JP3349598B2 - Metallized film defect detection method for capacitors - Google Patents

Metallized film defect detection method for capacitors

Info

Publication number
JP3349598B2
JP3349598B2 JP20420194A JP20420194A JP3349598B2 JP 3349598 B2 JP3349598 B2 JP 3349598B2 JP 20420194 A JP20420194 A JP 20420194A JP 20420194 A JP20420194 A JP 20420194A JP 3349598 B2 JP3349598 B2 JP 3349598B2
Authority
JP
Japan
Prior art keywords
metallized film
defect
light
light receiving
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP20420194A
Other languages
Japanese (ja)
Other versions
JPH0850106A (en
Inventor
忠一 本間
章順 田中
育夫 西本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Oji Paper Co Ltd
Azbil Corp
Oji Holdings Corp
Original Assignee
Azbil Corp
Oji Holdings Corp
Oji Paper Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp, Oji Holdings Corp, Oji Paper Co Ltd filed Critical Azbil Corp
Priority to JP20420194A priority Critical patent/JP3349598B2/en
Publication of JPH0850106A publication Critical patent/JPH0850106A/en
Application granted granted Critical
Publication of JP3349598B2 publication Critical patent/JP3349598B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は、基材フィルム上に連
続して形成された金属蒸着面(蒸着部)と非蒸着面(マ
ージン部)とが交互に縞状に形成されたコンデンサ用金
属化フィルムの、その製造中における欠陥の検出方法に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitor metal in which a metal-deposited surface (vapor-deposited portion) and a non-deposited surface (margin portion) formed continuously on a base film are alternately formed in stripes. The present invention relates to a method for detecting a defect of a functionalized film during its production.

【0002】[0002]

【従来の技術】一般に、コンデンサ素子を製造するため
に用いる金属蒸着フィルムは、巻回コンデンサまたは積
層コンデンサ用基材としてよく知られている。この金属
蒸着フィルムは電気的な短絡を防止するため、金属蒸着
フィルムの流れ方向の一側縁に沿って連続的な金属非蒸
着部(マージン部)が設けられて製造されている。この
マージン部は、予め基材フィルムの表面に複数本の細幅
のテープを当てがい、またはオイルを塗布するなどの方
法によってマスキングを施してから金属を蒸着させ、そ
の後に上記マージン部の中央をスリッター装置の刃によ
りスリットしつつ巻き取ることによって、個々のコンデ
ンサ素子用蒸着フィルムとして製造している。
2. Description of the Related Art In general, a metallized film used for manufacturing a capacitor element is well known as a substrate for a wound capacitor or a multilayer capacitor. The metal-deposited film is manufactured by providing a continuous metal non-deposited portion (margin portion) along one side edge in the flow direction of the metal-deposited film in order to prevent an electrical short circuit. This margin portion, before applying a plurality of narrow tapes to the surface of the base film, or applying a masking by a method such as applying oil, and then depositing metal, and then the center of the margin portion By slitting and winding with a blade of a slitter device, it is manufactured as an individual deposited film for a capacitor element.

【0003】このように製造されるコンデンサ素子用の
蒸着フィルムにあっては、品質管理のため金属蒸着部お
よびマージン部の幅を厳密に管理する必要があるととも
に、金属蒸着部蒸着面を厳密に管理する必要がある。こ
れは、後に製品として形成されるコンデンサの容量が金
属蒸着部の容量で決まり、この金属蒸着部にピンホール
や線状の欠陥があると容量が一定とならずバラついた製
品が得られるからである。このため、従来はマージン部
を切断するためのスリッタ装置においては主に目視によ
る検査を行っている。しかし、高速度で移動する金属蒸
着フィルムの欠陥を検出することは困難であり、そのた
め、CCDカメラを利用して金属化フィルムの欠陥を検
出する方法が行われていた。
[0003] In the vapor-deposited film for a capacitor element manufactured in this way, it is necessary to strictly control the width of the metal vapor-deposited portion and the margin portion for quality control, and strictly control the vapor-deposited surface of the metal vapor-deposited portion. Need to be managed. This is because the capacity of the capacitor formed later as a product is determined by the capacity of the metal deposition part, and if there is a pinhole or linear defect in this metal deposition part, the product will not be constant and the product will vary. It is. For this reason, conventionally, a slitter apparatus for cutting a margin portion is mainly inspected visually. However, it is difficult to detect a defect in a metal-deposited film moving at a high speed, and therefore, a method for detecting a defect in a metallized film using a CCD camera has been used.

【0004】[0004]

【発明が解決しようとする課題】ところで、CCDカメ
ラを利用して検出する方法では大きな撮像空間を必要と
し、入り混んだスリッター装置に組み込むことが困難で
ある。また、コンデンサ素子用金属化フィルムは、金属
蒸着面と透明なマージン部が移動方向に縞状に形成され
ており、金属化フィルムの幅方向にCCD素子の走査を
行うと、透明なマージン部からの強い光をカメラのCC
Dが検出し、いわゆるスミヤと称されるCCD素子の隣
の画素に電荷の漏曳が生じ、欠陥の検出を困難にしてい
た。
By the way, the detection method using a CCD camera requires a large imaging space, and it is difficult to incorporate it into a mixed slitter device. In addition, the metallized film for a capacitor element has a metal-deposited surface and a transparent margin formed in stripes in the moving direction, and when the CCD element is scanned in the width direction of the metallized film, the transparent margin is formed. The strong light of the camera CC
D detects the charge, causing leakage of electric charge to a pixel adjacent to a CCD element called so-called smear, making it difficult to detect a defect.

【0005】この発明はこのような点に鑑みてなされた
もので、製造中におけるコンデンサ用金属化フィルムの
金属蒸着面におけるピンホール状および線状の欠陥を、
簡単な装置で確実に検出できる検出方法を提供すること
を目的とする。
[0005] The present invention has been made in view of such a point, pinhole-shaped and linear defects on the metal deposition surface of the metallized film for the capacitor during the manufacturing,
It is an object of the present invention to provide a detection method that can surely detect with a simple device.

【0006】[0006]

【課題を解決するための手段】この発明は、金属化フィ
ルムのシート面の片側に高周波蛍光灯を配置し、これと
対応する他方側に幅方向のスリットを有する遮光板およ
び流れ方向に配列された2分割受光素子を配置し、上記
高周波蛍光灯からの拡散光を金属化フィルムに照射し
て、この金属化フィルムの流れ方向の二つの測定領域か
らの透過した光を上記2分割受光素子で受光するように
し、この二つの受光素子からの信号A,Bからの和信号
A+Bおよび差信号A−Bを演算して出力させ、これら
和信号、差信号の変化分をそれぞれあらかじめ設定され
た各設定値と比較し、設定値以上の変化分が入力された
場合に欠陥であると検出し、これによりコンデンサ用金
属化フィルムの金属蒸着部における欠陥を検出するよう
にしたコンデンサ用金属化フィルム欠陥検出方法であ
る。
According to the present invention, a high-frequency fluorescent lamp is arranged on one side of a sheet surface of a metallized film, and a light-shielding plate having a slit in a width direction on the other side corresponding thereto is arranged and arranged in a flow direction. The metallized film is irradiated with diffused light from the high-frequency fluorescent lamp, and light transmitted from two measurement areas in the flow direction of the metallized film is transmitted to the metallized film by the two-divided light-receiving element. as received, the signal a from the two light receiving elements, a sum signal a + B and the difference signal a-B and calculates to output from B, these
The change amount of the sum signal and the difference signal is set in advance.
Compared to each set value, and a change that is greater than the set value was entered.
It detected to be defective when, thereby a metallized film defect detection method for a capacitor which is adapted to detect defects in the metal deposition portion of the metallized film capacitor.

【0007】[0007]

【作用】2分割受光素子とスリットを有する遮光板とに
より金属化フィルムの流れ方向上流側と下流側に二つの
測定領域a,bが設定されるので、この二つの測定領域
a,bから2分割受光素子を通じて得られる信号A,B
の和信号A+Bと差信号A−Bを利用することにより、
移動方向に金属蒸着部と非金属蒸着部が縞状に形成され
た金属化フィルムの金属蒸着部にある欠陥の検出を簡単
でコンパクトな装置ながら確実に検出を行うことが可能
となる。
The two measurement areas a and b are set on the upstream side and the downstream side in the flow direction of the metallized film by the two-divided light receiving element and the light shielding plate having the slit. Signals A and B obtained through divided light receiving elements
By using the sum signal A + B and the difference signal AB of
Defects in the metallized portion of the metallized film in which the metallized portion and the non-metallized portion are formed in stripes in the moving direction can be reliably detected with a simple and compact device.

【0008】[0008]

【実施例】以下、この発明の実施例を図面に基づいて説
明する。図1は欠陥検出を行う検出装置の概略構成を示
す斜視図、図2は側面図である。即ち、高周波蛍光灯1
と複数の2分割受光素子3が金属化フィルム2を挟んで
その幅方向に平行にそれぞれ反対側に対向するように設
置される。各2分割受光素子3と金属化フィルム2の間
に所定の長さと幅を有するスリット4aを設けた遮光板
4が配される。この遮光板4に設けられたスリット4a
から各2分割受光素子3の二つの受光部3a,3bに入
射する光信号A,Bを得る。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a schematic configuration of a detection device that performs defect detection, and FIG. 2 is a side view. That is, the high-frequency fluorescent lamp 1
And a plurality of two-divided light receiving elements 3 are installed so as to face the opposite sides in parallel with the width direction of the metallized film 2. A light-shielding plate 4 provided with a slit 4a having a predetermined length and width is provided between each two-divided light receiving element 3 and the metallized film 2. A slit 4a provided in the light shielding plate 4
Thus, optical signals A and B incident on the two light receiving sections 3a and 3b of each two-divided light receiving element 3 are obtained.

【0009】幅640mm以下を有する金属化フィルム
2上には、例えば幅40mmの金属蒸着部2aが非蒸着
部(マージン部)2bを設けて16条縞状に形成されて
いる(図では6条の場合を示す)。この実施例では、金
属化フィルム2の主に金属蒸着部2a上に存在するピン
ホール状の欠陥および線状の欠陥を検出するのである。
金属化フィルム2は矢印で示す方向に高速で移動してお
り、その移動速度は50m/分〜300m/分である。
On the metallized film 2 having a width of 640 mm or less, for example, a metal-deposited portion 2a having a width of 40 mm is formed in a 16-stripe shape with a non-deposited portion (margin portion) 2b (FIG. Is shown). In this embodiment, pinhole-shaped defects and linear defects mainly present on the metal deposition portion 2a of the metallized film 2 are detected.
The metallized film 2 moves at a high speed in the direction indicated by the arrow, and the moving speed is 50 m / min to 300 m / min.

【0010】金属化フィルム2の上流側と下流側の二つ
の測定領域a,bを透過した光は、金属化フィルム2の
幅方向に設けられた遮光板4上のスリット4aを通り、
そのスリット4aに対応する所定の距離に設けられ流れ
方向に配置された2分割受光素子3の受光部3a,3b
に到達する。金属化フィルム2上から受光部3aに到達
する領域aと受光部3bに到達する領域bとは金属化フ
ィルム2の流れ方向の上流側と下流側にずれた位置とな
る。これが測定領域a,bとなる。
Light transmitted through the two measurement areas a and b on the upstream side and the downstream side of the metallized film 2 passes through a slit 4 a on a light shielding plate 4 provided in the width direction of the metallized film 2,
A flow provided at a predetermined distance corresponding to the slit 4a
Light receiving portions 3a and 3b of the two-divided light receiving element 3 arranged in the directions
To reach. A region a reaching the light receiving portion 3a and a region b reaching the light receiving portion 3b from above the metallized film 2 are located at positions shifted to the upstream side and the downstream side in the flow direction of the metallized film 2. These are the measurement areas a and b.

【0011】[0011]

【0012】[0012]

【0013】二つの受光素子3a,3bは、従って金属
化フィルム2に縞状に形成された一条の不透明な金属蒸
着部2aと透明な非蒸着部であるマージン部2bの幅方
向を透過した二つの測定領域a,bからの光量をそれぞ
れ受光し、全幅を測定するときには2分割受光素子3を
16個幅方向に直線状に並べて測定することになる。こ
れにより、金属化フィルム2の移動方向に約1mm間隔
を有して前後する測定領域a,bの全幅を透過した全光
量を受光することになる。図3に金属化フィルム2の一
部分の拡大図を示す。金属化フィルム2の金属蒸着部2
aに例えば符号5で示すピンホールが存在すると、金属
化フィルム2の流れ方向の上流側と下流側の位置の異な
る測定領域a,bを通過するときに光量の変化として捉
えることができる。従って、二つの受光部3a,3bの
それぞれの信号A,Bの差信号A−Bを利用することに
より、図4に拡大して示すような欠陥検出信号Oを得る
ことが可能となる。ここで、Cはノイズ信号であり、O
が差信号である。
The two light receiving elements 3a and 3b are therefore made of metal.
Strip of opaque metal vapor formed in striped film 2
The width direction of the attaching portion 2a and the margin portion 2b which is a transparent non-evaporated portion
The amount of light from the two measurement areas a and b transmitted through
When receiving the light and measuring the full width, the two-divided light receiving element 3
The measurement is performed by arranging 16 linearly in the width direction. This
Thereby, the distance of about 1 mm in the moving direction of the metallized film 2
Total light transmitted through the entire width of the measurement areas a and b before and after
The amount will be received. FIG. 3 shows an enlarged view of a part of the metallized film 2. Metal deposition part 2 of metallized film 2
For example, if a pinhole indicated by reference numeral 5 exists in a, it can be regarded as a change in the amount of light when passing through the measurement areas a and b at different positions on the upstream side and the downstream side in the flow direction of the metallized film 2. Therefore, by using the difference signal AB between the signals A and B of the two light receiving units 3a and 3b, it is possible to obtain the defect detection signal O as shown in FIG. Here, C is a noise signal, and O
Is the difference signal.

【0014】線状欠陥などの大欠陥の場合には、二つの
受光部3a,3bのそれぞれの信号A,Bの和信号A+
Bを利用することにより、図5に示すような和信号Pが
得られる。これは測定領域a,bを透過する全光量であ
って、測定領域a,bに存在するマージン部2bの大き
さにより和信号Pは影響されるが、線状欠陥などの大欠
陥がなければ和信号Pは一定である。金属化フィルム2
の金属蒸着部2aに存在する傷などの大欠陥があれば、
その欠陥が存在する位置からの和信号に更に傷などによ
る欠陥信号(A+Bの変化分)が付加されるので和信号
Pの変化量から検出することが可能となる。
In the case of a large defect such as a linear defect, the sum signal A + of the signals A and B of the two light receiving sections 3a and 3b is used.
By using B, a sum signal P as shown in FIG. 5 is obtained. This is the total amount of light transmitted through the measurement areas a and b. The sum signal P is affected by the size of the margin portion 2b existing in the measurement areas a and b. The sum signal P is constant. Metallized film 2
If there is a large defect such as a scratch existing in the metal deposition portion 2a of
Since a defect signal (a change of A + B) due to a flaw or the like is further added to the sum signal from the position where the defect exists, it can be detected from the change amount of the sum signal P.

【0015】上記差信号Oは、位置が若干ずれた測定領
域a,bからの光を二つの受光部3a,3bでそれぞれ
検出してそれぞれの信号を引き算しているので、外部か
ら光が入っても受光部3a,3bともに信号が変化する
ので、差信号Oは変化しない。このため、S/N比に優
れ、微小な欠陥も容易に検出することができる。この例
では、0.5mm×0.5mmの微小な欠陥を検出する
ことができた。これに反し上記和信号Pは測定領域a,
bの全透過光量を与える信号であり、これは光量変化を
捉えているため、透明なマージン部2bを含んだり、強
い外乱光などがある場合にはこれらの影響を受けること
になる。従って、ノイズ信号は大きくなり微小欠陥の検
出はできず、大きな欠陥のみの検出となる。
The difference signal O is obtained by detecting light from the measurement areas a and b, whose positions are slightly shifted, by the two light receiving sections 3a and 3b and subtracting the respective signals. Even so, the signal changes in both the light receiving sections 3a and 3b, so that the difference signal O does not change. Therefore, the S / N ratio is excellent, and a minute defect can be easily detected. In this example, a minute defect of 0.5 mm × 0.5 mm could be detected. On the other hand, the sum signal P is equal to the measurement area a,
b is a signal that gives the total transmitted light amount, and this signal captures a change in light amount. Therefore, when the signal includes the transparent margin portion 2b or there is strong disturbance light, it is affected by these. Therefore, the noise signal becomes large, and a small defect cannot be detected, but only a large defect is detected.

【0016】次に、第6図のブロック図に基づいて測定
方法を簡単に説明する。高周波蛍光灯1により照射され
た金属化フィルム2の移動方向に位置の異なる二つの測
定領域a,bを透過した光は、遮光板4のスリット4a
を通して2分割受光素子3の受光部3a,3bにより検
出される。この2分割受光素子3の受光部3a,3bか
らの信号は電流電圧変換器7で変換さる。一方の信号
経路であるA−Bはコンデンサを介して差動AC増幅器
8で差信号増幅し、コンデンサを介して交流分のみを比
較器10に入力する。他方の信号経路であるA+BはD
C増幅器9により直流増幅された後コンデンサを介して
その変化成分が比較器11に入ることになる。
Next, the measuring method will be briefly described with reference to the block diagram of FIG. The light transmitted by the high-frequency fluorescent lamp 1 and having passed through the two measurement areas a and b at different positions in the moving direction of the metallized film 2 passes through the slit 4 a of the light shielding plate 4.
Is detected by the light receiving portions 3a and 3b of the two-divided light receiving element 3 Light receiving portion 3a of the light receiving device 3, the signal from 3b is Ru is converted by a current-voltage converter 7. AB, which is one signal path, amplifies the difference signal by the differential AC amplifier 8 via the capacitor, and inputs only the AC component to the comparator 10 via the capacitor. The other signal path, A + B, is D
After being DC-amplified by the C amplifier 9, the changed component enters the comparator 11 via the capacitor.

【0017】上記比較器10,11には、感度設定のた
めの電流電圧変換器12,13がそれぞれ接続されてい
て、これらで設定された値と2分割受光素子3の受光部
3a,3bからの信号A−B,A+Bの変化分がそれぞ
れ比較され、設定値以上の検出値が入力された場合のみ
ピンホールなどの微小欠陥出力Qおよび線状の傷などの
大欠陥出力Rがそれぞれ出力されるように構成されてい
る。
The comparators 10 and 11 are connected to current-voltage converters 12 and 13 for setting the sensitivity, respectively. The values set by these converters and the light-receiving portions 3a and 3b of the two-division light-receiving element 3 are used. Are compared, and only when a detected value equal to or greater than a set value is input, a small defect output Q such as a pinhole and a large defect output R such as a linear scratch are output. It is configured to:

【0018】[0018]

【発明の効果】以上説明したとおり、この発明のコンデ
ンサ用金属化フィルム欠陥検出方法によれば、高価なC
CDを使用することなく簡単な2分割受光素子の差信号
および和信号を演算することにより確実に高速で移動す
る縞状に形成された金属化フィルムにおける金属蒸着部
の欠陥を検出することが可能となる。そして、光源およ
び検出器ともに細長い部材で構成されており、しかも近
接した取り付けが可能であり、スペースを取らないで容
易にスリッター装置のローラ間にも設置することが可能
である。従って、品質管理が極めて向上し、高精度の製
品を製造することができる。
As described above, according to the metallized film defect detecting method for a capacitor of the present invention, expensive C
By calculating the difference signal and the sum signal of a simple two-segment light receiving element without using a CD, it is possible to reliably detect defects in the metal deposition portion of a striped metallized film that moves at high speed. Becomes The light source and the detector are both formed of elongated members, and can be mounted close to each other, and can be easily installed between the rollers of the slitter without taking up space. Therefore, quality control is significantly improved, and a highly accurate product can be manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明のコンデンサ用金属化フィルム欠陥検
出方法を説明する検出装置の概略構成を示す斜視図、
FIG. 1 is a perspective view showing a schematic configuration of a detection device for explaining a method for detecting a metallized film defect for a capacitor according to the present invention;

【図2】図1の側面図、2 is a side view of FIG. 1,

【図3】金属化フィルムの一部分の拡大斜視図、FIG. 3 is an enlarged perspective view of a part of the metallized film;

【図4】差信号の波形図、FIG. 4 is a waveform diagram of a difference signal;

【図5】和信号の波形図、FIG. 5 is a waveform diagram of a sum signal,

【図6】測定装置のブロック図である。FIG. 6 is a block diagram of a measuring device.

【符号の説明】[Explanation of symbols]

1 高周波蛍光灯 2 金属化フィルム 3 二分割受光素子 4 遮光板 4a スリット 5 点状欠陥 7 電流電圧変換器 8 差動AC増幅器 9 DC増幅器 10,11 比較器 12、13 電流電圧変換器 14 コンデンサ a,b 測定領域REFERENCE SIGNS LIST 1 high-frequency fluorescent lamp 2 metallized film 3 two- piece light receiving element 4 light-shielding plate 4 a slit 5 point-like defect 7 current-voltage converter 8 differential AC amplifier 9 DC amplifier 10, 11 comparator 12, 13 current-voltage converter 14 capacitor a , B measurement area

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭54−158987(JP,A) 特開 平4−168638(JP,A) 特開 平1−197639(JP,A) 実公 昭48−7105(JP,Y1) (58)調査した分野(Int.Cl.7,DB名) G01N 21/892 G01N 21/894 H01G 4/18 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-54-158987 (JP, A) JP-A-4-1668638 (JP, A) JP-A-1-1977639 (JP, A) 7105 (JP, Y1) (58) Field surveyed (Int. Cl. 7 , DB name) G01N 21/892 G01N 21/894 H01G 4/18

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 金属化フィルムのシート面の片側に高周
波蛍光灯を配置し、これと対応する他方側に幅方向のス
リットを有する遮光板および流れ方向に配列された2分
割受光素子を配置し、上記高周波蛍光灯からの拡散光を
金属化フィルムに照射して、この金属化フィルムの流れ
方向の二つの測定領域からの透過した光を上記2分割受
光素子で受光するようにし、この二つの受光素子からの
信号A,Bからの和信号A+Bおよび差信号A−Bを演
算して出力させ、これら和信号、差信号の変化分をそれ
ぞれあらかじめ設定された各設定値と比較し、設定値以
上の変化分が入力された場合に欠陥であると検出し、
れによりコンデンサ用金属化フィルムの金属蒸着部にお
ける欠陥を検出するようにしたことを特徴とするコンデ
ンサ用金属化フィルム欠陥検出方法。
1. A high-frequency fluorescent lamp is arranged on one side of a sheet surface of a metallized film, a light-shielding plate having a slit in a width direction is arranged on the other side corresponding to the high-frequency fluorescent lamp, and a two-divided light receiving element arranged in a flow direction is arranged. Irradiating the diffused light from the high-frequency fluorescent lamp to the metallized film so that the light transmitted from the two measurement areas in the flow direction of the metallized film is received by the two-divided light receiving element, A sum signal A + B and a difference signal AB from the signals A and B from the light receiving element are calculated and output, and a change in the sum signal and the difference signal is calculated.
Compare with each set value set in advance, and
If the above change is input, it is detected as a defect, and as a result, the metallized part of the metallized film for capacitors is detected .
A method for detecting a defect of a metallized film for a capacitor, wherein the defect is detected.
JP20420194A 1994-08-08 1994-08-08 Metallized film defect detection method for capacitors Expired - Fee Related JP3349598B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20420194A JP3349598B2 (en) 1994-08-08 1994-08-08 Metallized film defect detection method for capacitors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20420194A JP3349598B2 (en) 1994-08-08 1994-08-08 Metallized film defect detection method for capacitors

Publications (2)

Publication Number Publication Date
JPH0850106A JPH0850106A (en) 1996-02-20
JP3349598B2 true JP3349598B2 (en) 2002-11-25

Family

ID=16486512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20420194A Expired - Fee Related JP3349598B2 (en) 1994-08-08 1994-08-08 Metallized film defect detection method for capacitors

Country Status (1)

Country Link
JP (1) JP3349598B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4705256B2 (en) * 2001-03-19 2011-06-22 パナソニック株式会社 LAMINATE MANUFACTURING METHOD AND CHIP CAPACITOR
JP5725010B2 (en) * 2012-12-28 2015-05-27 株式会社村田製作所 Direction identification method for multilayer ceramic capacitor, direction identification device for multilayer ceramic capacitor, and method for manufacturing multilayer ceramic capacitor
CN109738437B (en) * 2018-12-29 2021-07-06 西安西电电力电容器有限责任公司 Self-healing point measuring device and method for metalized film capacitor

Also Published As

Publication number Publication date
JPH0850106A (en) 1996-02-20

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