JP3453335B2 - Stripe coating apparatus and method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating device and method for coating a coating on one or both surfaces of a continuously running substrate with stripes.

[0002]

2. Description of the Related Art As a coating device for coating a surface of a continuously running base material, a manifold for spreading the coating liquid in a coating width direction and a slit for rectifying and discharging the coating liquid supplied to the manifold are provided. An extrusion-type coating device provided with this is known.

As a method of performing stripe coating in an extrusion type coating apparatus, there is a method in which a slit is provided with a partition, and a flow is divided in the slit and discharged.

Further, as a method of using the partition, the following method for making the film thickness in the coating width direction uniform is adopted. That is, T for extruding a resin film or sheet
In the die, the tip of the lip of the nozzle is deformed by pushing and pulling with a differential screw or heat bolt, or pushing with air pressure drive, etc. to finely adjust the discharge amount and make the film thickness in the width direction uniform. To do. Alternatively, the nozzle provided in the nozzle is partially heated to change the temperature of the resin to be applied, thereby changing the flow characteristics and making the film thickness in the width direction uniform.

Further, in Japanese Patent Application Laid-Open No. 9-271705, in a coating apparatus for forming a coating film of photoresist liquid or the like on a semiconductor wafer or a glass substrate, the tip of the lip of a nozzle is deformed by a piezo actuator, and the discharge amount is The means for making a fine adjustment to make the thickness of the coating film uniform in the coating width direction is disclosed.

[0006]

By the way, in the case of stripe coating, in order to make the coating amount of each strip uniform over the coating width direction, in order to make the coating liquid uniform in the coating width direction at the slit outlet of each stripe of the coating liquid. It is important to make uniform the discharge amount of.

However, in the coating device for the T-die or the like, when performing full-width coating, the tip of the lip of the nozzle is deformed and the deformation amount of the peripheral portion is adjusted at the same time, so that the coating width direction is increased. It is easy to make the discharge amount uniform. However, in the case of stripe coating, since it is important that the film thickness of the stripe coating film portion of each strip is uniform, it is necessary to make the discharge amount uniform for each strip.
However, if the periphery of the portion where the tip of the lip of the nozzle is deformed is also deformed, it is not easy to make the film thickness variation of the stripe coating film portion of each strip uniform.

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems of the conventional coating apparatus and to provide a stripe coating apparatus and method for uniforming the coating solution in the coating width direction even in the case of stripe coating. .

[0009]

[Means for Solving the Problems] The first invention (Claim 1)
Is a plurality of slit outlets provided at the nozzle tip, and the tip portions of a pair of upper and lower blocks forming the slit outlets, and a plurality of these slit outlets. Corresponding to the positions of the stripe partitions that divide the slit outlet of the, and the notches formed at the tip of at least one of the blocks in the discharge direction of the coating liquid and those cuts. The tip portion of the block provided with the notch portion is provided with a movable portion formed by the notch portion and the thin portion, and a slit gap adjusting means capable of adjusting the slit gap by moving the movable portion. This is a stripe coating device characterized by the above.

[0010]

The second invention of the present invention (corresponding to claim 9)
In the slit gap adjusting method for adjusting the slit gap in the stripe coating apparatus of the first aspect of the present invention, the relationship between the adjustment amount of the coating film and the movement amount of the movable portion is prepared in advance, and after the coating, The thickness of the coating film is detected, the thickness adjustment amount is calculated from the thickness, the movement amount of the movable portion is calculated based on the relationship, and the movement amount is calculated based on the movement amount of the movable portion. A slit gap adjusting method in a stripe coating apparatus is characterized in that the portion is moved by the slit gap adjusting means.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) A first embodiment of the present invention will be described with reference to FIGS.

First, the configuration of the apparatus according to the present invention will be described together with the operation which is the method of the present invention. FIG. 1 shows an outline of a stripe coating process using the nozzle 100 of the present invention.

As shown in FIG. 1, the coating liquid 2 in the stock tank 1 is delivered by a liquid supply pump 3 capable of stable liquid delivery such as a metering pump. Further, the coating liquid 2 is filtered by the filter 4 to remove agglomerates and foreign matters in the coating liquid 2, and then the flow rate is measured by the flow meter 5 and then sent to the nozzle 100. After that, the coating liquid 2 is extruded from the manifold 6 into the slit 7,
In addition, the flow is divided by the stripe partition 8 shown in FIG. 2, discharged from the exit of the slit 7, and applied in stripes on the surface of the base material 9 that continuously runs in the direction of arrow D, and stripes as shown in FIG. The coating film portion 10 is formed.

Next, the structure of the nozzle 100 of the present invention will be described.

FIG. 2 is a perspective view of the nozzle 100 of the present invention. 3 is a cross-sectional view of the nozzle 100 of the present invention. As shown in FIG. 2, the nozzle 100 includes an upper block 11, a lower block 12, and two side blocks 13.
L and 13R. Each block 11, 1
2, 13L and 13R are connected to each other by screws (not shown).

A pipe 14 for supplying the coating liquid 2 is connected to the upper block 11. Further, the lower block 12 has a coating liquid 2 supplied to the manifold 6.
In order to discharge the liquid from the outlet of the slit 7,
A stripe partition 8 is provided. However, as shown in FIG. 3, the manifold 6 and the slit 7 are processed into a shape that is formed by combining the lower block 12 and the upper block 11.
In the present invention, the interval h between the upper block 11 and the lower block 12
Is called the slit gap.

Further, on the upper part of the upper block 11, slit gap adjusting means 15 (for example, piezo actuator, differential screw, heat bolt, air pressure drive, etc.) for adjusting the slit gap, and slit gap adjusting means 15 are provided. A slit gap adjusting means fixing portion 16 for fixing the above to the upper part of the upper block 11 is attached by a screw (not shown).

Further, the tip of the upper block 11 is composed of a movable portion 18 and a thin portion 19. The movable portion 18 is displaced in the direction of narrowing or widening the slit gap according to the strength of the pushing force of the slit gap adjusting means 15. Further, the thin portion 19 is the movable portion 1
8 functions as a fulcrum for bending. Further, as shown in FIG.
The notch 17 is provided in the.

In the first embodiment, the case of coating three stripes will be described.
Is provided at four places, but in the present invention, it is applied when at least two stripes or more are applied, so the number of notches 17 is always the number of stripes + 1.

Next, the first feature of this embodiment will be described.

FIG. 4 is an enlarged view of the tip of the nozzle 100 of the present invention. The slit gap adjusting means 15 and the slit gap adjusting means fixing portion 16 are omitted from the drawing.

The first feature is that, as shown in FIG. 4, notches 17 are provided in both sides of the movable portion 18 of the upper block 11 in the ejection direction E of the coating liquid 2.

The cutouts 17 are for making adjustments after the device is manufactured. That is, the movable portion 18 is provided for the purpose of independently deforming each strip and adjusting the slit gap.

That is, as shown in FIG. 5A, if a nozzle 101 having no notch portion is used in the movable portion 18, in a coating apparatus, after manufacturing, a portion having a large discharge amount at a discharge port of the apparatus. That is, the thick portion (center portion) of the striped coating film portion 10 as shown in FIG. 5 (c)
When the pushing force P is applied to narrow the slit gap h, the tip of the nozzle is deformed into a curved shape. Therefore, not only the slit gap h ″ of the portion to which the pushing force P is applied but also the slits around The gaps h ′ and h ′ are also narrowed.

As a result, when the slit gap h is deformed into a curved shape, the film thickness of the stripe coating film portion 10 of each stripe also becomes a curved shape as shown in FIG. The film thickness of the coating film portion 10 cannot be made uniform.

However, the nozzle 1 according to the first embodiment of the present invention
In the stripe coating device using 00, even if the pushing force P is applied to a strip having a large discharge amount, that is, a thick strip (the middle portion) of the stripe coating film portion 10 as shown in FIG. As shown in FIG. 6A, the movable part 18 of
Since they are displaced independently, the slit gap h ″ is formed while maintaining the parallelism of the slits 7, and the movable portions 18 of the adjacent strips are not deformed.

Therefore, since it is possible to independently change only the film thickness of the strip having a large discharge amount or the thick strip of the striped coating film portion 10, as shown in FIG. It becomes easy to make the film thickness of the coating film part 10 uniform.

Further, as shown in FIG. 4, the notch 17
The width W1 of the adjacent movable portions 18 prevents the adjacent movable portions 18 from interfering with each other, and the deformation operation of the adjacent movable portions 18 interferes with each other due to the fluid friction of the coating liquid 2 oozing out from the slit 7. In order to prevent it, it is necessary to be 0.01 mm or more. Further, in order to prevent liquid leakage from the cutout portion 17, it is desirable that the width W1 of the cutout portion 17 is less than the width W2 of the stripe partition 8. The stripe partition 8 has some elasticity.

Further, the length of the notch portion 17 may be set from the thin portion 19 which is the bending point of the movable portion 18 to the slit outlet in order to prevent the deformation of the adjacent movable portions 18 from affecting each other. desirable.

Next, the second feature of this embodiment will be described.

As shown in FIG. 3, the second characteristic is that slit gap adjusting means 15 is provided on the upper part of each movable portion 18, and the thin portion 19 is made a bending point by the pushing force of the means 15. That's what I did.

In the first embodiment, the case where the slit gap adjusting means 15 is a piezo actuator will be described.

By pushing the movable portion 18 by the minute displacement force of the piezo actuator, the slit gap can be changed in the order of μm and the discharge amount can be controlled minutely, so that the film thickness can be made uniform. Will be easier.

In addition, the movable portion 18 is composed of a piezo actuator.
When a pushing force is applied to the piezo actuator, a reaction force against the pushing force acts on the piezo actuator itself. Therefore, when the piezo actuator is fixed to the slit gap adjusting means fixing portion 16, it is desirable to firmly fix it with a screw.

Further, the thin portion 19 has an elastic limit even if the maximum generated force of the piezo actuator is applied to the movable portion 18 as a pushing force in order to prevent the movable portion 18 from being plastically deformed and becoming inoperable. Within the range that does not exceed
Moreover, it is desirable that the thickness be such that a predetermined amount of deformation is obtained.

Next, the third feature of the present embodiment will be described.

As shown in FIG. 4, the third feature is that the stripe partition 8 is provided on the slit surface of the lower block 12 corresponding to the position of the cutout portion 17 provided on the upper block 11. That is.

The stripe partition 8 is provided so as to divide the coating liquid when the coating liquid is pushed out from the manifold 6 into the slit 7. Further, it also functions to prevent the coating liquid from leaking from the cutout portion 17.

Further, since the stripe partition 8 has a structure including an elastic body such as Teflon tape, the movable portion 18 is not affected by the reaction force with the stripe partition 8 as a fulcrum.
Deforms while maintaining the parallelism of the slit 7, and a stable slit gap adjustment becomes possible.

Further, by providing the stripe partition 8 from the manifold 6, that is, from the slit inlet to the slit outlet, the flow of the coating liquid from the manifold 6 to the slit outlet is smoothly divided, and uniform coating liquid can be discharged. A more uniform film thickness of the stripe coating film portion 10 can be obtained.

The width W2 of the stripe partition is shown in FIG.
Corresponds to the width of the striped plain portion 20 as shown in FIG.

Next, in order to explain the effect of the first embodiment, the stripe coating apparatus using the nozzle 100 described in the first embodiment is used, and (1) the movable part 18 is not deformed at all. And the result of measuring the film thickness of each strip in the coating width direction when the coating liquid is coated on the surface of the substrate, and (2)
The results of measuring the film thickness when the movable portion 18 having a thick film thickness is deformed and the slit gap h is narrowed are shown in (Example 1), (Example 2), and (Example 3). ,Compare. (Example 1) Using the nozzle 100 described in the first embodiment, a coating solution prepared by adding carbon to a carboxymethyl cellulose aqueous solution having a viscosity of 1500 cp at a shear rate of 1000 sec ^-1 was used as a base material (thickness: 30 μm).
0.1 cc / cm / se per unit width on the surface of copper foil)
It was applied at a flow rate of c.

The nozzle 100 is made of stainless steel and has three stripes, the stripe coating width of each stripe is 45 mm, the slit gap is 0.25 mm, and the thin portion 19 has a thickness of 3 mm.

FIG. 13A shows the result of film thickness measurement when the movable portion 18 was applied without being deformed, and FIG.
FIG. 3B is a film thickness measurement result when the movable portion 18 having a thick film thickness is deformed and applied based on the result in FIG. 13A.

As shown in FIG. 13 (a), when the movable portion 18 was applied without being deformed, the thickness of the central strip was increased.

This is one of the reasons that the supply port 14 for the coating liquid 2 to the nozzle 100 is provided in the center, so that the discharge amount from the central strip increases.

The nozzle 1 described in the first embodiment is also used.
It is presumed that this also occurs due to the variation in the mechanical accuracy of the minute slit gap of 00.

Therefore, about 3% of the film thickness variation of the stripe coating film portion in the coating width direction when the movable portion 18 is applied without being deformed is adjusted by the slit gap adjusting means 15 only in the movable portion 18 of the central strip. By adding a slight displacement to the extent that the mechanical precision variation is corrected, the film thickness variation becomes 1% as shown in FIG.
It could be greatly reduced. (Example 2) In Example 2, an aqueous solution of carboxymethyl cellulose having a viscosity different from that in Example 1 was used. That is, using the nozzle 100 described in the first embodiment, a coating solution prepared by adding carbon to a carboxymethyl cellulose aqueous solution having a viscosity of 3000 cp at a shear rate of 1000 sec ⁻¹ was used as a base material (thickness: 30 μm).
m copper foil) 0.1 cc / cm / s per unit width on the surface
It was applied at a flow rate of ec.

The nozzle 100 is made of stainless steel and has three stripes, the stripe coating width of each stripe is 45 mm, the slit gap is 0.25 mm, and the thin portion 19 has a thickness of 3 mm.

FIG. 14A shows the film thickness measurement results when the movable portion 18 was applied without being deformed, and FIG.
4B is a film thickness measurement result when the movable portion 18 having a thick film thickness is deformed and applied based on the result of FIG. 14A.

When the movable portion 18 was applied without being deformed at all, as shown in FIG. 14 (a), the thickness of the central strip became thick as in the case of (Example 1). However, since the viscosity of the coating liquid was higher than in the case of (Example 1), the fluidity was poor and the film thickness variation was 5%.

Therefore, the slit gap adjusting means 15 applies a slight displacement to the movable portion 18 to the extent that film thickness variation is corrected, so that as shown in FIG.
The film thickness variation is 1%, and even coating liquids with different viscosities
It was proved that it could be made uniform easily. (Example 3) Using the nozzle 100 described in the first embodiment, a coating solution prepared by adding carbon to a carboxymethyl cellulose aqueous solution having a viscosity of 1500 cp at a shear rate of 1000 sec ^-1 was used as a base material (thickness: 30 μm).
0.1 cc / cm / se per unit width on the surface of copper foil)
It was applied at a flow rate of c.

The nozzle 100 is made of stainless steel and has three stripes, a stripe coating width of each stripe is 45 mm, a slit gap is 0.25 mm, and the thin portion 19 has a width of 5 mm and a thickness of 3 mm. Further, the supply port 14 supplied the coating liquid from the side block 13L side without using it.

FIG. 15 (a) shows the film thickness measurement results when the movable portion 18 was applied without being deformed, and FIG.
FIG. 15B is a film thickness measurement result when the movable portion 18 having a thick film thickness is deformed and applied based on the result of FIG.

When the movable portion 18 was applied without being deformed at all, as shown in FIG. 15 (a), the thickness of the strip on the left side (supply side of the coating liquid) was increased.

Therefore, the slit gap adjusting means 15 applies a slight displacement to the movable portion 18 on the left side to the extent of correcting the film thickness variation, so that the film thickness variation is caused as shown in FIG. 15B. It was 1%, and it was proved that even if the supply port of the coating liquid was changed, it could be easily and uniformly made.

Next, the effects of the first embodiment will be summarized and described below.

First, by providing the notch portion 17 in the nozzle movable portion 18 of the nozzle 100 of the present invention, the discharge amount can be adjusted for each line, and even in the case of stripe coating, the coating width direction It became easy to make the film thickness of the entire stripe coating film portion 10 uniform.

Second, by using the stripe coating apparatus using the nozzle 100 of the present invention, even when there is a lot variation of the coating solution at the production site or a change in the flow characteristic of the coating solution in the apparatus. It became easy to make the film thickness of the stripe coating film part 10 uniform in the entire coating width direction.

Thirdly, the supply port 1 of the nozzle 100 of the present invention.
Even if 4 is provided in a place other than the center, the movable portion 18 having a thick line is provided.
By deforming, it became easy to make the film thickness of the stripe coating film portion 10 uniform in the entire coating width direction.

(Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIGS.

First, the structures of the apparatus and nozzle according to the present invention will be described. FIG. 8 is a schematic view of the nozzle 100 of the second embodiment provided with the stripe restrictor 22. Further, FIG. 9 is an enlarged side view of the case where the tip end of the nozzle 100 according to the present embodiment is provided with the stripe restrictor 22.

The configuration of the apparatus according to this embodiment is shown in FIG.
As shown in (1), it is the same as in (Embodiment 1).

The structure of the nozzle 100 according to the present embodiment is basically the same as that of the first embodiment, but as shown in FIG. 8, the position of the striped plain portion 20 at the slit exit of the nozzle 100. A stripping restricting member 22 having the following features corresponding to the width of the striped plain portion 20 is provided at a portion corresponding to. That is, the stripe restrictor 22 having the same width is attached to the front surface of the stripe partition 8 (see FIG. 12).

The second embodiment differs from the first embodiment in that the upper block 11 is not provided with slit gap adjusting means or has a notch. I don't care.

Next, the first feature of the present embodiment will be described.

As shown in FIG. 8, the first feature is that the slit outlet of the nozzle 100 is provided with a stripe regulating member 22 corresponding to the width of the striped plain portion 20.

In the conventional extrusion type coating apparatus, when the liquid pressure rises at both ends of the stripe coating width immediately after discharge due to the influence of the flow characteristics of the coating liquid 2, so-called ears are formed at both ends of the stripe coating film portion 10. May occur. Therefore, conventionally, as shown in FIG. 10C, the stripe partition 8 provided in the slit surface is tapered so that the slit outlet side expands in the discharge direction E of the coating liquid 2, and immediately after the discharge. The liquid pressure at both ends of the stripe coating width is reduced. But then
As shown in FIG. 10 (a), immediately after the ejection, edging, which is the opposite of so-called ears, occurs at both ends of the stripe coating width.

Therefore, in the second embodiment, the stripe restrictor 22 is provided to prevent the sagging of the ear. This prevents sagging at both ends of the stripe coating width immediately after ejection, regulates the behavior of the coating liquid 2 in the coating state immediately after coating, and stabilizes the width of the stripe coating portion 10.

Further, as shown in FIG. 9, by making the shape of the stripe regulating member 22 a shape that covers the entire tip of the lip 21, it can be firmly attached to the lip surface in manufacturing. As a result, it becomes easy to set the distance from the front surface of the stripe restrictor 22 to the substrate to a predetermined distance in manufacturing.

Further, as shown in FIG. 11, the stripe regulating member 22 is formed into a curved plate which is in close contact with the lip 21 of the nozzle 100 and has a strong elasticity, and the central portion thereof is in close contact with the lip 21 of the nozzle 100. , Its upper and lower edges,
It may be screwed to the upper and lower blocks 11 and 12.

By doing so,
The stripe restrictor 22 is firmly fixed to the tip surface of the lip 21. As a result, sagging can be prevented more effectively, and the effect of regulating the behavior of the coating liquid 2 in a coating state immediately after coating and stabilizing the width of the striped coating portion 10 is also increased.

The stripe restrictor 22 as described above is used.
However, it is possible to prevent ear drooping, but on the contrary, you should not raise your ears. Therefore, as shown in FIG. 12, the cross-sectional shape of the stripe regulator 22 in the slit 7 direction is trapezoidal with the lip surface side being the longer side and the base material side being the shorter side with respect to the discharge direction E of the coating liquid 2. With the shape, the cross-sectional shape of the space from the exit of the slit 7 to the base material 9 in the coating width direction is as shown in FIG.
As shown in 2G, it becomes trapezoidal, that is, this part G
The liquid pool formed in the above becomes trapezoidal. As a result, the action of suppressing the hydraulic pressure is generated, and the ear rust is less likely to occur.

Stripe regulating tool 22 having the above characteristics
As shown in FIG. 10 (b), the stripe coating film portion 10 having a stable width and free of ears can be obtained by providing.

Next, the second feature of this embodiment will be described.

As shown in FIG. 9, the second characteristic is that the thickness of the stripe regulating member 22 is t, and the distance from the slit outlet to the substrate 9 is L (hereinafter referred to as coating gap). , L−0.2 mm ≦ t ≦ L is satisfied.

The coating gap is appropriately selected according to the conditions such as the coating thickness and the viscosity of the coating liquid.

The stripe regulator 22 is provided to regulate the behavior of the coating liquid 2 in the state of the coating film immediately after coating, and the thickness t of the stripe regulator 22 is equal to the coating gap L-0.2 mm. If it is thinner, problems such as the application liquid flowing into the gap between the stripe restrictor 22 and the base material 9 may occur.
A stable width of the stripe coating film portion 10 cannot be obtained.

Further, the thickness t of the stripe restrictor 22 is
If it is thicker than the coating gap L, the base material 9 is pushed in, and the traveling of the base material becomes unstable. Then, not only the sagging and the width of the striped coating film portion 10 but also the coating thickness becomes unstable.

Therefore, the stripe regulator 22 to the substrate 9
It is important to provide a proper gap between the two, and the range of 0.01 mm to 0.1 mm is most preferable.

Next, the nozzle 1 described in the second embodiment
In the stripe coating device using No. 00, the thickness t of the stripe regulating member 22 was changed, and the width of the striped plain portion and the presence or absence of sagging at each thickness t were examined. The effect will be described in the following (Example 4).

Example 4 Using the nozzle described in the second embodiment, a coating solution prepared by adding carbon to a carboxymethyl cellulose aqueous solution having a viscosity of 1500 cp at a shear rate of 1000 sec ⁻¹ was added to a substrate (thickness: 30).
0.1 cc / cm / per unit width on the surface of (μm copper foil)
It was applied at a flow rate of sec.

The nozzle was made of stainless steel and had three stripes, the stripe coating width of each stripe was 45 mm, the slit gap was 0.25 mm, the thin portion width was 5 mm, the thickness was 3 mm, and the coating gap L was 0.5 mm.

The stripe restrictor is made of aluminum and has a width of 2.5.
The thickness was 5 mm, and the thickness was 0.2 to 0.6 mm.

The results of comparing the width of the striped plain portion and the presence or absence of sagging are shown in Table 1 in the case where the stripe coating is carried out by the nozzle using the five kinds of stripe regulating tools A to C of (Example 4). .

[0087]

[Table 1] When the thickness is smaller than L-0.2 mm as in the case where the stripe regulator A is used for coating, the effect of regulating the behavior of the coating liquid by the stripe regulator is weakened and the ink is discharged at both ends of the stripe coating width. The coating solution spreads toward the substrate. Then, the coating liquid wraps around to the front surface of the stripe regulating tool, so that the width of the plain portion is narrowed. As the hydraulic pressure is released, ear loss occurs.

On the other hand, when the thickness is larger than L, as in the case where the stripe regulating tool E is used for coating, the stripe regulating tool pushes the base material, and the base material is arched in the discharging direction. It will bend. Then, after the base material separates from the tip of the nozzle, a force that tries to return to the original acts,
Since the base material vibrates, both ends of the stripe coating film portion were wavy when viewed in the running direction of the base material.

On the other hand, when the thickness t of the stripe restrictor is L-0.2≤t≤L, the stripe restrictor has the effect of collecting liquid, and stripes having a stable width without sagging. A coating film part can be formed.

Further, as described in (Example 1),
By adjusting the slit gap for each strip, it is possible to obtain a striped coating film with a film thickness variation of 1% or less in the entire coating width direction.

The effects of the second embodiment will be collectively described below.

First, a stripe regulator 22 corresponding to the width of the striped plain portion 20 is provided at the position of the striped plain portion 20 at the slit exit of the nozzle 100 of the present invention, that is, at a portion corresponding to the stripe partition 8. By including it, it is possible to prevent sagging at both ends of the striped coating film portion 10, and it is possible to improve the width accuracy of the striped coating film portion 10 and the striped uncoated portion 20.

Secondly, when the thickness t of the stripe restrictor 22 is L-0.2 mm ≦ t ≦ L, the effect of restricting the behavior of the coating liquid 2 by the stripe restrictor 22 acts, and there is no sagging. Thus, the striped coating film portion 10 having a stable width can be obtained.

(Third Embodiment) With reference to FIGS. 16 to 19, a third embodiment of the present invention will be described.

First, the structures of the apparatus and nozzle according to the third embodiment will be described.

FIG. 16 shows the nozzle 100 of the third embodiment.
3 is a schematic view of a state in which a displacement sensor 31 is provided in the.

The configuration of the device according to the third embodiment is the same as that of the first embodiment, as shown in FIG.

The structure of the nozzle 100 according to the third embodiment is basically the same as that of the first embodiment.

As shown in FIG. 16, a displacement sensor 31, a displacement sensor movable portion 32, and a zero sensor are provided in each slit gap adjusting means fixing portion 16 at a portion corresponding to the fixed position of each slit gap adjusting means 15. Point adjustment fixing part 3
3. Zero adjustment means 34 is provided.

The zero point adjusting means fixing part 33 is attached to the lower end of the slit gap adjusting means fixing part 16, and the zero point adjusting means 34 is connected to the zero point adjusting means fixing part 33 with a screw. Further, the displacement sensor movable portion 32 is fixed to the zero-point adjusting means 34, and further, the displacement sensor 31 is fixed to the displacement sensor movable portion 32.

The displacement sensor 31 is for measuring the amount of movement of the movable portion 18. The zero-point adjusting means 34 is means for making an initial adjustment of the gap between the displacement sensor 31 and the movable portion 18.

That is, the movable portion 18 is moved by the slit gap adjusting means 15 held by the slit gap adjusting means fixing portion 16, and its position is detected by the displacement sensor 31. Then, in order to zero-adjust the initial position of the displacement sensor 31, the zero-point adjusting means 3
There is 4.

The present invention also includes a structure in which the upper block 11 is not provided with a cutout portion. That is,
Including the case where adjustment is performed for the entire slit.

Next, the configuration of the feedback system according to the third embodiment will be described.

17 and 21 are schematic diagrams of a feedback system using the slit gap adjusting means 15 and the displacement sensor 31 of the third embodiment. Further, FIG. 20 is a flowchart of the control.

As shown in FIGS. 17 and 21, the film thickness after coating and drying (S1, S2) is measured by the film thickness measuring device 38 (S3). In response to the measurement result, the feedback control means 36 determines whether the film thickness is within the allowable range of variation (S4).

As a result of the judgment, when the variation exceeds the allowable range, the feedback control means 36 causes the slit gap adjusting means 15 to appropriately move the movable portion 18 via the slit gap adjusting means control device 35. Instruct to move (S5). Therefore, the relationship between the adjusted thickness amount of the film thickness and the movement amount of the movable portion 18 is obtained in advance by an experiment. For example, when the film thickness is 1 μm too thick, data such as moving the movable part 18 in the direction in which the 1.5 μm slit becomes thinner is obtained.

The displacement sensor 31 detects the amount of movement of its movable portion. The detection result is notified to the feedback control means 36 via the amplifier 37. The feedback control means 36 further moves the movable portion 18 based on the detection result from the displacement sensor 31. In this way, the feedback control means 36 feedback-controls the movable part 18 to move it to the target position. Note that FIG.
In 1, the numeral 39 is a flow meter, 40 is a filter, 41 is a pump, 42 is a tank, 43 is paint, and 44 is a dryer.

Next, the first feature of this embodiment will be described.

The first feature of this embodiment is that, as shown in FIG. 16, a displacement sensor 31 for measuring the amount of movement of the movable portion 18 is provided in the vicinity of the movable portion 18 of the nozzle provided with the slit gap adjusting means 15. Is provided.

In order to change the slit gap on the order of μm, minutely control the discharge amount, and make the film thickness uniform, it is important that the displacement amount of the movable portion 18 be measured accurately and quickly. Is.

If the displacement sensor 31 is provided at a position far from the movable portion 18, the measurable range of the displacement sensor 31 is widened and the resolution is increased, so that it becomes difficult to measure a minute displacement. Moreover, since the measurement distance becomes long, the movable part 1
It becomes difficult to quickly capture the slight deformation motion of 8.
Responsiveness decreases.

Therefore, by providing the displacement sensor 31 in the immediate vicinity of the movable portion 18, the measurable range is narrowed, the resolution is reduced, the measurement distance is shortened, and the responsiveness is easily improved. It becomes possible to measure the displacement amount of the portion 18 accurately and quickly.

The measurable range of the displacement sensor 31 is
It is desirable that the resolution is within 1 mm and the resolution is 0.5 μm or less.

Next, the second feature of this embodiment will be described.

As described above, the second characteristic of the present embodiment is that, as shown in FIG. 17, the slit gap adjusting means 15 is based on the numerical value output from the displacement sensor 31.
Is to give feedback to.

In this embodiment, the case where the slit gap adjusting means 15 is a piezo actuator will be described.

Generally, a piezo actuator is controlled by a voltage, but it has a characteristic that the amount of displacement is different in the extending direction and the contracting direction even if the voltage is the same. It is difficult to control minutely. Further, it takes time to reach a predetermined displacement amount, so that it is difficult to make the film thickness uniform in a short time.

Therefore, by incorporating a feedback system as shown in FIG. 17, it becomes possible to control the piezo actuator with high precision in either direction, and it becomes easy to control the discharge amount minutely. Further, since the time required to reach the predetermined displacement amount is shortened, it becomes easy to make the film thickness uniform in a short time.

Next, the third feature of the present embodiment will be described.

FIG. 18 is an enlarged sectional view of the nozzle 100 showing the mounting state of the displacement sensor 31 in the third embodiment of the present invention.

The third feature of this embodiment is that, as shown in FIG. 18, the slit gap adjusting means 1 of the movable portion 18 is provided.
The angle α formed by the surface A1 with which 5 contacts and the surface A2 with which the slit gap adjusting means fixing portion 16 is fixed is 90.
It is a degree.

In order to accurately measure the amount of movement of the movable part 18 with the initial value being the state where the movable part 18 is not deformed,
It is necessary to accurately measure the distance D from the measurement surface A3 of the displacement sensor 31 to the measurement surface A1 of the movable portion 18, and for that purpose, it is important that A1 and A3 are parallel to each other. .

If A1 and A3 are not parallel, the displacement sensor 31
Since there is a large variation in the current value sensed by, accurate measurement becomes difficult.

Therefore, as shown in FIG. 18, A1 and A2
By setting the angle formed in step 90 to 90 degrees, the displacement sensor 31 can be simply attached to the slit gap adjusting means fixing portion 16 whose parallelism and squareness are processed with high precision.
1 and A3 are easily parallel.

The range of the angle α is 88 ° ≦ α ≦ 92.
゜ is desirable.

Next, the fourth feature of the present embodiment will be described.

FIG. 19B is an enlarged plan view of the nozzle provided with the displacement sensor movable portion 32 and the like according to the third embodiment of the present invention.

On the other hand, for comparison, FIG.
FIG. 6A shows an enlarged plan view of the nozzle in the case where the displacement sensor movable part 32 for adjusting the position of the displacement sensor 31, the zero point adjusting means 34, the zero point adjusting means fixing part 33 and the like are not provided at all. .

The fourth feature of this embodiment is shown in FIG.
As shown in (b), the slit gap adjusting means fixing portion 16 is provided with a displacement sensor movable portion 32 for keeping the gap between the displacement sensor 31 and the movable portion 18 at a constant amount, and the gap amount is set to an initial value. That is, the zero point adjusting means 34 for providing the above is provided.

In the nozzle shown in FIG. 19A, a plurality of slit gap adjusting means 15 are used,
Since the lengths of the slit gap adjusting means 15 are slightly different from each other, the length D1 protruding from the slit gap adjusting means fixing portion 16 is not uniform.

If the displacement sensor 31 is attached in this state, the gap amount D2 with the movable portion 18 becomes non-uniform, and it becomes impossible to measure the displacement amount with high accuracy.

It is also difficult to set the initial value with high accuracy in a state where the movable portion 18 is not deformed.

Therefore, as shown in FIG. 19B, by providing the displacement sensor movable portion 32 in the slit gap adjusting means fixing portion 16, even if D1 is non-uniform, D2 can be installed uniformly. It will be possible.

For that purpose, the zero point adjusting means 34 is provided for finely adjusting the displacement sensor movable part 32 with high precision. This facilitates highly accurate setting of D2 in a state where the movable portion 18 is not deformed.

It is desirable to make fine adjustments while sandwiching the zero-point adjusting plate 38 having a highly accurate thickness with a non-magnetic insulator.

Next, the effects of the third embodiment will be summarized and described below.

First, the movable part 1 of the nozzle 100 of the present invention.
By providing the displacement sensor 31 in the immediate vicinity of 8, and feeding back the slit gap adjusting means 15, it becomes possible to control the displacement amount of the movable portion 18 with high responsiveness and high accuracy, and the slit gap is adjusted. Then, it becomes easy to make the applied film thickness uniform.

Secondly, the displacement sensor 31 of the nozzle 100 of the present invention is provided at a position parallel to the movable portion 18,
By providing the zero point adjusting means in the slit gap adjusting means fixing portion 16, the displacement sensor 31 can be easily installed with high accuracy.

[0140]

As described above, by using the stripe coating apparatus of the present invention and adjusting the slit gap for each strip, very uniform stripe coating can be performed in the entire coating width direction.

Further, by providing a stripe regulating tool having an appropriate thickness, it is possible to form a striped coating film portion having a stable width and having no sagging.

Furthermore, by providing a displacement sensor in the immediate vicinity of the movable portion and applying feedback, the slit gap can be adjusted easily and the film thickness can be made uniform.

As a result, the yield of products requiring stripe coating could be greatly improved, and the product quality could be significantly improved.

[Brief description of drawings]

FIG. 1 is a schematic diagram of a coating process in a coating apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view of a nozzle according to an embodiment of the present invention.

FIG. 3 is a sectional view of a nozzle according to an embodiment of the present invention.

FIG. 4 is a perspective view of a tip portion of the nozzle according to the embodiment of the present invention.

5A is a perspective view of a nozzle tip deformation state by a conventional stripe coating apparatus, FIG. 5B is a sectional view of a stripe coating film portion after the nozzle tip deformation by a conventional stripe coating apparatus, and FIG. FIG. 4 is a cross-sectional view of a stripe coating film portion before the nozzle tip deformation by the device.

FIG. 6A is a perspective view of a nozzle tip deformation state of the stripe coating apparatus according to the embodiment of the present invention, and FIG. 6B is a stripe coating film after the nozzle tip deformation by the stripe coating apparatus of the embodiment of the present invention. FIG. 3C is a sectional view of a stripe coating film portion before deformation of the nozzle tip by the stripe coating device according to the exemplary embodiment of the present invention.

FIG. 7 is a schematic diagram of a coating state by the stripe coating apparatus according to the embodiment of the present invention.

FIG. 8 is a perspective view of a nozzle showing the characteristics of the second embodiment according to the present invention.

FIG. 9 is an enlarged cross-sectional view of the tip of a nozzle showing the characteristics of the second embodiment of the present invention.

10A is a sectional view of a stripe coating film portion formed by a conventional stripe coating device, and FIG. 10B is a sectional view of a stripe coating film portion formed by a stripe coating device according to Embodiment 2 of the present invention.
(C) An enlarged plan view showing a stripe partition by a conventional stripe coating device.

FIG. 11 is an enlarged cross-sectional view of a stripe regulating tool of the present invention (corresponding to claim 7).

FIG. 12 is an enlarged plan view of a stripe regulating tool of the present invention (corresponding to claim 8).

13A is a diagram showing a measurement result of a film thickness distribution of a stripe coating film portion before adjusting a slit gap in (Example 1) of the present invention, and (b) a slit gap in (Example 1) of the present invention. It is a figure which shows the measurement result of the film thickness distribution of the stripe coating film part after adjustment.

14A is a diagram showing the measurement results of the film thickness distribution of the stripe coating film portion before the slit gap adjustment in (Example 2) of the present invention, and (b) the slit gap in (Example 2) of the present invention. It is a figure which shows the measurement result of the film thickness distribution of the stripe coating film part after adjustment.

15A is a diagram showing a measurement result of a film thickness distribution of a stripe coating film portion before adjusting a slit gap in (Example 3) of the present invention, and (b) a slit gap in (Example 3) of the present invention. It is a figure which shows the measurement result of the film thickness distribution of the stripe coating film part after adjustment.

FIG. 16 is a perspective view of a nozzle showing the characteristics of the third embodiment according to the present invention.

FIG. 17 is a schematic diagram of a feedback system showing a feature of the third embodiment according to the present invention.

FIG. 18 is an enlarged cross-sectional view of a nozzle showing a mounting position of a displacement sensor according to the third embodiment of the present invention.

FIG. 19 (a) is an enlarged plan view of a nozzle in the case where the displacement sensor movable part is not provided in the third embodiment of the present invention,
FIG. 9B is an enlarged plan view of the nozzle in the case where the displacement sensor movable portion according to the third embodiment of the present invention is provided.

20 is a flow chart of the feedback system of FIG. 21 of the present invention.

FIG. 21 is a schematic diagram of a feedback system showing the characteristics of the third embodiment according to the present invention.

[Explanation of symbols]

1 stock tank 2 coating liquid 3 liquid supply pump 4 filters 5 Flowmeter 6 manifold 7 slits 8 stripe partitions 9 Base material 10 Stripe coating part 11 Upper block 12 Lower block 13L, 13R Side block 14 Coating liquid supply pipe 15 Slit gap adjusting means 16 Slit gap adjusting means fixing part 17 Notch 18 Moving part 19 Thin-walled part 20 Striped plain area 21 lips 22 Striped restraint 31 displacement sensor 32 Displacement sensor moving part 33 Zero adjustment means 34 Zero point adjusting means fixed part 35 Slit gap adjusting means control device 36 Feedback control device 37 amplifier 38 film thickness measuring instrument 100 nozzles 101 Nozzle without notch 102 No-stripe nozzle

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) B05C 5/00-5/04

Claims (9)

(57) [Claims] 1. A coating apparatus for coating at least two stripes, comprising: a plurality of slit outlets provided at a nozzle tip; tip portions of a pair of upper and lower blocks forming the slit outlets; Corresponding to the position of these stripe partitions, and the notches formed at the tip of at least one of the blocks in the discharge direction of the coating liquid, and those partitions. At the tip of the block with the notch,
A stripe coating apparatus comprising: a movable portion formed by the cutout portion and the thin portion; and a slit gap adjusting means capable of adjusting the slit gap by moving the movable portion. 2. The width of the notch is 0.01 mm or more and less than the width of the striped uncoated portion, and the length of the notch is from the thin portion forming the movable portion to the slit outlet. The stripe coating apparatus according to claim 1, which is up to. 3. The stripe coating apparatus according to claim 1, wherein the stripe partition has a structure including an elastic body. 4. The width of the stripe partition corresponds to the width of the striped plain portion, and the length of the stripe partition is from the entrance of the slit to the exit of the slit. Stripe coating equipment. 5. A coating device for coating at least two stripes, comprising a nozzle having a plurality of slit outlets and a stripe partition for partitioning the plurality of slit outlets, wherein the stripes are present at the slit outlets. A stripe regulator having a width corresponding to the width of the striped plain portion is provided on the front surface of the partition, and when the thickness of the stripe regulator is t and the distance from the slit outlet to the substrate is L, L
A stripe coating device characterized in that −0.2 mm ≦ t ≦ L is satisfied. 6. The stripe restricting member has a shape that covers a lip tip portion of the nozzle.
Stripe coating apparatus described in. 7. The stripe coating apparatus according to claim 5, wherein the stripe regulating member is a plate that is in close contact with the lip surface of the nozzle and has elasticity. 8. The striped restrictor is characterized in that the cross-sectional shape in the slit direction is trapezoidal with the long side on the lip surface side and the short side on the substrate side with respect to the discharge direction of the coating liquid. The stripe coating device according to claim 5. 9. A slit gap adjusting method for adjusting a slit gap in a stripe coating apparatus according to claim 1 , wherein the relationship between the adjustment amount of the coating film and the movement amount of the movable portion is prepared in advance, The thickness of the coating film after coating is detected, the thickness adjustment amount is calculated from the thickness, the movement amount of the movable portion is calculated based on the relationship, and the movement amount of the movable portion is calculated based on the movement amount. A slit gap adjusting method in a stripe coating apparatus, wherein the movable part is moved by the slit gap adjusting means.