JP3360114B2 - Electron spectroscope equipped with angle-resolved and retarding independent operation type lens system and analysis method using spectroscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron spectroscope having an angle-resolved and retarding independent operation type lens system and an analysis method using the spectroscope.
The present invention relates to an electron spectrometer including an angle-resolving / retarding independent operation type incident lens system such as an X-ray photoelectron spectrometer, an Auger electron spectrometer, and a photoelectron diffraction apparatus, and an analysis method using the spectrometer.

[0002]

2. Description of the Related Art Electron spectrometers such as an X-ray photoelectron spectrometer, an Auger electron spectrometer, and a photoelectron diffractometer are known as analyzers for solid surfaces. Used in the material industry.

[0003] In these electron spectrometers, an apparatus using angle-resolved electron spectroscopy realizes angle-resolved measurement by photoelectron / Auger electron spectroscopy (XPS, AES) measurement or similar measurement using ions. . This electron spectroscopy device utilizes the technology of the field of electro-optics from the viewpoint of using not only the surface analysis technology but also the technology of the spectroscopic analysis technology, and from the viewpoint of limiting the angle of electrons to an electro-optical or geometric angle. It is known as a device that can be realized by using it.

[0004] Angle-resolved electron spectroscopy applied to conventional electron spectroscopy includes the following two main measurement methods. In each of these two measurement methods, a combination of a hemispherical analyzer and an incident lens is used. In an electron spectrometer using a combination of a hemispherical analyzer and an incident lens, high energy resolution in measurement is realized. More specifically, by slowing down the electrons in the entrance lens, the kinetic energy is made constant in the analyzer, and as a result, the energy resolution can be made constant regardless of the magnitude of the energy of the measured electrons, In addition, electrons are condensed at the entrance of the analyzer by the lens function of the incident lens, and high sensitivity measurement can be realized. Here, the incident lens system has two functions, namely, a deceleration function for decelerating the electrons and a converging function for converging the electrons to the entrance of the analyzer.

In the first method, as shown in FIG. 1, when an electron emitted from one point on the sample surface 1 enters the analyzer, the electron at a solid angle that takes in the electron from the incident lens 3 is taken into consideration. The angle is limited. In the first method, the incident lens 3 has a function of converging electrons emitted from the sample 1 to the entrance of the analyzer, and has an angular resolution of a capturing area Sa on the sample 1 and a lens converging surface (capturing area Sa). Is equivalent to the image plane of the object point plane), and is geometrically determined by the size of the aperture 4 provided at the entrance of the analyzer and the position of the virtual lens 3.

That is, in the electrostatic lens optical system shown in FIG. 1, the capture area Sa of the sample 1 corresponds to an object point, and the aperture of the aperture 4 is located at an image point position where an image of the object point is formed. ing. Therefore, the electrons from the region Sa are guided to the analyzer.

In the second method, as shown in FIG. 2, the angle of the electrons is limited by a slit or an aperture 6. That is, the slit or the aperture 6 defines a parallel passage of electrons, and only the electrons passing through this passage are introduced into the analyzer. In this method, the angular resolution is determined geometrically by the shape of the aperture. Further, in the second method, unlike the first method, it is possible to measure with a high angular resolution even in a wide measurement area.

In each of the above-described photoelectron spectroscopy measurements, angle-resolved measurement is performed. In summary, the first method is to limit the angle by reducing the solid angle taken by the incident lens with respect to the measurement area, and the second method is
In this method, an aperture for regulating the angle is attached to the entrance of the incident lens. Both of them have a common feature that the angular resolution is geometrically determined because the incident electrons are mechanically limited in angle.

[0009]

The above-described first method is widely applied to an electron spectrometer using a hemispherical analyzer. However, there is a problem that the angular resolution depends on the size of the capturing area Sa, and when a large area is measured instead of a minute area, it is impossible to detect with a high angular resolution. There is.

In the above-mentioned second method, there is a problem that as the angle restriction on electrons becomes stricter, the loss increases, the detection sensitivity deteriorates, and the detection intensity decreases. These problems result in a problem that the measurement requires a long time and the reliability of the measurement result is reduced. Further, in the second method, when changing the angular resolution, there is a problem in that the aperture has to be exchanged, and the like is troublesome.

In the field of semiconductor technology in recent years, surface analysis technology by electron spectroscopy is indispensable for development, evaluation and analysis of various materials. Among them, angle-resolved measurement is of great importance, such as depth analysis and structural analysis using photoelectron diffraction measurement. However, due to the above-mentioned problems, the current analysis request has not been sufficiently satisfied. In recent years, there has been a demand for the development of an electron spectrometer capable of analyzing electrons with higher angular resolution that solves the above-mentioned problem.

[0012]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to realize high energy resolution, high angular resolution, and high sensitivity electron spectrometry. It is an object of the present invention to provide an electron spectroscope equipped with an angle-resolving and retarding independent operation type incident lens system and an analysis method using the spectroscope.

Further, the present invention provides an electron spectroscope having an angle-resolving and retarding independent operation type incident lens system capable of realizing electron spectrometry capable of independently controlling the angular resolution only by changing the electrode potential, and this spectrometer. To provide an analysis method using an analyzer.

Further, according to the present invention, an electron spectroscope equipped with an angle-resolved and retarding independent operation type incident lens system capable of realizing electron spectrometry capable of independently controlling the energy resolution, and analysis using this spectrometer There is a way to provide.

According to the present invention, the composition and the structure
Have an inlet that allows the electrons emitted from the sample surface to be taken in various directions .
An electronic capture unit that defines the measurement area, taken
Electrons incident parallel to the optical axis from the electrons
The light is focused toward the diffraction surface, and the emitted electrons
First electron lens forming means for forming a first electrostatic electron lens for forming an angle pattern, and an aperture disposed on a diffraction surface of the condensing lens for allowing passage of condensed electrons Has an aperture and has a certain polar angle and azimuth angle from the sample to limit the angle of the incident electrons.
A first aperture for selecting electrons to be transmitted, and second electron lens forming means electrically independent of the first electrostatic lens for controlling the energy of the electrons passing through the first aperture. A second aperture having a passage opening for allowing the electrons converged by the second electrostatic lens to pass therethrough, and an electron analyzer for analyzing the electrons passing through the second aperture. Feature
Angle-resolved electron spectrometer for angle-resolved measurement .

Further, according to the present invention, the composition and structure
Electrons emitted from the sample surface in various directions depending on the structure
And taking step for taking in a predetermined measurement area on the sample, collected by
Incident from the trapped electrons in parallel along its optical axis.
Focusing the electrons toward the diffraction surface by a first electrostatic electron lens and forming an angle pattern of the emitted electrons on the diffraction surface; An electron having a certain polar angle and azimuth from the sample by directing the condensed electrons toward the electron passage of the first aperture disposed on the surface, allowing the collected electrons to pass through the passage, and limiting the incident electrons to an angle. To
An angle limiting step of selecting, an energy control step of guiding electrons passing through the first aperture to a second electron lens electrically independent of the first electrostatic lens, and controlling the energy thereof; Selecting the controlled electrons that allow the electrons converged by the second electrostatic lens to pass through the second aperture, and analyzing the energy of the electrons that have passed through the second aperture. And a method for analyzing electrons using an angle-resolved electron spectrometer for angle-resolved measurement .

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a large-diameter angle-resolved electron spectrometer according to the present invention will be described below with reference to the drawings.

FIG. 3 schematically shows a large-diameter angle-resolved electron spectrometer according to one embodiment of the present invention. In FIG. 3, 10 is a solid sample whose surface is to be measured by this system. The sample 10 is irradiated with X-rays from an X-ray source (not shown), and photoelectrons are emitted from the sample surface by the external photoelectric effect by the X-ray irradiation. In measurement using photoelectron spectroscopy, photoelectrons are emitted from a sample by X-rays of a constant energy, and the kinetic energy of the photoelectrons is accurately measured by an electron spectrometer, that is, an electron analyzer. Binding energy (binding energy) is required.

The apparatus shown in FIG. 3 includes an energy analyzer 14 as an analyzer for analyzing the energy of photoelectrons, and an angle-resolving incident lens system 12 attached to the entrance side of the energy analyzer 14.

The angle-resolving incident lens system 12 includes an electron inlet 16 for capturing emitted photoelectrons, and a preceding (ie, first) electrostatic lens 18 for converging the captured electrons to the analyzer entrance. An electrode section 20 for forming; a diffraction plane aperture 22 for limiting an incident angle of photoelectrons guided to the energy analyzer 14;
An electrode unit 30 for forming a subsequent (that is, second) electrostatic lens 28 for converging the divergent electrons passing through the diffraction surface aperture 22 to the input unit of the energy analyzer 14 again and the converged electron beam. Energy analysis device 14
Is provided with a second-stage aperture 32 having an electron passage opening for guiding the light to the second stage.

The energy analyzer 14 is formed in a hemispherical shape and includes an electron analyzer 24 to which a high voltage is applied to generate an electric field and a detector 26 for detecting photoelectrons. The detector 26 is connected to a position computer for calculating the incident position, and employs a so-called position-sensitive detector that detects the incident position and energy of photoelectrons and outputs data as a detection signal.

The angle-resolving incident lens system 12 and the energy analyzer 14 are arranged in a magnetic shield (not shown), and these, including the sample 10, are arranged in a housing that is evacuated. Further, the electron spectrometer controls a rotation mechanism 30 including a stepping motor for rotating the sample 10 to be measured, an X-ray source to generate X-rays having a desired wavelength, and supplies a voltage to be applied to the analyzer 24. A measurement control unit (not shown but usually used by a personal computer, which controls according to the sample and processes the data related to the high voltage applied to the analyzer 24 and the detection data from the detector 26 to analyze the sample. ).

Further, the diffraction surface aperture 22 is grounded, and a predetermined potential is applied to each of the electrode portions 20 and 30 from the potential control device 50 so that the first stage electrostatic lens 18 and the second stage electrostatic lens are placed therein. A lens 28 is formed. Since the electrode portions 20 and 30 are electrically separated by the grounded diffraction surface aperture 22, the front and rear electrostatic lenses 18 and 28 are formed electrically independently,
The lens power can be determined independently of each other.

FIG. 4 schematically shows details of the optical system of the angle resolving incident lens system 12 shown in FIG. The optical system of the lens system 12 shown in FIG. 4 is divided into two optical system parts with a diffraction surface aperture as a boundary, and the former lens system part is an angle limiting unit 12 that limits the angle of an incident electron beam. And a retarding unit 1 that decelerates the electrons so that the kinetic energy of the electrons becomes equal to the set analyzer transmission energy and introduces the electrons into the electron analyzer 24.
2-2. In the lens system 12 shown in FIG. 4, electrons emitted from the sample 10
6 and is introduced into the lens electrode section 20. At this time, the measurement area on the sample 10 is determined by the size of the inlet 16. Lens electrode unit 2 in angle limiting unit 12-1
The electrostatic lens 18 formed to have a function of converging electrons that have entered in parallel to the diffraction surface of the electrostatic lens 18, that is, the diffraction surface aperture 22 disposed on the back focal plane. More specifically, when the sample 10 is irradiated with X-rays, electrons are emitted from the sample 10 in various directions according to the composition and structure of the sample 10,
Although directed to the electrostatic lens 18, the diffractive surface aperture 22
Is located on the diffraction plane, that is, the back focal plane,
Only electrons incident on the electrostatic lens 18 in parallel with the optical axis of the electrostatic lens 18 are converged on the aperture of the diffraction surface aperture 22 that allows the passage of electrons, and pass through the diffraction surface aperture 22 into the analyzer 24. Be guided. In other words, an angle pattern of emitted electrons is formed on the diffraction surface, and by arranging the aperture 22 on the diffraction surface, electrons emitted from the sample 10 and having a certain polar angle and azimuth are collected. Thus, only electrons directed in a predetermined direction can be selectively captured. Here, the size of the diffraction surface aperture determines the range of the capture angle.

The electrons that have passed through the diffraction surface aperture 22 are
It is directed into the rear lens electrode unit 30. The rear lens 28 formed in the rear lens electrode unit 30 slows down the electrons so that the kinetic energy of the angle-limited electrons becomes equal to the set analyzer transmission energy, and the electrons efficiently enter the analyzer entrance. As described above, the electron beam has the function of converging the electrons to the latter-stage aperture 32. The electrons that have passed through the rear aperture 32 are subjected to energy analysis by the energy analyzer 14. That is,
As for the electrons introduced into the analyzer 24, only specific electrons pass through the analyzer path on the arc and enter the detector 26 due to the electric field formed in the analyzer 24. The position and intensity of the light incident on the detector 26 are input to the measurement control unit as data and analyzed, and the measurement control unit analyzes the structure, composition, and the like of the sample surface.

As described above, the first electrostatic lens 18 formed by the inlet 16, the first convergent lens electrode 20, the diffraction surface aperture 22, and the second convergent lens electrode 30.
An angle-resolved electron spectroscopy apparatus is constituted by the second electrostatic lens 28, the rear aperture 32, and the electron analyzer 24 formed by the above. At this time, the angular resolution is determined by the size of the angular dispersion of the diffraction pattern formed by the lens function of the first electrostatic lens 18 and the size of the diffraction plane aperture 22.

The angle resolving incidence lens system 12 according to one embodiment of the present invention will be described by focusing on the following effects while comparing with the prior art.

(1) According to the decomposition type electron spectrometer of the present invention, it is possible to realize electron spectrometry having a high angular resolution in which the angular resolution does not depend on the capturing area and a wide area can be measured.

The obtained angular resolution of the conventional lens system using the image plane aperture shown in FIG. 1 will be compared with that of the lens system shown in FIG.
In the conventional lens system using the image plane aperture of FIG. 1, the angular resolution is determined by the size of the measurement area, the lens length (position), and the size of the image plane aperture. As shown in FIG. 5, when the size of the measurement area is a circle of radius r, the size of the image plane aperture is a circle of radius R, and the lens length is D,
The angular resolution is

[0030]

(Equation 1)

Is defined as Therefore, in order to restrict the angle strictly, the lens length D may be increased, or the size R of the image plane aperture may be reduced. However, as the measurement area r increases, the angular resolution decreases accordingly. In contrast, in a lens system using a diffraction surface aperture as shown in FIG. 4,
The angular resolution is determined only by the size of the diffraction plane aperture. That is, the angular resolution does not depend on the size of the measurement area, and can be improved by reducing the diameter of the diffraction surface aperture.

(2) According to the decomposition type electron spectrometer of the present invention, electron spectrometry with high angular resolution and high sensitivity without using an angle limiting aperture can be realized.

In the conventional lens system using the angle limiting aperture shown in FIG. 2, the angular resolution is determined only by the shape of the aperture. That is, as shown in FIG. 6, when the size of the measurement area is a circle with a radius r, the work distance is D, the length of the aperture is d, and the length of the aperture opening is a, the angular resolution is:

[0034]

(Equation 2)

Is defined as Therefore, in order to tighten the angle limit, the length d of the aperture may be increased and the length a of the aperture opening may be reduced. The size of the measurement area does not affect the angular resolution. However, as the length a of the aperture opening decreases, the aperture (transmittance) decreases accordingly, and the detection intensity decreases. On the other hand, in a lens system using a diffraction surface aperture as shown in FIG. 4, on the other hand, the angular resolution is determined only by the size of the diffraction surface aperture, and therefore does not depend on the size of the intake. The opening (transmission) rate is 100%.

(3) According to the disassembled electron spectrometer of the present invention, the electron spectroscopy capable of controlling the angular resolution only by changing the potential applied to the pre-converging lens electrode 20 forming the first electrostatic lens 18 Measurement can be realized. That is, it is possible to realize electron spectrometry in which the angular resolution can be independently controlled.

As shown in FIG. 4, in the lens system using the diffraction surface aperture, the angular resolution can be controlled only by changing the potential relationship of the lens electrode section 20 and changing the optical conditions. Even in a lens system using a conventional image plane aperture, it is possible to control the angular resolution in the same manner according to optical conditions. However, the angular resolution changes with the size of the measurement area, and it is impossible to control only the angular resolution. Further, in a conventional lens system using an angle limiting aperture, since it is determined geometrically irrespective of optical conditions, in order to change the angular resolution, it is necessary to exchange the angle limiting aperture. That is, the lens system using the diffraction plane aperture can easily control the angular resolution only by the optical conditions without affecting other measurement parameters.

(4) According to the decomposition type electron spectroscope of the present invention, the kinetic energy of the electrons can be controlled only by changing the potential applied to the second convergent lens electrode 30 forming the second electrostatic lens 28. A possible electron spectroscopic measurement can be realized. That is, it is possible to realize electron spectrometry in which the energy resolution can be controlled independently.

Hereinafter, a result of a simulation of the decomposition type electron spectrometer according to one embodiment of the present invention will be described below, focusing on angular resolution.

The following simulation results will be described on the assumption that angle-resolved photoemission spectroscopy is performed using the resolving electron spectrometer shown in FIG. 4 as a model.

FIG. 7 shows the result of simulating the electron trajectory in the incident lens system. This FIG.
Reference numerals shown in FIG. 3 indicate regions where portions or portions shown by corresponding reference numerals shown in FIG. 3 are formed. In this simulation, the energy is 10 keV (Ek)
Electrons have an analyzer transmission energy of 12 eV (Epa
ss), and the measurement area is set to a diameter of 4 mm. Here, before determining the angular resolution,
That is, the first lens 18 forms a diffractive surface at the position of the aperture 22 by its lens action as described above. FIG. 8 is a simulation of a diffraction pattern at the position of the aperture 22 in an example in which the intensity distribution changes every time the emission angle of electrons changes by 0.5 °. In FIG. 8, the vertical axis indicates the beam intensity, and the horizontal axis indicates the distance from the center (ΔX = 0) on the aperture 22. As is apparent from FIG. 8, by arranging the aperture 22 having an opening with a diameter of 10 mm on the diffraction surface, an angular resolution of at least 0.1 ° or less can be obtained.

Since the intensity distribution shown in FIG. 8 is calculated only for an electron having a single energy of 10 keV, a case where the energy width handled simultaneously as an electron spectroscope is assumed to be ± 10 eV will be considered. .
If the energy differs, the position of the diffraction surface formed by the lens and the spread of the electron orbit also differ. FIG. 9 shows the relationship between the emission angle and the angle dispersion at the position of the diffraction surface.
That is, in FIG. 9, the vertical axis indicates the diameter of the aperture 22 aperture, and the horizontal axis indicates the emission angle of the electrons to be observed. When an aperture having a diameter of 0.04 mm is arranged, the obtained energy resolution is approximately 0.015 °, and the highest angle resolution measurement to date is possible in angle-resolved measurement or photoelectron diffraction measurement. In conventional angle-resolved photoelectron spectroscopy or photoelectron diffraction measurement, the value required for high angle resolution measurement is ±
Although it was about 0.5 °, if this degree of angular resolution measurement was used, a sufficiently high angular resolution measurement comparable to the conventional method could be achieved by using a diffraction surface aperture having an aperture with a diameter of 4 mm. Presumed.

In the resolution type electron spectrometer according to one embodiment of the present invention, the energy resolution is determined by the rear lens. Here, since the potential of the diffraction surface aperture 22 is ground, the front lens 18 and the rear lens 28 can be controlled and operated independently without interfering with each other. It is also assumed that the rear lens 28 generally exhibits the same performance as the incident lens system used in the photoelectron spectroscopy device. That is, according to the electron spectroscope provided with the angle-resolving / retarding independent operation type incident lens system of the present invention, high-angle resolution, high-energy resolution, and high-sensitivity photoelectron spectroscopy can be realized.

As described above, the decomposition type electron spectrometer of the present invention has the following features.

Electrons (or ions) entering the entrance lens system from the inlet are condensed by the preceding (electrostatic) converging lens, and an aperture is arranged at the position of the diffraction surface to prevent electrons emitted from the sample. Measurement is performed with an angle limit given. After passing through the diffraction surface aperture, the electrons whose angle is limited are retarded (delayed) by the subsequent lens,
Converged. Angle-resolved electron spectroscopy is performed by analyzing the energy of the electrons that have passed through the aperture at the subsequent stage in a hemispherical analyzer.

The system of the present invention comprises an angle-resolved / retarding type complex lens system and an electronic analyzer. The incident lens system includes a lens for limiting the angle and a diffraction surface aperture at the front stage, and a lens for retarding and a rear stage aperture at the rear stage.

The incident lens system has the function of limiting the angle and performing retarding. In the front stage, the lens electrode and the diffraction surface aperture impose an angular limit on the electrons. In the subsequent stage, high energy resolution and high sensitivity measurement are realized by retarding and convergence by the lens electrode and the aperture. The role of an electron analyzer is to examine the energy state of electrons by performing energy analysis on angle-limited electrons.

In the system of the present invention, since the front stage (angle limiting mechanism) and the rear stage (retarding mechanism) of the incident lens system are coupled by the diffraction surface aperture of the ground potential, they can be controlled independently. it can. Therefore, photoelectron spectroscopy with high angular resolution and high energy resolution can be easily realized.

[0049]

As described above, according to the angle-resolved and retarding independent operation type incident lens system of the present invention and the analyzing method using this spectroscope, high energy resolution,
High-angle resolution and high-sensitivity electron spectroscopy can be realized.

Further, according to the electron spectroscope provided with the angle-resolving / retarding independent operation type incident lens system of the present invention and the analysis method using this spectroscope, the angular resolution can be independently changed only by changing the electrode potential. According to the electron spectroscope having the angle-resolved and retarding independent operation type incident lens system of the present invention and the analysis method using the spectroscope, the energy resolution can be improved. Independently controllable electron spectroscopy measurements can be realized.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing the structure of an electron lens optical system arranged on the electron incident side of a hemispherical analyzer in a conventional electron spectrometer using angle-resolved electron spectrometry.

FIG. 2 is a schematic diagram showing the structure of an electron lens optical system arranged on the electron incident side of a hemispherical analyzer in a conventional electron spectrometer using angle-resolved electron spectrometry.

FIG. 3 is an explanatory view schematically showing an electron spectroscope including an angle-resolved and retarding independent operation type incident lens system according to an embodiment of the present invention.

FIG. 4 is a schematic view showing details of an optical system of an electron spectroscope including the angle-resolved and retarding independent operation type lens system shown in FIG. 3;

FIG. 5 is a schematic diagram for explaining an angular resolution derived from a measurement area and a size of an image plane aperture in the optical system of the incident lens system shown in FIG. 1;

6 is a schematic diagram for explaining an angular resolution derived from a measurement area and an aperture dimension in the optical system of the incident lens system shown in FIG. 2;

FIG. 7 is an explanatory diagram showing a result of simulating an electron trajectory in the incident lens system shown in FIG. 4;

8 is a graph simulating a diffraction pattern at an aperture position in an example in which the intensity distribution changes each time the electron emission angle changes by 0.5 ° in the simulation shown in FIG. 7;

9 is a graph showing the relationship between the emission angle and the angle dispersion at the position of the diffraction surface in the simulation shown in FIG.

[Explanation of symbols]

 Reference Signs List 1,10 ... Sample 3 ... Incident lens 4,6 ... Aperture 12 ... Angle-resolving incident lens system 14 ... Energy analyzer 16 ... Electron take-in port 18 ... Electrostatic lens 20: front electrode 22: diffraction surface aperture 24: electronic analyzer 26: detector 28: rear electrostatic lens 30: rear electrode

────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Shinji Omori 1-5-2, Monzennakacho, Koto-ku, Tokyo Yamaguchi Building 302 (72) Inventor Masaru Shiraki 1-27-26 Higashiyama, Meguro-ku, Tokyo Chalet Higashiyama 102 ( 56) References JP-A-62-290056 (JP, A) JP-A-10-239259 (JP, A) JP-A-1-156645 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , (DB name) H01J 49/44 H01J 49/06 H01J 37/244 G01N 23/227

Claims (2)

(57) [Claims] An inlet for allowing the incorporation of electrons emitted from a sample surface in various directions depending on its composition and structure.
This inlet defines the measurement area on the sample.
Electron capturing means, and the incident electrons are incident parallel from the captured electrons along the optical axis.
Focused electrons are directed toward the diffraction surface, and
First electron lens forming means for forming a first electrostatic electron lens for forming an angular pattern of emitted electrons ; passage of the collected electrons, which is an aperture disposed on the diffraction surface of the condenser lens; A passage from the sample to allow a certain pole from the sample
A first aperture for selecting an electron having an angle and an azimuth; and a second aperture electrically independent of the first electrostatic lens for controlling the energy of the electron passing through the first aperture. An electron lens forming means, a second aperture having a passage opening for allowing passage of the electrons converged by the second electrostatic lens, and an electron analyzer for analyzing the electrons passing through the second aperture. An angle-resolved electron spectrometer for angle-resolved measurement , comprising: 2. A measurement area on a sample is determined in advance for electrons emitted from a sample surface in various directions according to its composition and structure.
The capture process, and the parallel injection of the captured electrons along the optical axis.
The electrons to be focused are focused on the diffraction surface by the first electrostatic electron lens, and the angle pattern of the emitted electrons is formed on this diffraction surface.
Condensing step, and directing the condensed electrons to an electron passage of the first aperture arranged on the diffraction surface of the condenser lens to allow passage through the passage, and restricting the incident electrons by an angle. From the sample
An angle limiting step of selecting an electron having a certain polar angle and azimuth angle; and guiding the electron passing through the first aperture to a second electron lens electrically independent of the first electrostatic lens. An energy control step of controlling the energy thereof, a step of directing the electrons converged by the second electrostatic lens toward a second aperture and selecting a controlled electron that allows the electrons to pass therethrough, An analysis step of analyzing the energy of electrons that have passed through, and an electron analysis method using an angle-resolved electron spectrometer for angle-resolved measurement, characterized by comprising: