JP3368512B2 - Defect inspection method for transparent sheet-like molded product - Google Patents
Defect inspection method for transparent sheet-like molded productInfo
- Publication number
- JP3368512B2 JP3368512B2 JP19065494A JP19065494A JP3368512B2 JP 3368512 B2 JP3368512 B2 JP 3368512B2 JP 19065494 A JP19065494 A JP 19065494A JP 19065494 A JP19065494 A JP 19065494A JP 3368512 B2 JP3368512 B2 JP 3368512B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent sheet
- shaped molded
- defect
- molded product
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Image Processing (AREA)
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Input (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、透明シート状成形体の
欠陥検査方法に関する。更に詳細には、連続的に移送さ
れる透明シート状成形体の表面に存在する微細な厚みム
ラ等の欠陥検査方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting a transparent sheet-shaped molded product for defects. More specifically, the present invention relates to a method for inspecting defects such as minute thickness unevenness existing on the surface of a transparent sheet-shaped molded body that is continuously transferred.
【０００２】[0002]
【従来の技術】従来、シートやフィルム等のシート状成
形体の微細な傷、例えば、深さ０．１μｍ〜５μｍ，幅
０．１μｍ〜１０μｍの極めて微細な厚みムラの検出
は、検査ライン上にて作業者が欠陥と思われる部分を投
影機によりスクリーンに投影し、明暗の程度を目視観察
することにより、官能的に検査していた。しかし、かか
る方法は極めて高度の熟練を要するのみならず、シート
の成形ライン上にてオンラインで作業者が欠陥を検知す
ることは非常に困難であり、従って製造後の巻取りシー
トを検査する方法を採用しなければならないことより、
欠陥品への対応が製造時にフィードバック出来ないた
め、製品の収率が悪く、品質保証もし難い状況にあっ
た。2. Description of the Related Art Conventionally, on a test line, it is necessary to detect minute scratches on a sheet-shaped molded product such as a sheet or film, for example, extremely minute unevenness of depth of 0.1 μm to 5 μm and width of 0.1 μm to 10 μm. At this point, an operator projected a portion that seems to be defective on a screen with a projector, and visually observed the degree of light and darkness to perform a sensory inspection. However, such a method requires not only a very high degree of skill, but it is very difficult for an operator to detect a defect online on a sheet forming line, and therefore, a method for inspecting a rolled sheet after manufacturing. Rather than having to employ
Since the response to defective products cannot be fed back at the time of manufacturing, the product yield was poor and it was difficult to guarantee quality.
【０００３】[0003]
【発明が解決しようとする課題】かかる状況に鑑み、本
発明者等は、シート状成形体の微細欠陥をオンライン上
で自動的に検出可能な検査方法を見出すことを目的と
し、鋭意検討した結果、上記目的を全て満足する検査方
法を見出し、本発明を完成するに至った。In view of the above situation, the inventors of the present invention have made diligent studies for the purpose of finding an inspection method capable of automatically detecting fine defects in a sheet-shaped molded product online. The present invention has been completed by finding an inspection method that satisfies all the above objects.
【０００４】[0004]
【課題を解決するための手段】即ち本発明は、連続的に
移送される透明シート状成形体の片側から、該透明シー
ト状成形体に対し５°〜１５°の角度で高輝度、高指向
性の光を照射し、該透明シート状成形体を透過してきた
光を、該透明シート状成形体の表面に対して前方或いは
後方に焦点位置をずらした状態で画像入力装置で受光
し、前記画像入力装置からの出力信号に基づき画像処理
装置にて欠陥検出を行うことを特徴とする透明シート状
成形体の欠陥検査方法を提供するにある。That is, according to the present invention, high brightness and high directivity are provided at an angle of 5 ° to 15 ° with respect to the transparent sheet-shaped molded product from one side of the continuously transferred transparent sheet-shaped molded product. Of a transparent sheet-shaped molded product, and the light transmitted through the transparent sheet-shaped molded product is received by an image input device in a state in which the focal position is shifted forward or backward with respect to the surface of the transparent sheet-shaped molded product. Another object of the present invention is to provide a defect inspection method for a transparent sheet-shaped molded product, which is characterized in that an image processing device detects a defect based on an output signal from an image input device.
【０００５】以下、本発明方法を図面を用いて更に詳細
に説明する。図１は本発明の検査方法を実施するための
欠陥検査装置の一実施態様であり、図中、１は被検査物
であるシート状成形体、２は照明手段、３は画像入力装
置、４は画像処理装置を示す。The method of the present invention will be described in more detail below with reference to the drawings. FIG. 1 shows an embodiment of a defect inspection apparatus for carrying out the inspection method of the present invention. In the figure, 1 is a sheet-shaped molded product as an inspection object, 2 is an illumination means, 3 is an image input device, 4 Indicates an image processing apparatus.
【０００６】本発明方法で欠陥検査を行うことにより、
特に威力を発揮するシート状成形体は微細な傷や厚みム
ラ、例えば透明シートの表面に存在する深さ（高さ）
０．１μｍ〜５μｍ，幅０．１μｍ〜１０μｍの厚みム
ラや傷を有する透明シート状成形体である。このような
ものとしては位相差フィルム、偏光フィルム、トリアセ
チルセルロースフィルム等の各種フィルムが挙げられ
る。また、前記した傷を表面に有する数ｍｍ〜約２０ｍ
ｍ程度の厚みのアクリル成形体の欠陥検査にも適用でき
る。By performing defect inspection by the method of the present invention,
The sheet-like molded product that is particularly effective is fine scratches and uneven thickness, for example, the depth (height) existing on the surface of the transparent sheet.
A transparent sheet-shaped molded product having a thickness unevenness and a scratch of 0.1 μm to 5 μm and a width of 0.1 μm to 10 μm. Examples of such a film include various films such as a retardation film, a polarizing film and a triacetyl cellulose film. Also, several mm to about 20 m having the above-mentioned scratch on the surface
It can also be applied to the defect inspection of an acrylic molding having a thickness of about m.
【０００７】本発明に於いて、照明手段２は連続的に移
送される透明シート状成形体の被検査面の裏側から高輝
度、高指向性の光、例えば高周波蛍光灯等の３００００
ｃｄ／ｍ2 以上の輝度を有しスリット等より照射される
線状光が好適に使用される。In the present invention, the illuminating means 2 has a high brightness and a high directivity from the back side of the surface to be inspected of the transparent sheet-shaped molded product which is continuously transferred, for example, 30,000 such as a high frequency fluorescent lamp.
Linear light having a brightness of cd / m 2 or more and irradiated from a slit or the like is preferably used.
【０００８】透明シート状成形体への光の照射は透明シ
ート状成形体に対し５°〜１５°の低角度で照射する。
かかる角度はシート上の欠陥の微小な形状変化に対し入
射光が屈折し透過する場合に屈折が大となる角度であ
り、１５°を越える場合には欠陥を影として捉えること
が出来ず、他方５°より低い場合には正常面の厚みムラ
も明度差として検出するとか、シート巻取りによる微小
な上下振動によっても検出範囲が変動し検出率が低下す
る等の欠点が生じる。The transparent sheet-shaped molded product is irradiated with light at a low angle of 5 ° to 15 ° with respect to the transparent sheet-shaped molded product.
Such an angle is an angle at which refraction is large when incident light is refracted and transmitted with respect to a minute change in shape of a defect on the sheet, and when it exceeds 15 °, the defect cannot be regarded as a shadow, and on the other hand, If the angle is less than 5 °, the thickness unevenness of the normal surface may be detected as a difference in brightness, or even a small vertical vibration due to the winding of the sheet may cause the detection range to fluctuate and the detection rate to decrease.
【０００９】透明シート状成形体を透過してきた光は、
画像入力装置で受光する。本発明方法に於いて画像入力
装置はＣＣＤカメラを使用する。該ＣＣＤカメラは透明
シート状成形体の表面に対して、前方或いは後方に焦点
位置をずらした状態で、画像入力装置に受光する。微小
な欠陥（厚みムラ）の場合は、光の透過により生じる明
度の変化も微小なため、そのままでは見つけにくいが、
ＣＣＤカメラの焦点をシート面から僅かに前後にずらし
た位置にすることにより、受光面における欠陥の明度の
変化が拡大され欠陥が見つけやすくなる。但し焦点位置
からのズレが大きくなる場合には明度差が少なくなり判
別し難くなるので焦点位置のズレ程度は検査するシート
の欠陥である厚みムラより適宜予備実験により決定する
ことが推奨される。The light transmitted through the transparent sheet-shaped molded product is
Light is received by the image input device. In the method of the present invention, the image input device uses a CCD camera. The CCD camera receives light on the image input device in a state in which the focal position is shifted forward or backward with respect to the surface of the transparent sheet-shaped molded body. In the case of minute defects (thickness unevenness), the change in brightness caused by light transmission is also small, so it is difficult to find it as it is.
By arranging the focus of the CCD camera slightly back and forth from the sheet surface, the change in the brightness of the defect on the light receiving surface is enlarged, and the defect can be easily found. However, when the deviation from the focus position becomes large, the difference in lightness becomes small and it becomes difficult to discriminate. Therefore, it is recommended to appropriately determine the deviation degree of the focus position by preliminary experiments from the thickness unevenness which is a defect of the sheet to be inspected.
【００１０】画像入力装置からの出力信号は画像処理装
置にて処理される。該画像処理装置は画像読取系と画像
処理系とパーソナルコンピューター（以下パソコンと称
する）より構成されており、パソコンより入力指示され
た設定値を基に、画像読取系で得たデータを判定する機
能を有する。このような画像処理装置としては株式会社
テクノス製、２０００Ｈシリーズが適用し得る。The output signal from the image input device is processed by the image processing device. The image processing apparatus is composed of an image reading system, an image processing system and a personal computer (hereinafter referred to as a personal computer), and has a function of judging data obtained by the image reading system based on a set value input from the personal computer. Have. As such an image processing apparatus, the 2000H series manufactured by Technos Co., Ltd. can be applied.
【００１１】本発明の画像処理装置における欠陥検出法
は、連続的に移送される透明シート状成形体の幅方向と
流れ方向を多数の画素に分割し、且つ各画素を明度差と
した３次元方式で表し、幅方向の隣接する２つの領域の
明度を欠陥検出に適した画素数だけ各々積算し、これら
の積算値の差を順次検出し、しきい値を越えた点数が単
位面積当たり一定値を越えた場合に欠陥として検出する
方法である。The defect detection method in the image processing apparatus of the present invention is a three-dimensional method in which the width direction and the flow direction of the continuously transferred transparent sheet shaped body are divided into a large number of pixels, and each pixel is defined as a brightness difference. The brightness of two adjacent areas in the width direction is integrated by the number of pixels suitable for defect detection, the difference between these integrated values is sequentially detected, and the number of points exceeding the threshold is constant per unit area. This is a method of detecting a defect when the value is exceeded.
【００１２】本発明に用いた画像処理装置に於いては画
像入力装置からの出力信号は画像読取系にてシートの幅
（横）方向を５０００画素に分割し、シート移送（縦）
方向に２０００回／秒繰返し、各画素の明度を２５６段
階の明度で読取る機能を有している。In the image processing apparatus used in the present invention, the output signal from the image input apparatus is divided into 5000 pixels in the width (horizontal) direction of the sheet in the image reading system, and the sheet is transferred (vertical).
It has a function of reading the brightness of each pixel at 256 levels of brightness by repeating the same at 2000 times / sec.
【００１３】図２は明度をＺ軸にとった読取データの一
例を示すもので、欠陥部分近辺のデータをさらに拡大し
たのが図３である。連続する枠は各画素を表し数値は明
度を示したもので、欠陥部は連続して明度が低くなって
おり、最も明度の低い部分は９８であることがわかる。
それ故、欠陥の判断を明度９８を基準として判断する
と、欠陥部分でない先頭から２２番目の９８をも欠陥と
判断することとなり、正確な欠陥の判断が困難となる。
しかしながら、図３に示すように隣接する５個分のデー
タを積算し、更に隣接する５個分のデータを積算し、こ
れらの積算値の差を順次検出して相関処理し、しきい値
を越えた点数より欠陥の判断を行う場合には図４に示す
如く欠陥部分は拡大され、正常部とは明確に区別するこ
とが可能となるのである。FIG. 2 shows an example of read data in which the brightness is taken on the Z-axis, and FIG. 3 is an enlarged view of the data near the defective portion. It can be seen that a continuous frame represents each pixel and the numerical value indicates the lightness, and the defective portion has a continuously low lightness, and the lowest lightness portion is 98.
Therefore, if the judgment of the defect is made on the basis of the brightness 98, the 22nd 98 from the head which is not the defective part is also judged to be the defect, which makes it difficult to accurately judge the defect.
However, as shown in FIG. 3, five adjacent data are integrated, further five adjacent data are integrated, the difference between these integrated values is sequentially detected, correlation processing is performed, and the threshold value is set. When the defect is judged from the exceeded points, the defective portion is enlarged as shown in FIG. 4 and can be clearly distinguished from the normal portion.
【００１４】表１は本発明の欠陥検査方法を３ｍ／分の
速度で連続的に移送される線欠陥の多い６００ｍｍ幅の
位相差シートに適用した検査記録である。光源は輝度８
００００ｃｄ／ｍ2 の線状光源を発する高輝度高周波蛍
光灯を用い、シート面に対し１０°の低角度でシート裏
面より表面側に光が透過するよう設定し、またＣＣＤカ
メラの焦点はシート検査面より光源側にずらした状態で
受光した。Table 1 is an inspection record in which the defect inspection method of the present invention is applied to a phase difference sheet having a width of 600 mm and having many line defects which are continuously transferred at a speed of 3 m / min. Brightness 8
A high-intensity high-frequency fluorescent lamp that emits a linear light source of 0000 cd / m 2 is used, and the light is set to pass from the backside of the sheet to the front side at a low angle of 10 ° with respect to the sheet surface, and the focus of the CCD camera is sheet inspection. The light was received while being shifted from the surface to the light source side.
【００１５】この時ＣＣＤカメラより入力された画像
は、画像処理装置（テクノス２０００Ｈ及びパソコン）
の画像読取系によりシートの幅（横）方向を５０００画
素に分割し、移送（縦）方向１．２５ｍｍの間に５０ス
キャン繰り返し、各画素の明度を２５６段階の明度で読
取らせると共に、予めシートの欠陥の検出に適した累積
画素数を４０、累積明度差のオーバーフローを防止する
為の除算係数を５、及び欠陥判断の為の明度の上限しき
い値を１５８、下限しきい値を９８とし、更にしきい値
を外れた場合欠陥品として判断する基準を上限、下限と
も５００とする判断パラメータ（判断パラメータは検査
対象物により異なる）をパソコンより指示、設定し、該
パソコンの指示に従い連続して入力される画像読取系よ
り得たデータを画像処理部で処理し、欠陥がある時はＮ
Ｇ信号を出力するとともにシートにマーキングする指示
をも出力する。これらの被検査部のシートの画像、測定
値、判定結果は作業者にＣＲＴモニターで表示すると共
に記録装置で表１の検査記録表を作成する。表１は検出
欠陥データを示すものであり、５０スキャンを１単位と
して判定しシート流れ方向４００スキャン分を一行に記
し、この中での最大明度値と最小明度値、しきい値を外
れた欠陥の個数及びシート上の欠陥位置を流れ方向と幅
方向で記載されている。At this time, the image input from the CCD camera is an image processing device (Technos 2000H and personal computer).
The image reading system divides the width (horizontal) direction of the sheet into 5000 pixels and repeats 50 scans during 1.25 mm in the transfer (vertical) direction to read the brightness of each pixel in 256 levels of brightness and The cumulative number of pixels suitable for detecting a sheet defect is 40, the division coefficient is 5 for preventing the overflow of the cumulative brightness difference, and the upper limit threshold value of lightness 158 and the lower limit threshold value are 98 for judging defects. If the threshold value is further exceeded, the criterion for judging a defective product is 500 for both the upper limit and the lower limit. The judgment parameters (judgment parameters vary depending on the inspection object) are set and instructed from the personal computer, and continuously according to the instructions of the personal computer. The data obtained from the image reading system is processed by the image processing unit, and if there is a defect, N
The G signal is output and the instruction to mark the sheet is also output. The image of the sheet of the inspected portion, the measured value, and the determination result are displayed to the operator on the CRT monitor, and the inspection record table of Table 1 is created by the recording device. Table 1 shows the detected defect data, in which 50 scans are judged as one unit, 400 scans in the sheet flow direction are written in one line, and the maximum brightness value and the minimum brightness value among them, and the defects that are out of the threshold value The number of defects and the defect position on the sheet are described in the flow direction and the width direction.
【００１６】表１より被検査シートにはスタートから８
７ｃｍまでは５００個以上の上限、下限のしきい値を越
える部分はなく、８８ｃｍの間に４１５８個、８９ｃｍ
の間には２０６３個のしきい値を外れた欠陥が存在する
ことがわかる。更に１ｍから２ｍ９６ｃｍの間も５００
個以上の上限、下限のしきい値を越える部分がないこと
がわかる。From Table 1, it is 8 from the start for the inspection sheet.
Up to 7 cm, there is no part exceeding the upper and lower thresholds of 500 or more, and 4158 or 89 cm within 88 cm.
It can be seen that there are 2063 out-of-threshold defects. 500 between 1m and 2m 96cm
It can be seen that there is no portion that exceeds the upper and lower thresholds.
【００１７】[0017]
【表１】 [Table 1]
【００１８】尚、上記方法に於いて光源の照射角度をシ
ート面に対し４５°にした場合、及び焦点をシート検査
面に正常に合わせた場合、更には高周波蛍光灯等の普通
輝度（１００００ｃｄ／ｍ2 未満の光源を用いた場合に
はいずれも欠陥検出が困難であった。In the above method, when the irradiation angle of the light source is set to 45 ° with respect to the sheet surface, and when the focus is normally adjusted to the sheet inspection surface, the normal luminance (10000 cd / It was difficult to detect defects in any of the cases where a light source of less than m 2 was used.
【００１９】[0019]
【発明の効果】以上詳述したように、本発明によれば高
輝度、高指向性の光源を、被検査シート面に対し特定角
度で照射し、この透過光を正常の焦点距離に対し光源側
或いは画像入力装置（ＣＣＤカメラ）側の何れかにずら
した状態で画像入力装置で受光しこの出力信号に基づき
画像処理装置にて特定方法で欠陥検出を行うことによ
り、従来であれば測定困難であったようなシート状成形
体の厚みムラ等の極めて微細な欠陥をオンライン上で自
動的に検出を可能としたもので、従来作業者の感にたよ
っていた検査を自動定量化し得ることにより、製品収率
の向上、品質保証、作業者の非特定化が可能となるな
ど、、シート状成形体の微細欠陥の検査方法としてその
効果は極めて大である。As described in detail above, according to the present invention, a light source of high brightness and high directivity is irradiated onto a surface of a sheet to be inspected at a specific angle, and this transmitted light is emitted as a light source for a normal focal length. Side or the side of the image input device (CCD camera), the light is received by the image input device and the defect is detected by a specific method in the image processing device based on this output signal. It is possible to automatically detect extremely minute defects such as uneven thickness of the sheet-shaped molded product on-line, and it is possible to automatically quantify the inspection that conventionally relied on the operator's feeling. In addition, it is possible to improve the product yield, guarantee the quality, and make the operator non-specific.
【図１】シート欠陥を検査するための欠陥検査装置を示
す。FIG. 1 shows a defect inspection apparatus for inspecting a sheet defect.
【図２】明度をＺ軸にとった読取り原画像を示す。FIG. 2 shows a read original image with lightness on the Z axis.
【図３】欠陥部分近辺の拡大データを示す。FIG. 3 shows enlarged data in the vicinity of a defective portion.
【図４】隣接する５個分のデータを積算し、更に隣接す
る５個分のデータを積算し、これらの積算値の差を順次
検出して相関処理したグラフを示す。FIG. 4 shows a graph in which data for five adjacent data items are integrated, data for five adjacent data items are integrated, and the difference between these integrated values is sequentially detected to perform correlation processing.
１は被検査物であるシート状成形体、２は照明手段、３
は画像入力装置、４は画像処理装置を示す。1 is a sheet-shaped molded product which is an object to be inspected, 2 is illumination means, 3
Is an image input device, and 4 is an image processing device.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平６−235624（ＪＰ，Ａ) 特開 平５−180785（ＪＰ，Ａ) 特開 平３−42560（ＪＰ，Ａ) 特開 平４−328549（ＪＰ，Ａ) 特開 昭49−1280（ＪＰ，Ａ) 特開 平４−355353（ＪＰ，Ａ) 特開 平４−10171（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 21/88 - 21/958 G01B 11/06 101 G06T 1/00 G06T 7/00 ─────────────────────────────────────────────────── --- Continuation of the front page (56) Reference JP-A-6-235624 (JP, A) JP-A-5-180785 (JP, A) JP-A-3-42560 (JP, A) JP-A-4-4 328549 (JP, A) JP 49-1280 (JP, A) JP 4-355353 (JP, A) JP 4-10171 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) G01N 21/88-21/958 G01B 11/06 101 G06T 1/00 G06T 7/00
Claims (4)
の片側から、該透明シート状成形体に対し５°〜１５°
の角度で高輝度、高指向性の光を照射し、該透明シート
状成形体を透過してきた光を、該透明シート状成形体の
表面に対して前方或いは後方に焦点位置をずらした状態
で画像入力装置で受光し、前記画像入力装置からの出力
信号に基づき画像処理装置にて欠陥検出を行うことを特
徴とする透明シート状成形体の欠陥検査方法。1. A transparent sheet-shaped molded article, which is continuously transferred, from one side thereof to the transparent sheet-shaped molded article at 5 ° to 15 °.
High-luminance, high-directivity light is radiated at an angle of, and the light transmitted through the transparent sheet-shaped molded body is moved in a state where the focal position is shifted forward or backward with respect to the surface of the transparent sheet-shaped molded body. A defect inspection method for a transparent sheet-shaped molded product, which comprises receiving light by an image input device and detecting a defect by an image processing device based on an output signal from the image input device.
する微細な厚みムラであることを特徴とする請求項１記
載の透明シート状成形体の欠陥検査方法。2. The defect inspection method for a transparent sheet-shaped molded product according to claim 1, wherein the defect is a fine unevenness in thickness present on the surface of the transparent sheet-shaped molded product.
する深さ０．１μｍ〜５μｍ，幅０．１μｍ〜１０μｍ
の厚みムラであることを特徴とする請求項１記載の透明
シート状成形体の欠陥検査方法。3. A depth of 0.1 μm to 5 μm and a width of 0.1 μm to 10 μm in which defects are present on the surface of the transparent sheet-shaped molded product.
2. The defect inspection method for a transparent sheet-shaped molded article according to claim 1, wherein the defect is uneven thickness.
続的に移送される透明シート状成形体の幅方向と流れ方
向を多数の画素に分割し、且つ各画素を明度差とした３
次元方式で表し、幅方向の隣接する２つの領域の明度を
欠陥検出に適した画素数だけ各々積算し、これらの積算
値の差を順次検出し、しきい値を越えた点数が単位面積
当たり一定値を越えた場合に欠陥として検出することを
特徴とする請求項１記載の透明シート状成形体の欠陥検
査方法。4. A defect detection method in an image processing apparatus, wherein a width direction and a flow direction of a continuously transferred transparent sheet-shaped molded body are divided into a large number of pixels, and each pixel is defined as a brightness difference.
Expressed in a dimensional system, the brightness of two adjacent areas in the width direction is integrated by the number of pixels suitable for defect detection, and the difference between these integrated values is sequentially detected. The defect inspection method for a transparent sheet-shaped molded article according to claim 1, wherein a defect is detected when the value exceeds a certain value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19065494A JP3368512B2 (en) | 1994-08-12 | 1994-08-12 | Defect inspection method for transparent sheet-like molded product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19065494A JP3368512B2 (en) | 1994-08-12 | 1994-08-12 | Defect inspection method for transparent sheet-like molded product |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0854351A JPH0854351A (en) | 1996-02-27 |
| JP3368512B2 true JP3368512B2 (en) | 2003-01-20 |
Family
ID=16261690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19065494A Expired - Fee Related JP3368512B2 (en) | 1994-08-12 | 1994-08-12 | Defect inspection method for transparent sheet-like molded product |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3368512B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4628824B2 (en) | 2005-03-10 | 2011-02-09 | 富士フイルム株式会社 | Film defect inspection apparatus and film manufacturing method |
| KR100788733B1 (en) * | 2005-12-05 | 2007-12-26 | 에버테크노 주식회사 | Apparatus and Method for Inspecting Polarizing Film |
| JP4960638B2 (en) * | 2006-02-08 | 2012-06-27 | 積水化学工業株式会社 | Transparent film inspection method |
| JP4960026B2 (en) | 2006-06-09 | 2012-06-27 | 富士フイルム株式会社 | Film defect inspection apparatus and film manufacturing method |
| JP5018073B2 (en) | 2006-12-21 | 2012-09-05 | 富士ゼロックス株式会社 | Surface reader and object confirmation device |
| JP5276875B2 (en) * | 2008-03-31 | 2013-08-28 | 富士フイルム株式会社 | Film defect inspection method and apparatus |
| JP2014234999A (en) * | 2013-05-30 | 2014-12-15 | 住友化学株式会社 | Defect inspection device and production system of optical display device |
| WO2015068599A1 (en) * | 2013-11-05 | 2015-05-14 | シャープ株式会社 | Light-diffusing member, inspection device for light-diffusing member, manufacturing device and manufacturing method for light-diffusing member |
| JP6982899B2 (en) * | 2020-03-18 | 2021-12-17 | 株式会社メック | Defect inspection equipment and defect inspection method |
-
1994
- 1994-08-12 JP JP19065494A patent/JP3368512B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0854351A (en) | 1996-02-27 |
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