JP3396847B2 - Processing device and cover member used in processing device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC (integrated circuit).
It is a processing device used as a single-sided grinding device used for the backside processing of wafers with a wafer, an edge grinding device for circular thin plates, etc., and a cover member used for this processing device. The present invention relates to a cover member that covers and protects.

[0002]

2. Description of the Related Art For example, when making an IC chip,
After manufacturing an IC (integrated circuit) on one surface of a mirror-finished silicon wafer, one-side grinding of the wafer is performed as the back surface processing. In this case, first, one side of the wafer is roughly cut using a rough grindstone or the like. After rough cutting with a rough grindstone, the surface is ground with a finishing grindstone for finishing treatment.

When grinding a circular thin plate such as a semiconductor wafer, surface grinding is first performed. After the surface grinding is finished, the outer peripheral edge of the semiconductor wafer is edge-ground. Conventionally, only rough grinding has been performed for edge grinding of a wafer, but in recent years, there has been a demand for finishing grinding for edge grinding. Therefore, also in the edge grinding of the wafer, the rough grinding is first performed, and then the finish grinding is performed.

As described above, the applicant of the present invention has proposed the above-mentioned Japanese Patent Application No. 11-369037 and Japanese Patent Application No. 11-3721 as a processing device for grinding a work requiring rough grinding and finish grinding.
No. 08 has filed a patent application for a single-sided grinding machine and an edge grinding machine. Also, Japanese Patent Application No. 11-37
No. 0149 has filed a patent application for a machining center capable of performing roughing and finishing such as rough grinding and finish grinding.

Of the processing devices for performing these grinding processes,
As shown in FIG. 23, in a single-side grinding machine 110 described in Japanese Patent Application No. 11-369037, a finishing grindstone 112 is fixedly attached to a spindle 111 with bolts B and B. A grindstone mounting portion 114 for mounting the rough grindstone 113 is formed at the center of the spindle 111. Below the spindle 111, a rotary table 115 for vacuum suctioning and rotating the work W is arranged. Then, first, the rough whetstone 1 is attached to the whetstone mounting portion 114.
13 is attached and the workpiece W is roughly ground. Then, when the predetermined rough grinding is completed, the rough grindstone 1 is removed from the grindstone mounting portion 114.
13 is removed, and finish grinding is performed by the finish grindstone 112.

[0006]

By the way, in the above-mentioned one-side grinding machine, when the finishing grindstone 112 is used for finishing grinding, the rough whetstone 113 is removed from the whetstone mounting portion 114. At this time, if nothing is attached to the grindstone mounting portion 114, there is a concern that the grindstone mounting portion 114 may be contaminated by chips, lubricating oil, or the like generated during finish grinding. Therefore, it is also described that the grindstone mounting portion 114 is covered with a cap-shaped holder.

Therefore, an object of the present invention is to further embody a cap-shaped holder, perform roughing with a roughing tool attached to a tool attaching portion for attaching a tool such as a grindstone, and then perform roughing from the tool attaching portion. When the tool is removed and the finishing tool is used for finishing, a cover member is attached to the tool attaching portion to prevent the tool attaching portion from becoming dirty.

[0008]

The invention according to claim 1 of the present invention, which has solved the above-mentioned problems, is a machining apparatus for machining a workpiece by rotating a tool attached to a spindle,
A finishing processing tool is fixedly attached to the spindle, and a plurality of types of processing tools including a rough processing tool are attached.
A tool attachment part for detachably attaching the tool is formed, and a cover member for covering the tool attachment part is attachable to and detachable from the tool attachment part, and attached to the tool attachment part.
Removed the processing tool or the cover member,
Replace the cover member or other processing tool with the tool
An automatic tool changer to be mounted to the mounting portion, the processing Engineering
Comprising a housing part you accommodated immediately and the cover member, respectively
A stocker is provided, and the cover member is used for mounting the tool.
To the main body that is attached to the machine and the automatic tool changer
A cover holder part to be held;
Attached so that it can be separated from the main body
And the main body of the cover member is attached to the tool.
Separated from the main body when attached to the attachment
The cover holder housing that houses the cover holder is
It is characterized in that it is provided in the storage stocker .

[0009] In the invention according to claim 1, since the cover member for covering the tool mounting portion at the time of finishing is detachably attached to the tool attaching portion, when performing finish grinding at the finish grinding wheel fixed to the spindle Further, by attaching the cover member to the tool attaching portion, the tool attaching portion is covered by the cover member, so that the tool attaching portion can be prevented from becoming dirty. In addition, a machining work to be attached to the tool attachment part
Automatic tool changer that automatically changes tools and cover members
(ATC) is provided, so roughing to finishing
Continuously and automatically perform the processes up to
You can Furthermore, multiple types of machining including rough machining tools
This stocker is equipped with a stocker for storing tools.
Rough processing tools etc. can be removed from the stocker by an automatic tool changer etc.
Roughing by making it possible to project
Easy and smooth replacement of tools and other roughing tools
Can be done . In addition, the cover member is
It is attached to the main body and held by the automatic tool changer.
It has a cover holder part that
The cover holder is not
Remove the cover holder from the main unit as it becomes necessary
However, the stocker does not store the unnecessary cover holder.
Since the bar holder storage section is provided, it can be used during finishing.
If you do not need the cover holder,
The cover holder part can be stored in the storage part .

The invention according to claim 2 is the same as that of claim 1.
It is a cover member used in the processing equipment, and the tool attachment
To the main body that is attached to the machine and the automatic tool changer
A cover holder part to be held;
Attached so that it can be separated from the main body
It is characterized by being .

In the invention according to claim 2, the cover portion
Material is attached to the tool attachment part, and the automatic tool
It is equipped with a cover holder that is held by the replacement device.
Cover to the tool mounting part formed on the spindle.
When installing, attach the cover holder to the automatic tool changer.
The main body can be attached to the tool mounting
Can . Also, the cover holder part can be separated from the main body part.
Since it is attached so that the
When attaching the body part to the tool mounting part of the spindle
The cover holder part held by the automatic tool changer is
It will be important. Therefore, during finishing, the main body
When attached to the attached part,
It can be separated from the main body and removed .

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be specifically described below with reference to the drawings. FIG. 1 is a front view of a single-side grinding machine as a processing machine according to the present invention, and FIG.
FIG. 3 is a front view of the grinding section, and FIG. 3 is a plan view of the grinding section.
As shown in FIG. 1, the single-sided grinding machine M includes a grinding unit 1, an automatic tool changer 2 and a grindstone stocker 3.

As shown in FIG. 2, the grinding unit 1 is provided with a spindle 10 rotatable about a vertical axis Z1. As shown in FIG. 1, a housing 10A that rotatably supports the spindle 10 is attached to a moving base 12 of a spindle up-and-down moving device 11 and has a built-in spindle motor 10B that rotationally drives the spindle 10. A ball nut 13 is attached to the movable base 12. This ball nut 13 is a frame F
It is screwed into a ball screw 14 that is rotatably (rotatably) supported on the spindle 10. By rotating the ball screw 14, the spindle 10 moves up and down via the ball nut 13, the movable mount 12, and the housing 10A. ing. A motor 15 is provided in the housing frame F, a drive pulley 16 is provided on the drive shaft of the motor 15, and a driven pulley 17 is provided at the upper end of the ball screw 14. Further, the drive pulley 16 and the driven pulley 17 are connected via a belt 18. The ball screw 14 is rotated via the belt 18 by driving the motor 15.

A finishing grindstone member 20 is fixed to the lower end (tip) of the spindle 10 as shown in FIGS. 1 and 2. The finishing grindstone member 20 is provided with a ring-shaped grindstone base 21 as shown in FIG. 4A, and this ring-shaped grindstone base 21 is provided with bolts B, B having hexagonal holes as shown in FIG. By being bolted to the spindle 10 by the
Fixed to. A finishing whetstone 22 which is a hollow cylindrical cup-type finishing whetstone is fixed to the whetstone base 21. The finishing grindstone 22 has, for example, a mesh size of # 2.
A fine grindstone of about 000 is used. Also, the grindstone base 2
1, a plurality of machining liquid supply holes 21a, 21a opened so as to be located inside the finishing grindstone 22 are formed, and by the nozzle 20A held on the housing 10A side,
A machining liquid such as water is sprayed from the upper surface side of the grindstone base 21 toward the finishing grindstone 22 through the machining liquid supply holes 21a, 21a. Further, the spindle 10 is formed with a tool mounting portion 25 which is concentric with the finishing grindstone 22 and has a tapered mounting hole. A well-known clamp mechanism 28 including a draw bar 26 and balls 27, 27 ... Is provided above the tool mounting portion 25.

In the rough grinding performed by the finishing grindstone member 20 before the finish grinding, as shown in FIGS. 2 and 5, the tool mounting portion 25 is attached to and detached from the tool mounting portion 25. A possible rough whetstone holder 30 is attached. As shown in FIG. 4B, the rough whetstone holder 30 includes a tapered shank portion 31 that enters the tool mounting portion 25, and the grip portion 3 is provided in front of the shank portion 31 (downward in FIG. 2).
2 is formed. The grip portion 32 can be gripped by the holding arms 51 and 52 of the automatic tool changer 2 described later. A ring-shaped grindstone 33 is attached to the front of the grip 32, and a hollow cylindrical rough grindstone 34 is fixed to the grindstone 33. As the rough whetstone 34, for example, a rough whetstone having a mesh size of about # 600 is used. Further, a pull stud 35 is provided behind the shank portion 31. Then, as shown in FIG. 2, when the rough whetstone holder 30 is fitted into the tool mounting portion 25 and mounted, the pull stud 35 causes the draw bar 26 to contact the ball 27,
27 is pulled and clamped, and the rough whetstone holder 30 is clamped by the tool mounting portion 25 and mounted at a fixed position. At this time, with respect to the tool mounting portion 25, the back surface 32A of the grip portion 32 is in contact with the front surface 25A of the tool mounting portion 25, as shown in FIG. Therefore, the tapered surface 31A of the shank portion 31 and the tapered surface 25B of the tool mounting portion 25 in the rough whetstone holder 30 do not formally contact each other, but the tool mounting portion 25 and the rough whetstone holder 30 contact each other through a flat surface. Will be there. Of course, if the tool mounting portion 25 and the rough whetstone holder 30 are in flat contact with each other, the tapered surface 31A of the shank portion 31
There is no problem even if a part or all of the taper surface 25B of the tool mounting portion 25 is in contact with. Further, as shown in FIG. 5, the casing frame F is provided below the rough whetstone holder 30.
A nozzle 20B attached to (FIG. 1) is provided. When the rough grinding by the rough whetstone 34 is performed, a machining liquid such as water is provided on the lower side of the rough whetstone 34 to form the nozzle 20B.
Is ejected toward the rough grindstone 34.

The second rough grindstone holder 30 ', which is another roughing tool, has almost the same structure as the rough grindstone holder 30. That is, it has the outer shape shown in FIG. 4B, and is provided with the shank portion 31, the grip portion 32, the grindstone 33, and the pull stud 35. However, the rough grindstone 34 ′ attached to the grindstone base 33 is a rough grindstone having a finer roughness than the rough grindstone 34 in the rough grindstone holder 30.
Here, if the mesh size of the rough grindstone 34 in the rough grindstone holder 30 is, for example, # 600, the mesh size of the rough grindstone 34 'of the second rough grindstone holder 30' is, for example, # 1200.

Further, when performing finish grinding with the finish grindstone 22, as shown in FIG. 7, a cover member 36 which is attachable to and detachable from the tool attaching portion 25 is attached to the tool attaching portion 25. As shown in FIGS. 6 and 7, the cover member 36 includes a main body portion 37 that covers the tool attachment portion 25 and a cover holder portion 38. The main body 37 and the cover holder 38 can be separated from each other. The main body 37 is shown in FIG.
The shank portion 31 in the rough whetstone holder 30 shown in (b)
The taper surface 31A has a taper having substantially the same inclination as that of the taper surface 31A and enters the tool mounting portion 25. Further, at the rear (upper) position of the main body portion 37, the pull stud 3 having the same shape as the pull stud 35 provided on the rough whetstone holder 30.
9 is attached. As shown in FIG. 7, when the cover member 36 is fitted into the tool attachment portion 25 and attached, the pull stud 39 is attached to the draw bar 26, the ball 27,
27 is pulled and sandwiched, and the cover member 36 is clamped by the tool mounting portion 25 and mounted at a fixed position.

Further, the cover holder portion 38 is provided with a grip portion having substantially the same shape as the grip portion 32 of the rough grindstone holder 30, and is held by the holding arms 51 and 52 of the automatic tool changer 2 which will be described later. You can do it. Further, four upper protrusions 38A, 38A ... Are provided above the cover holder portion 38, and four lower protrusion portions 38B, 38B ... Are also provided below the cover holder portion 38. . On the lower surface of the main body portion 37, at the positions corresponding to the upper protruding portions 38A, 38A ... Projecting from above the cover holder portion 38, the fitting holes 37 for fitting with these upper protruding portions 38A, 38A.
A, 37A ... Are formed. These fitting holes 37
A, 37A ... The upper protruding portion 38 of the cover holder portion 38.
A, 38A ... Are fitted and separated from the main body 37
And the cover holder part 38 are integrated.

Further, on the front surface (lower surface) of the main body 37,
The collar portion 37B is formed. This collar portion 37B is shown in FIG.
As shown in, when the main body 37 is mounted on the tool mounting portion 25 of the spindle 10, the main body portion 37 is provided for making surface contact with the surface 25A of the tool mounting portion 25.

Further, below the spindle 10, as shown in FIGS. 1 and 2, a vacuum holding / rotating device for rotating a silicon wafer S, which is a workpiece to be processed according to the present invention, by vacuum suction while rotating it. 40 are provided. The vacuum holding / rotating device 40 has a housing 41, and a rotary table 42 is mounted above the housing 41 so as to be rotatable around a vertical axis.
As shown in FIG. 3, the rotary table 42 has a plurality of vacuum suction holes 42a, 42a. The vacuum suction holes 42a, 42a ... Are connected to an air pump (not shown), and a negative pressure is applied by the air pump to vacuum suction the silicon wafer S placed on the rotary table 42 as indicated by a virtual line. To hold. A motor 43 is provided below the housing 41, and the motor 43 is connected to the rotary table 42 via a rotary shaft 44. By rotating the motor 43, the rotary table 42 is rotated via the rotary shaft 44. Also, the motor 43 and the housing 4
The rotation shaft 44 between 1 is provided with a speed reducer 45 for decelerating and transmitting the rotation of the motor 43. Further, as shown in FIG. 3, the housing frame F is provided with a discharge hole 46 for discarding a waste liquid such as a grinding liquid used in the grinding process.

Further, the finishing grindstone 22 of the finishing grindstone member 20 and the rough grindstone 34 of the rough grindstone holder 30 have substantially the same diameter, and one surface of the workpiece of the present invention is ground into a circular shape. The diameter is the same as or larger than the diameter of the silicon wafer S. And the grindstones 22 and 3
When one side of the silicon wafer S is ground by means of 4, the central position of the wall thickness of the grindstones 22 and 34 is the vertical axis Z2 which is the rotation center of the silicon wafer S, as shown in FIG.
It is positioned to pass above.

On the side of the grinding unit 1 (on the left side of FIG. 1), a rough whetstone holder 30 attached to the tool attaching unit 25,
An automatic tool exchanging device 2 for exchanging with another rough whetstone holder 30 ', another machining tool, a cover member 36 and the like is provided. Further, further to the side of the automatic tool changer 2, there is provided a grindstone stocker 3 accommodating a plurality of types of machining tools including a cover member 36 and a plurality of rough grindstone holders 30.

As shown in FIGS. 8 and 9, the automatic tool changer 2 includes a holding arm 5 that pivots about a vertical axis Z3.
1, 52 are provided. These holding arms 51, 52
Respectively extend outward in the radial direction from the turning center, and holding members 53 and 54 are provided at the respective outer ends. As shown in FIG. 9, one of the holding members 53 is a holding claw 53A that can be opened and closed symmetrically about an axis along the longitudinal direction of the first holding arm 51.
It is composed of 53B. And the holding member 53
4 is closed by the holding claws 53A and 53B.
The holding portion 32 of the rough whetstone holder 30 shown in FIG. 6B and the cover holder portion 38 of the cover member 36 shown in FIG. 6 can be held. Further, the other holding member 54 also has the same configuration as the one holding member 53, and the holding arm 52
It is possible to open and close symmetrically about an axis along the longitudinal direction. Further, a holding claw is provided at the tip portion thereof.

Below the first holding arm 51, a turning table 55 for turning the first holding arm 51.
Is provided. The holding arms 51 and 52 are mounted on the turning table 55 and are movable bases 56 and 56 of the rodless cylinder.
57, respectively. By sliding the moving bases 56 and 57 of these rodless cylinders, the holding arms 51 and 52 can be moved in their longitudinal directions, respectively. This turning table 55
A motor 58 is provided at a lower position of. The motor 58 is connected to the turning table 55 via the first rotating shaft 60A and the second rotating shaft 60B. Also, the first
The rotating shaft 60A and the second rotating shaft 60B are connected by a coupling 61. Then, by operating the motor 58, the turning table 55 turns around the vertical axis Z3 via the first rotating shaft 60A and the second rotating shaft 60B. In this way, the swinging of the swing table 55 causes the holding arms 51, 52 to move.
Turns. Further, the speed reducer 59 is attached to the first rotating shaft 60A.
Is provided. With this speed reducer 59, the motor 5
The rotation speed of No. 8 is reduced to a predetermined speed.

Further, the turning table 55, the motor 58, etc. are attached to the vertical movement base 62.
Sliders 63, 63 are attached to the vertical movement base 62. The sliders 63, 63 are vertically slidable along a rail 64 fixedly attached to the housing frame F. The vertical movement base 62 can be moved in the vertical direction by operating a vertical movement cylinder (not shown). In this way, by operating the vertical movement cylinder (not shown) to move the vertical movement base 62 up and down, the holding arm 5
1, 52 and rough grindstone holder 3 held by these
0, other processing tools and the cover member 36 can be moved in the vertical direction.

The grindstone stocker 3 is arranged on the opposite side of the grinding section 1 via the automatic tool changer 2. As shown in FIG. 9, the grindstone stocker 3 includes a plurality of rough grindstone holders 30.
Processing tool storage section 65 for storing multiple types of processing tools including
., And a storage base 65 in which a cover member storage portion 66 for storing the cover member 36 is formed. The machining tool storage portions 65A, 65B, ... And the cover member storage portion 66 are both held by the turning table 55 when the holding member 53 is moved to the outer side in the radial direction of the turning table 55. It is arranged along the trajectory drawn when it is turned.
Further, the processing tool storage portions 65A, 65B, ... Store, for example, rough grindstone holders each having a rough grindstone with a different roughness, but a plurality of rough grindstone holders each having a rough grindstone with the same roughness are stored. You can also keep it.

As shown in FIGS. 8 and 9, a plurality of, in the present embodiment, three support blocks 65a, 65a, 65a are provided in the machining tool storage portion 65A. As shown in FIG. 8, these support blocks are provided on the inner side of the rough whetstone 34 of the rough whetstone holder 30 housed in the machining tool storage section 65A. These support blocks 65
The bottom of the grindstone base 33 of the rough grindstone holder 30 is supported by the a, 65a, and 65a, so that the rough grindstone holder 30
Is stored in the processing tool storage portion 65A. Therefore, the rough grindstone 34 in the rough grindstone holder 30 is in a state of floating in the air without coming into contact with the processing tool storage portion during storage, and prevents the rough grindstone 34 from being worn or damaged.

Although not shown in the figure, similar supporting blocks are also provided in the other machining tool storage portions 65B, 65C, ... Then, those processing tool storage parts 65B, 65
Even when a grindstone holder or the like is stored in C ..., the grindstone in the grindstone holder is stored in a state of floating in the air without coming into contact with the processing tool storage portion.

Further, a brushing member 70 is stored in the processing tool storage portion 65C. As shown in FIG. 10A, the brushing member 70 includes a shank portion 71,
The grip 72 and the brush base 73 are provided.
A brush 74 containing abrasive grains is provided in the. A pull stud 75 is attached to the shank portion 71. Of these, the shank portion 71, the grip portion 72, and the pull stud 75 have the same shape as the shank portion 31, the grip portion 32, and the pull stud 35 of the rough grindstone holder 30 shown in FIG. 4B. . Also, the brush stand 73
Has substantially the same shape as the grindstone base 33 of the rough grindstone holder 30, and is different in that a large number of holes (not shown) into which the nylon threads of the abrasive grain-containing brush 74 are inserted are formed. Since these holes are formed in a ring shape,
Nylon threads are not present in the central portion of the brush stand 73 in a plan view. In addition, in FIG.
For convenience of explanation, the thickness of the nylon thread N is drawn much thicker than it actually is. When the brushing member 70 is stored in the processing tool storage portion 65C, the bottom center of the brush base 73 is supported by a support block (not shown), so that the tip of the abrasive grain-containing brush 74 is placed in the processing tool storage portion. It does not rub 65C.

The abrasive grain-containing brush 74 attached to the brush base 73 is, as shown in an enlarged view in FIG.
Diamond abrasive grains DM, D on many nylon threads N, N ...
Nylon thread N is made up of M, ...
And the excellent grinding power of the diamond abrasive grain DM. The abrasive grain-containing brush 74 is manufactured, for example, as follows. First, the diamond abrasive grains DM, D are added to a solvent made of a liquid nylon raw material.
Mix M. When this solvent is extruded into a thread shape and hardened, a nylon thread N in which diamond abrasive grains are firmly fixed is produced. By collecting a plurality of nylon yarns N, N produced in this manner and attaching them to the brush base 73, the abrasive grain-containing brush 74 is produced.

Incidentally, in place of the rough grindstone holder 30 and the brushing member 70, it is possible to store an etching tool or a polishing tool having a polishing pad in the processing tool storage portions 65A, 65B, ... it can.

The cover member 36 is housed in the cover member housing portion 66. When the cover member 36 is stored in the cover member storage portion 66, the cover member 3
6, the lower protrusion 38 provided on the cover holder 38 of FIG.
B, 38B ... Stand up.

Further, when the first holding arm 51 moves to the outer side of the turning table 55 in the radial direction,
A cover holder accommodating portion 67 is provided inside the trajectory drawn when the holding member 53 is turned by the turning table 55 in the radial direction. This cover holder storage section 6
The cover holder portion 38 of the cover member 36, which is unnecessary when the finishing grindstone member 20 performs the finish grinding in the grinding unit 1, is accommodated in the grinder 7. When the cover holder housing 38 is housed in the cover holder housing 67, the lower protrusions 38B, 38B ... Are inserted into positioning grooves (not shown) formed in the cover holder housing 67. Further, the positional relationship between the fitting holes 37A, 37A ... Formed in the main body portion 37 attached to the tool attaching portion 25 and the upper protruding portions 38A, 38A. Has been

The operation / action of the single-side grinding machine M having the above construction will be described. When performing one-side grinding by the one-side grinding device M, the vacuum holding / rotating device 4 in the grinding unit 1
A silicon wafer S, which is to be ground as a workpiece, is carried and placed on a rotary table 42 of 0 by a robot (not shown). The silicon wafer S placed on the rotary table 42 is vacuum-sucked by negative pressure from the vacuum suction holes 42a, 42a ... Of the rotary table 42.
One surface of the silicon wafer S is first roughly ground by a rough grindstone, then roughly grinded by a rough grindstone having a different roughness, and finally, by a finish grindstone. When finishing grinding is performed by the finishing whetstone member 20, the tool mounting portion 25 is kept so that the tool mounting portion 25 is not contaminated with grinding liquid or the like.
A cover member 36 is attached to the.

In this working process, the rough grindstone holder 30 used for the first rough grinding is the spindle 10.
It is attached to the tool attachment portion 25 formed on the. Now, assuming that the rough grindstone holder 30 is stored in the processing tool storage portion 65A of the grindstone stocker 3, the rough grindstone holder 30 is attached to the tool mounting portion 25 and rough grinding is performed as shown in FIG. It will be described with reference to the flowchart shown in FIG.

FIG. 11 is a flowchart showing the steps until the rough grindstone holder 30 is mounted on the tool mounting portion 25 of the spindle 10 and the rough grinding is started. FIG. 12 is a side view of the step, and FIG. FIG. 6 is a process diagram showing the process in a plan view.

The first holding arm 51 for holding the rough grindstone holder 30 in the automatic tool changer 2 has a rough grindstone holder accommodated in the first machining tool accommodating portion 65A as shown by a phantom line in FIG. 12 (a). It is at the same height position as the grip portion 32 of 30. At this time, the holding member 53 of the first holding arm 51 is open. From this state, the first grindstone holder 30 used for rough grinding in the grindstone stocker 3 is stored.
The first holding arm 51 is pivotally moved to the position of the processing tool storage portion 65A (S1). Here, the first holding arm 51
When turning, the first holding arm 51 is moving inward of the turning table 55, and therefore the turning radius is small. In this way, when the first holding arm 51 pivots, the first holding member 53 does not collide with the rough whetstone holder stored in the machining tool storage portion 65C or the like. Further, since the turning radius is small, the risk of dropping the rough whetstone holder 30 held by the first holding member 53 is reduced, and the energy for turning can be reduced. Furthermore, since the second holding arm 52 is open and is moving inward of the revolving table 55, like the first holding arm 51, the machining tool storage section 65 is provided.
It is designed so that it does not collide with a rough whetstone holder stored in C or the like. Thus, the first holding arm 51
When it reaches the position of the processing tool storage portion 65A, FIG.
As indicated by the solid line in (a), the first holding member 53 is closed to hold the gripping portion 32 of the rough whetstone holder 30 (S2).

After holding the grip portion 32 of the rough whetstone holder 30, the vertical movement base 62 is raised to the position shown by the solid line in FIG. 12A by the vertical movement cylinder (not shown) in the automatic tool changer 2. Due to the elevation of the vertical movement base 62, the first holding arm 51 that holds the rough grindstone holder 30 is raised, and the rough grindstone holder 30 is pulled out from the first machining tool storage portion 65A (S3). On the other hand, the holding arm 5
In No. 2, nothing is held and the holding member 54 remains open. Next, the first moving base 56 of the rodless cylinder is operated to move the first holding arm 51 to the inner side in the radial direction of the revolving table 55 as shown by the phantom line in FIG. 12A (S4). Subsequently, as shown by the solid line in FIG. 12B, the turning table 55 is turned to move the first table.
The holding arm 51 is moved to a position corresponding to the spindle 10 (S5). Further, as shown by the solid line in FIG. 13B, the moving base 56 is moved to the outer side in the radial direction of the turning table 55, and the rough whetstone holder 30 held by the first holding member 53 is moved to the spindle in the grinding unit 1. 1
It is positioned directly below 0 (S6).

Directly below the spindle 10 is a rough whetstone holder 30.
When is positioned, the spindle 10 is lowered by the spindle vertical movement device 11 as shown by the solid line in FIG. 12B (S7). When the spindle 10 is lowered, the rough whetstone holder 3 is attached to the tool mounting portion 25 formed on the spindle 10.
0 shank portion 31 is inserted, and eventually the rough whetstone holder 3
The back surface 32A of the grip portion 32 and the front surface 25A (FIG. 7) of the tool attachment portion 25 at 0 contact each other. The back surface 32A of the grip portion 32 and the front surface 2 of the tool mounting portion 25 in the rough grindstone holder 30.
When 5A comes into contact, the draw bar 26 is pulled, and the pull mechanism 3 of the rough whetstone holder 30 is pulled by the clamp mechanism 28.
5 is clamped and the rough whetstone holder 30 is clamped (S
8). In this way, the rough whetstone holder 30 is fixedly attached to the tool attachment portion 25.

During the steps up to this point, the silicon wafer S, which is the workpiece (ground object), is transferred to the rotary table 42 of the vacuum holding / rotating device 40 by a robot arm (not shown). When the silicon wafer S is transferred and placed on the turntable 42,
A vacuum is applied from the vacuum suction holes 42a, 42a formed in the rotary table 42 by an air pump (not shown), and the silicon wafer S is vacuum-sucked to the rotary table 42.

When the rough grindstone holder 30 is clamped by the clamping mechanism 28, the first holding member 53 is opened to open the rough grindstone holder 30 as shown by a virtual line in FIG. 13 (c).
Is released (S9). Subsequently, as indicated by an imaginary line in FIG. 13C, the moving base 56 is moved to the inside of the turning table 55, and the first holding arm 51 is moved to the inside to retract (S10). First holding arm 51
12C, the lower surface of the rough grindstone 34 of the rough grindstone holder 30 of the silicon wafer S, which is the workpiece (ground object) vacuum-held by the vacuum holding / rotating device 40, as shown in FIG. Housing 10A to the position where it contacts the surface
And the spindle 10 is lowered (S11). After lowering the spindle 10, the spindle motor 10B rotates the spindle 10 around the vertical axis Z1 and
By rotating the rotary table 42 around the vertical axis Z2 by the motor 43, rough grinding of one-side grinding of the silicon wafer S is started (S12). At this time, the nozzle 20
The machining liquid is jetted from B (FIG. 5) toward the rough whetstone 34 of the rough whetstone holder 30.

Through these steps, the rough grindstone holder 30 is attached to the tool mounting portion 25, and the rough grindstone holder 30 is generally passed.
When the rough grinding by is finished, the second rough grindstone holder 30 'and the rough grindstone holder 30 having different roughness are replaced, and the rough grinding is performed again. Next, the rough grindstone holder 30 is replaced with the second rough grindstone holder 3
The process from the replacement with 0 'and the rough grinding with the second rough grindstone holder 30' will be described with reference to the flowchart shown in FIG. 14 and the process chart shown in FIG. FIG. 14 is a flow chart showing the steps until the rough grindstone holder 30 is replaced with the second rough grindstone holder 30 'and the rough grinding is carried out by the second rough grindstone holder 30'. FIG. 15 is a side view of the step. It is a figure.

While the rough grinding wheel holder 30 is performing the rough grinding in the grinding section 1, the automatic tool changing device 2 allows the rough grinding wheel holder 30 and the second rough grinding wheel holder 30 'to be quickly replaced by the second tool. The second rough grindstone holder 30 ′ is held by the holding member 54 of the holding arm 52. Therefore, first, the second holding arm 52 is pivotally moved to the position of the second machining tool storage portion 65B in which the second rough grindstone holder 30 'of the grindstone stocker 3 is stored (S21). Next, the second holding arm 52 is lowered, and the turning table 55 is moved.
To the outer side in the radial direction (S22). Then, Fig. 1
5 (a), the second holding member 54 is closed, and the second holding member 54 holds the grip portion 32 of the second rough whetstone holder 30 '(S23). After holding the grip portion 32 of the rough whetstone holder 30 ', as shown in Fig. 15 (a), the second holding arm 52 is moved up and moved inward in the radial direction of the turning table 55 (S24). Through the steps up to this point, the second rough whetstone holder 30 'is held by the second holding arm 52. By the second holding arm 52, the second rough whetstone holder 3
After holding 0 ', the first holding arm 51 is moved to the spindle 1
The rough whetstone holder 3 is rotated to the 0 position (S25).
Wait until the rough grinding by 0 is completed.

When the predetermined rough grinding by the rough grindstone holder 30 is completed, the rotations of the spindle 10 and the rotary table 42 are stopped (S26). Thus, when the rough grinding by the rough grindstone holder 30 is completed, as shown in FIG. 15B, the gripping portion 32 of the rough grindstone holder 30 attached to the tool mounting portion 25 of the spindle 10 becomes the first holding arm 51. Spindle 1 until almost the same height
0 is increased (S27). When the gripping portion 32 of the rough whetstone holder 30 is located at substantially the same height as the first holding arm 51, the first holding arm 51 is moved to the outside in the radial direction of the turning table 55, and the first holding member 53 is closed. The holding portion 32 of the rough whetstone holder 30 is held by the 1 holding member 53 (S
28). After holding the grip 32 of the rough whetstone holder 30,
The draw bar 26 of the spindle 10 is pushed downward to release the pull stud 35 of the rough grindstone holder 30, and the clamping of the rough grindstone holder 30 by the clamp mechanism 28 is released (S29). After unclamping the rough grindstone holder 30, the spindle 10 is raised (S3
0), pull out the rough whetstone holder 30 from the tool mounting portion 25. Further, the first holding arm 51 is moved to the inside of the turning table 55 in the radial direction (S31). When the first holding arm 51 is moved to retract the rough whetstone holder 30,
The second holding arm 52 is pivotally moved to the position of the spindle 10 to move the second rough grindstone holder 30 'to a position corresponding to the spindle 10 (S32). Then, FIG.
As shown in (c), the second holding arm 52 is moved to the outside of the revolving table 55 in the radial direction (S33), and the second rough whetstone holder 30 'is moved to a position directly below the spindle 10. Then, the spindle 10 is lowered (S3
4), the tool mounting portion 25 formed on the spindle 10
The shank portion 31 of the second rough whetstone holder 30 'is inserted into the. When the shank portion 31 is inserted, the draw bar 26 of the spindle 10 is pulled to pull the pull stud 35 of the second rough grindstone holder 30 ', and the second rough grindstone holder 30' is clamped by the clamp mechanism 28 (S35).

After the second rough grindstone holder 30 'is clamped, the second holding member 54 is opened (S36), and the second holding member 54 releases the rough grindstone holder 30'. After releasing the rough whetstone holder 30 ', the second holding arm 52 is moved to the inside of the turning table 55 in the radial direction (S37). Subsequently, as shown in FIG. 15C, the spindle 10 is lowered (S38), and the lower surface of the rough grindstone 34 in the second rough grindstone holder 30 'is brought into contact with the surface of the silicon wafer S. Then, the spindle motor 10B rotates the spindle 10 around the vertical axis Z1 and the rotary table 42 around the vertical axis Z2, and the rough grinding by the second rough grindstone holder 30 'is started (S39).

Through these steps, the second rough whetstone holder 30
Is attached to the tool attachment portion 25, and the second rough whetstone holder 3
When the predetermined rough grinding by 0 is completed, the second rough grindstone holder 30 'is removed, and the finish grinding by the finishing grindstone member 20 is performed. When performing finish grinding with the finish grindstone member 20, the cover member 36 is attached to the tool attaching portion 25 to cover the tool attaching portion 25 in order to prevent the tool attaching portion 25 from being contaminated with cutting chips or grinding liquid. It protects it from dirt.

Subsequently, the second rough grindstone holder 30 'is removed from the tool mounting portion 25, the cover member 36 is mounted on the tool mounting portion 25, and the finish grinding wheel member 20 is used for finish grinding. And it demonstrates with reference to the process drawing shown in FIG. FIG. 16 shows the steps from rough grinding by the second rough grindstone holder 30 'to finishing grindstone member 2
FIG. 17 is a process side view showing the steps up to the finish grinding by 0.

While rough grinding is being performed by the second rough grindstone holder 30 'in the grinding unit 1, the automatic tool changer 2
The second rough whetstone holder 30 'is removed, and the cover member 36
The cover member 36 is held by the first holding member 53 of the first holding arm 51 so that the cover member 36 can be attached to the tool attaching portion 25. However, the first holding member 53 holds the rough grindstone holder 30 used in the previous rough grinding. Therefore, first, turn the turning table 55,
The rough grindstone holder 30 is moved to a position corresponding to the first machining tool storage portion 65A in the grindstone stocker 3 (S4).
1). After the rough grindstone holder 30 is moved to the position corresponding to the first machining tool storage portion 65A, the first holding arm 51 is moved to the outside in the radial direction of the turning table 55 (S42).
The rough grindstone holder 30 is moved to a position directly above the first machining tool storage portion 65A. When the rough whetstone holder 30 is located right above the first machining tool storage portion 65A, the first holding arm 51
Is lowered (S43), and the rough whetstone holder 30 is stored in the first machining tool storage portion 65A. Then, the first holding member 5
3 is opened (S44), and the grip portion 32 of the first rough whetstone holder 30 is opened. In this way, the rough whetstone holder 30 is stored in the first machining tool storage portion 65A, and the first holding member 53 is in a state of not holding anything.

When the first holding member 53 is in a state of not holding anything, the first holding arm 51 is turned by the turning table 55 with the first holding member 53 open,
The first holding arm 51 is moved to the cover member storage section 66 (S45). When the first holding arm 51 is moved to the cover member storage portion 66, the first holding member 53 is closed,
The cover holder portion 38 of the cover member 36 is held (S4
6). After holding the cover member 36, as shown in FIG. 17A, the first holding arm 51 is raised (S47),
The turning table 55 is moved inward in the radial direction. In this way, the cover member 36 is held by the first holding arm 51. After the cover member 36 is held by the first holding arm 51, the second holding arm 52 is moved to the position of the spindle 10 (S48), and the completion of rough grinding by the second rough grindstone holder 30 'is waited.

When the predetermined rough grinding by the second rough grindstone holder 30 'is completed, the rotation of the spindle 10 and the rotary table 42 is stopped (S49). Thus
When the rough grinding by the second rough grindstone holder 30 'is completed, the grip portion 32 of the second rough grindstone holder 30' mounted on the tool mounting portion 25 of the spindle 10 is at the same height position as the first holding arm 51. Until spindle 10
Is increased (S50). After raising the spindle 10, the second holding arm 52 is moved to the outside in the radial direction of the revolving table 55, the second holding member 54 is closed, and the second holding member 54 holds the grip portion 32 of the second rough whetstone holder 30 ′. Is held (S51). After holding the grip portion 32 of the second rough grindstone holder 30 ', the drawbar 26 of the spindle 10 is pushed out to release the clamp of the second rough grindstone holder 30' by the clamp mechanism 28 (S52). Then, Fig. 1
As shown in FIG. 7A, the spindle 10 is raised (S53), and the rough whetstone holder 30 is pulled out from the tool mounting portion 25. Further, the second holding arm 52 is attached to the turning table 5
It is moved inward in the radial direction of 5 (S54). After the second holding arm 52 is moved to retract the second rough grindstone holder 30 ', the first holding arm 51 is pivotally moved to the position of the spindle 10 to move the cover member 36 to a position corresponding to the spindle 10. (S55). Then, FIG.
As shown in (b), the first holding arm 51 is moved to the outer side in the radial direction of the revolving table 55 to position the cover member 36 directly below the spindle 10, and then, as shown in FIG.
As indicated by a virtual line, the spindle 10 is lowered (S56). When the spindle 10 descends, the main body portion 37 of the cover member 36 is inserted into the tool attachment portion 25 formed on the spindle 10. When the main body portion 37 of the cover member 36 is inserted into the tool attachment portion 25, the draw bar 26 is pulled and the pull stud 39 of the cover member 36 is constrained to clamp the cover member 36 by the clamp mechanism 28 (S57).

After the cover member 36 is clamped, the spindle 10 is raised again (S58). Spindle 10
Is raised, the main body 37 of the cover member 36 clamped by the clamp mechanism 28 is raised together with the spindle 10. While the main body 37 moves up, the cover member 36
Since the cover holder portion 38 is still held by the first holding member 53, the main body portion of the cover member 36 and the cover holder portion 38 are separated. The cover holder portion 38 is not necessary during finish grinding, and if it is located in the grinding portion 1, it will be an obstacle, so it is separately stored in the cover holder storage portion 67. Therefore, as shown in FIG. 17C, the first holding arm 51 holding the cover holder portion 38 is moved to the inside of the turning table 55 in the radial direction (S59). After the first holding arm 51 is moved, the turning table 55 is turned to move the first holding arm 51 to the position of the cover holder storage section 67 (S60). Then, the first holding arm 51 is lowered as it is (S61), and the cover holder part 38 is stored in the cover holder storage part 67 (S61).
62). By accommodating the cover holder part 38 in the cover holder accommodating part 67 in this way, an accident such as dropping the cover holder part 38 from the first holding arm 51 can be prevented.

On the other hand, the main body portion 37 of the cover member 36 lowers the spindle 10 attached to the tool mounting portion 25 (S63) to finish the finishing grindstone 2 of the finishing grindstone member 20.
The lower surface of 2 is brought into contact with the surface of the silicon wafer S. Then, the spindle 10 is rotated around the vertical axis Z1 and the rotary table 42 is rotated around the vertical axis Z2, so that the finishing grindstone member 2
Finish grinding by 0 is started (S64). While the finish grinding is being performed, the finish grindstone member 20 is ejected from the nozzle 20A.
The machining fluid is jetted and supplied to the finishing grindstone 22 through the machining fluid supply holes 21a, 21a ...

Thus, while the finish grinding is being performed, the cover holder 38 is housed in the cover holder housing 67 while the cover holder 38 of the cover member 36 is held by the first holding arm 51. Eventually, when the finish grinding is completed, the grinding process of the silicon wafer S is completed. Next, the steps from finish grinding by the finish grindstone member 20 to the end of the grinding step will be described with reference to the flowchart shown in FIG.

FIG. 18 is a flow chart showing the steps from finish grinding by the finish grindstone member to the end. FIG.
As shown in FIG. 4, when the finish grinding by the finish grindstone member 20 is completed, the cover holder portion 38 of the cover member 36 is attached to the main body portion 37, and the main body portion 37 is attached to the tool attachment portion 25.
Remove from. Therefore, just before the finishing grindstone by the finishing grindstone member 20 is finished, the cover holder portion 38
Is moved to the position of the spindle 10. Therefore, first, the first holding arm 51 holding the cover holder portion 38 is raised (S71), and the cover holder portion 38 is taken out from the cover holder storage portion 67. Cover holder part 3
When 8 is taken out, the revolving table 55 is revolved to revolve the first holding arm 51 to the position of the spindle 10 (S72). At this position, the completion of the finish grinding by the finish grindstone member 20 is waited for.

When the finish grinding by the finish grindstone member 20 is completed, the spindle 10 and the rotary table 42 are eventually used.
Is stopped (S73). After finishing the grinding by stopping the rotation of the spindle 10 and the rotary table 42, the spindle 10 is raised to a position higher than the first holding arm 51 (S74). Next, the first holding arm 51 is moved to the outside in the radial direction of the turning table 55,
The cover holder portion 38 of the cover member 36 is positioned directly below the main body portion 37 (S75). Subsequently, the spindle 10 is lowered (S76), and the main body portion 37 is attached to the cover holder portion 38 of the cover member 36. Then, the draw bar 26 of the spindle 10 is pushed out to release the restraint of the pull stud 39, and the clamp of the main body portion 37 of the cover member 36 by the clamp mechanism 28 is released (S77). After releasing the clamp, the spindle 10 is raised (S78), and the main body portion 37 of the cover member 36 is pulled out from the tool attachment portion 25 of the spindle 10.
Then, the first holding arm 51 is moved to the inside of the turning table 55 in the radial direction (S79). Then, the swivel table 55 is swung to move the first holding arm 51 to the cover member storage portion 66 (S80). Furthermore, the cover holder part 38 of the cover member 36 is inserted into the cover member storage part 66 by moving the first holding arm 51 to the outside in the radial direction of the turning table 55 and lowering the first holding arm 51 (S81). ). Then, by opening the first holding member 53, the cover member 36 is stored in the cover member storage portion 66 (S82) . After that, the negative pressure from the air pump (not shown) in the vacuum holding and rotating device 40 in the grinding unit 1 disappears, the vacuum between the rotary table 42 and the silicon wafer S is broken, and the silicon wafer S becomes removable. Then, the silicon wafer S ground by a robot arm (not shown) is taken out and is transferred to a cleaning device or the like in which the next cleaning step is performed. Thus, a series of grinding steps from rough grinding to finish grinding are completed.

After the finish grinding is finished, the surface of the silicon wafer S that has been finish ground can be brushed by the brushing member 70. When brushing with the brushing member 70, the second holding member 54 of the second holding arm 52 holds the brushing member 70 when the main body 37 of the cover member 36 attached to the tool attachment 25 is removed. Hold 72. Then, the cover member 36 is attached to the first holding arm 5
When the holding member 53 of No. 1 holds and stores it in the cover member storage unit 66, the shank portion 71 of the brushing member 70 is attached to the tool attachment portion 25. Then spindle 10
The pulling stud 75 of the brushing member 70 is constrained by the clamp mechanism 28 provided in the above to clamp the brushing member 70.

In this state, the second holding arm 52 is retracted, the spindle 10 is processed, and the abrasive grain-containing brush 74 of the brushing member 70 is brought into contact with the silicon wafer S. In this state, the brushing process can be performed while rotating the silicon wafer S on the spindle 10 and the rotary table 42. By performing this brushing treatment, the flexibility of the nylon yarn N and the excellent grinding force of the diamond abrasive grains DM make the ground surface of the silicon wafer S a more advanced surface state with no bending and high bending strength. can do. Further, the post-processing steps such as etching and polishing and chemicals are not required, and the surface of the workpiece can be easily cleaned.

Next, a second embodiment of the present invention will be described. In this embodiment, the edge grinding device EM shown in FIGS. 19 and 20 is used as the processing device. Figure 1
As shown in FIG. 9, an edge grinding device EM as a processing device according to the present invention includes a base 80, and the base 80 is provided with an edge grinding section 81. Further, above the edge grinding section 81, a wafer holding device 90 for sucking and holding the silicon wafer S made of a circular thin plate is arranged.

The edge grinding section 81 is provided with a spindle 82 with its axis horizontal.
A motor 83 for rotating the spindle 82 is provided in the rear of the. A ring-shaped grindstone base 84A of a finishing grindstone member 84 is fixedly attached to the spindle 82 with bolts B and B (FIG. 21). A disc-shaped finishing grindstone 84B is fixed to the grindstone base 84A. This finishing whetstone 84B has a mesh size of #
A fine grindstone of about 2000 is used.

The spindle 82 is provided with a tool mounting portion 85 which is concentric with the finishing grindstone member 84 and is formed of a tapered mounting hole. A well-known pull stud clamp mechanism 86 including a draw bar 86A and balls 86B, 86B ... Is provided behind the tool attachment portion 85. The spindle 82 is movable in a direction along the axis of rotation of the spindle 82 (left-right direction in FIG. 19) and in a horizontal direction orthogonal to the axis of rotation (direction penetrating the plane of FIG. 19).

A rough grindstone holder 87 is attached to the tool attachment portion 85 when performing rough grinding. The rough whetstone holder 87 has a tapered shank portion 87A that is inserted into the tool attachment portion 85, and a grip portion 87B is formed in front of the shank portion 87A (left side in FIG. 19).
A disk-shaped rough whetstone 8 is provided in front of the grip portion 87B.
7C is formed. As the rough whetstone 87C, for example, a rough whetstone having a mesh size of about # 600 is used. Further, a pull stud 87D is provided behind the shank portion 87A. When the rough grindstone holder 87 is inserted into the tool mounting portion 85 and fixed by the pull stud clamp mechanism 86, the pull stud 87D is pulled by the drawbar 86A with the balls 86B, 86B, ... It is clamped by the mounting portion 85 and mounted at a fixed position.

Further, on the side of the spindle 82, an automatic tool changing device (not shown) having a holding arm is provided. The holding arm in this automatic tool changer is
The gripping portion 87B of the rough whetstone holder 87 can be held. In this automatic tool changer, the holding arms 51 and 52 of the automatic tool changer 2 used in the above embodiment are rotatable about a horizontal axis parallel to the rotary axes of the finishing grindstone member 84 and the rough grindstone holder 87. Since the used one can be used, the description thereof will be omitted.

When finishing grinding is performed by the finishing grindstone member 84, a cover member 88 is attached to the tool attaching portion 85 as shown in FIG. This cover member 88
Is the cover member 3 used in the first embodiment shown in FIG.
6, the main body portion 37 and the cover holder portion 38 are integrated with each other. Then, the taper that is substantially the same as that of the shank portion 87A of the rough whetstone holder 87 is provided, and it enters the tool mounting portion 85. A pull stud 88D provided on the rough grindstone holder 87 and having the same shape as the pull stud 87D is attached to the rear side thereof. Also,
The cover member 88 is the grip portion 8 of the rough grindstone holder 87.
7B has a grip portion having almost the same shape as that of 7B, and can be held by a holding arm in an automatic tool changer (not shown).

Further, the wafer holding device 90 has a vertical axis Z.
It has a support shaft 91 rotatable around four. Below the support shaft 91, a suction pad 92 for vacuum-sucking the silicon wafer S is provided. This suction pad 92
A plurality of air suction grooves (not shown) are formed on the lower surface of the. By making the inside of the air suction groove a negative pressure, the silicon wafer S is suction-held on the lower surface of the suction pad 92. Further, the support shaft 91 has a vertical movement mechanism 93. The vertical movement mechanism 93 includes a rail 93A and a slider 9
3B, and the slider 93B slides along the rail 93A, whereby the silicon wafer S adsorbed to the adsorption pad 92 via the support shaft 91 moves up and down. Furthermore, above the vertical movement mechanism 93, a motor 94 for rotating the support shaft 91 is provided. By driving this motor 94, the support shaft 91 rotates, and the suction pad 92 and the suction pad 9 are rotated.
The silicon wafer S sucked and held by 2 rotates around the vertical axis Z4.

The operation of the edge grinding device EM having the above configuration will be described. FIG. 21 is a process drawing showing the steps of edge grinding in the edge grinding apparatus according to this embodiment.

Before the edge grinding, the rough whetstone holder 87 is not attached to the tool attaching portion 85 of the spindle 82. From this state, the rough whetstone holder 87 is held by a holding arm (not shown), and
As shown in (a), the rough whetstone holder 87 is attached to the tool mounting portion 8
5 and the spindle 82 is moved forward. When the spindle 82 is moved forward, the shank portion 87A of the rough whetstone holder 87 is eventually inserted into the tool mounting portion 85. When the shank portion 87A of the rough grindstone holder 87 is inserted into the tool mounting portion 85, the pull stud 87D of the rough grindstone holder 87 is inserted.
Is clamped by the draw bar 86A, and the rough whetstone holder 87 is clamped and mounted on the tool mounting portion 85. When the rough grindstone holder 87 is attached to the tool mounting portion 85, as shown in FIG. 21B from the state of FIG. The spindle 82 is moved leftward until they overlap.

Edge grinding of the silicon wafer S is performed in this state. When edge-grinding the silicon wafer S, the spindle 82 is rotated and the rough grindstone 87C is rotated around the horizontal axis. At this time, the spindle 82 is repeatedly moved back and forth in the front-rear direction, and the vertical movement member (not shown) of the wafer holding device 90 is repeatedly moved up and down in synchronization with the repetition cycle. By thus moving the spindle 82 and the vertical movement member, the rough grindstone 87C moves relatively to the silicon wafer S along the edge of the silicon wafer S. In this way, the rough grinding of the edge grinding of the silicon wafer S is performed.

Thus, when the predetermined rough grinding is completed, the holding arm of the automatic tool changing device (not shown) holds the gripping portion 87B of the rough grindstone holder 87, and the spindle 82 is retracted to move the rough grindstone holder 87 to the spindle 82. Remove from the tool mounting portion 85. Then, the holding arm is rotated to rotate the spindle 82 where the rough grindstone holder 87 was located.
The cover member 88 is located at the front position of.

Then, the spindle 82 is moved forward, and the cover member 8 is attached to the tool mounting portion 85 of the spindle 82.
Insert 8 When the cover member 88 is inserted into the tool mounting portion 85, the draw bar 86A is pulled to clamp the pull stud 88D of the cover member 88 and clamp the cover member 88. After the cover member 88 is clamped, the holding arm in the automatic tool changer is retracted, and the holding arm is moved to a position that does not interfere with finish grinding.

In this state, the spindle 82 is rotated to rotate the finishing grindstone member 84 around the horizontal axis, as in the case of performing rough grinding. At this time, the spindle 82 is repeatedly moved back and forth in the front-rear direction, and the vertical movement member of the wafer holding device 90 is repeatedly moved up and down in synchronization with the repetition cycle. In this way, the edge grinding of the silicon wafer S is performed, and an edge grinding process is complete | finished.

Up to this point, in performing the edge grinding, the step of performing the rough grinding and the finish grinding once each has been described. However, depending on the conditions for manufacturing the silicon wafer S, the rough grinding may be performed twice or more. . As an example, rough grinding is performed with a rough grindstone having a mesh size of about # 600, and then rough grinding is performed with a coarse grindstone having a mesh size of about # 1200. After that, finishing grinding may be performed with a finishing grindstone having a mesh size of about # 2000.

As the cover member, in addition to the cover member used in the first embodiment, as a modified example thereof,
It is also possible to use the one shown in FIG. FIG. 22
(A), (b) is a disassembled perspective view which shows other embodiment of the cover member which concerns on this invention.

The cover member 100 shown in FIG.
It has a main body 101 and a cover holder 102.
Further, a pull stud 101D that is restrained by the clamp mechanism 28 (FIG. 2) of the spindle 10 is provided at the rear end of the main body 101. Of these, the main body 101 is made of a material such as iron that is attracted to a magnet, and the cover holder 102 generates a magnetic force to generate the main body 1.
It is composed of a magnet that attracts 01. Further, the cover holder portion 102 made of this magnet is
For example, it is formed by an electromagnet, and is capable of generating and eliminating magnetic force. In this cover member 100, when the main body 101 is attached to the tool attaching portion 25 shown in FIG. 7, when the cover holder portion 102 is held by the holding arm 51 (52) in the automatic tool changing device 2, the main body portion is generated by the magnetic force. Adsorb 101. Then, when the body portion 101 is inserted into the tool attachment portion 25, the magnetic force from the cover holder portion 102 is eliminated, so that the cover holder portion 102 can be removed from the body portion 101.

Further, the cover member 10 shown in FIG.
3 has a main body 104 and a cover holder 105. Further, the main body portion 104 in the cover holder portion 105
At a position on the side, an engagement protrusion 106 for preventing coming off which is T-shaped in a side view is provided. The engagement protrusion 106 is
Vertical axis portion 106A orthogonal to the surface of the cover holder portion 105
And a horizontal axis portion 106B orthogonal to the vertical axis portion 106A. Further, an engagement hole 107 into which the engagement protrusion 106 is fitted is cut into a surface of the main body 104 that contacts the cover holder 105. This engaging hole 10
7, an elongated engaging portion 107a is cut in the depth direction of the main body 104, and fan-shaped fitting portions 107b and 107c are formed at the terminal end of the engaging portion 107a in plan view. The length of the opening of the engaging portion 107a is slightly longer than the horizontal axis portion 106B of the engaging protrusion 106, and the length in the depth direction is substantially the same as that of the vertical axis portion 106A of the engaging protrusion 106. It is said that. Engagement hole 1
Engaging protrusions 106 sent into the top deeper engagement portion 107a of the 07, the fitting portion 107 b, is rotated approximately 90 degrees with respect to 107c, insertion part 107 b, 107c
It has reached the wall surface and is prevented from rotating, and is in a state where it does not come off in the axial direction.

The cover member 103 includes the spindle 10
When it is not attached to the tool attaching portion 25 in the above, the engaging protrusion 106 provided on the cover holder portion 105
Is fitted into an engagement hole 107 formed in the main body 104, and the cover holder 105 is attached to the main body 104. Further, when the cover member 103 is attached to the tool attaching portion 25, the main body portion 104 is attached to the tool attaching portion 25.
Then, the spindle 10 is slightly rotated while holding the cover holder portion 105 by the holding arm 51 (52). Then, the cover holder portion 105 rotates relative to the main body portion 104, and the horizontal shaft portion 106B of the engaging protrusion 106 and the engaging portion 107a of the engaging hole 107 are oriented in the same direction. By raising the spindle 10 in this state, the engagement protrusion 106 comes out of the engagement hole 107.
In this way, the cover holder portion 105 can be separated from the main body portion 104.

The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments. For example, the rough whetstone holder is not limited to once or twice, but can be replaced multiple times. Further, polishing work with a polishing cloth or polishing pad that does not require high mounting accuracy can be mounted on the tool mounting portion after finish grinding. Further, although the tool exchanging arm is used as the automatic tool exchanging device and the rough grindstone holder is taken out from the grindstone stocker, an armless magazine or the like used in a normal machining center may be used.

Further, for example, when a plurality of whetstones having the same mesh size are stored in the whetstone stocker and the same grinding is performed, the whetstones having the same mesh size can be used in order. In addition, a plurality of grindstones having the same mesh size may be prepared, and after one grindstone is worn, a new grindstone having the same mesh size may be used.

On the other hand, in each of the above embodiments, the processing device is a grinding device, and the finishing processing tool and the roughing tool are a finishing grindstone and a rough whetstone, respectively. However, for example, a machining center may be used as the processing device. When a machining center is used, as a finishing tool, in addition to a finishing (S81) grindstone, for example, a milling cutter or the like which requires high precision can be fixed to a spindle serving as a spindle. Further, as the roughing tool, in addition to a rough grindstone, a tool such as a drill which does not require relatively high precision may be attached to the tool attachment portion.

[0079]

As described above, according to the first aspect of the present invention,
According to the invention of claim 1, in the invention of claim 1, since the cover member for covering the tool mounting portion can be attached to and detached from the tool mounting portion at the time of finishing, the finishing whetstone fixed to the spindle is used for finishing. By attaching the cover member to the tool attachment portion during grinding, the tool attachment portion is covered by the cover member, so that the tool attachment portion can be kept clean. Also, attach it to the tool mounting part.
Automatic work that automatically replaces processing tools and cover members to be attached
Since a tool changer (ATC) is provided, is it rough processing?
Processes from finishing to finishing are continuously and automatically
You can continue . In addition, multiple tools including roughing tools
It was equipped with a stocker for storing several types of processing tools.
Therefore, from this stocker, rough processing tools etc. can be automatically replaced.
By making it possible to take out the table etc.
Exchange of rough processing tools with other rough processing tools
It can be done easily and smoothly . In addition, the cover member
Main unit that can be attached to the tool attachment section and automatic tool changer
It is equipped with a cover holder that is
When mounted on the tool mounting part, the cover holder part
The cover holder part can be removed from the main
Remove it, but store this unnecessary cover holder part in the stocker.
A cover holder storage part for storing is provided for finishing
When the cover holder is unnecessary during processing, the cover
It is possible to store the cover holder part in the holder storage part.
Can .

According to the invention of claim 2, the cover member
The automatic tool exchange with the main unit that is attached to the tool attachment section.
Since it has a cover holder that is held by the replacement device,
Remove the cover member from the tool mounting part formed on the spindle.
When attaching the cover holder, keep it with the automatic tool changer.
You can hold it and attach the body to the tool attachment
It Also, the cover holder can be separated from the main unit.
Since it is attached so that the main body during finishing processing
When attaching the part to the tool mounting part of the spindle,
No need for a cover holder that is held by the automatic tool changer
Become. Therefore, during finishing, the main body is
Cover holder part when it is attached to
It can be separated from the part and removed .

[Brief description of drawings]

FIG. 1 is a front view of a single-side grinding machine as a processing machine according to the present invention.

FIG. 2 is a front view of a grinding unit.

FIG. 3 is a plan view of a grinding unit.

FIG. 4A is a perspective view of a finishing grindstone member, and FIG.
It is a perspective view of a rough grindstone holder.

FIG. 5 is an enlarged front sectional view of a spindle to which a rough whetstone holder is attached.

FIG. 6 is an exploded perspective view of a cover member.

FIG. 7 is an enlarged front sectional view of a spindle to which a cover member is attached.

FIG. 8 is a front view of the automatic tool changer and the grindstone stocker.

FIG. 9 is a plan view of an automatic tool changer and a grindstone stocker.

FIG. 10A is a perspective view of a brushing member, and FIG.
Is an enlarged view of the brush.

FIG. 11 is a flowchart showing a process until a rough grindstone member is mounted on a tool mounting portion of a spindle and rough grinding is started.

FIG. 12 is a process side view showing a process of mounting a rough grindstone member on a tool mounting portion of a spindle and starting rough grinding.

FIG. 13 is a plan view showing a process of attaching a rough grindstone holder to a tool mounting portion of a spindle and starting rough grinding in plan view.

FIG. 14 is a flowchart showing a process of replacing the rough grindstone holder with the second rough grindstone holder and performing rough grinding with the second rough grindstone holder.

FIG. 15 is a side view showing a process of replacing the rough grindstone holder with the second rough grindstone holder and performing rough grinding with the second rough grindstone holder when viewed from the side.

FIG. 16 is a flowchart showing steps from rough grinding by the second rough grindstone holder to finish grinding by the finish grindstone member.

FIG. 17 is a process view of a side view of a process from rough grinding by the second rough grindstone holder to finish grinding by the finish grindstone member.

FIG. 18 is a flowchart showing steps from finish grinding by a finish grindstone member to completion.

FIG. 19 is a front view of an edge grinding device as a processing device according to the present invention.

FIG. 20 is a front view showing a state where a cover member is attached to a tool attaching portion of a spindle.

FIG. 21 is a process drawing showing a grinding process by an edge grinding device.

22A and 22B are exploded perspective views showing another embodiment of the cover member according to the present invention.

FIG. 23 is a front view of a conventional single-side grinding machine.

[Explanation of symbols]

1 grinding section 2 Automatic tool changer 3 whetstone stocker 10 spindles 20 Finishing grindstone member 21 whetstone stand 22 Finishing whetstone 25 Tool mounting part 26 Drawbar 27 balls 28 Clamp mechanism 30 rough whetstone holder 31 shank 32 grip 33 whetstone stand 34 rough whetstone 35 pull stud 36 Cover member 37 Body 38 Cover holder part 39 pull stud 40 Vacuum holding and rotating device 42 turntable 42a Vacuum suction hole 51 First Holding Arm 52 Second holding arm 53 First holding member 54 second holding member 55 swivel table 65 storage 65A 1st processing tool storage 65B 2nd processing tool storage 66 Cover member storage 67 Cover holder storage F housing frame M Single-side grinding machine (processing machine) S Silicon wafer

Front page continuation (58) Fields surveyed (Int.Cl. ⁷ , DB name) B23Q 3/155-3/157 B24B 45/00

Claims (2)

(57) [Claims] 1. A machining apparatus for machining a workpiece by rotating a tool mounted on a spindle, wherein a finishing machining tool is fixedly mounted on the spindle, and a plurality of types of rough machining tools are included. Processor
A tool attachment part for detachably attaching the tool is formed, and a cover member for covering the tool attachment part is attachable to and detachable from the tool attachment part and attached to the tool attachment part.
Remove the processing tool or the cover member,
Replacing with a cover member or other processing tool
Storage equipped with an automatic tool changer that is installed on the machine part and stores the processing tool and cover member respectively.
Is provided with a stocker , and the cover member is a book attached to the tool attachment portion.
The body part and the cover holder held by the automatic tool changer.
The cover holder part with respect to the main body part.
The cover is attached so that it can be separated.
-When the body part of the member is attached to the tool attachment part
The cover holder separated from the body.
A processing apparatus, wherein a cover holder storing section for storing is provided in the stocker . 2. Used in the processing apparatus according to claim 1.
A book that is a cover member and is attached to the tool attachment portion.
The body part and the cover holder held by the automatic tool changer.
The cover holder part is separable from the main body part.
Processing equipment characterized by being attached so that
Cover member used for storage .