JP3379658B2 - Light switch - Google Patents
Light switchInfo
- Publication number
- JP3379658B2 JP3379658B2 JP10649394A JP10649394A JP3379658B2 JP 3379658 B2 JP3379658 B2 JP 3379658B2 JP 10649394 A JP10649394 A JP 10649394A JP 10649394 A JP10649394 A JP 10649394A JP 3379658 B2 JP3379658 B2 JP 3379658B2
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- wave
- optical
- slit
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Optical Integrated Circuits (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、光通信装置などに用い
られる光スイッチに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical switch used in an optical communication device or the like.
【0002】[0002]
【従来の技術】従来の受動的光導波路を用いた光路切り
替え光スイッチは、図9のように、基板6上の光導波路
の光路をある角度で横切るスリット5を形成し、このス
リット5に光導波路のコア材料の屈折率と等しい屈折率
をもつ屈折率整合物質を機械的に挿入したり取り出した
りすることにより、光路の切り替えを行っていた。すな
わち、スリット5が屈折率整合物質7で満たされている
場合(図10)、入射側光導波路1に入射した光波はス
リット5を透過し出射側光導波路3へ伝搬するが、スリ
ット5が屈折率整合物質7で満たされていない場合(図
9)、光導波路1においてスリット5の方向に伝搬する
導波光は、光導波路1とスリット5の境界面で全反射し
出射側光導波路4へ伝搬する。2. Description of the Related Art In a conventional optical path switching optical switch using a passive optical waveguide, as shown in FIG. 9, a slit 5 is formed which crosses the optical path of the optical waveguide on a substrate 6 at an angle, and an optical path is formed in this slit 5. The optical path is switched by mechanically inserting or removing a refractive index matching substance having a refractive index equal to that of the core material of the waveguide. That is, when the slit 5 is filled with the refractive index matching material 7 (FIG. 10), the light wave incident on the incident side optical waveguide 1 passes through the slit 5 and propagates to the emitting side optical waveguide 3, but the slit 5 refracts. When not filled with the index matching material 7 (FIG. 9), the guided light propagating in the direction of the slit 5 in the optical waveguide 1 is totally reflected at the boundary surface between the optical waveguide 1 and the slit 5 and propagates to the emission side optical waveguide 4. To do.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、上述の
光スイッチでは、スリット5への屈折率整合物質7の挿
入、取り出し操作が機械的に行われるために、光路切り
替えに要する時間(スイッチング時間)が長く、また該
屈折率整合物質7のスリット5への挿入、取り出しのた
めには精密に制御された機械が必要となる欠点をもつ。However, in the above-mentioned optical switch, the time required for switching the optical path (switching time) is required because the operation of inserting and withdrawing the refractive index matching substance 7 into and from the slit 5 is performed mechanically. It has the drawback of being long and requiring a precisely controlled machine to insert and remove the index matching material 7 into and from the slit 5.
【0004】本発明は、上述の問題に鑑み、機械的な可
動部分を無くした光スイッチの提供を目的とする。The present invention has been made in view of the above problems, and an object thereof is to provide an optical switch which eliminates mechanically movable parts.
【0005】[0005]
【課題を解決するための手段】上記の目的を達成する本
発明は、
(1)基板上に形成された、基板面に平行な偏波面をも
つ導波光(TE波)と基板面に垂直な偏波面をもつ導波
光(TM波)に対する等価屈折率が異なる光導波路であ
って、該光導波路の一部に該光導波路の光軸を横切りか
つ該光導波路面に垂直に、光学的に等方性を有し透明で
あり、かつ屈折率が該光導波路のTE波とTM波に対す
る等価屈折率の中間の値をもつ物質が常に充填されてい
るスリットが形成され、かつ該光導波路の光軸と該スリ
ットの角度がTE波,TM波のどちらか一方のみを該光
導波路と該スリットの境界面において全反射するように
設定されており、前記スリットに充填される物質はエポ
キシ系紫外線硬化材であることを特徴とし、
(2)基板上に形成された、基板面に平行な偏波面をも
つ導波光(TE波)と基板面に垂直な偏波面をもつ導波
光(TM波)に対する等価屈折率が異なる光導波路によ
りなるY分岐光導波路であって、該Y分岐光導波路の分
岐された2つの枝光導波路の一方と分岐部との接続部分
において、該一方の枝光導波路の光軸を横切りかつ該Y
分岐光導波路面に垂直に、光学的に等方性を有し透明で
あり、かつ屈折率が該光導波路のTE波とTM波に対す
る等価屈折率の中間の値をもつ物質が常に充填されてい
るスリットが形成され、さらに該光導波路の光軸と該ス
リットの角度がTE波,TM波のどちらか一方のみを該
光導波路と該スリットの境界面において全反射するよう
に設定されており、前記スリットに充填される物質はエ
ポキシ系紫外線硬化材であることを特徴とし、
(3)基板上に形成された、基板面に平行な偏波面をも
つ導波光(TE波)と基板面に垂直な偏波面をもつ導波
光(TM波)に対する等価屈折率が異なる光導波路から
なるX分岐光導波路であって、該X分岐光導波路の交差
部において、交差角の2等分線上に該光導波路の光軸を
横切りかつ該光導波路面に垂直に、光学的に等方性を有
し透明であり、かつ屈折率が該光導波路のTE波とTM
波に対する等価屈折率の中間の値をもつ物質が常に充填
されているスリットが形成され、さらに該X分岐光導波
路の交差角がTE波,TM波のどちらか一方のみを該光
導波路と該スリットの境界面において全反射するように
設定されており、前記スリットに充填される物質はエポ
キシ系紫外線硬化材であることを特徴とし、
(4)スリットを挟んで対向する2本の光導波路の光軸
が、所望の幅でずれていることを特徴とする。 Means for Solving the Problems The present invention that achieves the above object is as follows. (1) Guided light (TE wave) having a plane of polarization parallel to the substrate surface and formed on the substrate and perpendicular to the substrate surface. An optical waveguide having a different equivalent refractive index with respect to guided light (TM wave) having a plane of polarization, wherein a part of the optical waveguide traverses the optical axis of the optical waveguide and is perpendicular to the optical waveguide surface, such as optically. A slit is formed which is transparent and is always filled with a substance having a refractive index intermediate between the TE and TM waves of the optical waveguide. The angle between the axis and the slit is set so that only one of TE wave and TM wave is totally reflected at the interface between the optical waveguide and the slit, and the substance filled in the slit is epoxy.
Carboxymethyl system was characterized by a UV-curable material, (2) formed on the substrate, the guided light having a polarization plane parallel to the substrate surface (TE wave) and the guided light having a polarization plane perpendicular to the substrate surface ( A Y-branch optical waveguide including optical waveguides having different equivalent refractive indices with respect to TM waves), wherein one of the two branched optical waveguides of the Y-branched optical waveguide is connected to a branching portion of the one branch optical waveguide. The optical axis of the optical waveguide is crossed and the Y
Perpendicular to the plane of the branched optical waveguide, it is always filled with a substance which is optically isotropic and transparent and whose refractive index is an intermediate value between the TE wave and the TM wave equivalent refractive index of the optical waveguide. A slit is formed, and the angle between the optical axis of the optical waveguide and the slit is set so that only one of TE wave and TM wave is totally reflected at the boundary surface between the optical waveguide and the slit , The substance filled in the slit is
Characterized by an epoxy-based ultraviolet curing material, (3) formed on the substrate, the guided light having a polarization plane parallel to the substrate surface (TE wave) and the guided light having a polarization plane perpendicular to the substrate surface ( An X-branch optical waveguide having an optical waveguide having a different equivalent refractive index with respect to a TM wave), the optical waveguide of the X-branch crossing the optical axis of the optical waveguide at the intersection of the X-branching optical waveguides. It is optically isotropic and transparent perpendicular to the waveguide surface, and the refractive index is TE wave and TM of the optical waveguide.
A slit is always formed that is filled with a substance having an intermediate value of the equivalent refractive index with respect to the wave, and the crossing angle of the X-branching optical waveguide is either the TE wave or the TM wave. in the boundary surface is set so as to totally reflect, material filled in the slit Epo
Characterized by a xylene-based ultraviolet curing material, (4) the optical axis of the two optical waveguides facing each other across the slit, characterized in that the offset in the desired width.
【0006】[0006]
【作用】基板上に形成された光導波路の光路を横切る光
学的に透明なエポキシ系紫外線硬化材で充填されている
スリットを有して、このエポキシ系紫外線硬化材の屈折
率をTE波に対する等価屈折率とTM波に対する等価屈
折率との間のものとし、スリットと光導波路の光軸の角
度を適当に定めてTE波とTM波のいずれか一方をこの
スリット面にて全反射させることにより、光導波路の一
部に形成された光導波路を所定の角度で横切るスリット
に屈折率整合物質を挿入したり取り出したりすることな
く、光導波路に入射する光波の偏波面を変化させること
により光スイッチングが可能となる。With the slit filled with the optically transparent epoxy-based UV-curing material which crosses the optical path of the optical waveguide formed on the substrate , the refractive index of this epoxy-based UV-curing material is equivalent to TE wave. By setting the angle between the refractive index and the equivalent refractive index for the TM wave, by appropriately setting the angle between the slit and the optical axis of the optical waveguide, and totally reflecting either one of the TE wave and the TM wave on the slit surface. , Optical switching by changing the polarization plane of the light wave incident on the optical waveguide without inserting or removing the refractive index matching material in the slit that crosses the optical waveguide formed at a part of the optical waveguide at a predetermined angle. Is possible.
【0007】[0007]
【実施例】ここで、図1〜図8を参照して本発明の実施
例を説明する。EXAMPLES Examples of the present invention will now be described with reference to FIGS.
【0008】(実施例1)図1,図2はそれぞれ本発明
の第1の実施例の斜視図、平面図である。また、図3
は、図2のa−a線における断面図である。本実施例の
光スイッチは、入射側光導波路1と出射側光導波路3が
図1に示すように、基板6上に作製されたクラッド9内
のコア8よりなる埋め込み型光導波路であり、光導波路
1と光導波路3は同一光学軸上にあり、しかも光学的に
透明な物質10で充填されているスリット5を挾んだ構
成となっている。このうち、光導波路材料のコア8なら
びにクラッド9の材料の一例として、例えば、2,2−
トリフルオロメチル−4,4−ジアミノビフェニル(T
FDB)とピロメリット酸二無水物(PMDA)および
2,2−ビス(3,4−ジカルボシキフェニル)ヘキサ
フルオプロパン二無水物(6FDA)からなる2種類の
フッ素化ポリイミド(以後それぞれをPMDA/TFD
B、6FDA/TFDBと略記する)の共重合体を用い
た場合について説明する。このポリイミド材料の屈折率
は、PMDA/TFDBと6FDA/TFDBの組成比
に依存し、基板6上にスピンコートによって作製される
薄膜は複屈折性をもつ。本実施例では、コア8にPMD
A/TFDBと6FDA/TFDBの組成比が3:7の
フッ素化ポリイミドを、またクラッド9に6FDA/T
FDBのみのフッ素化ポリイミドを用いる。また、基板
6にはSiを用いている。(Embodiment 1) FIGS. 1 and 2 are a perspective view and a plan view, respectively, of a first embodiment of the present invention. Also, FIG.
FIG. 3 is a sectional view taken along line aa of FIG. 2. The optical switch of the present embodiment is an embedded optical waveguide in which an incident side optical waveguide 1 and an outgoing side optical waveguide 3 are composed of a core 8 in a clad 9 formed on a substrate 6, as shown in FIG. The waveguide 1 and the optical waveguide 3 are on the same optical axis, and have a configuration in which a slit 5 filled with an optically transparent substance 10 is sandwiched. Among these, as an example of the material of the core 8 and the clad 9 of the optical waveguide material, for example, 2,2-
Trifluoromethyl-4,4-diaminobiphenyl (T
FDB) and pyromellitic dianhydride (PMDA) and 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride (6FDA), two types of fluorinated polyimides (hereinafter, PMDA and PMDA, respectively). / TFD
B, abbreviated as 6FDA / TFDB) will be described. The refractive index of this polyimide material depends on the composition ratio of PMDA / TFDB and 6FDA / TFDB, and the thin film formed on the substrate 6 by spin coating has birefringence. In this embodiment, the core 8 has a PMD.
Fluorinated polyimide with a composition ratio of A / TFDB and 6FDA / TFDB 3: 7, and 6FDA / T in the clad 9.
Fluorinated polyimide with only FDB is used. Moreover, Si is used for the substrate 6.
【0009】上記材料を用いて作製された埋め込み型光
導波路のコア8、クラッド9の屈折率には次の関係があ
る。
n(core,TE) >n(clad,TE) >n(core,TM) >n(clad,
TM)
ここで、n(core,TE) ,n(core,TM) ,n(clad,TE) ,
n(clad,TM) は、
n(core,TE) :基板面に平行な偏波面をもつ導波光(T
E波)に対するコアの屈折率、
n(clad,TE) :基板面に平行な偏波面をもつ導波光(T
E波)に対するクラッドの屈折率、
n(core,TM) :基板面に垂直な偏波面をもつ導波光(T
M波)に対するコアの屈折率、
n(clad,TM) :基板面に垂直な偏波面をもつ導波光(T
M波)に対するクラッドの屈折率、
を意味する。したがって、該埋め込み型光導波路の導波
光のTE波、TM波に対する等価屈折率は以下に示す大
小関係がある。
n(core,TE)>Neff(TE)>n(clad,TE)>n(core,TM)>N
eff(TM)>n(clad,TE)The refractive indices of the core 8 and the clad 9 of the buried type optical waveguide manufactured by using the above materials have the following relationships. n (core, TE) > n (clad, TE) > n (core, TM) > n (clad,
TM) where n (core, TE), n (core, TM), n (clad, TE),
n (clad, TM) is n (core, TE): Guided light (T with polarization plane parallel to the substrate surface)
Refractive index of core for E wave), n (clad, TE): Guided light (T with polarization plane parallel to substrate surface)
Refractive index of cladding for E wave, n (core, TM): Guided light (T with polarization plane perpendicular to substrate surface)
Refractive index of core for M wave, n (clad, TM): Guided light (T with polarization plane perpendicular to substrate surface)
The refractive index of the cladding with respect to M wave). Therefore, the equivalent refractive index of the guided light of the embedded optical waveguide with respect to the TE wave and the TM wave has the following magnitude relationship. n (core, TE)> N eff (TE)> n (clad, TE)> n (core, TM)> N
eff (TM)> n (clad, TE)
【0010】図1において、スリット5を形成する光学
的に透明な物質10は、屈折率nがn(clad,TE) >n>
n(core,TM) の範囲にある光学的な等方性を持つ物質
で、例えばエポキシ系紫外線硬化材からなる。そして、
このスリット5は、図2に示すように、スリット5と入
射側光導波路1の光軸とのなす角度θはTE波が光導波
路1とスリット5との境界面で全反射する角度、すなわ
ち
θ> sin-1 n/Neff(TE))
を満足するように設けられている。したがって、入射側
光導波路1を導波するTE波は、光導波路1とスリット
5の境界面において全反射し、光路が変化するために出
射側光導波路3へは伝搬しない。一方、TM波の場合に
は、光導波路1とスリット5の境界面を透過し出射側光
導波路3へ伝搬する。このように、本発明の光スイッチ
では入射する光波の偏波面を変化させることにより光ス
イッチングが可能となる。In FIG. 1, the optically transparent substance 10 forming the slit 5 has a refractive index n of n (clad, TE)>n>.
It is a substance having optical isotropy in the range of n (core, TM) and is made of, for example, an epoxy-based ultraviolet curing material. And
As shown in FIG. 2, the slit 5 has an angle θ formed between the slit 5 and the optical axis of the incident side optical waveguide 1 at which the TE wave is totally reflected at the boundary surface between the optical waveguide 1 and the slit 5, that is, θ. > Sin −1 n / N eff (TE)) is satisfied. Therefore, the TE wave guided through the incident side optical waveguide 1 is totally reflected at the boundary surface between the optical waveguide 1 and the slit 5 and does not propagate to the emitting side optical waveguide 3 because the optical path is changed. On the other hand, in the case of the TM wave, the TM wave is transmitted through the boundary surface between the optical waveguide 1 and the slit 5 and propagates to the emission side optical waveguide 3. Thus, the optical switch of the present invention enables optical switching by changing the polarization plane of the incident light wave.
【0011】ところで、TM波は光導波路1とスリット
5の境界面で屈折するが、光導波路1と光導波路3の光
軸を必要ならばこの屈折を考慮して図4に示すように所
望の幅でずらすことにより、TM波の光導波路1から光
導波路3への結合効率を向上することができる。また、
入射側光導波路1にTE波とTM波を同時に入射する
と、TM波のみが光導波路3へ伝わることになり、本発
明の光スイッチは光スイッチングだけでなく、TE/T
Mモードスプリッタの機能も同時に合わせもつことを特
徴としている。なお、上記の実施例では、光導波路材料
としてはポリイミド材料についての例を説明したが、本
内容を逸脱しない範囲で他の光導波路材料(例えば、ガ
ラス系,PMMA系,BPB系等)を用いても良い。さ
らに、基板としてはSi材料の他にセラミックス基板や
銅ポリイミド配線板等を用いても良いことは言うまでも
ない。加えて、本実施例では光導波路1とスリット5の
境界面においてTE波は全反射し、TM波は透過する場
合について述べたが、TE波が透過しTM波が全反射す
るように構成できることは言うまでもない。By the way, the TM wave is refracted at the boundary surface between the optical waveguide 1 and the slit 5, but if the optical axes of the optical waveguide 1 and the optical waveguide 3 are required, this refraction is taken into consideration to obtain a desired wave as shown in FIG. By shifting the width by the width, the coupling efficiency of the TM wave from the optical waveguide 1 to the optical waveguide 3 can be improved. Also,
When the TE wave and the TM wave are simultaneously incident on the incident side optical waveguide 1, only the TM wave is transmitted to the optical waveguide 3, and the optical switch of the present invention not only performs optical switching but also TE / T.
The feature is that it also has the function of the M-mode splitter at the same time. In the above embodiments, the example of the polyimide material is described as the optical waveguide material, but other optical waveguide materials (for example, glass-based, PMMA-based, BPB-based, etc.) may be used without departing from the content. May be. Further, it goes without saying that a ceramic substrate, a copper polyimide wiring board, or the like may be used as the substrate in addition to the Si material. In addition, in the present embodiment, the TE wave is totally reflected and the TM wave is transmitted at the boundary surface between the optical waveguide 1 and the slit 5, but the TE wave is transmitted and the TM wave is totally reflected. Needless to say.
【0012】(実施例2)図5は、本発明の光スイッチ
の第2の実施例でY分岐光導波路に適用したものであ
る。図6は図5のb−b線に沿う断面図である。図5,
図6において、入射側光導波路1、出射側光導波路3,
4はSi基板上に形成された埋め込み型光導波路であ
り、コア8ならびにクラッド9は実施例1のそれぞれと
同じ材料を用いている。光導波路1と光導波路3の光軸
は平行であり、図5に示すように光学的に透明な実施例
1と同じ物質10が充填されているスリット5を挾んだ
構成となっている。光導波路1の光軸とスリット5の側
面との角度は、TE波が光導波路1とスリットの境界面
において全反射する角度θとなっている。また、光導波
路1の光軸と光導波路4の光軸のなす角度は2θであ
る。(Embodiment 2) FIG. 5 shows a second embodiment of the optical switch according to the present invention, which is applied to a Y-branch optical waveguide. FIG. 6 is a sectional view taken along line bb of FIG. Figure 5,
In FIG. 6, an incident side optical waveguide 1, an outgoing side optical waveguide 3,
Reference numeral 4 denotes an embedded optical waveguide formed on a Si substrate, and the core 8 and the clad 9 are made of the same material as that of the first embodiment. The optical axes of the optical waveguides 1 and 3 are parallel to each other, and as shown in FIG. 5, a slit 5 filled with the same substance 10 as in the optically transparent Example 1 is sandwiched. The angle between the optical axis of the optical waveguide 1 and the side surface of the slit 5 is an angle θ at which the TE wave is totally reflected at the boundary surface between the optical waveguide 1 and the slit. The angle formed by the optical axis of the optical waveguide 1 and the optical axis of the optical waveguide 4 is 2θ.
【0013】入射側光導波路1を導波するTE波は、光
導波路1とスリット5の境界面において全反射し、光導
波路4へ伝搬する。一方、TM波は、光導波路1とスリ
ット5の境界面を透過し光導波路3へ伝搬する。このと
きTM波は光導波路1とスリット5の境界面で屈折する
が、光導波路1と光導波路3の光軸を必要ならばこの屈
折を考慮して所望の幅でずらすことにより、TM波の光
導波路1から光導波路3への結合効率を向上することが
できる。以上より、本実施例では光導波路1に入射する
光波の偏波面を変化させることにより、1×2の光路切
り替えの光スイッチングが可能となる効果を有する。ま
た、光導波路1と光導波3の光軸を所望の幅でずらすこ
とにより、光導波路1から光導波路3への光結合効率を
増す効果ももつ。The TE wave guided through the incident side optical waveguide 1 is totally reflected at the boundary surface between the optical waveguide 1 and the slit 5 and propagates to the optical waveguide 4. On the other hand, the TM wave transmits through the boundary surface between the optical waveguide 1 and the slit 5 and propagates to the optical waveguide 3. At this time, the TM wave is refracted at the boundary surface between the optical waveguide 1 and the slit 5, but if necessary, the optical axes of the optical waveguide 1 and the optical waveguide 3 are shifted by a desired width in consideration of this refraction so that the TM wave The coupling efficiency from the optical waveguide 1 to the optical waveguide 3 can be improved. As described above, in the present embodiment, there is an effect that the optical switching of 1 × 2 optical path switching can be performed by changing the polarization plane of the light wave incident on the optical waveguide 1. Further, by shifting the optical axes of the optical waveguide 1 and the optical waveguide 3 by a desired width, there is also an effect of increasing the optical coupling efficiency from the optical waveguide 1 to the optical waveguide 3.
【0014】また、本実施例においても、入射側光導波
路1にTE波とTM波を同時に入射すると、TM波は光
導波路3へ伝搬し、TE波は光導波路4へ伝搬すること
から、本発明の光スイッチの本実施例は光路切り替えス
イッチングだけでなく、TE/TMモードスプリッタの
機能も同時に合わせもつ。なお、上記の実施例では、光
導波路材料としてポリイミド材料についての例を説明し
たが、本内容を逸脱しない範囲で他の光導波路材料(例
えば、ガラス系,PMMA系,BPB系等)を用いても
良い。さらに、基板としてはSi材料の他にセラミック
ス基板や銅ポリイミド配線板等を用いても良いことは言
うまでもない。加えて、本実施例では光導波路1とスリ
ット5の境界面においてTE波は全反射し、TM波は透
過する場合について述べたが、TE波が透過しTM波が
全反射するように構成できることは言うまでもない。Also in this embodiment, when the TE wave and the TM wave are simultaneously incident on the incident side optical waveguide 1, the TM wave propagates to the optical waveguide 3 and the TE wave propagates to the optical waveguide 4. This embodiment of the optical switch of the invention has not only the optical path switching switching but also the function of the TE / TM mode splitter. In the above embodiments, an example of a polyimide material was described as the optical waveguide material, but other optical waveguide materials (for example, glass-based, PMMA-based, BPB-based, etc.) may be used without departing from this content. Is also good. Further, it goes without saying that a ceramic substrate, a copper polyimide wiring board, or the like may be used as the substrate in addition to the Si material. In addition, in the present embodiment, the TE wave is totally reflected and the TM wave is transmitted at the boundary surface between the optical waveguide 1 and the slit 5, but the TE wave is transmitted and the TM wave is totally reflected. Needless to say.
【0015】(実施例3)図7は、本発明の光スイッチ
の第3実施例でX分岐光導波路に適用したものである。
図8は図7のc−c線に沿う断面図である。入射側光導
波路1,2、出射側光導波路3,4はSi基板上に形成
された埋め込み型光導波路であり、コアならびにクラッ
ドは実施例1のそれぞれと同じ材料を用いている。光導
波路1の光軸と光導波路4の光軸、光導波路2の光軸と
光導波路3の光軸はそれぞれ平行であり、それぞれは図
7に示すように光学的に透明な実施例1と同じ物質10
が充填されているスリット5を挾んだ構成となってい
る。光導波路1の光軸とスリット5の側面との角度、お
よび光導波路2の光軸とスリット5の側面との角度は、
それぞれTE波が光導波路1とスリット5の境界面およ
び光導波路2とスリット5の境界面において全反射する
角度θとなっている。また、光導波路1の光軸と光導波
路3の光軸のなす角度、および光導波路2の光軸と光導
波路4の光軸のなす角度は2θである。(Embodiment 3) FIG. 7 shows an optical switch according to a third embodiment of the present invention, which is applied to an X-branch optical waveguide.
FIG. 8 is a sectional view taken along the line cc of FIG. The incident side optical waveguides 1 and 2 and the emitting side optical waveguides 3 and 4 are embedded type optical waveguides formed on a Si substrate, and the core and the clad are made of the same materials as those in the first embodiment. The optical axis of the optical waveguide 1 and the optical axis of the optical waveguide 4 are parallel to each other, and the optical axis of the optical waveguide 2 and the optical axis of the optical waveguide 3 are parallel to each other. As shown in FIG. Same substance 10
It has a configuration in which the slit 5 filled with is sandwiched. The angle between the optical axis of the optical waveguide 1 and the side surface of the slit 5 and the angle between the optical axis of the optical waveguide 2 and the side surface of the slit 5 are
The angle θ is the total reflection angle of the TE wave at the boundary surface between the optical waveguide 1 and the slit 5 and the boundary surface between the optical waveguide 2 and the slit 5. The angle between the optical axis of the optical waveguide 1 and the optical axis of the optical waveguide 3 and the angle between the optical axis of the optical waveguide 2 and the optical axis of the optical waveguide 4 are 2θ.
【0016】入射側光導波路1を導波するTE波は、光
導波路1とスリット5の境界面において全反射し光導波
路3へ伝搬する。一方、TM波は、光導波路1とスリッ
ト5の境界面を透過し光導波路4へ伝搬する。このと
き、TM波は光導波路1とスリット5の境界面で屈折す
るが、光導波路1と光導波路4の光軸をこの屈折を考慮
して所望の幅でずらすことにより、TM波の光導波路1
から光導波路4への結合効率を向上することができる。
同様に、入射側光導波路2を導波するTE波は、光導波
路2とスリット5の境界面において全反射し光導波路4
へ伝搬する。一方、TM波は、光導波路2とスリット5
の境界面を透過し光導波路3へ伝搬する。このときTM
波は光導波路2とスリットの境界面で屈折するが、光導
波路2と光導波路3の光軸をこの屈折を考慮して所望の
幅でずらすことにより、TM波の光導波路2から光導波
路3への結合効率を向上することができる。The TE wave guided through the incident side optical waveguide 1 is totally reflected at the boundary surface between the optical waveguide 1 and the slit 5 and propagates to the optical waveguide 3. On the other hand, the TM wave passes through the boundary surface between the optical waveguide 1 and the slit 5 and propagates to the optical waveguide 4. At this time, the TM wave is refracted at the boundary surface between the optical waveguide 1 and the slit 5, but by shifting the optical axes of the optical waveguide 1 and the optical waveguide 4 by a desired width in consideration of this refraction, the TM wave optical waveguide 1
It is possible to improve the coupling efficiency from the to the optical waveguide 4.
Similarly, the TE wave guided through the incident-side optical waveguide 2 is totally reflected at the boundary surface between the optical waveguide 2 and the slit 5 and is reflected by the optical waveguide 4.
Propagate to. On the other hand, the TM wave is generated by the optical waveguide 2 and the slit 5.
Is transmitted through the boundary surface of and propagates to the optical waveguide 3. At this time TM
The wave is refracted at the boundary surface between the optical waveguide 2 and the slit, but by shifting the optical axes of the optical waveguide 2 and the optical waveguide 3 by a desired width in consideration of this refraction, the TM wave optical waveguide 2 is shifted to the optical waveguide 3. It is possible to improve the efficiency of binding to.
【0017】以上より、本実施例では光導波路1または
光導波路2へ入射する光波の偏波面を変化させることに
より、2×2の光路切り替えの光スイッチングが可能と
なる効果を有する。また、光導波路1の光軸と光導波路
4の光軸、光導波路2の光軸と光導波路3の光軸を所望
の幅でずらすことにより、光導波路1から光導波路4、
光導波路2から光導波路3への光結合効率を増す効果も
もつ。また、本実施例においても、入射側光導波路1
(入射側光導波路2)にTE波とTM波を同時に入射す
ると、TM波は光導波路4(光導波路3)へ伝搬し、T
E波は光導波路3(光導波路4)へ伝搬することから、
本発明の光スイッチの本実施例は2×2の光路切り替え
スイッチングだけでなく、2×2のTE/TMモードス
プリッタの機能も同時に合わせもつ。なお、上記の実施
例では、光導波路材料としてポリイミド材料についての
例を説明したが、本内容を逸脱しない範囲で他の光導波
路材料(例えば、ガラス系,PMMA系,BPB系等)
を用いても良い。さらに、基板としてはSi材料の他に
セラミックス基板や銅ポリイミド配線板等を用いても良
いことは言うまでもない。加えて、本実施例では光導波
路1とスリット5の境界面においてTE波は全反射し、
TM波は透過する場合について述べたが、TE波が透過
しTM波が全反射するように構成できることは言うまで
もない。As described above, in the present embodiment, there is an effect that by changing the polarization plane of the light wave incident on the optical waveguide 1 or the optical waveguide 2, 2 × 2 optical path switching optical switching becomes possible. In addition, by shifting the optical axes of the optical waveguide 1 and the optical waveguide 4 and the optical axes of the optical waveguide 2 and the optical waveguide 3 by a desired width, the optical waveguide 1 to the optical waveguide 4 can be shifted.
It also has the effect of increasing the optical coupling efficiency from the optical waveguide 2 to the optical waveguide 3. Further, also in this embodiment, the incident side optical waveguide 1
When a TE wave and a TM wave are simultaneously incident on the (incident side optical waveguide 2), the TM wave propagates to the optical waveguide 4 (optical waveguide 3) and T
Since the E wave propagates to the optical waveguide 3 (optical waveguide 4),
This embodiment of the optical switch of the present invention has not only the 2 × 2 optical path switching switching but also the function of the 2 × 2 TE / TM mode splitter. In the above embodiments, an example of a polyimide material as an optical waveguide material has been described, but other optical waveguide materials (eg, glass-based, PMMA-based, BPB-based, etc.) can be used without departing from the present content.
May be used. Further, it goes without saying that a ceramic substrate, a copper polyimide wiring board, or the like may be used as the substrate in addition to the Si material. In addition, in this embodiment, the TE wave is totally reflected at the boundary surface between the optical waveguide 1 and the slit 5,
Although the case where the TM wave is transmitted has been described, it goes without saying that the TE wave can be transmitted and the TM wave can be totally reflected.
【0018】[0018]
【発明の効果】以上の説明のように、本発明による光ス
イッチは、光導波路のTE導波光(偏波面が基板面に対
して平行な導波光)とTM導波光(偏波面が基板面に対
して垂直な導波光)に対する等価屈折率の相違を巧みに
利用し、該スイッチの光導波路の一部に設けたスリット
に充填する物質をエポキシ系紫外線硬化材とし、該エポ
キシ系紫外線硬化材の屈折率を光導波路のTE波および
TM波に対する等価屈折率の中間に選ぶことにより、ス
リットに充填した物質を出し入れすることなく光スイッ
チングが可能である効果を有する。As described above, in the optical switch according to the present invention, TE guided light (guided light whose polarization plane is parallel to the substrate surface) and TM guided light (polarization plane is the substrate surface) of the optical waveguide. By making good use of the difference in the equivalent refractive index with respect to the vertically-guided light), a substance to be filled in the slit provided in a part of the optical waveguide of the switch is made into an epoxy-based ultraviolet curing material,
By selecting the refractive index of the xy-based ultraviolet curing material to be in the middle of the equivalent refractive index for the TE wave and the TM wave of the optical waveguide, there is an effect that optical switching can be performed without taking in and out the substance filled in the slit.
【図1】本発明の第1の実施例の斜視図。FIG. 1 is a perspective view of a first embodiment of the present invention.
【図2】本発明の第1の実施例の平面図。FIG. 2 is a plan view of the first embodiment of the present invention.
【図3】図2のa−a線における断面図。FIG. 3 is a sectional view taken along line aa of FIG.
【図4】本発明の第1の実施例において、入射側光導波
路と出射側光導波路の光軸をずらした構成の平面図。FIG. 4 is a plan view of a configuration in which the optical axes of the incident side optical waveguide and the emitting side optical waveguide are shifted from each other in the first embodiment of the present invention.
【図5】本発明の第2の実施例の平面図。FIG. 5 is a plan view of the second embodiment of the present invention.
【図6】図5のb−b線における断面図。6 is a cross-sectional view taken along the line bb of FIG.
【図7】本発明の第3の実施例の平面図。FIG. 7 is a plan view of the third embodiment of the present invention.
【図8】図7のc−c線における断面図。8 is a sectional view taken along line cc of FIG.
【図9】従来の技術の平面図。FIG. 9 is a plan view of a conventional technique.
【図10】従来の技術の平面図。FIG. 10 is a plan view of a conventional technique.
1,2 入射側光導波路 3,4 出射側光導波路 5 スリット 6 基板 7 屈折率整合物質 8 光導波路のコア 9 光導波路のクラッド 10 スリットに充填されている物質 1, 2 Incident side optical waveguide 3,4 Output side optical waveguide 5 slits 6 substrate 7 Refractive index matching material 8 Optical waveguide core 9 Optical waveguide cladding 10 Material filled in the slit
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G02F 1/315 G02B 6/126 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) G02F 1/315 G02B 6/126
Claims (4)
波面をもつ導波光(TE波)と基板面に垂直な偏波面を
もつ導波光(TM波)に対する等価屈折率が異なる光導
波路であって、該光導波路の一部に該光導波路の光軸を
横切りかつ該光導波路面に垂直に、光学的に等方性を有
し透明であり、かつ屈折率が該光導波路のTE波とTM
波に対する等価屈折率の中間の値をもつ物質が常に充填
されているスリットが形成され、かつ該光導波路の光軸
と該スリットの角度がTE波,TM波のどちらか一方の
みを該光導波路と該スリットの境界面において全反射す
るように設定されており、前記スリットに充填される物
質はエポキシ系紫外線硬化材であることを特徴とする光
スイッチ。1. An optical waveguide which is formed on a substrate and has different equivalent refractive indices for guided light (TE wave) having a polarization plane parallel to the substrate surface and guided light (TM wave) having a polarization plane perpendicular to the substrate surface. A waveguide, which is transparent to a part of the optical waveguide, crosses the optical axis of the optical waveguide and is perpendicular to the surface of the optical waveguide, is optically isotropic, and has a refractive index of the optical waveguide. TE wave and TM
A slit is formed which is always filled with a substance having an intermediate value of the equivalent refractive index for waves, and the optical axis of the optical waveguide and the angle of the slit are TE wave or TM wave. And a material that is set to totally reflect at the boundary surface of the slit and is filled in the slit.
An optical switch whose quality is an epoxy-based UV curing material .
波面をもつ導波光(TE波)と基板面に垂直な偏波面を
もつ導波光(TM波)に対する等価屈折率が異なる光導
波路によりなるY分岐光導波路であって、該Y分岐光導
波路の分岐された2つの枝光導波路の一方と分岐部との
接続部分において、該一方の枝光導波路の光軸を横切り
かつ該Y分岐光導波路面に垂直に、光学的に等方性を有
し透明であり、かつ屈折率が該光導波路のTE波とTM
波に対する等価屈折率の中間の値をもつ物質が常に充填
されているスリットが形成され、さらに該光導波路の光
軸と該スリットの角度がTE波,TM波のどちらか一方
のみを該光導波路と該スリットの境界面において全反射
するように設定されており、前記スリットに充填される
物質はエポキシ系紫外線硬化材であることを特徴とする
光スイッチ。2. An optical waveguide which is formed on a substrate and has different equivalent refractive indices for guided light (TE wave) having a polarization plane parallel to the substrate surface and guided light (TM wave) having a polarization plane perpendicular to the substrate surface. A Y-branch optical waveguide formed of a waveguide, wherein the Y-branch optical waveguide has a connection portion between one of the branched two branch optical waveguides and a branch portion, which crosses the optical axis of the one branch optical waveguide and is Perpendicular to the plane of the branched optical waveguide, it is optically isotropic and transparent, and its refractive index is TE wave and TM of the optical waveguide.
A slit is formed which is always filled with a substance having an intermediate value of the equivalent refractive index with respect to a wave, and the optical axis of the optical waveguide and the angle of the slit are either TE wave or TM wave. And is set so as to totally reflect on the boundary surface of the slit, and is filled in the slit.
An optical switch characterized in that the substance is an epoxy-based ultraviolet curing material .
波面をもつ導波光(TE波)と基板面に垂直な偏波面を
もつ導波光(TM波)に対する等価屈折率が異なる光導
波路からなるX分岐光導波路であって、該X分岐光導波
路の交差部において、交差角の2等分線上に該光導波路
の光軸を横切りかつ該光導波路面に垂直に、光学的に等
方性を有し透明であり、かつ屈折率が該光導波路のTE
波とTM波に対する等価屈折率の中間の値をもつ物質が
常に充填されているスリットが形成され、さらに該X分
岐光導波路の交差角がTE波,TM波のどちらか一方の
みを該光導波路と該スリットの境界面において全反射す
るように設定されており、前記スリットに充填される物
質はエポキシ系紫外線硬化材であることを特徴とする光
スイッチ。3. An optical waveguide which is formed on a substrate and has different equivalent refractive indices for guided light (TE wave) having a polarization plane parallel to the substrate surface and guided light (TM wave) having a polarization plane perpendicular to the substrate surface. An X-branch optical waveguide comprising a waveguide, which intersects the optical axis of the optical waveguide on the bisector of the crossing angle at the intersection of the X-branching optical waveguides and is perpendicular to the optical waveguide surface, Is transparent and has a refractive index of TE of the optical waveguide.
Slits are always filled with a material having an intermediate value of the equivalent refractive index for the TM wave and the TM wave, and the crossing angle of the X-branching optical waveguide is only one of the TE wave and the TM wave. And a material that is set to totally reflect at the boundary surface of the slit and is filled in the slit.
An optical switch whose quality is an epoxy-based UV curing material .
路の光軸が、所望の幅でずれていることを特徴とする請
求項1,2又は3記載の光スイッチ。4. The optical switch according to claim 1, wherein the optical axes of the two optical waveguides facing each other across the slit are displaced by a desired width.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP10649394A JP3379658B2 (en) | 1994-05-20 | 1994-05-20 | Light switch |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10649394A JP3379658B2 (en) | 1994-05-20 | 1994-05-20 | Light switch |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07318984A JPH07318984A (en) | 1995-12-08 |
JP3379658B2 true JP3379658B2 (en) | 2003-02-24 |
Family
ID=14434980
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