JP3281784B2 - Ultrasonic probe manufacturing method - Google Patents

Ultrasonic probe manufacturing method

Info

Publication number
JP3281784B2
JP3281784B2 JP34980995A JP34980995A JP3281784B2 JP 3281784 B2 JP3281784 B2 JP 3281784B2 JP 34980995 A JP34980995 A JP 34980995A JP 34980995 A JP34980995 A JP 34980995A JP 3281784 B2 JP3281784 B2 JP 3281784B2
Authority
JP
Japan
Prior art keywords
lens
probe
main body
acoustic lens
probe main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP34980995A
Other languages
Japanese (ja)
Other versions
JPH09172698A (en
Inventor
光浩 藤原
和冶 梅田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP34980995A priority Critical patent/JP3281784B2/en
Publication of JPH09172698A publication Critical patent/JPH09172698A/en
Application granted granted Critical
Publication of JP3281784B2 publication Critical patent/JP3281784B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は超音波探触子の製造方法
を利用分野とし、特に音響レンズの被着方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an ultrasonic probe, and more particularly to a method of attaching an acoustic lens.

【0002】[0002]

【従来の技術】[Prior art]

「発明の背景」超音波探触子は、例えば医用の超音波診
断装置に、超音波の送受波部として有用されている。例
えば短冊状とした微小幅の圧電素子をその幅方向に並
べ、同方向にリニアあるいはセクタ駆動する。このよう
なものでは、一般に圧電素子の長さ方向に音響レンズを
設け、同方向での分解能を高めるようにしている。
[Background of the Invention] An ultrasonic probe is used, for example, in a medical ultrasonic diagnostic apparatus as an ultrasonic wave transmitting / receiving unit. For example, strip-shaped piezoelectric elements of minute width are arranged in the width direction, and linear or sector drive is performed in the same direction. In such a device, an acoustic lens is generally provided in the length direction of the piezoelectric element so as to increase the resolution in the same direction.

【0003】「従来技術の一例」第3図乃至第5図はこ
の種の従来例を説明する配列型探触子の図で、第3図は
概略の正断面図、第4図は側断面図、第5図は音響レン
ズの図である。超音波探触子は、探触子本体1、音響レ
ンズ2及びケース3からなる。探触子本体1はバッキン
グ材4上にPZT(ジルコン酸チタン酸鉛)等からなる
短冊状の圧電素子5を幅方向に並べて形成される。例え
ばフレキシブル基板6(ab)が両側に接続された圧電
板をバッキング材4に固着した後、図示しない一定の間
隔で設けられた導電路間のピッチで圧電板上からバッキ
ング材4に到達する切れ目を設けて切断される。但し、
圧電板(圧電素子5)両主面には電極(未図示)を有す
る。そして、各溝7に充填材を埋設し、圧電素子5の前
面に音響整合層8を形成する。さらに、音響整合層8、
圧電素子5、バッキング材4の側面に保護モールド層9
を設ける。この際、フレキシブル基板6(ab)を保護
モールド層9中に埋設させて固定する。すなわち、探触
子本体1は一つの個体化された素子いわば探触子ユニッ
トとなる。
FIGS. 3 to 5 are views of an array-type probe for explaining a conventional example of this type. FIG. 3 is a schematic front sectional view, and FIG. 4 is a side sectional view. FIG. 5 is a diagram of the acoustic lens. The ultrasonic probe includes a probe main body 1, an acoustic lens 2, and a case 3. The probe main body 1 is formed by arranging strip-shaped piezoelectric elements 5 made of PZT (lead zirconate titanate) on the backing material 4 in the width direction. For example, after the flexible board 6 (ab) is fixed to the backing material 4 with the piezoelectric plate connected to both sides, a cut that reaches the backing material 4 from above the piezoelectric plate at a pitch between conductive paths provided at regular intervals (not shown). And cut. However,
Both main surfaces of the piezoelectric plate (piezoelectric element 5) have electrodes (not shown). Then, a filler is buried in each groove 7, and an acoustic matching layer 8 is formed on the front surface of the piezoelectric element 5. Further, the acoustic matching layer 8,
Protective mold layer 9 on the side of piezoelectric element 5 and backing material 4
Is provided. At this time, the flexible substrate 6 (ab) is embedded and fixed in the protective mold layer 9. That is, the probe main body 1 is a single unitized element, that is, a probe unit.

【0004】音響レンズ2はレンズ部と脚部とからな
る。レンズ部は圧電素子5の長さ方向に凸状の曲率を有
し、脚部はレンズの外周から垂直方向延出する。一般に
は、シリコン樹脂等からなり、成型加工により一体的に
形成される。そして、このような音響レンズ2を探触子
本体1上から被せてなる。すなわち、レンズ部を探触子
本体1上とし、脚部を探触子本体1の側面とし、接着剤
等により固着される。なお、説明の便宜上、音響レンズ
2を設けた探触子本体1をレンズ付探触子本体とする。
[0004] The acoustic lens 2 includes a lens portion and a leg portion. The lens portion has a convex curvature in the length direction of the piezoelectric element 5, and the leg portion extends vertically from the outer periphery of the lens. Generally, it is made of silicon resin or the like, and is integrally formed by molding. Then, such an acoustic lens 2 is covered from above the probe main body 1. That is, the lens part is on the probe main body 1 and the leg part is on the side surface of the probe main body 1, and is fixed with an adhesive or the like. For convenience of explanation, the probe main body 1 provided with the acoustic lens 2 is referred to as a probe main body with a lens.

【0005】ケース3は合成樹脂等からなり、例えば先
端側に肉厚のある開口壁面を有する。開口壁面は音響レ
ンズ2の脚部間の外形寸法に一致し、開口壁面から段差
をもって開口面より内径を大きくする。そして、レンズ
付探触子本体のレンズ部を開口面から突出させて位置決
めし、レンズ付き探触子本体とケース3の間隙に図示し
ない充填剤を設けて一体化させる。
[0005] The case 3 is made of a synthetic resin or the like, and has a thick opening wall surface on the tip side, for example. The opening wall surface matches the outer dimension between the legs of the acoustic lens 2 and has a step from the opening wall surface to make the inner diameter larger than the opening surface. Then, the lens portion of the lens-equipped probe main body is positioned so as to protrude from the opening surface, and a filler (not shown) is provided in the gap between the lens-equipped probe main body and the case 3 to be integrated.

【0006】このようなものでは、超音波探触子の前面
(音響レンズ2側)を生体等に擦りつけながら押圧して
超音波を送受する。この際、音響レンズ2の脚部が探触
子本体1の側面にも設けられているので、レンズ部が横
方向にズレルことを防止する。すなわち、レンズ部の接
着剤による強度を脚部が補強し、ズレや剥離を防止す
る。したがって、超音波特性を良好に維持する。
In such a device, the front surface (the acoustic lens 2 side) of the ultrasonic probe is pressed while rubbing against a living body or the like to transmit and receive ultrasonic waves. At this time, since the leg portion of the acoustic lens 2 is also provided on the side surface of the probe main body 1, it is possible to prevent the lens portion from shifting in the lateral direction. That is, the leg portion reinforces the strength of the lens portion by the adhesive, and prevents displacement and peeling. Therefore, good ultrasonic characteristics are maintained.

【0007】[0007]

【発明が解決しようとする課題】[Problems to be solved by the invention]

「従来技術の問題点」しかしながら、上記構成の超音波
探触子では、レンズ部の長さは圧電素子5のそれに基本
的に一致させて形成されるが、脚部の内径は探触子本体
1の外形寸法に一致させる。また、脚部の外形はケース
3の内径に一致させる。したがって、圧電素子5の長さ
が一定でも、探触子本体1の外形及びケース3の内径が
異なる場合には、その度毎に、音響レンズ2を形成しな
ければならず、汎用性に欠ける問題があった。
"Problems of the prior art" However, in the ultrasonic probe having the above-described configuration, the length of the lens portion is basically made to match that of the piezoelectric element 5, but the inner diameter of the leg portion is not 1 to the outside dimensions. The outer shape of the leg portion is made to match the inner diameter of the case 3. Therefore, even if the length of the piezoelectric element 5 is constant, if the outer shape of the probe main body 1 and the inner diameter of the case 3 are different, the acoustic lens 2 must be formed each time, and the versatility is lacking. There was a problem.

【0008】なお、探触子本体1の外形形状及び寸法
は、体表面あるいは体腔内用等の用途やケース3の内径
形状等によって、さらには電極導出方法によって基本的
に決定される。例えば体表面から超音波を送受する場合
にはケース3及びこれによる探触子本体1の外形は一般
に大きく、体腔内に挿入する場合には同外形は小さく設
定される。また、銀箔等により電極を導出した場合に
は、フレキシブル基板より撓みがないので、保護モール
ドの厚みは小さくなる。このようなことから、音響レン
ズ2の脚部間の内外径あるいは形状は、圧電素子5の長
さから一義的に決定できないことになる。
Note that the outer shape and dimensions of the probe main body 1 are basically determined by the use such as for a body surface or a body cavity, the inner diameter shape of the case 3 and the like, and also by the electrode leading-out method. For example, when transmitting and receiving ultrasonic waves from the body surface, the outer shape of the case 3 and the probe main body 1 formed thereby is generally large, and when inserted into a body cavity, the outer shape is set small. Further, when the electrodes are led out of silver foil or the like, the thickness of the protective mold is reduced because the electrodes are not bent more than the flexible substrate. For this reason, the inner and outer diameters or shapes between the legs of the acoustic lens 2 cannot be uniquely determined from the length of the piezoelectric element 5.

【0009】「発明の課題及び目的」本発明は圧電素子
の長さが同等であって、ケース3の内径や探触子本体の
外形が異なっても、如何に共用性のある音響レンズを製
作するかが解決課題であり、汎用性に優れた音響レンズ
を有する超音波探触子の製造方法を提供することを目的
とする。
[Problem and Object of the Invention] The present invention is to produce an acoustic lens that can be used in common even if the lengths of the piezoelectric elements are equal and the inner diameter of the case 3 and the outer shape of the probe body are different. It is an object of the present invention to provide a method for manufacturing an ultrasonic probe having an acoustic lens with excellent versatility.

【0010】[0010]

【課題を解決するための手段】[Means for Solving the Problems]

「着目点」本発明では、音響レンズの脚部は非常に薄く
て弾性を有する点に着目した。
"Points of Interest" In the present invention, attention was paid to the point that the legs of the acoustic lens are very thin and have elasticity.

【0011】「解決手段」本発明は、曲率を有するレン
ズ部と外周に延出した平坦部とからなるシート状の音響
レンズを形成し、レンズ部を探触子本体1上に固着した
後、平坦部を探触子の側面に折曲したことを解決手段と
する。
According to the present invention, a sheet-like acoustic lens comprising a lens portion having a curvature and a flat portion extending to the outer periphery is formed, and the lens portion is fixed on the probe main body 1. The solution is that the flat portion is bent to the side surface of the probe.

【0012】[0012]

【作用】本発明では、音響レンズをシート状としてレン
ズ部を固着した後、平坦部を折り曲げるので、音響レン
ズの脚部を予め形成する必要のない作用がある。以下、
本発明の一実施例を説明する。
According to the present invention, since the acoustic lens is formed into a sheet shape and the lens portion is fixed, and then the flat portion is bent, there is no need to previously form the leg portion of the acoustic lens. Less than,
An embodiment of the present invention will be described.

【0013】[0013]

【実施例】第1図は、本発明の一実施例(製造方法)を
説明する超音波探触子の一部断面図である。なお、前従
来例図と同一部分には、同番号を付与してその説明は省
略する。超音波探触子は、前述したように探触子本体
1、音響レンズ2及びケース3からなる(前第3、4図
参照)。探触子本体1は前述同様にバッキング材4上に
圧電素子5及び音響整合層が積層され、両側面からフレ
キシブル基板6(ab)が延出して、保護モールド層9
が設けられた探触子本体1からなる。
FIG. 1 is a partial sectional view of an ultrasonic probe for explaining one embodiment (manufacturing method) of the present invention. The same parts as those in the prior art are denoted by the same reference numerals and description thereof will be omitted. The ultrasonic probe includes the probe main body 1, the acoustic lens 2, and the case 3 as described above (see FIGS. 3 and 4). The probe body 1 has the piezoelectric element 5 and the acoustic matching layer laminated on the backing material 4 in the same manner as described above, and the flexible substrate 6 (ab) extends from both sides to form the protective mold layer 9.
Is provided with the probe main body 1.

【0014】そして、この実施例では、音響レンズ2
は、先ずレンズ部2aと平坦部2cからなるシート状に
形成される。但し、音響レンズ2は前同様のシリコン材
とし、成型加工等により形成される。レンズ部2aは圧
電素子5の長さに一致して曲率を有し、平坦部2cはレ
ンズ部2aの外周に平面上に設けられる。そして、レン
ズ部2aを圧電素子5に一致させ、探触子本体1上に固
着してレンズ付き探触子本体を形成する。そして、例え
ば、平坦部を2cその弾性により探触子本体1の側面に
折曲して固着する。
In this embodiment, the acoustic lens 2
Is first formed in a sheet shape including a lens portion 2a and a flat portion 2c. However, the acoustic lens 2 is made of the same silicon material as before, and is formed by molding or the like. The lens portion 2a has a curvature corresponding to the length of the piezoelectric element 5, and the flat portion 2c is provided on the outer surface of the lens portion 2a on a plane. Then, the lens portion 2a is made to coincide with the piezoelectric element 5 and is fixed on the probe main body 1 to form a probe main body with a lens. Then, for example, the flat portion 2c is bent and fixed to the side surface of the probe main body 1 by its elasticity.

【0015】その後は、前述したように、レンズ付探触
子本体のレンズ部2aをケース3の開口面から突出させ
て位置決めする。そして、レンズ付き探触子本体とケー
ス3の間隙に充填剤を設けて一体化させる。
Thereafter, as described above, the lens portion 2a of the lens-equipped probe main body is positioned so as to protrude from the opening surface of the case 3. Then, a filler is provided in the gap between the probe main body with lens and the case 3 to be integrated.

【0016】このような構成(製造方法)であれば、音
響レンズ2をシート状として、レンズ部2aの固着後に
平坦部2cを折り曲げるので、音響レンズ2の脚部2b
を予め成型により形成する必要がない。したがって、ケ
ース3あるいは電極導出方法によって、探触子本体1の
外形形状及び寸法が異なったとしても、圧電素子5の長
さがほぼ一定であれば、同一形状としたシート状の音響
レンズ2を共用できる。
With such a configuration (manufacturing method), the acoustic lens 2 is formed into a sheet shape, and the flat portion 2c is bent after the lens portion 2a is fixed.
Need not be formed in advance by molding. Therefore, even if the external shape and dimensions of the probe main body 1 are different depending on the case 3 or the electrode deriving method, if the length of the piezoelectric element 5 is substantially constant, the sheet-shaped acoustic lens 2 having the same shape can be used. Can be shared.

【0017】[0017]

【他の事項】上記実施例では、レンズ付き探触子本体の
側面に音響レンズ2の平坦部2cを折曲して固着し、ケ
ース3に収容したが、必ずしもこれに限る必要はない。
例えばレンズ付き探触子本体をケース3の後端側等から
挿入して、レンズ部2aを開口面から突出させる際の開
口壁面からの押圧力より、平坦部2cを折り曲げる。そ
の後、レンス付き探触子本体とケース3との間に充填剤
を設けるようにしてもよい。なお、平坦部2cの厚みは
小さく(例えば0.5mm以下)て、ゴム性が強いため
に折曲時の捻れ等は格別に問題にはならない。
In the above embodiment, the flat portion 2c of the acoustic lens 2 is bent and fixed to the side surface of the lens-equipped probe main body, and is housed in the case 3. However, the present invention is not limited to this.
For example, the probe body with lens is inserted from the rear end side of the case 3 or the like, and the flat portion 2c is bent by the pressing force from the opening wall surface when the lens portion 2a is projected from the opening surface. After that, a filler may be provided between the probe body with lens and the case 3. Note that the flat portion 2c has a small thickness (for example, 0.5 mm or less) and has a strong rubber property, so that twisting at the time of bending does not cause any particular problem.

【0018】また、探触子本体1の側面に設けた保護モ
ールド層9は予め設けるのでなく、保護モールド層9の
ないレンズ付き探触子本体をケース3に収容した後、充
填剤を設けることにより一体的に形成したとしてもよ
い。また、電極はフレキシブル基板6(ab)により導
出したが、これに限らず銀箔等であってもよい。
Also, the protective mold layer 9 provided on the side surface of the probe body 1 is not provided in advance, but the probe body with lens without the protective mold layer 9 is accommodated in the case 3 and then the filler is provided. It may be formed integrally by Although the electrodes are led out by the flexible substrate 6 (ab), the electrodes are not limited to this and may be silver foil or the like.

【0019】さらには、音響レンズ2の平坦部2cの角
部等には切欠部や切込みを設け、折り曲げをさらに容易
にするようにしてもよく、本願発明はその趣旨を逸脱し
ない範囲内で適宜変更でき、要はシート状とした音響レ
ンズ2のレンズ部2aを固着した後、平坦部2cを折り
曲げるようにして製造した超音波探触子は本願発明の技
術的範囲に属する。
Further, notches or cuts may be provided at the corners of the flat portion 2c of the acoustic lens 2 so as to make the bending easier, and the present invention is appropriately performed without departing from the spirit of the present invention. The ultrasonic probe manufactured by fixing the lens portion 2a of the sheet-shaped acoustic lens 2 and then bending the flat portion 2c is within the technical scope of the present invention.

【0020】[0020]

【発明の効果】本発明は、曲率を有するレンズ部と外周
に延出した平坦部とからなるシート状の音響レンズを形
成し、レンズ部を探触子本体上に固着した後、平坦部を
探触子本体の側面に折曲したので、汎用性に優れた音響
レンズを有する超音波探触子の製造方法を提供でき、そ
の実際的なメリットは大きい。
According to the present invention, a sheet-like acoustic lens comprising a lens portion having a curvature and a flat portion extending to the outer periphery is formed, and after fixing the lens portion on the probe main body, the flat portion is formed. Since the probe is bent on the side surface of the probe main body, a method for manufacturing an ultrasonic probe having an acoustic lens with excellent versatility can be provided, and the practical advantage is great.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の製造方法を説明する超音波探触子(レ
ンズ付き探触子本体)の断面図である。
FIG. 1 is a cross-sectional view of an ultrasonic probe (probe main body with lens) for explaining a manufacturing method of the present invention.

【図2】本発明に採用する音響レンズの図である。FIG. 2 is a diagram of an acoustic lens employed in the present invention.

【図3】従来例を説明する超音波探触子の一部正断面図
である。
FIG. 3 is a partial front sectional view of an ultrasonic probe illustrating a conventional example.

【図4】従来例を説明する超音波探触子の一部側断面図
である。
FIG. 4 is a partial side sectional view of an ultrasonic probe explaining a conventional example.

【図5】従来例を説明する音響レンズの図である。FIG. 5 is a diagram of an acoustic lens for explaining a conventional example.

【符号の説明】[Explanation of symbols]

1探触子本体、2 音響レンズ、3 ケース、4 バッ
キング材、5 圧電素子、6 フレキシブル基板、7
溝、8 音響整合層、9 保護モールド層.
1 probe body, 2 acoustic lens, 3 case, 4 backing material, 5 piezoelectric element, 6 flexible substrate, 7
Groove, 8 acoustic matching layer, 9 protective mold layer.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H04R 17/00 332 A61B 8/00 G01N 29/24 H04R 1/34 330 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) H04R 17/00 332 A61B 8/00 G01N 29/24 H04R 1/34 330

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】バッキング材上に複数の圧電素子を幅方向
に並べて形成された探触子本体と、前記探触子本体の前
面に当接して前記圧電素子の長さ方向に曲率を有するレ
ンズ部と前記探触子本体の側面に当接する脚部からなる
音響レンズとからなる超音波探触子の製造方法におい
て、前記音響レンズをレンズ部と該レンズ部の外周に延
出した平坦部とからなるシート状とし、前記音響レンズ
のレンズ部を上記探触子本体上に固着した後、前記平坦
部を上記探触子本体の側面に折曲して構成したことを特
徴とする超音波探触子製造方法。
1. A probe body formed by arranging a plurality of piezoelectric elements on a backing material in a width direction, and a lens having a curvature in a longitudinal direction of the piezoelectric element in contact with a front surface of the probe body. In the method of manufacturing an ultrasonic probe comprising a portion and an acoustic lens composed of a leg portion abutting on a side surface of the probe main body, the acoustic lens includes a lens portion and a flat portion extending around the outer periphery of the lens portion. An ultrasonic lens, wherein after fixing the lens portion of the acoustic lens on the probe main body, the flat portion is bent to a side surface of the probe main body. Contactor manufacturing method.
JP34980995A 1995-12-20 1995-12-20 Ultrasonic probe manufacturing method Expired - Fee Related JP3281784B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34980995A JP3281784B2 (en) 1995-12-20 1995-12-20 Ultrasonic probe manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34980995A JP3281784B2 (en) 1995-12-20 1995-12-20 Ultrasonic probe manufacturing method

Publications (2)

Publication Number Publication Date
JPH09172698A JPH09172698A (en) 1997-06-30
JP3281784B2 true JP3281784B2 (en) 2002-05-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP3281784B2 (en)

Also Published As

Publication number Publication date
JPH09172698A (en) 1997-06-30

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