JP3470363B2 - Jig for measuring complex permittivity and method of configuring the measuring system - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for measuring a complex permittivity and a method of constructing a measuring system therefor, and more specifically, a jig for measuring a complex permittivity of a sample formed of a dielectric material. The present invention relates to a tool and a measuring system configuration method thereof.

[0002]

2. Description of the Related Art In recent years, millimeter waves have been drawing attention in order to meet the rapid increase in demand for radio waves, and dielectric materials that can be used in the millimeter wave band have been actively developed. In order to evaluate the developed dielectric material, a jig for measuring the complex dielectric constant of the dielectric material in the millimeter wave band has been conventionally considered.

FIG. 9 is a perspective view showing the entire structure of a conventional jig for measuring complex permittivity. In FIG. 9, the jig 100 for measuring the complex permittivity is substantially the same as the nonradiative dielectric waveguide section 1
01 and the non-radiative dielectric line portion 101 for connecting another line (for example, a waveguide) of a different type to the conversion unit 1
02 and 103. Non-radiative dielectric line section 101
And the conversion units 102 and 103 are configured separately.

The non-radiative dielectric line portion 101 includes a flat lower conductor plate 1001, a flat upper conductor plate 1002, and a flat lower conductor plate 1002.
One spacer 1003 (three in the figure), a pair of dielectric strip lines 1005 and 1006 for transmitting a predetermined electromagnetic wave and exciting the sample S of the dielectric material, and the upper conductor plate 100.
4 bolts 100 for detachably mounting 2
7 (four shown), and four nuts 1008 (two shown). Copper plates are used for the lower conductor plate 1001 and the upper conductor plate 1002, and the surfaces of the lower conductor plate 1001 and the upper conductor plate 1002 are mirror-polished. Spacer 1
003 keeps the interval H between the lower conductor plate 1001 and the upper conductor plate 1002 substantially constant, and the error of the interval H is 0.01
It is maintained below mm. Dielectric strip line 10
05 and 1006 are predetermined frequencies (for example, 60 GH)
In order to transmit the LSM01 mode of z) with less loss, it is formed with a width W and a height H of Teflon having a relative permittivity ε s = 2.04. Dielectric strip line 1005,1
006 is attached and fixed in a straight line on the lower conductor plate 1001. Dielectric strip line 100
End portions 1005a, 10 of the 5, 1006 facing each other
Since the sample S is disposed between 06a and the sample S is excited by loose coupling, a predetermined interval is provided. Also, the other ends 1005b of the dielectric strip lines 1005 and 1006,
Since 1006b is connected to the conversion units 102 and 103,
It projects from the lower conductor plate 1001 and the upper conductor plate 1002. The other end portions 1005b and 1006b have characteristic impedances of other lines and the dielectric strip line 10 respectively.
In order to match the characteristic impedances of 05 and 1006, a taper tapering in the width direction is formed.

The converters 102 and 103 include flanges 10
2a and 103a are provided, respectively. Flange 102
The a and 103a are provided with four screw holes 102b and 103b for inserting bolts (not shown) and four positioning holes 102c and 103c, respectively. Screw hole 1
The waveguide (not shown) and the conversion units 102 and 103 are integrally connected by inserting bolts into the 02b and 103b and screwing them. FIG. 10 is a perspective view showing the internal shape of the conversion unit 102. The conversion unit 103 also converts the conversion unit 10
Since it is formed in the same manner as in No. 2, the internal structure will be described on behalf of the conversion unit 102. Inside the conversion section 102, a waveguide section 102d and a horn section 102e are formed, which are inserted between the waveguide and the non-radiative dielectric line section 101. The waveguide section 102d is formed in the same shape (width W1 and height H1) as the waveguide connected to the flange 102a. The height of the horn portion 102e is 1005 as it goes from the waveguide portion 102d to the non-radiative dielectric waveguide portion 101.
b, 1006b from both upper and lower sides to gradually decrease from H1 to H (H1> H), and the width of the other end portion 100 increases from the waveguide section 102d to the non-radiative dielectric waveguide section 101.
The left and right sides of 5b and 1006b are gradually expanded to W1 to w (W1 <w). As a result, electromagnetic waves flowing in the waveguide, for example, characteristic impedance of TE10 mode,
L flowing through the dielectric strip lines 1005 and 1006
The characteristic impedance of the SM01 mode is matched.

When the complex permittivity of the sample S is measured by using the complex permittivity measuring jig 100, first, the converter 10 is used.
2, 103 are separated left and right from the non-radiative dielectric line portion 101, and the other end portions 1005b and 1006b of the dielectric strip lines 1005 and 1006 are connected to the conversion portions 102 and 103.
It is pulled out from the horn part 102e. Then the bolt 10
07 and the nut 1008 are removed, and the upper conductor plate 1002 is removed.
Then, the sample S is placed on the lower conductor plate 1001 substantially at the center of the dielectric strip lines 1005 and 1006. In addition, the thickness of the sample S is very thin. Therefore, the sample S
Is difficult to install between the lower conductor plate 1001 and the upper conductor plate 1002. Moreover, when the lower conductor plate 1001 is inclined, the position of the sample S is displaced. Therefore, the sample S
Above and below the sample S, the relative permittivity of which is lower than that of the sample S and the relative permittivity of which is known (for example, the relative permittivity ε
(Teflon of s = 2.04) is placed to adjust the height of the sample S and prevent the sample S from being displaced. Then
The upper conductor plate 1002 is closed, and the nut 1008 and the bolt 10
07 and screw. Next, the conversion units 102 and 103 are brought close to the non-radiative dielectric line portion 101 from the left and right, and the other end portions 100 of the dielectric strip lines 1005 and 1006 are arranged.
5b and 1006b are the horn units 1 of the conversion units 102 and 103.
02e. After these operations are completed, a measuring instrument (not shown) such as a synthesized sweeper, a network analyzer, and a test set is used to measure f0 (f0) of the sample S.
: Resonance frequency), QL (QL: load Q), etc.
The complex permittivity of the sample S, that is, the relative permittivity εr of the sample S, is calculated from these measured values f0, QL, etc. by the finite element method.
The dielectric loss tangent tan δ is calculated.

[0007]

However, in the conventional jig for measuring the complex dielectric constant, the other end portion 100 of the dielectric strip lines 1005 and 1006 is measured every time the sample S is measured.
5b and 1006b are the horn units 1 of the conversion units 102 and 103.
I had to pull out or insert it from 02e. Therefore, the positioning between the other end portions 1005b and 1006b and the horn portion 102e is not constant, and a mismatch occurs, which causes a problem that the measured value of the sample S varies widely. This state is shown in FIG. Figure 11
Is a jig 100 for measuring the complex permittivity of FIG. 9, and is a Resonix (registered trademark, relative permittivity εr = 24.5, Q = 2400
It is a figure which shows the dispersion | variation of the measured value Q0 which measured 0 at 10 GHz) 10 times. It can be seen from FIG. 11 that the measured value Q0 has a large variation. Further, in the conventional complex permittivity measuring jig, for each measurement of the sample S, the bolt 1007 and the nut 1008 are detached, screwed, the upper conductor plate 1002 is opened and closed, and the converters 102 and 103 are used. Need to be separated from the non-radiative dielectric line portion 101 to the left and right, and brought close to each other. Therefore, in the conventional jig for measuring the complex permittivity, the work of installing the sample S becomes complicated, which imposes a heavy burden on the operator and takes a long time before starting the measurement. Further, in the conventional complex permittivity measuring jig, the horn portion 102e is considered in consideration of both height and width.
Since the shape of the horn portion 102e is determined, there is a problem that it is difficult to process the horn portion 102e.

The present invention solves the above-mentioned technical problems, reduces variations in measured values of samples, reduces the burden on the operator, and shortens the time until the start of measurement. A first object is to provide a jig and a method of configuring a measurement system.

A second object of the present invention is to provide a jig for complex permittivity measurement in which the horn portion can be easily processed.

[0010]

[0011]

The invention according to claim 1 is
A jig for measuring the complex permittivity of a sample formed of a dielectric material, the non-radiative dielectric line portion into which the sample is inserted, and the non-radiative dielectric line portion having different types. A pair of conversion parts for coupling to a line, wherein the non-radiative dielectric line part is arranged in parallel with the flat lower conductor plate part and the lower conductor plate part with a substantially constant interval. A flat plate-shaped upper conductor plate portion, a pair of dielectric strip lines linearly arranged on the lower conductor plate portion with an interval for inserting the sample, and an insertion position of the sample Each conversion part includes a sample insertion hole formed in the upper conductor plate part above, into which the sample can be inserted and taken out, and a lid formed of a conductive material and detachably attached to the sample insertion hole. It is characterized by being integrally formed with the non-radiative dielectric line portion.

According to a second aspect of the present invention, in the first aspect, the conversion section includes a waveguide section connected to a line other than the non-radiative dielectric line section, and a dielectric inside the waveguide section. A stripline is inserted and includes a horn portion for matching the characteristic impedance of the dielectric stripline and the characteristic impedance of the waveguide portion, and the horn portion has a constant internal height.

The invention according to claim 3 is a method of constructing a measuring system for measuring a complex permittivity of a sample formed of a dielectric material, comprising a pair of dielectric strip lines on a lower conductor plate portion. The first step of arranging the sample in a straight line with a space for inserting the sample, and arranging the flat upper conductor plate part in parallel with the lower conductor plate part maintaining a substantially constant space. A second step of integrally forming a non-radiative dielectric line section and a pair of conversion sections for coupling the non-radiative dielectric line section to another line of a different type; and an upper conductor plate section The third step of inserting the sample through the sample insertion hole formed on the substrate and placing it between the pair of dielectric strip lines, and the sample insertion hole formed on the upper conductor plate part with a lid formed of a conductive material. A fourth step of mounting.

[0014]

In the invention according to claims 1 and 4, a sample insertion hole through which a sample can be inserted and taken out is formed in the upper conductor plate portion, and a lid made of a conductive material is attached to the sample insertion hole. . Therefore, the sample can be placed between the pair of dielectric strip lines only by removing the lid without removing the upper conductor plate portion. Also, remove the lid
Check each end of the pair of dielectric strip lines.
Allows you to easily place the sample in the proper position
be able to. Therefore, it is possible to reduce variations in the measured values of the sample, reduce the burden on the operator, and shorten the time until the start of measurement. Further, since it is not necessary to move the conversion part, the positioning between the dielectric strip line and the horn part becomes constant, and no mismatching occurs, so that the dispersion of the measured values of the sample S is reduced.

According to the second aspect of the present invention, each conversion section is formed integrally with the non-radiative dielectric waveguide section. For this reason, even when the jig is moved, the positioning between the dielectric strip line and the horn portion becomes constant, and no mismatching occurs. Further reduce.

In the invention according to claim 3, a waveguide section connected to a line other than the non-radiative dielectric line section,
A dielectric stripline is inserted in the inside of the converter, and the horn part for matching the characteristic impedance of the dielectric stripline and the characteristic impedance of the waveguide part is included in the conversion part, and the height inside the horn part is kept constant. I try to keep it. Therefore, it is not necessary to change the height as in the conventional case, and the horn portion may be processed flat considering only the width, which facilitates the processing.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an exploded perspective view showing the entire structure of a complex dielectric constant measuring jig of one embodiment of the present invention, and FIG. 2 is a top view of the complex dielectric constant measuring jig of FIG. 3 is shown in FIG.
It is a perspective view which shows the internal shape of the conversion part 8 of FIG. In FIG. 1, a complex permittivity measuring jig 1 includes a substantially flat plate-shaped upper conductor plate portion 2, a flat plate-shaped lower conductor plate portion 3, a pair of dielectric strip lines 4 and 5, and a conductor material. With the lid 6 formed in, the non-radiative dielectric line section 7 and the conversion sections 8 and 9 for connecting the non-radiative dielectric line section 7 to another line (for example, a waveguide) of a different type. Are formed integrally.

The upper conductor plate 2 and the lower conductor plate 3 are covered with a lid 6.
It is formed of the same conductor material as, for example, titanium. The upper conductor plate portion 2 is divided into three parts, that is, a central block 21 and end blocks 22 and 23 in order to facilitate processing and improve processing accuracy. The central block 21 includes the non-radiative dielectric line portion 7 and
A part of the conversion units 8 and 9 is included. The end blocks 22 and 23 are
It includes a part of the conversion units 8 and 9, respectively. Central block 21
In, a plurality of screw holes 21a are formed. A column-shaped sample insertion hole 60 into which the sample S can be inserted is formed substantially at the center of the central block 21. Around the sample insertion hole 60,
A flange 61 for locking the lid 6 is provided. Flange 6
1, a plurality of screw holes 62 (see FIG. 2) are screwed. The lid 6 is formed in a cylindrical shape so as to be fitted in the flange 61 so as to be detachably mounted in the sample insertion hole 60, and the cylindrical portion 6 is formed.
a, a flange 6b provided on the upper portion of the cylindrical portion 6a so as to be fitted in the sample insertion hole 60, and a knob 6c provided on the upper portion of the flange 6b. Cover 6 with sample insertion hole 60
Removed from the ends of the dielectric strip lines 4 and 5
Can be visually observed (see FIG. 2). The flange 6b is provided with a plurality of screw holes 6d at positions corresponding to the screw holes 62.
By attaching the lid 6 to the sample insertion hole 60 and fixing the lid 6 with screws, the bottom surface of the central block 21 and the bottom surface of the columnar portion 6a are formed in a flat shape so as not to be uneven.

A plurality of screw holes 22a and 23a are formed in the end blocks 22 and 23, respectively. End block 2
Screw holes 22b, 23 for inserting bolts (not shown) for connecting a waveguide (not shown) are provided on the side surfaces of 2, 23.
b (not shown) and positioning holes 22c and 23c (not shown) are provided respectively. Protrusions 22d and 23d having a predetermined width and height are formed on the bottom surfaces of the end blocks 22 and 23, respectively. Tapers 22e and 23e having a predetermined width are formed on the ridges 22d and 23d, respectively.

The lower conductor plate portion 3 is a non-radiative dielectric line portion 7
And conversion units 8 and 9. Steps 35 to 38 are symmetrically provided between the upper planes 30 to 34 of the lower conductor plate portion 3. The steps 36 and 38 are formed corresponding to the left and right ends of the central block 21. Steps 35, 37
Is formed at H. Thereby, the upper conductor plate portion 2
The lower conductor plate portion 3 and the lower conductor plate portion 3 can be held at a constant distance H and arranged in parallel. The screw holes 21 are formed in the flat surfaces 31 and 33.
A plurality of screw holes 31a and 33a are provided at positions corresponding to a. On the flat surfaces 31 and 33, horn grooves 31b and 33b that are cut in a triangular shape at a predetermined height H are formed so as to be adjacent to the flat surface 30. The planes 32 and 34 include
A plurality of screw holes 3 are provided at positions corresponding to the screw holes 22a and 23a.
2a and 34a are provided, respectively. Screw holes 32b, 34b (not shown) into which bolts (not shown) for connecting a waveguide (not shown) are inserted in the left and right side surfaces of the lower conductor plate portion 3.
When the positioning hole 32c, 3 3 c (not shown) are respectively provided. In addition, the planes 31 and 32 and the planes 33 and 3
The thin grooves 3 1 c and 34 c are formed in the groove 4 so as to be adjacent to the horn grooves 31 b and 33 b, respectively. Plane 32,3
4 and the ridges 22 are provided on the upper portions of the narrow grooves 32c and 34c.
Thick grooves 31d and 33d that fit into d and 23d are formed, respectively.

The dielectric strip lines 4 and 5 are Teflon having a relative permittivity εs = 2.04, a width W and a height H so that the LSM01 mode of a predetermined frequency (for example, 60 GHz) is transmitted with a small loss. (If the center frequency is designed to be 60 GHz, height a = 2.25 mm
= H, width b = 2.50 mm). A sample S is placed between the dielectric strip lines 4 and 5, and the sample S is excited by loose coupling. Therefore, a predetermined space is provided substantially above the center of the lower conductor plate portion 3. Such an interval is formed by cutting one dielectric strip line into a predetermined length. Further, since the other ends of the dielectric strip lines 4 and 5 are connected to the conversion portions 8 and 9, the horn grooves 31b and 3 are formed.
Road 3b, respectively, are fitted thin groove 3 1 c, the 34c, respectively. In addition, the other ends of the dielectric strip lines 4 and 5 are tapered in the height direction in order to match the characteristic impedance of the other lines and waveguides with the characteristic impedance of the dielectric strip lines 4 and 5. Taper 4a,
5a (see FIG. 3) are formed respectively.

Assembling the jig 1 for measuring the complex permittivityStand upsometimes
First, insert the dielectric strip lines 4 and 5 into the narrow grooves 31
c and 34c, respectively, and dielectric on the lower conductor plate 3
The body striplines 4 and 5 are arranged in a straight line, and the sample S
Open the space for inserting. Next, the lower conductor plate portion 3
The central block 21 and the end blocks 22 and 23 are sequentially arranged on the upper side.
Non-radiative dielectric line section by mounting and screwing
7 and converters 8 and 9 are formed. Next, insert the sample S into the sample.
Inserted from the entry hole 60, between the dielectric strip lines 4 and 5
Place on. Here, the thickness L of the sample S is very thin.
Therefore, the sample S is installed between the lower conductor plate portion 3 and the lid 6.
Difficult to place. Also, the lower conductor plate 1001 is inclined
Then, the position of the sample S is displaced. Therefore, in FIG.
As shown in, the relative permittivity above and below sample S is lower than that of sample S.
In addition, the relative permittivity is known, and the supports 10a and 10b having a height h
(For example, Teflon with relative permittivity εs = 2.04)
When adjusting the height of the sample S,
Try to prevent this. A jig for complex permittivity measurement
When there is no risk of tilting 1, the support base 10b alone
The sample S may be supported. Then insert the sample
By attaching the lid 6 to the hole 60 and screwing the sample, the sample S
The complex permittivity can be measured. These tasks are completed
, Synthesized Sweeper, Network Analyst
Using a measuring instrument (not shown) such as
F0 of the material S (f0: resonance frequency), QL (QL: load)
Q) is measured and finite from these measured values f0, QL, etc.
Complex permittivity of sample S using the element method, that is, sample S
The relative permittivity εr and the dielectric loss tangent tan δ of are calculated. here,
The excited state of the sample S is shown in FIG. In FIG. 5, the dielectric
Of the LSM01 mode propagating through the strip lines 4 and 5
The lines of electric force are shown by the solid line A1 and the lines of magnetic force are shown by A2. On the other hand, L
SM01 mode has a TE02δ mode Hz component and magnetic field
It is possible to combine. Therefore, the sample S is TE
Magnetic field coupling with Hz component of 02δ mode, parallel plate open type induction
It constitutes an electric resonator and is excited. In addition, the
Deterioration of QL (QL: load Q) due to current loss can be suppressed
And the upper conductor plate 2 and the lid 6 and the lower conductor plate 3
And QL (QL: load) due to unnecessary high-order mode current loss
The deterioration of Q) is suppressed. As a result, the complex induction of the sample S
The electric constant can be measured without variation.

By the way, in the conventional complex permittivity measuring jig, since the end of the dielectric strip line is hidden by the conversion part, the matching state between the dielectric strip line and the conversion part cannot be seen. On the other hand, in this embodiment, the taper portions 4a, 5a of the dielectric strip lines 4, 5 and the narrow grooves 31c, 34c and the horn grooves 31b, 33b are formed.
Both are visible. That is, eyes and the ends of the dielectric strip line 4 and 5, the matching state between the conversion unit 8, 9
It can be seen. Therefore, the dielectric strip lines 4, 5
Even if such a situation arises that the replacement is required, the matching characteristic can be maintained substantially constant, and the measurement condition does not change.

In the conventional complex permittivity measuring jig,
The problem is that the structure of the converter is complicated and difficult to process, and impedance conversion from TE10 mode, which is the transmission wave of the waveguide section, to LSM01 mode, which is the transmission wave of the dielectric strip line, is performed at once, so the equivalent circuit expression is There was a problem that it was difficult. However, expressing the conversion unit by an equivalent circuit has an advantage that the phenomenon can be intuitively understood. Therefore, as shown in FIG. 3, the conversion portion 8 is formed by the narrow groove 31c on the lower conductor plate portion 3 side, the horn groove 31b, the ridge 22d and the taper 22e on the upper conductor plate portion 2 side, and the central block 21. The waveguide section 81 and the horn section 82 are configured. The horn unit 82 includes a first impedance conversion unit 82a, an impedance steady unit 82b,
The second impedance converter 82c is divided into three parts. In the first impedance converter 82a, the height H1 of the waveguide 81 is equal to 3.76 mm and the height H of the dielectric strip line 4 is equal to 2.25 mm, that is, the height H of the constant impedance portion 82b, and at the same time. The dielectric strip line 4 is gradually filled, and TE10
Impedance conversion is performed in the mode. In the second impedance conversion unit 82c, the impedance steady unit 8
The same height H as 2b, that is, the height H of the dielectric strip line 4 is expanded to the width w1 of the horn groove 31b, and the impedance W is set to the width W of the dielectric strip line 4 transmitting the LSM01 mode. The conversion is done.

The converters 8 and 9 are required to have good conversion characteristics. For that purpose, the signal input from the waveguide is not reflected by each part, particularly the first impedance converter 82a and the second impedance converter 82c. Therefore, it is necessary to determine the shape and dimensions. A flowchart for optimizing the structure of the conversion units 8 and 9 is shown in FIG. First, the structure (shape, size) of the conversion unit is determined (step S1). Next, the conversion units 8 and 9 are modeled (step S2).
Next, the modeled equivalent circuit constant is calculated (step S3). Then, the S parameter is calculated using a circuit simulator (step S4). Then, it is determined whether or not it is optimum (step S5). If it is not optimum, steps S1 to S5 are repeated until it becomes optimum. When it becomes optimum, the structures of the conversion units 8 and 9 are determined.

Here, the equivalent circuit of the first impedance converter 82a according to the flowchart of FIG. 6 will be specifically described. In order to represent the first impedance converter 82a by an equivalent circuit, first, the characteristic impedance for the TE10 mode is obtained. The equivalent circuit model can be expressed as shown in FIG. When the waveguide section 81, the first impedance conversion section 82a, and the impedance steady state section 82b in FIG. 3 are taken out and the input / output ends of the waveguide section 81 and the impedance steady section 82b are short-circuited, this conversion section It can be treated as a TM mode resonator from the electromagnetic field distribution, and eigenvalue analysis by two-dimensional FEM calculation is possible. The circuit constant can be obtained by the resonance condition by short-circuiting the waveguide 81 and the constant impedance part 82b at appropriate positions. Also, the second impedance converter 82c can be represented by an equivalent circuit in the same manner as the first impedance converter 82a. Therefore, it is possible to intuitively understand the phenomenon. Moreover, since the height of the second impedance converter 82c is constant, the design and processing are facilitated.

FIG. 8 is a diagram showing a measurement result of the sample S performed by using the jig 1 for measuring the complex dielectric constant. Resomix (registered trademark, relative permittivity εr = 24.5, Q
= 24000at10GHz) measured resonance mode TE0
2δ mode, sample size φ = 2.09 mm, t = 0.69
mm was measured. As a result of repeatedly measuring one sample S 10 times, good measurement reproducibility was obtained with frequency variation of 2.4 MHz and Q variation of 48.

In the above embodiment, the other line is explained as a waveguide, but it may be carried out by another line such as a coaxial cable, or a coaxial cable is converted into a waveguide. May be implemented as another line.

[0029]

According to the inventions of claims 1 and 4, a sample insertion hole through which a sample can be inserted and taken out is formed in the upper conductor plate portion, and a lid made of a conductive material is attached to the sample insertion hole. Therefore, you can simply remove the lid without removing the upper conductor plate , and each end of the pair of dielectric strip lines.
The part can be visually observed , and the sample can be easily placed at an appropriate position between the pair of dielectric strip lines,
It is possible to reduce the variation in the measured values of the sample, reduce the burden on the operator, and shorten the time until the start of measurement. Further, since it is not necessary to move the conversion part, the positioning between the dielectric strip line and the horn part becomes constant,
Since mismatching does not occur, variations in measured values of the sample S are reduced.

According to the second aspect of the present invention, since the respective conversion parts are formed integrally with the non-radiative dielectric line part, even when the jig is moved, the dielectric part is formed. Since the positioning between the strip line and the horn is constant and no mismatch occurs, the variation in the measured value of the sample S is further reduced.

According to the third aspect of the present invention, a waveguide section connected to a line other than the non-radiative dielectric line section and a dielectric strip line are inserted into the waveguide section, and the dielectric strip line is inserted. Since the conversion unit includes the horn unit for matching the characteristic impedance of and the characteristic impedance of the waveguide unit, the height inside the horn unit is kept constant, so the height can be changed as in the past. There is no need to process the horn portion in consideration of only the width, so that the processing becomes easy.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing an overall configuration of a complex dielectric constant measuring jig according to an embodiment of the present invention.

FIG. 2 is a top view of the complex permittivity measuring jig of FIG. 1 seen from above.

FIG. 3 is a perspective view showing an internal shape of a conversion unit 8 of FIG.

FIG. 4 is a diagram showing a mounted state of a sample S.

5 is a diagram showing an excited state of a sample S. FIG.

FIG. 6 is a flowchart for optimizing the structures of conversion units 8 and 9.

FIG. 7 is a diagram showing an equivalent circuit model of a first impedance converter 82a.

FIG. 8 is a diagram illustrating a complex permittivity measuring jig 1 of FIG.
It is a figure which shows the dispersion | variation of the measured value Q0 measured 0 times.

FIG. 9 is a perspective view showing an overall configuration of a conventional jig for measuring a complex dielectric constant.

FIG. 10 is a perspective view showing an internal shape of a conversion unit 102.

11 is a diagram showing variations in the measured value Q0 obtained by measuring the sample S 10 times with the complex dielectric constant measuring jig 100 of FIG.

[Explanation of symbols]

1 ... Jig for complex permittivity measurement 2 ... Upper conductor plate 3 ... Lower conductor plate 4, 5 ... Dielectric strip line 6 ... Lid 7 ... Non-radiative dielectric line section 8, 9 ... Converter 60 ... Sample insertion hole 81 ... Waveguide section 82 ... Horn section

Front page continuation (72) Inventor Norimitsu Tsukai No. 26-10 Tenjin Tenjin, Nagaokakyo-shi, Kyoto Incorporated company Murata Manufacturing Co., Ltd. (56) Reference JP-A-3-123871 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) G01R 27/26

Claims (3)

(57) [Claims] 1. A jig for measuring a complex permittivity of a sample formed of a dielectric material, comprising a non-radiative dielectric line portion into which the sample is inserted, and the non-radiative dielectric line portion. A pair of conversion parts for coupling to another line of a different type, and the non-radiative dielectric line part holds a flat lower conductor plate part and a substantially constant distance from the lower conductor plate part. A flat plate-shaped upper conductor plate portion arranged in parallel with each other, and a pair of dielectric strip lines linearly arranged on the lower conductor plate portion with a space for inserting the sample. A sample insertion hole formed in the upper conductor plate portion on the insertion position of the sample, through which the sample can be inserted and removed, and a lid formed of a conductive material and detachably attached to the sample insertion hole, Each of the conversion parts is formed integrally with the non-radiative dielectric line part. A jig for measuring complex permittivity, which is characterized in that 2. The conversion section includes a waveguide section connected to a line other than the non-radiative dielectric line section, and the dielectric strip line inserted into the waveguide section. and a horn portion for matching to the characteristic impedance of the characteristic impedance of the waveguide portion, the horn portion is characterized in that the internal height is held constant, according to claim 1 A jig for complex permittivity measurement. 3. A method of constructing a measurement system for measuring a complex dielectric constant of a sample formed of a dielectric material, wherein a pair of dielectric strip lines are linearly formed on a lower conductor plate portion. Firstly arranged with a space for inserting
And a non-radiative dielectric line portion and a non-radiative dielectric line portion are arranged in parallel with each other by arranging a flat upper conductor plate portion in parallel with the lower conductor plate portion while keeping a substantially constant interval. A second step of integrally forming a pair of conversion parts for coupling to another line of a different type; and inserting the sample from a sample insertion hole formed in the upper conductor plate part, A third step of mounting between the dielectric strip lines; and a fourth step of mounting a lid made of a conductive material in the sample insertion hole formed in the upper conductive plate portion,
Complex dielectric constant measurement system configuration method.