JP3347058B2 - Screen plate exposure method and exposure apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure method for a screen plate and an exposure apparatus used for the same, and more particularly to an improvement in a suction contact exposure method in photolithography.

[0002]

2. Description of the Related Art In a conventional suction contact exposure method, at the time of exposure, as shown in FIG. 11, a means for bringing a screen plate 2 and a glass dry plate 4 into close contact is provided between a base glass 14 and a contact rubber 15. , The screen plate 2 and the glass dry plate 4 are sandwiched, and the base glass 14 and the rubber 1 for adhesion are sandwiched.
By evacuating the air between 5 and creating a vacuum,
As a result, close contact between the screen plate 2 and the glass plate 4 was achieved.

[0003]

However, in the above-mentioned conventional method, since the rubber for contact is used, an excessive force is applied to the screen frame to deform the screen frame. When the frame was released from the close contact, the image was distorted. In addition, since the glass dry plate and the screen frame on the base glass have their respective thicknesses and heights, there are portions where the rubber for adhesion and the screen frame or the end of the base glass cannot be partially adhered. . This point also causes distortion in the image after the exposure, which is not preferable.

[0004] Further, since a relatively large number of devices including the glass for the base and the rubber for contact are laminated and used, there are many opportunities for foreign substances such as dust to adhere to the surfaces of these devices, and furthermore, the device is horizontal and the internal space is narrow. Therefore, it is difficult to remove the adhered foreign matter, which often causes pinholes in the printing plate after the exposure processing. Further, since the base glass is interposed between the exposure light source and the glass dry plate, there is a disadvantage that the amount of light from the exposure light source is absorbed by the base glass and attenuated, so that it cannot be used effectively.

SUMMARY OF THE INVENTION The present invention has been made to improve the above-mentioned drawbacks of the conventional suction contact exposure method,
The purpose is to eliminate the need for glass for base or rubber for close contact, effectively utilize the amount of light from the light source for exposure, and eliminate the risk of distortion or pinholes in the image after the close contact exposure. Another object of the present invention is to provide a method of exposing a screen plate capable of achieving a reduction in plate manufacturing cost and an improvement in quality as compared with the conventional method, and an exposure apparatus suitable for the method.

[0006] To achieve the above object, the present inventor has provided:
Rather than sandwiching the screen plate and glass dry plate between the base glass and the rubber for contact, based on the knowledge that all conventional problems can be solved if the screen plate is directly adhered to the glass dry plate by vacuum suction, The present invention has been completed.

[0007]

In other words, the present invention provides a method in which a screen plate is superposed on a glass plate directly facing an exposure light source, and the screen plate is brought into close contact with the surface of the glass plate by vacuum suction to perform an exposure process. The gist is a method of exposing a screen plate characterized by the following.

As described above, according to the present invention, when the screen plate is attracted to and adhered to the surface of the glass dry plate by suction, no rubber is used, so that the screen frame is not deformed due to excessive force, and as a result, the exposure is completed. Even if the screen frame is later released from the close contact, no distortion occurs in the image. Further, since the base glass is not used, the light from the light source is directly radiated to the glass dry plate, and there is no fear that the light quantity is absorbed and attenuated by the base glass as in the related art. Furthermore, troubles due to contamination of the base glass and the adhesion rubber and adhesion of dust are eliminated.

Further, in the method of exposing a vertical screen plate in which a glass dry plate and a screen plate are brought into close contact with each other in an upright state, especially in the case of a large screen, the installation area of the apparatus is reduced as compared with the horizontal conventional method. Exposure can be simplified and the exposure operation is simplified.

[0010] As a method of performing exposure treatment by bringing a screen plate into close contact with the surface of a glass dry plate by vacuum suction, a peripheral edge of the glass dry plate is held on an inner edge side surface of a glass dry plate holder formed in a frame shape , and the surface of the glass dry plate is held. Preferably, the screen plate is polymerized and arranged, and then the screen plate is vacuum-sucked through a suction path formed in the holder to be in close contact with the surface of the glass dry plate and subjected to an exposure treatment.
It can be adopted properly.

Further, the inner edge surface of the glass dry plate holder idea to form a step portion having a depth corresponding to the thickness of the glass dry plate, upon placing the glass dry plate to the holder, is easy positioning thereof In addition, since the surfaces of the glass dry plate and the glass dry plate holder can be formed to be flush with each other, there is an advantage that no distortion occurs in the image after exposure.

As a method of exposing a vertical screen plate in which a glass dry plate and a screen plate are brought into close contact with each other in an upright state, a glass dry plate holder is erected and disposed, and a glass dry plate suction passage formed in a step is formed. While holding the peripheral edge of the glass dry plate on the step portion through suction, a screen plate is superposed on the surface of the glass dry plate and arranged, and the screen plate is passed through a screen plate suction path formed on the outer edge side surface of the holder. It is preferable to employ a method in which the substrate is brought into close contact with the surface of the above-mentioned glass dry plate by vacuum suction and exposed .

Further, an exposure apparatus for a screen plate of the present invention is provided.
The device is an exposure device for placing a screen plate in close contact with the surface of a glass plate directly facing the light source for exposure, and performing an exposure process, comprising a frame-type glass plate holder for holding the glass plate. The glass dry plate holder has a step on the inner edge side of the surface to support the glass dry plate, and a plurality of suction paths are formed in parallel on the holder surface including the step, and at least It is characterized in that the screen plate is configured to be sucked by an outer edge side suction path so as to be able to adhere to the surface of the glass dry plate.

According to such an exposure apparatus, since the base glass and the rubber for contact are not required, the structure of the exposure section can be simplified. A device intended for a small screen plate can be a horizontal device as in the past, but when the screen is large, a vertical device is preferred because it is easier to use as described later. In the former case, the step portion and the suction path attached to the step portion are not always necessary. However, if the step portion is provided, the crow dry plate can be accurately positioned and placed, and the displacement can be prevented, which is preferable. Further, when the step portion is formed to a depth corresponding to the thickness of the glass dry plate as described in claim 7, the entire main portion of the screen that is suction-contacted thereon is held flat. Even for a screen having a small stretch, for example, a stainless mesh, there is no fear that the screen is broken and the quality is deteriorated.

[0015] Also, a vertical screen for a large screen
As a mold type exposure apparatus, a supporting member for gripping the periphery of a glass dry plate holder and maintaining the vertical position, a screen frame fixing tool for standing and arranging a screen plate facing the glass dry plate holder, and the supporting member is moved in the longitudinal direction by suspending, to adopt a configuration that includes a slider device for close or away to the screen plate
Can be . The material of the glass dry plate holder is not particularly limited, but it is preferable to use a lightweight metal material such as black alumite to reduce the weight of the suspended holder.

In the apparatus having such a configuration, the installation space is smaller than that of the apparatus configured in a horizontal configuration, and furthermore, it is possible to maintain an interval between the standing screen plate and the glass dry plate holder such that a person enters and exits. It is possible to work inside the equipment, it is easy to attach and move the glass plate and screen frame, and even if foreign matter adheres to the screen plate or glass plate, the worker can go inside and clean it sufficiently. There are many advantages such as possible.

Further , the support member has a θ angle direction, an X axis direction, and a Y direction.
When an axial position fine adjustment mechanism is attached, the position and inclination of the vertical and horizontal axes of the glass dry plate held by the support member can be finely adjusted to prevent the occurrence of interference fringes, and to reduce exposure accuracy. This is particularly favorable for improvement.

[0018]

Next, an embodiment of the present invention will be described with reference to the drawings. FIGS. 1 and 2 are schematic side views of a method of exposing a screen plate according to the present invention, in which the former is configured and arranged in a horizontal type and the latter is configured in a vertical type. In these figures, 1 is an exposure apparatus, 2 is a screen plate, 3 is a screen frame, 4 is a glass plate, 5 is a glass plate holder, and 6 is a light source for exposure.

FIG. 3 is a plan view showing an example of the glass dry plate holder 5 according to the present invention. The glass dry plate holder 5 is constructed by assembling a pair of suction bars A and B into a frame shape, and is provided with a step 8 on its inner edge side surface (see FIGS. 1 and 2). The glass drying plate 4 is
Is placed, and the glass dry plate 4 is supported horizontally or vertically. In this case, the depth h of the step portion 8 is
Therefore, the glass dry plate 4 held here forms a plane flush with the surface of the frame-shaped holder 5.

FIG. 4 (a) is a plan view of the suction bar A constituting the glass dry plate holder 5, FIG. 4 (b) is a short side view thereof, and FIG. 4 (c) is FIG. 4 (a). It is a sectional enlarged view which follows an LL line in the inside. Five dovetail grooves 9a, 9b, 9c, 9d and 9e are formed in the surface of the suction bar A in the long side direction, and three dovetail grooves 9a, 9b and 9c are formed in the step 8 on the inner edge side. The other two dovetail grooves 9d and 9e are on the outer edge side, and are configured to vacuum suction the glass dry plate 4 and the screen plate 2 through the suction holes 10a and 10b, respectively. The suction holes 10a and 10b are connected to a vacuum suction device (not shown) and cooperate with a dovetail groove to form a glass dry plate suction path 7a and a screen plate suction path 7b as a whole.

FIG. 5A is a plan view of a suction bar B which constitutes the glass dry plate holder 5 together with the suction bar A, FIG. 5B is a side view of the short side direction, and FIG. FIG. 5D is a partially enlarged plan view, and FIG.
As shown in the figure, when this suction bar B is combined with the suction bar A to form a frame, the dovetail grooves 9a, 9
b, 9c, 9d, 9e, respectively, and five dovetail grooves 11a, 11b, 11c, 11 exhibiting the same suction action.
d and 11e are formed.

In assembling the suction bars A and B into a frame shape, various methods such as screwing, fitting, and bonding can be adopted. In this case, the screw holes 12 shown in FIG. A locking method is employed in which a set screw is screwed into the screw hole 13 in FIG. 4B. As described above, since the glass dry plate holder of the present invention is composed of an assembling bar that can be assembled and disassembled, it is easy to hold glass dry plates having different sizes by preparing several types of suction bars having different dimensions of each part. can do.

In carrying out the present invention by the method shown in FIG. 1, the glass dry plate holder 5 as described above is mounted horizontally on an exposure machine, and the peripheral edge of the glass dry plate 4 is placed on the step 8 thereof. Position. In this case, the glass dry plate suction path 7a (the dovetail grooves 9a to 9c, 11a) provided in the step portion 8 is provided.
11c and the suction hole 10a) do not need to be particularly functioned, so that the on-off valve connecting the suction hole 10a to the vacuum pump may be closed. Next, after the screen plate 2 is overlaid on the glass dry plate 4, the vacuum pump is operated to open the on-off valve communicating with the suction hole 10b.
The screen plate is sucked by 9e, 11d, and 11e, and the screen plate 2 is suction-contacted to the surface of the glass dry plate 4 as shown in the figure. In this case, a plurality of narrow grooves are provided at appropriate intervals between adjacent dovetail grooves and are connected to each other by this. However, the present invention is not limited to this, and a separate suction hole is provided for each dovetail groove. It is also possible to provide it. Also, the number of dovetail grooves and suction holes, or the setting positions thereof are not limited to the above examples, and it is needless to say that they can be changed as needed. As a special example, the dovetail groove is not provided on the outer edge side surface, but instead, a large number of suction holes may be arranged at predetermined intervals over the entire surface.

Alternatively, when a thin glass film having a thickness of about 100 μ is used as an original plate instead of the above-mentioned glass dry plate, a transparent glass plate equivalent to or slightly thinner than the glass dry plate is held by the step portion of the glass dry plate holder. It is also possible to place a positive film on top of it, and then to expose by exposing a screen plate to the surface by suction according to the method described above.

Further, in carrying out the present invention by the method shown in FIG. 2, the periphery of the glass dry plate 4 is fitted to the step 8 of the glass dry plate holder 5 arranged upright on the exposure machine 1. At the same time, the vacuum pump is operated to operate the glass dry plate suction path 7a, and the dovetail grooves (9a-9c and 11a-1
The glass dry plate 4 is suction-held according to 1c). Then
The glass plate 4 and the screen plate 2 are polymerized by bringing the holder 5 close to the screen plate 2 vertically supported via the screen frame fixing means. Thereafter, the vacuum on-off valve connected to the suction hole 10b is opened, When the screen plate is sucked by the dovetail grooves (9d, 9e and 11d, 11e), the screen plate 2 is suction-contacted to the surface of the glass dry plate 4 as shown in the figure.

FIG. 6 is a perspective view showing a particularly preferred exposure apparatus for carrying out the method shown in FIG. As shown in the figure, the exposure apparatus 21 includes a frame-shaped glass dry plate holder 5 for sucking and holding a peripheral portion of the glass dry plate 4 and a screen frame holder for standing and fixing the screen plate 2 to face the glass dry plate 4. 22, a support member 32 for gripping the peripheral edge of the glass dry plate holder 5 and maintaining the vertical position, and a slider device for suspending and moving the support member 32 in the front-rear direction to approach or separate from the screen plate 2. 2
And an exposure light source 26 is disposed behind the glass dry plate holder 5 at a predetermined distance.

The screen frame holder 22 is erected on the structural frame 24 as shown in FIG.
a, 30b, two right and left rotary support rods 25 grooved right and left, and female screw holes 31 at both ends.
A pair of upper and lower holding bars 27 and 28 are screwed and attached to the rotary support bar by a and 31b. When the rotary support bar 25 is rotated by the motor 29 in a direction in which the upper and lower holding bars 27 and 28 approach each other, the screen frame 3 is held between the holding bars 27 and 28.
Are automatically clamped and fixed.

FIGS. 8 to 10 are explanatory views showing the structure of the support member 32 for mounting the glass dry plate holder 5. FIG. 8 is a front view of the support member 32, and FIG. 10 is a perspective view of the same as viewed from the front side, and FIG. 10 is a perspective view of the same as viewed from the back side. As shown in the drawing, the support member 32 is composed of a θ angle position adjustment plate a, a Y axis position adjustment plate b, an X axis position adjustment plate c, and a base frame d. The position of the glass dry plate holder 5 held by the angular position adjustment plate a in the θ angle direction, the X axis direction, and the Y axis direction can be finely adjusted.

Of the position adjusting mechanisms provided in each of the above plates, the one at the θ angle has a rack
Drive the θ angle fine adjustment device e of the & pinion type,
As shown in FIG. 8, the glass dry plate 4 is rotated around the center point o within an angle range of ± 3 °, so that fine adjustment is possible. In the drawing, g denotes rotating guide wheels provided at the four corners of the θ angle position adjusting plate a, and y denotes Y in order to receive the guide wheel g and guide movement in the circumferential direction.
These are arc-shaped rails provided at four corners of the surface of the shaft position adjusting plate b.

Next, as shown by a dotted line in FIG. 8, the Y-axis position adjusting mechanism includes female screw portions m and m 'mounted on the back surfaces of the left and right vertical frames of the Y-axis position adjusting plate b. The shaft rods k and k 'screwed into the left and right female screw portions m and m' are mounted on the surfaces of the left and right vertical frames of the X-axis position adjusting plate c, and the shaft rods k and k 'are inserted and supported. By transmitting the driving force of the motor i to the shaft rods k and k ′ via a pair of left and right pulleys j and j ′ and rotating the shafts k and k ′, fine movement in the Y-axis direction is achieved. Is what makes it possible.

As shown in FIG. 10, the X-axis position adjusting mechanism operates a rack-and-pinion type X-axis fine adjusting device p by means of a motor q so that a guide mechanism s at the four corners on the back surface of the support member 32 can be provided. The X-axis position adjustment plate c, which is movably supported along, is finely moved in the X-axis direction and is set at a desired position. When the support member having the position adjusting mechanism as described above is employed, the interference of light that is observed when the position of the glass dry plate is inappropriate is effectively prevented, so that a clear image can be obtained without defocusing. There is an advantage.

The side surface of the support member 32 and the structural frame 2
As shown in FIG. 6 and FIG. 8, the frame 4 is provided with frame clampers 33 at opposing positions, so that the glass plate can be accurately and safely approached and fixedly held on the screen plate. It is possible.

[0033]

Since the present invention employs the above-described exposure method and the exposure apparatus used therefor, the exposure method is simpler than in the conventional method, the light amount from the light source can be used effectively, and In addition, there is no possibility of distortion or pinholes occurring in the image after the close contact exposure, so that the printing plate manufacturing cost can be reduced and the accuracy can be improved. In particular, when the exposure apparatus is configured as a vertical type, there is provided a screen-plate exposure apparatus that can be advantageously applied in the production of the latest special screens for large televisions.

[Brief description of the drawings]

FIG. 1 is a schematic side view showing an example of a screen plate exposure method according to the present invention.

FIG. 2 is a schematic side view showing another example of the screen plate exposure method according to the present invention.

FIG. 3 is a view showing an example of a glass dry plate holder according to the present invention.

FIG. 4 is a view showing a structure of a suction bar A constituting the crow dry plate holder, FIG. 4 (a) is a plan view thereof, and FIG.
4B is a side view in the short side direction, and FIG. 4C is an enlarged cross-sectional view taken along line LL in FIG.

FIG. 5 is a view showing a structure of a suction bar B constituting the glass dry plate holder, and FIG.
5B is a side view in the short side direction, FIG. 5C is a partially enlarged plan view, and FIG. 5D is a side view in the long side direction.

FIG. 6 is a perspective view showing an example of an exposure apparatus according to the present invention.

FIG. 7 is a perspective view showing a screen frame fixture of the exposure apparatus.

FIG. 8 is a front view showing a configuration of a support member 33 for mounting a glass dry plate holder according to the present invention.

FIG. 9 shows the support member 33 with a glass dry plate holder attached.
Perspective view from the front

FIG. 10 is a perspective view similarly viewed from the back side.

FIG. 11 is a schematic side view showing a conventional suction contact exposure method.

[Explanation of symbols]

 1, 21 Exposure device 2 ... Screen plate 4 ... Glass dry plate 5 ... Glass dry plate holder 6, 26 ... Exposure light source 7a, 7b ... Suction path 8 ... Steps 9a, 9b, 9c, 9d, 9e ... Dove groove 10a, 10b: suction holes 11a, 11b, 11c, 11d, 11e: dovetail groove 22: screen frame holder 23: slider device

Claims (6)

(57) [Claims] 1. An inner edge side surface of a frame type glass dry plate holder.
The glass is formed on the step with a depth equivalent to the thickness of the glass dry plate formed on the
Place the periphery of the drying plate and hold the glass drying plate.
Superposed screen plate larger than the holder on the plate surface
And a screen formed on the outer edge side surface of the holder.
Vacuum suction of the screen plate through the plate suction path
A method of exposing a screen plate, comprising bringing a glass plate and a glass dry plate into close contact with each other and performing an exposure treatment. 2. The apparatus according to claim 1, wherein the holder is arranged upright.
Through the glass dry plate suction path formed in the step of the holder
To hold the periphery of the glass dry plate by suction at the stepped portion.
The method for exposing a screen plate according to claim 1, wherein: 3. A glass dry plate directly facing an exposure light source.
Place the screen plate in close contact with the surface and expose
Exposure apparatus for holding a glass dry plate
A glass dry plate holder smaller than the screen plate
The glass dry plate holder supports the glass dry plate.
Thickness of the glass plate formed on the inner edge of the holder surface
Formed on the outer edge side of the holder surface with a step portion of considerable depth
And a screen plate suction path.
Vacuum suction of the screen plate through the
An exposure apparatus characterized by bringing a lath dry plate into close contact. 4. A glass dry plate suction is applied to the step portion of the holder.
A passage is formed, and a glass dry plate is formed on the step portion through the suction passage.
4. The dew of claim 3, wherein the periphery is held by suction.
Light device. 5. The exposure apparatus according to claim 1, wherein the exposure device grips a peripheral edge of the glass dry plate holder and maintains the vertical position, and a screen frame fixing tool for vertically arranging the screen plate facing the glass dry plate holder. The screen plate exposure apparatus according to claim 3, further comprising: a slider device for suspending the support member and moving the support member in the front-rear direction to approach or leave the screen plate. 6. The support member comprises a θ-angle position adjustment plate, a Y-axis position adjustment plate, an X-axis position adjustment plate, and a base frame, and the θ-angle position is adjusted via a position adjustment mechanism provided in each of the plates. 6. The screen plate exposure apparatus according to claim 5, further comprising a function of finely adjusting the positions of the glass dry plate holder held by the adjustment plate in the θ angle direction, the X axis direction, and the Y axis direction.