JP3335701B2 - Joining method of ceramics and metal - Google Patents
Joining method of ceramics and metalInfo
- Publication number
- JP3335701B2 JP3335701B2 JP07298193A JP7298193A JP3335701B2 JP 3335701 B2 JP3335701 B2 JP 3335701B2 JP 07298193 A JP07298193 A JP 07298193A JP 7298193 A JP7298193 A JP 7298193A JP 3335701 B2 JP3335701 B2 JP 3335701B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- ceramics
- alloy
- tantalum
- joining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は、セラミックスと金属と
の接合方法に関し、特にアルミナ或いはジルコニア等の
酸化物セラミックスと、コバール或いは４２アロイ等の
ニッケルと鉄系の合金との接合方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for joining ceramics to metal, and more particularly to a method for joining oxide ceramics such as alumina or zirconia to nickel and iron-based alloys such as Kovar or 42 alloy.
【０００２】[0002]
【従来の技術及びその課題】従来、アルミナ或いはジル
コニア等の酸化物セラミックスと、コバール或いは４２
アロイ等のニッケルと鉄系の合金とを接合する方法とし
ては、高融点金属法と呼ばれる方法が採用されていた。2. Description of the Related Art Conventionally , oxide ceramics such as alumina or zirconia and Kovar or 42 are known.
As a method for joining nickel such as an alloy and an iron-based alloy, a method called a high melting point metal method has been adopted.
【０００３】かかる方法は、先ずセラミックス表面にモ
リブテンとマンガン、或いはニッケルとタングステン等
のメタライズ層を形成し、該メタライズ層が形成された
セラミックスと金属とを、銀と銅，ニッケルと金、或い
はそのそれぞれの成分からなるロウを用いて接合するも
のでる。In such a method, first, a metallized layer of molybdenum and manganese or nickel and tungsten is formed on a ceramic surface, and the ceramic and metal on which the metallized layer is formed are replaced with silver and copper, nickel and gold, or nickel and gold. It is joined by using a wax composed of each component.
【０００４】しかしながら、上記した接合方法にあって
は、メタライズ層を形成する工程等を含むことから、そ
の製造工程が長く、歩留りを悪化させていたと共に、そ
の製造原価は高いものであった。However, the above-described bonding method involves a step of forming a metallized layer and the like, so that the manufacturing process is long, the yield is deteriorated, and the manufacturing cost is high.
【０００５】また、近年においては、従来より使用され
ている上記銀と銅との共晶組成のロウ中に、活性金属で
あるチタンを含有させたロウが出現し、該ロウを使用し
てセラミックス表面にメタライズ層を形成することな
く、セラミックスと金属とを接合することがなされてい
る。[0005] In recent years, a wax containing titanium, which is an active metal, has appeared in a conventionally used wax having a eutectic composition of silver and copper. Ceramics and metals are joined without forming a metallized layer on the surface.
【０００６】しかしながら、上記したチタンを含有させ
たロウにあっては、窒化珪素やサイアロン等の非酸化物
セラミックスに対しては良好なヌレ性を示すが、酸化物
セラミックスに対しては上記非酸化物セラミックスに比
べヌレ性が悪く、付着するもののコバール或いは４２ア
ロイ等のニッケルと鉄系の合金との必要な接合強度（５
０ＭＰａ以上）が得られなかった。[0006] However, the above-mentioned wax containing titanium shows good wettability with respect to non-oxide ceramics such as silicon nitride and sialon. Kovar or 42 a although wettability compared with the object ceramics is poor, adheres
Required bonding strength between nickel such as Roy and iron-based alloy (5
0 MPa or more) was not obtained.
【０００７】本発明は、上述した従来技術が有する課題
に鑑みなされたものであって、その目的は、酸化物セラ
ミックスに対して十分なヌレ性を示し、コバール或いは
４２アロイ等のニッケルと鉄系の合金との高強度の接合
が可能なセラミックスと金属との接合方法を提供するこ
とにある。The present invention has been made in view of the problems with the prior art described above, and its object is exhibited sufficient wettability with respect to oxide ceramics, Kovar or
It is an object of the present invention to provide a method for joining ceramics and metal, which enables high-strength joining between nickel and iron-based alloys such as Alloy 42 .
【０００８】[0008]
【課題を解決するための手段】本発明者らは、種々の試
験・研究の結果、銀と銅の共晶組成からなる２枚の層の
間に、活性金属であるタンタルの箔を介在させた３層構
造のロウ材とすると共に、該ロウ材中のタンタルの割合
を特定範囲内としたロウ材を用いて、アルミナ或いはジ
ルコニア等の酸化物セラミックスと、コバール或いは４
２アロイ等のニッケルと鉄系の合金とを接合すると、酸
化物セラミックスへのロウのヌレ性が改善され、コバー
ル或いは４２アロイ等のニッケルと鉄系の合金との接合
が高強度でなされることを見いだし、本発明を完成させ
た。As a result of various tests and studies, the present inventors have found that two layers composed of a eutectic composition of silver and copper are used.
During, 3 So構 which is interposed foil tantalum is active metal
And the proportion of tantalum in the brazing material
The using the brazing material within the specific range, alumina or di
Oxide ceramics such as luconia and Kovar or 4
When joining the nickel and iron, such as 2 Alloy Alloy, acid
Wettability of wax to the monster ceramics is improved, Cobar
It has been found that the joining of nickel and an iron-based alloy such as metal or 42 alloy is performed with high strength, and the present invention has been completed.
【０００９】即ち、本発明は、アルミナ或いはジルコニ
ア等の酸化物セラミックスと、コバール或いは４２アロ
イ等のニッケルと鉄系の合金とを、銀と銅の共晶組成か
らなる２枚の層の間に、柔軟性のあるタンタルの箔を介
在させた３層構造のロウ材であって、且つ前記ロウ材中
のタンタルの割合が、４〜８重量％としたロウ材を用い
て接合するセラミックスと金属との接合方法とした。That is, the present invention relates to an alumina or zirconium
And oxide ceramics such as A, kovar or 42 Aro
A three-layer brazing material in which a flexible tantalum foil is interposed between two layers made of a eutectic composition of silver and copper, and a nickel and iron-based alloy such as b) And in the brazing material
Percentage of tantalum and a method of joining the ceramics and metal bonded using a brazing material that was 4-8 wt%.
【００１０】上記した本発明にかかるセラミックスと金
属との接合方法によれば、高温に晒した場合に表面の酸
化損傷がひどく、高温高強度材料である酸化物セラミッ
クスの接合には使えないとの常識がある活性金属である
タンタルを、銀と銅の共晶組成からなる２枚の層の間に
介在させた３層構造のロウ材とすることにより、タンタ
ルが直接大気（酸化雰囲気）に晒されることを防ぎ、タ
ンタルの酸化劣化を防止すると共に、該中間層として挿
入されたタンタルが、接合する金属側に全て流れ取られ
てしまうことがなく、その結果、タンタルがロウをセラ
ミックスに十分にヌレさせる作用を果たし、金属との高
強度な接合が可能となる。[0010] According to the method for bonding a ceramic and a metal according to the present invention described above, when exposed to a high temperature, the acid on the surface is reduced.
Oxide ceramics
By using tantalum, an active metal that has the common sense that it cannot be used for joining metals, as a three-layer brazing material interposed between two layers of eutectic silver and copper ,
To prevent direct exposure to air (oxidizing atmosphere)
In addition to preventing the oxidation deterioration of tantalum, the tantalum inserted as the intermediate layer does not all flow to the metal side to be joined, and as a result, the tantalum acts to sufficiently squeeze the braze into the ceramic. And high-strength bonding with metal.
【００１１】ここで、上記ロウ中のタンタルの割合は、
ロウ全体量の４〜８重量％である。これは、４重量％に
満たないタンタルの割合では、ロウのセラミックスへの
ヌレ性を改善させる効果が弱いためであり、また８重量
％を越えると、存在するタンタルのためにロウ自体が脆
くなり、接合強度が低下してしまうためである。Here, the proportion of tantalum in the wax is
It is 4 to 8% by weight of the total amount of the wax . This is because the effect of improving the wettability of the wax on the ceramic is weak when the proportion of tantalum is less than 4% by weight. This is because the bonding strength is reduced.
【００１２】また、本発明において接合するセラミック
スは、アルミナ或いはジルコニア等の酸化物セラミック
スであり、また接合する金属は、コバール或いは４２ア
ロイ等のニッケルと鉄系の合金である。これは、本発明
は、もともとこれらのセラミックスと金属とを高強度で
接合できる方法を提供することを目的としてなされたも
のであり、上記本発明の作用・効果が、これらのセラミ
ックスと金属との接合において、特に有効に発揮される
ためである。 Further, the ceramic to be joined in the present invention, Ri oxide ceramics der such as alumina or zirconia, also metal to be joined is a nickel and iron alloy system such as Kovar or 42 alloy. The purpose of the present invention is to provide a method capable of joining these ceramics and metal with high strength from the beginning, and the operation and effect of the present invention can be applied to these ceramics and metal. This is because it is particularly effective in bonding .
【００１３】[0013]
【実施例】以下、本発明の実施例を挙げ、本発明を詳細
に説明する。EXAMPLES Hereinafter, the present invention will be described in detail with reference to examples of the present invention.
【００１４】（株）日本セラテック社製のアルミナ或い
はジルコニア（共に３×４×２０ｍｍ）と、住友特殊金
属（株）社製のコバール（商品名：ＫＶ−２）或いは４
２アロイ（共に３×４×２０ｍｍ）とを、その３×４ｍ
ｍの面において、下記に示す種々のロウを用いて接合し
た。Alumina or zirconia (both 3 × 4 × 20 mm) manufactured by Nippon Ceratech Co., Ltd. and Kovar (trade name: KV-2) or 4 manufactured by Sumitomo Special Metals Co., Ltd.
2 alloy (both 3x4x20mm) and 3x4m
On the surface of m, bonding was performed using various brazing materials shown below.
【００１５】−実施例１〜８− ３×４ｍｍ角で、その厚みが１００μｍの銀と銅の共晶
組成物（銀７２重量％、銅２８重量％）２枚の間に、ロ
ウ全重量に対し、４或いは８重量％になるようにその厚
みを調整した、３×４ｍｍ角のタンタル箔を挟んだ３層
構造のロウを用いて、上記セラミックスと金属とを接合
した。Examples 1 to 8 Between a pair of silver and copper eutectic compositions (72% by weight of silver and 28% by weight of copper) of 3 × 4 mm square and 100 μm in thickness, the total weight of the wax was On the other hand, the ceramics and the metal were joined by using a three-layered brazing sandwiching a 3 × 4 mm square tantalum foil whose thickness was adjusted to be 4 or 8% by weight.
【００１６】−比較例１〜８− ３×４ｍｍ角で、その厚みが１００μｍの銀と銅の共晶
組成物（銀７２重量％、銅２８重量％）２枚の間に、ロ
ウ全重量に対し、３或いは１０重量％になるようにその
厚みを調整した、３×４ｍｍ角のタンタル箔を挟んだ３
層構造のロウを用いて、上記セラミックスと金属とを接
合した。Comparative Examples 1 to 8 Between a pair of eutectic compositions of silver and copper (72% by weight of silver, 28% by weight of copper) of 3 × 4 mm square and 100 μm in thickness, the total weight of the wax was On the other hand, 3 × 4 mm square tantalum foil whose thickness was adjusted to be 3 or 10% by weight was sandwiched.
The above ceramics and metal were joined using a layered brazing.
【００１７】−比較例９〜１２− 銀と銅の共晶組成からなるロウ中に、ロウ全重量に対
し、８重量％になるように秤量したタンタルを溶融混合
し、銀、銅及びタンタルの合金とし、該合金を用いて、
上記セラミックスと金属とを接合した。Comparative Examples 9 to 12 Tantalum weighed to 8% by weight based on the total weight of the wax was melt-mixed into a wax having a eutectic composition of silver and copper, and silver, copper and tantalum were mixed. Alloy, and using the alloy,
The above ceramics and metal were joined.
【００１８】なお、各々の接合条件は、いずれも１０
−５Ｔｏｒｒ以下の真空中において、８５０°Ｃで１５
分間加熱することにより行なった。Each of the joining conditions is 10
−15 at 850 ° C. in a vacuum of -5 Torr or less
This was done by heating for minutes.
【００１９】得られたセラミックスと金属との接合体
を、冷却した後、各々の接合体の接合強度を測定した。
接合強度は、室温（２２°Ｃ）で、ＪＩＳ Ｒ １６０
１に基づく４点曲げ試験法で求めた。測定結果を、表１
に示す。After the obtained joined body of ceramics and metal was cooled, the joining strength of each joined body was measured.
The bonding strength is JIS R 160 at room temperature (22 ° C).
It was determined by a four-point bending test method based on 1. Table 1 shows the measurement results.
Shown in
【００２０】[0020]
【表１】 [Table 1]
【００２１】表１より、本発明にかかるセラミックスと
金属との接合方法により得られた接合体（実施例１〜
８）は、その接合強度が、９０〜１００ＭＰａと高い値
を示し、実用強度である５０ＭＰａを満たす接合体とな
ることが判明する。From Table 1, it can be seen that the joined bodies obtained by the method for joining ceramics and metals according to the present invention (Examples 1 to 3)
8) shows that the bonding strength is as high as 90 to 100 MPa, and the bonded body satisfies the practical strength of 50 MPa.
【００２２】これに対し、ロウ中のタンタルの含有量
が、少な過ぎる場合、及び多過ぎる場合（比較例１〜
８）には、共にその接合強度が低いものとなることが判
明する。また、タンタルの含有量が適当なものであって
も、そのロウの構造が合金となったものを使用した場合
（比較例９〜１２）には、やはりその接合強度が低いも
のとなることが判明する。On the other hand, when the content of tantalum in the wax is too small or too large (Comparative Examples 1 to 5).
In 8), it is found that the joint strength is low. In addition, even if the content of tantalum is appropriate, when the alloy having the structure of the brazing alloy is used (Comparative Examples 9 to 12), the joining strength may still be low. Prove.
【００２３】[0023]
【発明の効果】以上、説明した本発明にかかるセラミッ
クスと金属との接合方法によれば、アルミナ或いはジル
コニア等の酸化物セラミックスと、コバール或いは４２
アロイ等のニッケルと鉄系の合金とを、高強度で接合す
ることが可能となる。As described above, according to the method for bonding ceramics and metal according to the present invention described above, oxide ceramics such as alumina or zirconia, and Kovar or 42 are used.
And an alloy of nickel and iron, such alloy, it is possible to bond high strength.
フロントページの続き (56)参考文献 特開 昭64−24078（ＪＰ，Ａ) 特開 昭60−81071（ＪＰ，Ａ) 特開 昭60−96583（ＪＰ，Ａ) 特開 昭62−110868（ＪＰ，Ａ) 特開 平４−31373（ＪＰ，Ａ) 特開 平１−208374（ＪＰ，Ａ) 特開 昭59−141395（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C04B 37/02 Continuation of front page (56) References JP-A-64-24078 (JP, A) JP-A-60-81071 (JP, A) JP-A-60-96583 (JP, A) JP-A-62-110868 (JP) JP-A-4-31373 (JP, A) JP-A-1-208374 (JP, A) JP-A-59-141395 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB (Name) C04B 37/02
Claims (1)
ラミックスと、コバール或いは４２アロイ等のニッケル
と鉄系の合金とを、銀と銅の共晶組成からなる２枚の層
の間に、活性金属であるタンタルの箔を介在させた３層
構造のロウ材であって、且つ前記ロウ材中のタンタルの
割合が、４〜８重量％としたロウ材を用いて接合するこ
とを特徴とする、セラミックスと金属との接合方法。 An oxide ceramic such as alumina or zirconia, and a nickel such as Kovar or 42 alloy.
And an iron-based alloy , a three-layer brazing material in which a tantalum foil as an active metal is interposed between two layers having a eutectic composition of silver and copper , and Of tantalum inside
A method of joining ceramics and metal, wherein the joining is performed using a brazing material having a ratio of 4 to 8% by weight .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07298193A JP3335701B2 (en) | 1993-03-08 | 1993-03-08 | Joining method of ceramics and metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07298193A JP3335701B2 (en) | 1993-03-08 | 1993-03-08 | Joining method of ceramics and metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06263555A JPH06263555A (en) | 1994-09-20 |
| JP3335701B2 true JP3335701B2 (en) | 2002-10-21 |
Family
ID=13505082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07298193A Expired - Fee Related JP3335701B2 (en) | 1993-03-08 | 1993-03-08 | Joining method of ceramics and metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3335701B2 (en) |
-
1993
- 1993-03-08 JP JP07298193A patent/JP3335701B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06263555A (en) | 1994-09-20 |
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