JP3324327B2 - Method and apparatus for manufacturing color filter - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a liquid crystal display (LC)
More specifically, the present invention relates to a method and an apparatus for manufacturing a color filter used in D) and the like. More specifically, the method includes a step of curing a paste applied to the color filter, a step of temporarily curing the paste, and a step of cleaning a glass substrate. The present invention relates to a method and an apparatus for cooling a glass substrate.

[0002]

2. Description of the Related Art Conventionally, as a method of heating a glass substrate during a process of manufacturing a color filter, a method of heating a glass substrate by bringing a heating plate into contact with a back surface has been known (for example, Japanese Patent Application Laid-Open No. 3-264902). No., JP-A-3-
264903, JP-A-4-355701). Similarly, as a method of cooling a glass substrate after heating, a method of contacting a cooling plate from the back surface and cooling the glass substrate in a state of vacuum suction is also known.

[0003]

However, when the size of the glass substrate is increased due to the increase in the size of the color filter and the multiple color filters, the problem that the glass substrate is broken during cooling has become apparent. . The cause of the crack in the glass substrate is as shown in FIG. Glass substrate 40
Is fixed by the vacuum chuck 5 of the cooling plate 1 and is cooled by the cooling plate 1. Although the glass substrate 40 is cooled, the glass substrate 40 tends to contract by heat. However, since the back surface of the glass substrate 40 is restrained by the vacuum chuck of the cooling plate 1, thermal stress is generated in the glass substrate 40, and the glass substrate 40 is broken. .

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to provide a method and apparatus for manufacturing a color filter which does not cause cracking during cooling even for a large glass substrate.

[0005]

According to a first aspect of the present invention, there is provided a color filter manufacturing method for manufacturing a color filter by forming a coating film on a glass substrate. In this method, the glass substrate is once vacuum-adsorbed to the cooling plate, and then the vacuum adsorption is released to cool the glass substrate from the back surface.

According to a second aspect of the present invention, in the method of manufacturing a color filter, the glass substrate is sequentially cooled by a plurality of cooling plates.
This is a method in which the glass substrate is once vacuum-adsorbed to the first cooling plate and then the vacuum adsorption is released to cool the glass substrate from the back surface. The method for manufacturing a color filter according to claim 3 is a method for manufacturing a color filter by forming a coating film on a glass substrate, wherein the step of heating the glass substrate and the next processing step include the steps of: Is cooled by a cooling plate, and the thickness of the glass substrate is set to 2 mm or less, and the temperature difference between the glass substrate temperature before being carried into the cooling device and the cooling plate is set to 60 ° C. or less.

According to a fourth aspect of the present invention, there is provided a color filter manufacturing method, wherein a plurality of cooling plates are provided, and a temperature difference between the glass substrate temperature before being carried into the cooling device and the first cooling plate is 60.
In this method, the temperature is set to not more than ℃. In the color filter manufacturing apparatus according to claim 5, in manufacturing a color filter by forming a coating film on a glass substrate, the glass substrate is interposed between a step of heating the glass substrate and a next processing step. A color filter manufacturing apparatus comprising a cooling plate for cooling from the back surface, a temperature control unit for controlling the cooling plate temperature, an adsorption unit for adsorbing the glass substrate, and a transfer unit for transferring the glass substrate, In the cooling plate, once the glass substrate is vacuum-adsorbed, the adsorption is released and the glass substrate is cooled.

In the color filter manufacturing apparatus of the sixth aspect, when the glass substrate is sequentially cooled by a plurality of cooling plates,
After the glass substrate is once vacuum-sucked on the first cooling plate, the vacuum suction is released and the glass substrate is cooled from the back surface. In the color filter manufacturing apparatus according to claim 7, in manufacturing a color filter by forming a coating film on a glass substrate, the glass substrate is interposed between a step of heating the glass substrate and a next processing step. A color filter manufacturing apparatus comprising a cooling plate for cooling from the back surface, a temperature control unit for controlling the cooling plate temperature, an adsorption unit for adsorbing the glass substrate, and a transfer unit for transferring the glass substrate, The thickness of the glass substrate is set to 2 mm or less, and a temperature controller for setting the temperature difference between the glass substrate temperature before being carried into the cooling device and the cooling plate to 60 ° C. or less is provided.

In the color filter manufacturing apparatus according to the present invention, a plurality of cooling plates are provided, and a temperature difference between the temperature of the glass substrate before being carried into the cooling device and the temperature of the first cooling plate is 60.
It is set to below ℃.

[0010]

According to the color filter manufacturing method of the first aspect,
In manufacturing a color filter by forming a coating film on a glass substrate, a step of heating the glass substrate,
Between the next processing step, the glass substrate is once vacuum-adsorbed to the cooling plate, and then the vacuum suction is released and the glass substrate is cooled from the back surface. Then, since the vacuum suction is released, the binding force on the glass substrate can be eliminated. Therefore, the heat conduction between the glass substrate and the cooling plate becomes uniform and good, and the cooling of the glass substrate can be efficiently achieved,
Moreover, even if the glass substrate shrinks with cooling,
Since the binding force has been eliminated, it is possible to prevent the glass substrate from cracking.

According to the color filter manufacturing method of the present invention, in order to sequentially cool the glass substrate with the plurality of cooling plates, the glass substrate is first vacuum-adsorbed to the first cooling plate, and then the vacuum adsorption is released. Since the glass substrate is cooled from the back side, the vacuum suction is released after achieving good adhesion to the first cooling plate that cools the glass substrate with the highest temperature by vacuum suction once. As a result, the binding force to the glass substrate is eliminated, and as a result, the heat conduction between the glass substrate and the first cooling plate becomes uniform and good, and the cooling of the glass substrate can be efficiently achieved, and Even if shrinkage occurs in the glass substrate due to cooling, since the binding force is eliminated, it is possible to prevent the glass substrate from being cracked.

According to the color filter manufacturing method of the third aspect, in manufacturing a color filter by forming a coating film on a glass substrate, a process of heating the glass substrate and a next processing step are performed. In the above, when the glass substrate is cooled by the cooling plate, the thickness of the glass substrate is set to 2 mm or less, and the temperature difference between the glass substrate temperature before being carried into the cooling device and the cooling plate is set to 60 ° C. or less. Therefore, even if the glass substrate shrinks and the glass substrate is constrained by vacuum suction or the like, there is no thermal stress that would cause the glass substrate to crack. That is, good cooling can be achieved without causing cracks in the glass substrate.

According to the color filter manufacturing method of the present invention, a plurality of cooling plates are provided, and the temperature difference between the glass substrate temperature before being carried into the cooling device and the first cooling plate is 60 ° C. or less. Therefore, when the glass substrate having the highest temperature is cooled by the first cooling plate, it is possible to reliably prevent the glass substrate from being cracked. In the color filter manufacturing apparatus according to claim 5, in manufacturing a color filter by forming a coating film on a glass substrate, the glass substrate is heated between a step of heating the glass substrate and a next processing step. A cooling plate that cools the substrate from the back, a temperature control unit that controls the temperature of the cooling plate, an adsorption unit that adsorbs the glass substrate, and a transfer unit that transfers the glass substrate are provided. Since the glass substrate is vacuum-adsorbed and then released and cooled, the entire area of the glass substrate can be satisfactorily adhered to the cooling plate by vacuum adsorption, and then the vacuum substrate is released. Can be eliminated. Therefore, the heat conduction between the glass substrate and the cooling plate is uniform and good, and the cooling of the glass substrate can be efficiently achieved. Since the force is eliminated, it is possible to prevent the glass substrate from cracking.

According to the color filter manufacturing apparatus of the present invention, when the glass substrate is sequentially cooled by a plurality of cooling plates, the glass substrate is first vacuum-adsorbed to the first cooling plate, and then the vacuum adsorption is released. Since the glass substrate is cooled from the back side, the vacuum suction is released after achieving good adhesion to the first cooling plate that cools the glass substrate with the highest temperature by vacuum suction once. As a result, the binding force to the glass substrate is eliminated, and as a result, the heat conduction between the glass substrate and the first cooling plate becomes uniform and good, and the cooling of the glass substrate can be efficiently achieved, and Even if shrinkage occurs in the glass substrate due to cooling, since the binding force is eliminated, it is possible to prevent the glass substrate from being cracked.

According to the color filter manufacturing apparatus of the present invention, in manufacturing a color filter by forming a coating film on a glass substrate, a process for heating the glass substrate and a next processing step are performed. A cooling plate that cools the glass substrate from the back surface, a temperature control unit that controls the temperature of the cooling plate, an adsorption unit that adsorbs the glass substrate, and a transfer unit that transfers the glass substrate. Is 2mm thick
In addition to the temperature controller that is set below and has a temperature controller that sets the temperature difference between the glass substrate temperature before being carried into the cooling device and the cooling plate to 60 ° C. or less, shrinkage occurs in the glass substrate. Also, even if the glass substrate is constrained by vacuum suction or the like, there is no thermal stress that would cause the glass substrate to crack. That is, good cooling can be achieved without causing cracks in the glass substrate.

According to the color filter manufacturing apparatus of the present invention, a plurality of cooling plates are provided, and the temperature difference between the glass substrate temperature before being carried into the cooling device and the first cooling plate is 60 ° C. or less. Since the temperature is set, when the glass substrate having the highest temperature is cooled by the first cooling plate, it is possible to reliably prevent the glass substrate from cracking.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be specifically described with reference to the drawings. FIG. 3 is a schematic block diagram showing a color filter manufacturing process. The color filter manufacturing process includes a process of forming a black matrix on a glass substrate, a process of cleaning the glass substrate, a process of applying a paste to the glass substrate, a process of temporarily curing the paste, a process of exposing, a process of developing, and a process of applying the paste. A curing step and an ITO (indium oxide, tin oxide) film forming step are included in this order. However, from the step of applying the paste to the glass substrate to the step of curing the paste, the paste is changed for each of the three primary colors, and the process is repeated.

In the color filter manufacturing process, the process of cleaning the glass substrate (particularly, the drying process after the cleaning), the process of temporarily curing the paste, and the process of curing the paste are performed in the nature of the respective processes. Heat treatment for the substrate is essential. Therefore, after the processing of these steps is completed, the glass substrate must be sufficiently cooled before the next step is started, and in order to achieve this object, the glass substrate is cooled between the corresponding steps. And the step of cooling is interposed. However, since the cooling step of the glass substrate is not an essential step in the production of the color filter but an additional step, it is not generally shown in the schematic block diagram of FIG.

FIG. 1 is a schematic view showing an embodiment of a glass substrate cooling apparatus according to the present invention. 1 is a first cooling plate, 2 is a second cooling plate, and is a case where there are two cooling plates. Glass substrate 4
0 is infrared-heated by an infrared heating oven (hereinafter abbreviated as IR oven) 15 and transferred to the first cooling plate 1 by a shuttle conveyor (not shown). The IR oven 15 is used for heating the glass substrate 40 in the previous process, and does not constitute a part of the glass substrate cooling device. The glass substrate 40 is brought into close contact with the first cooling plate 1 by the vacuum chuck section 5, and the glass substrate 40 is cooled in this state. After cooling on the first cooling plate 1, the glass substrate 40 is transferred to the second cooling plate 2 by a shuttle conveyor (not shown),
The glass substrate 40 is similarly cooled. After cooling, the glass substrate 40 is transported to the next step. FIG. 2 shows an example of the details of the cooling plate. The temperature of the cooling plate 1 is controlled by a heater 23, a thermometer 24, a cooling water pipe 25, a valve 22, and a control unit 3.
Perform at 0. That is, the temperature of the cooling plate is measured by the thermometer 24,
ON / OFF of heater-23 and valve 2 for cooling water piping
2, the temperature of the cooling plate 1 is controlled. Valve 22
The opening and closing of the heater 23 and the ON / OFF control of the heater 23 are performed by the control unit 30. The reason for cooling with a plurality of cooling plates is to increase the cooling process length and shorten the tact time.

Normally, when cooling the glass substrate 40 with the cooling plate 1, the valve 21a shown in FIG. 2 is opened, the vacuum chuck 5 is connected to a vacuum source (vacuum pump 26), and the glass substrate 40 is evacuated. In the present invention, the suction is released after the glass substrate 40 is vacuum-sucked. Specifically, for example, one of the following processes (1) to (4) is performed. (1) First, the valve 21a connected to the vacuum source (vacuum pump 26) is opened, and once the glass substrate 40 is vacuum-sucked by the vacuum chuck 5, the valve 21a is closed to cancel the suction. (2) First, a vacuum source (vacuum pump 2)
The valve 21a connected to 6) is opened, the glass substrate 40 is once vacuum-adsorbed by the vacuum chuck 5, the valve 21a is closed, and then the compressed air source (compressor 27)
The valve 21b connected to the valve is opened for a predetermined time to actively release the suction (in this case, it is also preferable to open to the atmospheric pressure without communicating with the compressed air source). (3) First, the valve 21a connected to the vacuum source (vacuum pump 26) is opened, and once the glass substrate 40 is vacuum-sucked by the vacuum chuck 5, the valve 21a is closed, and the weak vacuum source (low vacuum pump 28) The valve 21c connected to the valve is opened to release the suction. (4) First, the valve 21a connected to the vacuum source (vacuum pump 26) is opened, and once the glass substrate 40 is vacuum-sucked by the vacuum chuck 5, the valve 21a is closed, and the weak vacuum source (low vacuum pump 28) Is opened, and once the glass substrate 40 is sucked by a weak vacuum source, the valve 21c is closed to cancel the suction.

The glass substrate used in the present invention is not particularly limited. For example, soda lime glass, borosilicate-based alkali-free glass and the like are preferably used. The material of the cooling plate used in the present invention is not particularly limited, but an aluminum alloy, stainless steel or the like is preferably used. As described above, the causes of the cracks in the cooling plate are as follows. This is because the glass substrate tends to thermally shrink by the cooling plate, but the back surface of the glass substrate is restrained by vacuum suction, and thermal stress is generated.

As a means for solving this problem, a method of not adsorbing the glass substrate on the cooling plate is considered. However, if the glass substrate is transferred onto the cooling plate without performing vacuum suction, the air between the glass substrate and the cooling plate does not escape, so the position of the glass substrate with respect to the cooling plate shifts, causing temperature unevenness in the glass substrate. In the worst case, or in the worst case when the transfer position is shifted in the next transfer, a new problem occurs in that the glass substrate is damaged.
As another solution, instead of directly contacting the cooling plate, a plurality of pins may be used to support the glass substrate to release air between the glass substrate and the cooling plate for cooling. In such a case, a new problem that the cooling efficiency deteriorates occurs.

According to the method and the apparatus for manufacturing a color filter of the present invention, it is set so that the glass substrate is once vacuum-adsorbed, then released and cooled. Therefore, when the glass substrate is transferred onto the cooling plate, the position of the substrate does not shift, and the back surface of the glass substrate is not restrained by the vacuum chuck during cooling, so that the glass substrate is in a free state, No cracking of the substrate occurs.

According to the method and the apparatus for manufacturing a color filter of the present invention, when there are a plurality of cooling plates, the suction is released only by the first cooling plate after the glass substrate is once vacuum-adsorbed. It is possible to cool the glass substrate more uniformly. Once the vacuum suction of the glass substrate is released, the contact state between the cooling plate and the glass substrate may not be uniform, and the glass substrate may have temperature irregularities. It is preferable to perform the cooling so that only the first cooling plate having a large temperature difference between the glass substrate and the cooling plate, and to cool the second cooling plate and thereafter without releasing the vacuum suction.

Further, the glass substrate is cracked because the temperature difference between the glass substrate and the first cooling plate before being carried into the cooling device is large. If the temperature difference is reduced, cracking of the glass substrate does not occur. However, if the temperature difference is small, the cooling efficiency becomes worse, and the number of cooling plates must be increased. As a result of intensive studies on this point, for example, when cooling to room temperature, the thickness of the glass substrate is set to 2 mm or less, and the temperature difference between the glass substrate temperature before being carried into the cooling device and the first cooling plate is 40 to 60 ° C. It has been found that by setting to, the glass substrate can be cooled without causing cracks in the glass substrate and without increasing the number of cooling plates. For this reason, the temperature difference between the glass substrate and the first cooling plate before being carried into the cooling device is 40
It is preferable to set the temperature to ℃ 60 ° C.

According to the method and the apparatus for manufacturing a color filter of the present invention, the thickness of the glass substrate is set to 2 mm or less, and the temperature difference between the glass substrate before being carried into the cooling device and the first cooling plate. The temperature is set to 60 ° C. or lower. Therefore, the glass substrate does not crack. In this case, it is also preferable to perform cooling with a cooling plate without releasing vacuum suction.

The number of cooling plates used in the present invention is preferably plural, and the tact time can be shortened. Specific Example 1 A glass substrate was cooled by an apparatus having a configuration as shown in FIG. The glass substrate has a size of 360 × 465 mm,
An alkali-free glass substrate (7059, manufactured by Corning Incorporated) having a thickness of 1.1 mm was used. First, the glass substrate 40 was heated to 100 ° C. in the IR oven 15 and then transferred to the first cooling plate 1 by a shuttle conveyor (not shown). In the first cooling plate 1, the glass substrate 40 is
Was once vacuum-adsorbed and fixed, then released and cooled. After cooling with the first cooling plate 1 for 60 seconds, the glass substrate 40 was transferred to the second cooling plate 2 by a shuttle conveyor.
In the second cooling plate 2, cooling is performed while vacuum suction is performed.
At 0 seconds, it was transported to the next step. The temperature of the first cooling plate 1 and the second cooling plate 2 was set at 25 ° C.

As a result, without breaking the glass substrate,
The glass substrate could be cooled without unevenness. Comparative Example 1 A glass substrate was cooled in the same manner as in Example 1 except that vacuum suction was not released from the first cooling plate.

As a result, cracks occurred at the center of the glass substrate, and the glass substrate could not be cooled well. Example 2 A glass substrate was cooled by an apparatus having a configuration as shown in FIG. The glass substrate has a size of 360 × 465 mm,
An alkali-free glass substrate (7059, manufactured by Corning Incorporated) having a thickness of 1.1 mm was used. First, the glass substrate 40 was heated to 100 ° C. in the IR oven 15 and then transferred to the first cooling plate 1 by a shuttle conveyor (not shown). Cooling was performed while vacuum-sucking the first cooling plate 1, and the glass substrate 40 was transferred to the second cooling plate 2 by a shuttle conveyor for 60 seconds. The second cooling plate 2 was similarly cooled, and was conveyed to the next step in 60 seconds. The temperature of the first cooling plate was set at 50 ° C.
The difference between the temperature of the glass substrate before the loading of the cooling device and the temperature of the first cooling plate was set to 50 ° C. The temperature setting of the second cooling plate is 2
5 ° C.

As a result, without breaking the glass substrate,
The glass substrate could be cooled sufficiently. Comparative Example 2 A glass substrate was cooled in the same manner as in Example 2 except that the temperature of the first cooling plate was set to 25 ° C.

As a result, cracks occurred at the center of the glass substrate, and the glass substrate could not be cooled well.

[0032]

As described above, according to the first aspect of the present invention, since the glass substrate is once set to be vacuum-adsorbed and then released and cooled, the glass substrate is moved onto the cooling plate. When mounting, the air between the glass substrate and the cooling plate does not escape, the position of the substrate does not shift, and also the back surface of the glass substrate is not restrained by the vacuum chuck during cooling, so that the glass substrate does not crack, This has a specific effect that the glass substrate can be cooled.

According to a second aspect of the present invention, when there are a plurality of cooling plates,
Once the glass substrate is once vacuum-adsorbed, the suction is released and the cooling is performed only by the first cooling plate, so that the glass substrate can be cooled more uniformly. According to the third aspect of the present invention, by setting the temperature difference between the temperature of the glass substrate before being carried into the cooling device and the temperature of the first cooling plate to 60 ° C. or less, the glass substrate can be cooled without cracking of the glass substrate. It has the unique effect of being able to.

According to the fourth aspect of the present invention, since the number of the cooling plates is plural, the cooling processing length can be extended, and the tact time can be shortened. The invention according to claim 5 is configured so that once the glass substrate is vacuum-sucked, the suction is released and cooled, so that when the glass substrate is transferred onto the cooling plate, the gap between the glass substrate and the cooling plate is reduced. Since the air does not escape, the position of the substrate does not shift, and the back surface of the glass substrate is not restrained by the vacuum chuck at the time of cooling, the unique effect that the glass substrate can be cooled without cracking the glass substrate. Play.

According to a sixth aspect of the present invention, when there are a plurality of cooling plates,
Once the glass substrate is once vacuum-adsorbed, the suction is released and cooled only by the first cooling plate, so that the glass substrate can be cooled more uniformly. The invention according to claim 7 is to cool the glass substrate without cracking the glass substrate by setting the temperature difference between the glass substrate temperature before being carried into the cooling device and the first cooling plate to 60 ° C. or less. It has a unique effect that it can be performed.

According to the eighth aspect of the present invention, since the number of the cooling plates is plural, the cooling processing length can be extended and the tact time can be shortened.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of a glass substrate cooling device according to the present invention.

FIG. 2 is an embodiment example showing details of a cooling plate.

FIG. 3 is a schematic block diagram illustrating a color filter manufacturing process.

FIG. 4 is a diagram illustrating cracking of a glass substrate.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st cooling plate 2 2nd cooling plate 5 Vacuum chuck part 22 Valve 23 Heater 30 Control part 40 Glass substrate

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G02B 5/20-5/28

Claims (8)

(57) [Claims] 1. A method for producing a color filter by forming a coating film on a glass substrate (40), wherein a glass substrate (40) is heated between a step of heating the glass substrate (40) and a next processing step. A method for manufacturing a color filter, comprising: first vacuum-adsorbing a substrate (40) to a cooling plate (1), and then releasing the vacuum adsorption to cool the glass substrate (40) from the back surface. 2. In cooling the glass substrate (40) sequentially with the plurality of cooling plates (1) and (2), the glass substrate (40) is once vacuum-adsorbed to the first cooling plate (1). The method for producing a color filter according to claim 1, wherein the vacuum suction is released to cool the glass substrate (40) from the back surface. 3. A method for producing a color filter by forming a coating film on a glass substrate (40), wherein a glass substrate (40) is heated between a step of heating the glass substrate (40) and a next processing step. In cooling the substrate (40) by the cooling plate (1), the thickness of the glass substrate (40) is 2 mm.
A method for manufacturing a color filter, comprising: setting a temperature difference between a glass substrate (40) and a cooling plate (1) before being carried into a cooling device to 60 ° C. or less. 4. A plurality of cooling plates (1) and (2) are provided, and the temperature difference between the glass substrate (40) before being carried into the cooling device and the first cooling plate (1) is 60 ° C. or less. The color filter manufacturing method according to claim 3, wherein 5. In producing a color filter by forming a coating film on a glass substrate (40), a glass substrate (40) is provided between a step of heating the glass substrate (40) and a next processing step. A cooling plate (1) for cooling the (40) from the back, and a temperature control unit (2) for controlling the cooling plate temperature.
2) A color filter manufacturing apparatus comprising (23) and (30), a suction unit (5) for sucking a glass substrate (40), and a transfer unit for transferring a glass substrate (40), An apparatus for manufacturing a color filter, wherein the cooling plate (1) once sucks the glass substrate (40) in vacuum, releases the suction, and cools the glass substrate (40). 6. In cooling the glass substrate (40) sequentially with the plurality of cooling plates (1) and (2), the glass substrate (40) is once vacuum-adsorbed to the first cooling plate (1). The color filter manufacturing apparatus according to claim 5, wherein the vacuum suction is released and the glass substrate (40) is cooled from the back surface. 7. In producing a color filter by forming a coating film on a glass substrate (40), a glass substrate (40) is provided between a step of heating the glass substrate and a next processing step. A cooling plate (1) for cooling the (40) from the back, and a temperature control unit (2) for controlling the cooling plate temperature.
2) A color filter manufacturing apparatus comprising (23) and (30), a suction unit (5) for sucking a glass substrate (40), and a transfer unit for transferring a glass substrate (40), The thickness of the glass substrate is set to 2 mm or less, and a temperature controller (30) for setting the temperature difference between the glass substrate (40) and the cooling plate (1) before being carried into the cooling device to 60 ° C. or less. An apparatus for producing a color filter, comprising: 8. A plurality of cooling plates (1) and (2) are provided, and the temperature difference between the glass substrate (40) before being carried into the cooling device and the first cooling plate (1) is 60 ° C. or less. The color filter manufacturing apparatus according to claim 7, wherein the color filter manufacturing apparatus is set to: