JP3381129B2 - Observation area setting method and apparatus, and appearance inspection method and apparatus using the observation area setting method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an observation area setting method for setting a plurality of observation areas for inspecting the quality of the arrangement state of each part on an object having a plurality of parts arranged on its surface. The present invention relates to an apparatus, an appearance inspection method and an apparatus for inspecting the quality of the arrangement state of each part by an image obtained by capturing the object using the observation area setting method.

[0002]

2. Description of the Related Art For example, in order to inspect a soldering portion of a component mounted on a printed circuit board, the quality of the mounting state of each component is visually or visually checked by using an image obtained by capturing an image of a substrate to be inspected. Substrate inspection devices have been developed for automatic determination.

In these board inspection apparatuses, a plurality of observation areas are set on the board to be inspected before the inspection, and at the time of inspection, the image pickup apparatus is moved to the position of each set observation area. The image data in the observation area is sequentially captured. In the case of visual inspection, the captured image data in each observation region is sequentially displayed on a monitor and judged by an inspector. In the case of automatic inspection, the control unit extracts the image data of the inspection part in each observation area, and collates these image data with the registered data for judgment to check the mounting state of each component. The quality is judged.

The above observation area is set according to the mounting position of each component on the board, and the control section in the apparatus previously obtains image data obtained by imaging the board in a good mounting state. , Or the CAD data created in the process of designing the board teaches the position data of each component. This teaching data is usually the coordinates of a predetermined reference point such as the center point of each component.

FIG. 22 (1) shows an example of an observation area setting process. The image data of the non-defective substrate or C is shown.
An imaging region R corresponding to the field of view of the imaging device is set on the substrate configuration data obtained from the AD data, and then sequentially scanned.

FIG. 22 (2) shows an example of component arrangement in the image pickup area R. In the figure, reference numeral 50 denotes an area for determining whether or not each component is included in the imaging area R. This area 5
0 (hereinafter referred to as "confirmation region 50") is set inside a predetermined distance d from each side of the imaging region R, and the control unit determines the center point (indicated by X in the figure) of each component as the confirmation region. When it is included in 50, it is determined that this part is included in the imaging region R.

The control unit sequentially scans the imaging region R while checking the position and number of center points in the confirmation region 50,
The imaging region R is positioned at a position where the center points of the plurality of components are included in the confirmation region 50. The area specified by this positioning is registered in the memory as an observation area, and the setting process ends when the center points of all the components on the board are included in any of the observation areas.

In the case of the illustrated example, the confirmation area 50 includes the center points of the four parts 51, 52, 53, 54.
When the control unit performs the positioning at this point, the position and size of the imaging area R are registered as setting information of the observation area, and the parts 51, 52, 52, 53 and 54 will be stored.

[0009]

However, since the coordinates of the reference point indicating the position data of each part and the position of the inspection target portion (hereinafter referred to as "inspected portion") do not always match, the reference point is within the observation area. In some cases, even if the parts are included in, the target part of the inspection deviates from the observation area. For example, when the observation area is set in the state shown in FIG. 22 (2), looking at the parts to be inspected (indicated by the slanted lines in the drawing) of each part, all the parts to be inspected for parts 51 and 52 are Since it is included in the observation area, inspection within this observation area is possible. On the other hand, the parts 53, 5
In No. 4, a part of the inspected portion protrudes from the observation area, and it becomes impossible to perform an appropriate inspection in the observation area.

In order to solve the above problems, each observation region that has been set is checked after the observation region has been set, and if there is a part whose inspection site is outside the observation region, that observation region is checked. It is necessary to correct the set position of and to set a new observation area so that the inspected parts of all parts are included in any of the observation areas. Therefore, it takes a lot of time and labor to determine the observation area, and there is a problem that the inspection efficiency decreases as the observation area increases.

The present invention has been made in view of the above-mentioned problems, and for each part placed on the object, the visual field area required for the inspection is determined by using the data set in advance for each part type. After that, the observation area is set by using each of the determined visual field areas, so that the observation area is set appropriately and efficiently.

Another object of the present invention is to:
By confirming the observation magnification for each part on the object using the setting value of the observation magnification determined in advance for each component type, and setting the observation area using the field of view area and the data related to this observation magnification The purpose is to improve the inspection efficiency and accuracy by setting the optimum observation magnification for each part.

[0013]

The inventions of claims 1 and 2 are as follows:
An observation area setting method for setting a plurality of observation areas for inspecting the quality of the arrangement state of each component on an object having a plurality of components arranged on the surface, wherein the invention of claim 1 comprises: For each part on the object, by combining the relative position data with respect to the object and the data related to the field of view preset for the type of part to which the part belongs, the field of view of each part on the object is determined. The method is characterized in that a first step of determining and a second step of setting a plurality of observation areas on an object using each of the determined visual field areas are sequentially performed.

On the other hand, in the invention of claim 2, for each part on the object, relative position data with respect to the object and data relating to a visual field area and an observation magnification set in advance for the kind of the part to which the part belongs. And the observation magnification of each part on the object by determining the observation area of each part on the object, and the observation area and the observation magnification determined for each of the parts. And a second step of setting a plurality of observation areas in sequence.

The inventions of claims 3 to 8 relate to an apparatus for carrying out the observation area setting method of claim 1, and the observation area setting apparatus of claim 3 inspects a plurality of types of parts for each type of parts. Registration means for storing data related to the visual field necessary for the, and input means for inputting the relative position data with respect to the object type of each part on the object,
For each part on the object, after the registration data relating to the field of view corresponding to the part type input by the input means is read from the registration means, the registration data and the input relative position data are read. A field-of-view area determining means for connecting the above-mentioned fields to determine the field-of-view area of each part on the object,
An observation area setting means for setting a plurality of observation areas on the object using each of the visual field areas determined by the visual field area determination means.

According to a sixth aspect of the present invention, there is provided an observation area setting device for registering data relating to a visual field area required for inspection of a plurality of types of parts for each type of part, identification data of each part on the object and an object. Input means for inputting relative position data with respect to an object, a correspondence table for storing identification data of each part and a kind of part to which the part belongs, and input by the input means using the correspondence table Registration data relating to the field of view corresponding to the component type determined by the component type determination means for each component on the object After reading from the registration means, the registration area and the input relative position data are linked to determine the visual area of each component on the object. It comprises a constant-section, on an observation area setting means for setting a plurality of observation areas on the object using each viewing region which is determined by the viewing area determination means.

In the invention of claim 4, the input means uses design data for arranging each part on the object,
A means for inputting relative position data of each part to a part type and an object, and the invention according to claim 7 uses the design data for arranging each part on the object, It is a means for inputting the identification data of and the relative position data with respect to the object. Claim 5
In the inventions of 8 and 8, the observation area setting means sets the setting positions of the plurality of observation areas such that the center point of each observation area and the center point of a rectangular area circumscribing a visual field area included in the observation area. It includes position adjusting means for adjusting to match.

The inventions of claims 9 to 14 relate to an apparatus for carrying out the observation area setting method of claim 2. Claim 9
The observation area setting device includes a registration unit that stores data relating to a visual field area and an observation magnification required for inspection for each of a plurality of types of parts, and a part type of each part on the object and a relative to the object. Input means for inputting specific position data, and for each part on the object, after reading registration data relating to the field-of-view area and observation magnification corresponding to the type of part input by the input means from the registration means, An observation condition determining unit that determines the field of view of each component on the object and the observation magnification of each component by linking these registered data with the input relative position data, and the observation condition determining unit. Further, there is provided an observation area setting means for setting a plurality of observation areas on the object by using the view area of each component and the observation magnification thereof.

An observation area setting device according to a twelfth aspect of the present invention is a registration means for storing data relating to a visual field area and an observation magnification required for inspection for a plurality of types of parts, and for identifying each part on the object. Input means for inputting data and relative position data with respect to the object, a correspondence table for storing the identification data of each part and the kind of part to which the part belongs, and the input using the correspondence table. Component type determining means for determining a component type corresponding to the identification data of each component input by means, and for each component on the object, a visual field region corresponding to the component type determined by the component type determining means, and After reading the registration data relating to the observation magnification from the registration means, the registration data and the input relative position data are linked to each other on the object. Of the observation area and the observation magnification for each part, and a plurality of observation areas on the object by using the observation area and the observation magnification of each part confirmed by the observation condition confirmation means. The observation area setting means for setting is provided.

As the input means, the observation area setting device of claim 10 has the same structure as that of claim 4, and the observation area setting device of the invention of claim 13 has the same structure as that of claim 7. Further, the observation area setting device according to the eleventh and fourteenth aspects has the same structure as the fifth and eighth aspects as the observation area setting means .

The inventions of claims 15 and 16 relate to an appearance inspection method for inspecting the quality of the arrangement state of each component by an image obtained by imaging an object in which a plurality of components are arranged on the surface. . According to a fifteenth aspect of the invention, subsequent to the first and second steps of the first aspect, the image data of the object is captured for each observation area set in the second step and included in each observation area. It is characterized in that a third step of judging the quality of the arrangement state of each component is executed. Claim 16
In the invention of claim 2, following the first and second steps of claim 2, the image data of the object is captured for each observation area set in the second step, and each part in the observation area is individually responded. It is characterized in that the third step of judging the quality of the arrangement state of each component included in each observation region is performed by observing using the observation magnification.

The invention of claims 17 to 22 is the same as that of claim 1
5 relates to an apparatus for carrying out the visual inspection method. An appearance inspection apparatus according to claim 17 is an image pickup means for picking up an image of an object, and a registration means, an input means, a field-of-view area determination means, and an observation area setting means, each having the same configuration as that of claim 3.
Storage means for storing the setting information of each observation area set by the observation area setting means, and controlling the position of the imaging means based on each setting information stored in the storage means,
Image data input means for sequentially capturing image data of each observation region is provided.

An appearance inspection apparatus according to a twentieth aspect of the invention is an image pickup means similar to the seventeenth aspect, a registration means, an input means, a correspondence table, a component type determination means, and a visual field area determination having the same configuration as the sixth aspect. Means, each means of observation area setting means,
Storage means for storing the setting information of each observation area set by the observation area setting means, and controlling the position of the imaging means based on each setting information stored in the storage means,
Image data input means for sequentially capturing image data of each observation region is provided.

As the input means, the visual inspection apparatus according to claim 18 has the same structure as that according to claim 4 or 10,
The appearance inspection apparatus of No. 1 has the same configurations as those of claims 7 and 13, respectively. The visual inspection apparatus according to claims 19 and 22 has the same structure as that of claims 5, 8, 11, and 14 as the observation area setting means .

The inventions of claims 23 to 28 relate to an apparatus for carrying out the appearance inspection method of claim 16. Claim 2
The appearance inspection apparatus according to No. 3 includes an image pickup unit for picking up an image of an object, a registration unit having the same configuration as that of claim 9, an input unit,
Each of the observation condition determining means and the observation area setting means, a storage means for storing the setting information of each observation area set by the observation area setting means, and the imaging based on each setting information stored in the storage means Image data input means for sequentially capturing image data of each observation region by controlling the position and magnification of the means.

An appearance inspection apparatus according to a twenty-sixth aspect is an image inspection means similar to the twenty-third aspect, and a registration means, an input means, a correspondence table, a component type determination means, and an observation condition determination having the same configuration as the twelfth aspect. Means, observation area setting means, storage means for storing setting information of each observation area set by the observation area setting means, and position of the imaging means based on each setting information stored in the storage means And image data input means for controlling the magnification and sequentially taking in the image data of each observation region.

As the input means, the appearance inspection device of claim 24 has the same structure as that of claims 4, 10, and 18, and the appearance inspection device of claim 27 has the same structure as that of claims 7, 13, and 21. , Each has. Further, the appearance inspection apparatus according to claims 25 and 28 has the same configuration as that of claims 5, 8, 11, 14, 19, and 22 as the observation area setting means .

The visual inspection apparatus according to claim 29 is the same as that according to claim 17.
In addition to the above configuration, a composite image display means for combining and displaying image data for each observation area captured by the image input means and image data for identification for indicating the position of the inspection target site in each observation area is displayed. I have it. In addition to the configuration of claim 23, the visual inspection device of claim 33 is the same as that of claim 29.
And a composite image display means similar to the above.

The observation area setting means in the visual inspection apparatus according to claims 30 and 34 is the visual field area determining means or
Each field-of-view area determined on the object by the observation-condition determining means sets each observation area so as to be included in any one of the individual observation areas, and the composite image display means sets each observation area. The image data for identification of the part in which the entire visual field is included is displayed by being superimposed on the image data for each observation region.

The observation area setting means in the visual inspection apparatus according to claims 31 and 35 is the visual field area determining means or
Each field-of-view area determined on the object by the observation-condition determining means sets each observation area so as to be included in any one of the individual observation areas, and the composite image display means sets each observation area. The image data for identification is displayed on the image data in each observation area for a part that includes the entire view area, and the image portion of the part that includes a part of the view area in each observation area is displayed. It is displayed using other image data for identification.

The composite image display means in the visual inspection apparatus according to the thirty-second and thirty-sixth aspects displays the image portion of the part including a part of the visual field area in each of the observation areas with a uniform density.

[0032]

According to the first, third, and sixth aspects of the present invention, the relative position data of each part on the object to be inspected is linked with the data relating to the visual field area set for the corresponding part type, thereby The arrangement state of the visual field area of each component on the object is determined. Since the observation region is set using the confirmed visual field region, the inspected portion of each component is included in any observation region without omission. Further, in the inventions of claims 15, 17, and 20, at the time of inspection, the image pickup device is sequentially positioned according to the information set by the above method, and the image data on the object is captured.

According to the inventions of claims 2, 9 and 12, the relative position data of each part on the object to be inspected is linked with the setting data of the visual field area and the observation magnification for the corresponding part type. After the observation state of each component is fixed together with the arrangement state of the visual field region of each component on the object, the observation region is set using these fixed data. Further, in the inventions of claims 16, 23, and 26, at the time of inspection, the position and magnification of the image pickup device are sequentially controlled according to the information set by the above method, and the optimum image data for each component is captured.

According to the inventions of claims 4, 10, 18 and 24,
In the invention of claims 7, 13, 21, and 27, as relative position data of each component with respect to the component type and the target object, as identification data of each component and relative position data with respect to the target object, respectively Since the design data for deploying each part is input, the data can be input accurately and at high speed.

Claims 5, 8, 11, 14, 19, 22,
In the inventions 25 and 28, by adjusting the set position of each observation area so that the center point of this observation area and the center point of the rectangular area circumscribing the visual field area included in the area coincide with each other, The area is well-balanced within the observation area.

In the twenty-ninth and thirty-third aspects of the present invention, an image for identification indicating the position of the inspected region is displayed together with the image in each set observation region. Further, claims 30 and 3
In the invention of 4, the image for identifying the inspected part is displayed for the part in which the entire visual field is included in the observation area. Further, in the inventions of claims 31 and 35, the image portion of the part whose visual field region is out of the observation visual field is displayed by using image data for different identification. In the inventions of claims 32 and 36, the image portion is uniform. Displayed in various concentrations.

[0037]

BEST MODE FOR CARRYING OUT THE INVENTION As an example for carrying out each of the inventions of claims 1 to 8, an appearance inspection apparatus (shown in FIGS. 1 and 2) for visually determining the mounting state of components on a printed circuit board.
I will give you. As will be described later, this visual inspection apparatus uses CAD data that specifies the component type and position of each component on the board to be inspected, the visual field area and the observation magnification required for inspection for each component during teaching prior to inspection. The inspection data for setting a plurality of observation regions on the substrate is generated by using the library data set with.

[0038]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a schematic structure of a visual inspection apparatus according to an embodiment of the present invention. This visual inspection apparatus is for visually inspecting the mounting state of each component on a printed circuit board (hereinafter referred to as "inspected board") to be inspected by an inspector. It is composed of a unit 2, a light projecting unit 3, a controller 4, a substrate stage 5, a monitor 6, an input unit 7, and the like.

The stage unit 1 includes a base plate 10
A rectangular parallelepiped housing 11 having a U-shaped opening 12 on the front surface is installed on the top. This housing 1
A control device 4 and a monitor 6 are provided on the upper surface of 1.
The image pickup unit 2 and the light projecting unit 3 are integrally mounted above the opening 12.

A color television camera is used for the image pickup section 2, and a zoom lens whose magnification is manually changed is provided as an image pickup optical system. Projector 3
Is configured by arranging three annular light sources 17, 18 and 19 (shown in FIG. 2) for irradiating red light, green light, and blue light inside the hood, respectively, by the image pickup unit 2 for each color. Imaging of reflected light of light is performed. The image pickup unit 2 and the light projecting unit 3 are provided on the X-axis table 20 inside the housing 11.
(Shown in FIG. 2) and is connected in the X-axis direction (in the figure, arrow A
Reciprocating in the direction indicated by.

The substrate stage 5 is arranged on the base plate 10 so as to be movable in the Y-axis direction (the direction indicated by the arrow B in the figure), and is fixedly arranged on the Y-axis table 8. It is composed of a pair of substrate supports 9a and 9b. At the time of inspection, the substrate to be inspected is one of the substrate supports 9a and 9b.
When the inspection is instructed by the inspector, the image pickup unit 2 and the light projecting unit 3 are moved in the X-axis direction, and the substrate stage 5 is moved in the Y-axis direction. An image of the observed region is captured, and the image data is input to the control device 4. Inspector is monitor 6
The quality of each inspected part is visually judged from the image displayed on.

A floppy disk device 21 is incorporated in the control device 4, and CAD data, parts type correspondence data, etc., which will be described later, are read using the floppy disk device 21 and stored in an internal memory. Prior to the inspection, the control device 4 uses the read data to teach the data for setting the observation region on the inspected substrate (hereinafter referred to as “teaching”).

The input section 7 is a keyboard 1 of two types, large and small.
4, 15 and mouse 16. The inspector uses a large keyboard 14 when setting various data prior to the inspection.
Also, the setting data is input by operating the mouse 16.
At the time of inspection, switching processing of an observation region, designation of a region to be inspected, and input of a determination result of quality are mainly performed by a small keyboard 15.

The monitor 6 displays the image picked up by the image pickup section 2 and also displays the data input screen at the time of teaching and the inspection result.

FIG. 2 shows an electrical configuration of the appearance inspection apparatus. The control apparatus 4 includes a control unit 22 and a memory 2.
3, an image pickup controller 24, an XY table controller 25 and the like are included as components.

The image pickup controller 24 is provided with an interface for connecting the control unit 22, the image pickup unit 2 and the light projecting unit 3 to each other. Is adjusted, and the mutual balance of the outputs of the respective hue lights of the image pickup unit 2 is maintained.

Each of the X-axis table 20 and the Y-axis table 8 is provided with a drive mechanism (not shown), and the X-axis table 20 causes the image pickup section 2 and the light projecting section 3 to move in the X-axis direction and the Y-axis table by the drive mechanism. The axis table 8 moves the substrate stage 5 in the Y-axis direction. The XY table controller 25 includes an interface or the like that connects the control unit 22 to the drive mechanisms of the X-axis table 20 and the Y-axis table 8, and operates each drive mechanism based on a command from the control unit 22, By controlling the positions of the X-axis table 20 and the Y-axis table 8, the image pickup visual field of the image pickup unit 2 is made to coincide with the observation region described later.

The control unit 22 is provided with a microprocessor, and controls each operation of the appearance inspection apparatus in the teaching before inspection and the inspection while reading / writing data to / from each of the input / output units. The memory 23 is the control unit 22.
The teaching data and the image data to be inspected, which are generated in step 2, the data regarding the inspection result input from the input unit 7, and the like are stored in the areas corresponding to the respective data types.

In this visual inspection apparatus, for the above-mentioned teaching, the data (hereinafter referred to as "library data") relating to the visual field area and the observation magnification required for the inspection are edited and stored in advance for each component type. CAD data for storing the component type and position data of each component on the inspection board is loaded in the memory 23. At the time of teaching, by linking the CAD data and the library data, the arrangement state of the visual field area of each component on the inspected board and the data regarding the observation magnification of each component are determined. Is used to generate data for setting the observation region on the inspected substrate.

3 (1), (2) and (3) show examples of setting of data relating to the visual field area in the library data. In this embodiment, a predetermined small area r including the inspected region of each component type (indicated by diagonal lines in the drawing) is designated as the inspection area, and a rectangular area circumscribing all the inspection areas r belonging to one component is the visual field area. As the setting information of the visual field area, data indicating the size and the setting position of each inspection area r is registered.

Further, in this embodiment, the data relating to the mark for identifying the position of each inspected part is added to the library data on the display screen at the time of the inspection. Mark the identification (hereinafter referred to as "pointer"), in the illustrated example those represented as _{P 1, P 2, P 3} , can be set to any position of each inspection area, the type and size is Freely selected from multiple types of menus. Information about the set pointer is stored in association with the setting data of the inspection area.

FIG. 4 shows the data structure relating to the setting of the observation area in the memory 23.
In addition to a CAD data file 26 for storing data and a library data file 27 for storing library data, it is composed of a product number corresponding data file 28 and two inspection data files 29, 30.

As shown in FIG. 5, the CAD data file 26 stores data such as a component name, a component part number, a component mounting position, and a component mounting direction for each component on the board.

The component name is data for identifying the same type of component on the board. For example, when there are three components collectively referred to by the name "C" on the board to be inspected, the name is Use the serial number and
It is specified as "1", "C02", "C03".

The part number indicates the part manufacturer model unique to each part on the board. In the case of the illustrated example, among the three parts represented by “C”, parts with the same part number “CH001” are used for C01 and C02, and parts with different part numbers “CH002” are used for C03. There is. The mounting position data is x, y coordinates indicating the relative position of the center point of the component with respect to the inspected board, and the mounting direction is data indicating the orientation with respect to the predetermined mounting state for each component type in 90 degree units. .

The product number corresponding data file 28 is the CA
It is a reference file for reading the library data corresponding to each part number in the D data file 26, and stores the part type and variation information corresponding to each part number as shown in FIG. There is.

The component type means data including components of the same type in terms of shape, and the variation information is a code used to identify a plurality of components belonging to each component type. In the case of the illustrated example, the parts of the product numbers CH001 and CH002 both belong to the same part type C ₁ , and the product number TR00.
1 and TR002 are different component types TR
₁ belongs to TR ₂ .

The library data file 27 is shown in FIG.
As shown in, for each component type and variation,
The setting information regarding the visual field area and the pointer is stored, and the optimum observation magnification for observing the inspected region of the component type is stored.

The setting information of the visual field area of each component type is the setting information r _{1 for} each of a plurality of inspection areas as shown in FIG.
A r ₂ · · ·, each setting information, such as relative position coordinates with respect to the center point of the part of each vertex of the upper left and lower right region is constituted by data representing the set position and size of a region It Also, pointer setting information p ₁ , p
₂ , p _3, ... Are data such as the position, type, and size of the pointer set in each inspection area.

When observing all the parts on the board to be inspected at the same observation magnification regardless of the kind of parts, it is necessary to store only the setting information regarding the visual field area and the pointer in the library data file 27. good.

The control section 22 refers to the product number corresponding data file 28, reads the library data corresponding to each part in the CAD data file 26 from the library data file 27, and then reads the corresponding CAD data and library. Performs processing to link with data. As a result, the field-of-view area, pointer information, and setting information relating to the observation magnification for each component on the inspected board are determined and stored in the first inspection data file 29.
Further, the control unit 22 uses the setting information for each component in the first inspection data file 29 to create data for setting a plurality of observation areas on the board to be inspected, and then performs each observation. The area setting information is associated with the field-of-view area of each component included in the area and the setting information of the pointer.
Stored in the inspection data file 30.

In this embodiment, for each component on the inspected board, an observation region is set for each component for which the same observation magnification is set, and the entire visual field region of each component is included in any observation region. The position of the observation area is adjusted so that FIG. 8 shows an example of the setting of the observation area. For the parts 31 to 37 on the board, the visual field areas 45 to 51 based on the inspection data of the first inspection data file 29 are set, respectively. .

The control unit 22 uses the imaging area corresponding to a predetermined observation magnification to construct the configuration data of the board to be inspected (the CA described above).
(The one generated by the D data) is sequentially scanned, and the image pickup area is positioned at a position where a component having the same observation magnification as the set value of the image pickup area can be observed. The area at the time of positioning is specified as the observation area, and the setting position, the observation magnification, the setting information of the inspected component included in the observation area, and the like are stored in the second inspection data file 30 in association with each other.

In the case of the example of FIG. 8, the parts 31, 32, 33,
The same magnification (provisionally set to 1) is set for 35, 36, and 37, and different magnifications (provisionally set to 2) for the component 34.
Is set, and the first observation region KR1 is located at a position where the visual field regions 45, 46, 49 of the components 31, 32, 35 are completely included, and the visual field regions 47, 47 of the components 33, 36, 37 are
Second observation region KR at a position where 50 and 51 are completely included
The second observation region KR3 is set at a position 2 where the visual field region 48 of the component 34 is completely included in the central portion.

FIG. 9 shows a procedure of editing library data by the control unit 22. The editing of the library data is generally performed by the manufacturer before the shipment of the apparatus, and various teaching data for general distributed mounting components are created.

First, at the start of the procedure, the control unit 22 controls each unit of the apparatus to operate the image pickup unit 2 and the light projecting unit 3, and prepares the image pickup condition and the data processing condition, and then the monitor 6 displays. Display the initial menu screen. Step 1
Then, when the operator operates the keyboard 14 and selects the editing operation of the library data from the initial menu screen, the contents of the product number corresponding data file 28 in the memory 23 are displayed on the monitor 6.

FIG. 10A shows a display example of the monitor 6 at this time, and the list 36 of the component types and the enter key 37 for the mouse 16 are displayed. In the next step 2,
When the operator selects a predetermined component type (for example, A ₁ ) from the component type list 36, the monitor 6 displays
As shown in (2), a list 38 of variations of a plurality of components belonging to the selected component type is additionally displayed. In the next step 3, when the operator selects a predetermined variation from this list, the monitor 6 displays the image of the reference substrate that has been set on the substrate stage 5 in advance (step 4).

This reference board has a good mounting quality in which predetermined parts are properly soldered, and the operator positions the imaging position on the parts corresponding to the selected part type and variation. Then, the inspection area and pointer are set using the image of this part, and the observation magnification for this part is input using the keyboard 14 (steps 5 and 6).

When the same processing is performed for each component type and each variation in the above list, both steps 7 and 8 become "YES", and the operator integrates the data stored for each component to obtain the library data. It is registered in the file 27 (step 9).

The library data is edited by loading the data relating to the shape of each part into the memory 23, or loading the reference data created by another terminal device from the floppy disk device 21 into the memory 23 and editing the data. It is possible to add or correct the data as required by the user even after the device is shipped, such as correcting the data as necessary.

FIG. 11 shows the teaching procedure. First, when the inspector selects the teaching mode from the initial menu screen, the monitor 23 is provided with the memory 23.
The file names of a plurality of CAD data files registered within are displayed. When the inspector selects the data file of the board to be taught from among these, the control unit 22
The corresponding CAD data file 26 is read and set in the work area in the memory 23 (step 1).

In the next step 2, the control unit 22 searches the part number corresponding data file 28 by using each part number in the CAD data as a key, and finds the part type and variation corresponding to each part on the board to be taught. Specify.

Next, in step 3, the control unit 22 reads out the library data corresponding to each component on the board from the library data file 27, links this with the CAD data of each component, and outputs each library data on the inspected board. Setting information on the field of view of the part, the pointer, and the observation magnification is generated and stored in the first inspection data file 29 (step 4).

In the next step 5, the control unit 22 sets the image pickup unit 2 on the configuration data of the substrate to be inspected obtained by the CAD data based on the visual field area setting information in the first inspection data file 29. The imaging region is set and scanned according to the field of view and the predetermined observation magnification, and the imaging region is positioned at the predetermined position while checking the visual field region included in the imaging region at each scanning position. Data relating to the setting of the imaging region at each positioning point (region position, size, observation magnification, etc.) is used as the second observation region setting information.
Stored in the inspection data file 30 and further stored in the first inspection data file 29, the field-of-view setting information and pointer setting information of each component are grouped for each component included in the same observation region. It is stored in the second inspection data file 30 in association with the inspection area setting information.

FIG. 12 shows the detailed procedure in step 5 of FIG. Step 5-1 is for initial setting of the observation magnification, and the control unit 22 sets the initial observation magnification F to an initial value (for example, 1). In the next step 5-2, the image pickup area corresponding to the observation magnification is set to the scanning start position, and the control unit 22 sets the lower left apex of the image pickup area as a reference point, and coordinates of the reference point ( X
_S , Y _S ) to the coordinates (1, 1) of the lower left corner of the board, and check whether the center point of the part for which the observation magnification of 1 is set exists in the imaging area at this setting position. Check (step 5-3).

If the determination in step 5-3 is "NO", the controller 22 determines in step 5-7 whether or not the right edge of the imaging area matches the right edge of the substrate, and in step 5-9 the imaging area. It is determined whether or not the upper end of the reference point coincides with the upper end of the substrate. If the result of any of the steps is “YES”, the coordinates of the reference point are set to the following in step 5-8 or step 5-10. After moving to the scanning position , the determination process of step 5-3 is executed again.

When the imaging area is scanned up to the position where the center point of any one of the parts for which the observation magnification of 1 is set is included in the area, the determination in step 5-3 becomes "YES", and the control unit 22 Further, with this part as a reference, the image pickup area is finely adjusted so that a plurality of visual field areas of the part having the same magnification value are included in this image pickup area (step 5-4).

FIG. 13 shows a specific example of the fine adjustment of the image pickup area. The image pickup areas sr ₁ , sr ₂ and sr _{3 of the three} parts whose observation magnification is set to F times (for example, 1 time) are shown. Are located in the vicinity. In the figure, p ₁ , p ₂ and p ₃ are
The center point of each part and R indicate the imaging area.

First, FIG. 13A shows a state in which the center point P ₁ of the first component enters the image pickup region R. Next, the control unit 22 determines that the left side of the visual field region sr ₁ of this component is The position of the imaging region R is adjusted so that it overlaps with the left side of the imaging region R (FIG. 13B), and the imaging region R is moved to a position where the lower side of the visual field region sr ₁ overlaps with the lower side of the imaging region R ( FIG. 13C).

At this point, the visual field regions s of the second and third parts
When both r ₂ and sr ₃ are included in the imaging region R, the control unit 22 further adjusts the position of the imaging region R to perform final positioning.

Next, regarding the example of FIG. 13C, FIG.
A procedure for finally positioning the imaging region R using will be described. The control unit 22 first checks the x and y coordinates of the vertices of the visual field regions sr ₁ , sr ₂ and sr ₃ included in the imaging region R, and from these, x, y
The minimum values x _min and y _min and the maximum values x _max and y _max in the y-axis directions are extracted, respectively.

Next, the control unit 22 uses the following equation (1) to extract each coordinate x _min , y _min , x _max , y _max.
Of the center point P of the rectangular area SR determined by
After calculating Y), the imaging region R is moved so that the center point O of the imaging region R overlaps with the position of the center point P,
The final position of the imaging region R as shown in FIG. 13 (4) is determined.

[0083]

[Equation 1]

Returning to FIG. 12, when the position of the image pickup area R is determined in this way, the control unit 22 determines in the next step 5-5 that the parts including the entire visual field area (however, the observation magnification is included). The setting position of the imaging region and the observation magnification F at the present time are confirmed as the setting information of the observation region, and this setting information and the above-mentioned step 5-5 are extracted. The second inspection data file 3 in association with the visual field area of each part and the setting information of the pointer.
It is stored in 0 (step 5-6).

When the processing in step 5-6 is completed and there is an unprocessed area on the substrate, the position of the reference point is changed in step 5-8 or step 5-10 to scan the imaging area for the next scan. By moving to a position and repeating the same processing thereafter, a plurality of observation regions are set on the substrate configuration data.

When the scanning of the image pickup area based on the observation magnification F is completed, the determinations at Steps 5-7 and 5-9 are both "NO", and the process proceeds to Step 5-11. , Check whether or not there is a component set to another observation magnification on the board. This judgment is "Y
If it is "ES", the observation magnification F in the next step 5-12.
Is changed, the process returns to step 5-2 again, and the same processing as above is repeatedly executed.

In this way, when the setting information of the observation area and the setting information of the parts included in each observation area are stored in the second inspection data file 30 for each observation magnification, step 5-11 The judgment is “NO”, and the teaching ends.

15 and 16 show the procedure of the inspection performed after the above teaching. First in step 1,
When the inspector selects the board name of the board to be inspected and performs the board inspection start operation, the control unit 22 reads the setting information of the observation area from the second inspection data file 30 and stores it. It is supplied to the control unit 22 (step 2).

At the next step 3, when the inspector sets the substrate to be inspected on the substrate stage 5 and gives an instruction to start the inspection, the control section 22 controls the X-axis table 20 and the Y-axis table 8 to The imaging field of the imaging unit 2 is positioned and imaged with respect to the first observation region on the inspected substrate. As a result, the image data in the first observation area is displayed on the monitor 6 (step 4).

FIG. 17 shows an example of the display screen of the monitor 6 when the image pickup section 2 is positioned in the first observation region KR1 shown in FIG. 8, and the observation region KR1 includes the entire visual field region. For the parts 31, 32 and 35, the pointer P in each inspection area is displayed based on the pointer setting information. The pointer is not displayed on the component 33 in which only a part of the set visual field region is included in the observation region or the component 34 for which a different magnification is set. At this time, a magnification display unit 42 for displaying the magnification currently set in the image pickup unit 2 is provided at the upper right of the display screen.

FIG. 18 shows another display example of the monitor 6 for the first observation area. In this example, the parts 31,
The display for 32 is similar to that of FIG.
For images 3 and 34, the image display of each component included in the observation region is disappeared, and instead, images 40 and 41 (black in the illustrated example) having uniform density values are provided in the portion corresponding to the visual field region of each component. Is displayed).

Returning to FIG. 15, in the next step 5, when the inspector inputs an instruction for performing an inspection in the displayed observation area, the control unit 22 causes the first inspection area included in this observation area to be displayed. Only the pointer for the inspected part of the inspection area is displayed (step 6). The inspector confirms the first portion to be inspected by the display of this pointer and performs a visual inspection. As a result, if the portion to be inspected is good, the keyboard 1
Input the feed command from 5. If there is another inspection area in the observation area, the judgments in steps 7 and 10 are both "NO".
Then, the process returns to step 6, and the control unit 22 switches the display of the pointer to the next inspection area.

If there is a defective solder in the portion to be inspected, step 7 becomes "YES", and the inspector inputs the defective data from the keyboard 14 or 15 (step 8). This defective data is stored in the memory 23 in association with the information of the corresponding inspection area and pointer (step 9).

When the same procedure is sequentially performed for all the inspection areas in the first observation area and the quality of the last inspected area in the area is determined, the determination in step 10 becomes "YES". . If the same magnification as the above is set in the next observation area, step 11 is "NO",
When step 12 becomes “YES”, the process proceeds to step 15, and the control unit 22 sends an instruction to the XY table controller 25 to position the imaging visual field of the imaging unit 2 at the second observation region.

Similarly, when the image data of the observation regions having the same set magnification on the substrate are sequentially taken in and the inspection in each region is completed, the control unit 22 instructs the monitor 6 to change the observation magnification. The message information is displayed (step 13).

FIG. 19 shows an example in which the message information is displayed at the stage when the inspection in the observation area KR2 of FIG. 8 is completed. The message display section 43 is displayed on the image data in the next observation area KR2. It is displayed. The inspector
The magnification of the imaging unit 2 is changed according to this message information,
When confirmation processing is performed using the keyboard 14 or 15 or the mouse 16, step 14 becomes "YES" and the process moves to step 15 to capture the image data in the first observation region corresponding to the changed magnification. Be done. Although the magnification is manually changed in the above embodiment, if an electric zoom lens is introduced into the image pickup system of the image pickup unit 2 and the control unit 22 is configured to read the current observation magnification,
The observation magnification can be changed automatically.

Similarly, when the inspections for all the observation areas set on the substrate are completed, step 1
1 becomes "YES", and the control unit 22 takes out all the defective data of this inspected substrate from the memory 23 and displays it on the monitor 6 (step 17). In the next step 17,
The inspector takes out the inspected substrate to be inspected from the substrate stage 5, sets the next inspected substrate (step 3), and continues the inspection.

When defective data of the inspected substrate for one lot is stored in the memory 23, the inspector inputs the data to the input unit 7.
When the data storage command is input, the defective data of all the substrates of the lot is stored in the floppy disk (steps 18 and 19). This floppy disk is set in a solder correction device or the like, and the defective portion of each board is corrected based on the stored defective data. When the inspector inputs an operation command from the input unit 7, the defect data of all the boards in the lot are used to calculate or calculate statistics.
Various calculations effective for analysis of mounting quality are carried out.

In this embodiment, the rectangular area circumscribing all the inspection areas set for one part is set as the visual field area, but the present invention is not limited to this, and only a part of the inspection area is included. The field of view may be set. In addition to the CAD data described above, the component type and position data of each component on the board can be manually input from the input unit 7.

The observation area setting method described above can also be applied to an automatic substrate inspection apparatus. In this case, in addition to the above-mentioned setting data, data relating to the feature amount of image data in each inspection area is used as library data. By storing, the time required for teaching can be significantly reduced. Also, in this case, after setting the observation area using the imaging area based on the standard magnification (eg, 1 ×) during teaching, the observation area and the observation area for all the parts included in the area are set for each observation area setting position. The second inspection data file 30 by associating the setting information with the magnification
If it is stored in the inside, the image data of each observation region can be sequentially taken in at the time of inspection, and the magnification of the imaging unit can be automatically changed according to the inspected region.

In the above description, the appearance inspection apparatus for inspecting the mounting quality of each component on the printed circuit board is used as an example to generate the observation area setting data. However, the present invention is not limited to this. It can also be applied to an apparatus for generating inspection data to be supplied to the inspection apparatus as described above (hereinafter referred to as "teaching machine").

FIG. 20 shows the external appearance of this teaching machine, and FIG. 21 shows its electrical configuration. The teaching machine 60 includes a control body 61, a monitor 62,
The control unit 61 includes a control unit 66 including a microcomputer, a memory 67, a floppy disk device 68, and the like.

The memory 67 stores the CAD data file 26, the library data file 27, the part number corresponding data file 28, and the first and second inspection data files 29 and 30, respectively. . The control unit 66 executes the same procedure as steps 1 to 4 of FIG. 11 to execute the CAD data of the CAD data file 26 of the board to be taught and the library according to the component type of each component based on the CAD data. The setting information relating to the visual field area, pointer, and observation magnification of each component on the board to be inspected is created by linking with the data, and stored in the first inspection data file 29.

Further, the control unit 66 uses the setting information to execute the step 5 of the step 11 (that is, FIG. 12).
Procedure) to create inspection data in which the setting information of a plurality of observation areas on the board to be inspected and the view area setting information and pointer setting information of the components included in each observation area are associated with each other. It is stored in the second data file 30.

When the creation of the inspection data is completed, the control unit 66 transfers the inspection data stored in the second inspection data file 30 to the floppy disk set in the floppy disk device 58. By setting this floppy disk in the floppy disk device 21 on the side of the appearance inspection device shown in FIG. 1 and performing the reading process, the inspection data is transferred to the memory 23 of the control device 4 and the substrate to be inspected immediately. The inspection can be performed. It is also possible to connect the teaching machine 60 to the visual inspection device online to transmit the inspection data.

[0106]

According to the inventions of claims 1, 3, 6, 15, 17, and 20, a plurality of observations for inspecting the quality of the arrangement state of each component on an object on which a plurality of components are arranged. When setting the area, by combining the relative position data of each part with the data related to the field of view stored in advance for the corresponding part type, the field of view corresponding to the position of each part on the object can be created. After setting, the observation area is set using these visual field areas, so the inspected part of each part is assigned to one of the set observation areas, and processing such as changing or additional setting of the observation area is performed. It is possible to perform efficient setting processing that does not need to be performed. Moreover, since an appropriate number of observation areas are set for inspection, the efficiency at the time of inspection is greatly improved.

According to the inventions of claims 2, 9, 12, 16, 23, and 26, relative position data of each part on the object is data relating to the visual field area and the observation magnification set for the corresponding part type. By setting the observation area according to the position of each part on the target object and the observation magnification according to the type of each part, the observation area is set using these finalized data. At times, the position of the image pickup device and the observation magnification are controlled according to the setting information of each observation region, and optimum image data of each component can be obtained to greatly improve the inspection efficiency and accuracy.

In the inventions of claims 4, 10, 18 and 24,
In the invention of claims 7, 13, 21, and 27, as relative position data of each component with respect to the component type and the target object, as identification data of each component and relative position data with respect to the target object, respectively Since the design data for deploying each component is input, the data can be input accurately and at high speed, and as a result, the observation region can be set accurately and at high speed.

Claims 5, 8, 11, 14, 19, 22,
In the inventions of 25 and 28, the setting position of each observation region is adjusted so that the center point of this observation region and the center point of the rectangular region circumscribing the visual field region included in the region coincide with each other.
Each visual field area is arranged in a well-balanced manner within the observation area, making it easy to see the display screen during inspection.

According to the twenty-ninth to thirty-sixth aspects of the invention, the image data in each set observation region is displayed together with the image for identification showing the position of the inspection target site in the region. In this case, the site to be inspected can be confirmed on the display screen, and accurate and efficient inspection can be performed.

[Brief description of drawings]

FIG. 1 is a perspective view showing a schematic configuration of a visual inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a block diagram showing an electrical configuration of a visual inspection apparatus.

FIG. 3 is an explanatory diagram showing a setting example of setting information of a visual field area.

FIG. 4 is an explanatory diagram showing a data structure related to teaching in a memory.

FIG. 5 is an explanatory diagram showing a data structure of a CAD data file.

FIG. 6 is an explanatory diagram showing a data structure of a product number corresponding data file.

FIG. 7 is an explanatory diagram showing a data structure of a library data file.

FIG. 8 is an explanatory diagram showing an example of setting an observation region.

FIG. 9 is a flowchart showing a procedure for editing library data.

FIG. 10 is an explanatory diagram showing a display screen of a monitor when editing library data.

FIG. 11 is a flowchart showing a teaching procedure.

FIG. 12 is a flowchart showing a detailed procedure of step 5 of FIG.

FIG. 13 is an explanatory diagram showing an example of a fine adjustment method of an imaging region.

FIG. 14 is an explanatory diagram showing a final positioning method of an imaging region.

FIG. 15 is a flowchart showing a procedure of board inspection.

FIG. 16 is a flowchart showing a procedure of board inspection.

FIG. 17 is an explanatory diagram showing an example of a monitor display screen during inspection.

FIG. 18 is an explanatory diagram showing another example of the display screen of the monitor at the time of inspection.

FIG. 19 is an explanatory diagram showing a display example when an observation magnification change instruction is issued.

FIG. 20 is a front view showing the outer appearance of a teaching machine according to another embodiment of the present invention.

FIG. 21 is a block diagram showing an electrical configuration of the teaching machine of FIG. 20.

FIG. 22 is an explanatory diagram showing a conventional observation region setting method.

[Explanation of symbols]

2 Imaging unit 3 Projector 4 control device 22 Control unit 23 memory 26 CAD data files 27 Library data file 29,30 Inspection data file 60 Teaching machine 66 control unit 67 memory

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yukiya Sawanoi 24, Yamanouchi Yamanoshitamachi, Ukyo-ku, Kyoto City, Kyoto Prefecture Omron Life Science Research Institute (56) Reference JP-A-63-90707 (JP, A) JP-A-6-258047 (JP, A) JP-A-6-160042 (JP, A) JP-A-2-171602 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01B 11/24 G06T 1/00 305

Claims (36)

(57) [Claims] 1. An observation area setting method for setting a plurality of observation areas for inspecting the quality of the arrangement state of each part on an object having a plurality of parts arranged on the surface thereof. For each of the above parts, the view area of each part is determined on the object by linking the relative position data with respect to the object and the data related to the view area preset for the part type to which the part belongs. An observation area setting method comprising sequentially performing a first step and a second step of setting a plurality of observation areas on an object by using each determined visual field area. 2. An observation area setting method for setting a plurality of observation areas for inspecting the quality of the arrangement state of each part on an object having a plurality of parts arranged on the surface thereof. For each of the above parts, by combining the relative position data with respect to the object and the field of view preset for the type of part to which the part belongs and the data related to the observation magnification, the field of view of each part on the object And a first step of determining the observation magnification for each part, and a second step of setting a plurality of observation areas on the object using the field-of-view area and the observation magnification determined for each part. A method for setting an observation region, which is characterized in that the observation regions are sequentially executed. 3. An observation area setting device for setting a plurality of observation areas for inspecting the quality of the arrangement state of each part on an object having a plurality of parts arranged on the surface, the observation area setting device comprising: Registration means for storing data relating to a visual field area required for inspection for each part type, input means for inputting the part type of each part on the object and relative position data to the object, the target For each part on the object, after the registration data relating to the field of view corresponding to the type of part input by the input means is read out from the registration means, the registration data and the input relative position data are linked. And a view area defining means for defining a view area of each component on the object, and a view area for defining a plurality of observation areas on the object using each view area defined by the view area defining means. Comprising a region setting unit observation area setting device. 4. The inputting means inputs designating data for arranging each part on an object, and inputs position data of each part and relative position with respect to the object. Observation area setting device. 5. The observation area setting means sets the set positions of the plurality of observation areas such that the center point of each observation area coincides with the center point of a rectangular area circumscribing a visual field area included in the observation area. The observation area setting device according to claim 3, further comprising a position adjusting means for adjusting the position of the observation area. 6. An observation area setting device for setting a plurality of observation areas for observing whether or not the arrangement state of each part is good or bad on an object having a plurality of parts arranged on the surface thereof. Registration means for storing data relating to the field of view necessary for inspection for each part type, input means for inputting identification data of each part on the object and relative position data with respect to the object, and each part Of the identification data and the component type to which the component belongs, and a unit for determining the component type corresponding to the identification data of each component input by the input means using the association table. After reading the registration data relating to the visual field region corresponding to the component type determined by the component type determination unit from the registration unit, Using the visual field area fixing means for fixing the visual field area of each part on the object by linking the registered data and the input relative position data, and using the visual field area fixed by the visual field area fixing means, An observation area setting device comprising an observation area setting means for setting a plurality of observation areas on an object. 7. The inputting means inputs the identification data of each part and relative position data with respect to the object by using design data for deploying each part on the object. Observation area setting device. 8. The observation area setting means sets the set positions of the plurality of observation areas such that the center point of each observation area coincides with the center point of a rectangular area circumscribing a visual field area included in the observation area. 7. The observation area setting device according to claim 6, further comprising position adjusting means for adjusting the observation area. 9. An observation area setting device for setting a plurality of observation areas for observing the quality of the arrangement state of each component on an object having a plurality of components arranged on the surface, the observation region setting device comprising: Registration means for storing data relating to the field of view necessary for inspection and observation magnification for each part type, and input means for inputting the part type of each part on the object and relative position data with respect to the object , For each part on the object, after reading the registration data relating to the field of view and the observation magnification corresponding to the part type input by the input means from the registration means, the registration data and the input relative The observation condition determination means for determining the field-of-view area of each part on the object and the observation magnification for each part by linking the position data, and the observation condition determination means. A plurality of observation areas comprising a monitoring area setting means for setting an observation area setting device on the object by using a viewing area and the observation magnification of the part. 10. The inputting means inputs designating data for arranging each part on an object, and inputs position data of each part and relative position to the object. Observation area setting device. 11. The observation area setting means sets the set positions of the plurality of observation areas such that the center point of each observation area coincides with the center point of a rectangular area circumscribing a visual field area included in the observation area. 10. The observation area setting device according to claim 9, further comprising position adjusting means for adjusting the position of the observation area. 12. An observation area setting device for setting a plurality of observation areas for observing whether or not the arrangement state of each part is good or bad on an object having a plurality of parts arranged on the surface thereof. Registration means for storing data relating to the field of view necessary for inspection and observation magnification for each part type, and input means for inputting identification data of each part on the object and relative position data with respect to the object A correspondence table that stores the identification data of each component and the component type to which the component belongs, and the component type corresponding to the identification data of each component input by the input means using the association table. The component type determining means to be determined, and for each component on the object, the registration data relating to the view area and the observation magnification corresponding to the component type determined by the component type determining means After reading from the registration means, the observation condition determination means for linking this registration data and the input relative position data to determine the field of view of each part and the observation magnification for each part on the object, An observation area setting device comprising an observation area setting means for setting a plurality of observation areas on an object using the visual field area of each part and the observation magnification determined by the observation condition determining means. 13. The inputting means inputs the identification data of each part and relative position data with respect to the object using design data for deploying each part on the object. Observation area setting device. 14. The observation area setting means sets the set positions of the plurality of observation areas such that the center point of each observation area coincides with the center point of a rectangular area circumscribing a visual field area included in the observation area. 13. The observation area setting device according to claim 12, further comprising position adjusting means for adjusting the observation area. 15. A visual inspection method for inspecting the quality of the arrangement state of each component by an image obtained by capturing an image of an object having a plurality of components arranged on the surface thereof. For each part, by linking the relative position data with respect to the object and the data relating to the field of view preset for the type of part to which the part belongs, the field of view of each part is determined on the object. A second step of setting a plurality of observation areas on the object by using the steps and the determined visual field areas; and image data of the object for each of the set observation areas, and each observation area. And a third step of determining whether or not the arrangement state of each component included therein is good or bad in order. 16. A visual inspection method for inspecting the quality of the arrangement state of each part by an image obtained by picking up an image of an object on the surface of which a plurality of parts are arranged. For each part, by combining the relative position data with respect to the object and the field of view and the data related to the observation magnification preset for the type of part to which the part belongs, the field of view of each part on the object and each part A first step of determining an observation magnification for each of the parts; a second step of setting a plurality of observation areas on the object using the visual field area and the observation magnification determined for each of the parts; By placing the image data of the object in each observation area and observing each part in the observation area using the observation magnification corresponding to each, the placement of each part included in each observation area An appearance inspection method comprising sequentially performing a third step of judging whether the state is good or bad. 17. A visual inspection apparatus for inspecting an object having a plurality of parts arranged on its surface for quality of the arrangement state of each part, comprising: an image pickup means for picking up an image of the object; Registration means for storing data relating to the visual field area necessary for inspection for each part type, input means for inputting the part type of each part on the object and relative position data with respect to the object, and the object For each of the above parts, after reading the registration data relating to the field of view corresponding to the type of part input by the input means from the registration means, linking the registration data with the input relative position data. Field-of-view area determination means for determining the field-of-view area of each component on the object, and observation for setting a plurality of observation areas on the object using each field-of-view area determined by the field-of-view area determination means Area setting means, storage means for storing the setting information of each observation area set by the observation area setting means, and the position of the imaging means is controlled based on each setting information stored in the storage means. An appearance inspection apparatus comprising: image data input means for sequentially capturing image data of an observation region. 18. The method according to claim 17, wherein the input means inputs the component type of each component and relative position data with respect to the subject, using design data for deploying each component on the subject. Visual inspection device. 19. The observation area setting means sets the set positions of the plurality of observation areas such that the center point of each observation area coincides with the center point of a rectangular area circumscribing a visual field area included in the observation area. The visual inspection apparatus according to claim 17, further comprising a position adjusting unit that adjusts so as to adjust the position. 20. An appearance inspection apparatus for inspecting an object having a plurality of parts arranged on its surface for quality of the arrangement state of each part, comprising: an image pickup means for picking up an image of the object; Registration means for storing data relating to the field of view necessary for inspection for each part type, input means for inputting identification data of each part on the object and relative position data with respect to the object, and each part Of the identification data and the component type to which the component belongs, and a unit for determining the component type corresponding to the identification data of each component input by the input means using the association table. Registration data relating to the field of view corresponding to the component type determined by the component type determination unit is read out from the registration unit for each type on the object. After that, the visual field area fixing means for fixing the visual field area of each part on the object by linking the registered data and the input relative position data, and the visual field area fixed by the visual field area fixing means. Observation area setting means for setting a plurality of observation areas on the object, storage means for storing the setting information of each observation area set by the observation area setting means, each of the storage means stored in the storage means A visual inspection apparatus comprising: an image data input unit that controls the position of the image pickup unit based on setting information and sequentially takes in image data of each observation region. 21. The input device inputs identification data of each part and relative position data with respect to the object using design data for deploying each part on the object. Visual inspection device. 22. The observation area setting means sets the set positions of the plurality of observation areas such that the center point of each observation area coincides with the center point of a rectangular area circumscribing a visual field area included in the observation area. 21. The visual inspection apparatus according to claim 20, further comprising a position adjusting unit that adjusts the position to adjust. 23. An appearance inspection apparatus for inspecting an object having a plurality of parts arranged on its surface for quality of the arrangement state of each part, comprising: an image pickup means for picking up an image of the object; Registration means for storing data relating to the field of view necessary for inspection and observation magnification for each part type, and input means for inputting the part type of each part on the object and relative position data with respect to the object , For each part on the object, after reading the registration data relating to the field of view and the observation magnification corresponding to the part type input by the input means from the registration means, the registration data and the input relative Observing condition deciding means for deciding the visual field area of each part and the observation magnification of each part on the object by linking with various position data, and by the observing condition deciding means. Observing area setting means for setting a plurality of observing areas on the object using the observing area of each part and its observing magnification, and setting information of each observing area set by the observing area setting means is stored. A visual inspection apparatus comprising: a storage unit; and an image data input unit that sequentially captures image data of each observation region by controlling the position and magnification of the imaging unit based on each setting information stored in the storage unit. 24. The input means inputs the part type of each part and relative position data with respect to the object, using design data for deploying each part on the object. Visual inspection device. 25. The observation area setting means matches the set positions of the plurality of observation areas with the center point of each observation area and the center point of a rectangular area circumscribing a visual field area included in this observation area. 24. The visual inspection apparatus according to claim 23, further comprising position adjusting means for adjusting so that 26. An appearance inspection apparatus for inspecting an object having a plurality of parts arranged on its surface for quality of the arrangement state of each part, comprising: an image pickup means for picking up an image of the object; Registration means for storing data relating to the field of view necessary for inspection and observation magnification for each part type, and input means for inputting identification data of each part on the object and relative position data with respect to the object A correspondence table that stores the identification data of each component and the component type to which the component belongs, and the component type corresponding to the identification data of each component input by the input means using the association table. Registration type determining means for determining, and for each component on the object, registration data relating to the field of view and the observation magnification corresponding to the type of component determined by the component type determining means After reading from the registration means, the observation condition determination means for determining the field of view of each component and the observation magnification of each component on the object by linking the registration data and the input relative position data. An observation area setting means for setting a plurality of observation areas on an object by using the view area of each component and the observation magnification determined by the observation condition determining means, and each of the observation area setting means set by the observation area setting means. Storage means for storing the setting information of the observation area, and image data input means for sequentially capturing the image data of each observation area by controlling the position and magnification of the image pickup means based on each setting information stored in the storage means. Appearance inspection equipment. 27. The inputting means inputs the identification data of each of the parts and the relative position data with respect to the object by using design data for deploying each part on the object. Visual inspection device. 28. The observation area setting means sets the set positions of the plurality of observation areas such that the center point of each observation area coincides with the center point of a rectangular area circumscribing a visual field area included in the observation area. 27. The visual inspection apparatus according to claim 26, further comprising position adjusting means for adjusting the position to adjust. 29. An appearance inspection apparatus for inspecting an object having a plurality of parts arranged on its surface for the quality of the arrangement state of each part, comprising: an image pickup means for picking up an image of the object; Registration means for storing data relating to the visual field area necessary for inspection for each part type, input means for inputting the part type of each part on the object and relative position data with respect to the object, and the object For each of the above parts, after the registration data relating to the field of view corresponding to the component type input by the input means is read from the registration means, the registration data and the input relative position data are linked together. Field-of-view area determination means for determining the field-of-view area of each component on the object, and observation for setting a plurality of observation areas on the object using each field-of-view area determined by the field-of-view area determination means Area setting means, storage means for storing the setting information of each observation area set by the observation area setting means, and the position of the imaging means is controlled based on each setting information stored in the storage means. Image data input means for sequentially capturing image data of the observation area, and image data for identification for indicating the position of the inspection target site in each observation area in the image data for each observation area captured by the image input means. A visual inspection apparatus comprising: a composite image display means for composite display. 30. The observation area setting means includes the viewing area.
Each field-of-view area determined on the object by the area determination means ,
Each observation area is set so as to be included in any one of the individual observation areas, and the composite image display means displays the image data for identification with respect to a part including the entire visual field area in each observation area. 30. The visual inspection apparatus according to claim 29, wherein the visual inspection apparatus displays the image data for each observation region in an overlapping manner. 31. The observation area setting means includes the viewing area.
Each field-of-view area determined on the object by the area determination means ,
Each observation area is set so as to be included in any one of the individual observation areas, and the composite image display means displays the image data for identification with respect to a part including the entire visual field area in each observation area. 30. The image data in each observation region is displayed in an overlapping manner, and the image portion of the part including a part of the visual field region in each observation region is displayed by using other identification image data. Visual inspection device. 32. The appearance inspection apparatus according to claim 31, wherein the composite image display means displays an image portion of a part including a part of the visual field area in each of the observation areas with a uniform density. 33. An appearance inspection apparatus for inspecting an object having a plurality of parts arranged on its surface for quality of the arrangement state of each part, comprising: an image pickup means for picking up an image of the object; Registration means for storing data relating to the field of view necessary for inspection and observation magnification for each part type, and input means for inputting the part type of each part on the object and relative position data with respect to the object , For each part on the object, after reading the registration data relating to the field of view and the observation magnification corresponding to the part type input by the input means from the registration means, the registration data and the input relative Observing condition deciding means for deciding the visual field area of each part and the observation magnification of each part on the object by linking with various position data, and by the observing condition deciding means. Observing area setting means for setting a plurality of observing areas on the object using the observing area of each part and its observing magnification, and setting information of each observing area set by the observing area setting means is stored. A storage unit, an image data input unit that sequentially captures image data of each observation region by controlling the position and magnification of the imaging unit based on each setting information stored in the storage unit, and the image input unit that captures the image data. A visual inspection apparatus comprising: composite image display means for displaying image data for each observation area by combining and displaying image data for identification for indicating the position of an inspection target site in each observation area. 34. The observation area setting means is configured such that each visual field area confirmed on the object by the observation condition determining means is
Each observation area is set so as to be included in any one of the individual observation areas, and the composite image display means displays the image data for identification with respect to a part including the entire visual field area in each observation area. The visual inspection device according to claim 33, wherein the visual inspection device displays the image data for each observation region in an overlapping manner. 35. The observation area setting means is configured such that each visual field area confirmed on the object by the observation condition determining means,
Each observation area is set so as to be included in any one of the individual observation areas, and the composite image display means displays the image data for identification with respect to a part including the entire visual field area in each observation area. 34. The image data in each observation area is displayed so as to be superposed on the image data, and the image portion of the part including a part of the visual field area in each observation area is displayed using other identification image data. Visual inspection device. 36. The appearance inspection apparatus according to claim 35, wherein the composite image display means displays an image portion of a part including a part of a visual field area in each of the observation areas with a uniform density.