JP3430858B2 - Screen printing method for substrate - Google Patents
Screen printing method for substrateInfo
- Publication number
- JP3430858B2 JP3430858B2 JP12833197A JP12833197A JP3430858B2 JP 3430858 B2 JP3430858 B2 JP 3430858B2 JP 12833197 A JP12833197 A JP 12833197A JP 12833197 A JP12833197 A JP 12833197A JP 3430858 B2 JP3430858 B2 JP 3430858B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- printed
- printing
- temperature
- substrate table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Screen Printers (AREA)
- Printing Methods (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、電子回路用基板に
回路パターン等を印刷するために使用される基板へのス
クリーン印刷方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen printing method for printing a circuit pattern on an electronic circuit board.
【０００２】[0002]
【従来の技術】電子回路用基板に回路パターン等を印刷
するために、スクリーン印刷が広く行われている。従来
のスクリーン印刷方法としては、印刷部外にある場所
で、基板テーブルに吸着等の手段で保持した被印刷基板
（ワーク）の位置をＣＣＤカメラ等からなる視覚認識部
による撮像情報に基づいて検出し、検出した被印刷基板
の位置と所定位置とのずれ量に基づいて、Ｘ軸、Ｙ軸方
向への移動及び偏角θの補正のための移動を基板テーブ
ルの位置について行って基板テーブルの位置を制御する
ことにより、基板テーブルに固定している被印刷基板の
位置合わせを行った後、基板テーブルと共に被印刷基板
を印刷部に移送し、次いで印刷部に配置したスクリーン
版を介して印刷する方法があった。しかし、この方法で
は被印刷基板の位置合わせを行った後で、基板テーブル
と共に被印刷基板を印刷部に移送するため、移送手段の
精度による機械的ずれや、移送時の急加速や急停止に伴
って生じる被印刷基板の位置ずれ等が生じるため、回路
パターン等の形成が高精度で行えないという問題があっ
た。2. Description of the Related Art Screen printing is widely used for printing circuit patterns and the like on electronic circuit boards. A conventional screen printing method is to detect the position of a printed substrate (workpiece) held by a means such as suction on a substrate table at a place outside the printing unit based on imaging information by a visual recognition unit such as a CCD camera. Then, based on the detected amount of deviation between the position of the substrate to be printed and the predetermined position, movement in the X-axis and Y-axis directions and movement for correcting the deviation angle θ are performed for the position of the substrate table. By controlling the position, the printed substrate fixed to the substrate table is aligned, then the printed substrate is transferred to the printing unit together with the substrate table, and then printed through the screen plate placed in the printing unit. There was a way to do it. However, in this method, since the printed substrate is transferred to the printing unit together with the substrate table after the printed substrate is aligned, mechanical displacement due to the accuracy of the transfer means, sudden acceleration or sudden stop during the transfer may occur. There is a problem in that the circuit pattern or the like cannot be formed with high accuracy because the positional deviation of the printed substrate or the like that occurs accompanying this occurs.
【０００３】[0003]
【発明が解決しようとする課題】本発明は上記のような
事情に鑑みてなされたものであって、その目的とすると
ころは、印刷部に配置したスクリーン版を介して、基板
テーブルに保持した被印刷基板に印刷する基板へのスク
リーン印刷方法であって、印刷時点での被印刷基板の位
置ずれを少なくでき、従って、回路パターン等の形成を
高精度に行うことを可能にするスクリーン印刷方法を提
供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and its object is to hold it on a substrate table via a screen plate arranged in the printing section. A screen printing method for printing on a substrate to be printed, which is capable of reducing the positional deviation of the substrate to be printed at the time of printing, and therefore enables a circuit pattern or the like to be formed with high accuracy. To provide.
【０００４】[0004]
【課題を解決するための手段】請求項１に係る発明の基
板へのスクリーン印刷方法は、印刷部に配置したスクリ
ーン版を介して、基板テーブルに保持した被印刷基板に
印刷する基板へのスクリーン印刷方法において、印刷部
にある基板テーブルに保持した被印刷基板の位置を、移
動可能な視覚認識部による、基板テーブルの上方の位置
からの撮像情報に基づいて検出し、検出した被印刷基板
の位置と、予め設定している所定位置とのずれ量に基づ
いて、基板テーブルの位置を制御して、被印刷基板の位
置合わせを行った後、被印刷基板に印刷する基板へのス
クリーン印刷方法であって、基板テーブルの温度を制御
することにより、基板テーブルに保持した被印刷基板の
温度を所定温度に調節した後、基板テーブルに保持した
被印刷基板の位置を検出するようにしたことを特徴とす
る。According to a first aspect of the present invention, there is provided a screen printing method for printing on a substrate, which is printed on a substrate to be printed held on a substrate table via a screen plate arranged in a printing section. In the printing method, the position of the substrate to be printed held on the substrate table in the printing unit is detected based on the imaging information from the position above the substrate table by the movable visual recognition unit, and the detected substrate to be printed is detected. The position of the substrate table is controlled based on the amount of deviation between the position and the preset predetermined position to align the printed substrate, and then the substrate to be printed on the printed substrate is aligned .
Clean printing method, controlling the temperature of the substrate table
Of the printed substrate held on the substrate table by
After adjusting the temperature to a predetermined temperature, it was held on the substrate table.
It is characterized in that the position of the printed substrate is detected.
It
【０００５】[0005]
【０００６】請求項２に係る発明の基板へのスクリーン
印刷方法は、請求項１記載の基板へのスクリーン印刷方
法において、印刷部外に予備温調ゾーンを設けておき、
この予備温調ゾーンで被印刷基板の温度を調節した後、
この基板を印刷部に移動して、印刷部にある基板テーブ
ルに保持させることを特徴とする。According to a second aspect of the present invention, there is provided a screen printing method for a substrate according to the first aspect , wherein a preliminary temperature control zone is provided outside the printing section .
After adjusting the temperature of the printed substrate in this preliminary temperature control zone,
It is characterized in that the substrate is moved to the printing unit and held on the substrate table in the printing unit.
【０００７】本発明では、印刷部にある基板テーブルに
保持した被印刷基板に対して位置合わせを行った後、こ
の被印刷基板を移送することなく印刷するので、被印刷
基板の移送に伴って生じる被印刷基板の位置ずれが発生
しない。従って、従来の方法に比べ、印刷時点での被印
刷基板の位置ずれを少なくして印刷を行うことが可能に
なる。According to the present invention, after the printed substrate held on the substrate table in the printing unit is aligned, the printed substrate is printed without being transferred. There is no displacement of the printed substrate. Therefore, as compared with the conventional method, it is possible to perform printing with less positional deviation of the substrate to be printed at the time of printing.
【０００８】また、印刷部にある基板テーブルの温度を
制御することにより、基板テーブルに保持した被印刷基
板の温度を所定温度に調節した後、基板テーブルに保持
した被印刷基板の位置を検出するようにすることは、被
印刷基板が温度によって大きく寸法変化する場合であっ
ても、所定温度の被印刷基板について位置合わせを行え
るため、印刷時点での被印刷基板の位置ずれをより少な
くして印刷を行うことを可能にする作用がある。さら
に、印刷部外に予備温調ゾーンを設けておき、この予備
温調ゾーンで被印刷基板の温度を調節した後、この基板
を印刷部に移動して、印刷部にある基板テーブルに保持
させるようにすることは、被印刷基板を加熱又は冷却し
てから印刷することが望ましい場合に、短時間で被印刷
基板の温度を所望温度にすることができるので、印刷ま
でに要する時間の短縮化を可能にする作用がある。Further, by controlling the temperature of the substrate table in the printing section to adjust the temperature of the substrate to be printed held on the substrate table to a predetermined temperature, the position of the substrate to be printed held on the substrate table is detected. By doing so, even if the size of the substrate to be printed changes greatly depending on the temperature, it is possible to perform alignment with respect to the substrate to be printed at a predetermined temperature, so that the positional deviation of the substrate to be printed at the time of printing can be further reduced. It has the function of enabling printing. Further, a preliminary temperature control zone is provided outside the printing unit, the temperature of the substrate to be printed is adjusted in this preliminary temperature control zone, and then this substrate is moved to the printing unit and held on the substrate table in the printing unit. By doing so, when it is desirable to print after heating or cooling the substrate to be printed, the temperature of the substrate to be printed can be brought to the desired temperature in a short time, so the time required for printing can be shortened. There is an action that enables.
【０００９】[0009]
【発明の実施の形態】本発明の実施の形態を図面を参照
して説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings.
【００１０】図１〜図３は本発明の実施の形態を説明す
るための側面図である。本発明の基板へのスクリーン印
刷方法では、図１に示すように、被印刷基板１に回路パ
ターン等をスクリーン印刷する場所である印刷部２に、
印刷部２以外の場所から被印刷基板１をホイスト等から
なるワーク搬入装置（図示せず）を用いて搬入する。次
いで、印刷部２にある基板テーブル３に備えつけている
基板保持部材４で被印刷基板１を保持し、固定する。な
お、基板保持部材４に代えて吸着等の手段によって基板
テーブル３に被印刷基板１を固定してもよい。1 to 3 are side views for explaining an embodiment of the present invention. In the screen printing method for a substrate of the present invention, as shown in FIG. 1, a printing unit 2 which is a place for screen printing a circuit pattern or the like on a substrate 1 to be printed
The substrate 1 to be printed is loaded from a place other than the printing unit 2 by using a work loading device (not shown) including a hoist or the like. Next, the substrate 1 to be printed is held and fixed by the substrate holding member 4 provided on the substrate table 3 in the printing unit 2. The printed substrate 1 may be fixed to the substrate table 3 by means of suction or the like instead of the substrate holding member 4.
【００１１】次いで、固定された被印刷基板１の位置
を、移動可能な視覚認識部５による、基板テーブル３の
上方の位置からの撮像情報に基づいて検出する。より具
体的には、視覚認識部５として例えばＣＣＤ（電荷結合
素子）カメラを使用し、被印刷基板１の表面に付された
２つ以上の所定形状のマークをＣＣＤカメラで捕らえ、
マークの位置を制御部（図示せず）で読み取って、固定
された被印刷基板１の位置を検出する。ＣＣＤカメラの
数はマーク数と同数あれば被印刷基板１の位置の認識が
短時間でできるので好ましいが、ＣＣＤカメラを移動さ
せて認識すべきマークを捕らえるようにすれば１台であ
ってもよい。また、ＣＣＤカメラは被印刷基板１を搬入
・搬出するワーク搬入装置に取り付けておくことも可能
である。そして、検出した被印刷基板１の位置と、予め
設定している所定位置との、Ｘ軸、Ｙ軸方向のずれ量及
び偏角θを制御部（図示せず）で算出してずれ量を検出
する。検出したずれ量だけ位置補正するために、基板テ
ーブル３の位置を移動して、被印刷基板１の位置を予め
設定している所定位置に合わせる。なお、基板テーブル
３はＸ軸、Ｙ軸方向への移動及び偏角θの補正のための
移動がモータ駆動によって行える構造になっている。ま
た、基板テーブル３の上方にはスクリーン版６を配置し
ている。Next, the position of the fixed substrate 1 to be printed is detected by the movable visual recognition unit 5 based on the image pickup information from the position above the substrate table 3. More specifically, for example, a CCD (charge coupled device) camera is used as the visual recognition unit 5, and two or more marks having a predetermined shape attached to the surface of the printed substrate 1 are captured by the CCD camera.
The position of the mark is read by a controller (not shown) to detect the position of the printed substrate 1 fixed. If the number of CCD cameras is the same as the number of marks, the position of the printed substrate 1 can be recognized in a short time, which is preferable. However, if the CCD camera is moved so as to catch the mark to be recognized, even if only one is used. Good. Further, the CCD camera can be attached to a work carrying-in device for carrying in and out the printed substrate 1. Then, the control unit (not shown) calculates a deviation amount and a deviation angle θ in the X-axis and Y-axis directions between the detected position of the printed substrate 1 and a preset predetermined position, and calculates the deviation amount. To detect. In order to correct the position by the detected shift amount, the position of the substrate table 3 is moved to match the position of the substrate 1 to be printed with a predetermined position that is set in advance. The substrate table 3 has a structure in which movement in the X-axis and Y-axis directions and movement for correcting the deviation angle θ can be performed by driving a motor. A screen plate 6 is arranged above the substrate table 3.
【００１２】次いで、図２に示すように、視覚認識部５
を基板テーブル３の上方の位置から移動した後、図３に
示すように、基板テーブル３の上方に配置したスクリー
ン版６を被印刷基板１上にセットして印刷を開始する。
スクリーン版６はスクリーン枠７に固定していて、所定
の位置にセットした後印刷開始するが、スクリーン枠７
の移動方式は例えばＸ軸、Ｙ軸方向の移動はせず、高さ
方向の移動だけで行う等、位置精度を良好に保持できる
方式で行う。Next, as shown in FIG.
After moving from the position above the substrate table 3, the screen plate 6 arranged above the substrate table 3 is set on the substrate 1 to be printed and printing is started, as shown in FIG.
The screen plate 6 is fixed to the screen frame 7, and printing is started after setting it at a predetermined position.
For example, the moving method is not a movement in the X-axis or Y-axis direction, but a movement in the height direction only, and is a method capable of maintaining good positional accuracy.
【００１３】以上のように、この実施の形態の場合に
は、被印刷基板１の位置合わせを印刷部２において行う
ので、印刷時点での被印刷基板１の位置ずれを少なくで
き、従って、回路パターン等の形成を高精度に行うこと
ができる。As described above, in the case of this embodiment, since the printing substrate 2 is aligned with the printing unit 2, the positional deviation of the printing substrate 1 at the time of printing can be reduced, and therefore the circuit can be reduced. A pattern or the like can be formed with high accuracy.
【００１４】また、基板テーブル３の温度を制御するこ
とにより、基板テーブル３に保持した被印刷基板１の温
度を所定温度に調節した後、基板テーブル３に保持した
被印刷基板１の位置を上記の方法で検出するようにする
と、被印刷基板１の温度が予定する温度に合致させるこ
とができるので、印刷時点での被印刷基板の温度変化に
よる位置ずれをより少なくして印刷を行うことができ
る。なお、基板テーブル３の温度を制御する方法につい
ては、特に制限はなく、例えば、図１〜図３に示すよう
に冷却及び加熱ができる冷却／加熱プレート８を基板テ
ーブル３の表面に配置する等の方法で行えばよい。Further, by controlling the temperature of the substrate table 3, the temperature of the substrate to be printed 1 held on the substrate table 3 is adjusted to a predetermined temperature, and then the position of the substrate to be printed 1 held on the substrate table 3 is adjusted as described above. By performing the detection by the method described above, it is possible to match the temperature of the printed substrate 1 with the expected temperature, and thus it is possible to perform printing with less positional displacement due to temperature change of the printed substrate at the time of printing. it can. There is no particular limitation on the method of controlling the temperature of the substrate table 3, and for example, a cooling / heating plate 8 capable of cooling and heating is arranged on the surface of the substrate table 3 as shown in FIGS. You can use this method.
【００１５】また、印刷部２外の場所に予備温調ゾーン
（図示せず）を設けておき、この予備温調ゾーンで被印
刷基板１の温度を調節した後、この被印刷基板１を印刷
部２に移動して、印刷部２にある基板テーブル３に保持
させるするようにすると、被印刷基板１を加熱又は冷却
してから印刷することが望ましい場合に、短時間で被印
刷基板１の温度を所望温度にすることができるので、印
刷までに要する時間の短縮化ができる。Further, a preliminary temperature control zone (not shown) is provided outside the printing section 2, the temperature of the substrate 1 to be printed is adjusted in this preliminary temperature control zone, and then the substrate 1 to be printed is printed. When the substrate table 3 in the printing unit 2 is moved to the unit 2 and is held by the substrate table 3 in the printing unit 2, when it is desirable to heat or cool the substrate 1 to be printed before printing, the substrate 1 to be printed can be printed in a short time. Since the temperature can be set to a desired temperature, the time required for printing can be shortened.
【００１６】[0016]
【発明の効果】本発明の基板へのスクリーン印刷方法で
は、印刷部にある基板テーブルに保持した被印刷基板に
対して位置合わせを行った後、この被印刷基板を移送す
ることなしに印刷するので、被印刷基板の移送に伴って
生じる被印刷基板の位置ずれが発生しない。従って、本
発明の基板へのスクリーン印刷方法によれば、従来の方
法に比べ、印刷時点での被印刷基板の位置ずれを少なく
して印刷を行うことが可能である。According to the screen printing method for a substrate of the present invention, after the substrate to be printed held on the substrate table in the printing unit is aligned, the substrate to be printed is printed without being transferred. Therefore, the displacement of the printed substrate, which is caused by the transfer of the printed substrate, does not occur. Therefore, according to the screen printing method for a substrate of the present invention, it is possible to perform printing with less positional deviation of the substrate to be printed at the time of printing, as compared with the conventional method.
【００１７】また、請求項１に係る発明のスクリーン印
刷方法では、印刷部にある基板テーブルの温度を制御す
ることにより、基板テーブルに保持した被印刷基板の温
度を所定温度に調節した後、基板テーブルに保持した被
印刷基板の位置を検出するようにしているので、上記の
効果に加えて、被印刷基板が温度によって大きく寸法変
化する場合であっても、所定温度の被印刷基板について
位置合わせを行えるため、印刷時点での被印刷基板の位
置ずれをより少なくして印刷を行うことが可能である。In the screen printing method according to the first aspect of the present invention, the temperature of the substrate table in the printing unit is controlled to adjust the temperature of the substrate to be printed held on the substrate table to a predetermined temperature, and then the substrate is printed. Since the position of the substrate to be printed held on the table is detected, in addition to the above effect, even if the substrate to be printed has a large dimensional change due to temperature, the alignment of the substrate to be printed at a predetermined temperature is performed. Therefore, it is possible to perform the printing while reducing the positional deviation of the substrate to be printed at the time of printing.
【００１８】さらに、請求項２に係る発明のスクリーン
印刷方法では、印刷部外に予備温調ゾーンを設けてお
き、この予備温調ゾーンで被印刷基板の温度を調節した
後、この基板を印刷部に移動して、印刷部にある基板テ
ーブルに保持させるようにしているので、被印刷基板を
加熱又は冷却してから印刷することが望ましい場合に、
短時間で被印刷基板の温度を所望温度にすることがで
き、印刷までに要する時間の短縮化できるという効果も
奏する。Furthermore, in the screen printing method according to the second aspect of the present invention, a preliminary temperature control zone is provided outside the printing section , the temperature of the substrate to be printed is adjusted in this preliminary temperature control zone, and then this substrate is printed. When it is desirable to print after heating or cooling the substrate to be printed, since it is moved to the printing unit and held on the substrate table in the printing unit,
The temperature of the substrate to be printed can be set to a desired temperature in a short time, and the time required for printing can be shortened.
【図１】本発明の実施の形態を説明するための側面図で
ある。FIG. 1 is a side view for explaining an embodiment of the present invention.
【図２】本発明の実施の形態における図１に続く工程を
説明するための側面図である。FIG. 2 is a side view for explaining a step following that of FIG. 1 in the embodiment of the present invention.
【図３】本発明の実施の形態における図２に続く工程を
説明するための側面図である。FIG. 3 is a side view for explaining a step following the step of FIG. 2 in the embodiment of the present invention.
１ 被印刷基板 ２ 印刷部 ３ 基板テーブル ４ 基板保持部材 ５ 視覚認識部 ６ スクリーン版 ７ スクリーン枠 ８ 冷却／加熱プレート 1 Printed substrate 2 Printing department 3 board table 4 Substrate holding member 5 Visual recognition section 6 screen version 7 screen frame 8 Cooling / heating plate
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) B41F 15/26 B41F 15/08 B41M 1/12 H05K 3/12 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) B41F 15/26 B41F 15/08 B41M 1/12 H05K 3/12
Claims (2)
て、基板テーブルに保持した被印刷基板に印刷する基板
へのスクリーン印刷方法において、印刷部にある基板テ
ーブルに保持した被印刷基板の位置を、移動可能な視覚
認識部による、基板テーブルの上方の位置からの撮像情
報に基づいて検出し、検出した被印刷基板の位置と、予
め設定している所定位置とのずれ量に基づいて、基板テ
ーブルの位置を制御して、被印刷基板の位置合わせを行
った後、被印刷基板に印刷する基板へのスクリーン印刷
方法であって、基板テーブルの温度を制御することによ
り、基板テーブルに保持した被印刷基板の温度を所定温
度に調節した後、基板テーブルに保持した被印刷基板の
位置を検出するようにしたことを特徴とする基板へのス
クリーン印刷方法。1. Through a screen plate arranged in the printing section
Substrate to be printed on the substrate to be printed held on the substrate table
The screen printing method on the
The position of the printed circuit board held by the cable
The image recognition information from the position above the substrate table by the recognition unit.
The position of the printed substrate detected and
Based on the amount of deviation from the specified position set for
The position of the cable is controlled to align the printed board.
After printing, screen printing on the printed substrate
A method of controlling the temperature of the substrate table to adjust the temperature of the substrate to be printed held on the substrate table to a predetermined temperature, and then detecting the position of the substrate to be printed held on the substrate table. To the substrate characterized by
Clean printing method .
き、この予備温調ゾーンで被印刷基板の温度を調節した
後、この基板を印刷部に移動して、印刷部にある基板テ
ーブルに保持させることを特徴とする請求項１記載の基
板へのスクリーン印刷方法。2. A preliminary temperature control zone is provided outside the printing section, the temperature of the substrate to be printed is adjusted in the preliminary temperature control zone, the substrate is moved to the printing section, and the substrate table in the printing section is provided. The method of screen printing onto a substrate according to claim 1 , wherein the screen printing is performed on the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12833197A JP3430858B2 (en) | 1997-05-19 | 1997-05-19 | Screen printing method for substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12833197A JP3430858B2 (en) | 1997-05-19 | 1997-05-19 | Screen printing method for substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10315430A JPH10315430A (en) | 1998-12-02 |
| JP3430858B2 true JP3430858B2 (en) | 2003-07-28 |
Family
ID=14982156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12833197A Expired - Fee Related JP3430858B2 (en) | 1997-05-19 | 1997-05-19 | Screen printing method for substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3430858B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160022099A (en) * | 2014-08-19 | 2016-02-29 | 한화테크윈 주식회사 | Screen printer |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008049816A1 (en) * | 2006-10-24 | 2008-05-02 | Commissariat A L'energie Atomique | Metallizing device and method |
| JP5236334B2 (en) * | 2008-04-03 | 2013-07-17 | 富士機械製造株式会社 | Screen printing method and substrate printing apparatus with substrate temperature control function |
| CN102848709B (en) * | 2012-09-29 | 2015-05-13 | 信利光电股份有限公司 | Semi-automatic screen printing alignment method |
| JP6255871B2 (en) * | 2013-10-08 | 2018-01-10 | 株式会社村田製作所 | Ink drying apparatus, pattern printing apparatus, and pattern printing method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5783841U (en) * | 1980-11-11 | 1982-05-24 | ||
| JPS5837179U (en) * | 1981-09-04 | 1983-03-10 | 富士通株式会社 | screen printing machine |
| JPH04236494A (en) * | 1991-01-18 | 1992-08-25 | Furukawa Electric Co Ltd:The | Printer for cream solder |
| JP3017395B2 (en) * | 1994-05-12 | 2000-03-06 | 株式会社日立製作所 | Screen printing equipment |
-
1997
- 1997-05-19 JP JP12833197A patent/JP3430858B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160022099A (en) * | 2014-08-19 | 2016-02-29 | 한화테크윈 주식회사 | Screen printer |
| KR101926496B1 (en) * | 2014-08-19 | 2018-12-07 | 한화에어로스페이스 주식회사 | Screen printer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10315430A (en) | 1998-12-02 |
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