JP2504986Y2 - Dielectric substrate measuring device - Google Patents
Dielectric substrate measuring deviceInfo
- Publication number
- JP2504986Y2 JP2504986Y2 JP13088189U JP13088189U JP2504986Y2 JP 2504986 Y2 JP2504986 Y2 JP 2504986Y2 JP 13088189 U JP13088189 U JP 13088189U JP 13088189 U JP13088189 U JP 13088189U JP 2504986 Y2 JP2504986 Y2 JP 2504986Y2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric substrate
- coupling terminal
- measuring device
- dielectric
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 この考案は誘電体基板の測定装置に関し、特にたとえ
ば誘電体共振器の共振周波数の摂動から複素誘電率を測
定する、誘電体基板の測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a dielectric substrate measuring device, and more particularly to a dielectric substrate measuring device for measuring a complex permittivity from perturbation of a resonance frequency of a dielectric resonator. Regarding
マイクロ波を扱うハイブリッド集積回路には、セラミ
ック等から形成される誘電体基板が用いられる。したが
って、ハイブリッド集積回路を定量的に解析するには、
誘電体基板の複素誘電率を、非接触、非破壊の状態で高
精度に測定する必要がある。A dielectric substrate formed of ceramic or the like is used for a hybrid integrated circuit that handles microwaves. Therefore, to quantitatively analyze a hybrid integrated circuit,
It is necessary to measure the complex permittivity of the dielectric substrate with high accuracy in a non-contact and non-destructive state.
そこで、本件考案者等は、昭和61年度電子通信学会光
・電波部門全国大会において、『セラミック基板複素誘
電率の非接触相対局所測定法』という論文を発表し、そ
の中で誘電体基板の複素誘電率を測定するための測定装
置を開示した。その測定装置は、測定しようとする誘電
体基板の上面と下面に、それぞれTE01δモードの誘電体
共振器を取り付けた開口金属ケースを非接触の状態で配
置する構造である。そして、この測定装置においては、
TE01δモードの共振周波数の摂動から複素誘電率を求め
る。Therefore, the present inventors presented a paper entitled "Non-contact relative local measurement method of complex permittivity of ceramic substrate" at the National Conference of the Institute of Electronics and Communication Engineers, Optical and Radio Wave Division in 1986. A measuring device for measuring the dielectric constant has been disclosed. The measuring device has a structure in which, in a non-contact state, open metal cases with TE 01 δ mode dielectric resonators attached to the upper and lower surfaces of a dielectric substrate to be measured are arranged. And in this measuring device,
TE 01 Calculate complex permittivity from perturbation of δ mode resonance frequency.
このような従来の測定装置においては、誘電体基板が
常に２つの金属ケースの中間に配置されているときは問
題はない。In such a conventional measuring device, there is no problem when the dielectric substrate is always arranged between the two metal cases.
しかし、誘電体基板に反りなどが生じて誘電体基板が
２つの金属ケースの中間からずれると、一方の金属ケー
スに入力端子と出力端子とが設けられているので電磁界
分布が上下対称でなくなってしまい、複素誘電率に影響
を与え、高精度の測定ができなくなってしまう。However, when the dielectric substrate is warped or the like and the dielectric substrate is displaced from the middle of the two metal cases, the input terminal and the output terminal are provided in one metal case, so that the electromagnetic field distribution is not vertically symmetrical. This will affect the complex permittivity and make it impossible to perform highly accurate measurement.
それゆえに、この考案の主たる目的は、複素誘電率を
高精度に測定できる、誘電体基板の測定装置を提供する
ことである。Therefore, a main object of the present invention is to provide a dielectric substrate measuring device capable of measuring a complex dielectric constant with high accuracy.
この考案は、誘電体基板の上面側および下面側にそれ
ぞれの開口が対向するように配置される第１および第２
の金属ケース、第１および第２の金属ケース内に取り付
けられる第１および第２の誘電体共振器、第１の金属ケ
ースに取り付けられる入力または出力結合端子、および
第２の金属ケースに取り付けられる出力または入力結合
端子を備える、誘電体基板の測定装置である。According to this invention, the first and second openings are arranged on the upper surface side and the lower surface side of the dielectric substrate so that their openings face each other.
A metal case, first and second dielectric resonators mounted in the first and second metal cases, input or output coupling terminals mounted in the first metal case, and mounted in the second metal case A measuring device for a dielectric substrate having an output or input coupling terminal.
誘電体共振器としては、たとえばTE01δモード（また
はTM01δモード）のものを用い、第１の金属ケースに設
けられた入力または出力結合端子と第２の金属ケースに
設けられた出力または入力結合端子との間にアナライザ
を接続する。そして、アナライザから周波数信号を送
る。このとき、第１および第２の金属ケースによってそ
れぞれ規定される２つの共振キャビティ内に発生する電
磁界の分布は上下対称となる。この状態で摂動法を利用
して複素誘電率を測定する。For example, a TE 01 δ mode (or TM 01 δ mode) dielectric resonator is used, and an input or output coupling terminal provided in the first metal case and an output or output coupling terminal provided in the second metal case are used. Connect the analyzer to the input coupling terminal. Then, a frequency signal is sent from the analyzer. At this time, the distributions of electromagnetic fields generated in the two resonant cavities respectively defined by the first and second metal cases are vertically symmetrical. In this state, the complex permittivity is measured by using the perturbation method.
この考案によれば、２つの共振キャビティ内に電磁界
が対称的に分布するので、誘電体基板が第１および第２
の金属ケースの中間からずれて配置されても、複素誘電
率を高精度に測定することができる。According to the present invention, since the electromagnetic fields are symmetrically distributed in the two resonance cavities, the dielectric substrate has the first and second dielectric cavities.
The complex permittivity can be measured with high accuracy even if the metal case is placed out of the middle of the metal case.
この考案の上述の目的，その他の目的，特徴および利
点は、図面を参照して行う以下の実施例の詳細な説明か
ら一層明らかとなろう。The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the detailed description of the embodiments below with reference to the drawings.
第１図を参照して、この実施例の誘電体基板の測定装
置10は、それぞれ一面開口の上ケース12および下ケース
14を含む。これらの上ケース12および下ケース14は、そ
れぞれたとえばアルミニウムや銅またはそれらの合金な
どの良導体の金属から形成され、測定しようとする誘電
体基板16の上面側および下面側に非接触の状態で、その
開口が対向するように配置される。このようにして、た
とえば樹脂，紙などで形成された誘電体基板16を挟むよ
うに配置された上ケース12と下ケース14とで規定される
空間がそれぞれ共振キャビティとなる。With reference to FIG. 1, a dielectric substrate measuring apparatus 10 of this embodiment includes an upper case 12 and a lower case each having a one-sided opening.
Including 14. The upper case 12 and the lower case 14 are each formed of a metal of good conductor such as aluminum or copper or an alloy thereof, and are in non-contact with the upper surface side and the lower surface side of the dielectric substrate 16 to be measured, The openings are arranged so as to face each other. In this way, the spaces defined by the upper case 12 and the lower case 14 which are arranged so as to sandwich the dielectric substrate 16 formed of, for example, resin or paper, become resonance cavities.
上ケース12内の天井部分（底板）の中心部には、低誘
電率の樹脂などで形成され円柱状の支持部18が、たとえ
ば接着剤などによって固着される。支持部18の下端部に
は円柱状の誘電体共振器20が、たとえば接着剤などによ
って取り付けられる。この誘電体共振器20には、たとえ
ばTE01δモードが用いられる。At the center of the ceiling portion (bottom plate) in the upper case 12, a columnar support portion 18 formed of a resin having a low dielectric constant is fixed by, for example, an adhesive. A cylindrical dielectric resonator 20 is attached to the lower end of the support portion 18 with, for example, an adhesive. For this dielectric resonator 20, for example, TE 01 δ mode is used.
また、上ケース12の側壁の下部には、入力結合端子22
が取り付けられる。入力結合端子22の接地電極は上ケー
ス12に接続され、その中心導体の先端部がループ状にし
て共振キャビティ内に臨まされる。Also, at the bottom of the side wall of the upper case 12, the input coupling terminal 22
Is attached. The ground electrode of the input coupling terminal 22 is connected to the upper case 12, and the tip end of the central conductor is looped to face the resonance cavity.
下ケース14内の底部にも上ケース12と同じように支持
部18が取り付けられ、その支持部18の上には同じ誘電体
共振器20が配置される。A support 18 is attached to the bottom of the lower case 14 as in the upper case 12, and the same dielectric resonator 20 is arranged on the support 18.
また、下ケース14の側壁の上部でかつ入力結合端子22
と対称的な位置には、出力結合端子24が取り付けられ
る。出力結合端子24の接地電極は下ケース14に接続さ
れ、その中心導体の先端部がループ状にして共振キャビ
ティ内に臨まされる。Also, on the upper side wall of the lower case 14 and at the input coupling terminal 22
The output coupling terminal 24 is attached at a position symmetrical with. The ground electrode of the output coupling terminal 24 is connected to the lower case 14, and the tip of the center conductor is looped to face the resonance cavity.
このように上下対称に形成される誘電体基板の測定装
置10を用いて誘電体基板16の複素誘電率を測定するに
は、入力結合端子22および出力結合端子24にネットワー
クアナライザ（図示せず）を接続して共振キャビティ内
に周波数信号を送る。すると、それぞれの共振キャビテ
ィ内には対称的な電磁界が発生する。この状態で、周知
の摂動法によって、共振周波数の変化から複素誘電率を
測定する。In order to measure the complex permittivity of the dielectric substrate 16 using the dielectric substrate measuring device 10 which is vertically symmetrical as described above, a network analyzer (not shown) is provided at the input coupling terminal 22 and the output coupling terminal 24. To send a frequency signal into the resonant cavity. Then, a symmetrical electromagnetic field is generated in each resonance cavity. In this state, the complex permittivity is measured from the change of the resonance frequency by the well-known perturbation method.
第２図を参照して、他の実施例の誘電体基板の測定装
置10′は、測定装置10と同様、誘電体基板16の上面側お
よび下面側に配置される上ケース12および下ケース14を
含む。上ケース12内の天井部分（底板）の略中央部に
は、低誘電率の樹脂などで形成された棒状の２つの支持
部26が、たとえば接着剤によって固着される。これらの
支持部26の下端部には円板形TM01δモードの誘電体共振
器28が、たとえば接着剤などによって取り付けられる。With reference to FIG. 2, a dielectric substrate measuring apparatus 10 ′ of another embodiment is similar to the measuring apparatus 10 in that an upper case 12 and a lower case 14 are arranged on the upper surface side and the lower surface side of a dielectric substrate 16. including. Two rod-shaped support portions 26 made of a resin having a low dielectric constant are fixed to the substantially central portion of the ceiling portion (bottom plate) in the upper case 12 by, for example, an adhesive. A disk-shaped TM 01 δ mode dielectric resonator 28 is attached to the lower ends of these supporting portions 26 by, for example, an adhesive.
また、上ケース12の外表面天井部の中心部には、入力
結合端子30が取り付けられる。入力結合端子30の接地電
極は上ケース12に接続され、その先端部に形成されるア
ンテナプローブ32はループ状にして共振キャビティ内に
臨まされる。An input coupling terminal 30 is attached to the center of the outer surface ceiling of the upper case 12. The ground electrode of the input coupling terminal 30 is connected to the upper case 12, and the antenna probe 32 formed at the tip of the input coupling terminal 30 faces the inside of the resonance cavity in a loop shape.
また、下ケース14内の底部にも上ケース12と同様、２
つの支持部26が取り付けられ、これらの２つの支持部26
の上には誘電体共振器28が配置される。このとき、２つ
の誘電体共振器28のそれぞれの中心軸が一致するように
配置される。また、下ケース14の外表面底部の中心部に
は、上ケース12と同様、出力結合端子34が取り付けら
れ、その先端部に形成されるアンテナプローブ36はルー
プ状にして共振キャビティ内に臨まされる。このとき、
２つのアンテナプローブ32および36は同一直線上になる
ように配置される。In addition, as with the upper case 12, the bottom of the lower case 14 is 2
Two supports 26 are attached and these two supports 26
A dielectric resonator 28 is arranged on the above. At this time, the two dielectric resonators 28 are arranged so that their central axes coincide with each other. Further, similarly to the upper case 12, the output coupling terminal 34 is attached to the center of the outer surface bottom of the lower case 14, and the antenna probe 36 formed at the tip of the output coupling terminal 34 is looped to face the resonance cavity. It At this time,
The two antenna probes 32 and 36 are arranged on the same straight line.
このように上下対称に形成される誘電体基板の測定装
置10′を用いて誘電体基板16の複素誘電率を測定すると
きも、測定装置10と同様に、２つの共振キャビティ内に
は電磁界が対称的に発生する。したがって、精度よく複
素誘電率を測定できる。When measuring the complex permittivity of the dielectric substrate 16 using the dielectric substrate measuring device 10 ′ which is formed symmetrically in the vertical direction as described above, as in the measuring device 10, an electromagnetic field is present in the two resonant cavities. Occur symmetrically. Therefore, the complex permittivity can be accurately measured.
なお、上述の各実施例において、入力結合端子22また
は30を下ケース14に、出力結合端子24または34を上ケー
ス12に取り付けるようにしてもよい。In each of the above-described embodiments, the input coupling terminal 22 or 30 may be attached to the lower case 14 and the output coupling terminal 24 or 34 may be attached to the upper case 12.
第１図はこの考案の一実施例を示す断面図である。 第２図はこの考案の他の実施例を示す断面図である。 図において、10,10′は誘電体基板の測定装置、12は上
ケース、14は下ケース、16は誘電体基板、20,28は誘電
体共振器、22,30は入力結合端子、24,34は出力結合端子
を示す。FIG. 1 is a sectional view showing an embodiment of the present invention. FIG. 2 is a sectional view showing another embodiment of the present invention. In the figure, 10 and 10 'are dielectric substrate measuring devices, 12 is an upper case, 14 is a lower case, 16 is a dielectric substrate, 20 and 28 are dielectric resonators, 22 and 30 are input coupling terminals, and 24, 34 indicates an output coupling terminal.
Claims (1)
れの開口が対向するように配置される第１および第２の
金属ケース、 前記第１および第２の金属ケース内に取り付けられる第
１および第２の誘電体共振器、 前記第１の金属ケースに取り付けられる入力または出力
結合端子、および 前記第２の金属ケースに取り付けられる出力または入力
結合端子を備える、誘電体基板の測定装置。1. A first metal case and a second metal case arranged so that their respective openings are opposed to each other on the upper surface side and the lower surface side of the dielectric substrate, and the first metal case is mounted in the first and second metal cases. And a second dielectric resonator, an input or output coupling terminal attached to the first metal case, and an output or input coupling terminal attached to the second metal case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13088189U JP2504986Y2 (en) | 1989-11-09 | 1989-11-09 | Dielectric substrate measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13088189U JP2504986Y2 (en) | 1989-11-09 | 1989-11-09 | Dielectric substrate measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0370378U JPH0370378U (en) | 1991-07-15 |
| JP2504986Y2 true JP2504986Y2 (en) | 1996-07-24 |
Family
ID=31678424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13088189U Expired - Lifetime JP2504986Y2 (en) | 1989-11-09 | 1989-11-09 | Dielectric substrate measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2504986Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101050156B1 (en) * | 2009-12-16 | 2011-07-19 | 한국철도공사 | Wheel Drive Chip Disperser |
-
1989
- 1989-11-09 JP JP13088189U patent/JP2504986Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0370378U (en) | 1991-07-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |