JP3428035B2 - Aluminum foil for anode of ultra-high voltage Al electrolytic capacitor - Google Patents

Aluminum foil for anode of ultra-high voltage Al electrolytic capacitor

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Publication number
JP3428035B2
JP3428035B2 JP11620192A JP11620192A JP3428035B2 JP 3428035 B2 JP3428035 B2 JP 3428035B2 JP 11620192 A JP11620192 A JP 11620192A JP 11620192 A JP11620192 A JP 11620192A JP 3428035 B2 JP3428035 B2 JP 3428035B2
Authority
JP
Japan
Prior art keywords
ppm
aluminum foil
anode
less
electrolytic capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11620192A
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Japanese (ja)
Other versions
JPH05315199A (en
Inventor
永三 礒山
雅司 坂口
豊 加藤
智明 山ノ井
忠雄 藤平
武 西崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko KK
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Showa Denko KK
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Priority to JP11620192A priority Critical patent/JP3428035B2/en
Publication of JPH05315199A publication Critical patent/JPH05315199A/en
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Publication of JP3428035B2 publication Critical patent/JP3428035B2/en
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Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、耐電圧600V程度
以上の超高圧Al電解コンデンサの陽極用アルミニウム
箔に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aluminum foil for an anode of an ultrahigh voltage Al electrolytic capacitor having a withstand voltage of about 600V or more.

【0002】[0002]

【従来の技術】中高圧用Al電解コンデンサの陽極とし
て用いられるアルミニウム箔は、静電容量の増大のため
に通常施されるエッチング処理において、トンネル状エ
ッチングピットが多数形成されるものであることが一般
に望まれている。このため、エッチングピットを増加さ
せるべく、アルミニウム箔の結晶面を(100)面にそ
ろえたり、表面にPb、Zn、Biなどの元素を集めて
濃化させることが行われている。
2. Description of the Related Art An aluminum foil used as an anode of an Al electrolytic capacitor for medium and high voltage has a large number of tunnel-shaped etching pits formed in an etching process which is usually performed to increase electrostatic capacity. Generally desired. Therefore, in order to increase the number of etching pits, the crystal plane of the aluminum foil is aligned with the (100) plane, and elements such as Pb, Zn, and Bi are collected and concentrated on the surface.

【0003】ところで、昨今、Al電解コンデンサの用
途拡大に伴い、耐電圧600V程度以上にも達するよう
な超高圧Al電解コンデンサの開発が行われている。か
かる超高圧を実現するためには、化成処理によってアル
ミニウム陽極箔に形成される誘電皮膜としての化成皮膜
の厚さを厚くする必要があり、このために皮膜欠陥を少
なくする必要がある。また、静電容量を高めるために、
従来の中高圧用よりもエッチングピットを大きくし、数
を減少させる必要がある。
By the way, recently, along with the expansion of applications of Al electrolytic capacitors, development of ultrahigh voltage Al electrolytic capacitors having a withstand voltage of about 600 V or more has been carried out. In order to realize such an ultrahigh pressure, it is necessary to increase the thickness of the chemical conversion film as a dielectric film formed on the aluminum anode foil by the chemical conversion treatment, and therefore it is necessary to reduce the film defects. Also, to increase the capacitance,
It is necessary to increase the number of etching pits and reduce the number of etching pits compared to the conventional medium and high pressure.

【0004】[0004]

【発明が解決しようとする課題】しかるに、従来中高圧
用に用いられていた前記のようなアルミニウム箔におい
ては、皮膜欠陥が多く化成皮膜の厚さに限界があり、ま
たエッチングピットが多く発生しピット間の結合を生
じ、逆に表面積を低下させるため、これをそのまま超高
圧用Al陽極箔に用いることはできなかった。
However, in the above-mentioned aluminum foil which has been conventionally used for medium and high pressure, there are many film defects and the thickness of the chemical conversion film is limited, and many etching pits are generated. Since the pits are bonded to each other and the surface area is reduced, it cannot be used as it is for the Al anode foil for ultrahigh pressure.

【0005】この発明は、かかる技術的背景に鑑みてな
されたものであって、皮膜欠陥を少なくして化成皮膜を
厚く形成することができ、かつ静電容量も大きくでき、
超高圧Al電解コンデンサ用陽極箔として用いることの
できるアルミニウム箔を提供することを目的とする。
The present invention has been made in view of the above technical background, and it is possible to reduce the film defects to form a thick chemical conversion film and to increase the capacitance.
It is an object of the present invention to provide an aluminum foil that can be used as an anode foil for an ultra high voltage Al electrolytic capacitor.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、発明者は種々実験と研究を重ねた結果、上記の皮膜
欠陥の発生、エッチングピットの増加が、従来の中高圧
用陽極箔では個々の元素の含有量が多すぎるために生じ
ていることを知見し、かかる知見に基いてこの発明を完
成し得たものである。
In order to achieve the above-mentioned object, the inventor has conducted various experiments and researches, and as a result, the above-mentioned generation of film defects and increase of etching pits were observed in conventional anode foils for medium and high pressure. The inventors have found that this occurs because the content of each element is too large, and based on such findings, the present invention has been completed.

【0007】即ち、この発明の1つは、Fe:0.1〜
14ppm、Si:0.1〜20ppm、Cu:0.1
〜20ppmを含有し、不純物としてGa:20ppm
以下、Zn:20ppm以下、B:10ppm以下に規
制され、その他の不純物元素が個々に5ppm以下に規
制され、残部アルミニウムからなることを特徴とする超
高圧Al電解コンデンサの陽極用アルミニウム箔を要旨
とするものである。
That is, one of the inventions is Fe: 0.1
14 ppm, Si: 0.1 to 20 ppm, Cu: 0.1
~ 20ppm, Ga: 20ppm as an impurity
Hereinafter, an aluminum foil for an anode of an ultra-high voltage Al electrolytic capacitor, characterized in that Zn: 20 ppm or less, B: 10 ppm or less, other impurity elements are individually regulated to 5 ppm or less, and the balance is aluminum, To do.

【0008】上記において、Fe、Si、Cuは適度な
数のエッチングピットを確保するために必要な元素であ
るが、それぞれが0.1ppm未満ではその効果に乏し
いうえ、コストアップの原因となる。一方、Fe(鉄)
14ppmを、Si(珪素)が20ppmを、Cu
(銅)が20ppmを越えると化成皮膜を形成したとき
の皮膜欠陥の原因となり、耐電圧を低下させる。特に好
ましくはFe8ppm以下、Si8ppm以下、Cu1
0ppm以下とするのが良い。
In the above, Fe, Si, and Cu are elements necessary to secure an appropriate number of etching pits, but if each of them is less than 0.1 ppm, the effect is poor and the cost increases. On the other hand, Fe (iron)
14 ppm, Si (silicon) 20 ppm, Cu
When the content of (copper) exceeds 20 ppm, it causes a film defect when a chemical conversion film is formed and lowers the withstand voltage. Particularly preferably Fe 8 ppm or less, Si 8 ppm or less, Cu1
It is preferable to set it to 0 ppm or less.

【0009】また、他の不可避的不純物元素についても
これが多く含有されると、皮膜欠陥の原因となる。具体
的にはGa(ガリウム)が20ppmを越え、Zn(亜
鉛)が20ppmを越え、B(ホウ素)が10ppmを
越え、他の不純物元素のいずれかが5ppmを越えると
皮膜欠陥を生じて高耐圧性が得られない。特に好ましく
はGa10ppm以下、Zn10ppm以下、B5pp
m以下に規制するのが良い。
Also, if a large amount of other unavoidable impurity elements is contained, it causes a film defect. Specifically, when Ga (gallium) exceeds 20 ppm, Zn (zinc) exceeds 20 ppm, B (boron) exceeds 10 ppm, and any of the other impurity elements exceeds 5 ppm, film defects occur and high breakdown voltage is reached. I can not get sex. Particularly preferably, Ga 10 ppm or less, Zn 10 ppm or less, B5 pp
It is good to regulate to m or less.

【0010】耐電圧を低下させないためには溶質原子は
少ない方が望ましいが、これら溶質原子が金属間化合物
の状態でAl中に存在すると化成皮膜欠陥となるので、
固溶状態にする必要がある。
It is desirable that the number of solute atoms is small in order not to lower the withstand voltage. However, if these solute atoms exist in Al in the state of intermetallic compounds, they cause a chemical conversion film defect.
Need to be in solid solution.

【0011】上記のFe、Si、Cu等を固溶状態にす
るために、アルミニウム箔には一般的には500℃程度
以上の温度で、あるいはFe、Si、Cu等が少ない場
合はさらに低温にて加熱される。しかし、この加熱によ
り、箔表面に不純物元素が濃化する現象を生じる。かか
る濃化現象が激しすぎると表面濃度が高くなってエッチ
ング時におけるエッチングピットの増加を招き、ピット
間の結合を生じやすくなり静電容量を低下させる。
In order to make the above Fe, Si, Cu, etc. into a solid solution state, the aluminum foil is generally kept at a temperature of about 500 ° C. or higher, or even lower if Fe, Si, Cu, etc. is small. Is heated. However, this heating causes a phenomenon in which the impurity element is concentrated on the foil surface. If the concentration phenomenon is too violent, the surface concentration becomes high, which leads to an increase in etching pits during etching, which easily causes a coupling between the pits and reduces the capacitance.

【0012】そこで、この発明では、好ましくはアルミ
ニウム箔の表面濃度を個々の元素についてそれぞれ50
ppm未満に規制するのが良く、特に20ppm以下と
するのが良い。いずれかの元素が50ppmを越えると
エッチングピットが増加しすぎて、静電容量を低下させ
る。ここに、表面濃度とは表面から深さ0.1μmまで
の表層部分における濃度をいう。かかる表面濃度を抑え
るためにも溶質原子の含有量を規制する必要がある。
Therefore, in the present invention, the surface concentration of the aluminum foil is preferably 50 for each element.
It is preferable to control the content to be less than ppm, and particularly 20 ppm or less. If either element exceeds 50 ppm, the number of etching pits increases too much, and the capacitance decreases. Here, the surface concentration means the concentration in the surface layer portion from the surface to a depth of 0.1 μm. It is necessary to regulate the content of solute atoms in order to suppress the surface concentration.

【0013】一方、エッチング時にアルミニウム箔表面
が全面溶解したり、局部的な表面溶解を生じると、有効
なピット数が少くなりすぎて静電容量を大きくすること
はできない。このため、アルミニウム箔の溶質原子の表
面濃度を上記のように50ppm未満に規制するととも
に、さらに好ましくはアルミニウム箔表面の酸化皮膜を
3.5〜8nmに規定するのが良い。この酸化膜はエッ
チング時に溶解されるが、厚さが3.5nm未満では溶
けすぎてアルミニウム箔表面の全面溶解につながり、逆
に8nmを越える厚さでは溶けにくくなって、いずれの
場合にもエッチングピットが少なすぎるものとなり、静
電容量が小さくなる。従って、酸化膜の厚さを3.5〜
8nmに規定することで、適度な数のエッチングピット
を形成でき、静電容量を大きくできる。最も好ましい酸
化膜の厚さは4〜6nmである。
On the other hand, if the entire surface of the aluminum foil is dissolved or local surface dissolution occurs during etching, the number of effective pits becomes too small and the capacitance cannot be increased. Therefore, it is preferable to regulate the surface concentration of solute atoms of the aluminum foil to less than 50 ppm as described above, and more preferably to regulate the oxide film on the surface of the aluminum foil to 3.5 to 8 nm. This oxide film is dissolved at the time of etching, but if the thickness is less than 3.5 nm, it melts too much and the entire surface of the aluminum foil is dissolved. Conversely, if the thickness exceeds 8 nm, it becomes difficult to melt. There are too few pits and the capacitance is small. Therefore, the thickness of the oxide film is 3.5 to
By defining the thickness to 8 nm, an appropriate number of etching pits can be formed and the capacitance can be increased. The most preferable oxide film thickness is 4 to 6 nm.

【0014】なお、上記のような表面濃度の測定は、ア
ルミニウム箔をNa0H溶液でエッチングしたのち、H
NO3溶液でディスマットして、溶液中の含有量を化学
分析することにより行い得る。また、酸化膜厚さの測定
はハンターホール法により行い得る。
The surface concentration as described above is measured by etching the aluminum foil with a Na0H solution and then
It can be carried out by dismounting with a NO 3 solution and chemically analyzing the content in the solution. The oxide film thickness can be measured by the Hunter Hall method.

【0015】上記のアルミニウム箔は、電解コンデンサ
陽極用電極箔としての使用に際して、拡面率向上のため
に従来と同様のエッチングを実施されたのち、化成処理
され、その表面に化成皮膜からなる誘電皮膜が形成され
る。化成処理は600V程度以上の高耐圧を得るため
に、600V以上の化成電圧にて行う必要がある。処理
液や液温等の他の条件は特に限定されることはない。
When the aluminum foil described above is used as an electrode foil for an electrolytic capacitor anode, it is subjected to the same etching as in the conventional case for the purpose of improving the surface expansion ratio, and then is subjected to a chemical conversion treatment, and a dielectric film consisting of a chemical conversion film is formed on the surface thereof. A film is formed. The chemical conversion treatment must be performed at a chemical conversion voltage of 600 V or higher in order to obtain a high breakdown voltage of about 600 V or higher. Other conditions such as the treatment liquid and the liquid temperature are not particularly limited.

【0016】[0016]

【作用】Fe、Si、Cuの含有により、エッチング処
理において適度な数の大きなエッチングピットが形成さ
れ、静電容量が増大する。また、Fe、Si、Cuの上
限値を規制し、他の不純物の含有量を規制したから、化
成皮膜欠陥が少なくなり厚さの厚い化成皮膜が形成さ
れ、耐電圧が増大する。
By containing Fe, Si, and Cu, an appropriate number of large etching pits are formed in the etching process, and the capacitance is increased. Further, since the upper limit values of Fe, Si, and Cu are regulated and the contents of other impurities are regulated, the chemical conversion film defects are reduced, a chemical conversion film having a large thickness is formed, and the withstand voltage increases.

【0017】また、表面濃度を規制したから、エッチン
グによるエッチングピットの増加が益々抑制され、さら
に静電容量が増大する。
Further, since the surface concentration is regulated, the increase of etching pits due to etching is further suppressed and the capacitance is further increased.

【0018】また、表面に形成されている酸化膜の厚さ
を3.5〜8nmに規定した場合には、アルミニウム箔
表面の全面溶解や逆の難溶解が防止され、エッチングピ
ットの過少状態が防止されて益々適度な数のエッチング
ピットが形成される。
Further, when the thickness of the oxide film formed on the surface is regulated to 3.5 to 8 nm, the entire surface of the aluminum foil or conversely difficult to dissolve is prevented and the insufficient state of the etching pits is prevented. Prevented and more and more moderate number of etching pits are formed.

【0019】[0019]

【実施例】表1に示す各種組成のアルミニウム合金を溶
解鋳造したのち、550℃以上で3時間以上の均質化処
理を実施し、さらに熱間圧延、冷間圧延、箔圧延を順次
的に実施して厚さ110μmのAl箔を製作した。
[Examples] Aluminum alloys having various compositions shown in Table 1 were melt-cast and then homogenized at 550 ° C for 3 hours or more, and then hot rolling, cold rolling, and foil rolling were sequentially performed. Then, an Al foil having a thickness of 110 μm was manufactured.

【0020】次に、上記アルミニウム箔を各種条件で高
温加熱し、表1に示すような表面濃度、酸化膜厚を有す
るAl電解コンデンサ陽極用アルミニウム箔とした。
Next, the aluminum foil was heated at a high temperature under various conditions to obtain an aluminum foil for an Al electrolytic capacitor anode having a surface concentration and an oxide film thickness as shown in Table 1.

【0021】次に、上記各アルミニウム箔に対して、5
%塩酸、80℃、直流電流密度2000A/m2、エッ
チング時間60秒で第1エッチングを行った後、5%塩
酸、95℃、直流電流密度500A/m2、エッチング
時間30分の第2段エッチングを行った。
Next, for each of the above aluminum foils, 5
% Hydrochloric acid, 80 ° C., direct current density 2000 A / m 2 , first etching time 60 seconds, then 5% hydrochloric acid, 95 ° C., direct current density 500 A / m 2 , etching time 30 minutes, second stage Etching was performed.

【0022】次に、上記のエッチド箔を5%硼酸95
℃、直流電流密度30A/m2で800Vの化成を行っ
た。
Next, the above-mentioned etched foil was treated with 5% boric acid 95%.
Formation of 800 V was performed at a temperature of 30 ° C. and a direct current density of 30 A / m 2 .

【0023】そして得られた各陽極箔の静電容量及び耐
電圧を測定したところ、表1のとおりであった。なお、
静電容量の測定は、10%硼酸アンモニウム、30℃、
120Hz中で行い、試料No7の静電容量を100と
したときの相対比にて示した。また、耐電圧の測定は化
成後の箔を100℃の純水中に30分間浸漬した後に、
5%硼酸、90℃中で直流0.3A/m2の電流を流し
たときの電圧により求めた。
The capacitance and withstand voltage of each of the obtained anode foils were measured, and the results are shown in Table 1. In addition,
The capacitance is measured with 10% ammonium borate, 30 ° C,
It was performed at 120 Hz, and the relative ratio is shown when the capacitance of Sample No. 7 is 100. The withstand voltage was measured by immersing the foil after chemical formation in pure water at 100 ° C. for 30 minutes,
It was determined by the voltage when a current of 0.3 A / m 2 in direct current was applied at 90 ° C. in 5% boric acid.

【0024】[0024]

【表1】 [Table 1]

【0025】上記表1の結果から、本発明範囲に規定さ
れた実施品(No1〜)は、耐電圧も大きく静電容量
も大きいことがわかる。また、不純物含有量が本発明範
囲を逸脱する比較品No8は皮膜欠陥が多いと推測さ
れ、耐電圧が低いものであった。また、No4の実施品
からわかるように、表面濃度が高くなると静電容量が小
さくなり、耐電圧も低くなる傾向にある。また、酸化膜
の厚さが3.5nm未満の実施品(No5)や、8nm
を越える実施品(No7)は静電容量が小さいこともわ
かる。
From the results shown in Table 1 above, it is understood that the practical products (Nos. 1 to 7 ) defined in the scope of the present invention have a large withstand voltage and a large electrostatic capacity. Comparative product No. 8 having an impurity content outside the range of the present invention was presumed to have many film defects and had a low withstand voltage. Further, as can be seen from the product of No. 4, the electrostatic capacity tends to decrease and the withstand voltage tends to decrease as the surface concentration increases. In addition, a product with an oxide film thickness of less than 3.5 nm (No. 5) or 8 nm
It can also be seen that the actual product (No. 7) exceeding the above-mentioned value has a small capacitance.

【0026】[0026]

【発明の効果】この発明は上述の次第で、Fe:0.1
〜1ppm、Si:0.1〜20ppm、Cu:0.
1〜20ppmを含有し、不純物としてGa:20pp
m以下、Zn:20ppm以下、B:10ppm以下に
規制され、その他の不純物元素が個々に5ppm以下に
規制され、残部アルミニウムからなることを特徴とする
ものであるから、化成処理により、皮膜欠陥が少なく膜
厚の厚い化成皮膜を形成することができ、その耐電圧を
増大することができる。しかも、適度な数の大きなエッ
チングピットを形成することができるから、静電容量も
大きくでき、超高圧用電解コンデンサの陽極箔として好
適なものとなし得る。
According to the present invention, depending on the above, Fe: 0.1
~1 4 ppm, Si: 0.1~20ppm, Cu: 0.
Containing 1 to 20 ppm, Ga: 20 pp as an impurity
m or less, Zn: 20 ppm or less, B: 10 ppm or less, other impurity elements are individually regulated to 5 ppm or less, and the balance is made of aluminum. A chemical conversion film having a small thickness and a large thickness can be formed, and its withstand voltage can be increased. Moreover, since an appropriate number of large etching pits can be formed, the electrostatic capacity can be increased, and it can be suitable as an anode foil of an electrolytic capacitor for ultrahigh voltage.

【0027】また、加えて表面から深さ1μmまでの表
層部分における個々の元素の濃度をそれぞれ50ppm
未満に規定した場合には、エッチングによるエッチング
ピットの増加を益々抑制でき、ひいてはさらに静電容量
を増大することができる。
In addition, the concentration of each element in the surface layer from the surface to a depth of 1 μm is 50 ppm.
When it is specified to be less than the above, the increase of etching pits due to etching can be further suppressed, and the capacitance can be further increased.

【0028】さらにまた、表面に形成されている酸化膜
の厚さを3.5〜8nmに規定した場合には、アルミニ
ウム箔表面の全面溶解や逆の難溶解を防止でき、エッチ
ングピットの過少状態を防止し得て益々適度な数のエッ
チングピットを形成でき、さらに静電容量の大きなAl
電解コンデンサの陽極を提供できる。
Furthermore, when the thickness of the oxide film formed on the surface is regulated to 3.5 to 8 nm, it is possible to prevent the entire surface of the aluminum foil from being melted and the contrary difficult to melt, so that the etching pits are in an insufficient state. Can be prevented and more and more appropriate number of etching pits can be formed.
The anode of the electrolytic capacitor can be provided.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山ノ井 智明 大阪府堺市海山町6丁224番地 昭和ア ルミニウム株式会社内 (72)発明者 藤平 忠雄 大阪府堺市海山町6丁224番地 昭和ア ルミニウム株式会社内 (72)発明者 西崎 武 大阪府堺市海山町6丁224番地 昭和ア ルミニウム株式会社内 (56)参考文献 特開 平4−124806(JP,A) 特開 平2−51211(JP,A) (58)調査した分野(Int.Cl.7,DB名) H01G 9/042 H01G 9/055 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tomoaki Yamanoi 6224, Kaiyamacho, Sakai City, Osaka Prefecture Showa Aluminum Co., Ltd. (72) Inventor Tadao Fujihira 6224, Kaiyamacho, Sakai City, Osaka Showa Aluminum Incorporated (72) Inventor Takeshi Nishizaki 6-224, Kaiyamacho, Sakai City, Osaka Prefecture Showa Aluminum Co., Ltd. (56) References JP-A-4-124806 (JP, A) JP-A-2-51211 (JP , A) (58) Fields investigated (Int.Cl. 7 , DB name) H01G 9/042 H01G 9/055

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 Fe:0.1〜14ppm、Si:0.
1〜20ppm、Cu:0.1〜20ppmを含有し、
不純物としてGa:20ppm以下、Zn:20ppm
以下、B:10ppm以下に規制され、その他の不純物
元素が個々に5ppm以下に規制され、残部アルミニウ
ムからなることを特徴とする超高圧Al電解コンデンサ
の陽極用アルミニウム箔。
1. A Fe: 0.1~ 14 ppm, Si: 0.
1 to 20 ppm, containing Cu: 0.1 to 20 ppm,
Ga: 20ppm or less as impurities, Zn: 20ppm
Hereinafter, B: an aluminum foil for an anode of an ultra-high pressure Al electrolytic capacitor, which is regulated to 10 ppm or less, other impurity elements are individually regulated to 5 ppm or less, and the balance is made of aluminum.
【請求項2】 表面から深さ1μmまでの表層部分にお
ける個々の元素の濃度がそれぞれ50ppm未満に規制
されている請求項1に記載の超高圧Al電解コンデンサ
の陽極用アルミニウム箔。
2. The aluminum foil for an anode of an ultrahigh voltage Al electrolytic capacitor according to claim 1, wherein the concentration of each element in the surface layer portion from the surface to a depth of 1 μm is regulated to less than 50 ppm.
【請求項3】 表面に形成されている酸化膜の厚さが
3.5〜8nmに規定されている請求項2に記載の超高
圧Al電解コンデンサの陽極用アルミニウム箔。
3. The aluminum foil for an anode of an ultrahigh voltage Al electrolytic capacitor according to claim 2, wherein the thickness of the oxide film formed on the surface is regulated to 3.5 to 8 nm.
JP11620192A 1992-05-08 1992-05-08 Aluminum foil for anode of ultra-high voltage Al electrolytic capacitor Expired - Lifetime JP3428035B2 (en)

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JP3428035B2 true JP3428035B2 (en) 2003-07-22

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