JP3475271B2 - Wire for wire saw - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire for a wire saw used for cutting hard materials such as semiconductors, ceramics and cemented carbide (hereinafter referred to as "saw wire"). 2. Description of the Related Art A wire saw cuts a saw wire,
Generally, it is an apparatus that performs cutting while being pressed against an object to be cut together with abrasive grains such as carbon silicon powder and diamond powder. Since the saw wire needs to have a strength that can withstand the tension applied at the time of cutting, a high-carbon steel wire or a piano wire is generally used. This saw wire is manufactured by repeating wire drawing and patenting from a raw wire of about 5 mm. For the purpose, brass plating is generally applied to the surface of the wire before final drawing. The brass plating also plays an important role of fixing abrasive grains when cutting with a wire saw. [0003] In recent years, with the remarkable spread of precision equipment, more accurate and compact equipment has been required, and the surface roughness and dimensional accuracy of the components constituting the precision equipment have been further improved. Some improvements have been required.
The saw wire greatly affects the surface roughness and dimensional accuracy of these components. That is, although it is a known fact that the tensile strength and wire habit of a saw wire affect the surface roughness and dimensional accuracy of a part which is a workpiece, plating of the wire surface also greatly affects the present inventors. Research has revealed this. [0004] Brass plating is performed for the purpose of improving the drawability at the time of final drawing. First, the surface of a wire drawn to about 1 mm is plated with copper and then plated with zinc. After that, it is heat-diffused to form brass plating, and is then drawn to a thickness of 0.05 to 0.25 mm to be manufactured. [0005] Semiconductor ingots, ceramics, and the like are cut by the saw wire manufactured as described above.
The method, as described above, saw wire cutting abrasive,
Generally, it is run while being pressed against an object to be cut together with abrasive grains such as carbon silicon powder and diamond powder. At the time of this cutting, it is important that the abrasive grains penetrate the brass plating and adhere to the surface of the saw wire. If the abrasive grains are not firmly fixed to the surface of the saw wire, the cutting workability is reduced, thereby reducing the surface roughness and the dimensional accuracy. [0006] The saw wire is usually several kg to several tens k.
The reels are wound up and used in units of g. In recent years, there has been an increasing demand for large reels in order to increase the efficiency of cutting work. Breakage due to poor drawability leads to an increase in saw wire manufacturing cost, and surface flaws also affect workability at the time of cutting and accuracy of a workpiece. The present inventors have conducted intensive studies in order to improve the surface roughness and dimensional accuracy of parts and to find an optimal saw wire having excellent drawability, and as a result, have found an optimal brass plating. SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a saw wire having improved surface roughness and dimensional accuracy of a workpiece and excellent drawability. [0008] A saw wire according to the present invention.
Is the surface of a carbon steel wire with a wire diameter of 0.05 to 0.25 mm
Brass plated wire saw wire
The thickness of the brass plating is 0.1 to 1.0 μm,
Copper / brass (weight ratio) in the body is 0.55 ~ 0.75
For some wire saw wires, the outermost surface of brass plating
Part of copper / brass (weight ratio) is 0.10 to 0.40, and
The copper ratio increases toward the center of the steel wire, and from the outermost surface
Copper / brass (weight ratio) at a depth of 200-300 mm is 0.
55 to 0.75. As described above, by specifying the thickness of the brass plating and the ratio (weight ratio) of the copper in the brass plating, the abrasive grains can be securely fixed, the surface roughness of the cut portion can be improved, and the dimensions of the parts can be improved. Accuracy can be improved. Moreover, by specifying the plating before wire drawing so that the thickness of the brass plating and the proportion of copper after the final wire drawing are as described above, excellent drawability can be obtained. By the way, the thickness of the plating is 0.1 to 1.0.
If it is less than 0.1 μm, the brass plating thickness before the final wire drawing is too thin and the wire drawing property is reduced, and when cutting the workpiece, the fixing force of the abrasive grains is reduced and the workpiece is cut. This is because the surface roughness of the object increases. The plating thickness is 1.
If the thickness exceeds 0 μm, no further effect can be obtained, and the cost is rather increased. Further, the weight ratio of copper to brass in the whole brass plating is set to 0.55 to 0.75. If the weight ratio is less than 0.55, the proportion of zinc becomes too large, and the drawability is reduced.
If it exceeds 0.75, the ratio of copper becomes too large, and the brass plating itself becomes too soft, and the fixing force of the abrasive grains is reduced. In the above invention, the copper / brass (weight ratio) at the outermost surface of the brass plating is 0.10 to 0.40, and the copper ratio increases toward the center of the steel wire. 2
Copper / brass (weight ratio) at a depth of 00 to 300 mm is 0.5
It is preferably from 5 to 0.75. This is for the following reason. In other words, when the proportion of copper on the outermost surface of the brass plating is less than 0.10, the proportion of zinc becomes too large, which decreases not only the drawability but also the bonding force of the abrasive grains, thereby exceeding 0.40. Conversely, the proportion of copper becomes too large, and the hardness of the plating surface layer is reduced, so that scratches easily occur due to contact between lines and the like, and a thin portion of the plating is generated, thereby lowering the fixing force of the abrasive grains. The copper ratio increases toward the center of the steel wire, and the copper / brass ratio at a depth of 200 to 300 mm from the outermost surface is set to 0.55 to 0.75. By having a significant effect on the fixation of the grains, if it is less than 0.55, the amount of zinc becomes too large,
When the hardness becomes too high, the fixing power of the abrasive grains decreases. Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic sectional view showing a cross section of a brass-plated saw wire. The surface of the hard steel wire 1 is plated with brass 2. Wire diameter T is 0.05 ~
0.25mm, thickness t of brass plating is 0.1-1.0
μm. The ratio (weight ratio) of copper / brass on the outermost surface S of the brass plating 2 is 1.10 to 0.40, and the ratio of copper increases from there toward the center of the wire.
And a copper / brass ratio (weight ratio) at a depth of 200 to 300 ° is 0.55 to 0.75. The saw wire of the present invention is formed by applying a copper plating to a wire having a wire diameter of about 1 mm, and then applying a zinc plating thereon, followed by heat diffusion as brass plating.
This is drawn to a wire diameter of 0.05 to 0.25 mm to obtain a desired saw wire. Hereinafter, embodiments of the present invention will be described in detail. A hardening wire having a wire diameter of 5.5 mm is repeatedly patented and drawn to produce a wire having a wire diameter of 1.2 mm, and the wire is plated with copper and then plated with zinc. After that, the resultant was thermally diffused by a heating device utilizing electric resistance to form brass plating. The brass-plated wire was sawed into various wire diameters by a wet wire drawing machine. As a comparative example, a conventional saw wire having a plating thickness and a copper / brass ratio outside the present invention was also manufactured. The plating thickness of the finished saw wire and the ratio of copper are determined by the plating thickness of copper and zinc in the plating step (before final drawing) and diffusion conditions (current, line speed, etc.).
Can be adjusted. Then, in the saw wire of the present invention and the saw wire of the comparative example, the drawability at the time of wire drawing and the semiconductor ingot were actually cut, and the cut surface roughness and dimensions of the cut ingot were compared. As a result of the comparison, it was found that the saw wire of the present invention was excellent in drawability, and the surface roughness and dimensional accuracy of the cut portion were very excellent. Since the saw wire of the present invention is constituted as described above, if the saw wire of the present invention is used to cut a hard material such as a semiconductor, a ceramic, a cemented carbide, etc., the cut abrasive grains can be reliably formed. The surface roughness and dimensional accuracy of the cut portion can be remarkably improved. Further, the saw wire of the present invention has excellent drawability and can increase the unit weight of the saw wire incorporated in the wire saw device, so that the workability in cutting can be remarkably improved.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view showing one embodiment of a saw wire of the present invention. [Description of Signs] 1 Carbon steel wire 2 Brass plating T Wire diameter t Brass plating thickness S Plating outermost surface

Claims (1)

(57) [Claim 1] Carbon steel having a wire diameter of 0.05 to 0.25 mm
With wire for wire saw with brass plating on the surface of steel wire
The thickness of the brass plating is 0.1-1.0 μm,
Copper / brass (weight ratio) in the entire brass plating is 0.55
For a wire for a wire saw of 0.75, a brass mesh
The outermost copper / brass (weight ratio) of the key is 0.10 to 0.4
0, and the copper ratio increases toward the center of the steel wire.
Copper / brass at a depth of 200 to 300 mm from the surface (weight
Ratio) is 0.55 to 0.75.
Wire for yasaw.