JP3473241B2 - Vibrating gyroscope and method for manufacturing vibrating gyroscope - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a navigation system that detects the position of a moving body by detecting the rotational angular velocity, and performs appropriate guidance, or detects the rotational angular velocity due to external vibration such as camera shake, and detects the appropriate position. The present invention relates to a vibration gyro that can be applied to a vibration isolation system such as a camera shake prevention device for vibration control.

[0002]

2. Description of the Related Art The configuration of a conventional vibrating gyro will be described with reference to FIGS. In FIG. 10, reference numeral 61 is a vibration gyro, which includes a vibrator 62. The vibrator 62 is made of a constant elastic metal material such as elinvar, or a material that generally causes mechanical vibration, such as quartz, glass, crystal, or ceramic, is formed into a triangular prism shape, and is driven at approximately the center of each of the three side surfaces. Piezoelectric elements 63 and 64 for detection and detection, and a piezoelectric element 65 for feedback. Further, an oscillating circuit 66 is used as a driving means for applying a drive signal to the piezoelectric elements 63 and 64, the input end of the oscillating circuit 66 is connected to the piezoelectric element 65, and the output ends of the oscillating circuit 66 are resistors 67 and 67. It is connected to the piezoelectric elements 63 and 64 via. Further, the piezoelectric element 6
A differential amplifier circuit 68 is used as a detecting means for detecting the signals generated at the signals 3, 64, and the non-inverting input terminal (+) and the inverting input terminal (−) of the differential amplifier circuit 68 are piezoelectric elements 63,
Connected to 64. A resistor 69 as a negative feedback resistor is connected between the output end of the differential amplifier circuit 68 and the inverting input end (−).

Here, the oscillator 6 is controlled by the oscillator circuit 66.
When a drive signal is applied to the two piezoelectric elements 63 and 64, the vibrator 62 flexurally vibrates in the direction orthogonal to the main surface of the piezoelectric element 65, and when the piezoelectric element 63 and 64 does not rotate, a similar detection signal is output from the piezoelectric elements 63 and 64. Is obtained. On the other hand, when the vibrating gyro 61 is rotated about the central axis 70 of the vibrator 62, the Coriolis force causes the vibrator 62 to flexurally vibrate in a direction orthogonal to the main surface of the piezoelectric element 63 or 64, and the piezoelectric elements 63 and 64. A detection signal corresponding to the rotational angular velocity is obtained from. At this time,
According to the rotational angular velocity, for example, the detection signal from one piezoelectric element 63 becomes large and the detection signal from the other piezoelectric element 64 becomes small. The differential amplifier circuit 68 outputs the difference between the output signals of the piezoelectric elements 63 and 64,
The rotational angular velocity can be detected based on that.

Further, when mounting the vibrating gyro 61, as shown in FIG. 11, the vibrator 62 is supported and fixed on the substrate 72 by using the support pins 71, 71, and is mounted in a case (not shown). Store. Here, the support pins 71, 71 are
In order to avoid vibration inhibition or vibration absorption, it is composed of a wire rod and is attached near the node point of the vibrator 62.

[0005]

However, in the vibration gyro 61, since the single vibrator 62 controls driving and detection, the material forming the vibrator 62 is constant in both the driving force and the detection sensitivity. It is necessary to select the one having the characteristics of, and there is a design restriction on the vibrator 62.

Further, in the vibrating gyro 61, since the support pins 71, 71 for supporting and fixing the vibrator 62 are made of wire rods, the support pins 7 are, for example, impacted from the outside.
There is a risk that the deformation of Nos. 1 and 71 may make it impossible to detect an accurate rotational angular velocity.

Therefore, an object of the present invention is to provide a vibrating gyro having a high degree of freedom in designing a vibrator and capable of firmly supporting and fixing the vibrator.

[0008]

To achieve the above object, according to an aspect of, in the method for manufacturing a vibrating gyroscope of the present invention, polarization
The two treated piezoelectric sheets are used as a rod-shaped spacer with a rectangular cross section.
Mother substrate is formed by sandwiching multiple sensor members.
Process and the mother substrate in the longitudinal direction of the spacer member
And by cutting each along the width direction,
Both ends of the two rod-shaped piezoelectric blocks are separated by spacers.
Forming a plurality of vibrators that are connected together by
Characterized in that it.

[0009]

The vibrating gyro according to the present invention
Is a vibrator and a driver that applies a drive signal to the vibrator.
And a detection means for detecting a signal generated in the vibrator.
In a vibrating gyroscope equipped with
A first and a second block formed by polarizing the electric body in the thickness direction.
The thickness of the piezoelectric body through spacers on both ends
Connect in the direction between the first and second blocks
The first block is configured so as to have a hollow portion.
From the one side to the lock, the length of the first block
Alternating convex and concave parallel to each other in the width direction
And the first block on the upper surface of the convex portion.
And a pair of counter electrodes facing each other in the width direction .

According to the vibrating gyroscope of the present invention, since the second block that controls driving and the first block that controls detection in the vibrator are separate from each other, the first and second blocks are The constituent materials can be selected separately, which increases the degree of freedom in designing the oscillator.

Further, according to the vibrating gyroscope of the present invention, the counter electrodes are provided on the upper surfaces of the plurality of convex portions on the first block constituting the vibrator, and the signals generated at these counter electrodes are combined. By configuring so as to detect the rotational angular velocity, the amplitude of the output signal is increased and the sensitivity is improved.

Further, according to the vibrating gyroscope of the present invention, when the vibrator vibrates and vibrates, the vibration-free portions at the center of the spacer in the thickness direction of both side surfaces of the vibrator do not vibrate.
Therefore, the support member for supporting and fixing the vibrator is
It suffices if the spacers are mounted on the non-vibration portion of each spacer, and the portion to which the support member is mounted is easily determined.

Further, since the non-vibration portion is present on the entire side surface of the vibrator in the width direction of the spacer, a plurality of support members can be attached at arbitrary positions on the non-vibration portion of each spacer, or a plate material can be used as the support member. Can be used.
As a result, the degree of freedom in designing the support member is increased and the vibrator can be firmly supported and fixed.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION The configuration of a vibrating gyroscope according to a first embodiment of the present invention will be described with reference to FIGS.
In FIG. 1, reference numeral 1 is a vibrating gyroscope, which includes a vibrator 6. The vibrator 6 joins the first block 2 and the second block 3 separate from the first block 2 through spacers 4 and 4 having a substantially cubic shape in the vicinity of both ends of each other, A hollow portion 5 is formed between the first and second blocks 2 and 3.

Here, the first block 2 is formed by joining two piezoelectric bodies 26, 26 made of piezoelectric ceramic or the like into a rod shape, and the piezoelectric bodies 26, 26 are formed.
Are polarized in the same direction along the thickness direction as indicated by arrows P, P, for example. A counter electrode 8 composed of a pair of conductors 7, 7 is provided on the upper surface of the first block 2 in the drawing, and a flat electrode 9 is provided on the lower surface. On the other hand, the second block 3 is formed by joining two piezoelectric bodies 27, 27 and forming a rod shape.
27 is polarized in opposite directions along the thickness direction, as indicated by arrows P and Q, for example. The polarization directions of the piezoelectric bodies 27, 27 forming the second block 3 may be different from the arrows P, Q as long as they are opposite to each other. Further, planar electrodes 10 and 11 are provided on the entire upper surface and lower surface of the second block 3 in the drawing, respectively.

Then, the planar electrode 1 of the second block 3
An oscillating circuit 12 is used as a driving means for applying a driving signal to 0 and 11 , and one output end of the oscillating circuit 12 is connected to the planar electrode 10 of the second block 3. The other output end of the oscillator circuit 12 is connected to the plane electrode 11 of the second block 3. In addition, the counter electrode 8 (conductor 7,
7) is connected to the ground via resistors 13 and 13.
Further, the differential amplifier circuit 15 is used as a means for detecting a signal generated in the counter electrode 8 (conductors 7, 7) of the vibrator 6, and the non-inverting input terminal (+) and the inverting input of the differential amplifier circuit 15 are used. The end (-) has the counter electrode 8 via the resistors 14 and 14.
Connected to. Further, a resistor 16 as a negative feedback resistor is provided between the output end of the differential amplifier circuit 15 and the inverting input end (−).
Are connected.

In the vibrating gyro 1 configured as described above, when a drive signal such as a sine wave signal is applied to the planar electrodes 10 and 11 by the oscillation circuit 12, the polarity of the applied DC voltage is the voltage at polarization. When the polarity of the applied DC voltage is opposite to the polarity of the voltage at the time of polarization in the second block 3, extension strain occurs in the second block 3 when the polarity is the same as that of the second block. In No. 3, shrinkage strain occurs along the polarization direction. In this way, the second block 3 flexurally vibrates along the direction orthogonal to the main surface, that is, toward the outside and the inside of the vibrator 6. Here, for example, when the first and second blocks 2 and 3 are regular square poles each having a bottom surface of 1 mm square and a length of 10 mm, the resonance frequencies of the blocks 2 and 3 are both 22 kHz.
It is about z. Thus, the first and second blocks 2,
When the resonance frequency of the third block 3 is relatively low, the first block 2 moves toward the outside and the inside of the oscillator 6 in association with the bending vibration of the second block 3.
Flex vibrations as well as. In this way, the first and second blocks 2 and 3 vibrate and vibrate, so that the vibrator 6 as a whole swells or dents as shown in FIGS. Here, since the hollow portion 5 is provided between the first and second blocks 2 and 3, it is possible to prevent bending vibrations of the first and second blocks 2 and 3, particularly vibrations inward. Without, a large amplitude can be realized.

The vibrating gyro 1 has a rotating shaft 18 (FIG. 1) parallel to the longitudinal directions of the first and second blocks 2 and 3.
When rotated around, the Coriolis force corresponding to the rotation angular velocity acts in a direction parallel to the side surfaces of the first and second blocks 2 and 3 on which the electrodes are provided and orthogonal to the rotation axis 18,
A signal corresponding to the rotational angular velocity is output from the conductors 7 forming the counter electrode 8. In this case, for example, the output signal from one conductor 7 becomes large and the output signal from the other conductor 7 becomes small. Such a difference between the output signals is output from the differential amplifier circuit 15 and the rotational angular velocity is detected.

Here, when the vibrator 6 flexurally vibrates, the vibration-free portions 17 and 17 at the center in the thickness direction of the spacers 4 and 4 on the side surfaces 6a and 6a of the vibrator 6 do not vibrate. And
As shown by the chain line A in FIG. 1, since the vibration-free portions 17 and 17 extend over the entire area in the width direction of the side surfaces 6a and 6a of the vibrator 6, in the vibrator 6, the spacers 4 and 4 are It can be said that multiple node points exist in succession.

Therefore, when the vibrating gyro 1 is mounted, the supporting member for supporting and fixing the vibrator 6 is used as the vibrating part 1
If attached to Nos. 7 and 17, there is no fear of vibration inhibition or vibration absorption. Moreover, the support member can be attached to any position on the vibration-free parts 17, 17. For example, as shown in FIG. 3, a plate member 1 made of metal or the like and bent at a right angle
By attaching 9 and 19 to the vibrator 6 as supporting members, the vibrator 6 can be supported and fixed on the printed wiring board 20. The plate members 19, 19 have a width dimension equal to that of the side surfaces 6a, 6a of the vibrator 6, and cover the entire non-vibration portions 17, 17 of the spacers 4, 4. Also, FIG.
As shown in FIG. 3, a plate member 21 made of metal or the like and having a width dimension smaller than that of the side surfaces 6a and 6a of the vibrator 6 is attached to the side surface 6
The vibrators 6 can be supported and fixed on the printed wiring board 20 even if a plurality of them are attached to each of a and 6a. Further, although not particularly shown, the side surfaces 6a, 6a of the vibrator 6
In addition, a plurality of supporting members made of wire may be attached to each.

When the vibrating gyro 1 is mounted, each electrode of the vibrator 6 and the wiring on the printed wiring board are further connected by wire bonding or the like. At this time, although not particularly shown, a part of the leader line can be formed on the support member.

Further, in order to manufacture the vibrator 6, the process shown in FIG.
The mother substrate 25 shown in is used. Mother board 25
Are both made of a piezoelectric material, are provided with a planar electrode (not shown), and are polarized. Piezoelectric sheets 22 and 23 are laminated by sandwiching a plurality of rod-shaped spacers 24 having a rectangular cross section, and are bonded by, for example, an epoxy resin. It will be done. Then, the mother substrate 25 is cut and divided along the cutting lines B and C to obtain a plurality of vibrators 6, and each of the vibrators 6 thus obtained has the oscillation circuit 12 shown in FIG. Resistors 13, 1
4, 16 and the differential amplifier circuit 15 are connected, and the vibration gyro 1 is mass-produced.

As described above, according to the vibrating gyroscope of the first embodiment, since the second block that controls driving and the first block that controls detection in the vibrator are separate from each other, The materials forming the first and second blocks can be selected separately, which increases the degree of freedom in designing the vibrator.

Further, according to the vibrating gyroscope of the first embodiment, the supporting member for supporting and fixing the vibrator at the time of mounting may be attached to the non-vibrating portion of the spacer, and the portion to which the supporting member is attached is Determined easily.

Further, the support member can be attached at any position on the non-vibration part, and not limited to the wire rod, a support member made of a plate material may be used, and a plurality of support members are attached to each spacer. be able to. As a result, the degree of freedom in designing the support member is increased and the vibrator can be firmly supported and fixed.

According to the vibrating gyroscope of the first embodiment, since a part of the lead wire connecting the vibrator and the printed wiring board can be formed on the supporting member of the vibrator, the wire Wiring work such as bonding becomes easy.

Further, according to the vibrating gyroscope of the first embodiment, by cutting and dividing the mother board,
A plurality of vibrators can be easily obtained, and mass production can be performed efficiently.

Next, a second embodiment of the present invention will be described with reference to FIGS. In FIG. 6, 31 is a vibrating gyro and includes a vibrator 32. The vibrator 32 includes a first block 33 and a second block 34, which is a separate body from the first block 33, with rod-shaped spacers 35, 35 sandwiched between them, and the first and second blocks 33, A hollow portion 36 is formed between 34.

Here, the first block 33 is composed of two piezoelectric bodies 37 and 38 formed by molding a piezoelectric ceramic or the like. The piezoelectric body 37 has a substantially block shape, and on one main surface,
The convex portions 39 and the concave portions 40 are provided alternately. The convex portion 39 and the concave portion 40 are both provided in parallel to one side of the first block 33, and an opposing electrode 42 including a pair of conductors 41, 41 facing each other is provided on the upper surface of each convex portion 39. . One main surface of the piezoelectric body 37 configured in this way becomes one main surface of the vibrator 32. In addition, the piezoelectric body 3
8 has a flat plate shape. Then, the piezoelectric bodies 37 and 38 are both polarized in the same direction in the thickness direction, as indicated by arrows P and P, for example.

On the other hand, the second block 34 has two piezoelectric bodies 43, 43 formed by molding a piezoelectric ceramic or the like into a flat plate shape.
Consists of. Further, the piezoelectric bodies 43, 43 are, for example, arrows P,
As indicated by Q, they are polarized in opposite directions in the thickness direction. The polarization directions of the piezoelectric bodies 43 and 43 may be opposite to the arrows P and Q, respectively, as long as they are opposite to each other.

A planar electrode 44 is provided on the entire bonding surface of each of the piezoelectric bodies 37, 38, 43, 43 and the spacers 35, 35, and the other main surface of the vibrator 32. Is formed.

Furthermore, as a driving means for applying a driving signal to the second block 34, the oscillation circuit 45 is used, arranged between the output terminal of the oscillation circuit 45 scan spacers 35, 35 and the second block 34 Connected to the flat electrode 44. The other output end of the oscillator circuit 45 is connected to the oscillator 32.
Is connected to the plane electrode 44 on the other main surface of the. In addition,
A number of counter electrodes 42 (conductors 41, 41) each have a resistance of 4
Connected to ground via 6. Furthermore, a differential amplifier circuit 48 is used as a detection means for detecting a signal generated in each counter electrode 42 (conductors 41, 41) of the oscillator 32, and the non-inverting input terminal (+) of the differential amplifier circuit 48 is used. The inverting input terminal (−) is connected to each counter electrode 42 via the resistors 47, 47. A resistor 49 as a negative feedback resistor is connected between the output terminal of each differential amplifier circuit 48 and the inverting input terminal (-).

In the vibrating gyroscope 31 constructed as described above, the spacers 35, 35 are formed by the oscillation circuit 45.
And the planar electrode 4 arranged between the second block 34 and
4 and the plane electrode 44 on the other main surface of the vibrator 32.
When a drive signal such as a sine wave signal is applied to the piezoelectric body 4,
In Nos. 3 and 43, elongation strain and contraction strain occur along the direction of polarization depending on the polarity of the applied DC voltage. As a result, the second block 34 becomes
Flexural vibrations toward the outside and the inside of 2. And
When both the resonance frequencies of the first and second blocks 33 and 34 are relatively low, the first block 33 works in conjunction with the second block 34 to move toward the outside and the inside of the oscillator 32. Like the block 34, the flexural vibration occurs, and the vibrator 32 as a whole expands or dents as shown in FIGS. Further, since the hollow portion 36 is provided, the bending vibrations of the first and second blocks 33 and 34, particularly the inward vibrations are not disturbed, and a large amplitude can be expected.

When the vibrating gyroscope 31 rotates about a rotation axis 46 parallel to the longitudinal direction of the convex portion 39 of the first block 33, it is parallel to the main surface of the vibrator 32 and orthogonal to the rotation axis 46. Coriolis force works in the direction you do. Depending on the Coriolis force, different signals are output between the conductors 41 forming the counter electrodes 42, the difference between these output signals is output from each differential amplifier circuit 48, and the signals are combined in series to produce the rotational angular velocity. Is detected.

As described above, when the vibrator 32 vibrates and vibrates, the vibration-free portions 50, 50 at the center of the side surfaces 32a, 32a of the vibrator 32 in the thickness direction of the spacers 35, 35 do not vibrate. Since the non-vibration parts 50, 50 extend over the entire area in the width direction of the side surfaces 32a, 32a of the vibrator 32, as shown by the chain line D in FIG. 6, in the vibrator 32, the side surface 32a, It can be said that a plurality of node points exist continuously.

Therefore, when the vibrating gyro 31 is mounted, if a supporting member for supporting and fixing the vibrator 32 is attached to the non-vibrating portions 50, 50, there is no fear of vibration inhibition or vibration absorption. Moreover, the support member can be attached to any position on the vibration-free portion 50. For example, as shown in FIG. 8, a plate member 51 made of metal or the like and bent at a right angle,
By mounting 51 as a supporting member on the vibrator 32, the vibrator 32 can be supported and fixed on the printed wiring board 52. The width of the plate members 51, 51 is the vibrator 3
2 has the same width as the side surfaces 32a, 32a, and the vibration-free portion 5
It covers the entire area of 0 and 50. In addition, as shown in FIG. 9, the width dimension of the vibrator 32 is made of metal or the like, and the side surface 32
The vibrator 32 can be supported and fixed on the printed wiring board 52 by attaching a plurality of plate members 53, 53 smaller than the width dimension of a, 32a to the side surfaces 32a, 32a, respectively. Further, although not particularly shown, a plurality of supporting members made of wire may be attached to the side surfaces 32a, 32a of the vibrator 32, respectively.

When the vibration gyro 31 is mounted, each electrode of the vibrator 32 and the wiring on the printed wiring board are further connected by wire bonding or the like. At this time, although not particularly shown, a part of the leader line can be formed on the support member. In addition, in order to manufacture the vibrator 32, although not shown in the drawing, a piezoelectric sheet that is provided with projections and depressions and is polarized, and a piezoelectric sheet that is flat and polarized is used as a planar electrode and A mother substrate is used in which a spacer is sandwiched and laminated. Then, by cutting and dividing the mother substrate, a plurality of vibrators are obtained, and an oscillator circuit, a resistor and a differential amplifier circuit are connected to each vibrator thus obtained, and a vibration gyro is mass-produced.

As described above, according to the vibrating gyroscope of the second embodiment, the outputs of a plurality of counter electrodes are combined to detect the rotational angular velocity, so that the amplitude of the output signal is increased and the sensitivity is improved. .

Further, according to the vibrating gyroscope of the second embodiment, the second block that controls the drive and the first block that controls the detection in the vibrator are separate from each other. The material forming the second block can be individually selected, which increases the degree of freedom in designing the oscillator.

Further, according to the vibrating gyroscope of the second embodiment, the supporting member for supporting and fixing the vibrator at the time of mounting may be attached to the non-vibrating portion of the spacer, and the portion to which the supporting member is attached is Determined easily.

Further, the supporting member can be attached at any position on the non-vibrating portion, and not limited to the wire rod, a supporting member made of a plate material may be used, and a plurality of supporting members are attached to each spacer. be able to. As a result, the degree of freedom in designing the support member is increased and the vibrator can be firmly supported and fixed.

Further, according to the vibrating gyroscope of the second embodiment, a part of the lead wire connecting the vibrator and the printed wiring board can be formed on the supporting member, and wiring such as wire bonding can be performed. Work becomes easy.

Further, according to the vibrating gyroscope of the second embodiment, a plurality of vibrators can be easily obtained by cutting and dividing the mother substrate, and mass production can be efficiently performed.

In the above-mentioned first and second embodiments, the case where the first block constituting the vibrator is composed of two piezoelectric bodies has been described, but the piezoelectric body constituting the first block is The number is not limited to two and may be a single number or a number of three or more.

Further, in the first and second embodiments, the case where the second block is composed of two piezoelectric bodies has been described, but the number of piezoelectric bodies forming the second block is limited to two. The number is not limited to one and may be three or more.

In addition, in the first and second embodiments, the case where the cubic or rod-shaped spacers are used has been described. However, as long as the bending vibrations of the first and second blocks are not hindered, other spacers are used. Shaped spacers may be used.

Furthermore, the polarization directions of the first and second blocks are not limited to those exemplified in the first and second embodiments.

[0049]

According to the vibrating gyroscope of the present invention,
In the oscillator, the second block that controls driving and the first block that controls detection are separate from each other.
The material forming the second block can be individually selected, which increases the degree of freedom in designing the oscillator.

Further, according to the vibrating gyroscope of the present invention, the plurality of convex portions on the first block forming the vibrator are provided with the counter electrodes, respectively, and the signals generated at the counter electrodes are combined to rotate. If it is configured to detect the angular velocity, the amplitude of the output signal is increased and the sensitivity is improved.

Further, according to the vibrating gyroscope of the present invention, when the vibrator vibrates and vibrates, the vibration-free portions at the center of the spacer in the thickness direction of the both side surfaces of the vibrator do not vibrate.
Therefore, the support member for supporting and fixing the vibrator is
It suffices if the spacers are mounted on the non-vibration portion of each spacer, and the portion to which the support member is mounted is easily determined.

The support member can be attached at any position on the non-vibration portion, and not limited to the wire rod, a support member made of a plate material may be used, and a plurality of support members are attached to each spacer. be able to. As a result, the degree of freedom in designing the support member is increased and the vibrator can be firmly supported and fixed.

[Brief description of drawings]

FIG. 1 is an illustrative view showing a vibrating gyroscope according to a first embodiment of the present invention.

2 (a) and 2 (b) are schematic views showing bending vibration of a vibrator forming the vibration gyro of FIG.

FIG. 3 is a perspective view showing a state where the vibrator of FIG. 2 is supported and fixed by a support member.

FIG. 4 is a perspective view showing a state where the vibrator of FIG. 2 is supported and fixed by another supporting member.

5 is a perspective view showing a mother substrate used for manufacturing the vibrator of FIG. 2. FIG.

FIG. 6 is an illustrative view showing a vibrating gyroscope according to a second embodiment of the present invention.

7 (a) and 7 (b) are schematic views showing bending vibration of a vibrator forming the vibration gyro of FIG.

8 is a perspective view showing a state where the vibrator of FIG. 7 is supported and fixed by a support member.

9 is a perspective view showing a state where the vibrator of FIG. 7 is supported and fixed by another supporting member.

FIG. 10 is an illustrative view showing a conventional vibrating gyro.

11 is a perspective view showing a state in which a vibrator constituting the vibration gyro of FIG. 10 is supported and fixed by a support member.

[Explanation of symbols]

1, 31 Vibration gyro 2, 33 First block 3, 34 Second block 4, 35 Spacer 5, 36 Hollow part 6, 32 Transducer 8, 42 Counter electrode 9, 10, 11, 44 Planar electrode 12, 45 Oscillation circuit (driving means) 15, 48 Differential amplifier circuit (detection means) 26, 27, 37, 38, 43 Piezoelectric body 39 Convex portion 40 Recessed portion

Continuation of front page (56) Reference JP-A-3-122518 (JP, A) JP-A-5-333038 (JP, A) JP-A-6-160099 (JP, A) JP-A-4-55714 (JP , A) JP-A-7-260489 (JP, A) SAIKAI HEI 4-38513 (JP, U) Tadashi Konno, Piezoelectric vibration gyro / direction sensor, 1986 Grant-in-Aid for Scientific Research (General research (general research ( B)) Research Results Report (Assignment No. 60460142), Japan, March 1987, 71-72, 80 (58) Fields investigated (Int.Cl. ⁷ , DB name) G01C 19/56 G01P 9 / 04

Claims (2)

(57) [Claims] 1. A step of stacking two polarized piezoelectric sheets with a plurality of rod-shaped spacer members having a rectangular cross section sandwiched therebetween to form a mother substrate, and the mother substrate is formed in the longitudinal direction of the spacer members. And a step of forming a plurality of vibrators each having a structure in which both ends of two rod-shaped piezoelectric blocks are connected to each other through a spacer by cutting the piezoelectric block in a width direction and a width direction, respectively. Manufacturing method. 2. A vibrating gyroscope comprising a vibrator, drive means for applying a drive signal to the vibrator, and detection means for detecting a signal generated in the vibrator, wherein the vibrator is a piezoelectric body. The first and second blocks, which are polarized in the thickness direction, are connected to each other in the thickness direction of the piezoelectric body through spacers, and a hollow portion is formed between the first and second blocks. With the configuration, the first block, the convex portion and the concave portion which are parallel to each other in the width direction along the longitudinal direction of the first block from the one surface side thereof are alternately provided, and the convex portion is provided. A vibrating gyroscope, wherein a pair of counter electrodes facing each other in the width direction of the first block are provided on the upper surface of the vibrating gyro.