JP2007079103A - Film holding plate, film holding mechanism and registering device of exposure machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film holding plate, a film holding mechanism and a registering device of an exposure machine for carrying out accurate exposure while avoiding influences of a loosened film and preventing elongation in a film. <P>SOLUTION: A first suction hole 13 and a second suction hole 14 are positioned at the center of each side of a first suction groove 11 and a second sucking groove 12, respectively, to suppress a film elongation. Otherwise, by forming the suction groove in two loops to provide a film elongation preventing region 16, elongation of the film is completely prevented to achieve exposure with high accuracy. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a film holding plate, a film holding mechanism, and an aligner for an exposure machine that are used when exposing a circuit pattern of an electric substrate.

  In an exposure machine used for manufacturing a printed circuit board, it is necessary to accurately position an original film and a substrate. For example, Patent Document 1 discloses an apparatus that images a registration mark provided on both a film and a substrate by a camera and moves the alignment table based on information obtained from the camera to position the film and the substrate. Is disclosed.

Conventionally, in such an apparatus, a film is attached to a transparent plate (film holding plate) using an adhesive tape or the like, but there is a problem that the work process is complicated.
There is also a problem that the film is stretched depending on how the tape is applied.
Furthermore, there is a problem that dust is generated during the tape sticking operation, and that this dust remains, resulting in poor exposure.
Furthermore, due to the unevenness of the tape itself, there is a problem that the adhesion between the film and the substrate is impaired, and the resolution of the circuit pattern exposed to the substrate is lowered.

In order to solve such a problem, a technique for adsorbing and holding a film against a film holding plate has been developed.
However, since the film is formed very thin, when air suction is performed, the film is stretched by stretching, and there is a problem that the accuracy of the circuit pattern on the substrate obtained after exposure deteriorates. .
Further, when the film adsorption is repeated, there is a risk of breakage from the adsorption groove for film adsorption provided on the film holding plate.
JP 2004-70243 A

  An object of the present invention is to provide a film holding plate, a film holding mechanism, and an aligner for an exposure machine that can perform accurate exposure without being affected by the slack of the film and without the film being stretched.

The present invention solves the above problems by the following means. In addition, in order to make an understanding easy, although the code | symbol corresponding to the Example of this invention is attached | subjected and demonstrated, it is not limited to this.
The invention of claim 1 is a film holding plate for holding the film, which is used in an exposure machine that exposes a circuit pattern formed on a film (F) as an original plate onto a substrate, and when the film is arranged An adsorption groove (11) formed so as to be substantially rectangular or substantially square when viewed from the normal direction of the plate surface over the entire circumference at a position near the outer periphery of the film; and When viewed from the normal direction of the plate surface, formed so as to penetrate the plate surface at a position overlapping with the suction groove in the vicinity of at least one side of each of the substantially rectangular or substantially square sides formed by the suction groove. And a suction hole (13) formed on the film holding plate (10).
The invention of claim 2 is the film holding plate according to claim 1, wherein the suction hole (13) is substantially rectangular or formed by the suction groove (11) when viewed from the normal direction of the plate surface. The film holding plate (10) is characterized in that it is formed in the vicinity of the approximate center of each of two sides arranged to face each other within each side of a substantially square shape.
According to a third aspect of the present invention, there is provided the film holding plate according to the first or second aspect, wherein the film extension preventing region (16) for preventing the film (F) from extending on the plate surface has the suction groove ( 11) A film holding plate (10) characterized by being provided along the entire circumference.
A fourth aspect of the present invention is the film holding plate according to the third aspect, wherein when the film (F) is disposed, the position is near the outer periphery of the film, and the entire surface is overlapped with the film. The second suction groove (12) formed along the vicinity of the suction groove (11) so as to be substantially rectangular or square when viewed from the normal direction of the plate, and the normal direction of the plate surface Formed so as to penetrate the plate surface at a position overlapping with the second suction groove in the vicinity of the approximate center of at least one side of each of the substantially rectangular or square sides formed by the second suction groove. A film holding plate comprising: a second suction hole (14); and the film stretch prevention region (16) is a region sandwiched between the suction groove and the second suction groove. 10).
According to a fifth aspect of the present invention, in the film holding plate according to the fourth aspect, the second suction hole (14) is provided on a side other than the side where the suction hole (13) is provided. The film holding plate (10) characterized by the above.
The invention of claim 6 is the film holding plate according to any one of claims 1 to 5, wherein the suction groove (11) and / or the second suction groove (12) is the groove. A film holding plate (10) characterized in that the shape is formed by a curved surface.
A seventh aspect of the present invention is the film holding plate according to any one of the first to fifth aspects, wherein the suction groove and / or the second suction groove fills a corner portion of the groove bottom. R and / or fillet is provided.
The invention of claim 8 is directed to the film holding plate (10) according to any one of claims 1 to 7, and the suction hole (13) and / or the second suction hole (14). A film holding mechanism including a film adsorbing portion (60) connected and adsorbing the film to the film holding plate by performing air suction.
The invention of claim 9 is the film holding mechanism according to claim 8, the substrate holding part (20) for holding the photosensitive substrate (K), and the positional alignment between the film (F) and the substrate. An aligner for an exposure apparatus comprising a position aligning unit (21) to perform.

According to the present invention, the following effects can be obtained.
(1) When viewed from the normal direction of the plate surface, the plate surface is penetrated to a position overlapping with the suction groove in the vicinity of the approximate center of at least one of the substantially rectangular or substantially square sides formed by the suction groove. Since the formed suction holes are provided, the film can be adsorbed and held in a state in which the film is little stretched.
(2) The suction hole is located in the vicinity of the approximate center of each of the two sides facing each other in the substantially rectangular or substantially square sides formed by the suction grooves when viewed from the normal direction of the plate surface. Since it is formed, suction can be performed in a balanced manner, and the film can be adsorbed uniformly.
(3) Since the film elongation preventing region for preventing the film from stretching on the plate surface is provided along the entire circumference of the adsorption groove, the film can be prevented from stretching.
(4) Since the film elongation preventing region is a region sandwiched between the adsorption groove and the second adsorption groove, the film elongation can be prevented with a simple configuration.
(5) Since the second suction hole is provided on a side other than the side where the suction hole is provided, suction can be performed with good balance and the film can be adsorbed uniformly.
(6) Since the groove shape of the suction groove and / or the second suction groove is formed by a curved surface, the film holding plate can be prevented from being damaged.
(7) Since the suction groove and / or the second suction groove is provided with the corner R and / or the fillet at the corner portion of the groove bottom, the film holding plate can be prevented from being damaged.

  The purpose of performing accurate exposure without being affected by the slack of the film and without extending the film was realized by improving the suction grooves and suction holes provided in the film holding plate.

FIG. 1 is a view showing an embodiment of an exposure apparatus including a film holding plate, a film holding mechanism, and an aligner of the exposure apparatus according to the present invention.
The aligner of the exposure apparatus in this embodiment is used in an exposure apparatus that exposes a circuit pattern formed on a film F onto a substrate K coated with a photosensitive material, and includes a film holding plate 10, a joint 15, and a substrate holding unit 20. , The alignment drive unit 21, the substrate suction unit 22, the substrate suction hole 23, the decompression unit 24, the hermetic chamber decompression hole 25, the packing 26, the camera 40, the control unit 50, the film suction unit 60, and the like.

FIG. 2 is a view showing the film holding plate 10. FIG. 2A is a view of the surface of the film holding plate 10 facing the substrate holding portion 20 as viewed from the normal direction, and FIG. 2B is indicated by an arrow AA in FIG. It is sectional drawing which expanded and showed the part which showed. A range FA indicated by a broken line in FIG. 2 indicates a range where the film F is provided.
The film holding plate 10 is formed of a highly translucent acrylic plate, and includes a first suction groove 11, a second suction groove 12, a first suction hole 13, a second suction hole 14, and film extension prevention. The film F can be adsorbed to a surface having the region 16 and facing a substrate holding unit 20 described later. The film holding plate 10 can be opened to a position away from the substrate holding unit 20 by an opening / closing mechanism (not shown).

  The first suction groove 11 has a substantially rectangular shape when viewed from the normal direction of the plate surface over the entire circumference at a position near the outer periphery of the film F when the film F is disposed and overlaps with the film F. It is the adsorption | suction groove | channel formed in this way.

The second suction groove 12 is substantially rectangular when viewed from the normal direction of the plate surface over the entire circumference at a position near the outer periphery of the film F when the film F is disposed and overlaps with the film F. Thus, the first suction groove 11 is formed along the first suction groove 11 on the inner peripheral side in the vicinity of the first suction groove 11.
The first suction groove 11 and the second suction groove 12 have a groove shape formed by a cylindrical surface. The reason why the groove shape is a cylindrical surface is that if the groove shape is a square shape with a corner in the cross section, stress concentrates on the corner portion during the suction operation, and the corner portion may be damaged during continued use. Because there is. By making the groove shape a cylindrical surface, stress concentration can be avoided and damage can be prevented.

The first suction hole 13 is a center of two sides which are substantially rectangular opposing short sides formed by the first suction groove 11 when viewed from the normal direction of the plate surface, and is the first suction groove. 11 is a suction hole formed so as to penetrate the plate surface at a position overlapping 11.
The second suction hole 14 is a second suction groove that is the center of two opposite long sides of a substantially rectangular shape formed by the second suction groove 12 when viewed from the normal direction of the plate surface. 12 is a second suction hole formed so as to penetrate the plate surface at a position overlapping with 12. The second suction hole 14 is provided on a side other than the side where the first suction hole 13 is provided, so that suction can be performed uniformly.

Returning to FIG. 1, the joint 15 is a member that connects the first suction hole 13 and the air tube 17, and is attached using an inner diameter screw provided on the inner diameter of the first suction hole 13. . Note that a joint (not shown) is connected to the second suction hole 14 and is connected to the air tube 17, and the air tube 17 is connected to the film adsorbing unit 60. Therefore, the first suction hole 13 and the second suction hole 14 are connected to the film suction portion 60.
Here, the first suction hole 13 and the second suction hole 14 are respectively formed in the center of two opposite short sides of the substantially rectangular shape formed by the first suction groove 11 and the second suction groove. The reason why it is provided at the center of two opposite long sides of the substantially rectangular shape formed by 12 will be described.

  Instead of providing the first suction hole 13 and the second suction hole 14 at the center of each side of each rectangle (hereinafter referred to as a rectangle) formed by the first suction groove 11 and the second suction groove 12, When the film F is provided at a position near the corner or at the corner, the film F may be stretched by suction near the corner. However, by providing the first suction hole 13 and the second suction hole 14 at the center of each side of the rectangle, the amount by which the film F is stretched can be minimized even if suction is performed.

  The film stretch prevention region 16 is a region sandwiched between the first suction groove 11 and the second suction groove 12, and is provided along the entire circumference of the first suction groove 11 and the second suction groove 12. It has been. In the film stretch prevention region 16, the film F is sucked from the first suction groove 11 and the second suction groove 12 on both sides thereof, so that the film F is sucked without being pulled in a specific direction. . Accordingly, the film F is not displaced in the film stretch prevention region 16 provided corresponding to the entire circumference thereof, and thus the film F is adsorbed without being stretched. Thus, the film elongation preventing region 16 has an action of preventing the film F from stretching on the plate surface.

The substrate holding unit 20 is a table that holds the substrate K by suction, and is attached to the alignment driving unit 21. In the vicinity of the center of the substrate holding unit 20, a substrate suction hole 23 communicating with a substrate suction unit 22 described later is provided so that the substrate K can be sucked. Further, an airtight chamber decompression hole 25 is provided outside the range where the substrate K of the substrate holding unit 20 is placed so as to communicate with the decompression unit 24.
Further, the substrate holding part 20 is provided with a packing 26 along the outer periphery on the side facing the film holding plate 10. The packing 26 is a sealing portion in which a space S formed between the film holding plate 10 and the substrate holding portion 20 is an airtight chamber. The packing 26 is substantially J-shaped with a partial opening as shown in FIG. 1, is easily crushed when the film F and the substrate K are brought into close contact with each other, and has a gap with respect to the film holding plate 10. It is easy to touch.

The alignment driving unit 21 drives the substrate holding unit 20 in accordance with instructions from the control unit 50 based on information obtained from the camera 40 described later when performing precise positioning (alignment operation) between the substrate K and the film F. Part. The alignment drive unit 21 is parallel to the substrate holding unit 20 in the two axial directions perpendicular to the direction along the substrate surface of the substrate holding unit 20 and the axis in the direction orthogonal to the two axial directions. It can be rotated (within the substrate surface of the substrate holder 20).
The substrate adsorbing unit 22 is a part that adsorbs and holds the substrate K through the substrate adsorbing hole 23, and adsorbs the substrate K by being sucked by a vacuum pump (not shown).

The decompression unit 24 is a part that decompresses the space S formed as an airtight chamber between the film holding plate 10 and the substrate holding unit 20 by the packing 26 through the airtight chamber decompression hole 25. A vacuum pump (not shown) is used for this pressure reduction. The film F and the substrate K are brought into close contact with each other by the decompression unit 24 performing decompression.
The camera 40 is a CCD camera that images positioning marks formed at two locations corresponding to the film F and the substrate K, respectively, and information captured by the camera 40 is sent to the control unit 50.
A state where a film-side mark (not shown) provided on the film F and a substrate-side mark (not shown) provided on the substrate K are concentric is a state where both marks are aligned. In this embodiment, these marks are provided in two places on both the film F and the substrate K. If the film side mark and the substrate side mark are concentric with respect to the two sets, the film The film F and the substrate K are correctly aligned on the condition that both F and the substrate K are flat and the position of the mark itself is accurate.

The controller 50 is a part that controls the exposure apparatus.
The film suction unit 60 is a vacuum pump connected to the first suction hole 13 and the second suction hole 14 via the air tube 17 and the joint 15, and the film F is sucked into the film holding plate 10 by air suction. The film F is adsorbed.

Next, the operation of the aligner of the exposure apparatus of this embodiment will be described.
First, the film holding plate 10 is opened, and the substrate K is manually placed by the operator within a range where the substrate of the substrate holding unit 20 is placed. After placing the substrate K on the substrate holding unit 20, the film holding plate 10 is closed by the operator's manual work. At this time, the film holding plate 10 contacts the packing 26 on the entire circumference, and the space S is formed as an airtight chamber.
Next, when the operator operates an operation unit (not shown), the control unit 50 controls the substrate suction unit 22 and the film suction unit 60 to place the substrate K on the substrate holding unit 20 and the film F on the film holding plate 10. Adsorb to each.
In a state where the substrate K and the film F are adsorbed, the film side mark and the substrate side mark are imaged by the camera 40, and the control unit 50 controls the driving of the alignment driving unit 21 based on the information to control the film F and the substrate K. Performs matching operation with.

After the alignment operation is finished, the operator operates the operation unit (not shown) to instruct the start of exposure, so that the controller 50 gives a pressure reduction instruction to the pressure reduction unit 24 and performs pressure reduction on the space S. The film K and the substrate K are brought into close contact with each other.
Thereafter, as a final confirmation immediately before the exposure, whether or not the positions of the substrate K and the film F are aligned is confirmed by imaging the film side mark and the substrate side mark with the camera 40. It should be noted that exposure is not performed when a positional deviation is found in this position confirmation.
Finally, with the film K and the substrate K kept in close contact, the substrate exposure light is projected from a light source (not shown) and exposure is performed for a preset amount of time.

  Here, in order to confirm the effect of preventing the elongation of the film by using the film holding plate 10 of this example, Comparative Examples 1 and 2 as shown in Table 1 below, and a modification example were created. Compared.

比較例１は、吸着溝が１周のみ形成されており、したがってフィルム伸び防止領域が無く、さらに、吸引孔が吸着溝の長方形の角に形成された例である。比較例１では、フィルムに大きな伸びが発生してしまった。
比較例２は、本実施例と同様に吸着溝が２周形成され、フィルム伸び防止領域が有るが、吸引孔が吸着溝の長方形の角に形成された例である。比較例２についても、フィルムに大きな伸びが発生してしまった。
変形例は、本実施例のフィルム保持板１０の吸着溝を１周とした例であり、吸引孔は各辺の中央になっている例である。この変形例では、フィルムに極僅かに伸びが発生したが、十分実用に耐える程度の伸びであった。
本実施例のフィルム保持板１０では、フィルムの伸びが全く発生しなかった。

Comparative Example 1 is an example in which the suction groove is formed only once, so there is no film elongation prevention region, and suction holes are formed at the rectangular corners of the suction groove. In Comparative Example 1, large elongation occurred in the film.
Comparative Example 2 is an example in which the suction groove is formed twice and the film stretch prevention region is formed as in the present embodiment, but the suction hole is formed at the rectangular corner of the suction groove. Also in Comparative Example 2, large elongation occurred in the film.
The modification is an example in which the suction groove of the film holding plate 10 of this embodiment is one round, and the suction hole is an example in the center of each side. In this modification, the film was slightly elongated, but it was sufficiently long to withstand practical use.
In the film holding plate 10 of this example, no film elongation occurred.

From the above results, it can be said that it is very effective to make the position of the suction hole the center of each side of the suction groove in order to suppress the film elongation. Further, the film stretch can be completely eliminated by providing the suction hole at the center of each side of the suction groove and forming the film stretch prevention region by providing two suction grooves.
Thus, although the form shown in the present embodiment is the best form, even if it is the form of the modified example, it can be used sufficiently if the amount of elongation of the film at that time is within an allowable range. .

(Modification)
The present invention is not limited to the embodiments described above, and various modifications and changes are possible, and these are also within the equivalent scope of the present invention.
For example, in the present embodiment, the first suction groove 11 and the second suction groove 12 have been illustrated as having a groove shape formed by a cylindrical surface. A corner R may be provided in the corner portion or a fillet may be provided. Even in such a form, stress concentration can be prevented and damage can be prevented.

It is a figure which shows the Example of the exposure machine containing the film holding | maintenance board by this invention, a film holding | maintenance mechanism, and the aligner of exposure machine. It is a figure which shows the film holding plate.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Film holding plate 11 1st adsorption groove 12 2nd adsorption groove 13 1st suction hole 14 2nd suction hole 15 Joint 16 Film expansion prevention area | region 20 Substrate holding part 21 Alignment drive part 22 Substrate adsorption part 23 Substrate adsorption Hole 24 Pressure reducing part 25 Airtight chamber pressure reducing hole 26 Packing 40 Camera 50 Control part 60 Film adsorption part

Claims (9)

It is used in an exposure machine that exposes a circuit pattern formed on a film as an original plate to a substrate, and is a film holding plate that holds the film,
When the film is placed, the film is formed so as to be substantially rectangular or substantially square when viewed from the normal direction of the plate surface over the entire circumference at a position that is near the outer periphery of the film and overlaps with the film. Adsorption grooves,
When viewed from the normal direction of the plate surface, formed so as to penetrate the plate surface at a position overlapping with the suction groove in the vicinity of at least one side of each of the substantially rectangular or substantially square sides formed by the suction groove. Sucked holes,
A film holding plate comprising: The film holding plate according to claim 1,
The suction hole is formed in the vicinity of the approximate center of each of the two sides arranged opposite to each other in the substantially rectangular or substantially square sides formed by the suction grooves when viewed from the normal direction of the plate surface. is being done,
A film holding plate. In the film holding plate according to claim 1 or 2,
A film extension preventing region for preventing the film from extending on the plate surface is provided along the entire circumference of the adsorption groove;
A film holding plate. In the film holding plate according to claim 3,
The suction groove so as to be substantially rectangular or substantially square when viewed from the normal direction of the plate surface over the entire circumference at a position that is in the vicinity of the outer periphery of the film when the film is disposed. A second suction groove formed along the vicinity of
When viewed from the normal direction of the plate surface, the plate surface is located at a position that overlaps with the second suction groove in the vicinity of the approximate center of at least one side of each of the substantially rectangular or square sides formed by the second suction groove. A second suction hole formed so as to penetrate
The film stretch prevention region is a region sandwiched between the suction groove and the second suction groove,
A film holding plate. The film holding plate according to claim 4,
The second suction hole is provided on a side other than the side where the suction hole is provided;
A film holding plate. In the film holding plate according to any one of claims 1 to 5,
The suction groove and / or the second suction groove has a groove shape formed by a curved surface,
A film holding plate. In the film holding plate according to any one of claims 1 to 5,
The suction groove and / or the second suction groove is provided with a corner R and / or a fillet at a corner portion of the groove bottom,
A film holding plate. The film holding plate according to any one of claims 1 to 7,
A film adsorbing portion connected to the suction hole and / or the second suction hole and sucking the film to the film holding plate by performing air suction;
A film holding mechanism comprising: A film holding mechanism according to claim 8,
A substrate holder for holding a photosensitive substrate;
A position aligning unit for aligning the film and the substrate;
An aligner for an exposure apparatus comprising:

Images