JP3335264B2 - Cassette holding device, substrate transport device equipped with the same, and automatic substrate processing device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette holding device for holding a cassette capable of storing a plurality of substrates such as silicon wafers and glass substrates. In addition, the present invention relates to a substrate transfer device that includes the cassette holding device and automatically transfers these substrates together with the cassette along a desired path, and also includes the substrate transfer device and transfers the substrates to the cassette. The present invention relates to an automatic substrate processing apparatus for performing a cleaning process or the like by immersing a substrate in a processing solution in a processing tank.

[0002]

2. Description of the Related Art Conventionally, as an automatic substrate processing apparatus having such a cassette holding apparatus and a substrate transfer apparatus, there is an apparatus shown in FIGS.

As shown in FIG. 4, in this automatic substrate processing apparatus, a plurality of, for example, five processing tanks 2 to 6 are sequentially arranged on a gantry 1. In each of these processing tanks, required processing liquids 2a to 6a such as a cleaning liquid and an etching liquid are stored.

As shown in FIG. 5, in the automatic substrate processing apparatus, a substrate 8 such as a silicon wafer or a glass substrate to be processed is handled while being stored in a large number of cassettes 10 dedicated for processing. It is. In the cassette 10, the substrates 8 are arranged at regular intervals such that their main surfaces are parallel to each other and each is standing upright. The automatic substrate processing apparatus automatically performs the cleaning process on the substrates 8 and can complete the cleaning of each substrate 8 in a series of steps described later.

The cassette 10 accommodating the substrate 8 is held by a cassette holding device 12 shown in FIGS. 4 and 5, and the cassette holding device 12 is transported along a predetermined path by a transport means 14 (see FIG. 4). By doing so, it goes around each of the processing tanks 2 to 6 described above. The cassette holding device 12
And the transfer means 14 are collectively referred to as a substrate transfer device.

[0006] As shown in FIG.
The movable base 1 which is movable in a direction in which the processing tanks 2 to 6 are arranged, that is, in a horizontal direction (indicated by an arrow H)
6 and a driving means (not shown) for moving the movable base 16. As shown in the figure, a movable pole 17 is provided on the movable base 16 so as to be able to reciprocate in a vertical direction (indicated by an arrow V), and is driven by driving means (not shown) built in the movable base 16. It can be raised and lowered.

When the transporting means 14 having the above-described structure is operated, the cassette holding device 12 and the cassette 10 held by the cassette holding device 12 pass through the immersion positions of the processing liquids 2a to 6a in the processing tanks 2 to 6, and the respective processing tanks. It is conveyed along a predetermined route (described later) to the outside.

Next, the cassette holding device 12 will be described in detail.

The cassette holding device 12 includes a base 19 fixed to the upper end of the movable pole 17 and two bases 19 attached to the base 19 at one end and extending horizontally in parallel with each other. And the column-shaped longitudinal support members 21 and 22. The two longitudinal support members 21 and 22 are
A bearing mechanism (not shown) provided in the base body 19 is rotatably supported about its axis.
It is rotationally driven by driving means (not shown) built in the base portion 19.

A holding member 2 for holding the cassette 10 is attached to the other end of each of the two longitudinal support members 21 and 22.
4 are mounted two by two via mounting blocks 25. As is clear from the figure, these four holding members 24 are formed in a longitudinal shape, and
2, specifically, it is attached to the mounting block 25 in a cantilever state, in this case, a hanging state. As shown in FIG. 5, the lower end of each holding member 24 is formed as a hook portion 24a, and the flange portion 10a formed on the cassette 10 is supported by the hook portion 24a.

In the automatic substrate processing apparatus, a detecting means for detecting whether the cassette 10 is held by the cassette holding device 12 is provided. This is because the cassette holding device 12
The cassette 10 is provided on the assumption that the cassette 10 being held and being conveyed is dropped on the way due to some cause, or is left in the processing tanks 2 to 6 due to a chuck error. is there. When such an inconvenient situation occurs, it can be confirmed by a detection signal from the detection means, and it is possible to quickly cope with the situation, for example, by stopping the apparatus and performing a recovery operation.

As an example of the detection means, the one having the configuration shown in FIG. 5 is employed.

That is, two photosensors 31 and 32 each containing a light emitting element and a light receiving element are used.
The light-transmitting type detection means including these two photosensors as a set is individually installed in the vicinity of each of the processing tanks 2 to 6 shown in FIG. 4, for example. According to the detecting means having such a configuration, as shown in FIG. 5, light 33 is constantly emitted from the light emitting element toward the light receiving element.
The presence of the cassette 10 is detected based on the fact that the light receiving output from the light receiving element cannot be obtained when the cassette 10 crosses 3. That is, if the light incident on the light receiving element continues uninterrupted despite the passage through the cassette, it is confirmed that the above-described abnormal situation has occurred.

As another example of the detecting means, a light reflection type photo sensor 35 shown in FIG. 6 is used. The photosensor 35 has a built-in light-emitting element and a light-receiving element, and is installed such that the light 36 emitted from the light-emitting element receives the reflected light 37 reflected on the surface of the cassette 10 by the light-receiving element. The principle of detection is the same as that of the light transmission type described above.

Next, the operation of the automatic substrate processing apparatus having the above configuration will be described.

In FIG. 4, first, a cassette 10 in which a large number of substrates 8 are arranged and stored is supplied from a previous step, and the cassette 10 is received and held by a cassette holding device 12. Specifically, the operation of the driving means (not shown) provided in the base portion 19 causes the two longitudinal support members 21 and 22 to be rotationally driven, whereby the four holding members 24 are moved in the closing direction. It operates to hold the flange 10a (see FIG. 5) of the cassette 10.

When the cassette holding device 12 holds the cassette 10 in this manner, the respective driving means (not shown) are appropriately operated to perform the horizontal movement of the movable base 16 and the operation of moving the movable pole 17 up and down. As a result, the cassette 10 is transported along with the cassette holding device 12 holding the cassette 10 along the route V ₁ → H ₁ → V ₂ shown in FIG.
It is immersed in the processing liquid 2 a stored therein and is placed on a receiving table (not shown) provided in the processing tank 2. Then, each holding member 24 holding the cassette 10 is operated in the opening direction to release the holding state of the cassette 10, and the processing of each substrate 8 by the processing liquid 2a is performed.
For example, pre-cleaning is performed.

When the pre-cleaning is completed, the holding members 24 are closed to hold the cassette 10. Subsequently, the movable base 16 and the movable pole 17 are operated to move the cassette 10 into the path V ₃ → H ₂ shown in FIG.
→ V ₄ is conveyed by following the, is placed on the cradle of the next treatment tank 3 (not shown). Then, the processing of the substrate 8 with the processing liquid 3a is performed.

Thereafter, the cassettes 10 are moved in the same manner as described above by the paths V ₅ → H ₃ → V ₆ , V ₇ → H ₄ → V ₈ , shown in FIG.
V ₉ → H ₅ → V ₁₀ are sequentially transported, and are placed on a pedestal (not shown) in other adjacent processing tanks 4 to 6.
As a result, each substrate 8 is treated with each of the processing liquids 4a, 5a, and 6a.
Process. Thus, the cleaning operation of each substrate 8 is completed. The detection of the cassette 10 using the two photosensors 31 and 32 shown in FIG. 5 is appropriately performed at a required position in the cassette transport path.

Subsequently, the cassette 10 is recovered from the cassette holding device 12, and the substrates 8 are carried out together with the cassette 10 for the next process.

On the other hand, the cassette holding device 12 from which the cassette 10 has been removed is mounted on the movable base 16 and the movable pole 17.
By the operation, is moved along the path _{V 11 → H 6 → V 12} , it is returned to the original position. Thereafter, a series of operations up to this point are repeated.

[0022]

In the above-described conventional apparatus, the photo sensors 31, 3 confirm that the cassette 10 is held by the cassette holding device 12.
2 (or equivalent).
When a photo sensor or the like is used as described above, generally, in order to ensure the detection of the cassette, the cassette 1
It is necessary to stop temporarily when 0 passes through the detection position by the photo sensor or the like, or to reduce the transport speed. Therefore, the time required from the start to the end of the cleaning is lengthened correspondingly, which is a problem to be solved in order to improve the work efficiency.

Each of the processing liquids 2a to 6a used for cleaning the substrate 8 often contains not only water vapor but also corrosive gas. In some cases, there is an inconvenience that cumbersome maintenance is required for the purpose of preventing fogging and corrosion due to these generated gases. However, if maintenance is not sufficient and fogging and corrosion measures are inadequate, there is a concern that a malfunction may occur, for example, detection of a cassette becomes impossible.

Further, arranging a large number of the photosensors 31 and 32 in the vicinity of the transport path of the cassette 10 causes an increase in cost and an installation space for designing the structure of the entire apparatus. Must be taken into account in various ways, which limits the degree of freedom in device design.

The present invention has been made in view of the above points, and an object of the present invention is to provide an automatic processing apparatus which itself should be included as a part of its structure, to improve the work efficiency and maintain the work. An object of the present invention is to provide a cassette holding device that contributes to the reduction of the cost, the reduction of the cost, and the increase of the degree of freedom in design. It is another object of the present invention to provide a substrate transport device including the cassette holding device and transport means for transporting the cassette holder along a predetermined path, and further to provide the automatic substrate processing device.

[0026]

According to the present invention, there is provided a cassette holding apparatus comprising: a base; and a pair of longitudinal support members, one end of which is rotatably mounted on the base and which is driven to rotate substantially parallel to each other. And attached to each of the other end sides of the longitudinal support members, and are formed in a longitudinal shape and with respect to the longitudinal support members.
And a holding member for holding the retractable substrate storage cassette a plurality of substrates in a drooping state Te, the holding member includes a metal core member, and a resin surface layer member, the core member A resistance wire strain gauge is provided at a portion near the fixed end where the amount of strain is largest, and the resistance wire strain gauge is covered with the surface member. The resistance wire strain gauge of the cassette holding device according to the present invention is characterized by being fixed to the core member using an adhesive. The substrate transfer device according to the present invention includes a transfer unit that transfers a substrate storage cassette capable of storing a plurality of substrates held by the cassette holding device, and the cassette holding device includes a base unit that is transferred by the transfer unit. When each one end of which is mounted a pair of longitudinal support members which is rotated by rotatably mounted and substantially extend parallel to one another, to each of the other end of the longitudinal support member, elongate and the base portion The longitudinal support member
And a holding member for holding a substrate storage cassette drooping state, the holding member includes a metal core member with respect to,
A resin surface layer member, wherein a resistance wire strain gauge is provided at a position where the amount of strain is greatest near the fixed end of the core member, and the resistance wire strain gauge is covered by the surface layer member. . The present invention has a transporting means for transporting a substrate storage cassette capable of storing a plurality of substrates held by a cassette holding device of the automatic substrate processing apparatus according to the present invention along a predetermined path, and moving the substrate in the cassette in the predetermined path. In the automatic substrate processing apparatus for performing immersion processing by using the processing liquid stored in the processing tank, the cassette holding device has a base unit conveyed by the conveyance unit and one end rotatably attached to the base unit. A pair of longitudinal support members which are extended substantially in parallel with each other and driven to rotate, and mounted on each of the other end sides of the longitudinal support members to form a longitudinal and longitudinal support member.
And a holding member for holding a substrate accommodating cassette in hanging state with respect to support member, the holding member includes a metal core member, and a resin surface layer member, the fixed end near said core member A resistance wire strain gauge is provided at a portion where the amount of strain is largest, and the resistance wire strain gauge is covered with the surface layer member.

[0027]

According to the above construction, the resistance value of the resistance wire strain gauge changes based on the strain generated in a predetermined portion of the cassette holding device when the holding member holds the cassette. If the holding member does not hold the cassette, the resistance value becomes the original value.

[0028]

Next, an automatic substrate processing apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. In addition,
The automatic substrate processing apparatus according to the present invention is configured similarly to the conventional automatic substrate processing apparatus shown in FIGS. 4 to 6 except for the main parts described below. The description will be omitted, and only the main part will be described. In the following description, the same components as those of the conventional automatic substrate processing apparatus are denoted by the same reference numerals.

As shown in FIGS. 1 and 2, in the automatic substrate processing apparatus according to the present invention, the two longitudinal support members 21 and 22 of the cassette holding device 12
Two holding members 40 for holding the cassette 10 are mounted via the mounting block 25 at a time.
These four holding members 40 are formed in the same shape and the same length in the same shape, and are formed in a longitudinal shape. , Mounted in a hanging state.

As shown in FIGS. 2 and 3, the holding member 40 is a core member 4 made of a metal such as stainless steel.
0a and the core member 40a made of a resin such as a fluorine-based resin.
And a surface layer member 40b overlaid thereon. As shown in FIG. 2, the surface member 40b has an extension 40c that extends further below the lower end of the core member 40a.
The lower end of Oc is a hook portion 40d, and the flange portion 10a formed on the cassette 10 is supported by the hook portion 40d.

As shown in FIGS. 2 and 3, with respect to the cassette holding device 12, a predetermined portion where distortion is not generated when the cassette 10 is held, in this case, a single holding member 40,
The resistance wire strain gauge 42 is fixed using an adhesive or the like. However, in FIG. 2, the resistance wire strain gauge 42 is indicated by a black dot. As shown in FIG.
Is connected to a bridge circuit (not shown) at the connection 42a. However, the bridge circuit is provided in the basic portion 19 in the automatic substrate processing apparatus shown in FIG. 4, and the connection 42a is provided so as not to hinder the operation of the cassette holding device 12 and the transfer means 14 which are movable parts. Wired. According to such a configuration, the resistance wire strain gauge 4 is used based on the strain generated in the holding member 40 when the holding member 40 holds the cassette 10.
2 changes, and if the holding member 40 does not hold the cassette 10, the resistance value becomes the original value. This can be measured by the bridge circuit or an oscillograph (not shown). That is, the change in the resistance value of the resistance strain gauge 42 causes the cassette holding device 12
, The holding and non-holding states of the cassette 10 are confirmed.

According to the above configuration, in the automatic substrate processing apparatus (see FIG. 4 for the entire apparatus), the cassette holding device 1 is used.
Whether the cassette 2 is holding the cassette 10 can be continuously and reliably confirmed regardless of whether the cassette 10 is being conveyed, stopped, or conveyed. Therefore, unlike the conventional case, it is not necessary to reduce the transfer speed for detecting the cassette, the transfer can be performed quickly, and the work efficiency of the automatic substrate processing apparatus is improved.

[0033]

In this embodiment, as is apparent from FIG. 3, the resistance wire strain gauge 42 is fixed to the core member 40a of the holding member 40 and is covered by a resin surface member 40b. Therefore, the resistance wire strain gauge 42 is protected from corrosive gas and the like without performing a special coating process.

As is clear from FIGS. 2 and 3,
The resistance wire strain gauge 42 is fixed near a fixed end of the holding member 40 to the mounting block 25. That is, the resistance wire strain gauge 42 is disposed at a position where the applied moment, and thus the amount of strain, is the largest in the entire length of the holding member 40 formed in a cantilever shape. According to this configuration, the amount of change in the resistance value of the resistance wire strain gauge 42 is large, and the holding and non-holding of the cassette 10 can be reliably detected.

[0036]

In addition, the resistance wire strain gauge is generally relatively inexpensive, so that the cost can be reduced. In addition, since the resistance wire strain gauge is extremely thin and small, it is possible to design the structure of the entire device without taking space into account. It can be installed freely, and the degree of freedom in device design increases.

[0038]

As described above, according to the present invention,
A resistance wire strain gauge is fixed to a predetermined portion of the cassette holding device where the holding member provided in the cassette holding device should not be distorted when holding the cassette. Then, the state of holding and non-holding of the cassette is confirmed based on the change in the resistance value of the resistance wire strain gauge. According to such a configuration, whether or not the cassette holding device holds the cassette in the automatic substrate processing apparatus can be continuously and reliably performed regardless of the transfer speed during the transfer of the cassette.
Therefore, unlike the conventional case, it is not necessary to reduce the transfer speed for detecting the cassette, the transfer can be performed quickly, and the work efficiency of the automatic substrate processing apparatus is improved. Furthermore, the resistance wire strain gauge is relatively inexpensive, so the cost can be reduced, and because it is extremely thin and small, it can be freely installed without considering the space when designing the structure of the entire device. Therefore, the degree of freedom in device design is increased.
In addition, in the cassette holding device according to the present invention, the cassette holding device has a longitudinal support member rotatably attached at one end to each of the base portions and extending substantially in parallel with each other and driven to rotate by driving means, The holding member is longitudinally attached to the other end side of the longitudinal support member in a substantially cantilever state,
The resistance wire strain gauge is fixed near the fixed end of the holding member. In other words, the resistance wire strain gauge is arranged at a portion of the cantilever-shaped holding member where the amount of strain is largest. According to this configuration, the amount of change in the resistance value of the resistance wire strain gauge is large, and the holding and non-holding of the cassette can be reliably detected. Further, in the cassette holding device according to the present invention, the holding member includes a metal core member and a resin surface member covered on the core member, and the resistance wire strain gauge is fixed to the core member. And is covered by the surface member. Therefore, the resistance wire strain gauge is protected from corrosive gas and the like without performing a special coating process.

[Brief description of the drawings]

FIG. 1 is a perspective view of a cassette holding device, which is a main part of an automatic substrate processing apparatus according to the present invention.

FIG. 2 is a front view including a partial cross section showing a state where the cassette holding device shown in FIG. 1 holds a cassette in a processing liquid.

FIG. 3 is a perspective view including a partial cross section of a part of the cassette holding device shown in FIGS. 1 and 2.

FIG. 4 is a perspective view of a conventional automatic substrate processing apparatus.

5 is a partial cross-sectional view showing a state in which a cassette holding device included in the automatic substrate processing apparatus shown in FIG. 4 holds a cassette and a light transmitting photosensor for detecting the cassette; It is a front view.

FIG. 6 is a front view including a partial cross section, showing the cassette holding device shown in FIG. 5 and a light reflection type photosensor.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Stand (of automatic substrate processing apparatus) 2, 3, 4, 5, 6 Processing tank 2a, 3a, 4a, 5a, 6a Processing liquid 8 Substrate 10 Cassette 12 Cassette holding device 14 Transport means 16 Movable base 17 Movable pole 19 Base Part 21, 22 Longitudinal support member 25 Mounting block 31, 32, 35 Photosensor 40 Holding member 40a Metal core member 40b Resin surface member 42 Resistance wire strain gauge

Continuation of the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) H01L 21/68 B65G 49/07 H01L 21/304 H01L 21/305 B25J 15/08 B25J 19/02

Claims (4)

(57) [Claims] 1. A base member, a pair of longitudinal support members each rotatably attached to the base member at one end and extending substantially in parallel with each other and driven to rotate, and each of the other end of the longitudinal support member Attached to the longitudinal and longitudinal support member
And a holding member for holding a plurality of retractable substrate storage cassettes substrates hanging state for, the holding member includes a metal core member, and a resin surface layer member, the core member A resistance wire strain gauge is provided at a portion where the amount of strain is the largest near the fixed end of the cassette holding device, and the resistance wire strain gauge is covered with the surface member. 2. The cassette holding device according to claim 1, wherein the resistance wire strain gauge is fixed to the core member using an adhesive. 3. A transport device for transporting a substrate storage cassette capable of storing a plurality of substrates held by a cassette holding device, wherein the cassette holding device comprises: a base portion transported by the transport device; A pair of longitudinal support members each rotatably attached to the base portion and rotatably driven while extending substantially in parallel with each other; and attached to each of the other end sides of the longitudinal support members to form a longitudinal and longitudinal support. Element
And a holding member for holding a substrate storage cassette drooping state, the holding member includes a metal core member with respect to,
A resin surface layer member, wherein a resistance wire strain gauge is provided at a position where the amount of strain is greatest near the fixed end of the core member, and the resistance wire strain gauge is covered by the surface layer member. Substrate transfer device. 4. A transport unit for transporting a substrate storage cassette capable of storing a plurality of substrates held by a cassette holding device along a predetermined path, wherein a substrate in the cassette is processed in the processing path along the predetermined path. In the automatic substrate processing apparatus for performing immersion processing by using the processing liquid stored in the cassette holding device, the cassette holding device has a base portion conveyed by the conveyance means, and one end is rotatably attached to the base portion, and the cassette holding device is substantially mutually separated. A pair of elongate support members which are extended in parallel and driven to rotate, and mounted on each of the other end sides of the elongate support members.
Is, and a holding member for holding a substrate storage cassette drooping state with respect to elongate and the longitudinal support member, the holding member includes a metal core member, and a resin surface layer member, the An automatic substrate processing apparatus, comprising: a resistance wire strain gauge provided in a portion near the fixed end of a core member where the amount of strain is the largest, and the resistance wire strain gauge is covered by the surface layer member.