchange is When air is evacuated from the air-conditioned space and is circulated through the wet dust collector without exchanging heat with the air before being introduced into the air conditioner, highly efficient air conditioning is possible without increasing the burden on the air conditioner. Become.

  The temperature of the liquid after heat exchange with the outside air before being introduced into the outside air conditioner is lower than the temperature in the air-conditioned space, and the temperature in the air-conditioned space and the temperature of the liquid are When the difference is greater than or equal to a predetermined range, it is preferable to intermittently exchange heat between the liquid after the heat exchange and air before being introduced from the air-conditioned space and introduced into the air conditioner. is there.

  The air-conditioning equipment of the present invention is an air-conditioning equipment that air-conditions an air-conditioned space, and introduces outside air through an outside air introduction path and air-conditions, an outlet side of the outside air conditioner, and the air-conditioned space An air conditioner that supplies air to the air-conditioned space after inhaling and air-conditioning the outside air conditioned by the outside air conditioner and the air from the air-conditioned space through an air conditioner suction path that communicates with the air-conditioner; and Exhaust means for exhausting air in the air-conditioned space and introducing it into the wet dust collector, a first heat exchanger provided in the outside air introduction path, a liquid storage section provided in the wet dust collector, and the first heat A first path communicating with the inlet side of the exchanger and a second path communicating with the outlet side of the first heat exchanger and the liquid storage unit are provided.

  According to such a configuration, since the outside air before being introduced into the outside air conditioner can be heated or cooled by the liquid used in the wet dust collector, the load related to the heating or cooling in the outside air conditioner is reduced, and high It becomes possible to construct an efficient air conditioning facility.

  The air conditioner of the present invention is an air conditioner for air-conditioning an air-conditioned space, and introduces an outside air through an outside air introduction path and air-conditions, an outlet side of the outside air conditioner, and the object to be aired. An air conditioner for supplying air to the air-conditioned space after inhaling and air-conditioning the outside air conditioned by the outside air conditioner and the air from the air-conditioned space via an air conditioner suction path communicating with the air-conditioned space; , Exhaust means for exhausting air in the air-conditioned space and introducing it into a wet dust collector, a first heat exchanger provided in the outside air introduction path, and a second heat exchange provided in the air-conditioner intake path A first path that communicates a container, a liquid reservoir provided in the wet dust collector, and an inlet side of the first heat exchanger, and the first heat exchanger, and the first heat exchanger. A third path communicating the outlet side of the heat exchanger and the liquid reservoir It is characterized in.

  According to such a configuration, since the outside air before being introduced into the outside air conditioner can be heated or cooled by the liquid used in the wet dust collector, the load related to the heating or cooling in the outside air conditioner is reduced, and high It becomes possible to construct an efficient air-conditioning facility, reduce the cooling load on the air conditioner, and improve the efficiency of air conditioning on the air conditioner.

  The air conditioner of the present invention is an air conditioner for air-conditioning an air-conditioned space, and introduces an outside air through an outside air introduction path and air-conditions, an outlet side of the outside air conditioner, and the object to be aired. An air conditioner for supplying air to the air-conditioned space after inhaling and air-conditioning the outside air conditioned by the outside air conditioner and the air from the air-conditioned space via an air conditioner suction path communicating with the air-conditioned space; , Exhaust means for exhausting air in the air-conditioned space and introducing it into a wet dust collector, a first heat exchanger provided in the outside air introduction path, and a second heat exchange provided in the air-conditioner intake path A first path that communicates a storage device, a liquid storage section provided in the wet dust collector, and an inlet side of the first heat exchanger, an outlet side of the first heat exchanger, and the liquid storage section Through the second path communicating with the second heat exchanger, A third path that communicates the outlet side of the first heat exchanger and the liquid reservoir, and the second path bypasses the second heat exchanger, and the second path And a switching means for selectively switching between the third path and the third path.

  According to such a configuration, since the outside air before being introduced into the outside air conditioner can be heated or cooled by the liquid used in the wet dust collector, the load related to the heating or cooling in the outside air conditioner is reduced, and high It becomes possible to construct an efficient air-conditioning facility, reduce the cooling load on the air conditioner, and improve the efficiency of air conditioning on the air conditioner. Further, the second path bypasses the second heat exchanger and includes switching means for selectively switching between the second path and the third path. Depending on the state, the use of the second heat exchanger can be selected, and air conditioning with even higher efficiency becomes possible.

  In the air conditioning equipment control method according to the present invention, the temperature of the outside air before being introduced into the outside air conditioner is in a temperature range between the temperature in the air-conditioned space and the temperature of the liquid in the liquid reservoir. In some cases, the circulation of the liquid is stopped. By such a control method, it is possible to prevent unnecessary heat exchange that does not contribute to improving the efficiency of the air-conditioning equipment in the first heat exchanger or the second heat exchanger.

  ADVANTAGE OF THE INVENTION According to this invention, the air conditioning method, air conditioning equipment, and control method of this air conditioning equipment which can reduce the burden of external air conditioners and air conditioners, such as a clean room, and enable highly efficient air conditioning are provided. In addition, according to the present invention, a highly efficient air conditioning facility can be provided by an easy work of laying a pipe in which a heat medium circulates or a heat exchanger in an air conditioning facility installed in an existing clean room or the like. This can be realized and the energy consumption of the air-conditioning equipment can be reduced at low cost.

  DESCRIPTION OF EMBODIMENTS Hereinafter, an air conditioning method according to the present invention will be described in detail with reference to the accompanying drawings by giving preferred embodiments in relation to air conditioning equipment for implementing the air conditioning method.

  FIG. 1: has shown schematic structure explanatory drawing of the air conditioning equipment 10 which concerns on one Embodiment of this invention. As shown in FIG. 1, an air conditioner 10 has a constant temperature (for example, 23 ± 1 ° C.), a constant humidity (for example, 45 ± 5% RH), and a constant pressure (for example, in a clean room 12 as an example of an air-conditioned space. For example, it is a facility that is maintained at a positive pressure slightly higher than the outside and about 10 to 20 Pa) from the air conditioning unit 14, the heat medium circulation unit 16, the local exhaust unit 18, and the control device 19. Composed.

  The clean room 12 is used, for example, in a semiconductor manufacturing factory, and a large number of various production apparatuses such as a cleaning apparatus and a drying apparatus (not shown) are installed in each room for each manufacturing process.

  The air conditioning unit 14 introduces outside air and air-conditions it to a predetermined temperature and humidity, then sucks air (circulation air) in the clean room 12 and mixes it with the outside air, then air-conditions and supplies the air into the clean room 12. .

  The air conditioner 14 communicates with an outside air introduction path 20 that is a duct for introducing outside air, an outside air conditioner 22 that communicates with the outside air introduction path 20 and air-conditions outside air introduced through the outside air introduction path 20, and an outside air harmony. An air conditioner suction path 24 that communicates the outlet side (downstream side) of the machine 22 and the clean room 12, and an air-conditioner suction path that is a mixture of the outside air conditioned by the outside air conditioner 22 and the ambient air from the clean room 12 An air conditioner 26 that is introduced through the air conditioner 24 for air conditioning, and a circulation path 28 that communicates with the outlet side of the air conditioner 26 and supplies the air-fuel mixture air-conditioned by the air conditioner 26 into the clean room 12.

  The outside air conditioner 22 introduces outside air through the outside air introduction path 20 and performs air conditioning (adjustment of temperature and humidity). In this outdoor air conditioner 22, a preheating coil 30, a humidifier 32, a cooling coil 34, a reburning coil 36, a fan 38, and a filter 40 are arranged in this order from the inlet side (upstream side). Circulates outside air.

  The preheating coil 30 and the reburning coil 36 are, for example, an electric heater or a condenser of a vapor compression refrigeration machine (not shown), and have an effect of heating the outside air. The cooling coil 34 is, for example, an evaporator of the vapor compression refrigerator, and has an effect of cooling outside air. Furthermore, the humidifier 32 sprays water to condition the outside air and brings the action of removing contaminants and the like in the outside air by bringing the water and the outside air into contact with each other. For example, a HEPA filter is preferably used as the filter 40, and dust or the like of the outside air introduced into the outside air conditioner 22 is removed.

  The air conditioner 26 performs air conditioning by introducing an air-fuel mixture in which the outside air conditioned by the outside air conditioner 22 and the ambient air from the clean room 12 are mixed through the air conditioner suction path 24. In this air conditioner 26, a cooling coil 42, a humidifier 44, and a fan 46 are arranged in order from the inlet side (upstream side), and after the air-fuel mixture is circulated and air-conditioned by the fan 46, the clean room 12. Supplied in.

  The cooling coil 42 cools the air-fuel mixture by a cooling water circulation device including a cooling tower (not shown), for example. Further, the humidifier 44 adjusts the air-fuel mixture introduced by spraying water in the same manner as the humidifier 32.

  The heat medium circulation unit 16 circulates water used in a scrubber 48 described later as a heat medium, and exchanges heat with air at each position of the air conditioner 14, thereby burdening the outside air conditioner 22 and the air conditioner 26. It is arranged to reduce this.

  The heat medium circulation unit 16 includes a water tank 50 provided in the lower part of the scrubber 48 and an inlet side (upstream side) of the first heat exchanger 52 (first heat exchanger) disposed in the outside air introduction path 20. A first path 54 (first path) that communicates, a second path 56 (second path) that communicates the outlet side (downstream side) of the first heat exchanger 52 and the water tank 50, and a second path The three-way valve 60 (switching) is again routed to the second path 56 via the second heat exchanger 58 (second heat exchanger) that is branched from 56 and disposed in the clean room side path 24b of the air conditioner suction path 24. The water in the water tank 50 of the scrubber 48 is circulated as a heat medium by a pump 64 disposed in the first path 54.

  In the present embodiment, when the three-way valve 60 is switched, a path in which the upstream side from the branch portion of the second path 56, the switching path 62, and the downstream side of the three-way valve 60 of the second path 56 communicate with each other, It will function as the third route.

  Further, the switching path 62 may branch from the second path 56, pass through the second heat exchanger 58, and then be directly connected to the water tank 50. In this case, the three-way valve 60 is disposed at a branch portion between the switching path 62 and the second path 56.

  The first heat exchanger 52 and the second heat exchanger 58 are disposed so that the heat medium, the outside air, and the ambient air are in counterflow. As a result, the heat exchange efficiency between the heat medium in the first heat exchanger 52 and the second heat exchanger 58 and the outside air or the atmosphere is improved.

The local exhaust unit 18 serving as an exhaust unit is configured to exhaust the air in which chemicals such as HF (hydrogen fluoride) and NH ₃ (ammonia) used in a cleaning device (not shown) in the clean room 12 are evaporated and mixed into the exhaust duct 66. Is forcibly exhausted by locally sucking from the air.

  The local exhaust unit 18 communicates with an exhaust path 68 communicating with the exhaust duct 66, an exhaust fan 70 disposed in the exhaust path 68, and the exhaust path 68. And a scrubber 48 (wet dust collector) for dissolving the exhaust gas in water.

  The scrubber 48 which is a wet dust collector has a water tank 50 as a liquid storage part in the lower part, and water stored in the water tank 50 is sprayed from the spray part 74 via the pump 72 and brought into contact with the exhaust gas. The exhaust gas is cleaned by removing chemicals in the exhaust gas. The cleaned exhaust is discharged from the top of the scrubber 48 to the outside. Moreover, the water stored in the water tank 50 is discharged through the drain valve 76 as necessary, and is supplied from the water supply port 78.

  As described above, the air in the clean room 12 is discharged to the outside by the local exhaust unit 18, but the inside of the clean room 12 is maintained at a predetermined pressure (positive pressure) by introducing the outside air as described above.

  The control device 19 is a temperature sensor for detecting the temperature of each part in the air conditioning equipment 10, that is, a temperature sensor 80a for detecting the outside air temperature (Toa), a temperature sensor 80b for detecting the temperature (Tr) in the clean room 12, and a water tank. The three-way valve 60 is switch-controlled based on the detection results of the temperature sensor 80c for detecting the temperature (T1) in the temperature sensor 50 and the temperature sensor 80d for detecting the temperature (T2) of the heat medium output from the first heat exchanger 52. .

  That is, the control device 19 selectively controls whether the heat medium flows to the switching path 62 by switching the three-way valve 60 based on the detection results of the temperature sensors 80a to 80d. In this case, when the heat medium is not circulated to the switching path 62 and the second heat exchanger 58 is not functioned, the three-way valve 60 is switched so that the heat medium circulates in the direction A in FIG. On the other hand, when the heat medium is caused to flow through the switching path 62 and the second heat exchanger 58 is caused to function, the three-way valve 60 is switched so that the heat medium flows in the direction B in FIG.

  Further, the control device 19 controls the operation of the outdoor air conditioner 22, the air conditioner 26, the scrubber 48, the exhaust fan 70, the pump 64, and the like.

  Next, the air conditioning method of the clean room 12 by the air conditioning equipment 10 comprised as mentioned above is demonstrated. In the following description, first, operations of the air conditioning unit 14 and the local exhaust unit 18 will be described with reference to FIG. 1, and then operations of the heat medium circulation unit 16 will be described with reference to FIGS.

  In the air conditioner 14, the outside air is introduced into the outside air conditioner 22 via the outside air introduction path 20, and is adjusted to a predetermined temperature and humidity by the outside air conditioner 22, and the outside air conditioner side path of the air conditioner suction path 24. It distributes to 24a.

  The outside air that has been air-conditioned by the outside air conditioner 22 and circulated through the outside air conditioner side path 24 a is mixed with the air from the clean room side path 24 b of the air conditioner suction path 24, and this mixture is introduced into the air conditioner 26. The The air conditioner 26 adjusts the air-fuel mixture to a predetermined temperature and humidity, and then supplies (supply) air into the clean room 12 from the circulation path 28.

  As described above, the inside of the clean room 12 is maintained at a predetermined temperature and humidity by air-conditioning the outside air and the ambient air in the air conditioning unit 14.

  On the other hand, in the local exhaust unit 18, the exhaust from the exhaust duct 66 is introduced into the scrubber 48 through the exhaust path 68 as described above. The exhaust gas is washed in contact with water sprayed in the scrubber 48 and then discharged to the outside.

  At this time, since the temperature (Tr) in the clean room 12 is substantially constant at + 23 ° C., the temperature of the exhaust gas introduced into the scrubber 48 is also substantially constant at + 23 ° C. For this reason, after being sprayed in the scrubber 48 and in contact with the exhaust, the temperature (T2) of the water stored in the water tank 50 is cooled by contact with the exhaust of about + 23 ° C. and the latent heat of evaporation of the sprayed water. Therefore, the temperature is maintained at about +15 to 20 ° C. almost independently of the outside air temperature Toa.

  Next, the operation of the heat medium circulating unit 16 will be described with reference to FIGS. In the heat medium circulating unit 16, water stored in the water tank 50 of the scrubber 48 circulates as a heat medium by driving the pump 64. Note that the switching direction of the three-way valve 60 is controlled mainly by the relationship between the temperature (Tr) in the clean room 12 and the temperature (T2) of the heat medium output from the first heat exchanger 52. In this case, the description will be made on the assumption that Tr> T1.

  First, for example, in the summer, the case where the outside air temperature (Toa) is higher than the temperature (Tr) in the clean room 12, that is, the case where Toa> Tr will be described.

  In this case, the heat medium (water) stored in the water tank 50 is, for example, about T1 = + 15 ° C. as described above. For this reason, by driving the pump 64, the heat medium flows through the first heat exchanger 52 from the first path 54 and exchanges heat with the outside air before being introduced into the outside air conditioner 22. Cooling.

  In this way, since the outside air before being introduced into the outside air conditioner 22 is cooled, the cooling load on the outside air conditioner 22 is reduced even when the outside air temperature is high. Increases efficiency.

  Here, the atmosphere to the clean room side path 24 b is slightly higher than the temperature in the clean room 12 due to the heat load in the clean room 12, for example, about + 25 ° C.

  Therefore, first, in the relationship between the temperature (T2) of the heat medium output from the first heat exchanger 52 and the temperature (Tr) in the clean room 12, when T2 <Tr, the control device 19 sets the three-way valve 60. To the B direction. As a result, as shown in FIG. 3, the heat medium that has passed through the first heat exchanger 52 from the first path 54 flows to the switching path 62 and the second heat exchanger 58 under the action of the pump 64.

  For this reason, in the 2nd heat exchanger 58, the air-fuel | gaseous mixture introduce | transduced into the air conditioner 26 is cooled by cooling the atmosphere from the clean room 12 with a heat medium, and the cooling load in the air conditioner 26 is reduced. Therefore, the efficiency of air conditioning in the air conditioner 26 is improved. Then, the heat medium that has passed through the second heat exchanger 58 returns to the water tank 50 via the three-way valve 60.

  On the other hand, for example, when the outside air temperature (Toa) is very high and the relationship between the temperature (T2) of the heat medium output from the first heat exchanger 52 and the temperature (Tr) in the clean room 12 is T2> Tr In this case, the control device 19 switches the three-way valve 60 in the A direction because it is impossible to cool the atmosphere with the heat medium. As a result, as shown in FIG. 2, the heat medium returns to the water tank 50 through the three-way valve 60 without flowing through the switching path 62 and the second heat exchanger 58 under the action of the pump 64. Become.

  Secondly, for example, in winter, the case where the outside air temperature (Toa) is lower than the temperature (Tr) in the clean room 12, that is, the case where Toa <Tr will be described. In this case, the relationship between T1, Toa, and Tr is Toa ≦ T1 <Tr.

  Also in this case, the heat medium (water) in the water tank 50 is, for example, about T1 = + 15 ° C. as described above. For this reason, by driving the pump 64, the heat medium flows through the first heat exchanger 52 from the first path 54 and exchanges heat with the outside air before being introduced into the outside air conditioner 22. While heating, the heat medium itself is cooled.

  As described above, since the outside air before being introduced into the outside air conditioner 22 is heated, the heating load on the outside air conditioner 22 is reduced even when the outside air temperature is low. Increases efficiency.

  Here, the atmosphere to the clean room side path 24b is slightly higher than the temperature in the clean room 12 due to the heat load in the clean room 12, as described above, for example, about + 25 ° C.

  Therefore, first, in the relationship between the temperature (T2) of the heat medium output from the first heat exchanger 52 and the temperature (Tr) in the clean room 12, when T2 <Tr, the control device 19 sets the three-way valve 60. To the B direction. As a result, as shown in FIG. 3, the heat medium that has passed through the first heat exchanger 52 from the first path 54 flows to the switching path 62 and the second heat exchanger 58 under the action of the pump 64.

  For this reason, in the 2nd heat exchanger 58, the air-fuel | gaseous mixture introduce | transduced into the air conditioner 26 is cooled by cooling the atmosphere from the clean room 12 with a heat medium, and the cooling load in the air conditioner 26 is reduced. Therefore, the efficiency of air conditioning in the air conditioner 26 is improved. Then, the heat medium that has passed through the second heat exchanger 58 returns to the water tank 50 via the three-way valve 60.

  By the way, in this case (for example, in winter, Toa <Tr), the temperature (T2) of the heat medium output from the first heat exchanger 52 does not become higher than the temperature (Tr) in the clean room 12, Usually, the three-way valve 60 is always controlled to be switched in the B direction.

  However, when the outside air temperature (Toa) is very low, the temperature (T2) of the heat medium output from the first heat exchanger 52 may be excessively lowered. In such a case, if the heat medium excessively cooled in the first heat exchanger 52 is circulated to the second heat exchanger 58, the temperature of the air from the clean room 12 becomes excessive (for example, + 10 ° C.). To about +15 [deg.] C.), and as a result, the heating load on the air conditioner 26 may increase.

  Therefore, as described above, when the outside air temperature (Toa) is very low and the temperature of the ambient air from the clean room may be excessively lowered, that is, the temperature of the heat medium that has come out of the first heat exchanger 52 ( (T2) and the temperature (Tr) in the clean room 12 where T2 <Tr and the temperature difference between T2 and Tr is not less than a predetermined range (for example, 20 ° C. or more) (hereinafter, T2 < <Indicated as Tr), the control device 19 intermittently switches and controls the three-way valve 60 as switching means, and the second heat exchanger 58 intermittently exchanges heat between the heat medium and the atmosphere. Thus, control is performed to prevent the atmosphere from being excessively cooled.

  Thus, about the method of controlling the three-way valve 60 which is a switching means intermittently, for example, the air introduced into the air conditioner 26 from the heat exchange capability of the second heat exchanger 58 and the temperature difference between Tr and T2. If the temperature of the air introduced into the air conditioner 26 is assumed to be lower than Tr, or the temperature of the air after heat exchange with the second heat exchanger 58 is measured. In the case where the measured temperature is lower than Tr, there is a method in which the three-way valve 60 is switched and the circulation of the heat medium to the second heat exchanger 58 is temporarily stopped.

  The intermittent heat exchange is controlled so that the flow of the heat medium to the second heat exchanger 58 is stopped or circulated every predetermined time by switching the three-way valve 60 every predetermined time. One example is to do.

  Third, other than summer and winter, for example, in spring and autumn (intermediate), the outside air temperature (Toa) is equal to or lower than the temperature (Tr) in the clean room 12, and the temperature of the thermal refrigerant in the water tank 50 ( A case where T1 is higher (Toa is in the temperature range between Tr and T1), that is, a case where T1 <Toa ≦ Tr is described.

  In such a case, even if heat exchange between the heat medium in the first heat exchanger 52 and the second heat exchanger 58 and the outside air or the atmosphere is performed, it is not always possible to improve the desired efficiency. there is a possibility. For this reason, in such a case, the control device 19 stops the pump 64 and performs control so as not to circulate the heat medium to the first heat exchanger 52 and the second heat exchanger 58. Shall.

  As described above, in the heat medium circulating unit 16, as shown in Table 1, five kinds of control methods are executed. Thus, in the air conditioning facility 10, the outside air temperature (Toa), the temperature in the clean room 12 (Tr), the temperature of the thermal refrigerant from the first heat exchanger 52 (T2), and the temperature in the water tank 50 (T1). By performing ON / OFF control of the pump 64 and switching control of the three-way valve 60 according to each condition consisting of the above, it is possible to perform air conditioning operation with higher efficiency.

  As described above, according to the air-conditioning equipment 10 according to the present embodiment, the heat medium circulation unit 16 is circulated using the water that is the liquid used in the scrubber 48 as the heat medium, and the three-way valve 60 is controlled to be switched. Accordingly, the outside air and the ambient air introduced into the outside air conditioner 22 and the air conditioner 26 can be heated or cooled by the first heat exchanger 52 and the second heat exchanger 58.

  For this reason, for example, in summer when the outside air temperature is high, the burden on the outside air conditioner 22 can be greatly reduced. Further, in winter when the outside air temperature is low, the burden on the outside air conditioner 22 and the air conditioner 26 can be greatly reduced, and the efficiency of the air conditioner 10 can be improved.

  In particular, when the local exhaust unit 18 is provided as in the clean room 12 in the above embodiment, the amount of air exhausted in the clean room 12 is large, and the inside of the clean room 12 is maintained at the positive pressure as described above. Therefore, the amount of outside air introduced is increased correspondingly, and a large amount of energy is consumed for the air conditioning. However, since the air-conditioning equipment 10 according to the present embodiment can perform air conditioning with high efficiency as described above, the energy consumption related to the air conditioning of the clean room 12 can be significantly reduced.

  By the way, in the air conditioning equipment 10 according to the present embodiment, basically, the air conditioning efficiency in the air conditioning unit 14 can be greatly improved by a simple configuration of the heat medium circulation by the heat medium circulation unit 16. .

  For this reason, for example, in an air conditioning facility such as a clean room where the air conditioning unit 14 and the local exhaust unit 18 are already disposed, the first path 54 and the second path 56 are piped to the water tank 50 of the scrubber 48. In addition, the first heat exchanger 52 and the second heat exchanger 58 are further installed in the outside air introduction path 20 and the clean room side path 24b, and the three-way valve 60 and each path are further installed by a simple additional work. The air conditioning equipment 10 which concerns on can be constructed | assembled.

  Therefore, it becomes possible to change the existing air conditioning equipment of the clean room to the highly efficient air conditioning equipment 10 according to the present embodiment easily and at low cost.

  In addition, the heat medium circulation part 16 is the 1st path | route 54, the 2nd path | route 56, the 1st heat exchanger 52, for example according to the use conditions of the air conditioning equipment 10 which concerns on this embodiment, an installation place, etc. Without using the three-way valve 60 and the like, the outside air and the heat medium may be heat exchanged, and the atmosphere and the heat medium may not be heat exchanged.

  Similarly, the heat medium circulating unit 16 includes the first path 54, the first heat exchanger 52, the upstream side of the branching portion of the second path 56 to the switching path 62, the switching path 62, and the second heat exchange. The downstream side of the switching path 62 may be communicated with the water tank 50 using the vessel 58, and the outside air and the ambient air may be configured to exchange heat with the heat medium without using the three-way valve 60 or the like. In this case, the upstream side of the branch portion of the second path 56 to the switching path 62, the switching path 62, and the second heat exchanger 58 are used to communicate the downstream side of the switching path 62 with the water tank 50. The path configured by the above functions as the third path described above.

  As mentioned above, although this invention was demonstrated by the said embodiment, this invention is not limited to this, Of course, it is possible to take various structures, without deviating from the summary of this invention.

  The second heat exchanger 58 is provided in the clean room side path 24b of the air conditioner suction path 24. For example, the second heat exchanger 58 is provided in the air conditioner suction path 24 after the outside air conditioner side path 24a and the clean room side path 24b merge. It may be provided.

  Moreover, the outdoor air conditioner 22 and the air conditioner 26 should just be able to adjust the external air and air-fuel mixture which are introduce | transduced to predetermined temperature and humidity, respectively, and are not limited to the structure of the said embodiment.

  Further, the operation control of the air-conditioning equipment 10 according to the present invention is not limited to the above-described five types of control methods (see Table 1), and it is needless to say that various controls can be executed.

  Furthermore, it is natural that the air conditioning method, the air conditioning equipment, and the control method for the air conditioning equipment according to the present invention can be applied to a temperature-controlled room other than a clean room.

It is a schematic structure explanatory view of the air harmony equipment concerning the embodiment of the present invention. In the said air conditioning equipment, it is explanatory drawing which shows the distribution path of a heat carrier at the time of switching a three-way valve to the A direction in FIG. In the said air conditioning equipment, it is explanatory drawing which shows the distribution path of a heat carrier at the time of switching a three-way valve to the B direction in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Air conditioning equipment 12 ... Clean room 14 ... Air conditioning part 16 ... Heat-medium circulation part 18 ... Local exhaust part 19 ... Control apparatus 20 ... Outside air introduction path 22 ... Outside air conditioner 24 ... Air conditioner intake path 24a ... Outside air conditioner side Route 24b ... Clean room side route 26 ... Air conditioner 28 ... Circulation route 48 ... Scrubber 50 ... Water tank 52 ... First heat exchanger 54 ... First route 56 ... Second route 58 ... Second heat exchanger 60 ... Three-way valve 62 ... Switching path 64, 72 ... Pump 74 ... Spraying parts 80a, 80b, 80c, 80d ... Temperature sensor

Claims (6)

Air is introduced and air-conditioned by an outdoor air conditioner,
Inhale the air from the air-conditioned outside air and air from the air-conditioned space, air-conditioned by an air conditioner, and supply to the air-conditioned space,
An air conditioning method in which air in the air-conditioned space is exhausted by an exhaust means and introduced into a wet dust collector, liquid is ejected by the wet dust collector, and the ejected liquid and the exhaust are brought into contact with each other to clean the exhaust. There,
Heat exchange between the liquid and the outside air before being introduced into the outside air conditioner ,
When the temperature of the liquid after heat exchange with the outside air before being introduced into the outside air conditioner is lower than the temperature in the air-conditioned space,
The liquid after exchanging the heat, the air conditioner wherein the Rukoto to exchange heat with air prior to being introduced into the air-conditioned space is sucked from and the air conditioner. Air is introduced and air-conditioned by an outdoor air conditioner,
Inhale the air from the air-conditioned outside air and air from the air-conditioned space, air-conditioned by an air conditioner, and supply to the air-conditioned space,
An air conditioning method in which air in the air-conditioned space is exhausted by an exhaust means and introduced into a wet dust collector, liquid is ejected by the wet dust collector, and the ejected liquid and the exhaust are brought into contact with each other to clean the exhaust. There,
Heat exchange between the liquid and the outside air before being introduced into the outside air conditioner,
When the temperature of the liquid after heat exchange with the outside air before being introduced into the outside air conditioner is higher than the temperature in the air-conditioned space ,
Stop circulation path toward the heat exchanger for performing heat exchange with air before being introduced before Symbol sucked from the air-conditioned space and the air conditioner, the liquid after the outdoor air heat exchanger, the heat An air conditioning method comprising circulating to the wet dust collector through a path that bypasses the exchange unit . The air conditioning method according to claim 1 , wherein
The temperature of the liquid after heat exchange with the outside air before being introduced into the outside air conditioner is lower than the temperature in the air-conditioned space, and the difference between the temperature in the air-conditioned space and the temperature of the liquid is If it is above the specified range,
An air conditioning method characterized by intermittently exchanging heat between the liquid after the heat exchange and the air that has been sucked from the air-conditioned space and before being introduced into the air conditioner. An air conditioner that air-conditions the air-conditioned space,
An outside air conditioner that introduces outside air through the outside air introduction path and air-conditions,
After air-conditioning by taking in the outside air conditioned by the outside air conditioner and the air from the air conditioned space through an air conditioner suction path communicating the outlet side of the outside air conditioner and the air conditioned space, An air conditioner that supplies the air-conditioned space;
Exhaust means for exhausting air in the air-conditioned space and introducing it into a wet dust collector;
A first heat exchanger provided in the outside air introduction path;
A second heat exchanger provided in the air conditioner suction path;
A first path communicating the liquid storage section provided in the wet dust collector and the inlet side of the first heat exchanger;
An air-conditioning facility comprising a third path communicating the outlet side of the first heat exchanger and the liquid storage part via the second heat exchanger. An air conditioner that air-conditions the air-conditioned space,
An outside air conditioner that introduces outside air through the outside air introduction path and air-conditions,
After air-conditioning by taking in the outside air conditioned by the outside air conditioner and the air from the air conditioned space through an air conditioner suction path communicating the outlet side of the outside air conditioner and the air conditioned space, An air conditioner that supplies the air-conditioned space;
Exhaust means for exhausting air in the air-conditioned space and introducing it into a wet dust collector;
A first heat exchanger provided in the outside air introduction path;
A second heat exchanger provided in the air conditioner suction path;
A first path communicating the liquid storage section provided in the wet dust collector and the inlet side of the first heat exchanger;
A second path communicating the outlet side of the first heat exchanger and the liquid reservoir;
A third path communicating the outlet side of the first heat exchanger and the liquid reservoir via the second heat exchanger;
The second path bypasses the second heat exchanger;
An air conditioning facility comprising switching means for selectively switching between the second route and the third route. It is a control method of the air conditioning equipment according to claim 4 or 5 ,
When the temperature of the outside air before being introduced into the outside air conditioner is in a temperature range between the temperature in the air-conditioned space and the temperature of the liquid in the liquid reservoir, the circulation of the liquid is stopped. A control method of an air conditioning facility characterized by the above.

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