JP3511715B2 - Jig for measuring surface resistance and complex permittivity and method for configuring the measuring system - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for measuring surface resistance and complex permittivity and a method of constructing a measuring system therefor, and more specifically, a surface of a pair of conductors whose surfaces are formed of a conductive material. The present invention relates to a jig capable of measuring resistance and a complex permittivity of a dielectric sample, and a method of configuring the measurement system.

[0002]

2. Description of the Related Art In recent years, the demand for radio waves has rapidly increased, the speed of communication has increased,
In order to cope with the miniaturization of parts, attention is focused on high frequencies (microwaves and millimeter waves), and various dielectric materials such as ceramics are being actively developed. Therefore, in order to evaluate the dielectric material, there is a demand for establishment of a simple and highly accurate complex dielectric constant measurement technique at high frequencies.

By the way, when the complex dielectric constant of a dielectric sample is measured, particularly when the dielectric loss tangent tan δ is obtained, the surface resistance Rs of the metal is used for the calculation of the dielectric loss tangent tan δ, so the surface resistance Rs needs to be known. In addition, the actual surface resistance Rs varies depending on the frequency, and increases due to the degree of finishing of the surface, the current distribution, and the change with time, compared with the case where the metal surface is smooth. Therefore, it is necessary to measure the surface resistance Rs at the used frequency before measuring the complex permittivity of the dielectric sample.

FIG. 25 is a diagram showing a structure of a jig used in a conventional dielectric resonator method with both ends short-circuited. In particular, FIG.
5 (a) shows the set state of the sample resonator 700 as shown in FIG.
25B shows the set state of the standard resonator 500, and FIG.
(C) shows the set state of the standard resonator 600, respectively.

In FIG. 25, the jig is roughly provided with two conductor plates 100 and 200 and two semi-rigid cables 300 and 400. By moving the conductor plate 200 up and down while keeping the conductor plate 100 parallel to the conductor plate 100, two standard resonators 50 are provided between the conductor plates 100 and 200.
The height can be adjusted to 0, 600 and the height of the sample resonator 700. Semi-rigid cable 300,4
At the end of 00, loop probe 3 made of metal and having a small diameter is used.
00a and 400a are formed respectively. The loop surface of the loop probe 300a, 400a is the standard resonator 5
00 and 600 and the sample resonator 700 are arranged in parallel with the conductor plates 100 and 200 in order to detect the resonance magnetic field. Both standard resonators 500 and 600 are made of the same dielectric material (relative permittivity εr, dielectric loss tangent tan δ) and are formed in a cylindrical shape having the same diameter d. In addition, the standard resonator 60
The height of 0 is formed at 3h, which is three times the height h of the standard resonator 500.

When measuring the surface resistance Rs of the conductor plates 100 and 200, first, the amount of transmission attenuation in the measurement frequency range is measured, and the reference level of the measurement system such as a semi-rigid cable is set. Next, as shown in FIG. 25B, the standard resonator 500 is set in the center of the conductor plates 100 and 200,
Resonance frequency f01 of TE011 mode and unloaded Q and Qu
1 and are measured. Then, as shown in FIG.
The standard resonator 600 is set at the center of the conductor plates 100 and 200, and the TE013 mode resonance frequency f03 and the unloaded Q and Qu3 are measured. Then, the conductor plates 100, 20
The surface resistance Rs of 0 is calculated.

Next, the complex permittivity of the sample resonator 700,
That is, when measuring the relative permittivity εr and the dielectric loss tangent tan δ, as shown in FIG.
Is set in the center of the conductor plates 100 and 200, and TE01
The resonance frequency f0 of one mode and the unloaded Q and Qu are measured. Next, the dimensions of the sample resonator 700 and the resonance frequency f
The relative dielectric constant εr is obtained from the measured value of 0, and the dielectric loss tangent tan δ is obtained using the surface resistance Rs of the conductor plates 100 and 200.

[0008]

However, in the conventional both-end short-circuit type dielectric resonator method, when measuring the surface resistance of the conductor, the standard resonator 500 and the standard resonator 60 are measured.
There is the first problem that it takes time to measure the complex permittivity because the measurement must be performed twice with the measurement of 0.

Further, the standard resonators 500 and 600 and the sample resonator 700 have a structure in which they directly contact the conductor plates 100 and 200, that is, a structure in which both ends are short-circuited, and the standard resonators 500 and
Since a hard material such as ceramic is often used for 600 and the sample resonator 700, there is a second problem that the conductor surfaces of the conductor plates 100 and 200 are worn and deteriorated.

Further, since the sample resonator 700 has a short-circuit structure, there is a third problem that the measurement accuracy of the surface resistance greatly affects the measurement accuracy of the dielectric loss tangent of the dielectric sample.

Furthermore, since the magnetic field is disturbed by the loop probe, the unloaded Q of the resonance system is deteriorated, and the fourth problem is that the complex permittivity cannot be obtained with high accuracy.

A first object of the present invention is to provide a jig for measuring surface resistance and complex permittivity, which can solve the above-mentioned technical problems and can be easily measured, and a measuring system constituting method thereof. .

A second object of the present invention is to provide a jig for measuring surface resistance and complex permittivity in which abrasion deterioration of the conductor surface is prevented, and a method of constructing the measuring system thereof.

Further, it is a third object of the present invention to provide a jig for measuring surface resistance and complex permittivity capable of obtaining the complex permittivity of a dielectric sample with high precision, and a method of constructing the measuring system thereof.
The purpose of.

[0015]

The invention according to claim 1 is
A jig capable of measuring the surface resistance of a pair of conductors, at least the surface of which is formed of a conductive material, and the complex permittivity of a dielectric sample, the supporting means supporting the conductors in parallel at a predetermined interval, and the surface. A standard resonator formed of a dielectric material is mounted between conductors during resistance measurement, and a sample resonator including a dielectric sample and mounted between conductors during complex permittivity measurement is provided.
The standard resonator includes a first resonator and a second resonator forming a coupled resonator that produces resonant peaks at two or more different frequencies caused by coupling with the first resonator. It is characterized in that the complex permittivity of the dielectric sample is obtained using the surface resistance obtained by the standard resonator.

The invention according to claim 2 is the invention according to claim 1, characterized in that the first and second resonators are arranged coaxially.

The invention according to claim 3 is the invention according to claim 1 or 2.
In the invention described in (1), the standard resonator includes the first and second resonators.
Further includes a supporting member for keeping the positional relationship of the resonator of (1) constant.

According to a fourth aspect of the present invention, in the invention according to the third aspect, each support member is provided between the first and second resonators and the pair of conductors, and is formed of a soft material. A pair of first support bases.

According to a fifth aspect of the present invention, in the invention according to the fourth aspect, the thickness between the first and second resonators of the first support base and the pair of conductors is formed thin. Is characterized by.

The invention according to claim 6 relates to claims 1 to 5.
In any one of the above-mentioned inventions, it further comprises a pair of non-radiative dielectric lines including a dielectric strip and exciting the standard resonator and the sample resonator in the same plane.

The invention according to claim 7 is characterized in that, in the invention according to claim 6, the dielectric strip of the non-radiative dielectric waveguide is arranged at a predetermined angle.

The invention according to claim 8 relates to claims 1 to 7.
In any one of the inventions described above, the sample resonator includes a pair of second supporting bases respectively arranged between the dielectric sample and the conductor.

The invention according to claim 9 is a method of constructing a measuring system capable of measuring the surface resistance of a pair of conductors, at least the surfaces of which are made of a conductive material, and the complex permittivity of a dielectric sample. A first resonator for mounting a standard resonator including first and second resonators formed of a dielectric material between a pair of conductors
And a second step of measuring resonance peaks at two or more different frequencies generated by coupling of the first and second resonators, and sample resonance including a dielectric sample between a pair of conductors. And a fourth step of obtaining the complex permittivity of the dielectric sample by using the surface resistance obtained in the second step.

[0024]

In the inventions according to claims 1 and 9, the standard resonator including the first and second resonators formed of the dielectric material is mounted between the pair of conductors when the surface resistance is measured, and the first resonator is mounted.
And 2 generated by the coupling of the second resonator
The resonance peaks at three or more different frequencies are measured, and the complex permittivity of the dielectric sample is obtained by using the surface resistance obtained by the standard resonator. Therefore, the surface resistance can be easily obtained by one measurement, and the complex dielectric constant can be easily obtained.

In the invention according to claim 2, the first and second resonators are arranged coaxially. Therefore, it is not necessary to perform three-dimensional analysis, and the surface resistance can be obtained by two-dimensional analysis which is easy to calculate.

In the invention according to claim 3, the standard resonator further includes a support member for keeping the positional relationship between the first and second resonators constant. Therefore, the resonance characteristic of the standard resonator can be kept constant.

In the invention according to claim 4, each of the support members is arranged between the first and second resonators and the pair of conductors, and is formed of a pair of first soft members.
Includes support base. Therefore, it is possible to prevent wear and deterioration of the conductor, and it is possible to use it for measurement of complex permittivity, measurement of parts, etc. while maintaining the measured surface resistance value.

In the invention according to claim 5, the thickness between the first and second resonators of the support base and the pair of conductors is
It is thinly formed. Therefore, the surface resistance can be measured with the same high sensitivity as that of the short-circuited type.

The invention according to claim 6 further comprises a pair of non-radiative dielectric lines which include a dielectric strip and excite the standard resonator and the sample resonator in the same plane. Therefore, unlike the conventional loop probe, the magnetic field is not disturbed, so that the unloaded Q of the resonance system is not deteriorated, and the surface resistance and the complex permittivity are obtained with high accuracy even in the quasi-millimeter wave and the millimeter wave. be able to.

According to the seventh aspect of the invention, the dielectric strips of the non-radiative dielectric waveguide are arranged at a predetermined angle. Therefore, even if an unnecessary mode is generated, the necessary resonance peak can be observed without exciting the unnecessary mode.

In the invention according to claim 8, the sample resonator is provided with a pair of second supporting bases respectively arranged between the dielectric sample and the conductor. Therefore, it is possible to prevent wear and deterioration of the conductor, maintain the measured value of the surface resistance, reduce the influence of the measurement error of the surface resistance, and measure the complex dielectric constant with high accuracy.

[0032]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing the structure of a jig for an open-ended dielectric resonator method according to an embodiment of the present invention.

In FIG. 1, the jig 10A is roughly
A pair of metal plate supporting portions 2A, 2 for detachably and in parallel supporting a pair of metal plates 1A, 1B for measuring surface resistance.
B, input / output port portions 3A and 3B that can be fixed to the metal plate support portions 2A and 2B, metal plates 1A and 1B, and metal plate support portion 2
Dielectric strips 4A and 4B are provided to connect the A and 2B and the input / output port sections 3A and 3B. When measuring the surface resistance Rs of the metal plates 1A and 1B, the standard resonator 5 is mounted between the metal plates 1A and 1B. When measuring the complex permittivity of a dielectric sample, the metal plate 1A,
The sample resonator 6 is mounted between 1B. Metal plate 1A, 1
B, metal plate supporting portions 2A, 2B and input / output port portion 3
A and 3B are metallic materials (for example, hard aluminum (A707
5)) is processed.

FIG. 2 is a diagram showing the configuration of the standard resonator 5 of FIG. 1, and FIG. 3 is an equivalent circuit diagram of the standard resonator 5. Figure 2
, The standard resonator 5 has the same dielectric material (eg,
A ring-shaped resonator 51 (TE031 mode) and a column-shaped resonator 52 (cut out from Ba (Mg, Ta) O ₃ , relative permittivity εst = 24, dielectric loss tangent tanδst = 2.0 × 10 ⁻⁴ ) TE021 mode) and soft and same dielectric material (eg PTFE, relative permittivity εs =
2.04, dielectric loss tangent tan δs = 1.5 × 10 ⁻⁴ ), the resonators 51 and 52 are coaxial and the positional relationship thereof is kept constant, and the resonators 51 and 52 and the metal plates 1A and 1B are kept.
And supporting bases 53 and 54 that prevent contact with the same.

The support bases 53 and 54 have resonators 51 and 52, respectively.
A recess is formed at a position corresponding to. By mounting the resonators 51 and 52 in the recesses,
2 and the support bases 53 and 54 are integrated. The resonators 51 and 52 are connected to the metal plate 1A,
Since it is floated from 1B, wear deterioration of the metal plates 1A and 1B is prevented. In addition, the thickness of the concave portions of the support bases 53 and 54 is calculated within a range in which the influence on the electromagnetic field distribution can be ignored,
It is set to 50 μm. Therefore, the surface resistance Rs
Can be measured with the same sensitivity as the short-circuited type. The resonators 51 and 52 are designed to have substantially equal resonance frequencies. Also, the principle of the standard resonator 5,
The measurement formula and design will be described in detail later.

FIG. 4 is a diagram showing the structure of the sample resonator 6 shown in FIG. In FIG. 4, the sample resonator 6 is a dielectric sample (for example, Ba (Mg, Ta) O ₃ , a relative dielectric constant εr.
= 24, dielectric loss tangent tan δr = 2.0 × 10 ⁻⁴ ) 61
And soft and the same dielectric material (eg PTF
E, relative permittivity εs = 2.04, dielectric loss tangent tanδs =
1.5 × 10 ⁻⁴ ), which is provided with support bases 62 and 63 that prevent contact between the dielectric sample 61 and the metal plates 1A and 1B. The dielectric sample 61 is formed in a cylindrical shape having a diameter D and a thickness L. The support bases 62 and 63 each have a diameter D.
s1, Ds2 (for example, D = Ds1 = Ds2), thickness h
It is formed in a cylindrical shape of s1 and hs2 (for example, L = hs1 = hs2). The dielectric sample 61 is attached to the support base 6
The reason why the upper and lower supports are 2, 63 is to secure the parallelism of the dielectric sample 61 and improve the measurement reproducibility.

In FIG. 1, each metal plate supporting portion 2A, 2B
Is the height H of the pressing plates 21 and 22 and the distance between the pressing plates 21 and 22 and the distance between the metal plates 1A and 1B to the height H of the dielectric strips 4A and 4B, the standard resonator 5 and the sample resonator 6.
And a spacer 23 for supporting the same height. In order to integrate the pressing plates 21 and 22, the spacer 23, and the dielectric strips 4A and 4B, four pressing holes 22a are formed in the pressing plate 22, and the pressing plate 21 has screw holes 22a. Screw holes (not shown) are formed at corresponding positions. In addition, the spacer 23 and a part of the dielectric strips 4A and 4B are provided on the pressing plate 21,
It projects from 22 in the direction of the metal plates 1A and 1B.

The dielectric strips 4A and 4B are made of PTFE having a low dielectric constant of 2.04 in the millimeter wave band and 60 GHz.
Width 2.5 mm, height H = 2.25 commonly used in obi
It is formed in mm. Between the metal plates 1A and 1B and between the pressing plates 21 and 22 of the metal plate supporting portions 2A and 2B,
The dielectric strips 4A and 4B have metal planes above and below,
The left and right sides are symmetrically surrounded by space. Therefore, the dielectric strips 4A, 4B, the pressing plates 21, 22 and the metal plates 1A, 1B are used to form the non-radiative dielectric lines 7A,
7B is formed. The standard resonator 5 and the sample resonator 6 are mounted on the extension lines of the dielectric strips 4A and 4B so as to be magnetically coupled to the dielectric strips 4A and 4B at the same distance g, that is, at the center from the end faces thereof. In such a structure, the sample resonator 6 and the dielectric strips 4A, 4
By changing the end face distance g of B, the external Q and Qex of the dielectric sample 61 can be easily controlled as shown in FIG.

A waveguide is generally used to measure the transmission reflection characteristic in the millimeter wave band. Therefore, in order to use the non-radiative dielectric line as the input / output line, it is necessary to convert the modes of both. Therefore, the input / output port units 3A and 3B are divided into upper and lower blocks 31 and 32, respectively.
And a mode converter (see FIG. 6) 3 formed therein.
3 and 3, respectively.

In order to integrate the blocks 31 and 32,
The block 32 has six screw holes 32a formed therein, and the block 31 has screw holes (not shown) formed at positions corresponding to the screw holes 32a. Further, in order to integrate the block 32 and the pressing plate 22, the block 32 has two
One long groove 32b is formed. A screw hole (not shown) is formed in each long groove 32b, and the pressing plate 22
A screw hole (not shown) is formed in the. In addition, in order to integrate the block 31 and the pressing plate 21, the block 31 is formed with long grooves and screw holes similar to the block 32, and the pressing plate 21 is formed with screw holes.
Further, four screw holes 32 are formed on the side surfaces of the input / output port portions 3A and 3B in order to fix a flange of a waveguide (not shown).
c, two alignment holes d are formed.

FIG. 6 is a diagram showing the structure of the mode converter 33. The mode converter 33 communicates with the TE10 mode waveguide 33a, which is the basic transmission mode of the waveguide, and the non-radiative dielectric lines 7A and 7B, and is the basic transmission mode of the non-radiative dielectric line LSM01 mode. The non-radiative dielectric line section 33b, the two tapered conversion sections 33c and 33d, and the buffer section 33e provided between the conversion sections 33c and 33d. As a result, mode conversion is performed between the TE10 mode, which is the basic transmission mode of the waveguide, and the LSM01 mode, which is the basic transmission mode of the non-radiative dielectric waveguide.

The mode converter 33 has a frequency of 60 GHz.
It is designed with z. In the converter 33c, the E-plane distance of the waveguide of the WR-15 is 3.76 m using the cosine curve.
m is the distance between the conductor plates of the non-radiative dielectric waveguide 33b is 2.25.
mm to taper shape and at the same time PTFE (relative permittivity ε
The dielectric strip 3 made of s = 2.04) was formed into a taper shape and loaded. The taper length of the converter 33c is set to 15 mm, which allows the theoretical value of reflection loss to be 40 dB.
In the conversion unit 33d, the cosine curve is used to increase the distance between the H-planes and the width of the dielectric strip 3 is expanded to convert the non-radiative dielectric line 33b. The taper length of the converter 33d is set to 15 mm, which allows the theoretical value of reflection loss to be 30 dB. In addition, the buffer unit 33e
The buffer length of the high-order mode has sufficient attenuation (100 dB).
The above values are set to 6 mm. As a result, the characteristic impedance changes smoothly and the generation of higher-order modes is suppressed, so that the reflection is small and the broadband characteristic can be provided.

The characteristics are shown in FIG. (A) shows insertion loss and (b) shows reflection loss. As shown in FIG. 8, in the frequency band of 57 to 65 GHz, a reflection loss of 20 dB at a level that can be used for resonance characteristic measurement is obtained.

FIG. 7 shows the surface resistance Rs of the metal plates 1A and 1B.
3 is a block diagram showing the overall configuration of a measurement system for measuring the complex dielectric constant of sample resonator 6. FIG. In FIG. 7, the measurement system includes a jig 10A, a test set module 11 for measuring S parameters, and a network analyzer system 12. The network analyzer system 12 includes a network analyzer 12a and an RF synthesizer sweeper 12b.
And LO sweeper 12c and millimeter wave controller 12
and d.

Next, the setting of the reference level of the measurement system will be described. When setting the reference level of the measurement system, the metal plate supporting portion 2B and the input / output port portion 3B are moved so that the dielectric strips 4A and 4B are aligned (see the dotted line in FIG. 1), and the dielectric strip A dielectric strip 4C is inserted between 4A and 4B, and the through transmission characteristics of the measurement system are measured. The calibration of the measurement system, that is, the setting of the reference level is performed every time the surface resistance Rs of the standard resonator 5 and the complex dielectric constant of the sample resonator 6 are measured.

FIG. 9 is a diagram showing a direct coupling characteristic between the dielectric strips 4A and 4B. That is, FIG. 9 shows an example of the measurement result of the transmission characteristics (distance between input and output lines 2 g = 14 mm) in the state where there is neither the dielectric strip 4C nor the standard resonator 5 and the sample resonator 6 between the dielectric strips 4A and 4B. FIG. From this result, the direct coupling between the input and the output due to the TEM mode generated due to the discontinuity such as the vertical asymmetry is as small as −70 dB, and the surface resistance Rs and the measurement of the sample resonator 6 are not affected. Is shown.

Therefore, according to the mode converter 33, the standard resonator 5 and the sample resonator 6 arranged on the same plane can be easily integrated with each other, and thus the durability and reproducibility are excellent. In addition, two two-dimensional structure conversion units 33c, 33
Since it is divided into d, it has excellent designability and workability. In addition, since the taper-shaped smooth curves are used for the conversion portions 33c and 33d, good conversion characteristics are obtained.

Next, the surface resistance Rs of the metal plates 1A and 1B
The measurement principle and measurement formula of are explained. FIG. 10 is a diagram showing the resonance characteristic of the standard resonator 5, and FIG. 11 is a diagram showing the magnetic field distribution during resonance. When two resonators 51 and 52 having substantially the same resonance frequency on the equivalent circuit are coaxially arranged as shown in FIG. 2, both the resonators 51 and 52 are coupled to each other, and two frequencies f0 as shown in FIG. ^odd , f0 ^even
TE041 mode (hereinafter referred to as an odd mode, see FIG. 11 (a)) having a resonance peak at a frequency of f0 ^odd and f0 ^{even at the} frequencies f0 ^odd and f0 ^even .
There are two resonance states, a 051 mode (hereinafter referred to as an even mode, see FIG. 11B). The mode name is based on the nomenclature when the standard resonator 5 is regarded as one TE0m1 resonator.

By the way, when two ring-shaped or column-shaped TE0mδ mode resonators are coupled with their axes parallel to each other, axial symmetry is lost and an Ez component is generated, so that the coupled resonance formed by both resonators is generated. The vessel goes into hybrid mode. 3 when in hybrid mode
Dimensional electromagnetic field analysis is required, and both accuracy and calculation time are generally not suitable for standard measurement. Therefore, the present inventor has devised the standard resonator 5 in which the axes of the resonators 51 and 52 are arranged in common. As a result, the axial symmetry is completely maintained, and the measurement result of the standard resonator 5 can be easily numerically processed by the two-dimensional electromagnetic field analysis of the rotationally symmetric mode.

Further, the standard resonator 5 has a circuit configuration in which both the input and output are coupled only to the resonator 51 outside the dielectric strips 4A and 4B. Therefore, as described later, it is possible to easily detect the self-resonance frequency difference between the two resonators 51 and 52.

Of both modes between the two resonators 51 and 52
Due to the difference in magnetic field distribution, the conductor surface of the metal plates 1A and 1B
And the current density in the odd mode coupling is stronger than that in the even mode.
Q, Qc due to odd-mode conductor loss^odd Is in even mode
Q and Qc due to conductor loss^evenWill be lower. This difference is gold
Since it is proportional to the surface resistance Rs of the metal plates 1A and 1B,
The surface resistance Rs is calculated by calculating the magnetic field distribution of the magnetic field.
Can be turned on. In addition, Q due to the conductor loss in the even mode,
Qc^evenAnd Q, Qc due to odd mode conductor loss ^odd Is
It cannot be measured alone. However, both modes
Q and Qd due to dielectric loss^even, Qd^odd Together with both
Mode no load Q, Qu^even, Qu^oddCan be measured as
It

Next, a method of measuring the surface resistance Rs will be described. From the resonance characteristics of FIG. 10, the even mode insertion loss IL
^Even, load Q, QL ^even , and odd mode insertion loss I
^{Lod d} and load Q, QL ^odd are measured respectively, and even mode unloaded Q, Qu ^even and odd mode unloaded Q,
Qu ^odd and are respectively calculated from the equation (1). In addition, IL
^Even is insertion loss in even mode, QL ^even is load Q in even mode, IL ^odd is insertion loss in odd mode, QL ^odd is load Q in odd mode, Qu ^even is no load Q in even mode, Qu ^odd.
Is an odd mode unloaded Q.

[0053]

[Equation 1]

On the other hand, for both resonance modes (2),
Equation (3) holds. Note that Qd ^even is Q due to even mode dielectric loss, Qd ^odd is Q due to odd mode dielectric loss, A ^even is the degree of concentration of energy stored in the even mode resonator, and A ^odd is odd mode resonance. The degree of concentration of energy stored in the ^chamber , tan δ ^even, is tan δ at even mode resonance frequency f 0 ^even , and tan δ ^odd is tan δ at ^odd mode resonance frequency f 0 ^odd .

[0055]

[Equation 2]

In general, f / tan δ = constant is known in ceramics used in the microwave band,
Expression (4) is established.

[0057]

[Equation 3]

Using the relation of the equation (4), the equation (2),
By eliminating tan δ from the equation (3), the equation (5) is obtained.

[0059]

[Equation 4]

Here, Qc ^even and Qc ^odd can be respectively expressed by equations (6) and (7) by definition. In addition, Rs ^even is the surface resistance at f0 ^even , DA
Is the damping parameter. It was also assumed that the surface resistance at frequencies close to the measurement frequency is proportional to the square root of the frequency ratio.

[0061]

[Equation 5]

By substituting equations (6) and (7) into equation (5) and rearranging, equation (8) can be obtained as the measurement formula of the surface resistance Rs.

[0063]

[Equation 6]

Here, the degree of energy concentration A ^even , A ^odd
And the attenuation parameters DA ^even and DA ^odd are the resonator 5
Based on the relative permittivity εst of 1,52 and the structural parameter, the finite element method and the kajfez perturbation theory are used to calculate each by the equation (9). A value measured in advance was used as the relative permittivity εst.

[0065]

[Equation 7]

Next, the design of the standard resonator 5 will be described. When the surface resistance Rs is obtained from the difference between Q and Qc due to the conductor loss due to the difference in current distribution between the even mode and the odd mode, the resonators 51 and 52 in the even mode and the odd mode resonance are obtained.
It is important to enter each of the stored energy W1 and W2. Assuming that the current distributions of both resonance modes have no frequency dependence, the difference ΔPLOSS of loss energy can be expressed by equation (10). Note that P ^even LOSS is the even mode loss energy, P ^odd LOSS is the odd mode loss energy, J1 is the current vector on the conductor plate by the resonator 51, and J2 is the resonator 5
2 is a current vector on the conductor plate by 2.

[0067]

[Equation 8]

Here, if the total accumulated energy Ws in each mode is constant, the relationship of equation (11) is established.
Note that α is an error coefficient due to the energy ratio Rw, [ΔPLOS
S] 0 is ΔPLOSS when Rw = 1.

[0069]

[Equation 9]

The difference Δf 0 between the self-resonant frequency f 1 of the resonator 51 and the self-resonant frequency f 2 of the resonator 52 and the energy ratio R
The relationship of w was calculated by a circuit simulator using the equivalent circuit of FIG. FIG. 12 is a diagram showing the frequency characteristics of the stored energy W1 and W2 of both the resonators 51 and 52 with respect to Δf0. In particular, (a) shows the stored energy W of the resonator 51.
1 shows the frequency characteristic of No. 1 and (b) shows the frequency characteristic of the stored energy W2 of the resonator 52. In addition, FIG.
It is a figure which shows the relationship of the energy ratio Rw with respect to (DELTA) f0.

12 and 13, when the energy ratio Rw = 100% in both the even mode and the odd mode, Δf0 =
It can be seen how much .DELTA.f0 should be set in order to suppress the energy ratio Rw within a certain range corresponding to the case of 0. The external Q of each mode is Qex ^even and Qex ^odd ,
When the difference is ΔQex, the range of ΔQex can be known from the relationship of ΔQex with respect to Δf0 shown in FIG. In this sense, the equivalent circuit of FIG. 3 constitutes a resonance circuit system suitable for detecting Δf0. On the other hand, ΔQex
Can be measured from the waveform of FIG. 10, so that the energy ratio Rw can be detected, and the degree of error in the measurement of the surface resistance Rs of the standard resonator 5 can be determined from the equation (11).

Next, regarding the design procedure of the standard resonator 5,
Describe. First, the self-resonant frequency without coupling
Under the same size of f1 'and f2', the coupling coefficient k and Δ
Calculate the relationship of Qc (see Fig. 14) by electromagnetic field calculation,
Considering the measurement accuracy from the result of, the resonance that ΔQc becomes large
The outer dimension d1 and the thickness t of the container 51 are set. here
And the coupling coefficient k is the even mode resonance frequency f0.^evenAnd odd
Mode resonance frequency f0 ^odd Using the difference between and (12)
Defined by formula.

[0073]

[Equation 10]

Next, in order to match Qex ^even and Qex ^odd , the resonance energy of the magnetic field component Hz at the reference plane position of the dielectric strips 4A and 4B of the non-radiative dielectric waveguide which is the input / output terminal is kept constant. Then, the outer dimension d2 of the resonator 52 is adjusted so that the even mode and the odd mode match (FIG. 15). As a result, Qex ^even = Qex ^odd can be achieved,
A set of resonators 51 having different shapes and in a coupled state,
This means that the self-resonance frequencies of 52 can be guaranteed by design (Δf≈0). A two-dimensional finite element method was used for electromagnetic field calculation.

FIG. 16 shows the resonance characteristic obtained by mounting the standard resonator 5 on the jig 10A, and FIG. 17 shows the calculation results of each parameter and the surface resistance Rs measured from the resonance characteristic of FIG. Is. The resulting ΔQex corresponds to 100 ± 20% or less of the energy ratio Rw from the relationship of FIG. 13, and the value of the error coefficient of the equation (11) is 1% or less, that is, its influence can be ignored. At the time of measuring the resonance characteristics of the standard resonator 5 and the sample resonator 6, as shown in FIG. 1, the metal plate supporting portion 2B and the metal plate supporting portion 2B are arranged so that the extension lines of the dielectric strips 4A and 4B intersect at an angle of 90 °. I / O port section 3
B has been moved. This is because the higher order mode is used in the millimeter wave, so that the dielectric strips 4A and 4B do not pick up other unwanted modes such as the odd mode and the even mode generated in the standard resonator 5 and the sample resonator 6, and the measurement is performed. This is so that the resonance characteristics required for are not masked in unnecessary modes.

Therefore, in the surface resistance Rs measurement in the conventional both-ends short-circuit type dielectric resonator method, two resonators must be mounted without misalignment for each measurement, and the millimeter wave resonator has a small resonator size. Although difficult and poor in durability and reproducibility, according to the standard resonator 5, it is possible to improve the durability and reproducibility because the axes can be aligned at once. Further, since the standard resonator 5 is mounted once, the two measured quantities Qu ^even and Qu ^odd can be obtained at the same time, and the surface resistance Rs can be calculated. Therefore, high measurement accuracy can be expected. Further, since the current vector at the time of measuring the surface resistance Rs has the same rotational direction as that at the time of measuring the sample, a highly reliable measured value can be expected without considering the directionality of processing of the metal surface. Further, since the standard resonator 5 has a structure close to both ends shorted, the measurement sensitivity of the surface resistance Rs is good.

Next, the measurement of the complex permittivity of the sample resonator 6 will be described. FIG. 18 shows the sample resonator 6 mounted on the jig 10A.
It is a figure which shows the resonance characteristic obtained by mounting in FIG. 19, FIG. 19 is a figure which shows the flowchart of complex permittivity determination of the dielectric sample 61, and FIG. 20 is a figure which shows a sample dimension and a measurement result. The resonance mode of the sample resonator 6 is small in the TE01δ mode and is difficult to handle.
The E02δ mode was used.

First, the dimensions and the like of the sample resonator 6 are set (step S1) and the surface resistance Rs and the like (step S1).
2) and are performed. As the relative permittivity εs and the dielectric loss tangent tan δs of the supports 62 and 63, the measured values by the conductor cylindrical dielectric disk resonator method were used. The surface resistance Rs is shown in FIG.
The value obtained by frequency conversion of the measurement result of was used. Then, steps S4 to S6 are repeated from the respective dimensions of the sample resonator 6 (step S1) and the measured value of the resonance frequency f0 shown in FIG. 18 (step S3) to obtain the relative permittivity ε of the dielectric sample 61.
r is calculated (step S7). Further, the dielectric loss tangent tan δ of the dielectric sample 61 is obtained by the equation (13) from the measured values of the unloaded Q and Qu (step S3). In addition,
μ 0 = 4π × 10 ^-7 H / m is the magnetic permeability of the vacuum, ADR is the energy concentration of the sample, As is the energy concentration on the support, and DA is the attenuation parameter.

[0079]

[Equation 11]

The energy concentration ADR of the sample, the energy concentration As to the support, and the damping parameter DA are given by the finite element method by giving the relative permittivity εr of the sample, the relative permittivity εs of the support and the structural parameters. It is calculated by the equation (14), which is a combination of the eigenvalue calculation of and the perturbation theory of kajfez.

[0081]

[Equation 12]

The calculation accuracy of the eigenvalue by the finite element method is T
Comparison with the analytical solution for the E011 mode resonator,
When the calculation is performed at 60 GHz, the division element size is 0.
Confirm that it is 0.01% or less for 05 mm,
In this method, calculation was performed under these conditions. In addition, the resonator actually used for measurement is an open system, but in the calculation, a model with an electric wall on a sufficiently distant side was used.

From FIG. 20, the reproducibility of the measurement of f0 is ±
It is 0.005% or less. Further, the reproducibility of measurement of the unloaded Q and Qu is ± 1% or less.

By the way, in this embodiment, as shown in FIG. 1, the sample resonator 6 is excited by the non-radiative dielectric waveguides 7A and 7B. Therefore, the magnetic field distribution of the LSM01 mode propagating through the non-radiative dielectric waveguides 7A and 7B is
As shown in FIG. 4, it spreads over a relatively large space and is very close to the TE0mδ mode of the sample resonator 6. Therefore, the reference planes of the dielectric strips 4A and 4B can be coupled to each other at a position spatially sufficiently distant from the sample resonator 6, so that the influence on the resonance electromagnetic field distribution is small and the single mode measurement theory can be used. Highly reliable. Further, since no metal such as a loop probe is used for the excitation part, the no-load Q is hardly deteriorated due to the current loss created by the coupling magnetic field.

The inventor of the present application conducted an experiment to investigate this. FIG. 21 shows the distance g (insertion loss IL) and the resonance frequency f.
FIG. 23 is a diagram showing a relationship with 0 (no load Q, Qu).
FIG. 22 is a diagram showing a comparison between the relationship of FIG. 21 between a non-radiative dielectric waveguide and a loop probe. In addition, due to the processing limit (1.5 mm) of the loop probe having a small diameter, the measurement was performed at 35 GHz in FIG.

Further, in the present embodiment, as shown in FIG. 4, the sample resonator 6 is a both ends open type resonator. Therefore, the ceramic of the dielectric sample 61 is directly connected to the metal plate 1.
Since the metal plates 1A and 1B are not touched, deterioration of the metal plates 1A and 1B is prevented, and the durability of the jig is improved. Further, the complex permittivity can be measured in a state close to a state in which the resonator is actually used (TE0mδ mode). Further, since the deterioration of the no-load Q due to the influence of the surface resistance of the upper and lower conductor plates is smaller than that of the short-circuit type,
The influence of the measurement error of the surface resistance when calculating the dielectric loss tangent is small.

The inventors of the present application have found that the measurement error ΔRs of the surface resistance of the open-ended type and the short-circuited type is the measurement error Δ of the dielectric loss tangent.
The effect on tan δ was investigated experimentally. FIG. 23 is a diagram showing the influence of the measurement error ΔRs on the measurement error Δtan δ. In FIG. 23, the solid lines α1 and α2 show the case where the sample with the both ends open type and the relative permittivity εr = 7, 24 is measured, and the chain lines α3 and α4 show the case where the sample is the short circuited type at both ends. ing. Therefore, it can be seen from FIG. 23 that the dielectric loss tangent of the open-ended type can be measured more accurately than the short-circuited type.

FIG. 24 is a perspective view showing a structure of a jig according to another embodiment of the present invention with a part thereof cut away.
The same numbers are given to the portions corresponding to and the description is omitted. In the jig 10B of FIG. 24, it should be noted that the lower plate 25 and the upper plates 35 to 37 form portions corresponding to the metal plate supporting portions 2A and 2B and the input / output port portions 3A and 3B of the jig A. A pair of mounting holes 25a for detachably supporting the metal plates 1A and 1B in parallel to the lower plate 25 and the upper plate 36,
36a is formed. With this jig 10B as well, similar to the jig 10A, the surface resistance Rs of the metal plates 1A and 1B and the complex dielectric constant of the sample resonator 6 can be measured with high accuracy.

In the above embodiment, the metal plates 1A, 1
Although B is formed of the metal material itself, it may be formed by metal-plating only the surface of ceramics or resin.

[0090]

According to the inventions of claims 1 and 9,
A standard resonator including first and second resonators formed of a dielectric material is mounted between a pair of conductors when measuring surface resistance,
The complex dielectric constant of the dielectric sample is obtained by measuring the resonance peaks at two or more different frequencies generated by coupling with the first and second resonators and using the surface resistance obtained by the standard resonator. Since this is done, the surface resistance can be easily obtained by one measurement, and the complex permittivity can be easily obtained.

According to the invention of claim 2, since the first and second resonators are arranged coaxially,
The surface resistance can be obtained by a two-dimensional analysis that does not require a dimensional analysis and is easy to calculate.

According to the third aspect of the invention, the standard resonator further includes a supporting member for keeping the positional relationship between the first and second resonators constant, so that the resonance characteristic of the standard resonator is constant. Can be kept at

According to the invention of claim 4, each of the supporting members is arranged between the first and second resonators and the pair of conductors, and is formed of a soft material. Since the support base is included, it is possible to prevent wear and deterioration of the conductor, and it can be used for measurement of complex permittivity, measurement of parts and the like while maintaining the measured surface resistance value.

According to the invention of claim 5, since the thickness between the first and second resonators of the support base and the pair of conductors is formed thin, it is as high as the both-end short-circuit type. Surface resistance can be measured with sensitivity.

According to the invention of claim 6, a pair of non-radiative dielectric lines that include a dielectric strip and excite the standard resonator and the sample resonator in the same plane are further provided. Unlike the probe, the magnetic field is not disturbed, the unloaded Q of the resonance system is not deteriorated, and the surface resistance and complex permittivity can be obtained with high accuracy even in the quasi-millimeter wave and millimeter wave.

According to the invention of claim 7, since the dielectric strip of the non-radiative dielectric waveguide is arranged at a predetermined angle, even if an unnecessary mode occurs, this unnecessary mode is excited. The required resonance peak can be observed without doing so.

According to the eighth aspect of the present invention, the sample resonator is provided with the pair of second supporting bases respectively arranged between the dielectric sample and the conductor. It is possible to prevent deterioration, maintain the measured surface resistance value, reduce the influence of surface resistance measurement error, and measure the complex permittivity with high accuracy.

[Brief description of drawings]

FIG. 1 is a perspective view showing the structure of a jig for an open-ended dielectric resonator method according to an embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a standard resonator 5 of FIG.

FIG. 3 is an equivalent circuit diagram of the standard resonator 5 of FIG.

FIG. 4 is a diagram showing a configuration of a sample resonator 6 of FIG.

FIG. 5 is a diagram showing a relationship between a distance g and external Q and Qex.

6 is a diagram showing a structure of a mode conversion unit 33. FIG.

FIG. 7 is a block diagram showing the overall configuration of a measurement system for measuring the surface resistance Rs of the metal plates 1A and 1B and the complex dielectric constant of the sample resonator 6.

FIG. 8 is a diagram showing transmission / reflection characteristics of a measurement system.

FIG. 9 is a diagram showing a direct coupling characteristic between dielectric strips 4A and 4B.

10 is a diagram showing a resonance characteristic of the standard resonator 5. FIG.

FIG. 11 is a diagram showing a magnetic field distribution when the standard resonator 5 resonates.

FIG. 12 is a diagram showing frequency characteristics of stored energies W1 and W2 of the resonators 51 and 52 with respect to Δf0.

FIG. 13 is a diagram showing a relationship of a difference ΔQex energy ratio Rw of an external Q with respect to Δf0.

FIG. 14 is a diagram showing a relationship between a coupling coefficient k and Qc.

FIG. 15 is a magnetic field component Hz with respect to the outer shape d2 of the resonator 52.
It is a figure which shows the relationship between Δf '.

FIG. 16 is a diagram showing resonance characteristics obtained by mounting the standard resonator 5 on the jig 10A.

FIG. 17 is a diagram showing calculation results of each parameter measured from the resonance characteristic of FIG. 16 and surface resistance Rs.

FIG. 18 is a diagram showing resonance characteristics obtained by mounting the sample resonator 6 on the jig 10A.

19 is a diagram showing a flowchart for determining a complex dielectric constant of a dielectric sample 61. FIG.

FIG. 20 is a diagram showing sample dimensions and measurement results.

FIG. 21 shows insertion loss IL (distance g) and resonance frequency f0,
It is a figure which shows the relationship with no load Q (Qu).

22 is a diagram showing the relationship of FIG. 21 in comparison between the non-radiative dielectric waveguide and the loop probe.

FIG. 23 is a diagram showing the influence of measurement error ΔRs on measurement error Δtan δ.

FIG. 24 is a perspective view showing a structure of a jig according to another embodiment of the present invention with a part thereof cut away.

FIG. 25 is a diagram showing a configuration of a jig used in a conventional both-end short-circuit type dielectric resonator method.

[Explanation of symbols]

1A, 1B ... Metal plate 2A, 2B ... Metal plate support 4A, 4B ... Dielectric strip 5: Standard resonator 6 ... Sample resonator 7A, 7B ... Non-radiative dielectric line 51, 52 ... Resonator 53, 54, 62, 63 ... Support base 61 ... Dielectric sample

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Atsushi Saito 2 26-10 Tenjin Tenjin, Nagaokakyo City, Kyoto Prefecture Murata Manufacturing Co., Ltd. Murata Manufacturing Co., Ltd. (56) Reference JP-A-54-137382 (JP, A) JP-A-5-172882 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01R 27/00-27/32

Claims (9)

(57) [Claims] 1. A jig capable of measuring the surface resistance of a pair of conductors, at least the surface of which is formed of a conductive material, and the complex permittivity of a dielectric sample, the conductors being supported in parallel at predetermined intervals. Supporting means, a standard resonator formed of a dielectric material and mounted between the conductors when measuring the surface resistance, and a sample including the dielectric sample, the sample being mounted between the conductors when measuring the complex dielectric constant. A resonator, wherein the standard resonator forms a first resonator and a coupled resonator that produces resonant peaks at two or more different frequencies caused by coupling with the first resonator. And a second resonator for measuring the complex dielectric constant of the dielectric sample using the surface resistance obtained by the standard resonator. 2. The jig for measuring surface resistance and complex permittivity according to claim 1, wherein the first and second resonators are arranged coaxially. 3. The standard resonator includes the first and second resonators.
The jig for measuring surface resistance and complex permittivity according to claim 1 or 2, further comprising a support member for keeping the positional relationship of the resonator of (1) constant. 4. Each of the support members includes the first and second support members.
Disposed between the resonator and the pair of conductors,
Including a pair of first supports formed of a soft material,
The jig for measuring surface resistance and complex permittivity according to claim 3. 5. The first and second of the first support base.
The jig for measuring surface resistance and complex permittivity according to claim 4, wherein a thickness between the resonator and the pair of conductors is formed thin. 6. The surface according to claim 1, further comprising a pair of non-radiative dielectric lines that include a dielectric strip and that excite the standard resonator and the sample resonator in the same plane. Jig for measuring resistance and complex permittivity. 7. The jig for measuring surface resistance and complex dielectric constant according to claim 6, wherein the dielectric strip of the non-radiative dielectric waveguide is arranged at a predetermined angle. 8. The surface resistance according to claim 1, wherein the sample resonator includes a pair of second support bases respectively arranged between the dielectric sample and the conductor. And jig for complex permittivity measurement. 9. A method for constructing a measuring system capable of measuring the surface resistance of a pair of conductors, at least the surface of which is made of a conductive material, and the complex permittivity of a dielectric sample, comprising: A first step of implementing a standard resonator including first and second resonators formed of a dielectric material; and two or more of the two resonators produced by coupling the first and second resonators together. A second step of measuring resonance peaks at different frequencies, a third step of mounting a sample resonator including the dielectric sample between the pair of conductors, and a surface resistance obtained in the second step are used. And a fourth step of obtaining the complex permittivity of the dielectric sample.