JP3297136B2 - インクジェットプリンタとインクジェットプリントヘッドの製造方法 - Google Patents
インクジェットプリンタとインクジェットプリントヘッドの製造方法Info
- Publication number
- JP3297136B2 JP3297136B2 JP09536793A JP9536793A JP3297136B2 JP 3297136 B2 JP3297136 B2 JP 3297136B2 JP 09536793 A JP09536793 A JP 09536793A JP 9536793 A JP9536793 A JP 9536793A JP 3297136 B2 JP3297136 B2 JP 3297136B2
- Authority
- JP
- Japan
- Prior art keywords
- ink
- tape
- orifice
- conductor
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000000758 substrate Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 47
- 238000001704 evaporation Methods 0.000 claims description 35
- 230000008020 evaporation Effects 0.000 claims description 35
- 230000008569 process Effects 0.000 claims description 29
- 230000004888 barrier function Effects 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 14
- 230000009975 flexible effect Effects 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims 14
- 239000012530 fluid Substances 0.000 claims 2
- 239000000976 ink Substances 0.000 description 82
- 239000010410 layer Substances 0.000 description 33
- 229920000642 polymer Polymers 0.000 description 23
- 239000000463 material Substances 0.000 description 16
- 238000000608 laser ablation Methods 0.000 description 14
- 239000010409 thin film Substances 0.000 description 13
- 238000005323 electroforming Methods 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 230000008901 benefit Effects 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000012790 adhesive layer Substances 0.000 description 7
- 238000001459 lithography Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 239000002861 polymer material Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000000873 masking effect Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000004071 soot Substances 0.000 description 3
- KDCGOANMDULRCW-UHFFFAOYSA-N 7H-purine Chemical compound N1=CNC2=NC=NC2=C1 KDCGOANMDULRCW-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000004568 cement Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920000307 polymer substrate Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229920001646 UPILEX Polymers 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14024—Assembling head parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/145—Arrangement thereof
- B41J2/155—Arrangement thereof for line printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/19—Assembling head units
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/20—Modules
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US864,889 | 1992-04-02 | ||
| US07/864,889 US5305015A (en) | 1990-08-16 | 1992-04-02 | Laser ablated nozzle member for inkjet printhead |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0615829A JPH0615829A (ja) | 1994-01-25 |
| JP3297136B2 true JP3297136B2 (ja) | 2002-07-02 |
Family
ID=25344296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09536793A Expired - Lifetime JP3297136B2 (ja) | 1992-04-02 | 1993-03-30 | インクジェットプリンタとインクジェットプリントヘッドの製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5305015A (enExample) |
| EP (1) | EP0564101B1 (enExample) |
| JP (1) | JP3297136B2 (enExample) |
| KR (1) | KR100225704B1 (enExample) |
| CA (1) | CA2084390C (enExample) |
| DE (1) | DE69310598T2 (enExample) |
| ES (1) | ES2101224T3 (enExample) |
Families Citing this family (105)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5648806A (en) * | 1992-04-02 | 1997-07-15 | Hewlett-Packard Company | Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer |
| US5638101A (en) * | 1992-04-02 | 1997-06-10 | Hewlett-Packard Company | High density nozzle array for inkjet printhead |
| JP3308337B2 (ja) * | 1992-04-02 | 2002-07-29 | ヒューレット・パッカード・カンパニー | インクジェット・プリンタ用プリントヘッド,インクジェット・プリンタ用プリントヘッドの形成方法及び部品組立方法 |
| US5685074A (en) * | 1992-04-02 | 1997-11-11 | Hewlett-Packard Company | Method of forming an inkjet printhead with trench and backward peninsulas |
| US5594481A (en) * | 1992-04-02 | 1997-01-14 | Hewlett-Packard Company | Ink channel structure for inkjet printhead |
| US5563642A (en) * | 1992-04-02 | 1996-10-08 | Hewlett-Packard Company | Inkjet printhead architecture for high speed ink firing chamber refill |
| US5278584A (en) * | 1992-04-02 | 1994-01-11 | Hewlett-Packard Company | Ink delivery system for an inkjet printhead |
| US5442386A (en) * | 1992-10-13 | 1995-08-15 | Hewlett-Packard Company | Structure and method for preventing ink shorting of conductors connected to printhead |
| US5675367A (en) * | 1992-12-23 | 1997-10-07 | Hewlett-Packard Company | Inkjet print cartridge having handle which incorporates an ink fill port |
| IT1270861B (it) * | 1993-05-31 | 1997-05-13 | Olivetti Canon Ind Spa | Testina a getto di inchiostro perfezionata per una stampante a punti |
| US5635966A (en) * | 1994-01-11 | 1997-06-03 | Hewlett-Packard Company | Edge feed ink delivery thermal inkjet printhead structure and method of fabrication |
| US5571410A (en) * | 1994-10-19 | 1996-11-05 | Hewlett Packard Company | Fully integrated miniaturized planar liquid sample handling and analysis device |
| US6613560B1 (en) | 1994-10-19 | 2003-09-02 | Agilent Technologies, Inc. | PCR microreactor for amplifying DNA using microquantities of sample fluid |
| US5658413A (en) * | 1994-10-19 | 1997-08-19 | Hewlett-Packard Company | Miniaturized planar columns in novel support media for liquid phase analysis |
| US6635226B1 (en) | 1994-10-19 | 2003-10-21 | Agilent Technologies, Inc. | Microanalytical device and use thereof for conducting chemical processes |
| US5641400A (en) * | 1994-10-19 | 1997-06-24 | Hewlett-Packard Company | Use of temperature control devices in miniaturized planar column devices and miniaturized total analysis systems |
| US5811019A (en) * | 1995-03-31 | 1998-09-22 | Sony Corporation | Method for forming a hole and method for forming nozzle in orifice plate of printing head |
| US6183064B1 (en) | 1995-08-28 | 2001-02-06 | Lexmark International, Inc. | Method for singulating and attaching nozzle plates to printheads |
| US6190492B1 (en) | 1995-10-06 | 2001-02-20 | Lexmark International, Inc. | Direct nozzle plate to chip attachment |
| US6557974B1 (en) | 1995-10-25 | 2003-05-06 | Hewlett-Packard Company | Non-circular printhead orifice |
| US6527369B1 (en) | 1995-10-25 | 2003-03-04 | Hewlett-Packard Company | Asymmetric printhead orifice |
| TW309483B (enExample) * | 1995-10-31 | 1997-07-01 | Hewlett Packard Co | |
| US6000787A (en) | 1996-02-07 | 1999-12-14 | Hewlett-Packard Company | Solid state ink jet print head |
| US6003977A (en) * | 1996-02-07 | 1999-12-21 | Hewlett-Packard Company | Bubble valving for ink-jet printheads |
| US6132030A (en) * | 1996-04-19 | 2000-10-17 | Lexmark International, Inc. | High print quality thermal ink jet print head |
| US5872582A (en) * | 1996-07-02 | 1999-02-16 | Hewlett-Packard Company | Microfluid valve for modulating fluid flow within an ink-jet printer |
| US6183067B1 (en) * | 1997-01-21 | 2001-02-06 | Agilent Technologies | Inkjet printhead and fabrication method for integrating an actuator and firing chamber |
| US5900892A (en) * | 1997-03-05 | 1999-05-04 | Xerox Corporation | Nozzle plates for ink jet cartridges |
| US6158843A (en) * | 1997-03-28 | 2000-12-12 | Lexmark International, Inc. | Ink jet printer nozzle plates with ink filtering projections |
| US6179414B1 (en) * | 1997-04-04 | 2001-01-30 | Hewlett-Packard Company | Ink delivery system for an inkjet printhead |
| US6019907A (en) * | 1997-08-08 | 2000-02-01 | Hewlett-Packard Company | Forming refill for monolithic inkjet printhead |
| US6155675A (en) | 1997-08-28 | 2000-12-05 | Hewlett-Packard Company | Printhead structure and method for producing the same |
| US6062679A (en) * | 1997-08-28 | 2000-05-16 | Hewlett-Packard Company | Printhead for an inkjet cartridge and method for producing the same |
| US6179413B1 (en) | 1997-10-31 | 2001-01-30 | Hewlett-Packard Company | High durability polymide-containing printhead system and method for making the same |
| US6209203B1 (en) * | 1998-01-08 | 2001-04-03 | Lexmark International, Inc. | Method for making nozzle array for printhead |
| US6371600B1 (en) | 1998-06-15 | 2002-04-16 | Lexmark International, Inc. | Polymeric nozzle plate |
| ITTO980592A1 (it) | 1998-07-06 | 2000-01-06 | Olivetti Lexikon Spa | Testina di stampa a getto di inchiostro con piastrina di silicio di grandi dimensioni e relativo processo di fabbricazione |
| JP3445501B2 (ja) * | 1998-09-04 | 2003-09-08 | 日立ソフトウエアエンジニアリング株式会社 | シート状部材積層体及びシート状プローブ保持体の製造方法 |
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-
1992
- 1992-04-02 US US07/864,889 patent/US5305015A/en not_active Expired - Lifetime
- 1992-12-02 CA CA002084390A patent/CA2084390C/en not_active Expired - Lifetime
-
1993
- 1993-03-08 DE DE69310598T patent/DE69310598T2/de not_active Expired - Lifetime
- 1993-03-08 EP EP93301707A patent/EP0564101B1/en not_active Expired - Lifetime
- 1993-03-08 ES ES93301707T patent/ES2101224T3/es not_active Expired - Lifetime
- 1993-03-30 JP JP09536793A patent/JP3297136B2/ja not_active Expired - Lifetime
- 1993-04-01 KR KR1019930005503A patent/KR100225704B1/ko not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR100225704B1 (ko) | 1999-10-15 |
| KR930021388A (ko) | 1993-11-22 |
| CA2084390C (en) | 2003-09-16 |
| EP0564101A3 (enExample) | 1994-04-06 |
| DE69310598D1 (de) | 1997-06-19 |
| DE69310598T2 (de) | 1997-10-02 |
| EP0564101A2 (en) | 1993-10-06 |
| JPH0615829A (ja) | 1994-01-25 |
| CA2084390A1 (en) | 1993-10-03 |
| US5305015A (en) | 1994-04-19 |
| EP0564101B1 (en) | 1997-05-14 |
| ES2101224T3 (es) | 1997-07-01 |
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