JP3323242B2 - Hot and cold bath cleaning equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hot / cold bath cleaning apparatus used for cleaning and removing foreign substances adhering to a work such as a semiconductor, a printed circuit board, and a disk board.

[0002]

2. Description of the Related Art Conventionally, as an apparatus for cleaning a work as described above, for example, a hot tub and a cold tub are independently provided in a cleaning chamber hermetically sealed, and a liquid is stored in one of the hot tubs. After the entire work is immersed in the high-temperature cleaning solution and subjected to the hot-bath cleaning process, the entire work is immersed in the low-temperature cleaning solution stored in the other cold bath to perform the cold-bath cleaning process. The entire work expands and contracts due to the difference in temperature of the stored cleaning liquid, and the cleaning liquid penetrates into the gaps between the workpieces formed by polymerization of a plurality of sheets, thereby cleaning and removing foreign substances such as abrasive powder and oil attached to the respective workpieces. There is a device to do.

[0003]

However, as described above, since the warm bath cleaning treatment and the cold bath cleaning treatment of the work are performed in the respective treatment tanks, the work is separately provided in the warm bath tub and the cold bath tub. Must be moved, and the work for cleaning the work takes time and effort. In addition, since the surface temperature of the workpiece changes during the movement, the effect of the temperature difference of the cleaning liquid is lost, and it is difficult to reliably remove and remove the foreign matter attached to the gap between the workpieces. have. In addition, a large space for installing a hot tub and a cold tub is required in the cleaning room, and there is a problem that the apparatus becomes large.

[0004] In view of the above problems, the present invention immerses the entire work in a cleaning solution stored in one cleaning tank and continuously performs a hot bath cleaning process and a cold bath cleaning process, thereby reducing the gap between the works. It is an object of the present invention to provide a hot / cold bath cleaning apparatus capable of reliably cleaning and removing foreign matters such as abrasive powder, flux, oil, and the like adhered to a portion, improving the processing capacity and reducing the size of the apparatus.

[0005]

According to the first aspect of the present invention, there is provided:
The invention of the present application discloses that the cleaning liquid stored in the cleaning tank in the cleaning chamber contains water.
Cleaning equipment for immersing the entire workpiece
A predetermined amount of high-temperature cleaning liquid supplied from above to the liquid storage area
Stores a predetermined amount of low-temperature cleaning liquid in the lower storage area
A cleaning tank is provided, and the work is immersed and transferred into the cleaning tank from above.
To perform warm bath cleaning in the high-temperature cleaning solution in the upper reservoir area.
After that, it is a hot / cold bath cleaning device for performing a cold bath cleaning in a low temperature cleaning solution below .

The invention according to claim 2 of the present invention is characterized in that
A liquid storage area above the washing tank in combination with the configuration according to claim 1.
And the lower storage area, and the cleaning liquid stored in the cleaning tank is
Liquid circulation from the one-sided storage area to the upper-sided storage area
The hot and cold bath cleaning device according to claim 1, wherein the cleaning device is connected by a loop.
And features.

[0007]

According to the first aspect of the present invention, there is provided a hot / cold bath cleaning apparatus provided in a cleaning tank.
The work was immersed and moved from above , and the entire work was immersed in the high-temperature cleaning liquid stored in the upper liquid storage area of the cleaning tank to perform a warm bath cleaning process, and stored in the lower liquid storage area in the same cleaning tank. Since the entire work is immersed in the low-temperature cleaning liquid and subjected to the cold bath cleaning process, the entire work expands and contracts due to the temperature difference between the cleaning liquids stored in the upper and lower liquid storage areas, and the cleaning liquid reliably enters the gaps between the works. Therefore, it is possible to wash and remove foreign substances such as abrasive powder and oil attached to the work.

[0008] The hot and cold bath cleaning apparatus according to claim 2 is the above-described apparatus.
In addition to the operation of claim 1, the low-temperature cleaning liquid is supplied to the cleaning tank.
From the lower storage area to the upper storage area via the liquid circulation path
To circulate and supply a constant ratio of high-temperature cleaning solution to low-temperature cleaning solution.
To keep.

[0009]

According to the present invention, the work can be washed by one washing operation.
Check whether the high-temperature cleaning liquid and low-temperature cleaning liquid stored in the
Immersed in the bath, and the hot bath cleaning process and the cold bath cleaning process are continuously performed.
Therefore, the work is immersed in a hot tub and a cold tub sequentially as in the conventional example, or a high-temperature cleaning liquid and a low-temperature cleaning liquid are
The labor and work for replacement can be saved, and the processing time required for the cleaning operation can be greatly reduced, so that the processing capacity can be improved and the apparatus can be downsized. In addition, since the entire work expands and contracts due to the temperature difference of the cleaning liquid stored in the cleaning tank, it is most suitable for cleaning and removing foreign substances such as abrasive powder, flux, and oil adhering to gaps in the work.
In addition, the cleaning liquid is supplied to the upper storage area and the lower storage area of the cleaning tank.
Circulates between the reservoir and the reservoir, so there is little
The ratio between the cleaning liquid and the low-temperature cleaning liquid can be kept constant,
The cleaning effect due to the temperature difference of the cleaning liquid is stably obtained.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. The drawing shows a hot / cold bath cleaning device used when performing a hot bath cleaning process and a cold bath cleaning process on a workpiece with a cleaning liquid stored in one cleaning tank. In FIG. A boiling tank 3 for evaporating and evaporating a washing liquid A such as methylene chloride at the bottom of a washing chamber 2 hermetically sealed, and a washing tank for separating and storing the same washing liquid A in an upper and lower storage area. 4 and a water separation tank 5 for separating solvent and moisture is connected to the side wall surface corresponding to the upper steam region in the same room.

The above-mentioned cleaning chamber 2 has a work entrance 2a for opening and closing the work B on the upper surface of the same chamber,
A sealing lid 2b formed in a size that seals the work entrance 2a is fitted or connected to be openable and closable. And, along the side inner wall surface corresponding to the upper steam region in the same room, the steam Ac
Cooling jackets 6 and 6 for cooling and condensing the water are provided in the upper and lower stages, and are used to condense and liquefy the vapor Ac on the side inner wall surface corresponding to the upper steam region in the water separation tank 5 connected to the side of the same chamber. A cooling coil 7 is provided, and a coolant (not shown) cooled to an appropriate temperature by a refrigerating device described later is circulated and supplied to the cooling jacket 6 and the cooling coil 7, and is discharged to the upper steam area in the cleaning chamber 2. The cooling jacket 6 is kept at a temperature at which the cooled steam Ac and the moisture in the air entering the room are cooled and condensed, and the cooling coil is cooled to a temperature at which the steam Ac discharged into the upper steam region in the water separation tank 5 is condensed and liquefied. 7 is kept warm.

The above-mentioned boiling tank 3 is provided with a heater 8 for evaporating and evaporating the cleaning liquid A on a central inner wall surface at the bottom of the tank, and for example, a heating medium such as oil or aqueous solution heated to an appropriate temperature. (Not shown) to the heater 8 in a circulating manner,
The heater 8 is heated to a temperature (for example, 40.4 ° C.) at which the cleaning liquid A such as methylene chloride evaporates.

The above-described cleaning tank 4 heats the cleaning liquid A stored in the upper liquid storage area inside the tank to a high temperature, and lowers the cleaning liquid A stored in the lower liquid storage area inside the same tank. While maintaining the temperature, a predetermined amount of the high-temperature cleaning liquid Aa is stored in the upper liquid storage area, a predetermined amount of the low-temperature cleaning liquid Ab is stored in the lower liquid storage area, and the high-temperature cleaning liquid Aa and the low-temperature cleaning liquid Ab stored in the upper and lower liquid storage areas are stored. Are separated into upper and lower regions by a difference in specific gravity. In addition, an ultrasonic vibrator 9 that ultrasonically vibrates at a vibration frequency of, for example, 27 KHz to 200 KHz is disposed on a central inner wall surface at the bottom of the tank.

That is, the high-temperature cleaning liquid A condensed and liquefied in the cooling jacket 6 is dropped, and the high-temperature cleaning liquid A distilled in the water separation tank 5 overflows. Supply. Further, the side wall surfaces corresponding to the upper liquid storage area of the washing tank 4 and the bottom wall surfaces corresponding to the lower liquid storage area of the same tank are connected to the electromagnetic valves 10 and 11, the circulation pump 12, the filter 13, The cleaning liquid A stored in the cleaning tank 4 is connected to the filter 13 by the transfer force of the circulation pump 12 through the liquid circulation path 15 via the exchanger 14.
, And the low-temperature cleaning liquid A cooled in the heat exchanger 14 is circulated and supplied into the cleaning tank 4.

In the above-mentioned water separation tank 5, a partition plate 5a is erected inside the tank to separate the separation tanks 5b and 5c, and condensed and liquefied by the cooling jacket 6 and the cooling coil 7 in the upper steam area. The high-temperature washing liquid A is dropped into the separation tank 5b of the water separation tank 5, and only light water having a specific gravity floating on the liquid surface is discharged from the separation tank 5b to the outside of the tank. Of the washing liquid A overflows from the separation tank 5c and is returned to the washing tank 4.

The aforementioned cooling jacket 6 and cooling coil 7
Is constituted by an evaporator (evaporator) of a refrigerating device 16. The refrigerating device 16 has a cooling jacket 6 and a cooling coil 7 connected in parallel to a suction side of a compressor 17 via an accumulator 18, and a discharge side of the compressor 17. And a condenser 19,
The cooling jacket 6 and the cooling coil 7 are connected in parallel via a liquid receiver 20, an electromagnetic valve 21, and an expansion valve 22 (capillary tube). That is, the compressor 17 is driven to send the compressed high-pressure refrigerant to the condenser 19,
After being liquefied and reaching the liquid receiver 20, this high-pressure refrigerant liquid is guided to an expansion valve 22 via an electromagnetic valve 21, and the refrigerant which has been throttled and expanded to a low pressure by the expansion valve 22 is cooled by a cooling jacket. 6 and the cooling coil 7, each of which takes heat from the surroundings, evaporates, and is again sucked into the compressor 17 via the accumulator 18.

Assuming that the illustrated embodiment is configured as described above, a method of cleaning the work B by the hot and cold bath cleaning apparatus 1 will be described below. First, as shown in FIG. 1, a heater 8 disposed in the boiling tank 3 in the cleaning chamber 2 is heated to
The cleaning liquid A stored in the tank is evaporated and vaporized, and each of the tanks 3, 4,
The evaporating vapor Ac is discharged to the upper vapor region corresponding to 5. Thereafter, the work entrance / exit 2a of the cleaning chamber 2 is partially or completely opened, and the plurality of works B are carried into the cleaning chamber 2 in a superposed state. , And the entire work B is immersed from above into the cleaning liquid A stored in the cleaning tank 4 .

That is, after completely closing the work inlet / outlet 2a of the cleaning chamber 2, the high-temperature cleaning liquid Aa stored in the upper storage area in the cleaning tank 4 and the low-temperature cleaning liquid Ab stored in the lower storage area in the cleaning tank 4 are removed. Then, the work B is moved at a constant speed, and the entire work B is immersed in the high-temperature washing liquid Aa stored in the upper storage area in the same tank for a certain time to perform a warm bath cleaning treatment. Since the entire work B is immersed in the low-temperature cleaning liquid Ab stored in the lower storage area for a certain period of time to perform the cold bath cleaning processing,
High-temperature cleaning liquid Aa and low-temperature cleaning liquid A stored in upper and lower liquid storage areas
b, the work B expands and contracts due to the temperature difference between the work B and the work B.
The cleaning liquid A surely penetrates into the gaps of..., And foreign substances such as abrasive powder, flux, oil and the like adhering to the work B can be cleaned and removed. At the time of immersion, the ultrasonic cleaning may be performed by vibrating the ultrasonic vibrator 9 disposed at the bottom of the cleaning tank 4.

At the same time, the vapor Ac discharged into the upper vapor region in the cleaning chamber 2 is condensed and liquefied by the cooling jacket 6 and the cooling coil 7, and the distilled high-temperature cleaning liquid A is returned and supplied into the cleaning tank 4. The cleaning treatment can be performed while continuously distilling the cleaning liquid A stored in the cleaning tank 4. Further, the circulating pump 12 is driven to clean and filter the cleaning liquid A stored in the cleaning tank 4 with the filter 13, and the heat exchanger 14
Since the low-temperature cleaning liquid A cooled in the above is circulated and supplied into the cleaning tank 4, the cleaning processing can be performed while continuously filtering the cleaning liquid A stored in the cleaning tank 4.

Next, after the completion of the cleaning process, the work inlet / outlet 2a of the cleaning chamber 2 is partially or completely opened to take out the cleaned work B from the cleaning liquid A stored in the cleaning tank 4. Then, the work B is heated to an appropriate temperature such as a boiling point temperature or a steam temperature with the steam Ac discharged into the cleaning chamber 2 and then carried out of the room.

As described above, the work B is placed in one cleaning tank.
4 and the high-temperature cleaning liquid Aa stored in the upper liquid storage area.
Above the low-temperature cleaning liquid Ab stored in the lower storage area in the tank.
Immersion from the side to perform the hot bath cleaning process and the cold bath cleaning process.
Since it is performed continuously , the work B is sequentially immersed in a hot tub and a cold tub as in the conventional example, or the high temperature cleaning solution Aa and the low temperature cleaning are performed.
It saves the labor and work of replacing the liquid Ab
In addition, the processing time required for the cleaning operation is greatly reduced, so that the processing capacity can be improved and the size of the apparatus can be reduced. In addition, since the entire work B expands and contracts due to the temperature difference between the high-temperature cleaning liquid Aa and the low-temperature cleaning liquid Ab stored in the cleaning tank 4, foreign substances such as abrasive powder, flux, and oil adhering to the gaps of the work B can be removed. Ideal for cleaning and removal. And
And a liquid storage area above the cleaning tank 4 via the liquid circulation path 15.
Since the cleaning liquid A is circulated between the lower storage area and the lower storage area,
The amount of fluctuation is small, and the high-temperature cleaning liquid Aa and the low-temperature cleaning liquid Ab
Ratio can be kept constant, and the temperature
A stable cleaning effect can be obtained.

In the correspondence between the structure of the present invention and the above-described embodiment, the cleaning liquid of the present invention corresponds to the cleaning liquid A of the embodiment, and similarly, the high-temperature cleaning liquid corresponds to the high-temperature cleaning liquid Aa, The cleaning liquid corresponds to the low-temperature cleaning liquid Ab, but the present invention is not limited only to the configuration of the above-described embodiment.

For example, a heating means such as a heater is mounted on an outer surface of the cleaning tank 4 corresponding to the upper liquid storage area, and a cooling means such as a cooling coil is provided on the outer surface of the cleaning tank 4 corresponding to the lower liquid storage area. May be attached, and the cleaning liquid A stored in the cleaning tank 4 may be heated or cooled by various means.

[Brief description of the drawings]

FIG. 1 is a piping diagram of each tank constituting a hot / cold bath cleaning apparatus.

[Explanation of symbols]

 A: Cleaning liquid Aa: High-temperature cleaning liquid Ab: Low-temperature cleaning liquid B: Workpiece 1: Hot / cold bath cleaning device 2: Cleaning chamber 3: Boiler tank 4: Cleaning tank 5: Water separation tank

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) B08B 1/00-7/04 H01L 21/304 H05K 3/26

Claims (2)

(57) [Claims] 1. A cleaning apparatus for performing a cleaning process by immersing an entire work in a cleaning liquid stored in a cleaning tank in a cleaning chamber, wherein a high-temperature cleaning liquid supplied from above to an upper storage area is supplied to a predetermined area.
And store a predetermined amount of low-temperature washing liquid in the lower storage area.
A work tank is immersed and moved from above in the wash tank,
After washing with a hot bath in the high-temperature cleaning solution in the liquid area,
A hot / cold bath washing device that performs a cold bath washing in the purified liquid. 2. An upper liquid storage area and a lower liquid storage area of the washing tank.
And the cleaning liquid stored in the cleaning tank from the lower storage area.
Connected by a liquid circulation path that circulates and supplies toward the upper liquid storage area
The hot and cold bath cleaning device according to claim 1.