JP3469095B2 - Ultrasonic probe manufacturing method - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a field of use of a method for manufacturing an ultrasonic probe, and more particularly, to a method of manufacturing a piezoelectric element arranged in a width direction in a length direction. Also, the present invention relates to a method of manufacturing an array type ultrasonic probe (referred to as an array type probe) by so-called short axis division. (Background of the Invention) An array-type probe is configured by arranging piezoelectric elements in a width direction and driving a long axis direction by electronic scanning such as linear and sector, and as a medical ultrasonic wave transmitting / receiving section. Be useful. In recent years, the length direction of the piezoelectric element has been divided,
The so-called 1.5D (Dimention) array type that changes the length in the short axis direction (length of the piezoelectric element), controls the depth of focus from the surface of the subject (living body), and enables efficient diagnosis A probe (referred to as a 1.5D probe) is receiving attention (see:
(Example of the prior art) FIG. 5 and FIG.
It is a figure of a 1.5D probe explaining one conventional example of this kind. FIG. 5 is a plan view of the 1.5D probe, and FIG. 6 is a side sectional view. The 1.5D probe includes, for example, piezoelectric elements 1 including three piezoelectric elements 1 (abc) arranged in the longitudinal direction. Usually, the piezoelectric element 1 is fixed on the backing material 2 and the acoustic matching layer 3 is formed on the front surface. And
The back side 5b of the electrode 5 (ab) of each piezoelectric element 1 (abc) is led out by the flexible substrate 4 (abc). The backing material 2 attenuates the ultrasonic waves from the back side of the piezoelectric element 1, and the acoustic matching layer 3 increases the transmission and reception efficiency of the ultrasonic waves. In such a device, for example, as shown in FIG. 7, three independent flexible substrates 7 are provided on a piezoelectric plate 6.
(Abc) is connected to both ends and the center (to be a flexible integrated piezoelectric plate 8). Each flexible substrate 7 (abc) has a plurality of signal lines 9 formed in parallel, and a common line portion 10 is exposed at one end. Then, the common line section 10 is connected to the piezoelectric plate 6. Next, the flexible integrated piezoelectric plate 8 is fixed on the backing material 2. The backing material 2 has a through hole 1 in the center.
One. Then, the flexible substrates 7 (bc) at both ends of the flexible integrated piezoelectric plate 8 extend to both sides of the backing material, and the central flexible substrate 7 a is inserted into the through hole 11 and extended. Next, the plurality of signal lines 9 are cut from above the piezoelectric plate, and the piezoelectric elements 1 are arranged in the longitudinal direction. It should be noted that a break reaching the backing material 2 is provided so that the common line portion 10 is formed.
Also cut. Then, each piezoelectric element 1 is divided into the piezoelectric elements 1 (abc) by cutting between the flexible substrates 7 (abc) in the short axis direction. This allows
Each piezoelectric element 1 (abc) electrode 4b is led out to the outside by the signal line 9 of the flexible substrate 7 (abc). In such a device, since the piezoelectric element 1 is divided into three in the short axis direction, for example, when only the central piezoelectric element 1a is driven, the depth of focus can be reduced to diagnose the vicinity of the surface of the living body. In addition, if the piezoelectric elements 1 (abc) on the center and both sides are electrically connected in common and driven, the depth of focus can be increased to diagnose a deep part of a living body. [0007] (Problems of the prior art)
However, in the 1.5D probe having the above-described configuration, a plurality of independent flexible substrates 7 (abc) are formed by connecting to the piezoelectric plate 6, so that each flexible substrate 7 (abc)
It has been difficult to accurately align the mutual signal lines between them. Even when the electrodes are led out from both ends of the piezoelectric plate 6 by a flexible substrate (not shown) having a window at the center, an independent flexible substrate must be connected to the center, so that the alignment is similarly difficult. Met. When there is a positional deviation, there is a problem that, for example, the signal line is extremely cut and disconnected to make a defective product. The object of the present invention is to provide an array-type probe with improved short axis division which improves the workability by improving the positional accuracy between signal lines between a plurality of independent flexible substrates and improves reliability. The purpose is to provide. According to the present invention, there are provided a plurality of independent flexible substrates on which a plurality of signal lines each having an exposed portion at one end are formed, and a connecting portion for connecting both ends of the independent flexible substrate. The basic solution is to form an integrated flexible substrate comprising a slit existing between the plurality of independent flexible substrates and a plurality of signal lines of the plurality of independent substrates aligned in a straight line. And Hereinafter, an embodiment of the present invention will be described. FIG. 1 is a diagram of an ultrasonic probe for explaining an embodiment of the present invention. The same parts as those in the prior art are denoted by the same reference numerals, and description thereof will be simplified. As described above, the 1.5D probe is formed by arranging piezoelectric elements 1 including three piezoelectric elements 1 (abc) in the longitudinal direction (see FIG. 5). In this embodiment, the integrated flexible substrate 12 is formed by connecting the piezoelectric plate 6 to one main surface.
The integrated flexible substrate 12 is composed of three independent flexible substrates 13 (abc). And slit 1
A gap of 4 (ab) is provided, and both ends are connected by the connecting portion 15 (ab). These are integrally formed from a single flexible substrate having a laminated structure (not shown). Each flexible substrate 14 (abc) has a number of signal lines 9 and an exposed portion 9a at one end.
The signal lines 9 between the flexible substrates 14 (abc) are formed in advance so as to coincide with each other on a straight line. For example, the signal line 9 may be formed on a straight line and then divided by the slit 14, or may be formed on the straight line after the slit 14 is provided. The width of the central flexible substrate corresponds to the length of the central piezoelectric element 1a, and the slit 14 (a
The width b) corresponds to the length obtained by subtracting the electrode exposed portions 9a from the piezoelectric elements 1 (bc) on both sides. In the integrated flexible substrate 12, the electrode exposed portion 9a is joined to the electrode 5b on one main surface of the piezoelectric plate 6 by, for example, soldering. Then, as shown in FIG.
Cut off both ends (arrows AA ') of the connecting portion 15
(Ab) is excised. Next, the flexible substrate 13 (a
bc) is bent in a direction perpendicular to the main surface of the piezoelectric plate 6 from the boundary portion of the electrode exposed portion 9b. Then, as described above, the flexible integrated piezoelectric plate 8 is fixed to the backing material 2 having the through hole 11 at the center (see FIG. 7). Finally, a cut is made to reach the backing material 2 from above the piezoelectric plate 6, and the signal lines 9 are cut to divide the piezoelectric plate 6 into the piezoelectric elements 1 (FIG. 3). Then, between the flexible substrates 13 (abc) (arrow B in FIG. 2).
-B '), and each piezoelectric element 1 is
(Abc) (see FIG. 6). An acoustic matching layer, an acoustic lens, and the like (not shown) are provided on the front surface. Then, the flexible board 13 (abc) is connected to a separate flexible board or cable and stored in the housing. With such a configuration, the plurality of flexible substrates 13 (abc) are connected to the plurality of slits 14 (ab)
Is used, and the integrated flexible substrate 12 integrated by the connecting portion 15 (ab) is used.
Can be cut without the need for alignment, thereby improving workability. And the quality can be improved without disconnection of the signal line 9. In the above embodiment, the case where the piezoelectric element 1 is divided into three to obtain three piezoelectric elements 1 (abc) has been described. However, the same can be applied to the case where the piezoelectric element 1 is divided into four or more.
For example, when dividing into five piezoelectric elements,
As shown in the drawing, a cut 16 (ab) is provided between the flexible substrates 13 (abc) on the central side excluding both end sides to match the width of the central piezoelectric element, and between the flexible substrates 13 (bd) on both sides and The slit 14 (ab) described above may be provided between 13 (ce). The dashed line in the figure is the piezoelectric plate 6. Arrows AA ′ are cut portions of the piezoelectric plate 6, and arrows BB ′ are cutting lines of the piezoelectric plate 6 in the short axis direction. The backing material 2 is in the long axis direction as described above.
Is provided, and the signal line 9 is cut off. Although the flexible integrated piezoelectric plate 8 is fixed to the backing material 2 having a through hole 11 in the center, for example, each flexible substrate 13 (abc) is perpendicular to the piezoelectric plate 6 and is mounted on a mold. It may be formed by holding and solidifying by pouring a resin or the like. The length of the flexible substrates 13 (bc) on both sides can be increased, but the central flexible substrate 13a has a restriction that the length of the piezoelectric element 1a is maximized. Therefore, in this case, another flexible substrate or the like may be connected and extended. Further, one end of the flexible substrate 13 (abc) is exposed to form an electrode exposed portion 9a, which is formed as a common line portion as shown in the conventional example and cut simultaneously when the piezoelectric plate 6 is cut. Is also good. Although the short axis direction is divided after cutting the long axis direction, the long axis direction may be divided after cutting the short axis direction. Further, although the invention has been described as a 1.5D probe, the present invention basically relates to a method for leading out electrodes of piezoelectric plate elements arranged two-dimensionally, and a so-called two-dimensionally scanned matrix probe. Also applicable to As described above, the present invention can be modified in various ways. In short, when the piezoelectric plate element is divided in the short axis direction, a plurality of flexible substrates that are integrally formed are within the technical scope of the present invention. Basically belong. According to the present invention, there are provided a plurality of independent flexible substrates on which a plurality of signal lines each having an exposed portion at one end are formed;
An integrated flexible substrate comprising a connecting portion connecting both ends of the independent flexible substrate, and a slit existing between the plurality of independent flexible substrates, wherein a large number of signal lines of the plurality of independent substrates are aligned in a straight line; Since it is formed by using, the position accuracy between the signal lines between the flexible substrates is improved to improve the workability, and it is possible to provide an array type probe by short axis division including a matrix probe which is highly reliable. .

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view illustrating a manufacturing process of a 1.5D probe for explaining one embodiment of the present invention. FIG. 2 is a plan view illustrating a manufacturing process of a 1.5D probe for explaining one embodiment of the present invention. FIG. 3 is a partially broken front view of a manufacturing process of a 1.5D probe for explaining one embodiment of the present invention. FIG. 4 is a diagram of an integrated flexible substrate illustrating another embodiment of the present invention. FIG. 5 is a schematic plan view of a 1.5D probe explaining a conventional example. FIG. 6 is a side sectional view of a 1.5D probe explaining a conventional example. FIG. 7 is an exploded perspective view illustrating a conventional example in a manufacturing process of a 1.5D probe. [Description of Signs] 1 piezoelectric element, 2 backing material, 3 acoustic matching layer,
4, 7, 13 flexible substrate, 5 electrodes, 6 piezoelectric plate, 8 flexible integrated piezoelectric plate, 9 signal line, 10 common line portion, 11 through hole, 12 integrated flexible substrate,
14 slits, 15 joints, 16 cuts

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) A61B 8/00 H04R 17/00

Claims (1)

(57) Claims: 1. A flexible board having a large number of signal lines is connected to a piezoelectric plate having electrodes formed on both main surfaces, and the piezoelectric board is connected between the signal lines and between the flexible boards. Cutting from the plate and dividing the piezoelectric plate into a number of piezoelectric elements,
In the method of manufacturing an ultrasonic probe in which the piezoelectric elements are arranged two-dimensionally, three or more independent flexible substrates formed with a large number of signal lines having an electrode exposed portion at one end; An integrated flexible substrate comprising a connecting portion for connecting both ends of the flexible substrate and a slit existing between the plurality of flexible substrates, wherein a number of signal lines of the plurality of flexible substrates are aligned in a straight line. the after connecting the electrode exposed portion of the integrated flexible substrate on one principal surface of the piezoelectric plate, the manufacturing method of an ultrasonic probe formed by dividing the inter and between the flexible substrate signal lines of the flexible substrate .