JP3327995B2 - Ultrasonic atomizer noise prevention structure - Google Patents

Ultrasonic atomizer noise prevention structure

Info

Publication number
JP3327995B2
JP3327995B2 JP12651893A JP12651893A JP3327995B2 JP 3327995 B2 JP3327995 B2 JP 3327995B2 JP 12651893 A JP12651893 A JP 12651893A JP 12651893 A JP12651893 A JP 12651893A JP 3327995 B2 JP3327995 B2 JP 3327995B2
Authority
JP
Japan
Prior art keywords
area
fixed
plate
diaphragm
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12651893A
Other languages
Japanese (ja)
Other versions
JPH06335646A (en
Inventor
啓二 丹野
眞一 関口
純夫 常世田
耕司 戸田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mikuni Corp
Original Assignee
Mikuni Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mikuni Corp filed Critical Mikuni Corp
Priority to JP12651893A priority Critical patent/JP3327995B2/en
Publication of JPH06335646A publication Critical patent/JPH06335646A/en
Application granted granted Critical
Publication of JP3327995B2 publication Critical patent/JP3327995B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0653Details
    • B05B17/0676Feeding means
    • B05B17/0684Wicks or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は室内の湿度調整をする加
湿器などに利用される超音波噴霧装置による液体の噴霧
に伴う騒音を防止する構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure for preventing noise caused by spraying a liquid by an ultrasonic spraying device used in a humidifier for adjusting the humidity in a room.

【0002】[0002]

【従来の技術】矩形板状の圧電振動子に穴あき振動板を
固着してなる構造を超音波励振器とする超音波霧化装置
は特願平2−273001により特許出願されている。
また、その超音波霧化装置を応用することにより生成さ
れた「超音波カラーオルガン」が平成3年4月22日に
特許出願されている(特願平3−119191)。
2. Description of the Related Art An ultrasonic atomizer having a structure in which a perforated vibration plate is fixed to a rectangular plate-shaped piezoelectric vibrator and having an ultrasonic exciter has been applied for a patent by Japanese Patent Application No. 2-273001.
A patent application for an "ultrasonic color organ" generated by applying the ultrasonic atomizing apparatus was filed on April 22, 1991 (Japanese Patent Application No. 3-119191).

【0003】図3は従来の超音波霧化装置の一実施例を
示す断面図である。本実施例の超音波霧化装置の駆動
時、圧電振動子が励振されるとその励振は圧電振動子に
固着された振動板に伝搬される。貯液槽中の液体が保液
材に吸収され振動板に到達するとその液体が霧化され
る。本実施例の超音波霧化装置では支持体によって圧電
振動子を固定物に固定することにより超音波霧化装置を
所定の位置に保っていた。このような従来の超音波霧化
装置は駆動の際に騒音を伴うことがあった。
FIG. 3 is a sectional view showing an embodiment of a conventional ultrasonic atomizer. When the ultrasonic atomizer of the present embodiment is driven, when the piezoelectric vibrator is excited, the excitation is transmitted to the diaphragm fixed to the piezoelectric vibrator. When the liquid in the liquid storage tank is absorbed by the liquid retaining material and reaches the diaphragm, the liquid is atomized. In the ultrasonic atomizing device of the present embodiment, the ultrasonic atomizing device is maintained at a predetermined position by fixing the piezoelectric vibrator to the fixed object by the support. Such a conventional ultrasonic atomizing device sometimes involves noise when driven.

【0004】超音波霧化装置を駆動する際、圧電振動子
を固定物に対し所定の位置に支持するだけでなく振動板
の位置もまた圧電振動子の位置に従って所定の位置に保
つことにより安定した霧化が実現できる。従って、振動
板の先端部分に振動板を所定の位置に保つことができる
ようなガイドを備える試みもなされたが、霧化機能は維
持できたものの騒音問題を解消するには至らなかった。
When the ultrasonic atomizer is driven, not only is the piezoelectric vibrator supported at a predetermined position with respect to the fixed object, but also the position of the diaphragm is maintained at a predetermined position in accordance with the position of the piezoelectric vibrator. Atomization can be realized. Accordingly, an attempt has been made to provide a guide at the tip of the diaphragm so that the diaphragm can be kept at a predetermined position, but the atomization function has been maintained, but the noise problem has not been solved.

【0005】[0005]

【発明が解決しようとする課題】従来の超音波霧化装置
は駆動の際に騒音を発生し、装置自身の寿命を短縮する
とともに長時間の使用による精神的苦痛を伴うことがあ
った。
The conventional ultrasonic atomizer generates noise when driven, shortens the life of the apparatus itself, and sometimes causes long-term use, causing mental distress.

【0006】本発明の目的は霧化機能を低下させること
なく超音波霧化装置の騒音を防止することができ、超音
波霧化装置の耐久性を維持することができる超音波噴霧
装置騒音防止構造を提供することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to prevent the noise of the ultrasonic atomizing apparatus without lowering the atomizing function and to maintain the durability of the ultrasonic atomizing apparatus. It is to provide a structure.

【0007】[0007]

【課題を解決するための手段】請求項1に記載の超音波
噴霧装置騒音防止構造は、矩形の圧電振動子および矩形
の穴あき振動板を有し、該振動板は該圧電振動子の少な
くとも一方の端面上に一体的に連なって固着され、該圧
電振動子および該振動板が互いに固着する固着部は両者
それぞれにおける1辺の縁領域にあり、両者の該辺が互
いに平行である超音波噴霧装置に設けられ構造であっ
て、該圧電振動子の励振に伴って該振動板が該固着部を
固定端とする形で振動をするときに、該振動板に液体を
供給し、該液体の噴霧を生成する際に生じる騒音を防止
する騒音防止構造において、支持体と該支持体に把持さ
れた振動緩衝材とから成り、前記支持体は固定物に固定
されており、前記振動板における2つの板面のうちの一
方を第1の板面とし、他方を第2の板面と称するとき、
前記振動緩衝材は、該第1の板面における領域Aおよび
該第2の板面における領域Bに接触し、前記領域Aおよ
び前記領域Bが前記振動板において占める領域は、該振
動板における前記固着部側の前記辺に対向する別の1辺
の縁領域にあり、前記領域Aおよび前記領域Bが前記振
動板において占める面積は、前記第1の板面および前記
第2の板面の面積に比し微小であり、前記領域Aおよび
前記領域Bは互いに対向することを特徴とする。
According to a first aspect of the present invention, there is provided an ultrasonic spraying device noise prevention structure comprising a rectangular piezoelectric vibrator and a rectangular perforated vibrating plate, wherein the vibrating plate is at least one of the piezoelectric vibrators. An ultrasonic wave which is integrally and continuously fixed on one end face and in which the piezoelectric vibrator and the vibrating plate are fixed to each other is in an edge region of one side of each of the two, and the both sides are parallel to each other. A structure provided in a spraying device, wherein when the vibrating plate vibrates with the fixed portion as a fixed end in accordance with excitation of the piezoelectric vibrator, liquid is supplied to the vibrating plate; In the noise prevention structure for preventing noise generated when generating the spray of the above, comprising a support and a vibration damping material gripped by the support, the support is fixed to a fixed object, the vibration plate One of the two plate surfaces is a first plate surface When the other referred to as a second plate surface,
The vibration damping material contacts a region A on the first plate surface and a region B on the second plate surface, and the region occupied by the region A and the region B in the diaphragm is the region in the diaphragm. The area occupied by the area A and the area B in the diaphragm in the edge area of another side opposite to the side on the fixing portion side is the area of the first plate surface and the second plate surface And the region A and the region B are opposed to each other.

【0008】請求項2に記載の超音波噴霧装置騒音防止
構造は、0007段落に記載の構造であって、前記領域
Aおよび前記領域Bが前記振動板において占める前記別
の1辺の縁領域は、該辺の中央部にあることを特徴とす
る。
According to a second aspect of the present invention, there is provided an ultrasonic spraying device noise prevention structure as described in the paragraph [0007], wherein the edge area of the other side occupied by the area A and the area B in the diaphragm is: , At the center of the side.

【0009】[0009]

【作用】本発明の超音波噴霧装置騒音防止構造は支持具
とその支持具に備えられた振動緩衝材とから成る。振動
緩衝材が超音波噴霧装置における振動板の一方の端面上
の部分Aおよびもう一方の端面上の部分Bと接触し、支
持具の一部が固定物に固定されることにより超音波噴霧
装置が駆動されたときの振動による騒音を防止してい
る。なお、部分AとBとはほぼ対面している。これは振
動緩衝材によって振動板に加えられる力をできるだけ均
等にするためである。また、部分AおよびBが圧電振動
子に片持ち梁状に固着された振動板の先端部分のそれぞ
れの端面で成ることにより、霧化に利用される振動板の
端面の面積を最大限に確保することができる。この場
合、振動緩衝材としては振動板の前記先端部分の両端面
とその両端面に隣接する側面とに接触する形状の、すな
わち前記先端部分を挟む形状のものを利用することによ
り霧化機能を維持できる。
According to the present invention, there is provided an ultrasonic spraying apparatus comprising a support and a vibration damper provided on the support. The vibration damping material comes into contact with a portion A on one end surface and a portion B on the other end surface of the diaphragm in the ultrasonic spraying device, and a part of the support is fixed to a fixed object, so that the ultrasonic spraying device is used. This prevents noise caused by vibration when the is driven. Note that the portions A and B are almost facing each other. This is to make the force applied to the diaphragm by the vibration damping material as uniform as possible. In addition, since the parts A and B are formed by the respective end faces of the tip part of the diaphragm fixed to the piezoelectric vibrator in a cantilever shape, the area of the end face of the diaphragm used for atomization is maximized. can do. In this case, as the vibration damping material, the atomization function is achieved by using a material having a shape that comes into contact with both end surfaces of the front end portion of the diaphragm and side surfaces adjacent to the both end surfaces, that is, a shape that sandwiches the front end portion. Can be maintained.

【0010】[0010]

【実施例】図1は本発明の超音波噴霧装置騒音防止構造
によって支持された超音波噴霧装置の一実施例を示す断
面図である。本実施例の超音波噴霧装置は圧電振動子3
および振動板4から成る。超音波噴霧装置は本実施例に
示す超音波噴霧装置騒音防止構造によって支持されてい
る。超音波噴霧装置騒音防止構造は支持体1および支持
体1に固着された振動緩衝材2から成る。振動緩衝材2
の材質は東レダウコーニング社製SE9157L材(製
品名)で、振動板4の先端部分と接触している。圧電振
動子3は矩形板状の圧電磁器5を有し、圧電磁器5の材
質はTDK72A材(製品名)で、その長さは22m
m、幅は20mm、厚さは1mmである。TDK72A
材は電気機械結合係数が大きいことから、ここでの実施
例に用いている。圧電磁器5の分極軸の方向は厚さ方向
に一致しており、この厚さ方向に垂直な両端面にAu電
極6および7が形成されている。Au電極6は圧電磁器
5の一方の面を覆い、Au電極7は圧電磁器5のもう一
方の面を覆っている。振動板4はニッケル製で、長さ1
7mm、幅20mm、厚さ50μmであり、多数の貫通
穴8(図1では描かれていない。)を有する矩形板状構
造を成す。貫通穴8は板面に垂直な方向に設けられ、そ
の形状はすり鉢状であって、一方の板面における開口面
積は他方の板面における開口面積より大きく、一方の開
口の直径は100μm、他方は10μmである。貫通穴
8は140μmの間隔をおいて、等しいピッチで配列さ
れている。振動板4はAu電極6を介して圧電振動子3
の一方の端面に、圧電振動子3と一体的に連なって固着
されている。
FIG. 1 is a sectional view showing an embodiment of an ultrasonic spraying device supported by an ultrasonic spraying device noise prevention structure of the present invention. The ultrasonic spray device of this embodiment is a piezoelectric vibrator 3
And the diaphragm 4. The ultrasonic spray device is supported by the ultrasonic spray device noise prevention structure shown in this embodiment. The ultrasonic spray device noise prevention structure includes a support 1 and a vibration damping material 2 fixed to the support 1. Vibration buffer 2
Is made of SE9157L (product name) manufactured by Dow Corning Toray Co., Ltd. and is in contact with the tip of the diaphragm 4. The piezoelectric vibrator 3 has a rectangular plate-shaped piezoelectric ceramic 5, and the material of the piezoelectric ceramic 5 is TDK72A (product name) and its length is 22 m.
m, the width is 20 mm, and the thickness is 1 mm. TDK72A
Since the material has a large electromechanical coupling coefficient, it is used in the embodiment here. The direction of the polarization axis of the piezoelectric ceramic 5 coincides with the thickness direction, and Au electrodes 6 and 7 are formed on both end surfaces perpendicular to the thickness direction. The Au electrode 6 covers one surface of the piezoelectric ceramic 5, and the Au electrode 7 covers the other surface of the piezoelectric ceramic 5. The diaphragm 4 is made of nickel and has a length of 1
It has a rectangular plate-like structure having a size of 7 mm, a width of 20 mm and a thickness of 50 μm and having a large number of through holes 8 (not shown in FIG. 1). The through-hole 8 is provided in a direction perpendicular to the plate surface, has a mortar shape, an opening area on one plate surface is larger than an opening area on the other plate surface, a diameter of one opening is 100 μm, and Is 10 μm. The through holes 8 are arranged at an equal pitch at intervals of 140 μm. The vibration plate 4 is connected to the piezoelectric vibrator 3 via the Au electrode 6.
Is fixedly connected to the piezoelectric vibrator 3 in one end face.

【0011】図2は図1の超音波噴霧装置騒音防止構造
を備えた超音波噴霧装置の斜視図である。圧電振動子3
は一部を固定物に固定され、支持体1もまた一部を別の
固定物に固定されている。このようにして、超音波噴霧
装置は所定の位置に支持され安定な霧化を実現できる。
FIG. 2 is a perspective view of the ultrasonic spray device provided with the ultrasonic spray device noise preventing structure of FIG. Piezoelectric vibrator 3
Is partially fixed to a fixed object, and the support 1 is also partially fixed to another fixed object. In this way, the ultrasonic spraying device is supported at a predetermined position and can realize stable atomization.

【0012】図1に示す超音波噴霧装置の駆動時、圧電
振動子3と振動板4との複合体の共振周波数にほぼ等し
い周波数を有する交流信号を圧電振動子3に印加すると
圧電振動子3が励振される。このとき、その交流信号の
周波数は圧電振動子3単体の共振周波数のうちの1つに
ほぼ一致している。振動板4を圧電振動子3の少なくと
も一方の端面上に一体的に連なって固着させる構造を採
用していることから、圧電振動子3の励振に伴って振動
板4は圧電振動子3と振動板4との固着部を固定端とす
る形で振動される。振動板4に液体を供給すると、該液
体は毛細管現象により振動板4に設けられた貫通穴8に
導かれる。前記液体は微小でかつ均一な粒子となって貫
通穴8の出口側に流出し、効率良く霧化される。この
際、支持体1が固定物に固定され、振動緩衝材2が振動
板4の先端部分に接触していることから、超音波噴霧装
置の駆動に伴う騒音を霧化機能を低下させることなく消
去することができる。
When an ultrasonic signal having a frequency substantially equal to the resonance frequency of the complex of the piezoelectric vibrator 3 and the vibration plate 4 is applied to the piezoelectric vibrator 3 when the ultrasonic spraying device shown in FIG. Is excited. At this time, the frequency of the AC signal substantially matches one of the resonance frequencies of the piezoelectric vibrator 3 alone. Since the vibrating plate 4 has a structure in which the vibrating plate 4 is integrally connected and fixed to at least one end face of the piezoelectric vibrator 3, the vibrating plate 4 vibrates with the piezoelectric vibrator 3 with the excitation of the piezoelectric vibrator 3. Vibration is performed in such a manner that the fixed portion with the plate 4 is a fixed end. When a liquid is supplied to the diaphragm 4, the liquid is guided to a through hole 8 provided in the diaphragm 4 by capillary action. The liquid becomes fine and uniform particles, flows out to the outlet side of the through hole 8, and is efficiently atomized. At this time, since the support 1 is fixed to the fixed object and the vibration damping material 2 is in contact with the distal end portion of the vibration plate 4, the noise accompanying the driving of the ultrasonic spray device is not reduced without lowering the atomizing function. Can be erased.

【0013】[0013]

【発明の効果】本発明の超音波噴霧装置騒音防止構造に
よれば、支持具が固定物に固定され振動緩衝材が超音波
噴霧装置の振動板の一部に接触することにより、霧化機
能の低下を招くことなしに霧化に伴う騒音を防止するこ
とができる。
According to the ultrasonic spray device noise prevention structure of the present invention, the support member is fixed to the fixed object, and the vibration damping material comes into contact with a part of the vibration plate of the ultrasonic spray device, so that the atomizing function is achieved. Noise caused by atomization can be prevented without lowering the noise.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の超音波噴霧装置騒音防止構造によって
支持された超音波噴霧装置の一実施例を示す断面図。
FIG. 1 is a sectional view showing an embodiment of an ultrasonic spraying device supported by an ultrasonic spraying device noise prevention structure of the present invention.

【図2】図1の超音波噴霧装置騒音防止構造を備えた超
音波噴霧装置の斜視図。
FIG. 2 is a perspective view of an ultrasonic spray device provided with the ultrasonic spray device noise prevention structure of FIG. 1;

【図3】従来の超音波霧化装置の一実施例を示す断面
図。
FIG. 3 is a cross-sectional view showing one embodiment of a conventional ultrasonic atomizer.

【符号の説明】[Explanation of symbols]

1 支持体 2 振動緩衝材 3 圧電振動子 4 振動板 5 圧電磁器 6 Au電極 7 Au電極 8 貫通穴 DESCRIPTION OF SYMBOLS 1 Support body 2 Vibration damping material 3 Piezoelectric vibrator 4 Vibration plate 5 Piezoelectric ceramic 6 Au electrode 7 Au electrode 8 Through hole

フロントページの続き (72)発明者 常世田 純夫 東京都千代田区外神田六丁目13番11号 株式会社ミクニ内 (72)発明者 戸田 耕司 神奈川県横須賀市二葉1丁目49番18号 (56)参考文献 特開 昭59−228967(JP,A) (58)調査した分野(Int.Cl.7,DB名) B05B 17/06 B05D 1/02 B06B 1/06 G10K 11/16 Continued on the front page (72) Inventor Sumio Tsuneda 6-13-11 Sotokanda, Chiyoda-ku, Tokyo Mikuni Corporation (72) Inventor Koji Toda 1-49-18, Futaba, Yokosuka-shi, Kanagawa (56) Reference JP-A-59-228967 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) B05B 17/06 B05D 1/02 B06B 1/06 G10K 11/16

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】矩形の圧電振動子および矩形の穴あき振動
板を有し、該振動板は該圧電振動子の少なくとも一方の
端面上に一体的に連なって固着され、該圧電振動子およ
び該振動板が互いに固着する固着部は両者それぞれにお
ける1辺の縁領域にあり、両者の該辺が互いに平行であ
る超音波噴霧装置に設けられ構造であって、該圧電振動
子の励振に伴って該振動板が該固着部を固定端とする形
で振動をするときに、該振動板に液体を供給し、該液体
の噴霧を生成する際に生じる騒音を防止する騒音防止構
造において、 支持体と該支持体に把持された振動緩衝材とから成り、 前記支持体は固定物に固定されており、 前記振動板における2つの板面のうちの一方を第1の板
面とし、他方を第2の板面と称するとき、前記振動緩衝
材は、該第1の板面における領域Aおよび該第2の板面
における領域Bに接触し、 前記領域Aおよび前記領域Bが前記振動板において占め
る領域は、該振動板における前記固着部側の前記辺に対
向する別の1辺の縁領域にあり、 前記領域Aおよび前記領域Bが前記振動板において占め
る面積は、前記第1の板面および前記第2の板面の面積
に比し微小であり、 前記領域Aおよび前記領域Bは互いに対向することを特
徴とする超音波噴霧装置騒音防止構造。
1. A piezoelectric vibrator comprising: a rectangular piezoelectric vibrator; and a rectangular perforated vibrating plate. The vibrating plate is integrally and continuously fixed on at least one end face of the piezoelectric vibrator. The fixed portions where the diaphragms are fixed to each other are located in an edge region of one side of each of the two, and the two sides are provided in an ultrasonic spraying device that is parallel to each other, and the structure is provided with the excitation of the piezoelectric vibrator. A noise prevention structure for supplying a liquid to the vibration plate when the vibration plate vibrates in a form having the fixed portion as a fixed end, thereby preventing a noise generated when spraying the liquid is generated. And a vibration damping material gripped by the support, wherein the support is fixed to a fixed object, one of the two plate surfaces of the diaphragm is a first plate surface, and the other is a first plate surface. When referred to as the second plate surface, the vibration damping material is provided on the first plate. And the area occupied by the area A and the area B in the diaphragm is a different one of the areas facing the side of the diaphragm on the fixing portion side. The area occupied by the area A and the area B in the diaphragm is smaller than the area of the first plate surface and the second plate surface. The region B is opposed to each other.
【請求項2】前記領域Aおよび前記領域Bが前記振動板
において占める前記別の1辺の縁領域は、該辺の中央部
にあることを特徴とする請求項1に記載の超音波噴霧装
置騒音防止構造。
2. The ultrasonic spray apparatus according to claim 1, wherein the edge area of the other side occupied by the area A and the area B in the diaphragm is located at a center of the side. Noise prevention structure.
JP12651893A 1993-05-28 1993-05-28 Ultrasonic atomizer noise prevention structure Expired - Lifetime JP3327995B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12651893A JP3327995B2 (en) 1993-05-28 1993-05-28 Ultrasonic atomizer noise prevention structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12651893A JP3327995B2 (en) 1993-05-28 1993-05-28 Ultrasonic atomizer noise prevention structure

Publications (2)

Publication Number Publication Date
JPH06335646A JPH06335646A (en) 1994-12-06
JP3327995B2 true JP3327995B2 (en) 2002-09-24

Family

ID=14937199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12651893A Expired - Lifetime JP3327995B2 (en) 1993-05-28 1993-05-28 Ultrasonic atomizer noise prevention structure

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Country Link
JP (1) JP3327995B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5099410B2 (en) * 2007-02-02 2012-12-19 株式会社フコク Ultrasonic atomizer
KR101703882B1 (en) * 2015-11-28 2017-02-08 나눔협동조합 Aerosol spraying system for chemical solution available to prevent sick house syndrome

Also Published As

Publication number Publication date
JPH06335646A (en) 1994-12-06

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