JP3457353B2 - Magnetic bearing device - Google Patents
Magnetic bearing deviceInfo
- Publication number
- JP3457353B2 JP3457353B2 JP12291493A JP12291493A JP3457353B2 JP 3457353 B2 JP3457353 B2 JP 3457353B2 JP 12291493 A JP12291493 A JP 12291493A JP 12291493 A JP12291493 A JP 12291493A JP 3457353 B2 JP3457353 B2 JP 3457353B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- amount
- detected
- abnormality
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ターボ分子ポンプ等に
用いられる磁気軸受装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic bearing device used in a turbo molecular pump or the like.
【０００２】[0002]
【従来の技術】近年、半導体の製造等の高度のクリーン
環境が要求される場所で使用されるターボ分子ポンプ等
では、ロータを電磁石の磁力によって浮上させ、これを
非接触で保持する磁気軸受装置が用いられている。2. Description of the Related Art In recent years, in a turbo molecular pump or the like used in a place where a highly clean environment such as semiconductor manufacturing is required, a magnetic bearing device in which a rotor is levitated by a magnetic force of an electromagnet and is held in a non-contact manner Is used.
【０００３】図５は、磁気軸受を使用したターボ分子ポ
ンプの構成を表したものである。この磁気軸受式ターボ
分子ポンプでは、ロータ１５が半径方向電磁石２０、２
４と軸方向電磁石３２、３４とによって磁気浮上され
る。ロータ１５の位置を検知する半径方向センサ２２、
２６、軸方向センサ３６の出力に基づいて制御系４０が
各電磁石の励磁電流を制御し、ロータ１５を所定位置に
浮上保持する。FIG. 5 shows a structure of a turbo molecular pump using a magnetic bearing. In this magnetic bearing type turbo-molecular pump, the rotor 15 has the radial electromagnets 20, 2
4 and the axial electromagnets 32 and 34 are magnetically levitated. A radial sensor 22 for detecting the position of the rotor 15,
26, the control system 40 controls the exciting current of each electromagnet on the basis of the output of the axial sensor 36, and floats and holds the rotor 15 at a predetermined position.
【０００４】磁気浮上されたロータ１５は、高周波モー
タ３０によって非接触で高速回転される。このロータ１
５には、ロータ翼１４がボルト１９によって一体的に取
り付けられ、このロータ翼１４は外装体１０に固定され
た複数のステータ翼１２と交互に位置するようになって
いる。ポンプとしての吸気、圧縮作用は、このロータ翼
１４が複数のステータ翼１２の間を高速で回転すること
により行われる。The magnetically levitated rotor 15 is rotated by a high frequency motor 30 at high speed in a non-contact manner. This rotor 1
5, rotor blades 14 are integrally attached by bolts 19, and the rotor blades 14 are alternately arranged with a plurality of stator blades 12 fixed to the outer casing 10. The intake and compression actions of the pump are performed by the rotor blades 14 rotating at high speed between the plurality of stator blades 12.
【０００５】排気すべき気体は、フランジ１１が例え
ば、半導体製造装置のチャンバ側に接続されることによ
り、図において矢印で示すように流通する。この図から
理解されるように、ロータ翼１４は、気体と直接接触す
ることになる。従って、ＳｉＨ4 やＰＨ3 等のプロセス
ガスを排気する場合、ガスの温度低下等により、プロセ
スガスが固化してロータ翼１４に堆積物として付着する
ことがある。The gas to be exhausted flows as indicated by an arrow in the figure by connecting the flange 11 to the chamber side of the semiconductor manufacturing apparatus, for example. As can be seen from this figure, the rotor blades 14 will be in direct contact with the gas. Therefore, when the process gas such as SiH 4 or PH 3 is exhausted, the process gas may be solidified and adhere to the rotor blades 14 as a deposit due to the temperature decrease of the gas.
【０００６】このため、プロセスガスを比較的大量に使
用する装置に磁気軸受式ターボ分子ポンプを長期間使用
する場合には、適宜、ポンプのオーバホールを行い、分
解洗浄して生成物を除去するようにしている。Therefore, when the magnetic bearing type turbo-molecular pump is used for a long period of time in an apparatus that uses a relatively large amount of process gas, the pump is appropriately overhauled and the product is removed by disassembly cleaning. I am trying.
【０００７】[0007]
【発明が解決しようとする課題】ところが、従来は、ポ
ンプ内にどの程度、生成物が堆積しているかを検出して
いなかった。このため、オーバーホールが遅れたり、堆
積物が急速に付着した場合、堆積物によりロータのアン
バランスが増大してステータ等の静止部分に接触し、正
常な回転が困難になることがあった。However, conventionally, it has not been possible to detect how much product is accumulated in the pump. Therefore, when the overhaul is delayed or the deposit is rapidly attached, the unbalance of the rotor increases due to the deposit, and the rotor may come into contact with a stationary portion such as the stator, so that normal rotation may be difficult.
【０００８】また、ロータが高速回転をしている状態で
ステータに接触すると、破片を生じる場合があり、半導
体製造工程に支障をきたす可能性があった。一方、ロー
タの異常を判断する場合、加速時は一時的にロータのふ
れ量が増大するため、この加速時におけるふれ量の増大
を異常と判断しないようにする必要がある。そこで本発
明の目的は、ポンプの生成物のロータへの堆積による不
具合を、加速時のロータのふれと区別して未然に検知
し、これを防止できるようにした磁気軸受装置を提供す
ることにある。Further, when the rotor is rotating at a high speed, if it comes into contact with the stator, fragments may be generated, which may hinder the semiconductor manufacturing process. Meanwhile, low
When determining an abnormality in the rotor, temporarily
The amount of shake increases, so the amount of shake during this acceleration increases
It is necessary not to judge that is abnormal. Therefore, an object of the present invention is to provide a magnetic bearing device capable of detecting a malfunction caused by the accumulation of products of the pump on the rotor in distinction from the runout of the rotor during acceleration , and preventing the runout. .
【０００９】[0009]
【課題を解決するための手段】請求項１記載の発明の磁
気軸受装置は、ロータを磁力によって浮上させる電磁石
と、ロータの位置を検出する位置検出手段と、この位置
検出手段で検出したロータの位置情報に基づいて電磁石
を制御してロータの浮上位置を所定位置に制御する位置
制御手段と、位置検出手段で検出したロータの位置情報
に基づいて、ロータの回転数に対応する周波数成分のロ
ータのふれ量を検出するふれ量検出手段と、前記ロータ
の加速時と定速回転中とを識別する識別手段と、前記識
別手段による識別が加速時の場合に異常を判断せず、前
記識別手段による識別が定速回転中で、前記ふれ量検出
手段によって検出されたふれ量が所定量を越えた場合に
異常と判断する異常判別手段とを備えたものである。According to another aspect of the magnetic bearing device of the present invention, an electromagnet for levitating the rotor by magnetic force, a position detecting means for detecting the position of the rotor, and a rotor for detecting the position of the rotor are provided. Position control means for controlling the electromagnet on the basis of the position information to control the levitation position of the rotor to a predetermined position, and a rotor having a frequency component corresponding to the rotational speed of the rotor based on the position information of the rotor detected by the position detection means. And a rotor for detecting the amount of runout of the rotor,
When the acceleration and the constant speed rotation and identifying means for identifying the identification
If the identification by other means is not accelerating when accelerating,
The discrimination by the discriminating means is provided with an abnormality judging means for judging an abnormality when the shake amount detected by the shake amount detecting means exceeds a predetermined amount during constant speed rotation .
【００１０】請求項２記載の発明の磁気軸受装置は、ロ
ータを磁力によって浮上させる電磁石と、ロータの位置
を検出する位置検出手段と、この位置検出手段で検出し
たロータの位置情報に基づいて電磁石を制御してロータ
の浮上位置を所定位置に制御する位置制御手段と、位置
検出手段で検出したロータの位置情報に基づいて、ロー
タの回転数に対応する周波数成分のロータのふれ量を検
出するふれ量検出手段と、前記ロータの加速時と定速回
転中とを識別する識別手段と、前記識別手段による識別
が加速時の場合に異常を判断せず、前記識別手段による
識別が定速回転中で、前記ふれ量検出手段によって検出
されたふれ量が所定時間連続して所定量を越えた場合に
異常と判断する異常判別手段とを備えたものである。According to another aspect of the magnetic bearing device of the present invention, an electromagnet for levitating the rotor by magnetic force, a position detecting means for detecting the position of the rotor, and an electromagnet based on the position information of the rotor detected by the position detecting means. Position control means for controlling the floating position of the rotor to a predetermined position by controlling the position of the rotor, and based on the position information of the rotor detected by the position detection means, the amount of runout of the rotor of the frequency component corresponding to the rotational speed of the rotor is detected. Deflection amount detection means, and during the acceleration and constant speed rotation of the rotor
Identification means for identifying that the vehicle is being transferred, and identification by the identification means
When the vehicle is accelerating, no abnormality is judged and
It is provided with an abnormality determining means for determining an abnormality when the shake is detected at a constant speed and the shake amount detected by the shake amount detecting means continuously exceeds a predetermined amount for a predetermined time.
【００１１】[0011]
【作用】請求項１記載の発明の磁気軸受装置では、位置
検出手段で検出したロータの位置情報に基づいて、ふれ
量検出手段によって、ロータの回転数に対応する周波数
成分のロータのふれ量、すなわちロータのアンバランス
に起因するロータのふれ量が検出され、識別手段によっ
てロータの加速時と定速回転中とが識別される。そし
て、異常判別手段によって、識別手段による識別が加速
時の場合に異常を判断せず、識別手段による識別が定速
回転中で、ふれ量検出手段で検出されたふれ量が所定量
を越えた場合に異常と判断される。In the magnetic bearing device according to the first aspect of the present invention, based on the position information of the rotor detected by the position detecting means, the amount of deviation of the rotor of the frequency component corresponding to the rotational speed of the rotor is detected by the amount of deviation detecting means. That is, the amount of runout of the rotor due to the imbalance of the rotor is detected, and the identification means is used.
Thus, the rotor is being accelerated and is being rotated at a constant speed. Then, the abnormality determining means accelerates the identification by the identifying means.
In case of abnormality, the abnormality is not judged, and the discrimination by the discrimination means is constant speed.
During rotation, if the shake amount detected by the shake amount detecting means exceeds a predetermined amount, it is determined to be abnormal.
【００１２】請求項２記載の発明の磁気軸受装置では、
請求項１記載の発明と同様にして検出されたふれ量が所
定時間連続して所定量を越えた場合に、異常判別手段に
よって異常と判断される。According to another aspect of the magnetic bearing device of the present invention,
When the shake amount detected in the same manner as in the first aspect of the invention exceeds the predetermined amount continuously for a predetermined time, it is judged as abnormal by the abnormality judging means.
【００１３】[0013]
【実施例】以下、本発明の磁気軸受装置における好適な
実施例を図１ないし図４を参照して詳細に説明する。図
１は本実施例における磁気軸受装置を用いたターボ分子
ポンプの駆動部の回路構成を示すブロック図である。こ
のターボ分子ポンプは、図５に示した構成をしており、
例えば半導体製造装置内に設置されてチャンバ等からの
プロセスガスの排出を行うものである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the magnetic bearing device of the present invention will be described in detail below with reference to FIGS. FIG. 1 is a block diagram showing a circuit configuration of a drive unit of a turbo molecular pump using the magnetic bearing device according to the present embodiment. This turbo molecular pump has the configuration shown in FIG.
For example, it is installed in a semiconductor manufacturing apparatus and discharges process gas from a chamber or the like.
【００１４】この図に示すように、磁気軸受装置の駆動
部は、制御系４０および、モータ３０、電磁石２０、２
４（以下、符号２０で代表する。）、位置センサ２２、
２６（以下、符号２２で代表する。）から構成されてい
る。磁気軸受装置の制御系４０は、位置センサ２２の出
力である変位信号６０に基づいて、比例動作、積分動作
および微分動作等の演算処理を行う補償回路４７と、こ
の補償回路４７の出力信号を増幅して電磁石２０に供給
するアンプ４８とを備えている。As shown in this figure, the drive unit of the magnetic bearing device comprises a control system 40, a motor 30, electromagnets 20, 2
4 (hereinafter represented by reference numeral 20), a position sensor 22,
26 (hereinafter represented by reference numeral 22). The control system 40 of the magnetic bearing device outputs a compensation circuit 47 that performs arithmetic processing such as proportional operation, integral operation, and differential operation based on the displacement signal 60 output from the position sensor 22, and an output signal of this compensation circuit 47. An amplifier 48 that amplifies and supplies the electromagnet 20 is provided.
【００１５】磁気軸受装置の制御系４０は、さらに、位
置センサ２２からの変位信号６０から、ロータの回転数
に対応する周波数成分であるふれ成分信号６１を抽出す
るバンドパスフィルタ５１と、このバンドパスフィルタ
５１からのふれ成分信号６１を整流、平滑して、ふれ成
分信号６１のピーク値（以下、検出ふれ量という。）６
２を検出する整流平滑回路５２と、基準ふれ量６３を設
定する基準ふれ量設定回路５３と、整流平滑回路５２の
出力である検出ふれ量６２と基準ふれ量設定回路５３で
設定された基準ふれ量６３とを比較し、検出ふれ量６２
が基準ふれ量６３を越えている場合には“１”、他の場
合には“０”を出力するコンパレータ５４と、加速時は
“０”、定常回転中は“１”となるノーマル信号６５を
出力するノーマル信号発生回路５５と、コンパレータ５
４の出力とノーマル信号発生回路５５の出力との論理積
をとるアンドゲート５６と、このアンドゲート５６の出
力が所定時間連続して“１”となった場合に停止指令信
号６７およびアラーム出力指令信号６８を出力する異常
検出回路５７と、この異常検出回路５７からの停止指令
信号６８に応じてアラーム表示を出すアラーム出力回路
５８とを備えている。なお、異常検出回路５７からの停
止指令信号６７はインバータ４２に入力されるようにな
っている。The control system 40 of the magnetic bearing device further includes a bandpass filter 51 for extracting a runout component signal 61, which is a frequency component corresponding to the rotational speed of the rotor, from the displacement signal 60 from the position sensor 22, and this band. The shake component signal 61 from the pass filter 51 is rectified and smoothed, and the peak value of the shake component signal 61 (hereinafter referred to as the detected shake amount) 6
The rectifying / smoothing circuit 52 for detecting 2 and the reference shake amount setting circuit 53 for setting the reference shake amount 63, the detected shake amount 62 output from the rectifying / smoothing circuit 52 and the reference shake amount set by the reference shake amount setting circuit 53. Compared with the amount 63, the detected shake amount 62
Is greater than the reference deflection amount 63, it outputs “1” otherwise, “0” is output, and a normal signal 65 is “0” during acceleration and “1” during steady rotation. A normal signal generating circuit 55 for outputting
4 and the output of the normal signal generation circuit 55, and an AND gate 56, and a stop command signal 67 and an alarm output command when the output of the AND gate 56 continuously becomes "1" for a predetermined time. An abnormality detection circuit 57 that outputs a signal 68 and an alarm output circuit 58 that outputs an alarm display in response to the stop command signal 68 from the abnormality detection circuit 57 are provided. The stop command signal 67 from the abnormality detection circuit 57 is input to the inverter 42.
【００１６】基準ふれ量設定回路５３は、例えば可変抵
抗器によって基準ふれ量として任意の電圧値を設定する
ものである。基準ふれ量とは、ポンプが不具合を生じな
い程度のふれ量であるが、ポンプのオーバホールを行う
のが望ましいようなふれ量であり、任意に設定すること
ができる。The reference deflection amount setting circuit 53 is for setting an arbitrary voltage value as the reference deflection amount by, for example, a variable resistor. The reference run-out amount is a run-out amount that does not cause a problem in the pump, but is a run-out amount at which it is desirable to overhaul the pump, and can be set arbitrarily.
【００１７】ノーマル信号発生回路５５は、加速時は一
時的にロータのふれ量が増大するため、この加速時にお
けるふれ量の増大を異常と判断しないようにするための
ものであり、例えば制御部４４からの情報に基づいて加
速時と定速回転中とを識別する。The normal signal generation circuit 55 is for preventing the increase in the amount of shake of the rotor during acceleration from being abnormal because the amount of shake of the rotor temporarily increases during acceleration. Based on the information from 44, the time of acceleration and the time of constant speed rotation are identified.
【００１８】異常検出回路５７は、検出ふれ量６２が基
準ふれ量６３を越えている時間が例えば１時間のような
比較的長い所定時間だけ続いた場合にのみ異常を検出
し、地震等による一時的な外乱を異常として検出しない
ようにするためのものである。この異常検出回路５７
は、例えば、図２に示すようにアンドゲート５６の出力
の否定をとるインバータ４１と、所定時間を計時すると
共にインバータ４１の出力をクリア入力とするタイマ４
２とで構成され、このタイマ４２の出力が停止指令信号
６７およびアラーム出力指令信号６８となるようになっ
ている。The anomaly detection circuit 57 detects an anomaly only when the time period during which the detected shake amount 62 exceeds the reference shake amount 63 continues for a relatively long predetermined time such as one hour, and is temporarily stopped by an earthquake or the like. This is to prevent a normal disturbance from being detected as an abnormality. This abnormality detection circuit 57
Is, for example, an inverter 41 that negates the output of the AND gate 56 as shown in FIG. 2, and a timer 4 that counts a predetermined time and uses the output of the inverter 41 as a clear input.
2 and the output of the timer 42 serves as a stop command signal 67 and an alarm output command signal 68.
【００１９】また、バンドパスフィルタ５１の代わり
に、図３に示すように、位置センサ２２からの変位信号
６０を入力し、図示しない回転数センサからのロータ１
５の回転に応じた回転パルス４４に同期してふれ成分信
号６１を抽出するふれ成分抽出回路４３を設けても良
い。このふれ成分抽出回路４３は、例えば同期検波回路
で構成することができる。Further, instead of the band-pass filter 51, as shown in FIG. 3, the displacement signal 60 from the position sensor 22 is input, and the rotor 1 from the rotation speed sensor (not shown) is input.
A shake component extraction circuit 43 that extracts the shake component signal 61 in synchronization with the rotation pulse 44 corresponding to the rotation of 5 may be provided. The shake component extraction circuit 43 can be composed of, for example, a synchronous detection circuit.
【００２０】次に本実施例の動作について説明する。ま
ず、ターボ分子ポンプの出荷検査後、ポンプを停止させ
る場合のふれの大きさである基準ふれ量を基準ふれ量設
定回路５３によって設定する。ロータ１５は、位置セン
サ２２、補償回路４７、アンプ４８および電磁石２０の
フィードバックループにより、所定の位置に磁気浮上さ
れ、また、インバータ４２による制御の下でモータ３０
によって回転される。Next, the operation of this embodiment will be described. First, after the shipping inspection of the turbo-molecular pump, the reference amount of shake, which is the size of the shake when the pump is stopped, is set by the reference amount of shake setting circuit 53. The rotor 15 is magnetically levitated at a predetermined position by the feedback loop of the position sensor 22, the compensation circuit 47, the amplifier 48, and the electromagnet 20, and the motor 30 is controlled under the control of the inverter 42.
Is rotated by.
【００２１】加速時は、ノーマル信号発生回路５５から
のノーマル信号６５が“０”であるため、アンドゲート
５６の出力が“０”となって、異常検出回路５７からは
停止指令信号６７およびアラーム出力指令信号６８は出
力されない。定常回転時は、ノーマル信号発生回路５５
からのノーマル信号６５が“１”となり、アンドゲート
５６に入力される。また、位置センサ２２からの変位信
号６０はバンドパスフィルタ５１に入力され、ロータの
回転数に対応する周波数成分であるふれ成分信号６１が
抽出され、このふれ成分信号６１を整流平滑回路５２に
よって整流、平滑して検出ふれ量６２が得られる。この
検出ふれ量６２は、コンパレータ５４によって基準ふれ
量６３と比較される。ここで、生成物がロータ１５に堆
積していないか、あるいは堆積量が少ない場合は、ロー
タ１５のアンバランスが少なく、検出ふれ量６２は基準
ふれ量６３よりも小さい。従って、コンパレータ５４の
出力が“０”となり、アンドゲート５６の出力も“０”
となって、異常検出回路５７からは停止指令信号６７お
よびアラーム出力指令信号６８は出力されない。At the time of acceleration, since the normal signal 65 from the normal signal generation circuit 55 is "0", the output of the AND gate 56 becomes "0", and the abnormality detection circuit 57 outputs the stop command signal 67 and the alarm. The output command signal 68 is not output. During steady rotation, the normal signal generation circuit 55
The normal signal 65 from 1 becomes "1" and is input to the AND gate 56. Further, the displacement signal 60 from the position sensor 22 is input to the bandpass filter 51, and a runout component signal 61 which is a frequency component corresponding to the rotation speed of the rotor is extracted. The runout component signal 61 is rectified by the rectification smoothing circuit 52. , And the detected shake amount 62 is obtained. The detected shake amount 62 is compared with the reference shake amount 63 by the comparator 54. Here, when the product is not deposited on the rotor 15 or the deposition amount is small, the unbalance of the rotor 15 is small and the detected shake amount 62 is smaller than the reference shake amount 63. Therefore, the output of the comparator 54 becomes "0" and the output of the AND gate 56 also becomes "0".
Therefore, the stop command signal 67 and the alarm output command signal 68 are not output from the abnormality detection circuit 57.
【００２２】一方、定常回転時において、ポンプの生成
物がロータ１５に堆積してくると、一様に堆積されるわ
けではないので、ロータ１５のアンバランスが増大して
くる。すると、検出ふれ量６２が基準ふれ量６３を越
え、コンパレータ５４の出力が“１”となり、アンドゲ
ート５６の出力が“１”となる。異常検出回路５７は、
アンドゲート５６の出力が所定時間連続して“１”とな
った場合に停止指令信号６７およびアラーム出力指令信
号６８を出力する。停止指令信号６７に応じて、インバ
ータ４２はモータ３０の回転を停止し、ポンプを停止す
る。また、アラーム出力指令信号６８に応じて、アラー
ム出力回路５８はアラーム表示を出し、エンドユーザに
ポンプのオーバホールを促す。On the other hand, when the product of the pump is deposited on the rotor 15 during steady rotation, it is not uniformly deposited, and the imbalance of the rotor 15 increases. Then, the detected shake amount 62 exceeds the reference shake amount 63, the output of the comparator 54 becomes "1", and the output of the AND gate 56 becomes "1". The abnormality detection circuit 57
When the output of the AND gate 56 becomes "1" continuously for a predetermined time, the stop command signal 67 and the alarm output command signal 68 are output. In response to the stop command signal 67, the inverter 42 stops the rotation of the motor 30 and stops the pump. Further, in response to the alarm output command signal 68, the alarm output circuit 58 outputs an alarm display to prompt the end user to overhaul the pump.
【００２３】以上説明したように本実施例によれば、ロ
ータ１５の回転数に対応する周波数成分のふれ量を検出
し、このふれ量が所定時間連続して所定量よりも大きく
なった場合に、ポンプを停止し、またアラーム表示を出
すようにしたので、ポンプの生成物のロータへの堆積に
よるポンプの不具合を未然に検知し、これを防止するこ
とができる。As described above, according to this embodiment, the amount of vibration of the frequency component corresponding to the rotation speed of the rotor 15 is detected, and when the amount of vibration becomes larger than the predetermined amount continuously for a predetermined time. Since the pump is stopped and the alarm is displayed, it is possible to detect the problem of the pump due to the accumulation of the product of the pump on the rotor and prevent it.
【００２４】また、ロータ１５のふれ量が所定時間連続
して所定量よりも大きい場合にのみ異常と判断するよう
にしたので、地震等による一時的な外乱と区別して、ポ
ンプの生成物のロータへの堆積によるロータのアンバラ
ンスの増大に起因する異常を検出することができる。Further, since it is determined that the rotor 15 is abnormal only when the runout amount of the rotor 15 is continuously larger than the predetermined amount for a predetermined period of time, the rotor produced by the pump is distinguished from a temporary disturbance such as an earthquake. It is possible to detect an abnormality caused by an increase in the unbalance of the rotor due to the accumulation on the surface.
【００２５】なお、図１における基準ふれ量設定回路５
３、コンパレータ５４、アンドゲート５６および異常検
出回路５７の機能を、例えばマイクロコンピュータによ
ってソフトウェア的に実現しても良い。この場合の動作
の一例を、図４に示す。この動作では、まず、ロータ１
５が定常回転になるまで待ち（ステップ１０１）、定常
回転になったら（ステップ１０１；Ｙ）、整流平滑回路
５２からの検出ふれ量６２をディジタル信号に変換して
マイクロコンピュータに入力する（ステップ１０２）。
次に、ソフトウェア上で、検出ふれ量が基準ふれ量を越
えているか否かを判断する（ステップ１０３）。検出ふ
れ量が基準ふれ量を越えていない場合（ステップ１０
３；Ｎ）は、異常時間をクリアして（ステップ１０
４）、ステップ１０２へ戻る。一方、検出ふれ量が基準
ふれ量を越えている場合（ステップ１０３；Ｙ）は、異
常時間を積算する（ステップ１０５）。なお、異常時間
とは、最初に検出ふれ量が基準ふれ量を越えてから積算
を開始する時間である。次に、異常時間が設定時間以上
か否かを判断する（ステップ１０６）。異常時間が設定
時間以上ではない場合（ステップ１０６；Ｎ）はステッ
プ１０２へ戻り、異常時間が設定時間以上の場合（ステ
ップ１０６；Ｙ）は、停止指令信号６７とアラーム出力
指令信号６８を出力して、アラーム表示を出すと共に、
ポンプを停止し（ステップ１０７）、終了する。The reference shake amount setting circuit 5 in FIG.
The functions of 3, the comparator 54, the AND gate 56, and the abnormality detection circuit 57 may be realized by software, for example, by a microcomputer. An example of the operation in this case is shown in FIG. In this operation, first, the rotor 1
Wait until 5 becomes steady rotation (step 101). When steady rotation is reached (step 101; Y), the detected shake amount 62 from the rectifying / smoothing circuit 52 is converted into a digital signal and input to the microcomputer (step 102). ).
Next, it is determined on the software whether or not the detected shake amount exceeds the reference shake amount (step 103). When the detected shake amount does not exceed the reference shake amount (step 10)
3; N) clears the abnormal time (step 10
4) and returns to step 102. On the other hand, when the detected shake amount exceeds the reference shake amount (step 103; Y), the abnormal time is integrated (step 105). The abnormal time is the time when the detected shake amount first exceeds the reference shake amount and then the integration is started. Next, it is determined whether the abnormal time is equal to or longer than the set time (step 106). If the abnormal time is not longer than the set time (step 106; N), the process returns to step 102. If the abnormal time is longer than the set time (step 106; Y), the stop command signal 67 and the alarm output command signal 68 are output. And give an alarm display,
The pump is stopped (step 107) and the process ends.
【００２６】なお、本発明は上記実施例に限定されず、
例えばロータ１５のふれ量が所定時間連続して所定量よ
りも大きくなった場合に、ポンプを停止することなくア
ラーム表示のみを出すようにしても良い。The present invention is not limited to the above embodiment,
For example, when the runout amount of the rotor 15 continuously becomes larger than the predetermined amount for a predetermined time, only the alarm display may be displayed without stopping the pump.
【００２７】[0027]
【発明の効果】以上説明したように請求項１記載の発明
によれば、ロータの回転数に対応する周波数成分のロー
タのふれ量を検出し、ロータの加速時に異常を判断せ
ず、定速回転中でふれ量が所定量を越えた場合に異常と
判断するようにしたので、加速時のロータのふれと区別
して、ポンプの生成物のロータへの堆積による不具合を
未然に検知し、これを防止することができるという効果
がある。As described above, according to the first aspect of the invention, the amount of vibration of the rotor of the frequency component corresponding to the number of rotations of the rotor is detected, and the abnormality is judged when the rotor is accelerated.
Instead, when the amount of runout exceeds a predetermined amount during constant speed rotation, it is judged as an abnormality, so it is distinguished from the runout of the rotor during acceleration.
Then, there is an effect that a defect due to the accumulation of the product of the pump on the rotor can be detected in advance and prevented.
【００２８】また、請求項２記載の発明によれば、ロー
タの加速時に異常を判断せず、定速回転中でふれ量が所
定時間連続して所定量を越えた場合に異常と判断するよ
うにしたので、加速時のロータのふれや一時的な外乱と
区別して、ポンプの生成物のロータへの堆積によるアン
バランスに起因した異常を未然に検知し、これを防止す
ることができるという効果がある。According to the second aspect of the present invention, the abnormality is not judged during the acceleration of the rotor, and the abnormality is judged when the deviation amount exceeds the predetermined amount continuously for a predetermined time during the constant speed rotation. Therefore, by distinguishing from the runout of the rotor during acceleration and temporary disturbance, an abnormality due to the imbalance due to the accumulation of pump products on the rotor can be detected and prevented . <br /> The effect is that you can.
【図１】本発明の一実施例における磁気軸受装置を使用
したターボ分子ポンプの駆動部の回路構成を示すブロッ
ク図である。FIG. 1 is a block diagram showing a circuit configuration of a drive unit of a turbo molecular pump using a magnetic bearing device according to an embodiment of the present invention.
【図２】図１における異常検出回路の構成を示すブロッ
ク図である。FIG. 2 is a block diagram showing a configuration of an abnormality detection circuit in FIG.
【図３】図１におけるバンドパスフィルタの代わりに用
いられるふれ成分抽出回路を示すブロック図である。3 is a block diagram showing a shake component extraction circuit used in place of the bandpass filter in FIG.
【図４】本発明の一実施例の動作を示すフローチャート
である。FIG. 4 is a flowchart showing the operation of the embodiment of the present invention.
【図５】磁気軸受装置を使用したターボ分子ポンプの構
成を表す側断面図である。FIG. 5 is a side sectional view showing a configuration of a turbo molecular pump using a magnetic bearing device.
１５ ロータ ４２ インバータ ３０ モータ ４４ 制御部 ２０ 電磁石 ２２ 位置センサ ５１ バンドパスフィルタ ５２ 整流平滑回路 ５３ 基準ふれ量設定回路 ５４ コンパレータ ５７ 異常検出回路 ５８ アラーム出力回路 15 rotor 42 inverter 30 motor 44 Control unit 20 electromagnets 22 Position sensor 51 bandpass filter 52 Rectifying and smoothing circuit 53 Reference deflection amount setting circuit 54 comparator 57 Abnormality detection circuit 58 Alarm output circuit
Claims (2)
と、 ロータの位置を検出する位置検出手段と、 この位置検出手段で検出したロータの位置情報に基づい
て前記電磁石を制御してロータの浮上位置を所定位置に
制御する位置制御手段と、 前記位置検出手段で検出したロータの位置情報に基づい
て、ロータの回転数に対応する周波数成分のロータのふ
れ量を検出するふれ量検出手段と、前記ロータの加速時と定速回転中とを識別する識別手段
と、前記識別手段による識別が加速時の場合に異常を判断せ
ず、前記識別手段による識別が定速回転中で、前記 ふれ
量検出手段によって検出されたふれ量が所定量を越えた
場合に異常と判断する異常判別手段とを具備することを
特徴とする磁気軸受装置。1. An electromagnet for levitating the rotor by magnetic force, position detecting means for detecting the position of the rotor, and controlling the electromagnet on the basis of the position information of the rotor detected by the position detecting means to control the floating position of the rotor. Position control means for controlling to a predetermined position; based on the position information of the rotor detected by the position detection means, a deflection amount detection means for detecting the deflection amount of the rotor of the frequency component corresponding to the rotation speed of the rotor; Means for discriminating between acceleration during constant speed rotation and constant speed rotation, and to judge an abnormality when the discrimination by the discrimination means is during acceleration.
Firstly, the magnetic disc is provided with an abnormality determining means for determining an abnormality when the shake amount detected by the shake amount detecting means exceeds a predetermined amount while the distinguishing means is rotating at a constant speed. Bearing device.
と、 ロータの位置を検出する位置検出手段と、 この位置検出手段で検出したロータの位置情報に基づい
て前記電磁石を制御してロータの浮上位置を所定位置に
制御する位置制御手段と、 前記位置検出手段で検出したロータの位置情報に基づい
て、ロータの回転数に対応する周波数成分のロータのふ
れ量を検出するふれ量検出手段と、前記ロータの加速時と定速回転中とを識別する識別手段
と、前記識別手段による識別が加速時の場合に異常を判断せ
ず、前記識別手段による識別が定速回転中で、前記 ふれ
量検出手段によって検出されたふれ量が所定時間連続し
て所定量を越えた場合に異常と判断する異常判別手段と
を具備することを特徴とする磁気軸受装置。2. An electromagnet for levitating the rotor by magnetic force, position detecting means for detecting the position of the rotor, and controlling the electromagnet based on the position information of the rotor detected by the position detecting means to control the floating position of the rotor. Position control means for controlling to a predetermined position; based on the position information of the rotor detected by the position detection means, a deflection amount detection means for detecting the deflection amount of the rotor of the frequency component corresponding to the rotation speed of the rotor; Means for discriminating between acceleration during constant speed rotation and constant speed rotation, and to judge an abnormality when the discrimination by the discrimination means is during acceleration.
Firstly, the discrimination by the discrimination means is provided with an abnormality judging means for judging an abnormality when the shake amount detected by the shake amount detecting means exceeds a predetermined amount continuously for a predetermined time during the constant speed rotation. Magnetic bearing device characterized by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12291493A JP3457353B2 (en) | 1993-05-25 | 1993-05-25 | Magnetic bearing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12291493A JP3457353B2 (en) | 1993-05-25 | 1993-05-25 | Magnetic bearing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06330885A JPH06330885A (en) | 1994-11-29 |
| JP3457353B2 true JP3457353B2 (en) | 2003-10-14 |
Family
ID=14847735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12291493A Expired - Lifetime JP3457353B2 (en) | 1993-05-25 | 1993-05-25 | Magnetic bearing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3457353B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170085039A (en) | 2014-11-12 | 2017-07-21 | 에드워즈 가부시키가이샤 | Vacuum pump and method for estimating cause of anomaly in such vacuum pump |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4096113B2 (en) * | 1998-04-03 | 2008-06-04 | 株式会社ジェイテクト | Control type magnetic bearing device |
| JP2003097554A (en) * | 2001-09-25 | 2003-04-03 | Ebara Corp | Magnetic bearing control device |
| DE102006034478A1 (en) * | 2006-07-26 | 2008-01-31 | Oerlikon Leybold Vacuum Gmbh | Method for determining a statement about a state of a turbomolecular pump and a turbomolecular pump |
| EP1895180A2 (en) | 2006-08-30 | 2008-03-05 | Ebara Corporation | Magnetic bearing device, rotating system therewith and method of identification of the model of the main unit in a rotating system |
| JP5719592B2 (en) * | 2008-07-14 | 2015-05-20 | エドワーズ株式会社 | Vacuum pump |
| US7925361B2 (en) * | 2008-09-10 | 2011-04-12 | Siemens Medical Solutions Usa, Inc. | Fault detection for a resistive position sensor |
| KR101117299B1 (en) * | 2011-07-06 | 2012-03-20 | (주)대진정공 | Operation method of pump |
| CN102425563B (en) * | 2011-12-08 | 2014-03-12 | 北京中科科仪股份有限公司 | Method and system for synchronously inhibiting subcritical vibration of rotor of magnetic suspension molecular pump |
-
1993
- 1993-05-25 JP JP12291493A patent/JP3457353B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170085039A (en) | 2014-11-12 | 2017-07-21 | 에드워즈 가부시키가이샤 | Vacuum pump and method for estimating cause of anomaly in such vacuum pump |
| CN107110167A (en) * | 2014-11-12 | 2017-08-29 | 埃地沃兹日本有限公司 | The abnormal cause presumption method of vavuum pump and the vavuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06330885A (en) | 1994-11-29 |
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