JP3340983B2 - Liquid leak inspection system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001] The present invention relates to a liquid leakage inspection system for detecting liquid leakage of a package filled with a conductive liquid.

[0002]

2. Description of the Related Art Conventionally, as a liquid leakage inspection system, a pair of detection electrodes formed by combing a stainless steel plate having a thickness of about 1 mm by mechanical cutting is provided on a hard insulating substrate so as to face each other. There is.

In the liquid leakage inspection system having the above structure, when the liquid leaking from the inspection object adheres to both of the pair of detection electrodes, the detection electrodes are brought into a conductive state. It detects the presence or absence of leakage.

[0004]

The above thickness 1
With a detection electrode made of a stainless steel plate of about mm, the gap between the detection electrodes and the width of the detection electrodes cannot be reduced due to the problem of machining accuracy such as stainless steel cutting. When a water droplet smaller than the gap between the detection electrodes is accommodated in the gap without contacting the detection electrode, or when a water droplet smaller than the width of the detection electrode adheres to the detection electrode, the detection electrode and the detection electrode are Do not conduct, and liquid leakage of the inspection object cannot be detected. That is, there is a problem in the accuracy of detecting a liquid leak. For example, a liquid leak of 100 μL may not be detected.

Further, since the detection electrode is manufactured by machining a stainless steel plate having a thickness of about 1 mm, the amount of protrusion (unevenness) of the detection electrode with respect to the insulating substrate becomes large.
In the gap between the opposing comb-shaped detection electrodes, there is a problem that it is difficult to remove the adhering matter adhered to the insulating substrate, and a load is required for the cleaning recovery operation.

When the hard insulating substrate is provided at a place other than a plane, for example, a curved surface or an uneven shape, the insulating substrate has poor flexibility. Becomes difficult. In other words, there is a problem that the degree of freedom in installing the hard insulating substrate is low.

Further, when a hard insulating substrate is brought into contact with a running test object to detect the presence or absence of liquid leakage of the test object by the contact between the detection electrode and the test object, the hard insulating substrate is exposed. When colliding with the inspection object, the hard insulating substrate is difficult to conform to the surface of the inspection object, so that the inspection object is damaged and the running state of the inspection object is disturbed. Therefore, even if it is desired to detect a very small amount of liquid leakage, an insulating substrate must be installed at a certain distance from the object to be inspected. There is a problem that a very small amount of liquid leakage cannot be detected.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to improve the accuracy of detecting a liquid leak, facilitate cleaning and restoring work, improve the degree of freedom in installing an insulating substrate, and adversely affect an object to be inspected. It is another object of the present invention to provide a liquid leakage inspection system capable of detecting a very small amount of liquid leakage from the inspection object by contact between the detection electrode and the inspection object.

[0009]

In order to achieve the above object, a liquid leakage inspection system according to the first aspect of the present invention has a detection electrode formed on an insulating substrate and having a thickness of 1 to 100 μm facing each other. a pattern detection electrode, judging means for judging leakage of the signal receiving and inspection object from the pattern detection electrodes, so suppress galvanic corrosion of the pattern detection electrodes
In addition, when it is determined that the test object is leaking,
And suppressing means for collecting蝕作to cut off the current to the emission detection electrode Bei <br/> Ru e.

According to the liquid leakage inspection system of the first aspect of the present invention, when a liquid leaks from the object to be inspected, the detection electrodes facing each other are electrically connected, and based on this, the determination means determines the liquid leakage. Is determined.

Since the thickness of the detection electrode is 1 to 100 μm, the height difference between the surface of the detection electrode and the surface of the insulating substrate is 1 to 100 μm, and there are few irregularities. Therefore, even if the insulating substrate is wiped with, for example, a cloth, the cloth does not catch on the unevenness and the liquid adhering matter on the insulating substrate can be smoothly and completely wiped, so that the cleaning workability can be improved.

Further, if a detection electrode having a thickness exceeding 100 μm is formed on an insulating substrate, the surface of the insulating substrate on which the detection electrode is formed becomes uneven, and the wettability to the liquid to be inspected becomes uneven. And the detection sensitivity to liquid leakage decreases. However, when the thickness of the pattern detection electrode is set to 1 to 100 μm, the wettability of the pattern detection electrode and the insulating substrate is improved, and the detection sensitivity to liquid leakage is improved.

If a detection electrode having a thickness of less than 1 μm is formed on an insulating substrate, sufficient conductivity cannot be obtained in the detection electrode. However, in the invention of claim 1, the thickness of the detection electrode is 1 μm. As described above, the electric resistance is small and sufficient conductivity can be obtained.

[0014] In the first aspect of the present invention, the electrolytic corrosion suppressing means limits the current flowing through the detection electrode,
Alternatively, when unnecessary, the current is cut off to suppress the electrolytic corrosion of the detection electrode.

Further, the liquid leakage inspection system according to claim 2 is
2. The liquid leakage inspection system according to claim 1, wherein the pattern detection electrode is formed by a method including at least one of lithography, sputtering, vacuum evaporation, MBE, plating film, and electroless plating. It is characterized by.

According to the liquid leakage inspection system of the second aspect of the present invention, any one of lithography, sputtering, vacuum deposition, MBE, plating film, and electroless plating, or a method thereof. Since the pattern detection electrode is formed by the combination of the above, the pattern of the pattern detection electrode can be made highly accurate and fine.
Therefore, even if the amount of liquid adhering to the pattern detection electrode is very small, the pattern detection electrode can be reliably brought into a conductive state. Therefore, even if a small amount of liquid adheres to the pattern detection electrode, the liquid can be sensed by the pattern detection electrode, and the detection accuracy of the liquid adhering to the pattern detection electrode can be improved. Further, the formation of the pattern detection electrode can be more simplified than in stainless steel cutting.

According to a third aspect of the present invention, there is provided the liquid leakage inspection system according to the first or second aspect, wherein the electrolytic corrosion suppressing means includes an electric resistance for limiting a current flowing through the pattern detection electrode. Have.

According to leakage inspection system of the present invention the third aspect, since conductive蝕作for suppressing means comprises an electrical resistance,
By limiting the current flowing through the pattern detection electrode with a simple and inexpensive configuration, the electrolytic corrosion of the pattern detection electrode can be suppressed.

According to a fourth aspect of the present invention, in the liquid leakage inspection system according to any one of the first to third aspects, the electrolytic corrosion suppressing means receives a signal from the determination means. have a transistor switch that operates
I do.

According to the liquid leakage inspection system according to the fourth aspect of the present invention, upon receiving the signal from the determination means, for example, after the completion of the measurement, or after a lapse of a predetermined time from the start of the measurement ,
Since the transistor switch is opened and the power supply to the pattern detection electrode is cut off, the energization time of the pattern detection electrode is shortened, and the electrolytic corrosion of the pattern detection electrode can be minimized.

According to a fifth aspect of the present invention, there is provided a liquid leakage inspection system according to any one of the first to fourth aspects, further comprising a pressing means for applying a pressing force to the inspection object. Features.

According to the liquid leakage inspection system of the fifth aspect of the present invention, since the pressing means applies a pressing force to the object to be inspected, the liquid surely leaks if the defect of the object to be inspected is equal to or more than the reference. As a result, the leaked liquid can be detected by the pattern detection electrode, and the liquid leak of the inspection object can be reliably detected. Here, the term "defect" refers to a flaw or hole in a film or sheet, which is a material of the container, or a flaw in an unfused portion due to defective molding of the container.
Such as holes.

A liquid leakage inspection system according to a sixth aspect of the present invention is the liquid leakage inspection system according to any one of the first to fifth aspects, wherein the insulating substrate has flexibility.

According to the liquid leakage inspection system of the sixth aspect of the present invention, since the insulating substrate has flexibility, the insulating substrate conforms to a portion other than a flat surface, for example, a curved surface or an uneven shape. An insulating substrate can be provided at a location having an irregular shape. Therefore, the degree of freedom in installing the insulating substrate is improved.

Further, since the insulating substrate has flexibility, the insulating substrate can be bent when the insulating substrate comes into contact with the object to be inspected.

A liquid leakage inspection system according to a seventh aspect of the present invention is the liquid leakage inspection system according to the sixth aspect, wherein the detection electrode is provided so as to be in contact with the inspection object.

According to the liquid leakage inspection system of the present invention, the detection electrode comes into contact with the object to be inspected, and the insulating substrate can be bent by the contact between the detection electrode and the object to be inspected. Therefore, even if the running test object collides with the insulating substrate, the insulating substrate is bent and conforms to the surface of the test object,
Damage to the inspection object can be more reliably prevented, and disturbance of the running state of the inspection object can be suppressed more reliably. Therefore, it is possible to detect a very small amount of liquid leakage from the inspection object due to the contact between the detection electrode and the inspection object without adversely affecting the inspection object.

Preferably, in the liquid leakage inspection system according to one embodiment, the insulating substrate is formed of a heat-resistant polymer material.

In this case, since the insulating substrate is made of a heat-resistant polymer material, it can be easily bent by contact between the pattern detection electrode and the inspection object.

Preferably, in the liquid leakage inspection system according to one embodiment, the insulating substrate has a thickness of 10 to 20.
Set to 00 μm.

In this case, the thickness of the insulating substrate is 10 to 2
By setting the thickness to 000 μm, the insulating substrate can have appropriate flexibility.

If the insulating substrate has a thickness of 200
If the thickness exceeds 0 μm, the flexibility of the insulating substrate will be impaired. When the insulating substrate comes into contact with the running test object, the poorly flexible insulating substrate will adversely affect the running property of the test object and cause the test object to run. The inspection object will be damaged. But,
According to the ninth aspect of the present invention, the thickness of the insulating substrate is set to 10 to 20.
When the thickness is set to 00 μm, the flexibility of the insulating substrate is improved, and even if the insulating substrate collides with the running test object, it is possible to prevent the runnability of the test object from being disturbed, and to reduce the damage of the test object. Can be prevented.

If the insulating substrate has a thickness of 10 μm,
If it is less than m, wrinkles and tears will occur in the insulating substrate when forming the pattern of the pattern detection electrode. That is, the workability of the insulating substrate is reduced. Also, if the thickness of the insulating substrate is less than 10 μm, the mechanical strength will be weak.
However, as in the invention of claim 9, the thickness of the insulating substrate is set to 1
When the thickness is 0 to 2000 μm, workability is good and sufficient mechanical strength can be obtained.

Preferably, in the liquid leakage inspection system according to one embodiment, the insulating substrate includes a plurality of layers having different flexibility.

In this case, since the insulating substrate is composed of a plurality of layers having different flexibility, the flexibility of the insulating substrate can be adjusted by combining a plurality of layers having different flexibility.

Preferably, in the liquid leakage inspection system according to one embodiment, at least an end portion of the insulating substrate has the detection electrode.

In this case, the mechanical strength of the insulating substrate can be improved by forming the detecting electrode at least at the end of the insulating substrate.

Preferably, in the liquid leakage inspection system according to one embodiment, the insulating substrate is arranged so that a direction in which the tip of the detection electrode extends and a direction in which the inspection object moves are parallel. I do.

In this case, by arranging the insulating substrate such that the direction in which the tip of the detection electrode extends and the direction in which the object moves are parallel, the insulating substrate is attached to the moving object. When the contact is made, the friction between the detection electrode of the insulating substrate and the object to be inspected is reduced, so that it is possible to prevent the adhesion between the insulating substrate and the detection electrode from deteriorating.

The liquid leakage inspection system according to the invention of claim 8 is a liquid leakage inspection system according to any one of claims 1 to 7.
A pattern detection electrode formed on a flexible insulating substrate.

According to the liquid leakage inspection system of the eighth aspect of the present invention, since the insulating substrate has flexibility, the insulating substrate conforms to a portion other than a flat surface, for example, a curved surface or an uneven shape. An insulating substrate can be provided at a location having an irregular shape. Therefore, the degree of freedom in installing the insulating substrate is improved.

Since the insulating substrate has flexibility, the insulating substrate can be bent when the insulating substrate comes into contact with the object to be inspected.

According to a ninth aspect of the present invention, there is provided the liquid leakage inspection system according to the eighth aspect, wherein the pattern detection electrode is in contact with the inspection object, and the pattern detection electrode and the inspection object are connected to each other. The insulating substrate can be bent by the contact of

According to the liquid leakage inspection system of the ninth aspect, the pattern detection electrode of the insulating substrate comes into contact with the object to be inspected, and the insulating substrate is bent by the contact between the pattern detection electrode and the object to be inspected. Therefore, even if the running test object collides with the insulating substrate, the insulating substrate is bent and conforms to the surface of the test object, and the test object is not damaged, and Also, the running state of the inspection object is not disturbed. Therefore, it is possible to detect a very small amount of liquid leakage from the inspection object due to the contact between the pattern detection electrode and the inspection object without adversely affecting the inspection object.

A liquid leakage inspection method according to a tenth aspect of the present invention is characterized in that a liquid leakage of an inspection object is detected using the liquid leakage inspection system according to any one of the first to ninth aspects.

According to the liquid leakage inspection method of the tenth aspect of the present invention, it is possible to reliably detect liquid leakage of the inspection object using the liquid leakage inspection system. Here, the object to be inspected is a soft package such as a pouch formed by heat-sealing a film, or a liquid-filled container such as a blow-molded container formed by a blow molding method.

[0047]

(First Embodiment) FIG. 1 is a block diagram showing an example of the concept of a liquid leakage inspection system according to the present invention. FIG. 2 is a schematic configuration diagram of a liquid leakage inspection system according to the first embodiment of the present invention, and FIG. 3 is a schematic diagram for explaining detection of liquid leakage by the liquid leakage inspection system.

As shown in FIG. 2, the liquid leakage inspection system includes a pattern detection electrode 15 comprising a pair of comb-shaped detection electrodes 2 and 2 formed on a glass epoxy resin insulating substrate 1 and facing each other. An impedance adjuster 6 as an electrolytic corrosion suppressing means for suppressing the electrolytic corrosion of the pattern detecting electrode 15 and a liquid leak as a judging means for receiving a signal from the pattern detecting electrode 15 to determine a liquid leak of the inspection object. Detector 7, control CPU 10 for receiving leak signal 8 output from the output terminal of leak detector 7, and display 1 for receiving trouble signal 13 from control CPU 10.
1 is provided.

The detection electrodes 2 constituting the pattern detection electrode 15 are formed, for example, as follows. First,
A nickel film having a thickness of 1 to 100 μm (more preferably 1 to 40 μm) having corrosion resistance and moderate hardness to household detergent is firmly fixed on the insulating substrate 1 via an adhesive layer such as a thermosetting resin. Glue to Unnecessary portions of the nickel film are removed by chemical solution etching using an exposure / development technique to form the comb-shaped detection electrodes 2.
Electrode terminal portions 4, 4 are provided at the ends of the detection electrodes 2, 2, respectively.

A shield wire 12 is attached to the test signal lines 5, 5 connecting the electrode terminals 4, 4, and the input terminal of the liquid leak detector 7, and one of the test signal lines 5, 5 , An impedance adjuster 6 is disposed. The power input terminal (+) of the liquid leak detector 7 is connected to the power source Vcc (+). Also, a power input terminal of the liquid leak detector 7
By connecting (−) to the ground via an NPN transistor Tr as a switch as an electrolytic corrosion suppressing means provided in the control CPU 10, a power input terminal (−) is connected.
And the NPN transistor Tr is connected to the power supply line 9 for the liquid leakage detector, and the power supply line 9 for the liquid leakage detector is made non-conductive. That is, the NPN transistor Tr is turned off (disconnected), and the power supply to the liquid leak detector power supply line 9 and the detection electrodes 2 can be cut off. The current flowing through the detection electrodes 2, 2 may be either DC or AC, but AC is preferable in order to suppress the electrolytic corrosion of the detection electrodes 2, 2. When the detection electrodes 2, 2 are formed of nickel, the current is preferably set to an effective value of 5 to prevent electric corrosion.
It is set at 0 μA or less, more preferably at 20 μA or less.

Further, in order to detect the amount of liquid leakage of 1 μL by the liquid leakage inspection system, the gap between the detection electrodes 2 is optimally set based on a previously obtained equivalent impedance value of the liquid to be inspected. ing.

The liquid leakage inspection system configured as described above detects a liquid leakage as follows. First, the insulating substrate 1 is fixed to the liquid leakage detecting portion with screws or the like inserted into the substrate mounting holes 3 shown in FIG. 2, and the electrode terminals 4, 4 of the detecting electrodes 2, 2 are fixed.
A voltage is applied between them. Then, the inspection object filled with the conductive liquid is brought into contact with the detection electrodes 2 and 2 of the insulating substrate 1. At this time, if liquid leakage has occurred from the inspection object, as shown in FIG.
4 adheres to both of the detection electrodes 2 and 2, and conduction between the detection electrodes 2 and 2 is established. The impedance between the electrode terminals 4, 4 changes depending on the amount of the liquid 14 adhering to both of the detection electrodes 2, 2 or the attached substance. As a result, the current flowing between the detection electrodes 2, 2 differs, and the voltage between the electrode terminals 4, 4 also changes with the change of the current. Then, the liquid leak detector 7 shown in FIG. 2 compares the voltage change with the reference voltage, and determines whether or not there is a liquid leak in the inspection object based on the comparison result. When the liquid leak detector 7 determines that the inspection object has leaked,
A liquid leak signal 8 is transmitted to the control CPU 10. The control CPU 10 receiving the liquid leak signal 8 turns off the NPN transistor Tr, cuts off the power supply to the liquid leak detector 7, and applies the voltage between the electrode terminals 4 of the detection electrodes 2. Set the voltage to zero. The control CPU 10
Receives the liquid leak signal 8, stores the liquid leak signal 8 in the memory, and transmits the trouble signal 13 to the display 11 or the like as necessary.

As described above, since the patterns of the detection electrodes 2 and 2 are formed with high precision and fineness by using the exposure and development technology, the pattern detection electrodes 1 composed of the detection electrodes 2 and 2 are formed.
Even if the amount of liquid adhering to the trace 5 is very small, the conductive state is reliably established between the detection electrodes 2 and 2. Therefore, even if a small amount of liquid adheres to the pattern detection electrode 15, the liquid can be sensed by the detection electrodes 2 and 2, so that the pattern detection electrode 15
The accuracy of detecting liquid adhering to the surface can be improved.

The insulating substrate 1 has a thickness of 1 to 100 μm.
(More preferably 1 to 40 μm) in thickness of the detection electrodes 2, 2
Are formed, the height difference between the surfaces of the detection electrodes 2 and 2 and the surface of the insulating substrate 1 is 1 to 100 μm (1 to 40 μm).
μm) and there are few irregularities. Therefore, even if the insulating substrate 1 is wiped with, for example, a cloth, the cloth does not catch on the unevenness and the liquid adhering material on the insulating substrate 1 can be smoothly and completely wiped, thereby facilitating the cleaning operation. Further, since the surface of the insulating substrate 1 on which the detection electrodes 2 are formed is substantially flat, even if the inspection object is brought into contact with the surface of the insulating substrate 1, the inspection object is not damaged. When the object to be inspected is slid on the fixed insulating substrate 1, the surface on which the detection electrodes 2, 2 are formed is substantially flat, so that the traveling characteristics of the object to be inspected are not adversely affected. The optimum film thickness of the detection electrodes 2 may be determined based on the amount of friction between the inspection object and the detection electrodes 2 and the inspection current capacity.

If the insulating substrate 1 has a thickness of 100 μm,
When the detection electrodes 2 and 2 are formed with a thickness exceeding m, the surface of the insulating substrate 1 on which the detection electrodes 2 and 2 are formed becomes uneven, and the wettability is deteriorated depending on the shape. The detection sensitivity decreases. Further, since the thickness of the detection electrodes 2, 2 exceeds 100 μm, the load of etching when forming the patterns of the detection electrodes 2, 2 increases, and the pattern formation is not successful. When the object to be inspected slides on the fixed insulating substrate 1, the object to be inspected slides on the uneven surface of the insulating substrate 1, so that the traveling characteristics of the object to be inspected deteriorate.

If the detection electrodes 2, 2 are formed on the insulating substrate 1 with a thickness of less than 1 μm, the detection electrodes 2, 2
Cannot obtain sufficient conductivity. Further, since the thickness of the detection electrodes 2, 2 is less than 1 μm, the handling of the film at the time of processing the nickel film of the material of the detection electrodes 2, 2 is hindered, and the adhesion characteristics are deteriorated due to the generation of wrinkles and the like. .

The electrode terminals 4, 4 of the detection electrodes 2, 2
Since the impedance adjuster 6 is disposed on one of the test signal lines 5 connecting the input terminal of the liquid leak detector 7 to the input terminal of the liquid leak detector 7, the liquid adheres to both the detection electrodes 2 and 2. Even if the electrode terminals 4, 4 are electrically connected, the electrode terminals 4, 4
The impedance value between them does not fall below a certain level, and the current flowing through the electrode terminals 4, 4 is limited by a simple and inexpensive configuration, so that excessive electrolytic corrosion of the detection electrodes 2, 2 can be prevented. Further, in the comb-shaped detection electrodes 2, 2, the impedance of the bases 2b, 2b is ignored by making the line width of the bases 2b, 2b connected to the electrode terminals 4, 4 larger than the tip ends 2a, 2a. To the extent possible, uniform detection sensitivity can be obtained on the entire surface of the insulating substrate 1. Also,
The line width of the bases 2b, 2b of the detection electrodes 2, 2 should preferably be at least twice the line width of the tips 2a, 2a.

Since the control CPU 10 is provided with the NPN transistor Tr capable of cutting off the power supply to the detection electrodes 2, 2, the liquid adheres to both of the detection electrodes 2, 2 and the electrode terminals 4, 4 are closed. Even if the connection is established, the detection electrodes 2
When the supply of power to the detection electrodes 2 and 2 is cut off, the power supply time to the detection electrodes 2 and 2 is shortened, and the electrolytic corrosion of the detection electrodes 2 and 2 when the liquid adheres can be minimized. In addition, when inspection is unnecessary or when maintenance is performed, the control CPU 10 can automatically cut off the power supply, thereby ensuring the safety of maintenance.

In the above embodiment, a nickel film was used as the material of the detection electrodes 2, but at least one of copper, chromium, iron, aluminum, titanium, zinc, tin, lead, cobalt, vanadium, platinum and gold was used. A metal thin film containing one may be used. Further, the metal thin film may be a single layer or a plurality of layers.

The detection electrodes 2, 2 are formed by one of lithography, sputtering, vacuum evaporation, MBE, plating film and electroless plating, or a combination of a plurality of methods. You may.

The test signal lines 5, 5 may be coaxial cables, and the NPN transistor Tr may be a relay switch. Further, the impedance adjuster 6 may be a fixed resistor or a variable resistor.

The pattern detection electrodes 15 may be formed not only on one side of the insulating substrate 1 but also on both sides.

Although the pair of detection electrodes 2 are formed on the insulating substrate 1, a plurality of detection electrodes may be formed. When there are a plurality of detection electrodes, the detection electrodes may be formed in a comb shape, a radial shape, a spiral shape, a zigzag shape, or the like.

(Second Embodiment) FIG. 4 is a perspective view of a main part of a filling and packaging production line provided with a liquid leakage inspection system according to a second embodiment of the present invention. FIG. 5A is a schematic front view of the filling and packaging production line, and FIG. 5B is a schematic side view of the filling and packaging production line. Note that, in the present embodiment, the same members as those in FIG.

As shown in FIG. 4, the above-mentioned filling / packaging production line is a household detergent refill bag 102, 1 as an inspection object.
02 for detecting the liquid leakage from the household detergent refill bags 102, 102,.
., And rollers 103, 103 as pressing means for applying a pressing force to the household detergent refill bags 102, 102,... Are disposed above the transport conveyor 101. ing. Also, as shown in FIGS. 5A and 5B, the upper and lower sides of the transport conveyor 101 are also provided.
Insulating substrates 21, 31 and 41 similar to the insulating substrate 1 are arranged.

In the filling / packaging production line having the above configuration, FIG.
As shown in FIG.
The household detergent refill bag 102 is transported to a position below 03,103. Then, as shown in FIG. 5B, the household detergent refill bag 102 is pressed by the rollers 103, 103. At this time, if the scratches, holes, and the like in the pressed household detergent refill bag 102 are larger than the standard, the liquid detergent in the household detergent refill bag 102 leaks from the scratches, holes, and the like. The liquid detergent comes out or scatters in an unspecified direction from the scratches or holes. When the liquid detergent adheres to at least one of the pattern detection electrodes (not shown) provided on the insulating substrates 1, 1, 21, 31, and 41, liquid leakage can be detected.

As described above, the household detergent refill bag 1
By applying a pressing force to rollers 02, 02 by the rollers 103, 103, the liquid detergent leaks from the scratches, holes, etc. in the household detergent refill bag 102 without fail, and the liquid detergent is applied to the insulating substrates 1, 1, 21. , 31, and 41 are attached to any one of the pattern detection electrodes. Therefore, it is possible to reliably detect liquid leakage from the household detergent refill bag 102.

By providing meshes or holes on the surface of the conveyor 101, the liquid detergent leaked and dropped from the household detergent refill bag 102 can be dropped on the insulating substrate 41.
Can be detected.

The insulating substrates 1, 1, 21, 31, 41
The location and the number of rollers 103 are not limited to the above embodiment.

In the second embodiment, the insulating substrates 21 and 31 are disposed above the conveyor 101. However, as shown in FIG.
An insulating substrate 51 having flexibility may be provided. In the filling and packaging production line having the flexible insulating substrate 51, insulating substrates 61, 61 long in the direction of arrow M in which the household detergent refilling bag 102 moves are arranged on both the left and right sides of the conveyor 101, respectively. Further, the insulating substrates 61, 61
Although not shown, similarly to the insulating substrate 1 shown in FIG. 4, has pattern detection electrodes formed of comb-shaped detection electrodes facing each other in the longitudinal direction.

On one surface of the flexible insulating substrate 51, as shown in FIG. 7, a pattern detecting electrode 65 composed of comb-shaped detecting electrodes 52, 52 facing each other is formed. Since the pattern detection electrode 65 is formed on substantially the entire surface of one surface of the insulating substrate 51, the insulating substrate 51 is reinforced by the pattern detection electrode 65, and
Has improved mechanical strength. The insulating substrate 51
Although the pattern detection electrodes 65 are formed on substantially the entire surface of one of the surfaces, the effect of improving the mechanical strength of the flexible insulating substrate 51 can be obtained even if the pattern detection electrodes 65 are formed on at least the end portions of the insulating substrate 51. can get.

The detection electrodes 52, 52 of the pattern detection electrode 65 include bases 52b, 52b extending in the longitudinal direction of the insulating substrate 51, and tips 52a, 52a extending from the base 52b in the vertical direction in FIG. have. The flexible insulating substrate 51 is arranged so that the direction in which the tip portions 52a extend is parallel to the direction of the arrow M in which the household detergent refill bag 102 shown in FIG. 6 moves. Thus, the pattern detection electrode 65 is exposed in a passage through which the household detergent refill bag 102 passes. Also, even if the detection electrodes 52, 52 (shown in FIG. 7) come into contact with the running household detergent refill bag 102, the household detergent refill bag 102 may be used.
Since the friction between the electrodes and the detection electrodes 52 and 52 becomes small, it is possible to prevent the adhesion of the detection electrodes 52 and 52 to the insulating substrate 51 from deteriorating. The detection electrodes 52 are formed by the same forming method as the detection electrodes 2 shown in FIG.

In the filling / packaging production line having the flexible insulating substrate 51 having the above-described configuration, as shown in FIG. come. Then, the household detergent refill bag 10 is
2 is pressed, and the scratches, holes, and the like in the pressed household detergent refill bag 102 are larger than the standard,
The liquid detergent scatters in an unspecified direction from the scratches or holes, or the liquid detergent in the household detergent refill bag 102 leaks from the scratches or holes. When the liquid detergent scatters in an unspecified direction, the liquid detergent is applied to the pattern detection electrodes 65 (shown in FIG. 7) of the insulating substrate 51 and the pattern detection electrodes (not shown) of the insulating substrates 61, 61. If it adheres to at least one, a liquid leak can be detected.
On the other hand, when the liquid detergent leaks from the household detergent refill bag 102, even if the leaked liquid detergent is extremely small,
As shown in FIG. 9, the pattern detection electrode 65 (shown in FIG. 7) of the flexible insulating substrate 51 comes into contact with the household detergent refill bag 102, so that a trace amount of liquid detergent adheres to the pattern detection electrode 65. Thus, a very small amount of liquid leakage can be detected.

Further, with respect to the flexible insulating substrate 51,
When the running household detergent refill bag 102 hits,
Since the insulating substrate 51 is bent by the contact between the pattern detection electrode 65 and the household detergent refilling bag 102, the insulating substrate 51 fits the surface of the household detergent refilling bag 102, and is used for home detergent refilling. Damage to the bag 102 can be more reliably prevented, and disturbance of the running state of the household detergent refill bag 102 can be suppressed more reliably. Therefore, a very small amount of liquid leakage of the household detergent refill bag 102 due to the contact between the pattern detection electrode 65 and the household detergent refill bag 102 can be obtained without adversely affecting the household detergent refill bag 102. Can be detected.

Further, since the insulating substrate 51 has flexibility, the insulating substrate 51 fits into a place other than a plane, for example, a curved surface or a concave / convex shape. it can. Therefore, the degree of freedom of installation of the insulating substrate 51 can be improved.

The flexible insulating substrate 51 is preferably produced, for example, as follows.

First, as shown in FIG. 8, for example, a soft substrate 71 having a size larger than that of the insulating substrate 51 is formed of a heat-resistant polymer material, for example, polyimide. Then, on the soft substrate 71, a pattern detection electrode 65 composed of comb-shaped detection electrodes 52, 52 facing each other is formed. Finally, the flexible substrate 71 is punched out with a Thomson blade, for example, in the normal direction of the surface thereof, and has a thickness of 10-20
A 00 μm insulating substrate 51 is completed. At this time, in order to prevent the generation of burrs at the end of the insulating substrate 51,
It is desirable to punch the insulating substrate 51 from the detection electrodes 52, 52 side. Examples of the heat-resistant polymer material that is a material of the flexible insulating substrate 51 and the soft substrate 71 include, for example, polyimide, aromatic polyamide, and polybenzimidazole. Preferably, a flexible insulating substrate is formed using polyimide.

The thickness of the insulating substrate 51 thus manufactured is 10 to 2000 μm (preferably 100 to 1000 μm).
By being within the range of m), the insulating substrate 51 can have appropriate flexibility.

If the thickness of the insulating substrate 51 is 2
If it exceeds 000 μm, flexibility will be impaired. As a result, when the insulating substrate 51 collides with the running household detergent refill bag 102, the household detergent refill bag 1
02 has a bad influence on the running property and damages the surface of the household detergent refill bag 102.

If the thickness of the insulating substrate 51 is 1
If the thickness is less than 0 μm, wrinkles and tears occur in the insulating substrate 51 when the patterns of the detection electrodes 52 and 52 are formed. That is, the workability of the insulating substrate 51 is reduced. If the thickness of the insulating substrate 51 is less than 10 μm, the mechanical strength will be weak.

The detection electrode 5 is provided on the soft substrate 71.
By forming an electrode larger than 2,52, an insulating substrate having a finally required shape is punched from the flexible substrate 71, and the ends of the flexible insulating substrate are covered with the detection electrodes 52,52. be able to.

The flexible insulating substrate 51 may be composed of a plurality of layers having different flexibility. For example, a substrate obtained by laminating a flexible substrate and a rubber-like substrate having flexibility different from that of the flexible substrate may be used as a flexible insulating substrate. In this case, a soft substrate,
The flexibility of the insulating substrate can be adjusted by combination with a rubber-like substrate having desired flexibility.

[0083]

As is apparent from the above description, the liquid leakage inspection system according to the first aspect of the present invention has a detection electrode having a thickness of 100%.
μm or less, the height difference between the surface of the detection electrode and the surface of the insulating substrate is 100 μm or less, and there are few irregularities. For example, even if the insulating substrate is wiped with a cloth, the cloth does not catch on the irregularities. The above liquid deposits can be smoothly and completely wiped off, thereby improving the cleaning workability.
In addition, since there are few irregularities on the surface of the insulating substrate on which the detection electrodes are formed, the wettability to the liquid to be inspected depends on its substantially flat surface shape, and the detection sensitivity to liquid leakage can be improved.

Further, since the thickness of the detection electrode is 1 μm or more, the electric resistance is small and sufficient conductivity can be obtained.

Further, in the liquid leakage inspection system according to the first aspect of the present invention, the electrolytic corrosion action suppressing means limits the current flowing through the detection electrode or cuts off the current when it is unnecessary. Electric corrosion can be suppressed.

In the liquid leakage inspection system according to the eighth aspect of the present invention, since the insulating substrate has flexibility, the insulating substrate can be installed on, for example, a curved surface or an uneven shape, and the degree of freedom of installing the insulating substrate is improved. Can be improved.

In the liquid leakage inspection system according to the eighth aspect of the present invention, since the insulating substrate has flexibility, the insulating substrate can be bent when the insulating substrate comes into contact with the object to be inspected.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an example of the concept of a liquid leakage inspection system according to the present invention.

FIG. 2 is a schematic configuration diagram of a liquid leakage inspection system according to a first embodiment of the present invention.

FIG. 3 is a schematic diagram for explaining detection of liquid leakage by the liquid leakage inspection system.

FIG. 4 is a perspective view of a main part of a filling and packaging production line in which a liquid leakage inspection system according to a second embodiment of the present invention is installed.

FIG. 5 (a) is a schematic front view of the filling and packaging production line, and FIG. 5 (b) is a schematic side view of the filling and packaging production line.

FIG. 6 is a perspective view of a main part of a modification of the filling and packaging production line of the second embodiment.

FIG. 7 is a front view of an insulating substrate according to a modified example of the filling and packaging production line.

FIG. 8 is a diagram for explaining a method of manufacturing an insulating substrate according to a modified example of the filling and packaging production line.

FIG. 9 is a schematic side view of a modified example of the filling and packaging production line.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Insulating substrate 2,52 Detection electrode 2a, 52a Tip 2b, 52b Base 6 Impedance detector 7 Liquid leak detector 15,65 Pattern detection electrode Tr NPN transistor 51 Flexible insulating substrate 102 Household detergent refill bag 103 rollers

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-269933 (JP, A) Japanese Utility Model Showa 55-20497 (JP, U) Japanese Utility Model Showa 59-1220464 (JP, U) (58) Field (Int.Cl. ⁷ , DB name) G01M 3/16 G01N 27/02

Claims (10)

(57) [Claims] 1. A semiconductor device having a thickness of 1 to 10 formed on an insulating substrate.
A pattern detection electrode is the detection electrode formed by opposing a 0 .mu.m, judging means for judging leakage of the object to be inspected by receiving the signal from the pattern detection electrode, for suppressing galvanic corrosion of the pattern detection electrodes ,
When the liquid leakage of the inspection object is determined, the above pattern detection electrode
A liquid leakage inspection system comprising: an electrolytic corrosion suppressing means for interrupting a current flowing to the liquid. 2. The liquid leakage according to claim 1, wherein said pattern detection electrode is formed by a method including at least one of lithography, sputtering, vacuum evaporation, MBE, plating film, and electroless plating. Inspection system. 3. The liquid leakage inspection system according to claim 1, wherein said electrolytic corrosion action suppressing means has an electric resistance for limiting a current flowing through said pattern detection electrode. 4. The apparatus according to claim 1, wherein said electrolytic corrosion suppressing means includes a transistor switch which operates upon receiving a signal from said determining means.
The liquid leakage inspection system according to claim 1, wherein: 5. The liquid leakage inspection system according to claim 1, further comprising a pressing unit that applies a pressing force to the inspection object. 6. The insulating substrate according to claim 1, wherein said insulating substrate has flexibility.
6. A liquid leakage inspection system according to any one of claims 1 to 5. 7. The liquid leakage inspection system according to claim 6, wherein said detection electrode is installed so as to be in contact with an object to be inspected. 8. any one of claims 1 to 7 having a pattern detection electrodes formed on an insulating substrate having flexibility
One of the liquid leakage inspection system. 9. The liquid leakage inspection system according to claim 8, wherein said pattern detection electrode comes into contact with an object to be inspected, and said insulating substrate can be bent by contact between said pattern detection electrode and said object to be inspected. 10. A liquid leakage inspection method for detecting liquid leakage of an inspection object using the liquid leakage inspection system according to claim 1.