JP3482117B2 - Inner lead bending prevention transfer method for chemical treatment tank of film carrier conductor pattern - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to TAB (Tap).
The present invention relates to a method of manufacturing a film carrier conductor pattern such as an e-Automated Bonding) tape.

[0002]

2. Description of the Related Art A film carrier conductor pattern (hereinafter referred to as a film carrier) such as TAB, BGA, and CSP tape is provided with a rectangular device hole in a central portion of a light-transmitting film such as a polyimide film, and is provided on four sides thereof. Many leads are arranged. The leads are adhered to the light transmissive film. The tip of the lead projects above the device hole, and this projecting portion is called an inner lead. The pattern shape of these leads is formed by etching. Further, in the manufacturing process of the film carrier, chemical treatment with various liquids is performed for removing the resist used for etching, removing the backup layer for backing up the lead pattern in the etching process, and the like.

A conventional example will be described with reference to FIG. FIG. 2 is a diagram showing the configuration of a conventional chemical treatment tank. In FIG. 2, the processing tank, that is, the grotto 30 has openings 32 on opposite side surfaces. Hereinafter, the side surface portion having the opening 32 is referred to as a weir 34. The film carrier 36 is fed into the grotto 30 from one weir 34 and the other weir 3
4 is conveyed so as to leave the grotto 30. It is on the extension of the straight line connecting the two openings 32, and
Two roller pairs 38 for transporting the film carrier 36 are provided on both outer sides of the roller. The film carrier 36 is conveyed by the two roller pairs 38 while passing through the grotto 30 while maintaining sufficient tension.

[0004]

However, in the conventional example, the inner lead on the film carrier 36 comes into contact with the upper side 40 or the lower side 42 of the opening 32 of the weir 34 of the grotto 30 to bend the inner lead. There was a problem that defects occurred.

There are three possible causes for this. First, there is curl deformation of the film carrier 36. The film carrier 36 is sufficiently extended by the roller pair 38 in the carrying direction, but since the device holes and leads are formed on the film carrier 36, curl deformation is caused in the direction perpendicular to the carrying direction. Easy to wake up. In the film carrier 36 that has undergone curl deformation, the inner leads or the like are likely to come into contact with the upper side 40 or the lower side 42 of the opening 32 in the opening 32 of the weir 34 of the grotto 30.

Secondly, there is the shape of the film carrier such as the size of the device hole and the length and width of the inner lead. The chemical treatment liquid in the grotto 30 is circulated so as to supply the unused treatment liquid and discharge the treatment liquid used for the treatment. That is, as shown in FIG.
The unused chemical treatment liquid is supplied from the treatment liquid supply port 44 at the bottom of 0 and is discharged from the openings 32 of the two weirs 34. The opening 32 must have a minimum necessary size in relation to the circulating amount of the processing liquid, and the inner lead may be a weir depending on the size of the device hole of the film carrier 36, the length of the inner lead, the width of the inner lead, and the like. The upper side 40 or the lower side 42 of the opening 32 of 34 may come into contact.

Thirdly, the film carrier 36 swings due to the liquid flow in the grotto 30. Grotto 30 above
Due to the liquid flow of the chemical treatment liquid inside, the film carrier 36 in the grotto 30 is likely to swing, and along with this, the film carrier 3 in the opening 32 of the weir 34 of the grotto 30.
6 also swings easily, and the film carrier 36 may come into contact with the upper side 40 or the lower side 42 of the opening 32 of the grotto.

[0008]

According to the present invention, in the step of continuously feeding a film carrier conductor pattern into a chemical treatment tank, rotary rollers are provided below the inlet and outlet of the chemical treatment tank to form a film. The rotary roller is tuned to rotate at the transport speed of the carrier conductor pattern.

[0009]

EXAMPLE An example of the present invention will be described with reference to FIG. Figure 1
FIG. 3 is a diagram showing a configuration of a chemical treatment tank of this embodiment. In FIG. 1, the grotto 1 has an opening 5 in each of opposite side surfaces, that is, the weir 3. The lower part of the weir 3 is a roller 7 made of PVC (polyvinylcarbazole),
The film carrier 9 rotates in synchronization with the transport speed of the film carrier 9. Also, on both outsides of the two openings 5, two roller pairs 11 (PVC) are placed at a position lower than the openings 5 of the grotto 1.
Product) is provided. The film carrier 9 is conveyed such that a constant angle α is maintained between the inside of the grotto 1 and between the roller 7 and the roller pair 11.

In this embodiment, an unused chemical treatment liquid is supplied from the treatment liquid supply port 13 provided at the bottom of the grotto 1 and discharged from the opening 5 of the weir 3. Film carrier 9
Has its rear surface brought into contact with the roller 7, and by providing the roller pair 11 below the opening portion 5, sufficient tension is applied to the film carrier 9 so that the film carrier 9 is always rotated. Can be brought into contact with. The diameter of the roller 7 and the roller pair 11 is sufficiently larger than the device hole provided in the film carrier.

As in the present embodiment, the roller 7 is constantly brought into contact with the back surface of the film carrier 9 to keep the distance between the film carrier 9 in the grotto 1 and the upper portion 14 of the weir 3 constant, and the roller 7 is set to the film. By rotating the carrier 9 in synchronism with the carrier speed, the film carrier 9
Curl, device hole size, inner lead length, swing due to liquid flow, etc.
It is possible to prevent the inner lead from bending due to contact between the inner wall and the opening 5 of the weir 3. Further, since the diameters of the roller 7 and the roller pair 11 are set sufficiently larger than the device hole, the roller 7 and the roller pair 11 are
Does not contact the inner lead from the device hole side and bend the inner lead. The rollers 7 and the roller pair 11 may be made of materials other than PVC.

[0012]

INDUSTRIAL APPLICABILITY In the chemical treatment tank, curling of the film carrier, size of the device hole, length of the inner lead, bending of the inner lead due to contact such as rocking due to liquid flow can be prevented, and a higher quality film can be obtained. It is possible to provide a carrier conductor pattern.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a chemical treatment tank according to an embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a conventional chemical treatment tank.

[Explanation of symbols]

1 grotto 3 weirs 5 openings 7 rollers 9 Film carrier conductor pattern 11 roller pairs

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01L 21/60 311 C23F 1/00

Claims (2)

(57) [Claims] 1. A step of continuously feeding a film carrier conductor pattern into a chemical treatment tank, wherein an opening of a side surface of an inlet portion and an opening of a side surface of an outlet portion of the chemical treatment tank are provided. A rotary roller is installed in the lower part of the
Outside of the mouth and the opening of the side of the outlet
, A roller pair is provided at a position lower than each opening,
A method of manufacturing a film carrier conductor pattern, characterized in that the rotary roller is synchronously rotated at a conveyance speed of the film carrier conductor pattern. Wherein each of, et al provided in the lower portion of the opening portion of the side surface of the opening contact <br/> spare outlet portion of the side surface of the inlet portion of the chemical treatment bath
And rotary rollers, open side portion of the outlet portion and the opening of the side surface portion of the inlet portion
Lower than each opening, on each outside with mouth
A continuous chemical processing apparatus for a film carrier conductor pattern, comprising : a pair of rollers arranged at a position, wherein the rotary roller is synchronously rotated at a conveying speed of the film carrier conductor pattern.