JP3433816B2 - Coil component and its manufacturing method - Google Patents

Coil component and its manufacturing method

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Publication number
JP3433816B2
JP3433816B2 JP35301692A JP35301692A JP3433816B2 JP 3433816 B2 JP3433816 B2 JP 3433816B2 JP 35301692 A JP35301692 A JP 35301692A JP 35301692 A JP35301692 A JP 35301692A JP 3433816 B2 JP3433816 B2 JP 3433816B2
Authority
JP
Japan
Prior art keywords
coil
conductor
hole
coil conductor
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP35301692A
Other languages
Japanese (ja)
Other versions
JPH06181122A (en
Inventor
巌 大日向
安一 安倍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP35301692A priority Critical patent/JP3433816B2/en
Publication of JPH06181122A publication Critical patent/JPH06181122A/en
Application granted granted Critical
Publication of JP3433816B2 publication Critical patent/JP3433816B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、チップ状のインダク
タ、インピ−ダ(コイル導体とその周辺部分の容量成分
も回路構成要素として利用するもの)、またはトラン
ス、もしくは磁気ヘッドのコイル部分に用いられるコイ
ル部品あるいはL−C複合部品とその製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to a chip-shaped inductor, an impeller (which uses a coil conductor and its peripheral component as a circuit constituent element), a transformer, or a coil portion of a magnetic head. The present invention relates to a coil component or an LC composite component and a manufacturing method thereof.

【0002】[0002]

【従来の技術】これらのチップ状コイル部品は、小型
化、薄型化等の要求に応えるために、印刷法やシ−ト法
による厚膜形成技術により磁性体の中にコイル導体を一
体に積層して作製される。この厚膜形成技術による積層
型のコイル部品は、特開昭63−44286号公報、実
開昭59−145009号公報、あるいは特開平3−5
4808号公報等に開示されているように、絶縁体シ−
ト上面にコイル半巻分ないしは3/4巻分のコイル導体
を印刷法等により形成し、順次積層することにより形成
される。この場合、上下に隣接する層のコイル導体どう
しの始端と終端とが、パンチング加工等により前記絶縁
体シ−トに垂直に形成されたスル−ホ−ル内に充填され
る導体を介して接続される。
2. Description of the Related Art In order to meet the demands for miniaturization and thinning, these chip-shaped coil components are integrally laminated with a coil conductor in a magnetic body by a thick film forming technique by a printing method or a sheet method. Is produced. A laminated coil component manufactured by this thick film forming technique is disclosed in Japanese Patent Laid-Open No. 63-44286, Japanese Laid-Open Utility Model No. 59-14509, or Japanese Patent Laid-Open No. 3-5.
As disclosed in Japanese Patent No. 4808, etc.
It is formed by forming a coil conductor for a half turn or 3/4 turn of the coil on the upper surface of the coil by a printing method or the like and sequentially laminating the coil conductor. In this case, the starting ends and the terminating ends of the coil conductors of the vertically adjacent layers are connected to each other through a conductor filled in a through hole formed perpendicularly to the insulator sheet by punching or the like. To be done.

【0003】[0003]

【発明が解決しようとする課題】しかし、前記スル−ホ
−ルが垂直に形成されている従来構造の場合、一回の積
層工程でコイル一巻分を形成することができず、例えば
コイル半巻分の印刷パタ−ンの場合、一巻分のコイルを
形成するために2回のコイル導体の積層を必要とした。
また、コイル導体の印刷パタ−ンの種類も2種類以上必
要になり、例えばコイル3/4巻分のコイル導体の場合
は4種類のコイル導体の印刷パタ−ン(上下の引出電極
の印刷パタ−ンは除く)を必要とした。
However, in the case of the conventional structure in which the through-hole is formed vertically, it is not possible to form one turn of the coil in one laminating step. In the case of a print pattern for one turn, it was necessary to stack the coil conductors twice in order to form a coil for one turn.
Also, it is necessary to have two or more types of coil conductor printing patterns. For example, in the case of a coil conductor of 3/4 coil, four types of coil conductor printing patterns (printing patterns for the upper and lower extraction electrodes) are required. -Except).

【0004】このため、規定巻数の導電コイルを形成す
るために積層回数が多くなり、また、コイル導体の印刷
パタ−ンの種類が増加するため積層工程の管理が複雑に
なり、生産性が悪いという問題点があった。
For this reason, the number of times of lamination is increased in order to form the conductive coil having the specified number of turns, and the number of types of printing patterns of the coil conductor is increased, so that the management of the lamination process is complicated and the productivity is poor. There was a problem.

【0005】本発明は、上記した実情に鑑み、生産性の
よい構造のコイル部品とその製造方法を提供することを
目的とする。
In view of the above situation, it is an object of the present invention to provide a coil component having a structure with good productivity and a manufacturing method thereof.

【0006】[0006]

【課題を解決するための手段】本発明によるコイル部品
は、上記目的を達成するため、磁性あるいは非磁性の絶
縁体層とコイル導体とを交互に積層してなる積層型コイ
ル部品において、各層のコイル導体をコイル一巻分に近
い同じパタ−ンで形成し、ある層のコイル導体の終端と
次層のコイル導体の始端とを斜めに形成されたスル−ホ
−ルに充填された導体を介して電気的に接続したことを
特徴とする。
In order to achieve the above-mentioned object, a coil component according to the present invention is a laminated coil component in which magnetic or non-magnetic insulating layers and coil conductors are alternately laminated . Coil conductor close to one coil
The same pattern is used, and the end of the coil conductor of one layer and the start of the coil conductor of the next layer are electrically connected to each other through the conductor filled in the obliquely formed through hole. Is characterized by.

【0007】また、本発明によるコイル部品の製造方法
は、磁性あるいは非磁性の絶縁体シ−トにレ−ザ−ビ−
ムにより斜めにスル−ホ−ルを形成しておき、該絶縁体
シ−トを、そのスルーホールの下側開口部が前工程で形
成されたコイル導体の終端位置となるように既設積層体
に重ね、該絶縁体シートに、コイル一巻分に近く、かつ
各層で同一となるパターンのコイル導体を、該コイル導
体の始端が前記スルーホールの上側開口部となるように
印刷することにより、前記スルーホールに導体を充填し
て下層のコイル導体に該スルーホール内導体を接合する
ことを1回以上繰り返して積層体を得ることを特徴とす
る。
Further, the method of manufacturing a coil component according to the present invention, a laser beam is attached to a magnetic or non-magnetic insulating sheet.
A through-hole is formed diagonally by means of a hole, and the insulator sheet is installed on the existing laminated body such that the lower opening of the through-hole is the terminal position of the coil conductor formed in the previous step. On the insulator sheet, close to one coil , and
A coil conductor having the same pattern in each layer is printed so that the starting end of the coil conductor is the upper opening of the through hole, so that the through hole is filled with the conductor and the coil conductor in the lower layer is covered with the through hole. It is characterized in that the laminated body is obtained by repeating the joining of the inner conductors once or more.

【0008】[0008]

【作用】本発明のコイル部品は、上述のように、絶縁体
シ−トに形成したコイル一巻分に近くかつ各層で同一の
パタ−ンのコイル導体の終端が斜めに形成されたスル−
ホ−ルを介して隣接する次層のコイル導体の始端と接続
するので、1回のコイル導体の積層でコイル一巻分が形
成される。
As described above, the coil component of the present invention is close to one turn of the coil formed in the insulator sheet and is the same in each layer.
A through-hole in which the end of the pattern coil conductor is formed obliquely.
Since it is connected to the starting end of the adjacent coil conductor of the next layer via a hole, one coil winding is formed by one lamination of the coil conductor.

【0009】本発明によるコイル部品の製造において
は、コイル導体の印刷と同時にスルーホールに充填され
る導体により、上層と同一パターンの下層のコイル導体
に接合されるので、コイル導体に予めスルーホールに充
填したものを重ねる場合のように、スルーホール内の導
体の収縮による接続不良が発生しない。
In the manufacture of the coil component according to the present invention, the conductor filled in the through hole at the same time as the coil conductor is printed is joined to the coil conductor in the lower layer having the same pattern as the upper layer. As in the case of stacking filled ones, connection failure due to contraction of the conductor in the through hole does not occur.

【0010】[0010]

【実施例】図1(A)は本発明によるコイル部品の一実
施例を積層体内部のコイルを透視した状態で示す斜視
図、同(B)は図1(A)のE−E断面図である。図1
(A)、(B)において、コイル部品1は、絶縁体シ−
ト2と、コイル一巻分に近いパターンを有し、かつ各層
で同一パターンのコイル導体5とを交互に積層して積層
体を形成し、該積層体を焼成することにより作製され
る。各層のコイル導体5は前記絶縁体シ−ト2を挟んで
前記絶縁体シ−ト2に斜めに形成されたスル−ホ−ル6
に充填される導体を介して接続されてコイル7を形成す
る。ここで3、4はコイル導体を兼ねた下側引出電極と
上側引出電極とをそれぞれ示している。
1 (A) is a perspective view showing an embodiment of a coil component according to the present invention as seen through a coil inside a laminate, and FIG. 1 (B) is a sectional view taken along line EE of FIG. 1 (A). Is. Figure 1
In (A) and (B), the coil component 1 is an insulator sheet.
2 and a pattern close to one coil, and each layer
The coil conductors 5 having the same pattern are alternately laminated to form a laminated body, and the laminated body is fired. The coil conductor 5 of each layer is a through hole 6 obliquely formed on the insulator sheet 2 with the insulator sheet 2 interposed therebetween.
To form a coil 7 connected via a conductor filled in the coil. Here, 3 and 4 respectively indicate a lower extraction electrode and an upper extraction electrode which also serve as coil conductors.

【0011】図2は本発明によるコイル部品の製造方法
をチップ1個分について示す製造工程図である。まず、
図2において、例えば磁性フェライトを例えばブチラ−
ル樹脂等の適宜のバインダ−でペ−スト化してシ−ト状
に延ばして形成した絶縁体シ−ト2を必要な厚みが得ら
れるまで複数枚積層して積層体のベ−スを形成し
(a)、その上に下側引出電極3を印刷し(b)、その
上に斜めにスル−ホ−ル6をレ−ザ−ビ−ムで形成した
絶縁体シ−ト2aを、該スル−ホ−ル6の下側開口部6
aの位置が前記下側引出電極3上の終端になるように積
層する(c)。次に、前記絶縁体シ−ト2aの上面にコ
イル一巻分に近いパタ−ンを有するコイル導体5をその
始端Xが前記スル−ホ−ル6の上側開口部6bに位置す
るように印刷する(d)。
FIG. 2 is a manufacturing process diagram showing a method for manufacturing a coil component according to the present invention for one chip. First,
In FIG. 2, for example, magnetic ferrite is replaced with, for example, butyler.
A plurality of insulating sheets 2 formed by forming a sheet with a suitable binder such as resin and extending it into a sheet to form a base of a laminated body until a required thickness is obtained. (A), the lower extraction electrode 3 is printed on it (b), and the insulating sheet 2a is formed by obliquely forming the through-hole 6 on the laser beam. Lower opening 6 of the through hole 6
The layers are laminated so that the position of a is the end on the lower extraction electrode 3 (c). Next, a coil conductor 5 having a pattern close to one coil is printed on the upper surface of the insulator sheet 2a such that the starting end X is located in the upper opening 6b of the through hole 6. (D).

【0012】続いて、その上にスル−ホ−ル6を形成し
た絶縁体シ−ト2aを該スル−ホ−ル6の下側開口部6
aが前記のコイル導体5の終端Yに位置するように積層
する(e)。この後(d)、(e)の工程を必要なコイ
ル巻数の回数繰り返し、絶縁体シ−ト2aの上面のスル
−ホ−ル6の上側開口部6bに上側引出電極4をその始
端を合わせて印刷し(f)、その上に必要な厚みが得ら
れるまで絶縁体シ−ト2を複数枚積層する(g)。こう
して得られた積層体を所定の温度で焼成することによ
り、コイルを一体に内蔵したコイル部品1が作製され
る。
Subsequently, the insulator sheet 2a having the through-hole 6 formed thereon is attached to the lower opening 6 of the through-hole 6.
The layers are laminated so that a is located at the terminal Y of the coil conductor 5 (e). After that, the steps (d) and (e) are repeated by the required number of coil turns, and the upper extraction electrode 4 is aligned with the starting end of the upper extraction electrode 4 in the upper opening 6b of the through hole 6 on the upper surface of the insulator sheet 2a. Is printed (f), and a plurality of insulating sheets 2 are laminated thereon until the required thickness is obtained (g). By firing the laminated body thus obtained at a predetermined temperature, the coil component 1 having the coil integrally built therein is manufactured.

【0013】ここで、コイル導体5及び引出電極3、4
はAg、Ag−Pd、Pd等の金属導体の粉末を適当な
バインダ−でペ−スト化したものである。
Here, the coil conductor 5 and the extraction electrodes 3, 4
Is a powder of a metal conductor such as Ag, Ag-Pd, or Pd, which is made into a paste with an appropriate binder.

【0014】なお、絶縁体シ−ト2、2aは積層工程毎
に適当な圧板により軽く押して上下層を圧着させること
により、絶縁体シ−ト2、2aどうし及び絶縁体シ−ト
2、2aと各コイル導体3〜5とを密着させることが好
ましい。
The insulating sheets 2 and 2a are lightly pressed by an appropriate pressure plate in each laminating process to press the upper and lower layers to each other so as to press the insulating sheets 2 and 2a and the insulating sheets 2 and 2a. It is preferable that the coil conductors 3 to 5 are brought into close contact with each other.

【0015】このように、印刷と同時にペ−スト状のコ
イル導体5がスル−ホ−ル6に充填され、コイル一巻分
に近いパタ−ンで形成されたコイル導体5の始端Xがス
ル−ホ−ル6内に充填された導体を介して隣接する下の
層の同一パターンのコイル導体5の終端Yと接続するの
で、1回の絶縁体シ−ト2aの積層と1回のコイル導体
5の印刷とで一巻分のコイルが形成される。従って、従
来例と比較してコイルの必要巻数に対する積層回数を少
なくすることができ、生産性が向上する。また、コイル
導体5の印刷パタ−ンも1種類で済むので、積層工程の
管理が容易になり、生産性が向上する。
As described above, the paste-shaped coil conductor 5 is filled in the through-hole 6 at the same time as the printing, and the starting end X of the coil conductor 5 formed by the pattern close to one coil turns. -Since it is connected to the terminal end Y of the coil conductor 5 of the same pattern in the adjacent lower layer through the conductor filled in the hole 6, one lamination of the insulator sheet 2a and one coil formation. The printing of the conductor 5 forms a coil for one turn. Therefore, it is possible to reduce the number of laminations for the required number of turns of the coil as compared with the conventional example, and the productivity is improved. Further, since only one type of printing pattern for the coil conductor 5 is required, the control of the laminating process becomes easy and the productivity is improved.

【0016】また、絶縁体シ−ト2aの積層とコイル導
体5の印刷とを交互に行うことにより、コイル導体5の
印刷と同時にスルーホール6に充填される導体により下
層のコイル導体5に接合されるので、コイル導体5に予
めスルーホールに充填したものを重ねる場合のように、
スルーホール内の導体の収縮による接続不良が発生せ
ず、品質の向上を図ることができる。
By alternately laminating the insulator sheets 2a and printing the coil conductors 5, the coil conductors 5 are joined to the lower layer coil conductors 5 by the conductors filling the through holes 6 simultaneously with the printing of the coil conductors 5. Therefore, as in the case of stacking coil conductors 5 with through holes filled in advance,
The connection failure due to the contraction of the conductor in the through hole does not occur, and the quality can be improved.

【0017】なお、図1(B)において、コイル端部間
の距離Wは、これらの間の短絡を防ぐ意味で、50ミク
ロン以上とする必要があり、また、絶縁体シ−ト2の厚
みt1は30〜35ミクロンのものを使用するのが一般
的であり、さらに、コイル導体5の厚みt2は15〜2
0ミクロンに形成されることを考慮すると、前記スル−
ホ−ル6に通常用いられている導電体ペ−ストを充分に
充填して断線不良を無くすためには、スル−ホ−ル6の
径Dを80〜100ミクロン、角度θを10度〜25度
に設定することが好ましい。
In FIG. 1B, the distance W between the coil ends must be 50 μm or more in order to prevent a short circuit between them, and the thickness of the insulator sheet 2 must be large. The t1 is generally 30 to 35 μm, and the thickness t2 of the coil conductor 5 is 15 to 2 μm.
Considering the formation of 0 micron,
In order to sufficiently fill the hole 6 with a conductive paste normally used to eliminate disconnection defects, the diameter D of the through hole 6 is 80 to 100 μm and the angle θ is 10 ° to 10 °. It is preferably set to 25 degrees.

【0018】また、本発明は複数個のコイルを縦に並べ
て、あるいは複数個のコイルを同芯に形成してなるチッ
プ状インダクタ、インピ−ダあるいはトランスもしくは
磁気ヘッドあるいはL−C複合部品等のコイル部分にも
適用することができる。また、絶縁体シ−トとしては、
所望の物性を得る上で非磁性材料を用いることもあり、
また、コンデンサや抵抗体と組み合わせた積層体として
作製することもできる。
Further, the present invention relates to a chip-shaped inductor, an inductor or a transformer, a magnetic head, an LC composite component, or the like, in which a plurality of coils are vertically arranged or a plurality of coils are concentrically formed. It can also be applied to the coil portion. Moreover, as an insulator sheet,
Non-magnetic materials may be used to obtain the desired physical properties,
Also, it can be manufactured as a laminated body combined with a capacitor or a resistor.

【0019】[0019]

【発明の効果】請求項1によれば、1回の絶縁体シ−ト
の積層と1回のコイル導体の印刷とで一巻分のコイルが
形成できるので、コイルの必要巻数に対する積層回数を
少なくすることができ、かつ、コイル導体の印刷パタ−
ンも1種類で済むので、積層工程の管理が容易になり生
産性が向上する。
According to the first aspect of the present invention, since one coil can be formed by laminating the insulator sheet once and printing the coil conductor once, the number of laminations with respect to the required number of turns of the coil can be increased. Printing pattern of coil conductor can be reduced.
Since only one type is required, the stacking process can be easily controlled and the productivity is improved.

【0020】請求項2によれば、絶縁体シ−トの積層と
コイル導体の印刷とを交互に行うので、コイル導体の印
刷と同時に導体がスル−ホ−ル内に充填されて上下に隣
接するコイル導体が電気的に接続されるので、コイル導
体に予めスルーホールに充填したものを重ねる場合のよ
うに、スルーホール内の導体の収縮による接続不良が発
生せず、品質の向上を図ることができる。
According to the second aspect of the present invention, since the lamination of the insulator sheets and the printing of the coil conductors are alternately performed, the conductors are filled in the through holes at the same time when the coil conductors are printed, and the conductors are vertically adjacent to each other. Since the coil conductor to be electrically connected is electrically connected, there is no connection failure due to contraction of the conductor in the through hole as in the case of stacking coil conductors filled in the through hole in advance, and quality is improved. You can

【図面の簡単な説明】[Brief description of drawings]

【図1】(A)は本発明によるコイル部品の一実施例を
積層体内部のコイルを透視した状態で示す斜視図、同
(B)は図1(A)のE−E断面図である。
1A is a perspective view showing an embodiment of a coil component according to the present invention as seen through a coil inside a laminated body, and FIG. 1B is a sectional view taken along line EE of FIG. 1A. .

【図2】本発明によるコイル部品の一実施例の製造方法
を示す製造工程図である。
FIG. 2 is a manufacturing process diagram showing a manufacturing method of an embodiment of a coil component according to the present invention.

【符号の説明】[Explanation of symbols]

1 コイル部品 2、2a 絶縁体シ−ト 3 下側引出電極 4 上側引出電極 5 コイル導体 6 スル−ホ−ル 6a 下側開口部 6b 上側開口部 7 コイル 1 coil parts 2, 2a insulator sheet 3 Lower electrode 4 Upper extraction electrode 5 coil conductor 6 Through hole 6a Lower opening 6b Upper opening 7 coils

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01F 17/00 G11B 5/127 H01F 27/00 H01F 41/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) H01F 17/00 G11B 5/127 H01F 27/00 H01F 41/00

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】磁性あるいは非磁性の絶縁体層とコイル導
体とを交互に積層してなる積層型コイル部品において、
各層のコイル導体をコイル一巻分に近い同じパタ−ン
形成し、ある層のコイル導体の終端と次層のコイル導体
の始端とを斜めに形成されたスル−ホ−ルに充填された
導体を介して電気的に接続したことを特徴とするコイル
部品。
1. A laminated coil component comprising magnetic or non-magnetic insulating layers and coil conductors alternately laminated,
The coil conductor of each layer was formed by the same pattern close to one coil, and the end of the coil conductor of one layer and the start of the coil conductor of the next layer were filled in a diagonally formed through hole. A coil component characterized by being electrically connected via a conductor.
【請求項2】請求項1におけるコイル部品をシート法に
より製造する方法であって、磁性あるいは非磁性の絶縁
体シ−トにレ−ザ−ビ−ムにより斜めにスル−ホ−ルを
形成しておき、該絶縁体シ−トを、そのスルーホールの
下側開口部が前工程で形成されたコイル導体の終端位置
となるように既設積層体に重ね、該絶縁体シートに、コ
イル一巻分に近く、かつ各層で同一となるパターンのコ
イル導体を、該コイル導体の始端が前記スルーホールの
上側開口部となるように印刷することにより、前記スル
ーホールに導体を充填して下層のコイル導体に該スルー
ホール内導体を接合することを1回以上繰り返して積層
体を得ることを特徴とするコイル部品の製造方法。
2. A method for manufacturing a coil component according to claim 1 by a sheet method, wherein a through hole is formed obliquely by a laser beam on a magnetic or non-magnetic insulating sheet. In advance, the insulator sheet is stacked on the existing laminate so that the lower opening of the through hole is located at the end position of the coil conductor formed in the previous step, and the insulator sheet is attached to the coil sheet. By printing a coil conductor having a pattern that is close to the winding and is the same in each layer so that the starting end of the coil conductor is the upper opening of the through hole, the conductor is filled in the through hole to form a lower layer. A method for manufacturing a coil component, wherein a laminated body is obtained by repeating joining the conductor in the through hole to the coil conductor one or more times.
JP35301692A 1992-12-11 1992-12-11 Coil component and its manufacturing method Expired - Fee Related JP3433816B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35301692A JP3433816B2 (en) 1992-12-11 1992-12-11 Coil component and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35301692A JP3433816B2 (en) 1992-12-11 1992-12-11 Coil component and its manufacturing method

Publications (2)

Publication Number Publication Date
JPH06181122A JPH06181122A (en) 1994-06-28
JP3433816B2 true JP3433816B2 (en) 2003-08-04

Family

ID=18427997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35301692A Expired - Fee Related JP3433816B2 (en) 1992-12-11 1992-12-11 Coil component and its manufacturing method

Country Status (1)

Country Link
JP (1) JP3433816B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6774315B1 (en) * 2000-05-24 2004-08-10 International Business Machines Corporation Floating interposer
CN108878117A (en) * 2014-11-14 2018-11-23 乾坤科技股份有限公司 Without substrate electronic building brick and its manufacturing method
JP6962100B2 (en) * 2017-09-25 2021-11-05 Tdk株式会社 Multilayer coil parts

Also Published As

Publication number Publication date
JPH06181122A (en) 1994-06-28

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