JP3401442B2 - Photomask data verification system - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photomask data verification system, and more particularly to a photomask data verification system for verifying photomask data in NC data which is shape data for manufacturing equipment. In particular, it relates to a photomask data verification system capable of comparing and verifying CAD data generated by a CAD system and photomask data.

[0002]

2. Description of the Related Art In a CAD system, the CAD
The CAD data handled in the system is different from the photomask data in the NC data, which is the shape data for the manufacturing apparatus, output from the CAD system, in the method of expressing the shape (geometry).

Further, the CAD data and the photomask data are different in accuracy and unit.

Therefore, in order to evaluate the correctness of the photomask data, the photomask data is visually checked, or a separate NC editing CAD system is prepared and this NC editing CAD system is used. Therefore, it was necessary to check the photomask data.

In the prior art, after the validity of the photomask data is evaluated as described above, the CAD system corrects the problematic part in the evaluation result, and then the photomask data is output again from the CAD system. However, there is a problem in that the work of evaluating the validity of the output photomask data again is repeatedly performed until the problematic point disappears.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and an object thereof is to provide a photomask early on the design side by a CAD system. An object of the present invention is to provide a photomask data verification system capable of evaluating the legitimacy of data to detect anomalies, reducing the cycle for correcting problem areas, and reducing the number of manufacturing steps. Is.

[0007]

In order to achieve the above object, the invention according to claim 1 of the present invention is a photomask data verification system for verifying photomask data output from a CAD system, First conversion means for converting CAD data into raster data, second conversion means for converting photomask data into raster data, bitmap of the raster data converted by the first conversion means, and the second Of the raster data converted by the converting means, and the raster data converted by the second converting means has a bit set, and the raster converted by the first converting means. The comparison means that creates a bitmap that shows where bits are not set in the data and the visual information created by the above comparison means. To place a bit of the bitmap is standing,
First ID assigning means for performing an ID assigning process so that portions where the bit is raised are touched vertically and horizontally as well as diagonally, and raster data converted by the first converting means. In the bit map, where bits are set, the parts that are diagonally contacted in the vertical and horizontal directions are made to have the same number, and where the bits are not set, the ID is set to 0, and a second ID assigning means is provided.
The ID assigned by the first ID assigning means to the bitmap created by the comparing means and the first ID
To the raster data converted by the conversion means of
Based on the ID assigned by the ID assigning means of
Regarding the location of the raster data converted by the first conversion means corresponding to the location around the location where the bit is raised in the bitmap created by the comparison means, 0
When there is only one ID without including, it is detected that an error of “missing window” has occurred at the place where the bit of the bitmap created by the above comparison means is raised, and a plurality of IDs other than 0 are detected. At some point, it is detected that a "short pattern" error has occurred at the bit set in the bit map created by the comparison means, and when the ID is only 0, the bit map created by the comparison means. When the error is detected by the detecting means, the detecting means for detecting the occurrence of the "island occurrence" error is displayed at the place where the bit of is raised, and the place where the error is detected is displayed. And a display means. According to a second aspect of the present invention, in a photomask data verification system for verifying photomask data output from a CAD system, first conversion means for converting CAD data into raster data, Second conversion means for converting the photomask data into raster data, the bitmap of the raster data converted by the first conversion means and the bitmap of the raster data converted by the second conversion means are compared. Then, a bit map is created which shows a portion where the bit is set in the raster data converted by the first conversion means and the bit is not set in the raster data converted by the second conversion means. At the place where the bit of the comparing means and the bit map created by the comparing means is raised, the bit is raised. The first ID allocating means for allocating the IDs so that the parts which are in contact with each other in the vertical, horizontal, and diagonal directions have the same number, and the bits of the bitmap of the raster data converted by the second converting means. Created by the second ID allocating means that performs the process of allocating IDs where 0 is set so that the parts which are in contact with each other diagonally in the vertical and horizontal directions have the same number and where the bit is not set are 0 and the above comparison means. The first I is added to the created bitmap.
The second ID is added to the ID assigned by the D assigning means and the raster data converted by the second converting means.
Based on the ID assigned by the assigning means, with respect to the location of the raster data converted by the second converting means corresponding to the location around the location where the bit of the bitmap created by the comparing means is set, When there is only one ID without including 0, it is detected that an error "occurrence of window" has occurred at the position where the bit of the bitmap created by the comparison means is raised, and 0 is detected.
When there are a plurality of IDs other than the above, it is detected that an error of "pattern division" has occurred at the place where the bit of the bitmap created by the comparing means is raised, and when the ID is only 0, the comparing means In the place where the bit of the bitmap created by
It has a detection means for detecting the occurrence of the "island deletion" error, and a display means for displaying the location where the error is detected when the detection means detects the error. It is a thing. According to a third aspect of the present invention, in a photomask data verification system for verifying photomask data output from a CAD system, first conversion means for converting CAD data into raster data, Second conversion means for converting the photomask data into raster data, the bitmap of the raster data converted by the first conversion means and the bitmap of the raster data converted by the second conversion means are compared. Then, in the raster data converted by the second conversion means, a bit is set,
Also, first comparing means for creating a bitmap showing a portion where bits are not set in the raster data converted by the first converting means, and bitmap of the raster data converted by the first converting means. And the bitmap of the raster data converted by the second conversion means are compared, and a bit is set in the raster data converted by the first conversion means, and the second
Second comparing means for creating a bitmap showing a portion where no bit is raised in the raster data converted by the converting means, and the bitmap created by the first comparing means, or the second comparing The first I which performs a process of assigning an ID so that a portion where a bit of the bitmap created by the means is in contact with a portion where the bit is raised vertically, horizontally and diagonally has the same number
The D allocation means and the bit map of the raster data converted by the first conversion means or the bit map of the raster data converted by the second conversion means are in contact with each other diagonally in the vertical and horizontal directions. The parts having the same number are assigned the same number, and the place where the bit is not set is set to 0, and the second ID assigning means for performing the ID assigning process and the bit map created by the first comparing means have the above-mentioned numbers. Created by the first comparing means based on the ID assigned by the first ID assigning means and the ID assigned by the second ID assigning means to the raster data converted by the first converting means To the location of the raster data converted by the first conversion means, which corresponds to the location around the location where the bit of the created bitmap is raised. Then, when there is only one ID without including 0, it is detected that an error of "missing window" has occurred at the place where the bit of the bitmap created by the first comparing means is raised, When there are a plurality of IDs other than 0, at the place where the bit of the bitmap created by the first comparing means stands,
When the occurrence of an error of "short pattern" is detected and the ID is only 0, an error of "occurrence of island" occurs at a position where the bit of the bitmap created by the first comparison means is set. The first detecting means for detecting that the ID has been assigned, the ID assigned by the first ID assigning means to the bitmap created by the second comparing means, and the raster converted by the second converting means. The second conversion means corresponding to the locations around the locations where the bits of the bitmap created by the second comparison means are based on the data and the IDs assigned by the second ID assignment means. One ID without including 0 for the raster data converted by
If there is only one, it is detected that an error "occurrence of a window" has occurred at the place where the bit of the bitmap created by the second comparison means is raised. If there are multiple IDs other than 0, It is detected that an error of "pattern division" has occurred at the place where the bit of the bitmap created by the second comparing means is raised, and when the ID is 0, it is created by the second comparing means. Second detecting means for detecting that an "island deletion" error has occurred at a bit-set portion of the bitmap, and the first detecting means or the second detecting means.
When an error is detected by the detection means, the display means for displaying the location where the error is detected is provided.

Therefore, according to the present invention, the CAD data and the photomask data are converted into raster data, the difference between the two is detected as an error, and the error portion is displayed, and the verification of the photomask data is performed. Will be done automatically.

For this reason, it becomes possible for the CAD system designer to evaluate the correctness of the photomask data at an early stage to detect an abnormality, reduce the cycle of correcting the problematic portion, and reduce the number of manufacturing steps. Will be able to.

Further, it is possible to compare the bitmap of the raster data converted by the first conversion means with the bitmap of the raster data converted by the second conversion means.

Further, "window omission", "short pattern", "island generation", "window generation", "pattern division"
And "erasure of islands" can be detected as an error.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of an embodiment of a photomask data verification system according to the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a block diagram showing the hardware structure of a CAD system having a photomask data verification system according to the present invention.

This CAD system uses a microcomputer to control the entire system to perform processing, an external storage device 12 for storing various data such as CAD data and photomask data described later, and processing. A memory device 14 including a read-only memory (ROM) storing programs for operating the apparatus and a random access memory (RAM) having an area as a working area of the processing apparatus, and a worker in charge 1 has an input device 16 including a keyboard and a mouse for inputting the instructions, and a display device 18 for displaying raster data converted from CAD data and photomask data.

Next, C constructed as described above
The operation of the AD system will be described.

As for the operation of this CAD system, the creation of CAD data and the creation of photomask data are the same as those of the conventional CAD system, and therefore a detailed description thereof will be omitted. Only the process of verifying the photomask data related to the implementation of the invention will be described.

That is, FIG. 2 shows a flowchart of a processing routine relating to the processing of verifying the photomask data.

When the flow chart shown in FIG. 2 is started, first, the C stored in the external storage device 12 is stored.
AD data will be read (step S20).
2).

Next, a process of selecting a figure corresponding to the figure indicated by the photomask data to be verified from the figures stored in the CAD data is performed (step S20).
4).

In the process of selecting the figures, the operator uses the input device 16 to select the figures.

Next, the CAD data corresponding to the figure selected in step S204 is converted into raster data and displayed as a bitmap on the display device 18 (step S206).

Furthermore, from the photomask data stored in the external storage device 12, the photomask data to be verified (that is, the photomask data corresponding to the figure selected in step S204) is read out. This is the case (step S208).

Next, the photomask data read in step S208 is converted into raster data and displayed as a bitmap on the display device 18 (step S).
210).

Further, C displayed on the display device 18
The raster data obtained by converting the AD data is stored in the memory device 14
Is stored in a predetermined area (step S212).

The raster data obtained by converting the photomask data displayed on the display device 18 is stored in a predetermined area of the memory device 14 (step S214).

Next, the raster data converted from the CAD data and the raster data converted from the photomask data stored in a predetermined area of the memory device 14 are read out,
Bitmap comparison processing is performed (step S216). The details of the bitmap comparison process will be described later.

Then, in the bit map comparison processing in step S216, an error portion (the error portion in this specification is the bit map comparison processing between the raster data converted from the CAD data and the raster data converted from the photomask data. At that time, it means that there is a difference between the two.)
The error location is displayed on the display device 18, and this processing routine ends.

Next, the bitmap comparison processing in step S216 will be described with reference to the conceptual diagrams of bitmaps shown in FIGS.

First, the bitmap of the raster data (hereinafter referred to as "data A") obtained by converting the CAD data displayed on the display device 18 by the processing of step S206 is shown in FIG. S210
It is assumed that the bitmap of the raster data (hereinafter referred to as "data B") obtained by converting the photomask data by the processing of FIG.

In FIG. 3 and FIG. 4 described later,
It is assumed that the bit filled with black has a bit standing and the white part has no bit standing.

Here, the bit map of the data A and the bit map of the data B are compared, and a bit is set in the data B and a bit is not set in the data A (hereinafter, a bit of the data A is set). The map is compared with the bitmap of the data B, and the part where the bit is set in the data B and the bit is not set in the data A is [B-
A]. ) Is created (FIG. 4).

The bit map shown in FIG. 4 makes it possible to obtain a portion of the photomask data that is out of the CAD data.

Contrary to the above, the bitmap of the data A and the bitmap of the data B are compared and the data A
Where the bit is set in and the bit is not set in the data B (hereinafter, the bitmap of the data A and the bitmap of the data B are compared, and the bit is set in the data A and By creating a bitmap showing [A-B] where the bit is not set in B), it is possible to obtain a part of the CAD data that was not output to the photomask data.

Next, regarding the bitmap shown in FIG.
A process of assigning an ID to the island [B-A] (where the bit is set) is performed. FIG. 5 shows a state in which an ID is assigned to the island of [B-A].

When the IDs are assigned to the islands of [B-A], the IDs are assigned so that the parts where the islands are in contact with each other diagonally in the vertical and horizontal directions have the same number.

Further, as shown in FIG. 6, a process of assigning an ID to the island of the data A is performed. Here, when allocating IDs to the islands of data A, the IDs are allocated so that the parts where the islands are in contact with each other in the vertical and horizontal directions are the same number, and "ID = 0" is set to the non-island parts. ID shall be assigned.

When a bitmap showing [AB] is created instead of the bitmap showing [BA] (FIG. 4), the process of assigning an ID to the island of data B must be performed. become.

Next, with respect to the same place in [B-A] that is in contact with the islands of the same ID diagonally in the vertical and horizontal directions, it is detected how many IDs are assigned in the data A. The photomask data is verified based on the ID state thus obtained.

For example, in [B-A], "ID =
The locations around the “2” island are d-A to E, e-A, e-E and f-A to E (see FIG. 5), and referring to the data A, “ID = 0” in the above-mentioned locations. , "ID =
IDs of "2" and "ID = 3" are obtained.

As described above, since the data A has a plurality of IDs other than 0, different islands in the data A are connected by the islands of "ID = 2" in [BA]. It is determined that it has been destroyed. Therefore, the island of "ID = 2" in [B-A]
It is recognized that a so-called "short pattern" error has occurred at that location.

In FIG. 7, according to the state of the obtained ID,
It shows what kind of error is recognized as having occurred.

That is, in the case of the comparison in [B-A], that is, in the part of the data A corresponding to the part around the island to which the ID is assigned in [B-A], one data is included without including 0. If there is only an ID, the ID in the [BA]
The islands shaken are recognized as having a so-called "window omission" error at that location.

Further, as shown in the above example, [B-
In the case of the comparison in [A], that is, when there are a plurality of IDs other than 0 for the location of the data A corresponding to the location around the island to which the ID is assigned in [BA], the relevant [B-
The island given the ID in [A] is
It is recognized that a so-called "short pattern" error has occurred.

Further, in the case of the comparison in [B-A], that is, when the ID of the data A corresponding to the part around the island to which the ID is assigned in [B-A] is 0, The islands given the ID in [B-A]
It is recognized that a so-called "island occurrence" error has occurred at that location.

As shown in FIG. 7, in the case of the comparison in [AB], that is, in the location of the data B corresponding to the location around the island to which the ID is assigned in [AB], 0
If there is only one ID without the
The island given the ID in [B] is
It is recognized that a so-called "window generation" error has occurred.

Further, as shown in FIG. 7, in the case of the comparison in [AB], that is, regarding the location of the data B corresponding to the location around the island to which the ID is assigned in [AB], 0
When there are a plurality of IDs other than the above, the island to which the ID is assigned in [AB] is so-called at that location.
It is recognized that the "pattern division" error has occurred.

Further, as shown in FIG. 7, in the case of the comparison in [AB], that is, regarding the location of the data B corresponding to the location around the island to which the ID is assigned in [AB],
When the ID is only 0, the ID in the [AB]
The islands that are shaken are recognized as having a so-called "island deletion" error at that location.

Therefore, as shown in FIG. 7, when the verification is performed both in the case of the comparison in [B-A] and in the case of the comparison in [A-B], the "window omission", It is possible to recognize six types of error states: “short pattern”, “occurrence of island”, “occurrence of window”, “pattern division”, and “erasure of island”.

In the examples shown in FIGS. 3A, 3B and 6, the island of "ID = 1" in [BA] is recognized as not an error pattern, and the island of [BA] is detected. "ID = 2"
The island of "Short pattern" is recognized as having an error, and the island of "ID = 3" in [B-A] is recognized as having an error of "missing window", and [B-A] ], The island of “ID = 4” is recognized as an error of “occurrence of island”.

Incidentally, the portion recognized as having an error by the above processing is displayed on the display device 18 as an error portion in step S218.

Further, the islands determined by the above processing to be not an error pattern (in the above example, [B-
It is an island with "ID = 1" in [A]. ),
A check will be performed at a location farther than the specified number of pixels.

Then, in this check, a process of detecting a deviation caused by the accuracy of the data as an error occurrence is performed.

Further, a portion where an error is detected by this processing is also displayed on the display device 18 as an error portion in step S218.

Although the photomask data verification system has been described as being incorporated in the CAD system in the above-mentioned embodiments, the photomask data verification system is not limited to this and is independent of the CAD system. The system may be configured.

Further, the photomask data and the CAD data are not limited to those generated by the same CAD system, and may be those generated by different systems.

[0056]

Since the present invention is configured as described above, it becomes possible on the design side of a CAD system to quickly evaluate the validity of photomask data and detect an abnormality. This has an excellent effect that the number of manufacturing steps can be reduced by reducing the cycle of correcting the location.

[Brief description of drawings]

FIG. 1 is a block configuration diagram showing a hardware configuration of a CAD system including a photomask data verification system according to the present invention.

FIG. 2 is a flowchart showing a processing routine relating to processing for verifying photomask data.

FIG. 3 is a conceptual diagram of a bitmap for explaining the operation of the photomask data verification system according to the present invention,
(A) is a bitmap of raster data (data A) obtained by converting CAD data, and (b) is a bitmap of raster data (data B) obtained by converting photomask data.

FIG. 4 compares the bitmap of data A shown in FIG. 3A with the bitmap of data B shown in FIG.
It is a bit map showing a portion ([B-A]) where the bit is raised in the data B and the bit is not raised in the data A.

5 is an illustration of I on the island of the bitmap of [BA] shown in FIG.
It is a chart showing a state in which D is allocated.

6 is a chart showing a state in which IDs are assigned to the islands of the bitmap of the data A shown in FIG. 3 (a).

FIG. 7 is a chart showing what kind of error is recognized as occurring depending on the state of the obtained ID.

[Explanation of symbols]

10 processor 12 External storage device 14 memory devices 16 Input device 18 Display

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-3-208358 (JP, A) JP-A-8-137092 (JP, A) JP-A-6-102660 (JP, A) JP-A-5- 127365 (JP, A) (58) Fields surveyed (Int.Cl. ⁷ , DB name) G03F 1/00-1/16 G06F 17/50

Claims (3)

(57) [Claims] 1. A photomask data verification system for verifying photomask data output from a CAD system, comprising: first conversion means for converting CAD data into raster data; and first conversion means for converting photomask data into raster data. The second conversion means compares the raster data bitmap converted by the first conversion means with the raster data bitmap converted by the second conversion means. Comparing means for creating a bit map showing a portion where bits are set in the converted raster data and not set in the raster data converted by the first converting means; The position where the bit is raised touches the position where the bit is raised in the vertical and horizontal directions diagonally. The first ID allocating means for allocating the IDs so that the same parts have the same number, and the place where the bit of the bitmap of the raster data converted by the first converting means stands is vertically, horizontally and diagonally. The contacting parts have the same number, and the parts where the bit is not set are set to 0, and the second ID assigning means for assigning an ID, and the bitmap created by the comparing means are assigned the first ID. The ID assigned by the ID assigning means, and the first
The raster data converted by the converting means of the second
Based on the ID assigned by the ID assigning means of
0 is assigned to a portion of the raster data converted by the first converting means, which corresponds to a portion around a bit-raised portion of the bitmap created by the comparing means.
When there is only one ID without including, it is detected that an error of “missing window” has occurred at the place where the bit of the bitmap created by the comparison means is raised, and a plurality of IDs other than 0 are detected. In some cases, it is detected that a "short pattern" error has occurred at the place where the bit of the bitmap created by the comparison means is raised, and when the ID is only 0, the bitmap created by the comparison means. The detection means for detecting the occurrence of the error "occurrence of an island" at the place where the bit of is raised, and the place where the error is detected when the detection means detects the error is displayed. A photomask data verification system having a display means. 2. A photomask data verification system for verifying photomask data output from a CAD system, comprising: first conversion means for converting CAD data into raster data; and first conversion means for converting photomask data into raster data. The second conversion means compares the raster data bitmap converted by the first conversion means with the raster data bitmap converted by the second conversion means, and the second conversion means compares the raster data bitmap by the first conversion means. Comparing means for creating a bit map showing a portion where bits are set in the converted raster data and not set in the raster data converted by the second converting means; The position where the bit is raised touches the position where the bit is raised in the vertical and horizontal directions diagonally. The first part has a first ID assigning means for performing an ID assigning process so that the same part has the same number, and the place where the bit of the bitmap of the raster data converted by the second converting means stands is vertically, horizontally and diagonally. The contacting parts have the same number, and the parts where the bit is not set are set to 0, and the second ID assigning means for assigning an ID, and the bitmap created by the comparing means are assigned the first ID. The ID assigned by the ID assigning means and the second
The raster data converted by the converting means of the second
Based on the ID assigned by the ID assigning means of
0 is assigned to a portion of the raster data converted by the second converting means, which corresponds to a portion around a portion where the bit is raised in the bitmap created by the comparing means.
When there is only one ID without including, it is detected that an error of “occurrence of window” has occurred at the position where the bit of the bitmap created by the comparison means is raised, and a plurality of IDs other than 0 are detected. In some cases, it is detected that an error of "pattern division" has occurred at the place where the bit of the bitmap created by the comparing means is raised, and when the ID is only 0, the bitmap created by the comparing means. The detection means for detecting the occurrence of the "island deletion" error at the location where the bit is raised, and the location where the error is detected when the detection means detects the error are displayed. A photomask data verification system having a display means. 3. A photomask data verification system for verifying photomask data output from a CAD system, comprising: first conversion means for converting CAD data into raster data; and first conversion means for converting photomask data into raster data. The second conversion means compares the raster data bitmap converted by the first conversion means with the raster data bitmap converted by the second conversion means. First comparing means for creating a bit map showing a portion where bits are set in the converted raster data and where no bits are set in the raster data converted by the first converting means; Of the raster data converted by the converting means and the second conversion means A bit is set in the raster data converted by the first conversion unit and a bit is not set in the raster data converted by the second conversion unit by comparing with the bitmap of the star data. Second comparing means for creating a bitmap showing the location; a bitmap created by the first comparing means;
Alternatively, a process of assigning an ID so that a bit in the bitmap created by the second comparing means is set to have the same number in a portion in which the bit is raised, vertically, horizontally, and diagonally touches The first ID allocating means to be performed, the bitmap of the raster data converted by the first conversion means, or the bit of the bitmap of the raster data converted by the second conversion means is set up and down. The parts that are in contact with each other diagonally on the left and right should have the same number.
A second ID allocating means for allocating the ID, an ID allocated by the first ID allocating means to the bitmap created by the first comparing means, and converted by the first converting means. The first conversion corresponding to a place around a place where the bit of the bitmap created by the first comparing unit is based on the ID assigned to the raster data by the second ID assigning unit Regarding the location of the raster data converted by the means, when there is only one ID without including 0,
It is detected that a "window missing" error has occurred at a position where a bit of the bitmap created by the first comparison means is raised, and when there are a plurality of IDs other than 0, the first comparison is performed. It is detected that a "short pattern" error has occurred at a position where the bit of the bitmap created by the means has risen, and when the ID is only 0, the bit of the bitmap created by the first comparing means. "Occurrence of an island" at the place where
First detecting means for detecting that an error has occurred, the ID assigned by the first ID assigning means to the bitmap created by the second comparing means, and the second converting means. On the basis of the converted raster data and the ID assigned by the second ID assigning means, the first corresponding to locations around the bit-raised locations of the bitmap created by the second comparing means. Regarding the location of the raster data converted by the conversion means of 2, when there is only one ID without including 0,
It is detected that an error "occurrence of a window" has occurred at a position where a bit of the bitmap created by the second comparison means is raised, and when there are a plurality of IDs other than 0, the second comparison is performed. "Pattern division" at the place where the bit of the bitmap created by the method stands.
Error is detected, and when the ID is only 0, it is detected that an "island erase" error has occurred at the position where the bit of the bitmap created by the second comparing means is raised. Photomask data having a second detecting unit for displaying the error and a display unit for displaying a position where the error is detected when an error is detected by the first detecting unit or the second detecting unit. Verification system.