JP3483080B2 - Surface inspection equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface inspection apparatus for inspecting the surface of an inspected object having an irregular shape such as a photoconductor of a copying machine, a printer or the like using an electrophotographic method, and more particularly The present invention relates to a surface inspection device that inspects the surface of an object to be inspected using sound waves.

[0002]

2. Description of the Related Art As a conventional surface inspection apparatus, for example,
Japanese Unexamined Patent Publication No. 5-99639 discloses a device for inspecting a flat object for gradual unevenness. This device irradiates the surface of the object to be inspected with a laser beam, projects the reflected light reflected from the surface of the object to be inspected onto the screen, and the image of the screen is photographed by a CCD camera, based on the image photographed by the CCD camera. Then, the unevenness of the surface of the inspection object is inspected.

According to Japanese Unexamined Patent Publication No. 5-99639, defects can be recognized with high accuracy, and the optical system of laser light is simple.
And it can be used as a simple inspection device that can be operated easily,
In addition, it is possible to easily detect a large-area concavo-convex defect and also detect a milli-order size.

[0004]

However, according to Japanese Unexamined Patent Publication No. 5-99639, for inspecting the surface of the inspection object, the inspection object is irradiated with light.
There is a problem in that an object to be inspected, such as a photoconductor used in an electrophotographic system, which is weak against light, may be deteriorated.

Further, according to Japanese Unexamined Patent Publication No. 5-99639, for example, when the object to be inspected is a photoconductor having an irregular shape, the surface of the photoconductor must be held in a shape capable of inspecting, There is a problem that it is difficult to perform the examination in the dark room.

The present invention has been made in view of the above, and an object of the present invention is to provide a surface inspection apparatus capable of performing a surface inspection of an object to be inspected without irradiating light.

[0007]

In order to achieve the above object, the surface inspection apparatus according to claim 1 is a surface inspection apparatus for inspecting the surface of an irregularly shaped object to be inspected. Is held in a constant shape, ultrasonic irradiation means for irradiating the surface of the inspected object held in a fixed shape by the shape holding means with ultrasonic waves, and irradiation by the ultrasonic irradiation means scattered wave detecting means for detecting a scattered wave ultrasonic waves are generated is reflected by the surface of the object to be inspected, drive means for said Ru changing the inspection position by moving the object to be inspected, the inspection position by the drive means Before and after being changed
Each of the scattered wave detecting means have in which is a difference calculating means for calculating the difference <br/> amount of the detected scattered waves.

[0008] The surface inspection apparatus according to claim 2, prior
A plurality of scattered wave detecting means are arranged .

[0009] The surface inspection apparatus according to claim 3, before
A plurality of ultrasonic irradiation means are arranged.

[0010] The surface inspection apparatus according to claim 4, before
Note: Multiple ultrasonic wave irradiation means have different wavelengths of ultrasonic waves.
It will be.

[0011]

[0012]

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION The surface inspection apparatus of the present invention will be described below with reference to [Example 1], [Example 2], [Example 3],
[Embodiment 4], [Embodiment 5], and [Embodiment 6] will be described in detail with reference to the drawings.

[Embodiment 1] FIG. 1 is a configuration diagram showing a surface inspection apparatus of Embodiment 1, FIG. 1 (a) is a top view of the surface inspection apparatus, and FIG. 1 (b) is a surface inspection apparatus. It is a side view of an apparatus. The surface inspection apparatus according to the first embodiment includes the drive belt 101.
And a drive unit 102 for rotating the drive belt 101.
A first cylindrical body 103 that rotates based on the rotational driving of the drive belt 101, and a rotatable second cylindrical body 104.
And an ultrasonic wave irradiator 105 as an ultrasonic wave irradiating means for irradiating the ultrasonic wave, and a scattered wave generated by the ultrasonic wave radiated by the ultrasonic wave irradiator 105 being reflected on the surface of the seamless belt 107 which is the object to be inspected. And a scattered wave detector 106 as a scattered wave detecting means for detecting.

Further, the first cylindrical body 103 and the second cylindrical body 104 constitute a shape holding means for holding the surface of the seamless belt 107 in a constant shape.

Next, the operation of the above configuration will be described. FIG. 2 is a schematic diagram showing the seamless belt 107. As shown, the seamless belt 107 normally becomes elliptical due to the influence of gravity. Further, when a force other than gravity is applied, it is deformed by the applied force, and the curvature of the surface of the seamless belt 107 changes greatly.

Here, when inspecting the surface of an irregularly shaped object to be inspected, the surface of the irregularly shaped object to be inspected is fixed to a fixed shape and the inspection is performed. In the first embodiment, as shown in FIG. 1, the surface of the seamless belt 107 is fixed in a fixed shape by the first cylindrical body 103 and the second cylindrical body 104.

First cylinder 103 and second cylinder 104
Seamless belt 10 fixed in a fixed shape by and
The surface of No. 7 generates scattered light based on the ultrasonic waves emitted from the ultrasonic wave irradiator 105 and the shape change of the surface irregularities. The scattered wave is detected by the scattered wave detector 106.

Subsequently, the seamless belt 107 is composed of the drive belt 101 and the first belt which are rotated by the drive unit 102.
It is rotated by the cylindrical body 103. During this rotation, the surface of the seamless belt 107 is always fixed to a constant shape by the first cylindrical body 103 and the second cylindrical body 104.

As described above, according to the first embodiment, since the surface of the seamless belt 107 is fixed in a fixed shape by the first cylindrical body 103 and the second cylindrical body 104, the ultrasonic wave irradiator 105 and the scatterer are scattered. The inspection can be performed using ultrasonic waves from the wave detector 106. As a result, the surface can be inspected in a dark room or the like, and the surface of an object to be inspected, which is weak against light, for example, the surface of the photoconductor can be inspected.

Further, since the seamless belt 107 is sequentially inspected by the drive belt 101, the drive section 102 and the first cylindrical body 103, the entire surface of the seamless belt 107 can be easily inspected.

[Embodiment 2] The surface inspection apparatus of Embodiment 2 is
This is performed by comparing the scattered wave obtained by the inspection with the scattered wave obtained one time before. Since the second embodiment is basically the same as the first embodiment, only different points will be described in detail with reference to the drawings. In addition, in the second embodiment, the inspected amorphous object to be inspected will be described as the inspected object 207.

FIG. 3 is a block diagram showing the main part of the surface inspection apparatus of the second embodiment. The essential parts of the surface inspection apparatus of the second embodiment are: a second cylindrical body 104 that makes the surface of the object to be inspected 207 a uniform shape; an ultrasonic wave irradiator 105 that emits ultrasonic waves;
The ultrasonic wave emitted by the ultrasonic wave irradiator 105 is the object to be inspected 20.
The scattered wave detector 106 for detecting the scattered wave generated by being reflected on the surface of the personal computer 7 and the personal computer 300 as a difference calculating means for calculating the difference between the scattered waves detected by the scattered wave detector 106.
It consists of and.

Next, the operation of the above configuration will be described. Ultrasonic waves are emitted from the ultrasonic wave irradiator 105 to the surface of the object 207 to be inspected, which is held in a constant shape by the first cylindrical body 103 and the second cylindrical body 104. The irradiated surface of the inspection object 207 generates a scattered wave based on the ultrasonic waves emitted from the ultrasonic wave irradiator 105. The generated scattered wave is detected by the scattered wave detector 106. The scattered wave detected by the scattered wave detector 106 is sent to the personal computer 300, and the personal computer 300 calculates the difference between the scattered wave and the scattered wave detected one time before (hereinafter referred to as difference calculation processing). ) Is executed.

Now, the difference calculation processing in the personal computer 300 will be described with reference to FIG. FIG. 4 is a flowchart showing the difference calculation process. Scattered wave detector 10
6 detects the scattered wave P1 generated by the surface of the inspection object 207 based on the ultrasonic wave emitted from the ultrasonic wave irradiator 105 (S401). Next, the DUT 2 is driven by the driving belt 101, the driving unit 102, and the first cylindrical body 103.
The position to inspect the surface of 07 is changed (S402), and the scattered wave detector 106 detects a new scattered wave P2 (S403) as in step S401.

Then, in step S4 on the personal computer 300
The difference between the scattered wave P1 detected in 01 and the scattered wave P2 detected in step S403 is compared with a preset threshold value (S404). If the difference is large, the surface of the inspection object 207 is inspected. The result is judged to be defective, and the inspection result is discarded (S405).

On the other hand, if the difference is small in step S404, it is judged whether or not all the detected surfaces of the object 207 to be inspected are finished (S406).
The process returns to step S401, and if it has ended, the process ends.

In the second embodiment, the scattered wave difference calculation process is automatically performed by using the personal computer 300 as described above, but as another scattered wave difference calculation process,
For example, a method of creating a dedicated circuit and performing it remotely can be considered, but the present invention does not depend on those methods, and any method may be used.
Of course.

As described above, according to the second embodiment, the scattered wave P generated from the surface of the object 207 to be inspected by the personal computer 300.
Since the inspection is performed based on the difference between 1 and P2 and the preset threshold value, the inspection result can be judged to be defective when the threshold value is exceeded, so that it is not necessary to inspect the entire surface of the inspection object 207. Good. That is, since it is not necessary to perform an unnecessary inspection after it is determined as defective, the inspection time can be shortened.

[Third Embodiment] The surface inspection apparatus of the third embodiment is
The inspection is performed by using a plurality of scattered wave detectors. Since the third embodiment is basically the same as the first embodiment,
Only different points will be described in detail with reference to the drawings. Further, in the third embodiment, the inspected amorphous object to be inspected
7 will be described.

FIG. 5 is a block diagram showing the main part of the surface inspection apparatus of the third embodiment. The essential parts of the surface inspection apparatus of the third embodiment are: a second cylindrical body 104 that makes the surface of the object to be inspected 207 a uniform shape; an ultrasonic wave irradiator 105 that emits ultrasonic waves;
The ultrasonic wave emitted by the ultrasonic wave irradiator 105 is the object to be inspected 20.
7 is composed of scattered wave detectors 506a, 506b, 506c for detecting scattered waves generated by being reflected on the surface of the laser beam.

Next, the operation of the above configuration will be described. The surface of the object 207 to be inspected, which is held in a constant shape by the second cylindrical body 104, is irradiated with ultrasonic waves from the ultrasonic wave irradiation device 105. At this time, the ultrasonic waves reflected from the surface of the object to be inspected 207 generate scattered waves as described above.
The scattered wave detectors 506a, 506b, 506c respectively detect scattered waves according to the wavelength of the scattered waves set in advance.

In the third embodiment, three scattered wave detectors are used, but it goes without saying that the present invention may have any number.

Here, scattered wave detectors 506a, 506
The wavelengths preset in b and 506c will be described. As the wavelengths set in advance in the scattered wave detectors 506a, 506b, 506c, the same wavelength as the wavelength of the ultrasonic waves emitted from the ultrasonic wave irradiator 105 is set.
06a, a wavelength shorter than the wavelength of the ultrasonic wave emitted from the ultrasonic wave irradiator 105 is applied to the scattered wave detector 506b, and a wavelength longer than the wavelength of the ultrasonic wave emitted from the ultrasonic wave irradiator 105, The scattered wave detector 506c is used.

As described above, according to the third embodiment, the scattered wave detectors 506a, 506b and 506c respectively have
Since the scattered wave is detected according to the wavelength of the scattered wave set in advance, the scattered wave detector can be made smaller than that in the first embodiment, and the surface inspection apparatus itself can be made small.

When the size of the scattered wave detector of the third embodiment is the same as that of the first embodiment, the effective area (hereinafter referred to as the effective area) for inspecting the surface of the object to be inspected 207 at once is wide. Since it can be performed, the accuracy of the surface inspection can be improved.

When the size of the scattered wave detector of the third embodiment is the same as that of the first embodiment, the scattered wave detector for detecting the scattered waves may have a short range of wavelengths of the scattered waves. Therefore, the time required to detect the scattered wave can be shortened, and the inspection time can be shortened.

The scattered wave detectors 506a, 506b,
If the wavelength of the ultrasonic wave preset in 506c is set according to the inspection standard, for example, the wavelength of the scattered wave becomes
If the wavelength of the ultrasonic wave emitted from the ultrasonic wave irradiator 105 is significantly different, it can be determined that the surface roughness of the object 207 to be inspected is large, and therefore it is not necessary to inspect the entire surface of the object 207 to be inspected. That is, it is not necessary to perform an unnecessary inspection after it is determined as defective, so that the inspection time can be shortened.

[Fourth Embodiment] The surface inspection apparatus of the fourth embodiment is
The inspection is performed using a plurality of ultrasonic irradiators. Since the fourth embodiment is basically the same as the first embodiment,
Only different points will be described in detail with reference to the drawings. Further, in the fourth embodiment, the inspected amorphous object to be inspected is the inspected object 20.
7 will be described.

FIG. 6 is a block diagram showing the main part of the surface inspection apparatus of the fourth embodiment. The main part of the surface inspection apparatus of the fourth embodiment is composed of ultrasonic wave irradiators 605a, 605b, 605c for irradiating the surface of the object 207 to be inspected with ultrasonic waves. In addition, 608a, 608b and 608c shown in the figure are effective regions irradiated with ultrasonic waves from the ultrasonic wave irradiators 605a, 605b and 605c.

Next, the operation of the above configuration will be described. An ultrasonic wave irradiator 605 is applied to the surface of the object to be inspected 207 held in a fixed shape by the second cylindrical body 104.
Ultrasonic waves are emitted from a, 605b, and 605c. At this time, the wavelengths of the ultrasonic waves emitted from the ultrasonic wave irradiators 605a, 605b, and 605c are all the same.

Ultrasonic irradiators 605a, 605b, 605
Effective areas 608a, 608b, 608 irradiated from c
Scattered waves are generated based on the surface of the inspection object 207 with respect to c. Then, the effective areas 608a, 608b, 6
The scattered wave generated by the surface of the inspection object 207 for 08c is detected by the scattered wave detector 106.

As described above, according to the fourth embodiment, by using the ultrasonic wave irradiators 605a, 605b, and 605c, the ultrasonic wave irradiators 605a, 605b, and 6 are respectively used.
Effective areas 608a, 608b, 60 that can be irradiated with 05c
Since ultrasonic waves can be applied to the entire region including 8c, a wider range of inspection can be performed as compared with the first embodiment, and thus the inspection time can be shortened.

[Embodiment 5] The surface inspection apparatus of Embodiment 5 is
The inspection is performed by using a plurality of ultrasonic wave irradiators having different ultrasonic wave irradiation times (hereinafter referred to as irradiation times).
Since the fifth embodiment is basically the same as the first embodiment, only different points will be described in detail with reference to the drawings. In addition, in the fifth embodiment, the inspected amorphous object to be inspected is described as the inspected object 207.

FIG. 7 is a block diagram showing the main part of the surface inspection apparatus of the fifth embodiment. The essential parts of the surface inspection apparatus of the fifth embodiment are ultrasonic wave irradiators 705a and 705b for irradiating the surface of the object 207 to be inspected with ultrasonic waves, and ultrasonic wave irradiators 705a and 705a and 705a.
A scattered wave detector 706 that detects a scattered wave generated by the ultrasonic wave emitted by 05b being reflected from the surface of the inspection object 207.
A signal processing unit 700 for performing signal processing on the scattered waves detected by the scattered wave detector 706, and ultrasonic wave irradiators 705a, 70
5b and the ultrasonic wave irradiator control part 710 which controls the irradiation time. In the figure, 708a, 70
8b shows each effective area | region where ultrasonic wave irradiator 705a, 705b irradiates an ultrasonic wave.

The operation of the above configuration will be described.
Two ultrasonic wave irradiators 705 are attached to the surface of the object 207 to be inspected, which is held in a constant shape by the second cylindrical body 104.
Ultrasonic waves are emitted from a and 705b. At this time, the irradiation time of the ultrasonic wave irradiators 705a and 705b is controlled by the ultrasonic wave irradiator control unit 710, and the ultrasonic waves are irradiated according to the irradiation time.

Here, the irradiation time of the ultrasonic wave irradiator controller 710 will be described. Ultrasonic irradiator control unit 710
Controls the irradiation time of ultrasonic waves from the ultrasonic wave irradiators 705a and 705b. First, ultrasonic waves are emitted from the ultrasonic wave irradiator 705a to the object 207 to be inspected, and after irradiation for a preset time, the ultrasonic wave is stopped. Next, after the irradiation of ultrasonic waves from the ultrasonic wave irradiator 705a is stopped, ultrasonic waves are irradiated from the ultrasonic wave irradiator 705b to the object 207 to be inspected, and after irradiation for a preset time, it is stopped.

Next, scattered waves are generated based on the surface of the object 207 to be inspected with respect to the effective areas 708a and 708b. Subsequently, the scattered wave generated based on the surface of the object 207 to be inspected for the effective areas 708a and 708b is detected by the scattered wave detector 106.

Next, the scattered waves from the effective areas 708a and 708b are detected by the scattered wave detector 706 and sent to the signal processing unit 700 which processes the signals. Signal processing unit 7
00 indicates the ultrasonic irradiator control unit 710 as shown in FIG.
The ultrasonic irradiation devices 705a and 705b are constantly connected to the irradiation time. That is, the signal processing unit 700
Can determine whether the scattered wave detected by the scattered wave detector 706 is an ultrasonic wave from one of the ultrasonic wave irradiators 705a and 705b.

In the fifth embodiment, two ultrasonic wave irradiators are used, but it goes without saying that any number of ultrasonic wave irradiators may be used in the present invention.

As described above, according to the fifth embodiment, the ultrasonic irradiator controller 710 is used to irradiate ultrasonic waves from the ultrasonic irradiator 705a, and after stopping the ultrasonic wave irradiator 705b, Since the irradiation time for irradiating ultrasonic waves is provided, for example, if there is an abnormality in the first scattered wave detected by the scattered wave detector 106, that is, the scattered wave due to the ultrasonic waves emitted from the ultrasonic wave irradiator 705a, the effective region 708a
It turns out that there is something wrong with. In other words, the inspection object 20
For the surface abnormality of No. 7, by using the irradiation time and the effective area, the location of the surface where the abnormality occurred can be specified.

[Sixth Embodiment] The surface inspection apparatus of the sixth embodiment is
The inspection is performed by using a plurality of ultrasonic wave irradiators having different wavelengths of ultrasonic waves to be irradiated. Since the sixth embodiment is basically the same as the first embodiment, only different points will be described in detail with reference to the drawings. Further, in the sixth embodiment, an inspected inspected object to be inspected is referred to as an inspected object 207.

FIG. 8 is a block diagram showing the main part of the surface inspection apparatus of the sixth embodiment. The essential parts of the surface inspection apparatus of the sixth embodiment are ultrasonic wave irradiators 805a and 805b for irradiating the surface of the object to be inspected 207 with ultrasonic waves, and ultrasonic wave irradiators 805a and 805a.
A scattered wave detector 80 for detecting a scattered wave generated from the surface of the object to be inspected 207 based on the ultrasonic wave emitted by 05b.
6, a signal processing unit 800 for performing signal processing on the scattered wave detected by the scattered wave detector 806, and ultrasonic wave irradiators 805a, 8
Ultrasonic wave irradiator control unit 810 for controlling irradiation time of 05b
Composed of and.

In the figure, reference numeral 808 denotes an irradiation area where the ultrasonic wave irradiators 805a and 805b irradiate ultrasonic waves. The wavelength of the ultrasonic wave emitted by the ultrasonic wave irradiator 805a is different from the wavelength of the ultrasonic wave emitted by the ultrasonic wave irradiator 805b.

Next, the operation of the above configuration will be described. Two ultrasonic irradiators 8 are attached to the surface of the object 207 to be inspected, which is held in a fixed shape by the second cylindrical body 104.
Ultrasonic waves are emitted from 05a and 805b. At this time,
The irradiation time of the ultrasonic wave irradiators 805a and 805b is controlled by the ultrasonic wave irradiator control unit 810, and ultrasonic waves are irradiated according to the irradiation time. The irradiation time is the same as that described in the fifth embodiment, and is omitted in the sixth embodiment.

Next, the inspection object 2 for the effective area 808
Scattered waves are generated based on the 07 surface. continue,
The scattered wave generated based on the surface of the inspection object 207 with respect to the effective area 808 is detected by the scattered wave detector 106.

Here, the wavelength of ultrasonic waves will be described. The wavelengths of the ultrasonic waves emitted from the ultrasonic wave irradiators 805a and 805b are different from each other. In Example 6,
The wavelength of the ultrasonic wave emitted from the ultrasonic wave irradiator 805a is
The wavelength is shorter than the wavelength of the ultrasonic wave emitted from the ultrasonic wave irradiator 805b. That is, the ultrasonic irradiator 805a
It is detected that the scattered wave generated by the ultrasonic wave emitted from the ultrasonic wave is a scattered wave generated by a finer surface change than the scattered wave generated by the ultrasonic wave emitted from the ultrasonic wave irradiator 805b. be able to.

Next, two ultrasonic wave irradiators 805a and 805b having different wavelengths are applied to the surface of the object to be inspected held in a constant shape.
From the above, the same irradiation region 808 is irradiated with ultrasonic waves.
The scattered wave generated from the surface of the inspection object 207 is detected by the scattered wave detector 806 and sent to the signal processing unit 800. Next, the irradiation time of the ultrasonic wave irradiators 805a and 805b is controlled by the ultrasonic wave irradiator control unit 810.

As described above, according to the sixth embodiment, the same irradiation area 808 is irradiated with ultrasonic waves having different wavelengths from the ultrasonic wave irradiators 805a and 805b, and the signal processing unit 800
However, based on the irradiation time controlled by the ultrasonic wave irradiator control unit 810, which of the ultrasonic waves of the ultrasonic wave irradiators 805a and 805b is irradiating the scattered wave detected by the scattered wave detector 806 is determined. To be inspected 2
The shape change of the surface of No. 07, for example, the size of the unevenness can be specified.

[0060]

As described above, according to the surface inspection apparatus (Claim 1) of the present invention, in the surface inspection apparatus for inspecting the surface of an irregularly shaped object, the surface of the object is kept constant. Shape holding means for holding the shape of the ultrasonic wave, ultrasonic irradiation means for irradiating the surface of the object to be inspected held in a constant shape by the shape holding means with ultrasonic waves, and ultrasonic waves irradiated by the ultrasonic wave irradiation means. There scattered wave detecting means for detecting a scattered wave generated is reflected by the surface of the inspection object, the scattering
Scattered wave detected by the wave detection means and detected one time before the scattered wave
The difference calculation means for calculating the difference with the scattered wave
Therefore, since by using ultrasound can be inspected surface of the object to be inspected, without irradiating light, it is possible to provide a surface inspection apparatus capable of carrying out surface inspection of the inspection object.

In addition, the difference calculation means allows delicate detection of scattered waves.
Can be output, that is, subtle changes in the surface of the DUT
It can be detected accurately.

A surface inspection apparatus of the present invention (claim 2)
According to the above, since a plurality of scattered wave detecting means are arranged,
Since a wide range of scattered waves can be detected every time, surface inspection is performed.
You can save time.

A surface inspection apparatus of the present invention (claim 3)
According to the above , since the plurality of ultrasonic wave irradiation means are arranged,
You can inspect a wide range of the surface of the inspection object at once
In can reduce the time for surface inspection.

A surface inspection apparatus of the present invention (claim 4)
According to the above, the ultrasonic waves emitted by the plurality of ultrasonic wave irradiation means are
Since the wavelength of the wave is different, the size of the deformation of the surface of the DUT
Can be determined.

[0065]

[0066]

[0067]

[Brief description of drawings]

FIG. 1 is a configuration diagram illustrating a surface inspection apparatus according to a first embodiment.

FIG. 2 is a schematic view showing a seamless belt.

FIG. 3 is a configuration diagram showing a main part of a surface inspection apparatus according to a second embodiment.

FIG. 4 is a flowchart showing a difference calculation process.

FIG. 5 is a configuration diagram showing a main part of a surface inspection apparatus according to a third embodiment.

FIG. 6 is a configuration diagram showing a main part of a surface inspection apparatus according to a fourth embodiment.

FIG. 7 is a configuration diagram showing a main part of a surface inspection apparatus according to a fifth embodiment.

FIG. 8 is a configuration diagram showing a main part of a surface inspection apparatus according to a sixth embodiment.

[Explanation of symbols]

101 drive belt 102 drive unit 103 first cylindrical body 104 second cylindrical body 105, 605a to 605c, 705a, b, 805
a, b ultrasonic wave irradiators 106, 506a to 506c, 706, 806 scattered wave detector 107 seamless belt 207 inspected object 300 personal computer 608a, 608b, 608c, 708a, 708b,
808 Effective area 700,800 Signal processing unit 710,810 Ultrasonic irradiator control unit

─────────────────────────────────────────────────── --- Continuation of the front page (56) Reference JP-A-3-209158 (JP, A) JP-A-61-23965 (JP, A) JP-A-6-273392 (JP, A) JP-A-57- 53610 (JP, A) JP 60-11147 (JP, A) JP 63-9816 (JP, A) Actually opened 60-23709 (JP, U) Actually opened 63-31366 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01N 29/00-29/28 G01B 17/00-17/08

Claims (4)

(57) [Claims] 1. A surface inspection apparatus for inspecting the surface of an irregularly shaped object to be inspected, wherein the surface of the object to be inspected is held in a fixed shape, and the shape holding means holds the surface in a fixed shape. And ultrasonic wave irradiating means for irradiating the surface of the object to be inspected with ultrasonic waves, and scattered wave detection for detecting scattered waves generated by the ultrasonic wave applied by the ultrasonic wave irradiating means being reflected on the surface of the object to be inspected. And the means to be inspected
Driving means for Ru changing the inspection position Te, examined by the drive means
Position surface inspection apparatus characterized by comprising a differential calculating means for calculating a difference between the scattered waves respectively the scattered wave detecting means has detected before and after the altered. 2. The surface inspection apparatus according to claim 1, wherein a plurality of the scattered wave detecting means are arranged. 3. The surface inspection apparatus according to claim 1, wherein a plurality of the ultrasonic wave irradiation means are arranged. 4. The surface inspection apparatus according to claim 3, wherein the plurality of ultrasonic wave irradiation means have different wavelengths of ultrasonic waves to be applied.